CN102163529B - Movable diaphragm device for condensing mirror of electron microscope - Google Patents
Movable diaphragm device for condensing mirror of electron microscope Download PDFInfo
- Publication number
- CN102163529B CN102163529B CN201110062041XA CN201110062041A CN102163529B CN 102163529 B CN102163529 B CN 102163529B CN 201110062041X A CN201110062041X A CN 201110062041XA CN 201110062041 A CN201110062041 A CN 201110062041A CN 102163529 B CN102163529 B CN 102163529B
- Authority
- CN
- China
- Prior art keywords
- diaphragm
- axle
- aperture
- adjusting handle
- sheet
- Prior art date
- Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
- Expired - Fee Related
Links
Images
Landscapes
- Microscoopes, Condenser (AREA)
Abstract
The invention discloses a movable diaphragm device for a condensing mirror of an electron microscope, belonging to the field of the electron microscopes. In the device, a positioning groove and a pressure sheet are arranged on a diaphragm frame, and a diaphragm sheet is pressed in the positioning groove through the pressure sheet; four through holes with different apertures are arranged on the diaphragm sheet as diaphragm holes; and the diaphragm frame is arranged at the front end of a diaphragm shaft of a diaphragm hole regulating device and can regulate the diaphragm shaft to select the diaphragm holes on the diaphragm sheet and perform precision adjustment in three spatial directions through a regulating handle, a tail cover screw cap and a fine adjustment device arranged on the diaphragm hole regulating device, thereby enabling the centers of the diaphragm holes to be positioned on an axial line of an electron beam. The device is simple in structure and convenient to select and position the through holes in the different apertures as the diaphragm holes, so that different lighting aperture angles can be further obtained, and a second condensing mirror to realize the purpose of providing the different lighting aperture angles against different samples.
Description
Technical field
The present invention relates to the Electron Microscopy field, the condenser that relates in particular to a kind of electron microscope is used movable aperture device.
Background technology
Electron microscope is a kind of important instrument that can observe small material, can observe the material below the 0.25nm.Electron microscope as lighting source, with magnetic lens or the electrostatic lens device as the deflection electronics, realizes that optics amplifies with electron beam.Electron microscope has very application prospects in the army and the people fields such as physics, chemistry, material, scientific research, life science, geology, mine locating, mechanical industry, electronics industries.
Electron microscope is radiated on the sample through electron beam, realizes the observation to sample, and electron gun and condenser are the illuminators of electron microscope.Electron microscope requires condenser that the electron beam of high-high brightness can be provided, and the electron beam aperture that is radiated on the sample must be able to be regulated within the specific limits, and the big I of illuminated spot is selected on demand.Condenser is to be imaged onto on the sample as the object of imaging with the point of crossing of electron gun, and general crossover of electron gun, is of a size of tens microns.In order to keep certain height and to be limited in beam spot to the influence of sample heating minimumly, the bundle spot that requires the sample place is several microns, and to this, condenser must dwindle beam spot.For the high performance electronic microscope, different samples requires that different bundle spot sizes is arranged, and should select different illuminating aperture angles to different samples, to this, has designed the second condenser device that can continuously change illuminating aperture angle.But how to obtain different illuminating aperture angles through second condenser, be the problem that a needs solves.
Summary of the invention
The purpose of embodiment of the present invention provides a kind of condenser of electron microscope and uses movable aperture device; Can be arranged on second condenser of electron microscope; Through selecting different apertures; Obtain different illuminating aperture angles, make second condenser realize different illuminating aperture angles being provided to different sample requirements.
