CN112289668A - Driving mechanism of electron microscope detector and electron microscope detector device - Google Patents
Driving mechanism of electron microscope detector and electron microscope detector device Download PDFInfo
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- CN112289668A CN112289668A CN202011045691.9A CN202011045691A CN112289668A CN 112289668 A CN112289668 A CN 112289668A CN 202011045691 A CN202011045691 A CN 202011045691A CN 112289668 A CN112289668 A CN 112289668A
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- 230000007246 mechanism Effects 0.000 title claims abstract description 37
- 238000001514 detection method Methods 0.000 claims description 7
- 230000009471 action Effects 0.000 claims description 3
- 230000003287 optical effect Effects 0.000 abstract description 9
- 230000008859 change Effects 0.000 abstract description 4
- 238000000034 method Methods 0.000 description 4
- 230000000903 blocking effect Effects 0.000 description 3
- 230000007547 defect Effects 0.000 description 2
- 238000009434 installation Methods 0.000 description 2
- 230000033001 locomotion Effects 0.000 description 2
- 238000012986 modification Methods 0.000 description 2
- 230000004048 modification Effects 0.000 description 2
- 230000008569 process Effects 0.000 description 2
- 206010040007 Sense of oppression Diseases 0.000 description 1
- 230000006978 adaptation Effects 0.000 description 1
- 230000001174 ascending effect Effects 0.000 description 1
- 230000005540 biological transmission Effects 0.000 description 1
- 230000008602 contraction Effects 0.000 description 1
- 238000010586 diagram Methods 0.000 description 1
- 238000006073 displacement reaction Methods 0.000 description 1
- 230000000694 effects Effects 0.000 description 1
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- H—ELECTRICITY
- H01—ELECTRIC ELEMENTS
- H01J—ELECTRIC DISCHARGE TUBES OR DISCHARGE LAMPS
- H01J37/00—Discharge tubes with provision for introducing objects or material to be exposed to the discharge, e.g. for the purpose of examination or processing thereof
- H01J37/26—Electron or ion microscopes; Electron or ion diffraction tubes
- H01J37/261—Details
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- H—ELECTRICITY
- H01—ELECTRIC ELEMENTS
- H01J—ELECTRIC DISCHARGE TUBES OR DISCHARGE LAMPS
- H01J37/00—Discharge tubes with provision for introducing objects or material to be exposed to the discharge, e.g. for the purpose of examination or processing thereof
- H01J37/02—Details
- H01J37/20—Means for supporting or positioning the objects or the material; Means for adjusting diaphragms or lenses associated with the support
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- H—ELECTRICITY
- H01—ELECTRIC ELEMENTS
- H01J—ELECTRIC DISCHARGE TUBES OR DISCHARGE LAMPS
- H01J37/00—Discharge tubes with provision for introducing objects or material to be exposed to the discharge, e.g. for the purpose of examination or processing thereof
- H01J37/02—Details
- H01J37/244—Detectors; Associated components or circuits therefor
Abstract
The utility model provides an actuating mechanism of electron microscope detector and contain this actuating mechanism's electron microscope detector, belongs to electron microscope technical field. The driving mechanism comprises a fixing piece which is connected with the sample chamber; the extensible member, with the scalable removal of mounting links to each other, the sample room is equipped with the opening, the extensible member includes: the telescopic part is provided with a detector, penetrates through the opening and is driven by a driver to drive the detector to move in a telescopic mode. The invention drives the telescopic piece on the fixing piece to drive the detector on the telescopic part in the sample chamber to move so as to change the position of the detector, and when the detector is not needed to be used, only the position of the detector needs to be changed, so that the detector is separated from the electronic optical system, and the detector does not need to be taken out of the sample; this mode of operation is simple and fast.
Description
Technical Field
The invention relates to the technical field of electron microscopes, in particular to a driving mechanism of an electron microscope detector and an electron microscope detector device.
