CN102163529A - Movable diaphragm device for condensing mirror of electron microscope - Google Patents
Movable diaphragm device for condensing mirror of electron microscope Download PDFInfo
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- CN102163529A CN102163529A CN 201110062041 CN201110062041A CN102163529A CN 102163529 A CN102163529 A CN 102163529A CN 201110062041 CN201110062041 CN 201110062041 CN 201110062041 A CN201110062041 A CN 201110062041A CN 102163529 A CN102163529 A CN 102163529A
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Abstract
The invention discloses a movable diaphragm device for a condensing mirror of an electron microscope, belonging to the field of the electron microscopes. In the device, a positioning groove and a pressure sheet are arranged on a diaphragm frame, and a diaphragm sheet is pressed in the positioning groove through the pressure sheet; four through holes with different apertures are arranged on the diaphragm sheet as diaphragm holes; and the diaphragm frame is arranged at the front end of a diaphragm shaft of a diaphragm hole regulating device and can regulate the diaphragm shaft to select the diaphragm holes on the diaphragm sheet and perform precision adjustment in three spatial directions through a regulating handle, a tail cover screw cap and a fine adjustment device arranged on the diaphragm hole regulating device, thereby enabling the centers of the diaphragm holes to be positioned on an axial line of an electron beam. The device is simple in structure and convenient to select and position the through holes in the different apertures as the diaphragm holes, so that different lighting aperture angles can be further obtained, and a second condensing mirror to realize the purpose of providing the different lighting aperture angles against different samples.
Description
Technical field
The present invention relates to the Electron Microscopy field, relate in particular to a kind of movable aperture device of condenser of electron microscope.
Background technology
Electron microscope is a kind of important instrument that can observe small material, can observe the following material of 0.25nm.Electron microscope as lighting source, with magnetic lens or the electrostatic lens device as the deflection electronics, realizes that optics amplifies with electron beam.Electron microscope has very application prospects in the army and the people fields such as physics, chemistry, material, scientific research, life science, geology, mine locating, mechanical industry, electronics industries.
Electron microscope is radiated on the sample by electron beam, realizes the observation to sample, and electron gun and condenser are the illuminators of electron microscope.Electron microscope requires condenser that the electron beam of high-high brightness can be provided, and the electron beam aperture that is radiated on the sample must be able to be regulated within the specific limits, and the big I of illuminated spot is selected on demand.Condenser is to be imaged onto on the sample as the object of imaging with the crosspoint of electron gun, and general crossover of electron gun, is of a size of tens microns.In order to keep certain height and beam spot to be limited in minimum to the influence of sample heating, the bundle spot that requires the sample place is several microns, and to this, condenser must dwindle beam spot.For the high performance electronic microscope, different sample requirements has different bundle spot sizes, should select different illuminating aperture angles to different samples, to this, has designed the second condenser device that can continuously change illuminating aperture angle.But how to obtain different illuminating aperture angles by second condenser, be the problem that a needs solves.
Summary of the invention
The purpose of embodiment of the present invention provides a kind of movable aperture device of condenser of electron microscope, can be arranged on second condenser of electron microscope, by selecting different apertures, obtain different illuminating aperture angles, make second condenser realize to provide different illuminating aperture angles at different sample requirements.
The objective of the invention is to be achieved through the following technical solutions:
Embodiment of the present invention provides a kind of condenser of electron microscope movable aperture device, comprising:
Diaphragm frame, diaphragm sheet, compressing tablet and aperture adjusting device;
Described diaphragm frame is provided with location notch and compressing tablet, and described diaphragm sheet is arranged in the described location notch, and pushes down by described compressing tablet; Arrange on the described diaphragm sheet and be provided with the different through hole in four apertures as aperture;
Described aperture adjusting device is provided with the diaphragm axle, and described diaphragm frame is arranged on described diaphragm axle front end, by the aperture adjusting device regulate that described diaphragm axle is selected the aperture of the diaphragm sheet on the described diaphragm frame and three directions in space on the fine setting location;
Described aperture adjusting device also is provided with regulating handle, tail-hood nut and micromatic setting, and described diaphragm shaft rear end is provided with described regulating handle, can protract under the control of described regulating handle or after contract to different gears; Described tail-hood nut is positioned at the rear portion of described aperture adjusting device, and described tail-hood nut is connected with described diaphragm shaft rear end through pull bar, can control the front and back position that described diaphragm axle is adjusted diaphragm sheet on the described diaphragm frame; Described diaphragm axle is corresponding with described micromatic setting, under the control of described micromatic setting, by adjusting described diaphragm axle the diaphragm sheet on the described diaphragm frame is carried out the position adjustment of level and vertical direction, the aperture center of the diaphragm sheet on the described diaphragm frame is on the axis of electron beam.
