CN102134003A - Article conveying device - Google Patents

Article conveying device Download PDF

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Publication number
CN102134003A
CN102134003A CN2010105418580A CN201010541858A CN102134003A CN 102134003 A CN102134003 A CN 102134003A CN 2010105418580 A CN2010105418580 A CN 2010105418580A CN 201010541858 A CN201010541858 A CN 201010541858A CN 102134003 A CN102134003 A CN 102134003A
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CN
China
Prior art keywords
glass substrate
load
elevator
article
transfer device
Prior art date
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Pending
Application number
CN2010105418580A
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Chinese (zh)
Inventor
分部健二
Current Assignee (The listed assignees may be inaccurate. Google has not performed a legal analysis and makes no representation or warranty as to the accuracy of the list.)
ASYST TECHNOLOGIES
Original Assignee
ASYST TECHNOLOGIES
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Filing date
Publication date
Application filed by ASYST TECHNOLOGIES filed Critical ASYST TECHNOLOGIES
Publication of CN102134003A publication Critical patent/CN102134003A/en
Pending legal-status Critical Current

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    • H—ELECTRICITY
    • H01—ELECTRIC ELEMENTS
    • H01L—SEMICONDUCTOR DEVICES NOT COVERED BY CLASS H10
    • H01L21/00—Processes or apparatus adapted for the manufacture or treatment of semiconductor or solid state devices or of parts thereof
    • H01L21/67—Apparatus specially adapted for handling semiconductor or electric solid state devices during manufacture or treatment thereof; Apparatus specially adapted for handling wafers during manufacture or treatment of semiconductor or electric solid state devices or components ; Apparatus not specifically provided for elsewhere
    • H01L21/677—Apparatus specially adapted for handling semiconductor or electric solid state devices during manufacture or treatment thereof; Apparatus specially adapted for handling wafers during manufacture or treatment of semiconductor or electric solid state devices or components ; Apparatus not specifically provided for elsewhere for conveying, e.g. between different workstations
    • H01L21/67703—Apparatus specially adapted for handling semiconductor or electric solid state devices during manufacture or treatment thereof; Apparatus specially adapted for handling wafers during manufacture or treatment of semiconductor or electric solid state devices or components ; Apparatus not specifically provided for elsewhere for conveying, e.g. between different workstations between different workstations
    • H01L21/67727—Apparatus specially adapted for handling semiconductor or electric solid state devices during manufacture or treatment thereof; Apparatus specially adapted for handling wafers during manufacture or treatment of semiconductor or electric solid state devices or components ; Apparatus not specifically provided for elsewhere for conveying, e.g. between different workstations between different workstations using a general scheme of a conveying path within a factory
    • B—PERFORMING OPERATIONS; TRANSPORTING
    • B65—CONVEYING; PACKING; STORING; HANDLING THIN OR FILAMENTARY MATERIAL
    • B65G—TRANSPORT OR STORAGE DEVICES, e.g. CONVEYORS FOR LOADING OR TIPPING, SHOP CONVEYOR SYSTEMS OR PNEUMATIC TUBE CONVEYORS
    • B65G47/00—Article or material-handling devices associated with conveyors; Methods employing such devices
    • B65G47/52—Devices for transferring articles or materials between conveyors i.e. discharging or feeding devices
    • B65G47/68—Devices for transferring articles or materials between conveyors i.e. discharging or feeding devices adapted to receive articles arriving in one layer from one conveyor lane and to transfer them in individual layers to more than one conveyor lane or to one broader conveyor lane, or vice versa, e.g. combining the flows of articles conveyed by more than one conveyor
    • B65G47/682—Devices for transferring articles or materials between conveyors i.e. discharging or feeding devices adapted to receive articles arriving in one layer from one conveyor lane and to transfer them in individual layers to more than one conveyor lane or to one broader conveyor lane, or vice versa, e.g. combining the flows of articles conveyed by more than one conveyor from a single conveyor lane consisting of one conveyor or several adjacent conveyors
    • B—PERFORMING OPERATIONS; TRANSPORTING
    • B65—CONVEYING; PACKING; STORING; HANDLING THIN OR FILAMENTARY MATERIAL
    • B65G—TRANSPORT OR STORAGE DEVICES, e.g. CONVEYORS FOR LOADING OR TIPPING, SHOP CONVEYOR SYSTEMS OR PNEUMATIC TUBE CONVEYORS