The objective of the invention is to realize through following technical scheme:
Embodiment of the present invention provides a kind of condenser of electron microscope to use movable aperture device, comprising:
Diaphragm frame, diaphragm sheet, compressing tablet and aperture regulating device;
Said diaphragm frame is provided with locating slot and compressing tablet, and said diaphragm sheet is arranged in the said locating slot, and pushes down through said compressing tablet; Arrange on the said diaphragm sheet and be provided with the different through hole in four apertures as aperture;
Said aperture regulating device is provided with the diaphragm axle, and said diaphragm frame is arranged on said diaphragm axle front end, through the aperture regulating device regulate that said diaphragm axle is selected the aperture of the diaphragm sheet on the said diaphragm frame and three directions in space on the fine setting location;
Said aperture regulating device also is provided with adjusting handle, tail-hood nut and micromatic setting, and said diaphragm shaft rear end is provided with said adjusting handle, can protract under the control of said adjusting handle or after contract to different gears; Said tail-hood nut is positioned at the rear portion of said aperture regulating device, and said tail-hood nut is connected with said diaphragm shaft rear end through pull bar, can control the front and back position that said diaphragm axle is adjusted diaphragm sheet on the said diaphragm frame; Said diaphragm axle is corresponding with said micromatic setting; Under the control of said micromatic setting; Through adjusting said diaphragm axle the diaphragm sheet on the said diaphragm frame is carried out the position adjustment of level and vertical direction, the aperture center of the diaphragm sheet on the said diaphragm frame is on the axis of electron beam.
The movable aperture device that embodiment of the present invention provides; Be arranged on the front end of the diaphragm axle of aperture regulating device through diaphragm frame and compressing tablet as the diaphragm sheet of aperture through having four different apertures through holes; Thereby can select to use the aperture on the diaphragm sheet easily through the aperture regulating device; And accurate adjustment on three directions in space, the center of aperture is on the beam axis.This apparatus structure is simple, easy to operate; Good airproof performance; Be used in second condenser of electron microscope,, obtain different illuminating aperture angles through selecting different apertures; Make second condenser realize different illuminating aperture angles being provided, thereby improve the performance of electron microscope to different sample requirements.
Description of drawings
In order to be illustrated more clearly in the technical scheme of the embodiment of the invention; The accompanying drawing of required use is done to introduce simply in will describing embodiment below; Obviously, the accompanying drawing in describing below only is some embodiments of the present invention, for those of ordinary skill in the art; Under the prerequisite of not paying creative work, can also obtain other accompanying drawings according to these accompanying drawings.
The structural representation of the movable aperture device that Fig. 1 provides for the embodiment of the invention;
The structural representation of the diaphragm frame of the movable aperture device that Fig. 2 provides for the embodiment of the invention;
The structural representation of the diaphragm sheet of the movable aperture device that Fig. 3 provides for the embodiment of the invention;
The main TV structure synoptic diagram of the movable aperture device that Fig. 4 provides for the embodiment of the invention;
Fig. 5 is the A-A face sectional structure synoptic diagram of the movable aperture device of Fig. 4;
The backsight structural representation of the movable aperture device that Fig. 6 provides for the embodiment of the invention;
Another angle structural representation of the movable aperture device that Fig. 7 provides for the embodiment of the invention;
Fig. 8 is the B-B face sectional structure synoptic diagram of the movable aperture device of Fig. 7;
The structural representation of the bearing of the movable aperture device that Fig. 9 provides for the embodiment of the invention;
Figure 10 is connected synoptic diagram for the bearing of the movable aperture device that the embodiment of the invention provides with the semicircle piece of micromatic setting;
The structural representation that the diaphragm axle of the movable aperture device that Figure 11 provides for the embodiment of the invention cooperates with spring;
The structural representation of the adjusting handle of the movable aperture device that Figure 12 provides for the embodiment of the invention;
The structural representation of the spacing collar of the movable aperture device that Figure 13 provides for the embodiment of the invention;
Another angle structural representation of the spacing collar of the movable aperture device that Figure 14 provides for the embodiment of the invention;
Each label is among the figure: 1-aperture regulating device; The 100-bearing; 101-diaphragm axle, the 102-micromatic setting; The 103-adjusting handle; 104-scale ring; The 105-tail-hood; 106-tail-hood nut; The 107-axle sleeve; The 108-seal head; The 109-O-ring seal; The 1010-dog screw; The 1011-spacing collar; 1012-contact point O-ring seal; The 1013-buffer spring; The 1014-sleeve pipe; The 1015-pull bar; The 1016-positioning screw hole; The 1017-lining; The 1018-sleeve; The 1021-nut; 1022-regulates nut; The 1023-spring; The circular fill block of 1024-; The 1025-push rod; The 1026-steel ball; The circular fill block two of 1027-; 2-diaphragm frame; The 201-locating slot; The 3-compressing tablet; 4-diaphragm sheet.