Background
The electron microscope, which is called as an electron microscope entirely, includes a lens cone, a vacuum device, a power supply cabinet, and the like, and the main types thereof are 4: transmission electron microscopes, scanning electron microscopes, reflection electron microscopes, and emission electron microscopes; taking a scanning electron microscope as an example, the scanning electron microscope scans a sample surface point by using a focused electron beam, interacts with the sample to generate various physical signals, the signals are received, amplified and converted into modulation signals by a detector, and finally images reflecting various characteristics of the sample surface are displayed on a fluorescent screen.
In order to perform detection analysis by using an electron microscope, an electron microscope detector is required. The electron microscope detector is located the specimen chamber under the lens cone, and the different mounted position of electron microscope detector can influence the collection effect of electron microscope detector to the electron microscope signal, if the electron microscope detector settles improperly, then can not receive the signal or the signal that receives is very weak to influence analysis accuracy. However, the existing electron microscope detector adopts a detachable fixing frame to install the electron microscope detector in the sample chamber, and when the position of the electron microscope detector needs to be adjusted, the electron microscope detector needs to be detached so as to replace the fixing frame or adjust the position of the electron microscope detector on the fixing frame, so that the position adjustment work of the electron microscope detector can be realized; and when need not use this electron microscope detector among the testing and analyzing process, need demolish electron microscope detector and mount from the sample room of electron microscope in, install again during the use, this leads to its operation very complicated and can't reach the problem of quick location and adjustment detector position.
Disclosure of Invention
Therefore, the invention aims to solve the technical problem of overcoming the defects that the operation of the electron microscope detector is very complicated and the position of the detector cannot be quickly adjusted due to the fact that the electron microscope detector is installed through a detachable fixing frame in the prior art, and provides a driving mechanism of the electron microscope detector and an electron microscope detector device.
The invention provides the following technical scheme:
a drive mechanism for an electron microscope detector, comprising:
the fixing piece is connected with the sample chamber;
the extensible member, with the scalable removal of mounting links to each other, the sample room is equipped with the opening, the extensible member includes: the telescopic part is provided with a detector, penetrates through the opening and is driven by a driver to drive the detector to move in a telescopic mode.
Optionally, the fixed member and the telescopic member are provided with an axial limiting structure and/or a circumferential limiting structure;
the axial limiting structure is used for limiting the telescopic position of the telescopic piece along the telescopic moving direction;
the circumferential limiting structure is used for limiting the rotating position of the telescopic piece in the circumferential direction by taking the telescopic moving direction as an axis.
Optionally, the fixing member is an outer sleeve, and the telescopic member is a telescopic rod telescopically arranged in the outer sleeve.
Optionally, the axial limiting structure includes: the first clamping piece is arranged on one of the outer sleeve and the telescopic rod, and the first clamping groove is arranged on the other of the outer sleeve and the telescopic rod; the first clamping piece is driven to be connected with the first clamping groove in a matched and inserted mode.
Optionally, the number of the first clamping grooves is at least two, and the first clamping grooves are arranged along the length direction of the telescopic rod.
Optionally, the axial limiting structure further includes: and the biasing part is used for pushing the first clamping part to extend towards the first clamping groove.
Optionally, the first snap-in member is a ball embedded in the outer sleeve, and the biasing member is an annular elastic element that is sleeved on the outer wall of the outer sleeve and abuts against the ball.
Optionally, the outer sleeve is provided with a stopper for stopping the annular elastic element from rotating along the circumferential direction of the outer sleeve.
Optionally, the ball bearing is a plurality of balls arranged in the circumferential direction of the outer sleeve; the first clamping groove is an annular concave hole matched with the ball in shape.
Optionally, an annular accommodating groove adapted to the shape of the annular elastic element is formed in the outer cavity wall of the outer sleeve.