    • B65G49/00—Conveying systems characterised by their application for specified purposes not otherwise provided for
    • B65G49/05—Conveying systems characterised by their application for specified purposes not otherwise provided for for fragile or damageable materials or articles
    • B65G49/06—Conveying systems characterised by their application for specified purposes not otherwise provided for for fragile or damageable materials or articles for fragile sheets, e.g. glass
    • B65G49/061—Lifting, gripping, or carrying means, for one or more sheets forming independent means of transport, e.g. suction cups, transport frames
    • B—PERFORMING OPERATIONS; TRANSPORTING
    • B65—CONVEYING; PACKING; STORING; HANDLING THIN OR FILAMENTARY MATERIAL
    • B65G—TRANSPORT OR STORAGE DEVICES, e.g. CONVEYORS FOR LOADING OR TIPPING, SHOP CONVEYOR SYSTEMS OR PNEUMATIC TUBE CONVEYORS
    • B65G49/00—Conveying systems characterised by their application for specified purposes not otherwise provided for
    • B65G49/05—Conveying systems characterised by their application for specified purposes not otherwise provided for for fragile or damageable materials or articles
    • B65G49/06—Conveying systems characterised by their application for specified purposes not otherwise provided for for fragile or damageable materials or articles for fragile sheets, e.g. glass
    • B65G49/067—Sheet handling, means, e.g. manipulators, devices for turning or tilting sheet glass
    • G—PHYSICS
    • G02—OPTICS
    • G02F—OPTICAL DEVICES OR ARRANGEMENTS FOR THE CONTROL OF LIGHT BY MODIFICATION OF THE OPTICAL PROPERTIES OF THE MEDIA OF THE ELEMENTS INVOLVED THEREIN; NON-LINEAR OPTICS; FREQUENCY-CHANGING OF LIGHT; OPTICAL LOGIC ELEMENTS; OPTICAL ANALOGUE/DIGITAL CONVERTERS
    • G02F1/00—Devices or arrangements for the control of the intensity, colour, phase, polarisation or direction of light arriving from an independent light source, e.g. switching, gating or modulating; Non-linear optics
    • G02F1/01—Devices or arrangements for the control of the intensity, colour, phase, polarisation or direction of light arriving from an independent light source, e.g. switching, gating or modulating; Non-linear optics for the control of the intensity, phase, polarisation or colour 
    • G02F1/13—Devices or arrangements for the control of the intensity, colour, phase, polarisation or direction of light arriving from an independent light source, e.g. switching, gating or modulating; Non-linear optics for the control of the intensity, phase, polarisation or colour  based on liquid crystals, e.g. single liquid crystal display cells
    • G02F1/1303—Apparatus specially adapted to the manufacture of LCDs
    • H—ELECTRICITY
    • H01—ELECTRIC ELEMENTS
    • H01L—SEMICONDUCTOR DEVICES NOT COVERED BY CLASS H10
    • H01L21/00—Processes or apparatus adapted for the manufacture or treatment of semiconductor or solid state devices or of parts thereof
    • H01L21/67—Apparatus specially adapted for handling semiconductor or electric solid state devices during manufacture or treatment thereof; Apparatus specially adapted for handling wafers during manufacture or treatment of semiconductor or electric solid state devices or components ; Apparatus not specifically provided for elsewhere
    • H01L21/677—Apparatus specially adapted for handling semiconductor or electric solid state devices during manufacture or treatment thereof; Apparatus specially adapted for handling wafers during manufacture or treatment of semiconductor or electric solid state devices or components ; Apparatus not specifically provided for elsewhere for conveying, e.g. between different workstations
    • H01L21/67703—Apparatus specially adapted for handling semiconductor or electric solid state devices during manufacture or treatment thereof; Apparatus specially adapted for handling wafers during manufacture or treatment of semiconductor or electric solid state devices or components ; Apparatus not specifically provided for elsewhere for conveying, e.g. between different workstations between different workstations
    • H01L21/67736—Loading to or unloading from a conveyor

Abstract

The invention provides an article conveying device with a short circulation time. The article conveying device which is used for conveying articles to be processed and processed articles comprises a first conveying belt (111) for conveying articles to be conveyed, a first elevator (120) with lifting and falling functions for lifting and dropping the articles to be processed to the first conveying belt (111), and a second conveying belt (112) equipped above or below the first conveying belt (111) for conveying the processed articles.