Embodiment
Below in conjunction with the accompanying drawing in the embodiment of the invention, the technical scheme in the embodiment of the invention is carried out clear, intactly description, obviously, described embodiment only is the present invention's part embodiment, rather than whole embodiment.Based on embodiments of the invention, those of ordinary skills belong to protection scope of the present invention not making the every other embodiment that is obtained under the creative work prerequisite.
To combine accompanying drawing that the embodiment of the invention is done to describe in detail further below.
The embodiment of the invention provides a kind of condenser of electron microscope to use movable aperture device, can be used in second condenser of electron microscope, and shown in Fig. 1～3, this device comprises: aperture regulating device 1, diaphragm frame 2, diaphragm sheet 4 and compressing tablet 3;
Wherein, Diaphragm frame 2 is provided with locating slot 201 and compressing tablet 3; Diaphragm sheet 4 is located in the locating slot 201 of diaphragm frame 2, and is pressed in the locating slot 201 through the compressing tablet 3 that is arranged on the diaphragm frame 2, arranges by strip on the diaphragm sheet 4 and is provided with the different through hole in four apertures as aperture; As shown in Figure 3; The diaphragm sheet that diaphragm sheet 4 can adopt molybdenum sheet to process can be provided with 4 crescent moon holes 401 around the aperture of diaphragm sheet 4, make aperture be difficult for heat radiation on every side; Adstante febre behind beam bombardment; Can make aperture be in very high-temperature, thereby be difficult for contaminant deposition, realize the self-cleaning function.
Aperture regulating device 1 is provided with diaphragm axle 101; Described diaphragm frame 2 is arranged on said diaphragm axle 101 front ends, the aperture of regulating the diaphragm sheet 4 on 101 pairs of said diaphragm framves 2 of said diaphragm axle through the aperture regulating device select and three directions in space on the fine setting location;
The aperture regulating device also comprises: adjusting handle 103, tail-hood nut 106 and micromatic setting 102; The front end that diaphragm frame 2 is set of said diaphragm axle 101 reaches outside the said aperture regulating device 1; Said diaphragm axle 101 rear ends are set with said adjusting handle 103, diaphragm axle 101 can protract under the control of said adjusting handle 103 or after contract to adjust to different gears; Said tail-hood nut is positioned at the rear portion of said aperture regulating device, and said tail-hood nut 106 is connected with said diaphragm axle 101 rear ends through pull bar 1015, can control the front and back position that said diaphragm axle 101 is adjusted diaphragm sheet 4 on the said diaphragm frame 2; Said diaphragm axle 101 is corresponding with said micromatic setting 102, under the control of said micromatic setting 102, finely tunes the location in the horizontal and vertical directions through the diaphragm sheet 4 on 101 pairs of said diaphragm framves 2 of adjustment diaphragm axle;
Be arranged on the diaphragm frame 2 of diaphragm axle 101 front ends; Can the diaphragm axle be protracted or after contract and select different gears; Thereby the different apertures on the diaphragm sheet 4 of selection diaphragm axle 101 front end diaphragm framves 2 can carry out the fine setting of space all directions to the diaphragm sheet 4 behind the selection gear and locate through micromatic setting 102.