Optionally, the circumferential limiting structure includes: the second clamping piece is arranged on one of the outer sleeve and the telescopic rod, and the second clamping groove is arranged in the circumferential direction of the other of the outer sleeve and the telescopic rod; the second clamping piece is driven to be connected with the second clamping groove in a matched and inserted mode.
Optionally, the second card slot is a strip-shaped slot arranged along the telescopic moving direction.
Optionally, the telescopic member further comprises: the handheld part is arranged at one end, far away from the detector, of the telescopic rod to pull the telescopic rod to perform telescopic action.
An electron microscope detection device comprising:
electron microscope detector and the driving mechanism of the electron microscope detector.
The technical scheme of the invention has the following advantages:
1. the invention provides a driving mechanism of an electron microscope detector, which comprises: the fixing piece is connected with the sample chamber; the extensible member, with the scalable removal of mounting links to each other, the sample room is equipped with the opening, the extensible member includes: the telescopic part is provided with a detector, penetrates through the opening and is driven by a driver to drive the detector to move in a telescopic mode.
The electron microscope detector in the prior art is installed through the detachable fixing frame, so that the defects that the operation is very complicated and the position of the detector cannot be quickly adjusted are caused. The invention drives the telescopic piece on the fixing piece to drive the detector on the telescopic part in the sample chamber to move so as to change the position of the detector, and when the detector is not needed to be used, only the position of the detector needs to be changed, so that the detector is separated from the electronic optical system, and the detector does not need to be taken out of the sample; through the structure, the electron microscope detector in the invention does not need to disassemble a fixing frame for fixing the electron microscope detector, and the position adjustment of the detector can be realized, so that the detector is separated from an electronic optical system, and the position fine adjustment function is realized.
2. According to the driving mechanism of the electron microscope detector, the fixing piece and the telescopic piece are provided with the axial limiting structure and/or the circumferential limiting structure; the axial limiting structure is used for limiting the telescopic position of the telescopic piece along the telescopic moving direction; the circumferential limiting structure is used for limiting the rotating position of the telescopic piece in the circumferential direction by taking the telescopic moving direction as an axis.
The axial limiting structure can limit the telescopic position of the telescopic piece along the telescopic moving direction, so that the detector is positioned; the circumferential limiting structure can limit the rotation position of the contraction piece in the circumferential direction by taking the telescopic moving direction as an axis, so that the detector is prevented from rotating in the sample chamber, and the analysis precision of the detector is prevented from being influenced.
3. According to the driving mechanism of the electron microscope detector, the fixing piece is the outer sleeve, and the telescopic piece is the telescopic rod which is arranged in the outer sleeve in a telescopic mode.
The outer sleeve can play a certain limiting role on the telescopic piece, so that the telescopic piece is more stable in the telescopic moving process, and obvious movement cannot be generated.
4. The invention provides a driving mechanism of an electron microscope detector, which comprises an axial limiting structure and a driving mechanism of an electron microscope detector, wherein the axial limiting structure comprises: the first clamping piece is arranged on one of the outer sleeve and the telescopic rod, and the first clamping groove is arranged on the other of the outer sleeve and the telescopic rod; the first clamping piece is driven to be matched, inserted and connected with the first clamping groove; the clamping device also comprises a biasing member for pushing the first clamping member to extend out towards the first clamping groove; the first clamping piece is a ball embedded on the outer sleeve, and the biasing piece is an annular elastic element which is sleeved on the outer wall of the outer sleeve and is abutted against the ball.
The biasing member can be when first draw-in groove removes the position to first joint spare, and automatic with first joint spare first draw-in groove of impressing in order to realize the location, when needs break away from the location and remove, only need drive the telescopic link, the telescopic link can break away from first draw-in groove with first joint spare oppression, this kind of limit structure simple structure, the operation of being convenient for, the dismantlement maintenance and the change of being convenient for simultaneously.
5. According to the driving mechanism of the electron microscope detector, the number of the first clamping grooves is at least two, and the first clamping grooves are arranged along the length direction of the telescopic rod.
