JP5939814B2 - Sample holder support device - Google Patents
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- JP5939814B2 JP5939814B2 JP2012016175A JP2012016175A JP5939814B2 JP 5939814 B2 JP5939814 B2 JP 5939814B2 JP 2012016175 A JP2012016175 A JP 2012016175A JP 2012016175 A JP2012016175 A JP 2012016175A JP 5939814 B2 JP5939814 B2 JP 5939814B2
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- 239000004696 Poly ether ether ketone Substances 0.000 description 2
- 239000004809 Teflon Substances 0.000 description 2
- 229920006362 Teflon® Polymers 0.000 description 2
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- 239000004952 Polyamide Substances 0.000 description 1
- XUIMIQQOPSSXEZ-UHFFFAOYSA-N Silicon Chemical compound [Si] XUIMIQQOPSSXEZ-UHFFFAOYSA-N 0.000 description 1
- 238000010521 absorption reaction Methods 0.000 description 1
- 239000000919 ceramic Substances 0.000 description 1
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Description
本発明は、試料ホルダー支持装置、及び当該試料ホルダー支持装置を有する電子顕微鏡に関し、特に、ピボット受け部材が複数の球体で構成されている試料ホルダー支持装置、及び当該試料ホルダー支持装置を有する電子顕微鏡に関する。 The present invention relates to a sample holder support device and an electron microscope having the sample holder support device, and in particular, a sample holder support device in which a pivot receiving member is composed of a plurality of spheres, and an electron microscope having the sample holder support device. About.
近年、透過型電子顕微鏡（TEM：Transmission Electron Microscope）、走査透過型電子顕微鏡（STEM：Scanning Transmission Electron Microscope）等の電子顕微鏡における高分解能解析が進んでおり、例えば、ナノオーダーからピコオーダーへと高分解能解析が要望されてきている。 In recent years, high-resolution analysis in electron microscopes such as transmission electron microscopes (TEMs) and scanning transmission electron microscopes (STEMs) has been progressing. There is a demand for resolution analysis.
従来では、ゴニオステージのピポッド部（球体構造）を、球面を有する軸受によって支持されている。例えば、軸受の姿勢を安定させ、かつ、旋回時の摩擦抵抗を小さくするために、軸受の下面の平面状部分に低摩擦剤により形成されたブッシュが固着されている試料ホルダー支持装置が知られている（特許文献１） Conventionally, the piped part (spherical structure) of the gonio stage is supported by a bearing having a spherical surface. For example, a sample holder support device is known in which a bush formed of a low friction agent is fixed to a planar portion of the lower surface of the bearing in order to stabilize the bearing posture and reduce the frictional resistance during turning. (Patent Document 1)
しかしながら、上記特許文献１のような軸受部材は、通常テフロンなどの樹脂によって形成されているが、樹脂への機械加工において、逆球面の真円加工が事実上は不可能であるという問題点を有する。つまり真円で加工できていないため、オス球体形状であるピボットとメス球体形状であるピボット受け部材との理想的なカップリング加工は不可能である。 However, the bearing member as described in Patent Document 1 is usually formed of a resin such as Teflon. However, in machining the resin, the problem that an inverted spherical surface is virtually impossible is practically impossible. Have. That is, since it is not processed with a perfect circle, an ideal coupling process between a pivot having a male sphere shape and a pivot receiving member having a female sphere shape is impossible.
さらに理想的なカップリングで作成可能であっても、当該密着面には、静止摩擦が存在し、微細駆動の際に、摩擦係数が不安定となり、駆動ムラが発生してしまうという問題点を有する。 Furthermore, even if it can be created with an ideal coupling, there is a problem that static friction exists on the contact surface, the coefficient of friction becomes unstable during fine driving, and driving unevenness occurs. Have.
したがって、静止摩擦を極力抑え、駆動ムラが少ない軸受が望まれる。しかし、このような軸受はこれまで知られていない。 Therefore, a bearing that suppresses static friction as much as possible and has less driving unevenness is desired. However, such a bearing has not been known so far.
そこで、本発明は、上記問題点を解決すべく、駆動ムラが少ない試料ホルダー支持装置を提供することを目的とする。 Therefore, an object of the present invention is to provide a sample holder support device with less driving unevenness in order to solve the above-described problems.
上記目的を達成するために、本発明者は、試料ホルダー支持装置のピポッド受け部分の構成と、種々の構成の場合の駆動ムラの発生状況等について鋭意検討を行った結果、本発明を見出すに至った。 In order to achieve the above object, the present inventor has found out the present invention as a result of earnestly examining the configuration of the pipette receiving portion of the sample holder support device and the state of occurrence of drive unevenness in various configurations. It came.
