CN102136406B - Small condenser for electron microscope - Google Patents
Small condenser for electron microscope Download PDFInfo
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- CN102136406B CN102136406B CN2011100321121A CN201110032112A CN102136406B CN 102136406 B CN102136406 B CN 102136406B CN 2011100321121 A CN2011100321121 A CN 2011100321121A CN 201110032112 A CN201110032112 A CN 201110032112A CN 102136406 B CN102136406 B CN 102136406B
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- pole shoe
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Abstract
The invention discloses a small condenser for an electron microscope, belonging to the field of electron microscopes. The condenser is characterized in that a lower pole shoe is a cylinder with an opening at the upper end; a flange is arranged outside the opening at the upper end of the cylinder; a conical bottom is arranged at the lower end of the cylinder and is provided with an electron beam through hole; an upper pole shoe is a hollow cylinder; a ring-shaped convex plate is arranged at the lower end of the upper pole shoe; the upper pole shoe is arranged in the lower pole shoe; a magnetic circuit coil pack is formed by sleeving a ring-shaped coil on a coil cylinder rack; the coil cylinder rack is a hollow cylinder; baffles for fixing the ring-shaped coil are arranged at the two ends of the cylinder; the magnetic circuit coil pack is sleeved on the upper pole shoe in the lower pole shoe and is arranged between the upper pole shoe and the lower pole shoe; the bottom end of the magnetic circuit coil pack is arranged on the ring-shaped convex plate of the upper pole shoe via a coil base plate; the flange outside the opening at the upper end of the lower pole shoe is provided with a space ring which can cover the parts in the lower pole shoe; the space ring is fixedly connected with the lower pole shoe; and a through hole is arranged in the center of the space ring. The small condenser has simple structure and is convenient to use.
Description
Technical field
The present invention relates to little the condenser parts, particularly reference of electron microscope and a kind ofly be applicable to that the imaging with second condenser of electron microscope is focused at the little condenser on the sample plane by a certain direction.
Background technology
Electron microscope is a kind of important instrument that can observe small material, and people utilize it can observe the material below the 0.25nm.Electron microscope as lighting source, with magnetic lens or the electrostatic lens device as the deflection electronics, realizes that optics amplifies with electron beam.Electron microscope has very application prospects in the army and the people fields such as physics, chemistry, material, scientific research, life science, geology, mine locating, mechanical industry, electronics industries.
Electron microscope is radiated on the sample through electron beam, realizes the observation to sample.Electron gun and condenser are the illuminators of electron microscope.Electronic Speculum requires condenser that the electron beam of high-high brightness can be provided, and the electron beam aperture that is radiated on the sample must be able to be regulated within the specific limits, and the big I of illuminated spot is selected on demand.Condenser is to be imaged onto on the sample as the object of imaging with the crosspoint of electron gun, it is generally acknowledged that crossover of electron gun, is of a size of tens microns.In order to keep certain height and to be limited in beam spot to the influence of sample heating minimumly, the bundle spot that requires the sample place is several microns, and to this, condenser must dwindle beam spot.Little condenser is formed the optical collector structure of electron microscope with first condenser, second condenser, and the electron beam that electron gun is penetrated is focused on the sample plane by a certain direction.
Summary of the invention
Embodiment of the present invention provides a kind of little condenser of electron microscope, through changing the electric current of little condenser coil, change the formed magnetic field intensity of lens, thereby the picture that guarantees second condenser is focused on the sample plane by a certain direction.
The objective of the invention is to realize through following technical proposals:
Embodiment of the present invention provides a kind of little condenser of electron microscope, comprising:
Upper and lower pole shoe, magnetic circuit coil assembly, spacer ring, coil backing plate;
Following pole shoe is the cylinder of open upper end, and cylinder open upper end outer edge is provided with the flange that connects usefulness, and the lower end is provided with conical bottom, and conical bottom is provided with electron beam through-hole;
Last pole shoe is the cylinder of hollow, and last pole shoe lower end is provided with annular boss, and last pole shoe is arranged on down in the pole shoe;
The magnetic circuit coil assembly is sleeved on the coil tube frame by loop coil and constitutes, and the coil tube frame is a hollow cylindrical body, and the cylinder two ends are provided with the baffle plate of stationary annular coil;
The magnetic circuit coil assembly is sleeved on down on the last pole shoe in the pole shoe, is folded between the upper and lower pole shoe, and magnetic circuit coil assembly bottom is arranged on the annular boss of pole shoe through the coil backing plate;
The spacer ring that can cover down each parts in the pole shoe is set on the flange of the open upper end of following pole shoe, and spacer ring is fixedly connected with following pole shoe, and the centre of spacer ring is provided with through hole.