Shown in Fig. 4～14, the aperture regulating device 1 in the above-mentioned movable aperture device specifically comprises: bearing 100, sleeve 1018, axle sleeve 107, diaphragm axle 101, adjusting handle 103, seal head 108, O-ring seal 109, micromatic setting 102, spacing collar 1011, scale ring 104, tail-hood 105 and tail-hood nut 106;
Wherein, bearing 100 is square body (seeing Fig. 9,10), is provided with through hole 1001 in it; Sleeve 1018 is fixedly installed in the said through hole 1001, and axle sleeve 107 is sleeved in the said sleeve 1018, and said diaphragm axle 101 is movably arranged in the said axle sleeve 107; Stretch out outside axle sleeve 107 at diaphragm axle 101 two ends, and axle sleeve 107 front ends are provided with seal head 108, are provided with O-ring seal 109 in the seal head 108; During use, can guarantee the vacuum tightness in the lens barrel;
The rear end of bearing 100 is provided with said micromatic setting 102, and micromatic setting 102 is provided with two semicircle pieces and a locating piece (seeing Fig. 5,10) that is fixedly connected with bearing 100 rear ends, and locating piece is the middle square structure that has through hole; Its three outer walls are provided with the circular groove of placing circular fill block; Locating piece is sleeved on outside the said axle sleeve 107, and two semicircle pieces center on the outside that is arranged on said axle sleeve 107 rear ends, all is screwed with said bearing 100 to be connected; Two semicircle pieces are sleeved on the outside of locating piece; Wherein be distributed with four screw cap holes on two semicircle pieces, be equipped with nut in three screw cap holes, three nuts are vertical each other; Two nut front ends all are equipped with spring; And the spring front end is equipped with circular fill block, and the circular fill block of two nut front ends is separately positioned in the circular groove of the locating piece outside the axle sleeve, the outside of withstanding said axle sleeve 107 through locating piece; Another one nut front end is equipped with circular fill block, and circular fill block is arranged in the circular groove of said nut front end, and its front end withstands the outside of said axle sleeve 107 through locating piece; Be provided with push rod 1025 in another screw cap hole of semicircle piece; Push rod 1025 front and back ends are equipped with movable steel ball 1026; Push rod 1025 rear ends are provided with regulates nut 1022, and push rod 1025 front ends are provided with circular fill block 2 1027, and circular fill block 2 1027 withstands said axle sleeve 107 outsides through locating piece.Adjusting nut 1022 through regulating micromatic setting 102 drives push rod 1025, scalable axle sleeve 107 and the interior location of diaphragm axle 101 on direction in space thereof.
Said diaphragm axle 101 outsides are set with buffer spring 1013; Buffer spring 1013 is arranged between diaphragm axle 101 and the axle sleeve 107; Can when regulating diaphragm axle 101, play buffer action, be connected with sleeve pipe 1014 and pull bar 1015 (seeing Figure 11) on the diaphragm axle 101 of axle sleeve 107 rear ends in turn, said adjusting handle 103 movable sets are in said sleeve pipe 1014 outsides; The front end movable set of said adjusting handle 103 is outside said scale ring 104; Sleeve pipe 1014 fixed outside suits are provided with spacing collar 1011, and spacing collar 1011 is provided with a plurality of locating grooves, and spacing collar 1011 is arranged between sleeve pipe 1014 and the adjusting handle 103; Said adjusting handle 103 is provided with positioning screw hole 1016; Be provided with dog screw 1010 in the positioning screw hole 1016; Dog screw 1010 passes the body of said adjusting handle 103, and its front end is corresponding with the locating groove that is fixed on the spacing collar 1011 on the sleeve pipe 1014 in the said adjusting handle 103, can be when rotating adjusting handle 103; Dog screw 1010 is stuck in the different locating grooves of spacing collar 1011, thereby realizes diaphragm axle 107 is carried out the flexible location of different gears.
Rear end at adjusting handle 103 and diaphragm axle 101 is provided with tail-hood 105; Said tail-hood 105 spiral-locks are on the opening of adjusting handle 103 rear ends; Tail-hood 105 can close the opening of said adjusting handle 103 rear ends, tail-hood 105 usefulness screws be sleeved on said pull bar 1015 outer linings 1017 and be fixedly connected.
Above-mentioned movable aperture device can be provided with rubber seal at the position that bearing contacts the second condenser lens barrel, thereby when using, can guarantee the vacuum tightness that lens barrel is inner.
