CN102144428B - Ceramic heater - Google Patents
Ceramic heater Download PDFInfo
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- CN102144428B CN102144428B CN2009801347172A CN200980134717A CN102144428B CN 102144428 B CN102144428 B CN 102144428B CN 2009801347172 A CN2009801347172 A CN 2009801347172A CN 200980134717 A CN200980134717 A CN 200980134717A CN 102144428 B CN102144428 B CN 102144428B
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- 239000000919 ceramic Substances 0.000 title claims abstract description 228
- 239000002245 particle Substances 0.000 claims abstract description 125
- 230000002093 peripheral effect Effects 0.000 claims description 11
- 239000013078 crystal Substances 0.000 claims description 10
- 238000010438 heat treatment Methods 0.000 abstract description 57
- 238000012546 transfer Methods 0.000 abstract description 3
- 239000010954 inorganic particle Substances 0.000 abstract 1
- PNEYBMLMFCGWSK-UHFFFAOYSA-N Alumina Chemical compound [O-2].[O-2].[O-2].[Al+3].[Al+3] PNEYBMLMFCGWSK-UHFFFAOYSA-N 0.000 description 21
- 238000012360 testing method Methods 0.000 description 16
- 238000000034 method Methods 0.000 description 12
- 230000015572 biosynthetic process Effects 0.000 description 11
- XEEYBQQBJWHFJM-UHFFFAOYSA-N Iron Chemical compound [Fe] XEEYBQQBJWHFJM-UHFFFAOYSA-N 0.000 description 10
- 238000007639 printing Methods 0.000 description 10
- 239000000463 material Substances 0.000 description 9
- 230000000694 effects Effects 0.000 description 8
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- 229910052742 iron Inorganic materials 0.000 description 5
- 239000000853 adhesive Substances 0.000 description 4
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- 230000005540 biological transmission Effects 0.000 description 4
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- 230000001788 irregular Effects 0.000 description 4
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- 229910010271 silicon carbide Inorganic materials 0.000 description 4
- 229910017083 AlN Inorganic materials 0.000 description 3
- PIGFYZPCRLYGLF-UHFFFAOYSA-N Aluminum nitride Chemical compound [Al]#N PIGFYZPCRLYGLF-UHFFFAOYSA-N 0.000 description 3
- 229910052581 Si3N4 Inorganic materials 0.000 description 3
- 239000012530 fluid Substances 0.000 description 3
- 239000000446 fuel Substances 0.000 description 3
- HQVNEWCFYHHQES-UHFFFAOYSA-N silicon nitride Chemical compound N12[Si]34N5[Si]62N3[Si]51N64 HQVNEWCFYHHQES-UHFFFAOYSA-N 0.000 description 3
- 238000005245 sintering Methods 0.000 description 3
- 208000037656 Respiratory Sounds Diseases 0.000 description 2
- 238000005452 bending Methods 0.000 description 2
- 230000000052 comparative effect Effects 0.000 description 2
- 239000004020 conductor Substances 0.000 description 2
- 238000001816 cooling Methods 0.000 description 2
- 238000007598 dipping method Methods 0.000 description 2
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- 239000012467 final product Substances 0.000 description 2
- 238000002347 injection Methods 0.000 description 2
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- 239000011159 matrix material Substances 0.000 description 2
- 239000007769 metal material Substances 0.000 description 2
- BASFCYQUMIYNBI-UHFFFAOYSA-N platinum Chemical compound [Pt] BASFCYQUMIYNBI-UHFFFAOYSA-N 0.000 description 2
- 239000003870 refractory metal Substances 0.000 description 2
- 238000004626 scanning electron microscopy Methods 0.000 description 2
- 229910000679 solder Inorganic materials 0.000 description 2
- 238000005507 spraying Methods 0.000 description 2
- XLYOFNOQVPJJNP-UHFFFAOYSA-N water Substances O XLYOFNOQVPJJNP-UHFFFAOYSA-N 0.000 description 2
- 229910017944 Ag—Cu Inorganic materials 0.000 description 1
- 229910002708 Au–Cu Inorganic materials 0.000 description 1
- RYGMFSIKBFXOCR-UHFFFAOYSA-N Copper Chemical compound [Cu] RYGMFSIKBFXOCR-UHFFFAOYSA-N 0.000 description 1
- 239000001856 Ethyl cellulose Substances 0.000 description 1
- ZZSNKZQZMQGXPY-UHFFFAOYSA-N Ethyl cellulose Chemical compound CCOCC1OC(OC)C(OCC)C(OCC)C1OC1C(O)C(O)C(OC)C(CO)O1 ZZSNKZQZMQGXPY-UHFFFAOYSA-N 0.000 description 1
- 229910000990 Ni alloy Inorganic materials 0.000 description 1
- 235000008331 Pinus X rigitaeda Nutrition 0.000 description 1
- 235000011613 Pinus brutia Nutrition 0.000 description 1
- 241000018646 Pinus brutia Species 0.000 description 1
- 229910004298 SiO 2 Inorganic materials 0.000 description 1
- 239000002253 acid Substances 0.000 description 1
- 230000004520 agglutination Effects 0.000 description 1
- 239000012298 atmosphere Substances 0.000 description 1
- 239000000306 component Substances 0.000 description 1
- 229910052802 copper Inorganic materials 0.000 description 1
- 239000010949 copper Substances 0.000 description 1
- 238000009792 diffusion process Methods 0.000 description 1
- 238000009713 electroplating Methods 0.000 description 1
- 238000005516 engineering process Methods 0.000 description 1
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- 238000002309 gasification Methods 0.000 description 1
- 239000011521 glass Substances 0.000 description 1
- 238000004519 manufacturing process Methods 0.000 description 1