Description

Article carrying apparatus
Technical field
Liquid Crystal Display (LCD)) the present invention relates to be used for to carry (Liquid Crystal Display: FPD (Flat Panel Display: the article carrying apparatus of the article such as glass substrate that use of panel flat-panel monitor) such as at LCD.
Background technology
In semiconductor factory or LCD factory, there is the processing equipment that is used for handling the article that use at quartz conductor or LCD etc.For example, in LCD factory, there is the glass substrate treating device that is used for the glass substrate that uses at LCD is carried out etching or cleaning etc.
In LCD factory, glass substrate by the keeping in Automatic Warehouse, when glass substrate is handled, utilize stakcer crane (stacker crane) with glass substrate from the Automatic Warehouse outbound to article transition platform (station).Glass substrate after the outbound by the article carrying apparatus automatic transport to glass substrate treating device.Then, utilize glass substrate treating device that glass substrate is implemented predetermined processing, and then utilize article carrying apparatus that glass substrate is delivered to article transition platform, and utilize stakcer crane that glass substrate is put in storage to Automatic Warehouse once more.
In the past, known have the keeping that makes this glass substrate and handle incorporate high-efficiency automatic warehouse system (patent documentation 1).This existing warehousing system is arranged on the back side of the shelf (rack) of taking in glass substrate with the processing equipment of glass substrate, carries out the outbound and the warehouse-in of glass substrate.At this moment, as mentioned above, glass substrate is delivered to article transition platform by stakcer crane, then by the article carrying apparatus automatic transport to substrate board treatment.
Carry the first existing article carrying apparatus of article such as glass substrate to describe to being used to herein.The first existing article carrying apparatus is an article carrying apparatus of carrying the so-called one chip of glass substrate one by one.Figure 16 is the birds-eye view of the first existing article carrying apparatus 400.
As shown in figure 16, the first existing article carrying apparatus 400 is configured between stakcer crane STK and the glass substrate treating device EQ.Stakcer crane STK is along rail running, and and article carrying apparatus 400 between carry out the handing-over of article.
As shown in figure 16, the first existing article carrying apparatus 400 possesses the first article transition platform 440, the second article transition platform 450, supplies with end 460, discharges end 470, first direction interpreter 480, second direction interpreter 490 and load-transfer device 410.
Be useful on first box (cassette) 441 of taking in the glass substrate of taking out of from Automatic Warehouse in the first article transition platform, 440 mountings.In first box 441, be level and how layeredly accommodate the preceding multi-disc glass substrate of processing with predetermined interval.First box 441 by stakcer crane STK from the Automatic Warehouse outbound.
Be useful on second box of taking in by the glass substrate after the glass substrate treating device EQ processing 451 in the second article transition platform, 450 mountings.In second box 451, be glass substrate after how level layeredly holds processing with predetermined interval.Taking in second box 451 of the glass substrate after the processing is after this put in storage to Automatic Warehouse by stakcer crane STK.
Glass substrate before being about to drop into glass substrate treating device EQ is arranged supplying with end 460 mountings.Glass substrate is supplied to glass substrate treating device EQ one by one from supplying with end 460.
Be discharged to discharge end 470 by the glass substrate after the glass substrate treating device EQ processing.Glass substrate after the processing to by in during till transferring load to load-transfer device 410 all by mounting in discharging end 470.
Glass substrate before the processing that first direction interpreter 480 will receive from the first article transition platform 440 transfers load to load-transfer device 410.And first direction interpreter 480 will transfer load to load-transfer device 410 from the glass substrate of discharging after the processing that end 470 receives.At this moment, in the first direction interpreter, before handling or the throughput direction of the glass substrate after handling be converted.
Substrate before second direction interpreter 490 will be handled transfers load to from load-transfer device 410 and supplies with end 460.And the glass substrate after second direction interpreter 490 will be handled transfers load to the second article transition platform 450 from load-transfer device 410.At this moment, in second direction interpreter 490, the throughput direction of glass substrate before and after treatment is converted.
Load-transfer device 410 is only towards the driving roll-type load-transfer device of direction automatic transport glass substrate before and after treatment.Before handling or the glass substrate after handling be delivered to second direction interpreter 490 by load-transfer device 410 one by one from first direction interpreter 480.