The quantity setting of first draw-in groove can make the telescopic link have a plurality of locating position, is convenient for at first fix a position the service position of detector with break away from the position, and then through a plurality of locating position, can also make a plurality of detectors of pars contractilis installation.
6. The invention provides a driving mechanism of an electron microscope detector.A stopper for stopping an annular elastic element from rotating along the circumferential direction of an outer sleeve is arranged on the outer sleeve, and an annular accommodating groove matched with the annular elastic element in shape is arranged on the wall of the outer sleeve.
The blocking piece is used for preventing the annular elastic element from rotating, and the annular accommodating groove is used for preventing the annular elastic element from moving so as to prevent the balls from falling off.
7. The invention provides a driving mechanism of an electron microscope detector, wherein a circumferential limiting structure comprises: the second clamping piece is arranged on one of the outer sleeve and the telescopic rod, and the second clamping groove is arranged in the circumferential direction of the other of the outer sleeve and the telescopic rod; the second clamping piece is driven to be matched, inserted and connected with the second clamping groove; the second clamping groove is a strip-shaped groove arranged along the telescopic moving direction.
The setting of second joint spare and second draw-in groove can prevent that the detector from taking place to rotate in the sample room when not influencing the flexible removal of telescopic link to influence the analytical accuracy.
8. The invention provides an electron microscope detection device, which comprises: electron microscope detector to and electron microscope detector's actuating mechanism, electron microscope detector's actuating mechanism includes: the fixing piece is connected with the sample chamber; the extensible member, with the scalable removal of mounting links to each other, the sample room is equipped with the opening, the extensible member includes: the telescopic part is provided with a detector, penetrates through the opening and is driven by a driver to drive the detector to move in a telescopic mode.
When the detector needs to be separated from the electron optical system, the electron microscope detection device does not need to be taken out of a sample, only needs to drive the telescopic piece to drive the detector to move so as to be separated from the electron optical system, and can adjust the position of the detector by driving the telescopic piece, so that the electron microscope detection device is simple and quick to use.
Drawings
In order to more clearly illustrate the technical solutions in the embodiments of the present invention, the drawings used in the description of the embodiments will be briefly introduced below, and it is obvious that the drawings in the following description are some embodiments of the present invention, and it is obvious for those skilled in the art that other drawings can be obtained according to the drawings without creative efforts.
FIG. 1 is a front cross-sectional view of a first embodiment of the present invention;
FIG. 2 is a bottom view of the first embodiment of the present invention;
fig. 3 is a schematic structural diagram of a first embodiment of the present invention.
Description of reference numerals:
1. the handheld portion, 2 keep off the piece, 3, first joint spare, 4 biasing piece, 5 outer tubes, 6 telescopic part, 7 first draw-in groove, 8, second joint spare, 9 interface flange, 10 bolt joint piece, 11 the mounting bracket.
Detailed Description
The technical solutions of the present invention will be described clearly and completely with reference to the accompanying drawings, and it should be understood that the described embodiments are some, but not all embodiments of the present invention. All other embodiments, which can be derived by a person skilled in the art from the embodiments given herein without making any creative effort, shall fall within the protection scope of the present invention.
In the description of the present invention, it should be noted that the terms "upper", "lower", "inside", "outside", and the like indicate orientations or positional relationships based on the orientations or positional relationships shown in the drawings, and are only for convenience in describing the present invention and simplifying the description, but do not indicate or imply that the referred device or element must have a specific orientation, be constructed in a specific orientation, and be operated, and thus, should not be construed as limiting the present invention. Furthermore, the terms "first" and "second" are used for descriptive purposes only and are not to be construed as indicating or implying relative importance.