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- 229910052751 metal Inorganic materials 0.000 description 1
- 239000002184 metal Substances 0.000 description 1
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- 239000000203 mixture Substances 0.000 description 1
- 229910052759 nickel Inorganic materials 0.000 description 1
- 150000004767 nitrides Chemical class 0.000 description 1
- 239000012299 nitrogen atmosphere Substances 0.000 description 1
- 230000001590 oxidative effect Effects 0.000 description 1
- 239000011224 oxide ceramic Substances 0.000 description 1
- 229910052574 oxide ceramic Inorganic materials 0.000 description 1
- 235000011837 pasties Nutrition 0.000 description 1
- 229910052697 platinum Inorganic materials 0.000 description 1
- 239000000843 powder Substances 0.000 description 1
- 238000012545 processing Methods 0.000 description 1
- 230000005855 radiation Effects 0.000 description 1
- 239000002994 raw material Substances 0.000 description 1
- 239000011347 resin Substances 0.000 description 1
- 229920005989 resin Polymers 0.000 description 1
- HBMJWWWQQXIZIP-UHFFFAOYSA-N silicon carbide Chemical compound [Si+]#[C-] HBMJWWWQQXIZIP-UHFFFAOYSA-N 0.000 description 1
- 229910052709 silver Inorganic materials 0.000 description 1
- 238000005476 soldering Methods 0.000 description 1
- 239000000126 substance Substances 0.000 description 1
Images
Classifications
-
- H—ELECTRICITY
- H05—ELECTRIC TECHNIQUES NOT OTHERWISE PROVIDED FOR
- H05B—ELECTRIC HEATING; ELECTRIC LIGHT SOURCES NOT OTHERWISE PROVIDED FOR; CIRCUIT ARRANGEMENTS FOR ELECTRIC LIGHT SOURCES, IN GENERAL
- H05B3/00—Ohmic-resistance heating
- H05B3/10—Heating elements characterised by the composition or nature of the materials or by the arrangement of the conductor
- H05B3/12—Heating elements characterised by the composition or nature of the materials or by the arrangement of the conductor characterised by the composition or nature of the conductive material
-
- H—ELECTRICITY
- H05—ELECTRIC TECHNIQUES NOT OTHERWISE PROVIDED FOR
- H05B—ELECTRIC HEATING; ELECTRIC LIGHT SOURCES NOT OTHERWISE PROVIDED FOR; CIRCUIT ARRANGEMENTS FOR ELECTRIC LIGHT SOURCES, IN GENERAL
- H05B3/00—Ohmic-resistance heating
- H05B3/10—Heating elements characterised by the composition or nature of the materials or by the arrangement of the conductor
- H05B3/12—Heating elements characterised by the composition or nature of the materials or by the arrangement of the conductor characterised by the composition or nature of the conductive material
- H05B3/14—Heating elements characterised by the composition or nature of the materials or by the arrangement of the conductor characterised by the composition or nature of the conductive material the material being non-metallic
- H05B3/141—Conductive ceramics, e.g. metal oxides, metal carbides, barium titanate, ferrites, zirconia, vitrous compounds
-
- H—ELECTRICITY
- H05—ELECTRIC TECHNIQUES NOT OTHERWISE PROVIDED FOR
- H05B—ELECTRIC HEATING; ELECTRIC LIGHT SOURCES NOT OTHERWISE PROVIDED FOR; CIRCUIT ARRANGEMENTS FOR ELECTRIC LIGHT SOURCES, IN GENERAL
- H05B3/00—Ohmic-resistance heating
- H05B3/10—Heating elements characterised by the composition or nature of the materials or by the arrangement of the conductor
- H05B3/12—Heating elements characterised by the composition or nature of the materials or by the arrangement of the conductor characterised by the composition or nature of the conductive material
- H05B3/14—Heating elements characterised by the composition or nature of the materials or by the arrangement of the conductor characterised by the composition or nature of the conductive material the material being non-metallic
-
- H—ELECTRICITY
- H05—ELECTRIC TECHNIQUES NOT OTHERWISE PROVIDED FOR
- H05B—ELECTRIC HEATING; ELECTRIC LIGHT SOURCES NOT OTHERWISE PROVIDED FOR; CIRCUIT ARRANGEMENTS FOR ELECTRIC LIGHT SOURCES, IN GENERAL
- H05B3/00—Ohmic-resistance heating
- H05B3/10—Heating elements characterised by the composition or nature of the materials or by the arrangement of the conductor
- H05B3/18—Heating elements characterised by the composition or nature of the materials or by the arrangement of the conductor the conductor being embedded in an insulating material
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- Chemical & Material Sciences (AREA)
- Engineering & Computer Science (AREA)
- Ceramic Engineering (AREA)
- Resistance Heating (AREA)
Abstract
Disclosed is a ceramic heater having excellent heat transfer characteristics which affords a reduction in the heating time of an object to be heated and a reduction in the temperature distribution across the surface thereof. A ceramic heater (10) is constituted of an exothermic body (2) provided within a plate-shaped ceramic body (1), and a large number of inorganic particles (6) fixed to the main surface of the ceramic body (1). The specific surface area of the main surface of the ceramic heater (10) is increased by the large number of particles (6) fixed thereto and the heat transfer efficiency to the object to be heated is improved, and the heating time can be reduced. In addition, the temperature distribution across the main surface of the ceramic body (1) can be reduced.