The action of the first existing article carrying apparatus 400 when secondly, using Figure 16 to the conveying glass substrate describes.In addition, the loading transport path R41 that glass substrate was transferred before the blank arrow among Figure 16 is represented to handle, the unloading transport path R42 that glass substrate was transferred after black arrow is represented to handle.
As shown in figure 16, in loading transport path R41, the glass substrate before handling is by first box 441 in the first article transition platform 440 transfers load to first direction interpreter 480 from mounting.And then, after being delivered to second direction interpreter 490, be transported to and supply with end 460 by load-transfer device 410.
And in unloading transport path R42, the glass substrate after the processing is transferred load to first direction interpreter 480 from discharging end 470, and is delivered to second direction interpreter 490 by load-transfer device 410.And then be incorporated in mounting in second box 451 of the second article transition platform 450.
Secondly, use Figure 17 that the second existing article carrying apparatus is described.Figure 17 is the birds-eye view of the second existing article carrying apparatus 500.In addition, the loading transport path R51 that glass substrate was transferred before blank arrow shown in Figure 17 is represented to handle, the unloading transport path R52 that glass substrate was transferred after black arrow is represented to handle.The second existing article carrying apparatus 500 is identical with the basic structure of the above-mentioned first existing article carrying apparatus 400, to identical structure mark same-sign and omit or simplified illustration.
As shown in figure 17, the handover method of handing-over glass substrate between stakcer crane STK and article handling device EQ of the second existing article carrying apparatus 500 is different with the first existing article carrying apparatus 400.The handover method of this glass substrate of the second existing article carrying apparatus 500 is undertaken by self-propelled conveyer 580.
Self-propelled conveyer 580 is the glass substrate conveyers that can move towards arrow L direction shown in Figure 17 and arrow R direction.As load shown in the transport path R51 glass substrate that first box 441 of self-propelled conveyer 580 from mounting in the first article transition platform 440 receives before handling.Then, move, the glass substrate before handling is supplied to supplies with end 460 towards arrow L direction shown in Figure 17.And shown in unloading transport path R52, self-propelled conveyer 580 is from discharging the glass substrate that end 470 receives after handling.And then, move towards arrow L direction shown in Figure 17, the glass substrate after handling is accommodated in mounting in second box 451 of the second article transition platform 450.
[patent documentation 1] TOHKEMY 2001-130708 communique
But, in the first existing article carrying apparatus 400 shown in Figure 16, the glass substrate both sides after glass substrate before load-transfer device 410 transport process and the processing.Therefore, for example the glass substrate before load-transfer device 410 transport process during in, load-transfer device 410 can't be from discharging the glass substrate after end 470 transfers are discharged to the processing of discharging end 470.
On the contrary, during the glass substrate after load-transfer device 410 transport process in, the glass substrate before load-transfer device 410 can't be handled from 440 transfers of the first article transition platform.
Like this, in the first existing article carrying apparatus 400, load-transfer device 410 before can only transport process glass substrate and handle after glass substrate in a certain side.Therefore, even if the glass substrate after wanting discharge to handle from glass substrate treating device EQ also has to make the glass substrate after the processing it can't be delivered to load-transfer device 410 discharging end 470 standbies.Perhaps, have to make the standby and it can't be delivered to conveying 410 first box 441 in of glass substrate before handling.Therefore, the first existing article carrying apparatus 400 exist before will handling glass substrate from first box 441 be delivered to glass substrate treating device, and will handle after glass substrate be accommodated in the problem of growing the cycle time till second box 451.
In addition, in the second existing article carrying apparatus 500 shown in Figure 17, with the first existing article carrying apparatus 400 similarly, the glass substrate before can only transport process and handle after glass substrate in a certain side.Therefore, also there is long problem cycle time in the second existing article carrying apparatus 500.
And, in the second existing article carrying apparatus 500, suppose that the glass substrate of self-propelled conveyer 580 before will handling is supplied to supply with after the end 460, then want the glass substrate after the transport process.But in this case, self-propelled conveyer 580 moves towards arrow R direction with the state of the sky of any article of mounting not.Therefore, there is further elongated problem cycle time.
Summary of the invention
The present invention finishes in order to address the above problem, and its purpose is to provide a kind of cycle time short article carrying apparatus.