Above-mentioned movable aperture device is fixed on the diaphragm sheet on the diaphragm frame, and the diaphragm frame is fixed on the diaphragm axle of aperture regulating device, and that the afterbody of diaphragm axle has designed in the aperture regulating device is corresponding spacing, has reduced setting range; Can select the aperture on the diaphragm sheet of diaphragm axle front end easily through adjusting handle; Adjustment nut and tail-hood nut through micromatic setting can carry out the precision adjustment of space all directions to the diaphragm molybdenum sheet, thereby realize the multi-direction adjustment flexibly of diaphragm sheet.When this movable aperture device uses; Be arranged on second condenser of electron microscope, the aperture center on its diaphragm sheet is on the beam axis, and adjusting handle is in the outside of the second condenser mirror body; Can select to be provided with the aperture on the movable aperture device diaphragm of second condenser sheet easily through adjusting handle; Thereby can obtain different illuminating aperture angles, realize different illuminating aperture angles being provided, can effectively improve the performance of electron microscope to the requirement of different samples.
The above; Be merely the preferable embodiment of the present invention, but protection scope of the present invention is not limited thereto, any technician who is familiar with the present technique field is in the technical scope that the present invention discloses; The variation that can expect easily or replacement all should be encompassed within protection scope of the present invention.Therefore, protection scope of the present invention should be as the criterion with the protection domain of claims.
Claims (7)
1. the condenser of an electron microscope is used movable aperture device, it is characterized in that, comprising:
Diaphragm frame, diaphragm sheet, compressing tablet and aperture regulating device;
Said diaphragm frame is provided with locating slot and compressing tablet, and said diaphragm sheet is arranged in the said locating slot, and pushes down through said compressing tablet; Arrange on the said diaphragm sheet and be provided with the different through hole in four apertures as aperture;
Said aperture regulating device is provided with the diaphragm axle; Said diaphragm frame is arranged on said diaphragm axle front end, can through said aperture regulating device regulate that said diaphragm axle is selected the aperture of the diaphragm sheet on the said diaphragm frame and three directions in space on the fine setting location;
Said aperture regulating device also is provided with adjusting handle, tail-hood nut and micromatic setting, and said diaphragm shaft rear end is provided with said adjusting handle, can protract under the control of said adjusting handle or after contract to different gears; Said tail-hood nut is positioned at the rear portion of said aperture regulating device, is connected with said diaphragm shaft rear end through pull bar, can control the front and back position that said diaphragm axle is adjusted diaphragm sheet on the said diaphragm frame; Said diaphragm axle is corresponding with said micromatic setting; Under the control of said micromatic setting; Through adjusting said diaphragm axle the diaphragm sheet on the said diaphragm frame is carried out the position adjustment of level and vertical direction, the center of the aperture of diaphragm sheet on the said diaphragm frame is on the axis of electron beam.
2. the condenser of electron microscope according to claim 1 is used movable aperture device, it is characterized in that, said aperture regulating device also comprises:
Bearing, sleeve, axle sleeve, seal head, O-ring seal, spacing collar, scale ring and tail-hood;
Be provided with through hole in the bearing, sleeve is fixedly installed in the said through hole, and axle sleeve is sleeved in the said sleeve, and said diaphragm axle is movably arranged in the said axle sleeve, and stretch out outside axle sleeve at diaphragm axle two ends, and the axle sleeve front end is provided with seal head, is provided with O-ring seal in the seal head;
The rear end of bearing is provided with said micromatic setting, and micromatic setting is around being arranged on said axle sleeve outside, and around a plurality of trimming parts of distributed and arranged, all outer with the being sleeved on axle sleeve locating piece of the front end of each trimming part contacts on the micromatic setting;
Axle sleeve rear end near micromatic setting is provided with the scale ring, and the scale ring set is contained in the axle sleeve outside;
Be connected with sleeve pipe, pull bar in turn on the diaphragm axle of said axle sleeve rear end; Said adjusting handle movable set is in said cover tube outside; The front end movable set of said adjusting handle is outside said scale ring; The sleeve pipe external fixation is provided with spacing collar, and spacing collar is arranged between sleeve pipe and the said adjusting handle, and spacing collar is provided with a plurality of locating grooves;
The rear end of said adjusting handle and diaphragm axle is provided with tail-hood, and said tail-hood spiral-lock can close the opening of said adjusting handle rear end on the opening of adjusting handle rear end, and tail-hood is fixedly connected with the screw lining outer with being sleeved on said pull bar.