Description
Technical field
The present invention relates to a kind of ceramic heater for curling iron, water heater, lambda sensor, air-fuel ratio sensor, spark plug etc.
Background technology
In the past, the heating of the heater of curling iron and water with and heaters such as the heater used etc. of the liquefaction of fuel, gasification and lambda sensor, air-fuel ratio sensor, spark plug all use ceramic heater.As the ceramic heater that is used for these purposes, for example known have: as shown in Figure 6, in ceramic matrix 101, bury heating resistor 102 underground, the wire portion 103 that is electrically connected in the end with this heating resistor 102 and outer electrode (electrode pad) 104, be connected with the ceramic heater 110 (for example, with reference to patent documentation 1) of the formation of wire element 105 via scolder.At this, Fig. 6 represents the stereogram of the example of ceramic heater in the past.
Patent documentation 1:(Japan) spy opens flat 5-315055 communique
With described purposes be representative ceramic heater in use, need for a long time owing to heating object being heated to temperature desired sometimes, therefore seek for carrying out the ceramic heater that desirable heat treated shortens heating time again.In addition, when the heating heating object, because the Temperature Distribution on ceramic heater surface is inhomogeneous to the heat transmission of heating object, often cause the temperature of heating object irregular, therefore also seek to heat equably the ceramic heater of heating object.And then the ceramic heater that produces big Temperature Distribution during heating is unable to bear the thermal stress that produces because of Temperature Distribution when using repeatedly, cause ceramic matrix to break sometimes.
At these problems, in recent years, seek a kind of ceramic heater, it can more promptly heat heating object and can shorten heating time, can reduce the Temperature Distribution on surface simultaneously, and then, under higher temperature, repeatedly under the harsh environment for use of heating and cooling, also possesses sufficient durability.
Summary of the invention
The present invention develops in view of described problem, and its purpose is to provide a kind of ceramic heater, and it can shorten the heating time to heating object, can reduce the Temperature Distribution on surface, and durability is also good, and heat conductivity is good.
Ceramic heater of the present invention is characterized by, and has heater in the inside of tabular ceramic body, and the particle of a plurality of inanimate matters is fixedly arranged at the interarea of described ceramic body.
In addition, ceramic heater of the present invention is characterized by on the basis of described formation, and described particle is pottery.
In addition, ceramic heater of the present invention is characterized by on the basis of described formation, at two interareas of described ceramic body a plurality of described particles is arranged fixedly.
And then ceramic heater of the present invention is characterized by on the basis of described formation, and a plurality of described particles are fixed on the zone corresponding with described heater of described interarea.
In addition, ceramic heater of the present invention is characterized by on the basis of described formation, and a plurality of described particles also are fixed on the zone between the zone corresponding with described heater of described interarea.
In addition, ceramic heater of the present invention is characterized by on the basis of described formation, and described particle is compared with described ceramic body, the pyroconductivity height.
And then ceramic heater of the present invention is characterized by on the basis of described formation, and the main component of described particle is identical with the main component of described ceramic body.
In addition, ceramic heater of the present invention is characterized by on the basis of described formation, at the peripheral part of the described interarea of described ceramic body the zone of not fixing described particle is arranged.
In addition, ceramic heater of the present invention is characterized by on the basis of described formation, and described particle is the shape that corner angle are arranged.
In addition, ceramic heater of the present invention is characterized by on the basis of described formation, and described particle is greater than the crystal particles of described ceramic body.
According to ceramic heater of the present invention, owing to have heater in the inside of tabular ceramic body, the particle that a plurality of inanimate matters are fixedly arranged at the interarea of described ceramic body, so the specific area of the interarea of the ceramic body of ceramic heater increases because a plurality of particles are fixedly arranged, during heat during the heating heating object is transmitted, fixing particle plays so-called fin effect, and therefore the efficient of transmitting to the heat of heating object improves, and can shorten heating time.In addition, owing to can reduce the Temperature Distribution of interarea of the ceramic body of ceramic heater, so also have the effect that heater that the thermal stress when preventing from using repeatedly causes breaks.