In the description of the present invention, it should be noted that, unless otherwise explicitly specified or limited, the terms "mounted," "connected," and "connected" are to be construed broadly, e.g., as meaning either a fixed connection, a removable connection, or an integral connection; they may be connected directly or indirectly through intervening media, or they may be interconnected between two elements. The specific meanings of the above terms in the present invention can be understood in specific cases to those skilled in the art.
In addition, the technical features involved in the different embodiments of the present invention described below may be combined with each other as long as they do not conflict with each other.
Example 1
The present embodiment provides a driving mechanism for a electron microscope detector, as shown in fig. 1 to 3, including: the fixing part is connected with the sample chamber, and the telescopic part is connected with the fixing part in a telescopic and movable mode.
In this embodiment, the fixing member is an outer sleeve 5, one end of which is fixedly connected with an interface flange 9 through a bolt, the interface flange 9 is fixed at an opening of the sample chamber, a passage for the passage of the expansion member is arranged in the interface flange, and a protective sleeve for protecting the expansion member is arranged in the passage.
The extensible member is flexible setting telescopic link in outer tube 5 in this embodiment, and the one end that the detector was installed to the telescopic link is pars contractilis 6, and pars contractilis 6 passes the opening of sample room and connects the mounting bracket 11 that is used for installing the detector through L shape bolt piece 10, and the one end that the detector was kept away from to the telescopic link is equipped with the handheld portion 1 that is used for pulling it to carry out the action of stretching out and drawing back, drives pars contractilis 6 through driving handheld portion 1 and removes, and then drives the flexible removal of detector.
The outer sleeve 5 of this embodiment can play certain limiting displacement to the extensible member by itself, makes the extensible member more stable at the flexible removal in-process, can not produce obvious drunkenness.
The outer sleeve 5 and the telescopic rod are provided with an axial limiting structure and a circumferential limiting structure.
The axial limiting structure comprises a first clamping piece 3 arranged on the outer sleeve 5, a first clamping groove 7 arranged on the telescopic rod and a biasing piece 4 used for pushing the first clamping piece 3 to extend towards the first clamping groove 7, the first clamping piece 3 is a ball embedded in a conical hole in the outer sleeve 5, the number of the balls is three, and the balls are uniformly arranged in the circumferential direction of the outer sleeve 5; the first clamping groove 7 is two annular concave holes matched with the shape of the ball and arranged along the telescopic motion direction; the biasing member 4 is a stop snap ring which is sleeved on the outer cavity wall of the outer sleeve 5 and is abutted with the ball and used as an annular elastic element, an annular accommodating groove which is matched with the stop snap ring in shape is arranged on the outer cavity wall of the outer sleeve 5 and is used for preventing the stop snap ring from moving, a blocking member 2 which blocks the stop snap ring from rotating along the circumferential direction of the outer sleeve 5 is arranged on the annular accommodating groove and is used for preventing the stop snap ring from rotating to enable the ball to be separated from an opening of the stop snap ring, and the blocking member 2 is a screw in the embodiment; when the telescopic rod needs to be separated from the positioning position to move, only the hand-held part 1 needs to be pulled to drive the telescopic rod, and the telescopic rod can press the balls to be separated from the annular concave hole; the quantity of annular shrinkage pool can be more than two simultaneously, and its quantity sets up and to make the telescopic link have a plurality of locating position, is convenient for at first fix a position the service position of detector with breaking away from the position, and then through setting up a plurality of locating position, can also make a plurality of detectors of 11 corresponding installations of mounting bracket to realize the switching of different detectors.
The circumferential limiting structure comprises a second clamping piece 8 arranged on the telescopic rod and a second clamping groove arranged in the circumferential direction of the outer sleeve 5; second joint spare 8 is for passing through the slider of fix with screw on the telescopic link in this embodiment, the second draw-in groove be along the telescopic moving direction setting with the bar groove of slider adaptation, the slider can move and slide in the bar inslot along the telescopic link, prevent that the telescopic link from producing to follow and use the telescopic moving direction to rotate as the ascending rotation of the circumference direction of axle, thereby prevent that the detector from taking place to rotate in the sample room, with influence analysis precision, the distance that the telescopic link moved is can injectd to the length in bar groove in addition.