すなわち、本発明の試料ホルダー支持装置は、試料ホルダー保持筒のオス球体形状であるピボッド部と、ゴニオステージのメス球体形状であるピボット受け部材との間に、複数の球体からなる摺動部材を有する試料ホルダー支持装置であって、前記ピボット受け部材は、前記オス球体形状であるピボットの真円精度に則しており、かつ、前記ピボット受け部材には前記球体が回転可能となる孔が設置されており、前記孔内には前記球体受けブッシュを有することを特徴とする。
That is, the sample holder support device of the present invention includes a sliding member composed of a plurality of spheres between a pivot portion having a male sphere shape of a sample holder holding cylinder and a pivot receiving member having a female sphere shape of a gonio stage. A sample holder supporting device , wherein the pivot receiving member conforms to the roundness accuracy of the pivot having the male sphere shape, and the pivot receiving member is provided with a hole through which the sphere can rotate. The spherical body receiving bush is provided in the hole .
本発明の試料ホルダー支持装置の好ましい実施態様において、前記球体は、ルビー球であることを特徴とする。
In a preferred embodiment of the sample holder support device of the present invention, the sphere is a ruby sphere .
本発明の試料ホルダー支持装置の好ましい実施態様において、前記球体の数が、３つ以上であることを特徴とする。 In a preferred embodiment of the sample holder support device of the present invention, the number of the spheres is three or more.
本発明の試料ホルダー支持装置の好ましい実施態様において、前記球体の材質が、非磁性であることを特徴とする。 In a preferred embodiment of the sample holder support device of the present invention, the material of the sphere is non-magnetic.
本発明の電子顕微鏡筒は、本発明の試料ホルダー支持装置を備えたことを特徴とする。 The electron microscope tube of the present invention is characterized by including the sample holder support device of the present invention.
本発明の電子顕微鏡は、本発明の電子顕微鏡鏡筒を有することを特徴とする。 The electron microscope of the present invention has the electron microscope barrel of the present invention.
本発明の試料ホルダー支持装置によれば、ピボットの球面に則した点でピボットを受けることができるので、微細駆動の際にも、駆動ムラを軽減できるという有利な効果を奏する。また、本発明の試料ホルダー支持装置によれば、物理的摩擦係数を減らし、理想的なカップリングにより、カップリングのガタツキを排除することができ、振動が入りにくい構造とすることができるという有利な効果を奏する。 According to the sample holder support device of the present invention, since the pivot can be received at a point corresponding to the spherical surface of the pivot, there is an advantageous effect that driving unevenness can be reduced even during fine driving. Further, according to the sample holder support device of the present invention, it is possible to reduce the physical friction coefficient, eliminate the backlash of the coupling by an ideal coupling, and make it possible to obtain a structure in which vibration is difficult to enter. Has an effect.
本発明の試料ホルダー支持装置は、試料ホルダー保持筒のピポッド部と、ゴニオステージのピボット受け部材との間に、摺動部材を有する。当該摺動部材によって、試料ホルダー保持筒のピポッド部と、ゴニオステージのピボット受け部材との間で生じる、物理的摩擦係数を軽減することができる。すなわち、微細駆動の際に発生する駆動ムラを低減することが可能となる。摺動部材としては、軸を摺動させる部材であれば、特に限定されない。摺動部材としては、摺動用樹脂、例えば、テフロン(登録商標)、PEEK（ポリエーテル・エーテル・ケトン）、ポリアミド材、ベスペルSPシリーズ（登録商標、デュポン社）等を挙げることができる。 The sample holder support device of the present invention has a sliding member between the piped portion of the sample holder holding cylinder and the pivot receiving member of the gonio stage. The sliding member can reduce a physical friction coefficient generated between the piped portion of the sample holder holding cylinder and the pivot receiving member of the gonio stage. That is, it is possible to reduce drive unevenness that occurs during fine drive. The sliding member is not particularly limited as long as it is a member that slides the shaft. Examples of the sliding member include sliding resins such as Teflon (registered trademark), PEEK (polyether ether ketone), polyamide material, Vespel SP series (registered trademark, DuPont).
また、好ましい実施態様において、前記摺動部材が、複数の球体からなる。複数の球体を、ゴニオステージのピボット受け部材に適用して、当該複数の球体を介して、試料ホルダー保持筒のピボット部を受けることによって、より理想的なカップリングを実現することできる。 In a preferred embodiment, the sliding member is composed of a plurality of spheres. By applying a plurality of spheres to the pivot receiving member of the goniostage and receiving the pivot portion of the sample holder holding cylinder via the plurality of spheres, a more ideal coupling can be realized.