Description of drawings
Fig. 1 is the stereogram of an example of the execution mode of expression ceramic heater of the present invention;
Fig. 2 is the profile of the A-A line section of expression ceramic heater shown in Figure 1;
Fig. 3 is another routine profile of the execution mode of expression ceramic heater of the present invention;
Fig. 4 is another routine stereogram again of the execution mode of expression ceramic heater of the present invention;
Fig. 5 is another routine stereogram again of the execution mode of expression ceramic heater of the present invention;
Fig. 6 represents the stereogram of the example of ceramic heater in the past.
Embodiment
Below, with reference to accompanying drawing, the example of the execution mode of ceramic heater of the present invention is described.Fig. 1 is the stereogram of an example of the execution mode of expression ceramic heater of the present invention, and Fig. 2 is the profile of the A-A line section of expression ceramic heater shown in Figure 1.
As shown in Figure 1, constituting of this routine ceramic heater 10: be embedded with heating resistor 2 in the inside of ceramic body 1, the wire portion 3 that is electrically connected in the end with this heating resistor 2 and outer electrode (electrode pad) 4 are connected with wire element 5 via scolder.And, the particle 6 of a plurality of inanimate matters is fixedly arranged at ceramic body 1 interarea of this routine ceramic heater 1.In addition, in example shown in Figure 1, for the interarea that clearly is illustrated in ceramic body 1 fixedly has the state of particle 6, the number of relevant particle 6 is omitted in the drawings and has only been represented number seldom.
According to ceramic heater 10 of the present invention, as shown in Figures 1 and 2, because the particle 6 of a plurality of inanimate matters is fixedly arranged at the interarea of ceramic body 1, so the specific area of the interarea of ceramic body 1 increases because of particle 6, the efficient that the photothermal radiation efficiency of the heating object when heating heating object relatively or heat are transmitted improves, compare with ceramic heater in the past, can shorten heating time rapidly with the heating object heating.
Why can heat heating object rapidly by such ceramic heater 10, be owing to be the particle 6 that interarea fixedly has a plurality of inanimate matters on the main surface of the tabular ceramic body 1 of ceramic heater 10, and then the specific area of the interarea of ceramic body 1 increases the area of dissipation increase because of particle 6.That is be because the particle 6 of a plurality of inanimate matters has the function that plays so-called fin effect.
In addition, according to ceramic heater 10 of the present invention, owing at the interarea of ceramic body 1 a plurality of particles 6 are arranged fixedly, so also have the effect that the ceramic body 1 when preventing from using repeatedly breaks.This is that the area of dissipation of the interarea of ceramic body 1 increases owing to the interarea that is fixed in the ceramic body 1 of ceramic heater 10 by the particle 6 that makes a plurality of inanimate matters, and the temperature that reduces ceramic body 1 is irregular, distributes so can relax the temperature inside of ceramic heater 10.In addition, can relax simultaneously the Temperature Distribution of ceramic heater 10, it is poor to reduce ceramic heater 10 self temperature inside thus, also has the irregular effect of temperature that can reduce by the heating object of this ceramic heater 10 heating simultaneously.
In the ceramic heater 10 of the present invention, preferred particle 6 is pottery.
Because particle 6 is pottery, so can make particle 6 with respect to the interarea sintering of ceramic body 1 and fixing firmly by burning till, and compare with other the metal material etc. of inanimate matter, also can reduce the thermal expansion difference with ceramic body 1, therefore can be suppressed at heating, particle 6 comes off from the interarea of ceramic body 1 when cooling off ceramic heater 10.In addition, heating object is fluid, especially when fluids such as heating highly basic or strong acid, with respect to these, particle 6 and ceramic body 1 be the same also to have good chemical resistance, therefore uses the situation of metal materials to compare with particle 6, can prolong the life-span of ceramic heater 10.
In addition, as can aluminium oxide (aluminium oxide), aluminium nitride, carborundum etc. being arranged as other the material of inanimate matter of particle 6.In order to make the particle 6 that is formed by aluminium oxide, silicon nitride be fixed on the interarea of ceramic body 1, use organic bond and organic solvent that each powder is formed pasty state, as long as after being coated on the formed body that becomes ceramic body 1 by screen printing etc., burning till simultaneously and get final product.In addition, in order to make the particle that formed by carborundum 6 fixing, as long as be fixed in the interarea of the ceramic body 1 behind the sintering by ceramic spraying etc.
As the size of a plurality of particles 6, select the particle of number μ m~100 μ m levels.In addition, the amplitude of the size by increasing particle 6 can be filled out 6 of macroparticles by enough little particles 6, can further increase the surface area of the interarea of ceramic body 1.
In addition, preferably fixedly there is the density of number of particle 6 of the scope of a plurality of particles 6 to account for the area below 90% more than 30% of area of the interarea of ceramic body 1.If area less than 30%, there is not enough tendency when then increasing the area of interarea of ceramic body 1 in order to obtain effect of the present invention, in addition, owing to partly increase with the noncontact of heating object, be difficult to the tendency equably heat transmitted to heating object so exist.On the other hand, if area surpasses 90%, then owing to the interarea at ceramic body 1, particle 6 exists as agglutination body each other, so there is the tendency of the surface area of the interarea be difficult to effectively to increase ceramic body 1, in addition since with the loose contact of heating object, be difficult to the tendency equably heat transmitted to heating object so exist.