The movable aperture device that embodiment of the present invention provides, be arranged on the front end of the diaphragm axle of aperture adjusting device through diaphragm frame and compressing tablet as the diaphragm sheet of aperture by having four different apertures through holes, thereby can select to use aperture on the diaphragm sheet easily by the aperture adjusting device, and accurate adjustment on three directions in space, the center of aperture is on the beam axis.This apparatus structure is simple, easy to operate, good airproof performance, be used in second condenser of electron microscope, by selecting different apertures, obtain different illuminating aperture angles, make second condenser realize to provide different illuminating aperture angles, thereby improve the performance of electron microscope at different sample requirements.
Description of drawings
In order to be illustrated more clearly in the technical scheme of the embodiment of the invention, the accompanying drawing of required use is done to introduce simply in will describing embodiment below, apparently, accompanying drawing in describing below only is some embodiments of the present invention, for those of ordinary skill in the art, under the prerequisite of not paying creative work, can also obtain other accompanying drawings according to these accompanying drawings.
The structural representation of the movable aperture device that Fig. 1 provides for the embodiment of the invention;
The structural representation of the diaphragm frame of the movable aperture device that Fig. 2 provides for the embodiment of the invention;
The structural representation of the diaphragm sheet of the movable aperture device that Fig. 3 provides for the embodiment of the invention;
The main TV structure schematic diagram of the movable aperture device that Fig. 4 provides for the embodiment of the invention;
Fig. 5 is the A-A face sectional structure schematic diagram of the movable aperture device of Fig. 4;
The backsight structural representation of the movable aperture device that Fig. 6 provides for the embodiment of the invention;
Another angle structural representation of the movable aperture device that Fig. 7 provides for the embodiment of the invention;
Fig. 8 is the B-B face sectional structure schematic diagram of the movable aperture device of Fig. 7;
The structural representation of the bearing of the movable aperture device that Fig. 9 provides for the embodiment of the invention;
The bearing of the movable aperture device that Figure 10 provides for the embodiment of the invention and the semicircle piece connection diagram of micromatic setting;
The structural representation that the diaphragm axle of the movable aperture device that Figure 11 provides for the embodiment of the invention cooperates with spring;
The structural representation of the regulating handle of the movable aperture device that Figure 12 provides for the embodiment of the invention;
The structural representation of the spacing collar of the movable aperture device that Figure 13 provides for the embodiment of the invention;
Another angle structural representation of the spacing collar of the movable aperture device that Figure 14 provides for the embodiment of the invention;
Each label is among the figure: 1-aperture adjusting device; The 100-bearing; 101-diaphragm axle, the 102-micromatic setting; The 103-regulating handle; 104-scale ring; The 105-tail-hood; 106-tail-hood nut; The 107-axle sleeve; The 108-seal head; The 109-sealing ring; The 1010-dog screw; The 1011-spacing collar; 1012-contact point sealing ring; The 1013-buffer spring; The 1014-sleeve pipe; The 1015-pull bar; The 1016-positioning screw hole; The 1017-lining; The 1018-sleeve; The 1021-nut; 1022-regulates nut; The 1023-spring; The circular fill block of 1024-; The 1025-push rod; The 1026-steel ball; The circular fill block two of 1027-; 2-diaphragm frame; The 201-location notch; The 3-compressing tablet; 4-diaphragm sheet.
Embodiment
Below in conjunction with the accompanying drawing in the embodiment of the invention, the technical scheme in the embodiment of the invention is clearly and completely described, obviously, described embodiment only is the present invention's part embodiment, rather than whole embodiment.Based on embodiments of the invention, those of ordinary skills belong to protection scope of the present invention not making the every other embodiment that is obtained under the creative work prerequisite.
Below in conjunction with accompanying drawing the embodiment of the invention is described in further detail.