In order to address the above problem, an embodiment of article carrying apparatus involved in the present invention relates to a kind of article carrying apparatus, this article carrying apparatus be used to carry the article before handling by article handling device that is handle before article and handle by above-mentioned article handling device after article that is handle the back article, wherein, above-mentioned article carrying apparatus possesses: first load-transfer device, and this first used for conveyer belt is article before carrying above-mentioned processing; First elevator, this first elevator has rising function and decline function, makes the preceding article of above-mentioned processing rise or descend it is transferred load to above-mentioned first load-transfer device; And second load-transfer device, this second load-transfer device is configured in the top or the below of above-mentioned first load-transfer device, is used to carry article after the above-mentioned processing.
According to this structure, can utilize first elevator that preceding article of processing or processing back article are risen or decline, and it is transferred load to first load-transfer device that is positioned at above-below direction with respect to second load-transfer device.Therefore, article after preceding article of transport process and the processing simultaneously.Therefore, cycle time can be shortened.And, because first load-transfer device and second load-transfer device in the above-below direction overlay configuration, therefore need not to increase the area that is provided with of article carrying apparatus.
Further, in an embodiment of article carrying apparatus involved in the present invention, preferred above-mentioned article carrying apparatus also possesses: supply with the end, this supply end is used for goods supply before the above-mentioned processing to above-mentioned article handling device; Discharge the end, this discharges end is used for mounting article after the above-mentioned processing of above-mentioned article handling device discharge; And second elevator, this second elevator has rising function and decline function, above-mentioned first elevator will transfer load to above-mentioned first load-transfer device by article before take in the above-mentioned processing that first box of article transports out before the above-mentioned processing, and article transfer load to second load-transfer device after the above-mentioned processing that will transport from above-mentioned discharge end, article transfer load to above-mentioned supply end before the above-mentioned processing that above-mentioned second elevator will transport from above-mentioned first load-transfer device, and article transfer load to second box after the above-mentioned processing that will transport from above-mentioned second load-transfer device.
Further, in an embodiment of article carrying apparatus involved in the present invention, the height of the position that preferred above-mentioned supply end is disposed with take out above-mentioned processing from above-mentioned first box before the height of article or article storing after the above-mentioned processing is different in the height of above-mentioned second box, perhaps, the height of the position that disposed, above-mentioned discharge end with take out above-mentioned processing from above-mentioned first box before the height of article or article storing after the above-mentioned processing is different in the height of above-mentioned second box.
Further, in an embodiment of article carrying apparatus involved in the present invention, preferred above-mentioned article carrying apparatus also possesses: the first article transition platform that is used for above-mentioned first box of mounting; And the second article transition platform that is used for above-mentioned second box of mounting.
Further, in an embodiment of article carrying apparatus involved in the present invention, preferred above-mentioned first article transition platform and above-mentioned discharge end arranged opposite, and, above-mentioned second article transition platform and above-mentioned supply end arranged opposite.
Further, in an embodiment of article carrying apparatus involved in the present invention, preferred above-mentioned article carrying apparatus also possesses the 3rd elevator with rising function and decline function, and article transfer load to the 3rd box after the above-mentioned processing that above-mentioned the 3rd elevator will transport from above-mentioned second load-transfer device.
Further, in an embodiment of article carrying apparatus involved in the present invention, preferred above-mentioned article carrying apparatus also possesses the 3rd elevator with rising function and decline function, above-mentioned the 3rd elevator with above-mentioned processing before article the 3rd box of article transfers load to above-mentioned first load-transfer device before the above-mentioned processing from taking in.
Further, in an embodiment of article carrying apparatus involved in the present invention, preferred above-mentioned article carrying apparatus also possesses: supply with and discharge the end, this supply with to discharge end with above-mentioned processing before goods supply to above-mentioned article handling device, and article after the mounting above-mentioned processing of discharging from above-mentioned article handling device; Second elevator, this second elevator has rising function and decline function; And the 3rd elevator, the 3rd elevator has rising function and decline function, above-mentioned first elevator will transfer load to above-mentioned first load-transfer device by article before take in the above-mentioned processing that first box of article transports out before the above-mentioned processing, article transfer load to above-mentioned supply and discharge the end before the above-mentioned processing that above-mentioned second elevator will transport from above-mentioned first load-transfer device, and article transfer load to above-mentioned second load-transfer device after will discharging the above-mentioned processing that the end transfer comes from above-mentioned supply, and article transfer load to second box after the above-mentioned processing that above-mentioned the 3rd elevator will transport from above-mentioned second load-transfer device.