In addition, the shape of particle 6 also can be ball shape and tabular, polygonal column, polygonal taper, polyhedral etc.Wherein, as shown in Figure 2, particle 6 is than ball shape or has the shape that circular shape more has corner angle, can increase the specific area of particle 6 thus, therefore can increase the fin effect, and then can transmit heat efficiently, and is therefore preferred.In addition, if particle 6 is for there being the shape of corner angle, then as described later, maneuverable advantage when also having a plurality of ceramic heater 10 overlapping placements.
In addition, in the ceramic heater 10 of the present invention, as the profile identical with Fig. 2 represent shown in Figure 3, preferably two interareas at ceramic body 1 fixedly have a plurality of particles 6.Fig. 3 is the profile of other example of the execution mode of expression ceramic heater of the present invention.In this case, shown in the example as shown in Figure 2, fixedly there is the situation of particle 6 to compare with the side at the interarea of ceramic body 1 only, the specific area of the interarea of the ceramic body 1 of ceramic heater 10 all increases on the two sides, therefore heat transference efficiency all can be improved in the two sides, be when heating in the fluid dropping into heating object, can heat efficiently, can shorten the heating time to heating object.In addition, can shorten heating time and heat two heating objects that interarea disposes respectively with respect to ceramic body 1 efficiently.And then, can reduce the Temperature Distribution of two interareas, when using repeatedly, can suppress ceramic body 1 to an interarea side warpage, so durability is also good.
In addition, in the ceramic heater 10 of the present invention, as the stereogram identical with Fig. 1 represent shown in Figure 4, preferred a plurality of particles 6 are fixed on the zone corresponding with heater 2 of the interarea of ceramic body 1.Fig. 4 is another routine stereogram again of the execution mode of expression ceramic heater of the present invention.In the example shown in Figure 4, with example shown in Figure 1 in the same manner in the inside of ceramic body 1, heater 2 is adapted to the so-called bending of turning back for three times between couple of conductor portion 3, a plurality of particles 6 also are fixed into forniciform pattern in the zone of the interarea corresponding with this heater 2.
When whole of the interarea of ceramic body 1 fixedly has a plurality of particle 6, the efficient that whole heat is transmitted improves, but the heat transmission to the zone corresponding with wire portion 3 is also good, the temperature in the zone corresponding with wire portion 3 also rises, the temperature of outer electrode 4 also rises simultaneously, might come off with the wire element 5 that the soldering portion of outer electrode 4 is electrically connected by scolder.Relative therewith, in the zone corresponding with heater 2 on the interarea of ceramic body 1, when heater 2 projections that are about to the inside of ceramic body 1 fixedly have a plurality of particle 6 in the zone of interarea, can efficiently carry out heat transmission from the zone corresponding with heater 2, can prevent that wire element 5 from coming off, and can heat heating object rapidly, can shorten heating time.
In addition, in the ceramic heater 10 of the present invention, as the stereogram identical with Fig. 4 represent shown in Figure 5, also preferred a plurality of particle 6 is fixed in the zone between the zone corresponding with heater 2 of interarea of ceramic body 1.Fig. 5 is another routine stereogram again of the execution mode of expression ceramic heater of the present invention.In the example shown in Figure 5, the same with example shown in Figure 4, inside at ceramic body 1, between couple of conductor portion 3, heater 2 is adapted to the bending of turning back for three times, a plurality of particles 6 also are additional to the forniciform zone of the interarea corresponding with this heater 2, also be fixed on zone therebetween, become to cover the pattern of the square shape of heater 2 as the overall fixed of a plurality of particles 6.
Like this, the zone corresponding with heater 2 that is fixed on ceramic body 1 at a plurality of particles 6, when also being fixed on simultaneously regional between the zone corresponding with heater 2, zone and therebetween zone two sides corresponding with heater 2 by the interarea of ceramic body 1, corresponding heater 2 can carry out high efficiencies of heat transfer, can also improve the heat efficiency, and spread all over the uniformity of temperature profile of interarea that two zones make the ceramic body 1 of ceramic heater 10, it is irregular to reduce temperature.
In addition, in the ceramic heater 10 of the present invention, to aspect the efficient of the heat transmission of heating object, the pyroconductivity of preferred particle 6 is higher than ceramic body 1 in further raising.Specifically, under the situation that ceramic body 1 is formed by aluminium oxide ceramics, as long as particle 6 uses the material that is formed by aluminium nitride, under the situation that ceramic body 1 is formed by silicon nitride ceramics, need only the material that particle 6 uses are formed by carborundum.
And then in the ceramic heater 10 of the present invention, the main component of preferred particle 6 is identical with the main component of ceramic body 1.When the main component of the main component of particle 6 and ceramic body 1 is identical, because main component is identical, so can make both thermal expansions identical, can reduce the thermal stress of generation between particle 6 and the ceramic body 1, therefore when ceramic heater 10 circulation energisings or when using repeatedly, can suppress coming off of particle 6 or breaking of ceramic body 1.