The method of use of this example is as follows:
when the detector is required to reach a use position, namely a position where an electronic optical system is accessed, a user pushes the handheld part 1 to drive the telescopic part 6 to move, so that the detector moves in the sample chamber, the sliding block moves in the strip-shaped groove to prevent the telescopic rod from axially rotating, when the detector moves to the use position, one annular concave hole moves to a ball along with the telescopic part 6, the ball is automatically pressed into the annular concave hole by the stop snap ring to realize positioning, and meanwhile, the user feels the pushing resistance to stop continuously pushing the handheld part 1; when the detector is needed to be separated from the use position, the user drags the handheld part 1 to drive the telescopic part 6 to move, the telescopic rod per se separates the ball from the annular concave hole by pressing, when the other annular concave hole moves to the ball position, the stop clamping ring automatically presses the ball into the annular concave hole to realize positioning, and meanwhile, the user feels resistance to pushing and stops continuously pushing the handheld part 1.
This embodiment is located the telescopic link of outer tube 5 through the drive, and the drive is located the detector of sample indoor and moves to this position that changes the detector, when need not use this detector, only need change the position of detector, make it break away from electron optical system, and need not take out the detector from the sample in.
As a modified implementation manner of the axial limiting structure of the above embodiment 1, a space for accommodating the biasing member 4 is provided inside the telescopic rod, the biasing member 4 is a cylinder made of an elastic material, the first engaging member 3 is a plurality of balls embedded in the telescopic rod, the first engaging groove 7 is an annular concave hole provided on an inner wall of the outer sleeve 5, and the biasing member 4 is used for driving the balls to be connected with the annular concave hole in an inserting manner so as to achieve positioning.
As a modified implementation manner of the circumferential limiting structure of the embodiment 1, the second clamping piece 8 is a protrusion on the inner wall of the telescopic rod, and the second clamping groove is a strip-shaped groove on the telescopic rod and matched with the protrusion.
Of course, the structure of the telescopic member is not specifically limited in the present application, and in other embodiments, the telescopic member is formed by a plurality of sleeved sleeves, an inner cavity of the sleeve is provided with a push rod driven by a motor to extend and retract, and the push rod is fixedly connected with the sleeve to drive the sleeve to extend and retract.
Of course, the application of the present invention does not specifically limit the fixed member and the telescopic member, and in other embodiments, the fixed member is a "concave" shaped bracket provided with a sliding groove, and the telescopic member is a rectangular sliding rod embedded in the sliding groove, which only needs to be provided with an axial limiting structure.
Example 2
An electron microscope detection device comprising: an electron microscope detector and a driving mechanism of the electron microscope detector,
the driving mechanism of the electron microscope detector is the driving mechanism of the electron microscope detector provided in embodiment 1.
When the detector needs to be separated from the electronic optical system, the whole detector does not need to be taken out of a sample, the detector is driven to move only by driving the telescopic piece so as to be separated from the electronic optical system, and meanwhile, the position of the detector can be adjusted by driving the telescopic piece, so that the detector is simple and quick to use.
It should be understood that the above examples are only for clarity of illustration and are not intended to limit the embodiments. Other variations and modifications will be apparent to persons skilled in the art in light of the above description. And are neither required nor exhaustive of all embodiments. And obvious variations or modifications therefrom are within the scope of the invention.
Claims (14)
1. A drive mechanism of an electron microscope detector is characterized by comprising:
the fixing piece is connected with the sample chamber;
the extensible member, with the scalable removal of mounting links to each other, the sample room is equipped with the opening, the extensible member includes: and a telescopic part (6) provided with a detector, wherein the telescopic part (6) penetrates through the opening and is driven to drive the detector to move telescopically.