The embodiment of the invention provides a kind of condenser of electron microscope movable aperture device, can be used in second condenser of electron microscope, and shown in Fig. 1～3, this device comprises: aperture adjusting device 1, diaphragm frame 2, diaphragm sheet 4 and compressing tablet 3;
Wherein, diaphragm frame 2 is provided with location notch 201 and compressing tablet 3, diaphragm sheet 4 is located in the location notch 201 of diaphragm frame 2, and is pressed in the location notch 201 by the compressing tablet 3 that is arranged on the diaphragm frame 2, arranges by strip on the diaphragm sheet 4 and is provided with the different through hole in four apertures as aperture; As shown in Figure 3, the diaphragm sheet that diaphragm sheet 4 can adopt molybdenum sheet to make, around the aperture of diaphragm sheet 4,4 crescent moon holes 401 can be set, be difficult for heat radiation around making aperture, adstante febre behind beam bombardment, can make aperture be in very high-temperature, thereby be difficult for contaminant deposition, realize the self-cleaning function.
The aperture adjusting device also comprises: regulating handle 103, tail-hood nut 106 and micromatic setting 102, the front end that diaphragm frame 2 is set of described diaphragm axle 101 reaches outside the described aperture adjusting device 1, described diaphragm axle 101 rear ends are set with described regulating handle 103, diaphragm axle 101 can protract under the control of described regulating handle 103 or after contract to adjust to different gears; Described tail-hood nut is positioned at the rear portion of described aperture adjusting device, and described tail-hood nut 106 is connected with described diaphragm axle 101 rear ends through pull bar 1015, can control the front and back position that described diaphragm axle 101 is adjusted diaphragm sheet 4 on the described diaphragm frame 2; Described diaphragm axle 101 is corresponding with described micromatic setting 102, under the control of described micromatic setting 102, finely tunes the location in the horizontal and vertical directions by the diaphragm sheet of adjusting on 101 pairs of described diaphragm framves 2 of diaphragm axle 4;
Be arranged on the diaphragm frame 2 of diaphragm axle 101 front ends, can the diaphragm axle be protracted or after contract and select different gears, thereby the different apertures on the diaphragm sheet 4 of selection diaphragm axle 101 front end diaphragm framves 2 can carry out the fine setting of space all directions to the diaphragm sheet 4 behind the selection gear and locate by micromatic setting 102.
Shown in Fig. 4～14, the aperture adjusting device 1 in the above-mentioned movable aperture device specifically comprises: bearing 100, sleeve 1018, axle sleeve 107, diaphragm axle 101, regulating handle 103, seal head 108, sealing ring 109, micromatic setting 102, spacing collar 1011, scale ring 104, tail-hood 105 and tail-hood nut 106;
Wherein, bearing 100 is square body (seeing Fig. 9,10), be provided with through hole 1001 in it, sleeve 1018 is fixedly installed in the described through hole 1001, and axle sleeve 107 is sleeved in the described sleeve 1018, described diaphragm axle 101 is movably arranged in the described axle sleeve 107, stretch out outside axle sleeve 107 at diaphragm axle 101 two ends, and axle sleeve 107 front ends are provided with seal head 108, are provided with sealing ring 109 in the seal head 108, during use, can guarantee the vacuum degree in the lens barrel;
The rear end of bearing 100 is provided with described micromatic setting 102, micromatic setting 102 is provided with two the semicircle pieces and a locating piece of fixedlying connected with bearing 100 rear ends and (sees Fig. 5,10), locating piece is the middle square structure that has through hole, its three outer walls are provided with the circular groove of placing circular fill block, locating piece is sleeved on outside the described axle sleeve 107, two semicircle pieces are around the outside that is arranged on described axle sleeve 107 rear ends, all be screwed and be connected with described bearing 100, two semicircle pieces are sleeved on the outside of locating piece, wherein be distributed with four screw cap holes on two semicircle pieces, be equipped with nut in three screw cap holes, three nuts are vertical mutually, two nut front ends all are equipped with spring, and the spring front end is equipped with circular fill block, the circular fill block of two nut front ends is separately positioned in the circular groove of the locating piece outside the axle sleeve, the outside of withstanding described axle sleeve 107 by locating piece; Another one nut front end is equipped with circular fill block, and circular fill block is arranged in the circular groove of described nut front end, and its front end withstands the outside of described axle sleeve 107 by locating piece; Be provided with push rod 1025 in another screw cap hole of semicircle piece, push rod 1025 front and back ends are equipped with movable steel ball 1026, push rod 1025 rear ends are provided with regulates nut 1022, and push rod 1025 front ends are provided with circular fill block 2 1027, and circular fill block 2 1027 withstands described axle sleeve 107 outsides by locating piece.Drive push rod 1025, scalable axle sleeve 107 and the interior location of diaphragm axle 101 on direction in space thereof by the adjusting nut 1022 of regulating micromatic setting 102.