In addition, in the ceramic heater 10 of the present invention, also as Fig. 1, Fig. 4 and shown in Figure 5, preferably the peripheral part at the interarea of ceramic body 1 has the fixedly zone of particle 6.If the peripheral part at the interarea of ceramic body 1 also fixedly has a plurality of particles 6, then when ceramic body 1 deforms because of thermal stress, sometimes being basic point with the particle 6 that is fixed in peripheral part in the edge portion of ceramic body 1 crackle takes place, and this crack progress and can cause breaking of ceramic body 1.Relative therewith, owing at the peripheral part of the interarea of ceramic body 1 the fixedly zone of particle 6 is arranged, so can suppress the peripheral part of ceramic body 1, especially the generation of the crackle that causes of the thermal stress of edge portion can suppress the generation of breaking of ceramic body 1.
The zone that particle 6 is not fixedly arranged of peripheral part that is arranged at the interarea of ceramic body 1 like this is arranged at the part of the extra-regional ceramic body 1 corresponding with heater 2 along the periphery of interarea.The zone of particle 6 is not fixedly arranged by the peripheral part setting at the interarea of ceramic body 1 like this, can reduce ceramic body 1 to the thermal diffusion of peripheral end, can reduce the thermal stress of peripheral end.
But, for ceramic heater 10 of the present invention, as the operation of ceramic body 1 owing at interarea a plurality of particles 6 are arranged fixedly, thus blocked by the particle with this interarea butt easily, ceramic body 1 overlapping the time, be close to separately from each other sometimes and be difficult to processing.At this moment, as shown in Figures 2 and 3, a plurality of particles 6 are preferably the shape of corner angle.Thus, ceramic body 1 contact each other is the some contact on the top of particle 6, therefore prevents ceramic body 1 being close to and operation easily each other.
In addition, in the ceramic heater 10 of the present invention, preferred particle 6 is greater than the crystal particles of ceramic body 1.This is because if particle 6 is little, then exists the grain circle many and the tendency that exists heat conducting loss to increase is relative with it, and the size by particle 6 is greater than the size of the crystal particles of ceramic body 1, because of the heat conduction of particle 6 good.
At this moment, the size of relevant particle 6 can guarantee that from comparing with the crystal particles of ceramic body 1 aspect of heat conducting good property is considered fully, for example with respect to size 1~5 μ m of the crystal particles of ceramic body 1, is preferably the size about 30~200 μ m.In addition, from when direct mounting is on ceramic heater 10 with heating object, can fully guarantee distance between ceramic body 1 and the heating object via particle 6, therefore even pine for that ceramic body 1 breaks when unusual adding, also can reduce the aspect of the state of affairs that heating object comes to harm and consider that also preferred particle 6 as described above is greater than the crystal particles of ceramic body 1.
In addition, the size of the crystal particles of the size of particle 6 and ceramic body 1 enlarges by SEM (scanning electron microscopy) photo observes, as long as put up with maximum length portion that each particle 6 and crystal particles observe as size, the mean value of the size that will obtain 100 particles 6 and crystal particles gets final product as size respectively.
Then, the manufacture method to ceramic heater of the present invention describes.
As ceramic body 1, can use oxide ceramics, nitride ceramics, carbide ceramics etc. to have the pottery of insulating properties.Specifically, can use aluminium oxide ceramics, silicon nitride ceramics, aluminium nitride ceramics, silicon carbide ceramics etc.Wherein, from the viewpoint of oxidative resistance, preferably use aluminium oxide ceramics.
At first, in order to make the ceramic body 1 that is formed by such pottery, contain SiO with making in the above-mentioned ceramic component
2, CaO, MgO, ZrO
2Deng sintering aid and the ceramic size that modulates is configured as sheet, make ceramic green sheet.Perhaps, mentioned component is mixed, by tabular formed bodies of making such as forcing presses.
Utilize methods such as screen printing, form the resistive paste that becomes heater 2, wire portion 3 or the pattern of conductive paste respectively at an interarea of the ceramic green sheet that becomes this ceramic body 1 or formed body.As the material of heater 2 and wire portion 3, use to be the material of main component by burning till refractory metals such as W, the Mo that can make, Re simultaneously with ceramic body 1.Resistive paste and conductive paste can be made by modulation hybrid ceramic raw material, adhesive, organic solvent etc. in these refractory metals.In addition, this moment is according to the purposes of ceramic heater 10, become the live width of distance, interval or the pattern of the length of pattern of the resistive paste of heater 2 or conductive paste or the pattern of turning back by change, set heating position or the resistance value of heater 2 for desirable value.
And the ceramic green sheet that utilizes stacked liquid to make to be formed with this pattern or the ceramic green sheet of formed body and another identical material or formed body are stacked and connect airtight, and obtain having in inside the tabular formed body that becomes ceramic body 1 of heater 2 and wire portion 3 thus.