The said pole shoe bottom of going up is provided with conical bottom, and the most advanced and sophisticated position of conical bottom is provided with electron beam through-hole, and said through hole is coaxial with the electron beam through-hole of following pole shoe bottom behind the pole shoe under last pole shoe is encased in.
Be provided with the O RunddichtringO between the flange at said spacer ring and following pole shoe open upper end place, the O RunddichtringO is embedded in the sealing ring annular groove that is provided with on the flange.
Be provided with screw hole around the through hole on the said spacer ring;
The said barrel of going up the cylinder of pole shoe upper end is provided with screw hole, is provided with screw in the screw hole;
Screw hole on the said upward pole shoe is corresponding one by one with the screw hole on the said spacer ring, after said spacer ring lid is contained in down on the pole shoe, through the screw in the screw hole on the last pole shoe, pole shoe is fixedly connected with spacer ring.
Said little condenser also comprises: water jacket assembly, be arranged on the said spacer ring, and can cool off the heat that said magnetic circuit coil assembly produces when work.
Loop coil in the said magnetic circuit coil assembly is pagoda shape.
Technical scheme through embodiment of the present invention provides can be found out; In the embodiment of the present invention through between upper and lower pole shoe, coil block being set; Thereby can be through changing toroidal electric current in the coil block; Change the formed magnetic field intensity of lens, thereby when guaranteeing to be applied in the electron microscope, the picture of second condenser is focused on the sample plane through this little condenser the time by a certain direction.This little condenser has simple in structure, easy to use, can be easily through regulating the convergence of picture on sample plane of toroidal Current Control second condenser.
Description of drawings
The structural representation of the little condenser that Fig. 1 provides for the embodiment of the invention;
The main TV structure sketch map of the little condenser that Fig. 2 provides for the embodiment of the invention;
Another angle perspective view of the little condenser that Fig. 3 provides for the embodiment of the invention;
The explosive decomposition structural representation of the little condenser that Fig. 4 provides for the embodiment of the invention;
The generalized section of the little condenser that Fig. 5 provides for the embodiment of the invention;
The structural representation of the following pole shoe of the little condenser that Fig. 6 provides for the embodiment of the invention;
The structural representation of the last pole shoe of the little condenser that Fig. 7 provides for the embodiment of the invention;
The cross-sectional view of the last pole shoe of the little condenser that Fig. 8 provides for the embodiment of the invention;
The structural representation of the magnetic circuit coil assembly of the little condenser that Fig. 9 provides for the embodiment of the invention;
The structural representation of the spacer ring of the little condenser that Figure 10 provides for the embodiment of the invention;
The structural representation of the coil backing plate of the little condenser that Figure 11 provides for the embodiment of the invention;
The structural representation of the water jacket assembly of the little condenser that Figure 12 provides for the embodiment of the invention;
Each label is among the figure: pole shoe under the 1-; The 11-conical bottom; The 12-electron beam through-hole; The 13-flange; 14-sealing ring annular groove; The last pole shoe of 2-; The 21-annular boss; The 22-screw hole; The 23-conical bottom; The 24-electron beam through-hole; 3-magnetic circuit coil assembly; The 31-loop coil; 32-coil tube frame; The 33-baffle plate; The 4-spacer ring; The 41-through hole; The 42-screw hole; 5-coil backing plate; The 6-O RunddichtringO; The 7-water jacket assembly.
Embodiment
Below in conjunction with specific embodiment the present invention is described further.
Embodiment of the present invention provides a kind of little condenser of electron microscope; Be used in the electron microscope; Cooperate with first condenser, second condenser; The picture that can control second condenser is focused on the sample plane by a certain direction, and shown in Fig. 1～5, this little condenser specifically comprises: upper and lower pole shoe 1,2, magnetic circuit coil assembly 3, spacer ring 4, coil backing plate 5;
Wherein, as shown in Figure 6, following pole shoe 1 is the cylinder of open upper end, and cylinder open upper end outer edge is provided with the flange 13 that connects usefulness, and the lower end is provided with conical bottom 11, and conical bottom 11 is provided with electron beam through-hole 12;
As shown in Figure 7, last pole shoe 2 is the cylinder of hollow, and last pole shoe lower end is provided with annular boss 21, and last pole shoe 2 is arranged on down in the pole shoe 1;
In the above-mentioned little condenser; Last pole shoe 2 bottoms are provided with conical bottom 23; The most advanced and sophisticated position of conical bottom 23 is provided with electron beam through-hole 24 (seeing shown in Figure 8), and behind the pole shoe 1, the electron beam through-hole 24 of last pole shoe 2 bottoms is coaxial with the electron beam through-hole 12 of following pole shoe 1 bottom under last pole shoe 2 is encased in.