3. the condenser of electron microscope according to claim 2 is used movable aperture device; It is characterized in that; Said diaphragm axle is located in the said axle sleeve and is: in diaphragm axle outside buffer spring is set, said buffer spring is arranged between diaphragm axle and the said axle sleeve.
4. the condenser of electron microscope according to claim 2 is used movable aperture device, it is characterized in that, said micromatic setting is around being arranged on said axle sleeve outside; On the micromatic setting around a plurality of trimming parts of distributed and arranged be: micromatic setting is provided with two semicircle pieces and a locating piece, and locating piece is sleeved on outside the said axle sleeve, and two semicircle pieces all are screwed with said bearing and are connected; Two semicircle pieces are sleeved on said locating piece outside, are distributed with four screw cap holes on two semicircle pieces, are equipped with nut in three screw cap holes; Three nuts are vertical each other; Two nut front ends are equipped with spring, and the spring front end is equipped with circular fill block, and circular fill block is separately positioned in the circular groove of said locating piece; Another one nut front end is equipped with circular fill block; Said circular fill block is arranged in the circular groove of said nut front end, and its front end contacts with said locating piece, and three nut front ends all withstand said locating piece through circular fill block;
Be provided with push rod in another screw cap hole of semicircle piece; The push rod front and back ends is equipped with movable steel ball, and putting back-end is provided with the adjusting nut, and the push rod front end is provided with circular fill block; Circular fill block is contained in the circular groove of said locating piece, and the push rod front end withstands said locating piece through circular fill block.
5. the condenser of electron microscope according to claim 4 is used movable aperture device, it is characterized in that, said locating piece is the middle square structure that has through hole, and its three outer walls are provided with the circular groove of placing fill block.
6. the condenser of electron microscope according to claim 2 is used movable aperture device; It is characterized in that; Said adjusting handle is provided with dog screw; Dog screw passes said adjusting handle body, and its front end is corresponding with the locating groove of the spacing collar of said adjusting handle internal fixation on said sleeve pipe, can when regulating said adjusting handle, cooperate the locating groove of spacing collar to make the diaphragm axle be positioned to different gears.
7. the condenser of electron microscope according to claim 1 is used movable aperture device, it is characterized in that, the diaphragm sheet of said diaphragm sheet for adopting molybdenum sheet to process is provided with 4 crescent moon holes around each aperture of said diaphragm sheet.
Priority Applications (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| CN201110062041XA CN102163529B (en) | 2011-03-15 | 2011-03-15 | Movable diaphragm device for condensing mirror of electron microscope |
Applications Claiming Priority (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| CN201110062041XA CN102163529B (en) | 2011-03-15 | 2011-03-15 | Movable diaphragm device for condensing mirror of electron microscope |
Publications (2)
| Publication Number | Publication Date |
|---|---|
| CN102163529A CN102163529A (en) | 2011-08-24 |
| CN102163529B true CN102163529B (en) | 2012-07-25 |
Family
ID=44464693
Family Applications (1)
| Application Number | Title | Priority Date | Filing Date |
|---|---|---|---|
| CN201110062041XA Expired - Fee Related CN102163529B (en) | 2011-03-15 | 2011-03-15 | Movable diaphragm device for condensing mirror of electron microscope |
Country Status (1)
| Country | Link |
|---|---|
| CN (1) | CN102163529B (en) |
Families Citing this family (5)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| CN103198994B (en) * | 2013-03-17 | 2016-06-22 | 中国科学院苏州纳米技术与纳米仿生研究所 | Objective lens of the transmission electron microscope diaphragm |