At this, describe making the method that a plurality of particles 6 are fixed in the surface of ceramic body 1.The fixing means of particle 6 roughly is divided into the method that makes it the method for fixing and make it to fix before burning till after burning till.Describe respectively.
A plurality of particles 6 are fixed in before burning till in the method for interarea of ceramic body 1, for example have: will make paste coating that a plurality of particles 6 and modulation such as adhesive, organic solvent are mixed and made in the method for the interarea of the ceramic green sheet that becomes ceramic body 1 or formed body by screen printing etc.As other method, the dipping method that uses identical paste, injection method etc. are arranged.The paste that is used for dipping method is compared with the paste that is used for stencil printing, increases viscosity and makes, and on the contrary, the paste that uses in injection method is compared with the paste that uses in stencil printing, reduces viscosity and makes.
In addition, in order to increase such printing or to be coated on the particle 6 of interarea of ceramic body 1 and the bed knife between the ceramic body 1, the working pressure machine is effective from the top tabular formed body of pressurization of particle 6.Perhaps, by tabular formed body is overlapping and make it dry, the effect of the bed knife that equally also can be enhanced.
By burning till the tabular formed body of such formation, can access the ceramic body 1 that inside has heater 2, a plurality of particles 6 is fixedly arranged at interarea.
In addition, as making a plurality of particles 6 after burning till, be fixed in the method for the interarea of ceramic body 1, the method that a plurality of particles 6 is fixed in the interarea that burns till the ceramic body 1 that tabular formed body obtains by ceramic spraying is arranged.Under this situation, the coating material of heating ceramic system makes it to become the state of the particulate of fusion or semi-molten, and makes it the interarea generation high-speed impact with ceramic body 1, makes a plurality of particles 6 fixing thus.Perhaps, also can use organic bond and organic solvent, particle 6 and low-melting glass are formed paste-like, after this paste printing coating, burn-back makes a plurality of particles 6 fix together thus.
Then, fixedly have at interarea on the electrode pad (outer electrode) 4 that similarly forms with heater 2 and wire portion 3 of ceramic body 1 of a plurality of particles 6, via solder bonds wire element 5.As scolder, can use the material as main component with Au-Cu, Ag, Ag-Cu etc.In addition, as wire element 5, can use the wire rod that is formed by low-resistance metals such as Ni, Ni alloy, platinum, copper.
Embodiment
Fig. 1~the ceramic heater of the present invention 10 shown in Figure 3 of making as described below.
At first, make according to Al
2O
3Be main component, SiO
2, CaO, MgO, ZrO
2Add up to the ceramic green sheet that 10 quality % modulate in interior mode.And, on the surface of this ceramic green sheet by stencil printing, respectively with heater 2 and wire portion 3 and what become electrode pad 4 is that the conductive paste of main component is printed as pattern with W.To the ceramic green sheet that is printed with these patterns and the same material of not printing, the ceramic green sheet of same shape, coating makes stacked liquid that the pottery of same composition disperses and stacked, has obtained tabular formed body.
Then, by stencil printing, a plurality of particle 6 printings are coated on the interarea of this tabular formed body that is laminated.In addition, for particle 6 is fixed in for the test portion of two interareas, after making it drying, equally by stencil printing printing particle 6 make it dry at another interarea being printed in an interarea.
The paste that uses during with particle 6 screen printings is by counting being mixed and made into as the ceramic particle of main component and adhesive and organic solvent with aluminium oxide of μ m~100 μ m sizes.Adhesive uses with the resin of ethyl cellulose as main component, and organic solvent uses the organic solvent that is formed by TPO and DBP.Print paste and make its drying after, in order to strengthen particle to the bed knife of tabular formed body, the working pressure machine is with 5 * 10
4~50 * 10
4The pressure of Pa interarea to formed body under the condition in 1~10 second pressurizes.
The tabular formed body that obtains is like this burnt till in 1500~1600 ℃ reduction atmosphere (nitrogen atmosphere).
Then, by electroplating the Ni plated film that thick 2~4 μ m are set at the outer electrode (electrode pad) 4 of the interarea of ceramic body 1, use the Ag solder flux as scolder, the wire element 5 of bonding electrodes pad 4 and φ 0.8mm * long 50mm of being formed by Ni.
Use shell temperature measure of spread device to measure the Temperature Distribution of interarea of the ceramic body 1 of the ceramic heater of as above making 10.For the test portion of be used for measuring, will will be attached with the embodiments of the invention of a plurality of particles 6 at an interarea of ceramic body 1 as test portion 2 at the fixing test portion 1 as a comparative example of ceramic heater in the past of particle 6 of the interarea of ceramic body 1.
In mensuration, the maximum temperature that applies the heater 2 that makes test portion 1, test portion 2 respectively reaches 300 ℃ electric power.When the temperature of measuring heater 2 was the minimum temperature of interarea of ceramic body 1 of maximum temperature and each test portion when becoming stable state, test portion 1 is approximately 270 ℃, and was relative therewith, and test portion 2 is approximately 290 ℃.Can confirm according to the present invention, by the interarea at ceramic body 1 a plurality of particles 6 are arranged fixedly from this result, can reduce the Temperature Distribution of interarea.