本発明の試料ホルダー支持装置の好ましい実施態様において、より理想的なカップリングを実現するという観点から、前記球体の数が、３つ以上である。また、好ましい実施態様において、電子顕微鏡鏡筒の高磁場路間に装着するという観点から、前記球体の材質としては、非磁性である。球体としては、硬質ガラス球、ルビー球、ガラスボール、石英（クオーツ）球、サファイヤボール、ルビーボール、セラミックボール、尖晶石球、キュービックジルコニア球、パイレックス(登録商標)ボール、シリコンボールなどのボール等を挙げることができる。硬度が得られ、耐摩耗性に富むという観点から、球体としては、ルビー球(ルビーボール)が好ましい。これらの球体は、試料ホルダー保持筒のピポッド部と、ゴニオステージのピボット受け部材との間に、設置されていれば特に限定されるものではない。 In a preferred embodiment of the sample holder support device of the present invention, the number of the spheres is three or more from the viewpoint of realizing more ideal coupling. In a preferred embodiment, the material of the sphere is nonmagnetic from the viewpoint of mounting between the high magnetic field paths of the electron microscope barrel. Balls such as hard glass balls, ruby balls, glass balls, quartz (quartz) balls, sapphire balls, ruby balls, ceramic balls, spinel spheres, cubic zirconia balls, Pyrex (registered trademark) balls, silicon balls, etc. Etc. As the sphere, a ruby ball (ruby ball) is preferable from the viewpoint of obtaining hardness and high wear resistance. These spheres are not particularly limited as long as they are installed between the piped portion of the sample holder holding cylinder and the pivot receiving member of the gonio stage.
複数の球体の設置については特に限定されず、試料ホルダー保持筒のピポッド部と、ゴニオステージのピボット受け部材との間で生じる、物理的摩擦係数を軽減することができるように設置すれば足りる。例えば、ゴニオステージのピボット受け部材に、球体が回転可能な孔を設けて、当該孔に球体を設置することができる。 The installation of the plurality of spheres is not particularly limited, and it is sufficient that the physical friction coefficient generated between the piped portion of the sample holder holding cylinder and the pivot receiving member of the gonio stage can be reduced. For example, a hole capable of rotating the sphere can be provided in the pivot receiving member of the gonio stage, and the sphere can be installed in the hole.
このように、ベアリング（3個以上の多数の球体）で、ピボット部を保持することで、ピボットの球面に則した点で受けることが可能になる。また、支持部に球体を配すことで球体自身も回転可能であるので、物理的摩擦を最小限におさえることが可能になる。このように、本発明のベアリング型（スラスト球体型、玉軸受け）を搭載してピボット構造 は、精度高い測定を行うのに種々の優れた点を有する。 In this way, by holding the pivot portion with a bearing (a large number of three or more spheres), it is possible to receive at a point in accordance with the spherical surface of the pivot. In addition, since the sphere itself can be rotated by arranging the sphere on the support portion, it is possible to minimize physical friction. As described above, the pivot structure equipped with the bearing type (thrust sphere type, ball bearing) of the present invention has various excellent points for performing highly accurate measurement.
さらに、オス球体形状であるピボットの真円精度、及びメス球体形状であるピボット受け部材の加工精度はともに高いので、オス球体形状であるピボットの真円精度に則した、メス球体形状への本発明の球体を埋設、適用することで、より理想的なカップリングを作成できる。 Furthermore, since the accuracy of the round shape of the pivot, which is a male sphere shape, and the processing accuracy of the pivot receiving member, which is a shape of a female sphere, are both high, the book to the female sphere shape conforms to the roundness accuracy of the pivot shape, which is a male sphere shape. By embedding and applying the sphere of the invention, a more ideal coupling can be created.
また、本発明の電子顕微鏡筒は、上述した本発明の試料ホルダー支持装置を備えたことを特徴とする。また、本発明の電子顕微鏡は、本発明の電子顕微鏡鏡筒を有することを特徴とする。このような本発明の試料ホルダー支持装置を備えた電子顕微鏡筒及び電子顕微鏡は、高分解能求める電子顕微鏡における、試料制御が向上し、Dataの質が上がるという有利な効果を奏する。
An electron microscope tube of the present invention is characterized by including the above-described sample holder support device of the present invention. Moreover, the electron microscope of the present invention has the electron microscope barrel of the present invention. The electron microscope tube and the electron microscope provided with the sample holder support device of the present invention have the advantageous effects that the sample control is improved and the quality of data is improved in an electron microscope that requires high resolution.