Described diaphragm axle 101 outsides are set with buffer spring 1013, buffer spring 1013 is arranged between diaphragm axle 101 and the axle sleeve 107, can when regulating diaphragm axle 101, play cushioning effect, be connected with sleeve pipe 1014 and pull bar 1015 (seeing Figure 11) on the diaphragm axle 101 of axle sleeve 107 rear ends in turn, described regulating handle 103 movable sets are in described sleeve pipe 1014 outsides, the front end movable set of described regulating handle 103 is outside described scale ring 104, sleeve pipe 1014 fixed outside suits are provided with spacing collar 1011, spacing collar 1011 is provided with a plurality of locating grooves, and spacing collar 1011 is arranged between sleeve pipe 1014 and the regulating handle 103; Described regulating handle 103 is provided with positioning screw hole 1016, be provided with dog screw 1010 in the positioning screw hole 1016, dog screw 1010 passes the body of described regulating handle 103, its front end is corresponding with the locating groove that is fixed on the spacing collar 1011 on the sleeve pipe 1014 in the described regulating handle 103, can be when rotating regulating handle 103, dog screw 1010 is stuck in the different locating grooves of spacing collar 1011, thereby realizes diaphragm axle 107 is carried out the flexible location of different gears.
Rear end at regulating handle 103 and diaphragm axle 101 is provided with tail-hood 105, described tail-hood 105 spiral-locks are on the opening of regulating handle 103 rear ends, tail-hood 105 can close the opening of described regulating handle 103 rear ends, and tail-hood 105 usefulness screws are fixedlyed connected with the lining 1017 outside being sleeved on described pull bar 1015.
Above-mentioned movable aperture device can be provided with rubber seal at the position that bearing contacts the second condenser lens barrel, thereby when using, can guarantee the vacuum degree of lens barrel inside.
Above-mentioned movable aperture device is fixed on the diaphragm sheet on the diaphragm frame, and the diaphragm frame is fixed on the diaphragm axle of aperture adjusting device, and that the afterbody of diaphragm axle has designed in the aperture adjusting device is corresponding spacing, has reduced adjusting range; Can select the aperture on the diaphragm sheet of diaphragm axle front end easily by regulating handle, adjustment nut and tail-hood nut by micromatic setting can carry out the precision adjustment of space all directions to the diaphragm molybdenum sheet, thereby realize the multi-direction adjustment flexibly of diaphragm sheet.When this movable aperture device uses, be arranged on second condenser of electron microscope, aperture center on its diaphragm sheet is on the beam axis, regulating handle is in the outside of the second condenser mirror body, can select to be provided with aperture on the movable aperture device diaphragm of second condenser sheet easily by regulating handle, thereby can obtain different illuminating aperture angles, realize providing different illuminating aperture angles, can effectively improve the performance of electron microscope at the requirement of different samples.
The above; only for the preferable embodiment of the present invention, but protection scope of the present invention is not limited thereto, and anyly is familiar with those skilled in the art in the technical scope that the present invention discloses; the variation that can expect easily or replacement all should be encompassed within protection scope of the present invention.Therefore, protection scope of the present invention should be as the criterion with the protection range of claims.