As shown in Figure 9, magnetic circuit coil assembly 3 is sleeved on the coil tube frame 32 by loop coil 31 and constitutes, and coil tube frame 32 is a hollow cylindrical body, and the cylinder two ends are provided with the baffle plate 33 of stationary annular coil 31; Loop coil setting in the magnetic circuit coil assembly 3 is pagoda shape.
Magnetic circuit coil assembly 3 is sleeved on down on the last pole shoe 2 in the pole shoe 1, is folded in upper and lower pole shoe 1, between 2, and magnetic circuit coil assembly 3 bottoms can be arranged on the annular boss 21 of pole shoe 2 through coil backing plate 5;
The spacer ring 4 that can cover down each parts in the pole shoe is set on the flange 13 of the open upper end of following pole shoe 1, and spacer ring 4 is fixedly connected with following pole shoe 1, and shown in figure 10, the centre of spacer ring 4 is provided with through hole 41.
In the above-mentioned little condenser; Between the flange 13 at spacer ring 4 and following pole shoe 1 open upper end place, can be provided with O RunddichtringO 6; O RunddichtringO 6 can be embedded in the sealing ring annular groove 14 that is provided with on the flange 13 sealing effectiveness between increasing spacer ring 4 and following pole shoe 1 being connected.
In the above-mentioned little condenser, also be provided with screw hole 42 around the through hole on spacer ring 4; Also be provided with screw hole 22 on the barrel of the cylinder of last pole shoe 2 upper ends, a plurality of screw holes 22 can be set, in the screw hole 22 screw can be set; Screw hole 22 on the last pole shoe 2 is corresponding one by one with screw hole 42 on the said spacer ring 4; After said spacer ring 4 lids are contained on the following pole shoe 1; Screw through in the screw hole on the last pole shoe 2 22 makes pole shoe 2 be fixedly connected with spacer ring 4, after promptly spacer ring 4 lids are contained in down on the pole shoe 1; Spacer ring 4 is connected with following pole shoe 1 interior last pole shoe 2 upper ends with the flange 13 of following pole shoe 1 upper end respectively, has guaranteed the relative steadiness of upper and lower pole shoe 1,2 positions.
Shown in figure 12, in the above-mentioned little condenser water jacket assembly 7 can also be set, can be arranged on above the said spacer ring 4, operated by rotary motion is below the upper cover plate of the sample room of electron microscope, and this water jacket assembly 7 can cool off the heat that produces when said magnetic circuit coil assembly 3 is worked.In the course of work, for the loop coil in the magnetic circuit coil assembly is lowered the temperature.
When above-mentioned little condenser is worked, when coil has electric current to pass through, form magnetic circuit between the upper and lower pole shoe, thereby the picture that guarantees second condenser of this little condenser of process is focused on the sample plane by a certain direction; During use, little condenser water jacket assembly is installed below the upper cover plate of sample room, is positioned at the top of magnetic circuit coil, through the fluent materials such as water of cooling usefulness are set in the water jacket assembly, but cooling magnetic circuit coil (loop coil) when work the heat that produces.
In sum; In the embodiment of the present invention through between upper and lower pole shoe, coil block being set; Thereby can be through changing toroidal electric current in the coil block; Change the formed magnetic field intensity of lens, thereby when guaranteeing to be applied in the electron microscope, the picture of second condenser is focused on the sample plane through this little condenser the time by a certain direction.This little condenser has simple in structure, easy to use, can be conveniently through regulating the convergence of picture on sample plane of toroidal Current Control second condenser.
The above; Be merely the preferable embodiment of the present invention, but protection scope of the present invention is not limited thereto, any technical staff who is familiar with the present technique field is in the technical scope that the present invention discloses; The variation that can expect easily or replacement all should be encompassed within protection scope of the present invention.Therefore, protection scope of the present invention should be as the criterion with the protection range of claims.