ここで、本発明の高性能透過型電子顕微鏡を用いた実施例を説明するが、本発明は、下記の実施例に限定して解釈されるものではない。また、本発明の要旨を逸脱することなく、適宜変更することが可能であることは言うまでもない。 Here, although the Example using the high performance transmission electron microscope of this invention is described, this invention is limited to the following Example and is not interpreted. Moreover, it cannot be overemphasized that it can change suitably, without deviating from the summary of this invention.
実際に、摺動部材の例として、球体を用いて試作した。球体としては、ルビー球を採用した。図１は、本発明において適用可能な透過型電子顕微鏡の一例における基本構成の概念図を示す。図１中、１は真空領域部、２は電子加速電極、３は絶縁ガス領域、４はＸ線吸収部材、５はコンデンサー絞り（可動機構部）、６は対物絞り(可動機構部)、７は視野制限絞り（可動機構部）、８は第２中間結像レンズ、９は投影レンズ、１０は観察ガラス窓、１１は蛍光スクリーン、１２は画像取得用カメラ、１３はカメラ室、１４は真空仕切りバルブ、１５は第１中間結像レンズ、１６は後焦点レンズ、１７は対物（下極）レンズ、１８は対物（上極）レンズ、１９は第２収束レンズ、２０は第１収束レンズ、２１は真空仕切りバルブ、２２は絶縁硝子、２３は電子線光源（フィラメント）、２４は高電圧送ケーブル、２５は、電子線偏向子、または非点補正子用のコイル部材、２６は各収束電子レンズのコイル部材を、それぞれ示す。通常、このような電子顕微鏡に対して、試料ホルダーを挿入して、試料を観察する。 Actually, as an example of the sliding member, a prototype was made using a sphere. As the sphere, a ruby ball was adopted. FIG. 1 is a conceptual diagram of a basic configuration of an example of a transmission electron microscope applicable in the present invention. In FIG. 1, 1 is a vacuum region portion, 2 is an electron acceleration electrode, 3 is an insulating gas region, 4 is an X-ray absorbing member, 5 is a condenser aperture (movable mechanism portion), 6 is an objective aperture (movable mechanism portion), 7 Is a field limiting aperture (movable mechanism), 8 is a second intermediate imaging lens, 9 is a projection lens, 10 is an observation glass window, 11 is a fluorescent screen, 12 is an image acquisition camera, 13 is a camera room, and 14 is a vacuum. Partition valve, 15 is a first intermediate imaging lens, 16 is a back focus lens, 17 is an objective (lower pole) lens, 18 is an objective (upper pole) lens, 19 is a second convergent lens, 20 is a first convergent lens, 21 is a vacuum partition valve, 22 is an insulating glass, 23 is an electron beam light source (filament), 24 is a high voltage transmission cable, 25 is a coil member for an electron beam deflector or astigmatism corrector, and 26 is each convergent electron. The coil members of the lens are shown respectively. Usually, a sample holder is inserted into such an electron microscope to observe the sample.
図２は、摺動部材の例として、球体を用いた場合のピボット軸受け近傍の構成図の一例を示す図である。図２中、３０は球体（例えば、ルビー球）など摺動部材を組み込む孔、３１はα回転軸、３２はホルダー長手方向用摺動ローラ、３３は摺動部材（例えば、ルビー球）、３４は摺動部材抑えブッシュ、３５は真空保持用Ｏリング、３６はピボット中心軸線、３７はピボット軸、３８はホルダー軸、３９はピボット軸受け、４０は電子顕微鏡の鏡筒を、それぞれ示す。 FIG. 2 is a diagram illustrating an example of a configuration diagram in the vicinity of a pivot bearing when a sphere is used as an example of the sliding member. In FIG. 2, 30 is a hole for incorporating a sliding member such as a sphere (for example, a ruby ball), 31 is an α rotation shaft, 32 is a sliding roller for the holder longitudinal direction, 33 is a sliding member (for example, a ruby ball), 34 Is a sliding member holding bush, 35 is a vacuum holding O-ring, 36 is a pivot center axis, 37 is a pivot shaft, 38 is a holder shaft, 39 is a pivot bearing, and 40 is an electron microscope barrel.