Claims (7)
1. the movable aperture device of the condenser of an electron microscope is characterized in that, comprising:
Diaphragm frame, diaphragm sheet, compressing tablet and aperture adjusting device;
Described diaphragm frame is provided with location notch and compressing tablet, and described diaphragm sheet is arranged in the described location notch, and pushes down by described compressing tablet; Arrange on the described diaphragm sheet and be provided with the different through hole in four apertures as aperture;
Described aperture adjusting device is provided with the diaphragm axle, described diaphragm frame is arranged on described diaphragm axle front end, can by described aperture adjusting device regulate that described diaphragm axle is selected the aperture of the diaphragm sheet on the described diaphragm frame and three directions in space on the fine setting location;
Described aperture adjusting device also is provided with regulating handle, tail-hood nut and micromatic setting, and described diaphragm shaft rear end is provided with described regulating handle, can protract under the control of described regulating handle or after contract to different gears; Described tail-hood nut is positioned at the rear portion of described aperture adjusting device, is connected with described diaphragm shaft rear end through pull bar, can control the front and back position that described diaphragm axle is adjusted diaphragm sheet on the described diaphragm frame; Described diaphragm axle is corresponding with described micromatic setting, under the control of described micromatic setting, by adjusting described diaphragm axle the diaphragm sheet on the described diaphragm frame is carried out the position adjustment of level and vertical direction, the center of the aperture of diaphragm sheet on the described diaphragm frame is on the axis of electron beam.
2. the movable aperture device of the condenser of electron microscope according to claim 1 is characterized in that, described aperture adjusting device also comprises:
Bearing, sleeve, axle sleeve, seal head, sealing ring, spacing collar, scale ring and tail-hood;
Be provided with through hole in the bearing, sleeve is fixedly installed in the described through hole, and axle sleeve is sleeved in the described sleeve, and described diaphragm axle is movably arranged in the described axle sleeve, and stretch out outside axle sleeve at diaphragm axle two ends, and the axle sleeve front end is provided with seal head, is provided with sealing ring in the seal head;
The rear end of bearing is provided with described micromatic setting, and micromatic setting is provided with a plurality of trimming parts around distribution around being arranged on described axle sleeve outside on the micromatic setting, and all outer with the being sleeved on axle sleeve locating piece of the front end of each trimming part contacts;
Axle sleeve rear end near micromatic setting is provided with the scale ring, and the scale ring set is contained in the axle sleeve outside;
Be connected with sleeve pipe, pull bar in turn on the diaphragm axle of described axle sleeve rear end, described regulating handle movable set is in described cover tube outside, the front end movable set of described regulating handle is outside described scale ring, the sleeve pipe external fixation is provided with spacing collar, spacing collar is arranged between sleeve pipe and the described regulating handle, and spacing collar is provided with a plurality of locating grooves;
The rear end of described regulating handle and diaphragm axle is provided with tail-hood, and described tail-hood spiral-lock can close the opening of described regulating handle rear end on the opening of regulating handle rear end, and tail-hood is fixedlyed connected with the screw lining outer with being sleeved on described pull bar.
3. the movable aperture device of the condenser of electron microscope according to claim 2, it is characterized in that, described diaphragm axle is located in the described axle sleeve and is: in diaphragm axle outside buffer spring is set, described buffer spring is arranged between diaphragm axle and the described axle sleeve.
4. the movable aperture device of the condenser of electron microscope according to claim 2, it is characterized in that, described micromatic setting is around being arranged on described axle sleeve outside, around distribution a plurality of trimming parts being set on the micromatic setting is: micromatic setting is provided with two semicircle pieces and a locating piece, locating piece is sleeved on outside the described axle sleeve, two semicircle pieces all are screwed with described bearing and are connected, two semicircle pieces are sleeved on described locating piece outside, be distributed with four screw cap holes on two semicircle pieces, be equipped with nut in three screw cap holes, three nuts are vertical mutually, two nut front ends are equipped with spring, the spring front end is equipped with circular fill block, circular fill block is separately positioned in the circular groove of described locating piece, and another one nut front end is equipped with circular fill block, and described circular fill block is arranged in the circular groove of described nut front end, its front end contacts with described locating piece, and three nut front ends all withstand described locating piece by circular fill block;
Be provided with push rod in another screw cap hole of semicircle piece, the push rod front and back ends is equipped with movable steel ball, and putting back-end is provided with the adjusting nut, and the push rod front end is provided with circular fill block, circular fill block is contained in the circular groove of described locating piece, and the push rod front end withstands described locating piece by circular fill block.
5. the movable aperture device of the condenser of electron microscope according to claim 4 is characterized in that, described locating piece is the middle square structure that has through hole, and its three outer walls are provided with the circular groove of placing fill block.