Further, in an embodiment of article carrying apparatus involved in the present invention, preferred above-mentioned first load-transfer device is configured in the top of above-mentioned second load-transfer device.
According to article carrying apparatus involved in the present invention, therefore the conveying of article and processing back article can shorten cycle time before can handling simultaneously.
Description of drawings
Fig. 1 is the birds-eye view of the related article carrying apparatus of first embodiment of the present invention.
Fig. 2 A is the section-drawing of the article carrying apparatus after cutting off along A-A ' line shown in Figure 1.
Fig. 2 B1 is the section-drawing of the article carrying apparatus after cutting off along B-B ' line shown in Figure 1, and the state when first elevator and second elevator are maximum to descend is shown.
Fig. 2 B2 is the section-drawing of the article carrying apparatus after cutting off along B-B ' line shown in Figure 1, and the state when first elevator and second elevator are maximum to rise is shown.
Fig. 2 C is the section-drawing of the article carrying apparatus after cutting off along C-C ' line shown in Figure 1.
Fig. 3 A is the figure that the action of the related article carrying apparatus of first embodiment of the present invention among the step S111 that loads transport path is shown, and is the main portion section-drawing of the related article carrying apparatus of first embodiment of the present invention.
Fig. 3 B is the figure that the action of the related article carrying apparatus of first embodiment of the present invention among the step S112 that loads transport path is shown, and is the main portion section-drawing of the related article carrying apparatus of first embodiment of the present invention.
Fig. 3 C is the figure that the action of the related article carrying apparatus of first embodiment of the present invention among the step S113 that loads transport path is shown, and is the main portion section-drawing of the related article carrying apparatus of first embodiment of the present invention.
Fig. 3 D is the figure that the action of the related article carrying apparatus of first embodiment of the present invention among the step S114 that loads transport path is shown, and is the main portion section-drawing of the related article carrying apparatus of first embodiment of the present invention.
Fig. 3 E is the figure that the action of the related article carrying apparatus of first embodiment of the present invention among the step S115 that loads transport path is shown, and is the main portion section-drawing of the related article carrying apparatus of first embodiment of the present invention.
Fig. 4 A is the figure that the action of the related article carrying apparatus of first embodiment of the present invention among the step S121 of unloading transport path is shown, and is the main portion section-drawing of the related article carrying apparatus of first embodiment of the present invention.
Fig. 4 B is the figure that the action in the related article delivery path of first embodiment of the present invention among the step S122 of unloading transport path is shown, and is the main portion section-drawing of the related article carrying apparatus of first embodiment of the present invention.
Fig. 4 C is the figure that the action in the related article delivery path of first embodiment of the present invention among the step S123 of unloading transport path is shown, and is the main portion section-drawing of the related article carrying apparatus of first embodiment of the present invention.
Fig. 4 D is the figure that the action of the related article carrying apparatus of first embodiment of the present invention among the step S124 of unloading transport path is shown, and is the main portion section-drawing of the related article carrying apparatus of first embodiment of the present invention.
Fig. 4 E is the figure that the action of the related article carrying apparatus of first embodiment of the present invention among the step S125 of unloading transport path is shown, and is the main portion section-drawing of the related article carrying apparatus of first embodiment of the present invention.
Fig. 5 A is the figure that the action of the related article carrying apparatus of first embodiment of the present invention among the step S1A is shown, and is the schematic stereoscopic figure of the related article carrying apparatus of first embodiment of the present invention.
Fig. 5 B is the figure that the action of the related article carrying apparatus of first embodiment of the present invention among the step S1B is shown, and is the schematic stereoscopic figure of the related article carrying apparatus of first embodiment of the present invention.
Fig. 5 C is the figure that the action of the related article carrying apparatus of first embodiment of the present invention among the step S1C is shown, and is the schematic stereoscopic figure of the related article carrying apparatus of first embodiment of the present invention.
Fig. 5 D is the figure that the action of the related article carrying apparatus of first embodiment of the present invention among the step S1D is shown, and is the schematic stereoscopic figure of the related article carrying apparatus of first embodiment of the present invention.