Then, be the efficient of confirming to transmit to the heat of heating object, with with the equal specification of test portion 1,2 ceramic heater, the iron plate of thickness 1.5mm is placed the interarea of the ceramic body 1 of test portion respectively, the maximum temperature on the surface of the iron plate the when surface of having measured iron plate reaches the time of advent of ceiling temperature and becomes stable state and minimum temperature poor.In evaluation, use the test portion 1 of above-mentioned comparative example and the test portion 2 of embodiment to compare.
Each test portion is applied identical electric power, confirm to reach the time till the maximum temperature, the result is approximately 30 seconds the time of advent that test portion 1 reaches maximum temperature, and the maximum temperature under the stable state and the difference of minimum temperature are approximately 10 ℃.Relative therewith, be approximately 15 seconds the time of advent that test portion 2 reaches maximum temperature, and the maximum temperature under the stable state and the difference of minimum temperature are approximately 5 ℃.Can confirm according to the present invention, by the interarea at ceramic body 1 a plurality of particles 6 are arranged fixedly from this result, can shorten the heating time to heating object.
Symbol description
1 ceramic body
2 heaters
6 particles
10 ceramic heaters
Claims (9)
1. a ceramic heater is characterized in that,
Inside at tabular ceramic body has heater, at the interarea of described ceramic body the particle of a plurality of inanimate matters is arranged fixedly, at the peripheral part of the described interarea of described ceramic body the zone of not fixing described particle is arranged.
2. ceramic heater according to claim 1 is characterized in that,
Described particle is pottery.
3. ceramic heater according to claim 1 is characterized in that,
Two interareas at described ceramic body fixedly have a plurality of described particles.
4. ceramic heater according to claim 1 is characterized in that,
A plurality of described particles are fixed on the zone corresponding with described heater of described interarea.
5. ceramic heater according to claim 4 is characterized in that,
A plurality of described particles also are fixed on the zone between the zone corresponding with described heater of described interarea.
6. ceramic heater according to claim 1 is characterized in that,
Described particle is compared with described ceramic body, the pyroconductivity height.
7. ceramic heater according to claim 2 is characterized in that,
The main component of described particle is identical with the main component of described ceramic body.
8. ceramic heater according to claim 1 is characterized in that,
Described particle is the shape that corner angle are arranged.
9. ceramic heater according to claim 1 is characterized in that,
Described particle is greater than the crystal particles of described ceramic body.
Applications Claiming Priority (3)
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JP2008247340A JP5258480B2 (en) | 2008-09-26 | 2008-09-26 | Ceramic heater |
JP2008-247340 | 2008-09-26 | ||
PCT/JP2009/066255 WO2010035688A1 (en) | 2008-09-26 | 2009-09-17 | Ceramic heater |
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CN102144428A CN102144428A (en) | 2011-08-03 |
CN102144428B true CN102144428B (en) | 2013-10-09 |
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KR (1) | KR101591315B1 (en) |
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AT510837B1 (en) | 2011-07-27 | 2012-07-15 | Helmut Dr Buchberger | INHALATORKOMPONENTE |
GB2504074A (en) | 2012-07-16 | 2014-01-22 | Nicoventures Holdings Ltd | Electronic cigarette |
GB2533135B (en) | 2014-12-11 | 2020-11-11 | Nicoventures Holdings Ltd | Aerosol provision systems |
CA3022340C (en) | 2016-04-27 | 2021-09-21 | Nicoventures Holdings Limited | Electronic aerosol provision system and vaporizer therefor |
JP2018092728A (en) * | 2016-11-30 | 2018-06-14 | 日本特殊陶業株式会社 | Ceramic heater |
US11452179B2 (en) | 2017-01-06 | 2022-09-20 | Lg Innotek Co., Ltd. | Heating rod and heater having same |
KR101952333B1 (en) * | 2018-04-30 | 2019-02-26 | 주식회사 워터핀 | Counteragent supplying apparatus |
Citations (1)
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CN1320353A (en) * | 1999-08-09 | 2001-10-31 | Ibiden股份有限公司 | Ceramic heater |
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JP2818051B2 (en) * | 1991-05-17 | 1998-10-30 | シャープ株式会社 | Air purifier also serves as a heater |
JP3436769B2 (en) | 1992-03-09 | 2003-08-18 | 日本特殊陶業株式会社 | Ceramic heater for oxygen sensor heating |
JP2002025749A (en) * | 2000-07-04 | 2002-01-25 | Ibiden Co Ltd | Ceramic heater |
JP2006332068A (en) * | 2006-07-06 | 2006-12-07 | Sumitomo Electric Ind Ltd | Ceramic heater and apparatus mounted the same for manufacturing semiconductor or liquid crystal |
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WO2010035688A1 (en) | 2010-04-01 |
CN102144428A (en) | 2011-08-03 |
JP2010080261A (en) | 2010-04-08 |
JP5258480B2 (en) | 2013-08-07 |
KR101591315B1 (en) | 2016-02-03 |
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