6. the movable aperture device of the condenser of electron microscope according to claim 2, it is characterized in that, described regulating handle is provided with dog screw, dog screw passes described regulating handle body, its front end is corresponding with the locating groove of the spacing collar of described regulating handle internal fixation on described sleeve pipe, can cooperate the locating groove of spacing collar to make the diaphragm axle be positioned to different gears when regulating described regulating handle.
7. the movable aperture device of the condenser of electron microscope according to claim 1 is characterized in that, the diaphragm sheet of described diaphragm sheet for adopting molybdenum sheet to make is provided with 4 crescent moon holes around the aperture of described diaphragm sheet.
Priority Applications (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| CN201110062041XA CN102163529B (en) | 2011-03-15 | 2011-03-15 | Movable diaphragm device for condensing mirror of electron microscope |
Applications Claiming Priority (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| CN201110062041XA CN102163529B (en) | 2011-03-15 | 2011-03-15 | Movable diaphragm device for condensing mirror of electron microscope |
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| Publication Number | Publication Date |
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| CN102163529A true CN102163529A (en) | 2011-08-24 |
| CN102163529B CN102163529B (en) | 2012-07-25 |
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| Application Number | Title | Priority Date | Filing Date |
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| CN201110062041XA Expired - Fee Related CN102163529B (en) | 2011-03-15 | 2011-03-15 | Movable diaphragm device for condensing mirror of electron microscope |
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Cited By (5)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| CN103198994A (en) * | 2013-03-17 | 2013-07-10 | 中国科学院苏州纳米技术与纳米仿生研究所 | Transmission electron microscope objective lens diaphragm |
| CN106711003A (en) * | 2017-02-15 | 2017-05-24 | 聚束科技（北京）有限公司 | Electron source generating device and electron beam control method |
| CN110797246A (en) * | 2019-11-15 | 2020-02-14 | 河南河大科技发展有限公司 | Diaphragm adjusting device for transmission electron microscope intermediate mirror |
| CN112289668A (en) * | 2020-09-28 | 2021-01-29 | 北京中科科仪股份有限公司 | Driving mechanism of electron microscope detector and electron microscope detector device |
| CN115513020A (en) * | 2022-11-24 | 2022-12-23 | 北京中科科仪股份有限公司 | Centering adjustment tool, electron beam spot detection device and centering adjustment method |
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| EP0352085A2 (en) * | 1988-07-22 | 1990-01-24 | Hitachi, Ltd. | Electron Microscope |
| CN101131470A (en) * | 2007-09-21 | 2008-02-27 | 北京工业大学 | Diaphragm ultraviolet laser micromachining system used for scanning electron microscope and method thereof |
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| US4823006A (en) * | 1987-05-21 | 1989-04-18 | Electroscan Corporation | Integrated electron optical/differential pumping/imaging signal detection system for an environmental scanning electron microscope |
| EP0352085A2 (en) * | 1988-07-22 | 1990-01-24 | Hitachi, Ltd. | Electron Microscope |
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Cited By (7)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| CN103198994A (en) * | 2013-03-17 | 2013-07-10 | 中国科学院苏州纳米技术与纳米仿生研究所 | Transmission electron microscope objective lens diaphragm |
| CN103198994B (en) * | 2013-03-17 | 2016-06-22 | 中国科学院苏州纳米技术与纳米仿生研究所 | Objective lens of the transmission electron microscope diaphragm |
| CN106711003A (en) * | 2017-02-15 | 2017-05-24 | 聚束科技（北京）有限公司 | Electron source generating device and electron beam control method |
| CN106711003B (en) * | 2017-02-15 | 2019-03-19 | 聚束科技（北京）有限公司 | A kind of electronics source generating device and electron beam control method |
| CN110797246A (en) * | 2019-11-15 | 2020-02-14 | 河南河大科技发展有限公司 | Diaphragm adjusting device for transmission electron microscope intermediate mirror |
| CN112289668A (en) * | 2020-09-28 | 2021-01-29 | 北京中科科仪股份有限公司 | Driving mechanism of electron microscope detector and electron microscope detector device |
| CN115513020A (en) * | 2022-11-24 | 2022-12-23 | 北京中科科仪股份有限公司 | Centering adjustment tool, electron beam spot detection device and centering adjustment method |
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|---|---|
| CN102163529B (en) | 2012-07-25 |
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