Claims (5)
1. the little condenser of an electron microscope is characterized in that, comprising:
Upper and lower pole shoe, magnetic circuit coil assembly, spacer ring, coil backing plate;
Following pole shoe is the cylinder of open upper end, and cylinder open upper end outer edge is provided with the flange that connects usefulness, and the lower end is provided with conical bottom, and conical bottom is provided with electron beam through-hole;
Last pole shoe is the cylinder of hollow, and last pole shoe lower end is provided with annular boss, and last pole shoe is arranged on down in the pole shoe;
The magnetic circuit coil assembly is sleeved on the coil tube frame by loop coil and constitutes, and the coil tube frame is a hollow cylindrical body, and the cylinder two ends are provided with the baffle plate of stationary annular coil;
The magnetic circuit coil assembly is sleeved on down on the last pole shoe in the pole shoe, is folded between the upper and lower pole shoe, and magnetic circuit coil assembly bottom is arranged on the annular boss of pole shoe through the coil backing plate;
The spacer ring that can cover down each parts in the pole shoe is set on the flange of the open upper end of following pole shoe, and spacer ring is fixedly connected with following pole shoe, and the centre of spacer ring is provided with through hole;
The said pole shoe bottom of going up is provided with conical bottom, and the most advanced and sophisticated position of conical bottom is provided with electron beam through-hole, and said through hole is coaxial with the electron beam through-hole of following pole shoe bottom behind the pole shoe under last pole shoe is encased in.
2. the little condenser of electron microscope according to claim 1 is characterized in that, is provided with the O RunddichtringO between the flange at said spacer ring and following pole shoe open upper end place, and the O RunddichtringO is embedded in the sealing ring annular groove that is provided with on the flange.
3. the little condenser of electron microscope according to claim 1 is characterized in that, is provided with screw hole around the through hole on the said spacer ring;
The said barrel of going up the cylinder of pole shoe upper end is provided with screw hole, is provided with screw in the screw hole;
Screw hole on the said upward pole shoe is corresponding one by one with the screw hole on the said spacer ring, after said spacer ring lid is contained in down on the pole shoe, through the screw in the screw hole on the last pole shoe, pole shoe is fixedly connected with spacer ring.
4. the little condenser of electron microscope according to claim 1 is characterized in that, said little condenser also comprises:
Water jacket assembly is arranged on the said spacer ring, can cool off the heat that said magnetic circuit coil assembly produces when work.
5. the little condenser of electron microscope according to claim 1 is characterized in that, the loop coil in the said magnetic circuit coil assembly is pagoda shape.
Priority Applications (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| CN2011100321121A CN102136406B (en) | 2011-01-28 | 2011-01-28 | Small condenser for electron microscope |
Applications Claiming Priority (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| CN2011100321121A CN102136406B (en) | 2011-01-28 | 2011-01-28 | Small condenser for electron microscope |
Publications (2)
| Publication Number | Publication Date |
|---|---|
| CN102136406A CN102136406A (en) | 2011-07-27 |
| CN102136406B true CN102136406B (en) | 2012-07-04 |
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| Application Number | Title | Priority Date | Filing Date |
|---|---|---|---|
| CN2011100321121A Active CN102136406B (en) | 2011-01-28 | 2011-01-28 | Small condenser for electron microscope |
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Families Citing this family (2)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| CN103198996B (en) * | 2013-03-18 | 2015-05-20 | 核工业理化工程研究院 | Vacuum device for controlling high frequency alternating magnetic field of high current electron beam |
| CN116092903A (en) * | 2021-05-27 | 2023-05-09 | 中科晶源微电子技术（北京）有限公司 | Centering mechanism and scanning electron microscope with same |
Citations (3)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| US20030006377A1 (en) * | 1998-05-14 | 2003-01-09 | Setsuo Nomura | Tandem acceleration electrostatic lens |
| CN101383261A (en) * | 2007-09-04 | 2009-03-11 | 采钰科技股份有限公司 | Scanning electron microscope |
| WO2009119504A1 (en) * | 2008-03-26 | 2009-10-01 | 株式会社堀場製作所 | Electrostatic lens for charged particle radiation |
-
2011
- 2011-01-28 CN CN2011100321121A patent/CN102136406B/en active Active
Patent Citations (3)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| US20030006377A1 (en) * | 1998-05-14 | 2003-01-09 | Setsuo Nomura | Tandem acceleration electrostatic lens |
| CN101383261A (en) * | 2007-09-04 | 2009-03-11 | 采钰科技股份有限公司 | Scanning electron microscope |
| WO2009119504A1 (en) * | 2008-03-26 | 2009-10-01 | 株式会社堀場製作所 | Electrostatic lens for charged particle radiation |
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| CN102136406A (en) | 2011-07-27 |
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Effective date of registration: 20210222 Address after: 215200 No. 666 Hu Xin Road, Wujiang economic and Technological Development Zone, Suzhou, Jiangsu Patentee after: Suzhou Bozhong Instrument Technology Co., Ltd Address before: 100083 No. 37, Haidian District, Beijing, Xueyuan Road Patentee before: BEIHANG University |