Fig. 5 E is the figure that the action of the related article carrying apparatus of first embodiment of the present invention among the step S1E is shown, and is the schematic stereoscopic figure of the related article carrying apparatus of first embodiment of the present invention.
Fig. 5 F is the figure that the action of the related article carrying apparatus of first embodiment of the present invention among the step S1F is shown, and is the schematic stereoscopic figure of the related article carrying apparatus of first embodiment of the present invention.
Fig. 5 G is the figure that the action of the related article carrying apparatus of first embodiment of the present invention among the step S1G is shown, and is the schematic stereoscopic figure of the related article carrying apparatus of first embodiment of the present invention.
Fig. 5 H is the figure that the action of the related article carrying apparatus of first embodiment of the present invention among the step S1H is shown, and is the schematic stereoscopic figure of the related article carrying apparatus of first embodiment of the present invention.
Fig. 5 I is the figure that the action of the related article carrying apparatus of first embodiment of the present invention among the step S1I is shown, and is the schematic stereoscopic figure of the related article carrying apparatus of first embodiment of the present invention.
Fig. 5 J is the schematic stereoscopic figure that has filled the related article carrying apparatus of first embodiment of the present invention under the state of handling the back glass substrate in second box.
Fig. 6 is the birds-eye view of the related article carrying apparatus of second embodiment of the present invention.
Fig. 7 A is the section-drawing of the article carrying apparatus after cutting off along A-A ' line shown in Figure 6.
Fig. 7 B1 is the section-drawing of the article carrying apparatus after cutting off along B-B ' line shown in Figure 6, and the state when first elevator～the 3rd elevator is maximum to descend is shown.
Fig. 7 B2 is the section-drawing of the article carrying apparatus after cutting off along B-B ' line shown in Figure 6, and the state when first elevator～the 3rd elevator is maximum to rise is shown.
Fig. 7 C is the section-drawing of the article carrying apparatus after cutting off along C-C ' line shown in Figure 6.
Fig. 8 A is the figure that the action of the related article carrying apparatus of second embodiment of the present invention among the step S211 that loads transport path is shown, and is the main portion section-drawing of the related article carrying apparatus of second embodiment of the present invention.
Fig. 8 B is the figure that the action of the related article carrying apparatus of second embodiment of the present invention among the step S212 that loads transport path is shown, and is the main portion section-drawing of the related article carrying apparatus of second embodiment of the present invention.
Fig. 8 C is the figure that the action of the related article carrying apparatus of second embodiment of the present invention among the step S213 that loads transport path is shown, and is the main portion section-drawing of the related article carrying apparatus of second embodiment of the present invention.
Fig. 8 D is the figure that the action of the related article carrying apparatus of second embodiment of the present invention among the step S214 that loads transport path is shown, and is the main portion section-drawing of the related article carrying apparatus of second embodiment of the present invention.
Fig. 8 E is the figure that the action of the related article carrying apparatus of second embodiment of the present invention among the step S215 that loads transport path is shown, and is the main portion section-drawing of the related article carrying apparatus of second embodiment of the present invention.
Fig. 9 A is the figure that the action of the related article carrying apparatus of second embodiment of the present invention among the step S221 of unloading transport path is shown, and is the main portion section-drawing of the related article carrying apparatus of second embodiment of the present invention.
Fig. 9 B is the figure that the action in the related article delivery path of second embodiment of the present invention among the step S222 of unloading transport path is shown, and is the main portion section-drawing of the related article carrying apparatus of second embodiment of the present invention.
Fig. 9 C is the figure that the action in the related article delivery path of second embodiment of the present invention among the step S223 of unloading transport path is shown, and is the main portion section-drawing of the related article carrying apparatus of second embodiment of the present invention.
Fig. 9 D is the figure that the action of the related article carrying apparatus of second embodiment of the present invention among the step S224 of unloading transport path is shown, and is the main portion section-drawing of the related article carrying apparatus of second embodiment of the present invention.
Fig. 9 E is the figure that the action of the related article carrying apparatus of second embodiment of the present invention among the step S225 of unloading transport path is shown, and is the main portion section-drawing of the related article carrying apparatus of second embodiment of the present invention.
Figure 10 A is the figure that the action of the related article carrying apparatus of second embodiment of the present invention among the step S2A is shown, and is the schematic stereoscopic figure of the related article carrying apparatus of second embodiment of the present invention.