2. The driving mechanism of the electron microscope detector as claimed in claim 1, wherein the fixed member and the telescopic member are provided with an axial limiting structure and/or a circumferential limiting structure;
the axial limiting structure is used for limiting the telescopic position of the telescopic piece along the telescopic moving direction;
the circumferential limiting structure is used for limiting the rotating position of the telescopic piece in the circumferential direction by taking the telescopic moving direction as an axis.
3. The driving mechanism for the electron microscope detector as claimed in claim 2, wherein the fixed member is an outer sleeve (5), and the telescopic member is a telescopic rod telescopically arranged in the outer sleeve.
4. The drive mechanism for an electron microscope detector according to claim 3,
axial limit structure includes: the first clamping piece (3) is arranged on one of the outer sleeve (5) and the telescopic rod, and the first clamping groove (7) is arranged on the other of the outer sleeve (5) and the telescopic rod; the first clamping piece (3) is driven to be matched, inserted and connected with the first clamping groove (7).
5. The driving mechanism for the electron microscope detector as claimed in claim 4, wherein the number of the first locking grooves (7) is at least two, and the first locking grooves are arranged along the length direction of the telescopic rod.
6. The drive mechanism for an electron microscope detector according to claim 4 or 5,
axial limit structure still includes: and the biasing part (4) is used for pushing the first clamping piece (3) to extend towards the first clamping groove (7).
7. The driving mechanism for the electron microscope detector as claimed in claim 6, wherein the first engaging member (3) is a ball embedded in the outer sleeve, and the biasing member (4) is an annular elastic element that is sleeved on the outer cavity wall of the outer sleeve (5) and abuts against the ball.
8. The driving mechanism for the electron microscope detector according to claim 7, wherein the outer sleeve (5) is provided with a stopper (2) for stopping the annular elastic element from rotating along the circumferential direction of the outer sleeve.
9. The drive mechanism for an electron microscope detector according to claim 7, characterized in that the balls are plural and arranged in the circumferential direction of the outer sleeve (5); the first clamping groove (7) is an annular concave hole matched with the ball in shape.
10. The driving mechanism for the electron microscope detector according to claim 7, wherein the outer sleeve (5) is provided with an annular accommodating groove on the outer cavity wall, and the annular accommodating groove is matched with the annular elastic element in shape.
11. The drive mechanism for an electron microscope detector according to claim 3,
the circumference limit structure includes: a second clamping piece (8) arranged on one of the outer sleeve (5) and the telescopic rod, and a second clamping groove arranged in the circumferential direction of the other of the outer sleeve (5) and the telescopic rod; the second clamping piece (8) is driven to be connected with the second clamping groove in a matched and inserted mode.
12. The driving mechanism for the electron microscope detector according to claim 11, wherein the second slot is a strip-shaped slot arranged along the telescopic moving direction.
13. The drive mechanism for an electron microscope detector according to any one of claims 3 to 12, characterized in that,
the telescopic member further comprises: the hand-held part (1) is arranged at one end of the telescopic rod, which is far away from the detector, so as to pull the telescopic rod to perform telescopic action.
14. An electron microscope detection device, comprising:
electron microscope detector, and
the drive mechanism for an electron microscope detector according to any one of claims 1 to 13.
Priority Applications (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| CN202011045691.9A CN112289668A (en) | 2020-09-28 | 2020-09-28 | Driving mechanism of electron microscope detector and electron microscope detector device |
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| CN202011045691.9A CN112289668A (en) | 2020-09-28 | 2020-09-28 | Driving mechanism of electron microscope detector and electron microscope detector device |
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| CN112289668A true CN112289668A (en) | 2021-01-29 |
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Cited By (1)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| CN113707520A (en) * | 2021-08-25 | 2021-11-26 | 北京中科科仪股份有限公司 | Fixing device, monitoring probe assembly and electron microscope system |
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