| CN106711003B (en) * | 2017-02-15 | 2019-03-19 | 聚束科技（北京）有限公司 | A kind of electronics source generating device and electron beam control method |
| CN110797246A (en) * | 2019-11-15 | 2020-02-14 | 河南河大科技发展有限公司 | Diaphragm adjusting device for transmission electron microscope intermediate mirror |
| CN112289668A (en) * | 2020-09-28 | 2021-01-29 | 北京中科科仪股份有限公司 | Driving mechanism of electron microscope detector and electron microscope detector device |
| CN115513020B (en) * | 2022-11-24 | 2023-03-21 | 北京中科科仪股份有限公司 | Centering adjustment tool, electron beam spot detection device and centering adjustment method |
Citations (3)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| US4823006A (en) * | 1987-05-21 | 1989-04-18 | Electroscan Corporation | Integrated electron optical/differential pumping/imaging signal detection system for an environmental scanning electron microscope |
| EP0352085A2 (en) * | 1988-07-22 | 1990-01-24 | Hitachi, Ltd. | Electron Microscope |
| CN101131470A (en) * | 2007-09-21 | 2008-02-27 | 北京工业大学 | Diaphragm ultraviolet laser micromachining system used for scanning electron microscope and method thereof |
-
2011
- 2011-03-15 CN CN201110062041XA patent/CN102163529B/en not_active Expired - Fee Related
Patent Citations (3)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| US4823006A (en) * | 1987-05-21 | 1989-04-18 | Electroscan Corporation | Integrated electron optical/differential pumping/imaging signal detection system for an environmental scanning electron microscope |
| EP0352085A2 (en) * | 1988-07-22 | 1990-01-24 | Hitachi, Ltd. | Electron Microscope |
| CN101131470A (en) * | 2007-09-21 | 2008-02-27 | 北京工业大学 | Diaphragm ultraviolet laser micromachining system used for scanning electron microscope and method thereof |
Also Published As
| Publication number | Publication date |
|---|---|
| CN102163529A (en) | 2011-08-24 |
Similar Documents
| Publication | Publication Date | Title |
|---|---|---|
| CN102163529B (en) | Movable diaphragm device for condensing mirror of electron microscope | |
| US8730583B2 (en) | Microscope objective | |
| US9399220B2 (en) | Retainer for sample carriers of different shapes and sizes | |
| US8148700B2 (en) | Speciman holder and speciman holder movement device | |
| CN103592751A (en) | Surgical microscope objective having adjustable focal length | |
| JP2013008633A (en) | Sample holder and transmission electron microscope system | |
| JP4874698B2 (en) | Electronic probe microanalyzer | |
| EP2781944A1 (en) | Stage device | |
| CN105140088A (en) | Focusing device of large-beam electron beam shooting micro-beam spot X-ray source and application method of focusing device | |
| US6762415B1 (en) | Vacuum chamber with recessed viewing tube and imaging device situated therein | |
| US20060164723A1 (en) | Microscope | |
| CN102136406B (en) | Small condenser for electron microscope | |
| US20160282595A1 (en) | Objective lens changer | |
| US10317658B2 (en) | Microscope system and correction collar operating device | |
| US7729048B2 (en) | Microscope system | |
| JPWO2017086287A1 (en) | Shielding device, microscope, and observation method | |
| CN104931419A (en) | Transverse magnetic tweezer device | |
| CN105549193A (en) | Stereoscopic microscope system with 360-degree omnibearing observation function | |
| CN104730048A (en) | Copper-based graphene carrier table mechanical adjusting system for carrying fluorescent sample | |
| JP2008032858A (en) | Differential interference microscope | |
| JP2007086503A (en) | Microscope | |
| US7139121B2 (en) | Projection microscope | |
| CN202904117U (en) | Stereomicroscope with adjustable diaphragm | |
| WO2016088249A1 (en) | Charged particle beam device, and observation method using charged particle beam device | |
| JP5939814B2 (en) | Sample holder support device |
Legal Events
| Date | Code | Title | Description |
|---|---|---|---|
| C06 | Publication | ||
| PB01 | Publication | ||
| C10 | Entry into substantive examination | ||
| SE01 | Entry into force of request for substantive examination | ||
| C14 | Grant of patent or utility model | ||
| GR01 | Patent grant | ||
| C17 | Cessation of patent right | ||
| CF01 | Termination of patent right due to non-payment of annual fee |
Granted publication date: 20120725 Termination date: 20130315 |