図２に示すように、試料ホルダー保持筒のピボット部と、ゴニオステージのピボット受け部材との間に、摺動部材として、ルビー球３３が設置されている。ルビー球３３は、ルビー球抑えブッシュ３４により、ピボット部の真円加工の仕上がり状態に応じた、理想的なカップリングを実現している。このような球体受けにより、ピボット部を保持することにより、ピボットの球面に則した点でピボットを受けることができる。また、球体自体も回転可能であるので、物理的摩擦を最小限に抑えることができる。
As shown in FIG. 2, a ruby ball 33 is installed as a sliding member between the pivot portion of the sample holder holding cylinder and the pivot receiving member of the gonio stage. The ruby ball 33 realizes an ideal coupling according to the finished state of the round processing of the pivot portion by the ruby
このように、試料ホルダー保持筒のピボット部と、ゴニオステージのピボット受け部材との間に、摺動部材を用いると、物理的摩擦係数を軽減することができ、理想的なカップリングにより、カップリングのガタを排除することができる。したがって、当該部位による振動が入りにくい構造を確保でき、ひいては、より精度が高い電子顕微鏡観察を提供することができ、高分解が求められる電子顕微鏡では、試料制御が向上し、データの質が向上する。 As described above, when a sliding member is used between the pivot portion of the sample holder holding cylinder and the pivot receiving member of the gonio stage, the physical friction coefficient can be reduced. Ring backlash can be eliminated. Therefore, it is possible to secure a structure in which vibration due to the part is difficult to enter, and thus, it is possible to provide more accurate electron microscope observation, and in an electron microscope that requires high resolution, sample control is improved and data quality is improved. To do.
実際に、本発明の試料ホルダー支持装置を電子顕微鏡に用いた結果、高精度な電子顕微鏡観察が可能であることが判明した。 Actually, as a result of using the sample holder support device of the present invention for an electron microscope, it has been found that high-precision electron microscope observation is possible.
このような本発明の試料ホルダー支持装置を備えた電子顕微鏡筒及び電子顕微鏡は、高分解能求める電子顕微鏡における、試料制御が向上し、Dataの質を向上させることが可能であり、広範な範囲での分野において有益である。 The electron microscope tube and electron microscope equipped with the sample holder support device of the present invention can improve sample control and improve the quality of data in an electron microscope for which high resolution is required, and can be used in a wide range. It is useful in the field of
１ 真空領域部
２ 電子加速電極
３ 絶縁ガス領域
４ Ｘ線吸収部材
５ コンデンサー絞り（可動機構部）
６ 対物絞り(可動機構部)
７ 視野制限絞り（可動機構部）
８ 第２中間結像レンズ
９ 投影レンズ
１０ 観察ガラス窓
１１ 蛍光スクリーン
１２ 画像取得用カメラ
１３ カメラ室
１４ 真空仕切りバルブ
１５ 第１中間結像レンズ
１６ 後焦点レンズ
１７ 対物（下極）レンズ
１８ 対物（上極）レンズ
１９ 第２収束レンズ
２０ 第１収束レンズ
２１ 真空仕切りバルブ
２２ 絶縁硝子
２３ 電子線光源（フィラメント）
２４ 高電圧送ケーブル
２５ この印は、電子線偏向子、または非点補正子用のコイル部材を示す
２６ この印は、各収束電子レンズのコイル部材を示す
３０ 球体（例えば、ルビー球）など摺動部材を組み込む孔
３１ α回転軸
３２ ホルダー摺動用ローラ
３３ 摺動部材（例えば、ルビー球）
３４ 摺動部材抑えブッシュ
３５ 真空保持用Ｏリング
３６ ピボット中心軸線
３７ ピボット軸
３８ ホルダー軸
３９ ピボット軸受け
４０ 電子顕微鏡 鏡筒
DESCRIPTION OF SYMBOLS 1 Vacuum area |
6 Objective diaphragm (movable mechanism)
7 Field-limiting diaphragm (movable mechanism)
8 Second
24 High
34 Slide member holding bush 35 Vacuum holding O-
Claims (6)
An electron microscope comprising the electron microscope barrel according to claim 5.
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| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| JPS4718680Y1 (en) * | 1968-07-12 | 1972-06-27 | ||
| JPS5553864A (en) * | 1978-10-18 | 1980-04-19 | Hitachi Ltd | Specimen mover for electron microscope or similar equipment |
| JP2009081080A (en) * | 2007-09-27 | 2009-04-16 | Hitachi High-Technologies Corp | Eucentric test-piece holder in charged particle beam device |
| JP5728162B2 (en) * | 2010-03-30 | 2015-06-03 | 株式会社メルビル | Sample holder and sample driving device |
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