Figure 10 B is the figure that the action of the related article carrying apparatus of second embodiment of the present invention among the step S2B is shown, and is the schematic stereoscopic figure of the related article carrying apparatus of second embodiment of the present invention.
Figure 10 C is the figure that the action of the related article carrying apparatus of second embodiment of the present invention among the step S2C is shown, and is the schematic stereoscopic figure of the related article carrying apparatus of second embodiment of the present invention.
Figure 10 D is the figure that the action of the related article carrying apparatus of second embodiment of the present invention among the step S2D is shown, and is the schematic stereoscopic figure of the related article carrying apparatus of second embodiment of the present invention.
Figure 10 E is the figure that the action of the related article carrying apparatus of second embodiment of the present invention among the step S2E is shown, and is the schematic stereoscopic figure of the related article carrying apparatus of second embodiment of the present invention.
Figure 10 F is the figure that the action of the related article carrying apparatus of second embodiment of the present invention among the step S2F is shown, and is the schematic stereoscopic figure of the related article carrying apparatus of second embodiment of the present invention.
Figure 10 G is the figure that the action of the related article carrying apparatus of second embodiment of the present invention among the step S2G is shown, and is the schematic stereoscopic figure of the related article carrying apparatus of second embodiment of the present invention.
Figure 10 H is the figure that the action of the related article carrying apparatus of second embodiment of the present invention among the step S2H is shown, and is the schematic stereoscopic figure of the related article carrying apparatus of second embodiment of the present invention.
Figure 10 I is the schematic stereoscopic figure that has filled the related article carrying apparatus of second embodiment of the present invention under the state of handling the back glass substrate in second box.
Figure 11 is the birds-eye view of the related article carrying apparatus of the 3rd embodiment of the present invention.
Figure 12 A is the section-drawing of the article carrying apparatus after cutting off along A-A ' line shown in Figure 11.
Figure 12 B1 is the section-drawing of the article carrying apparatus after cutting off along B-B ' line shown in Figure 11, and the state when first elevator and second elevator are maximum to descend is shown.
Figure 12 B2 is the section-drawing of the article carrying apparatus after cutting off along B-B ' line shown in Figure 11, and the state when first elevator and second elevator are maximum to rise is shown.
Figure 12 C is the section-drawing of the article carrying apparatus after cutting off along C-C ' line shown in Figure 11.
Figure 13 A is the figure that the action of the related article carrying apparatus of the 3rd embodiment of the present invention among the step S311 that loads transport path is shown, and is the main portion section-drawing of the related article carrying apparatus of the 3rd embodiment of the present invention.
Figure 13 B is the figure that the action of the related article carrying apparatus of the 3rd embodiment of the present invention among the step S312 that loads transport path is shown, and is the main portion section-drawing of the related article carrying apparatus of the 3rd embodiment of the present invention.
Figure 13 C is the figure that the action of the related article carrying apparatus of the 3rd embodiment of the present invention among the step S313 that loads transport path is shown, and is the main portion section-drawing of the related article carrying apparatus of the 3rd embodiment of the present invention.
Figure 13 D is the figure that the action of the related article carrying apparatus of the 3rd embodiment of the present invention among the step S314 that loads transport path is shown, and is the main portion section-drawing of the related article carrying apparatus of the 3rd embodiment of the present invention.
Figure 13 E is the figure that the action of the related article carrying apparatus of the 3rd embodiment of the present invention among the step S315 that loads transport path is shown, and is the main portion section-drawing of the related article carrying apparatus of the 3rd embodiment of the present invention.
Figure 13 F is the figure that the action of the related article carrying apparatus of the 3rd embodiment of the present invention among the step S316 that loads transport path is shown, and is the main portion section-drawing of the related article carrying apparatus of the 3rd embodiment of the present invention.
Figure 14 A is the figure that the action of the related article carrying apparatus of the 3rd embodiment of the present invention among the step S321 of unloading transport path is shown, and is the main portion section-drawing of the related article carrying apparatus of the 3rd embodiment of the present invention.
Figure 14 B is the figure that the action in the related article delivery path of the 3rd embodiment of the present invention among the step S322 of unloading transport path is shown, and is the main portion section-drawing of the related article carrying apparatus of the 3rd embodiment of the present invention.
Figure 14 C is the figure that the action in the related article delivery path of the 3rd embodiment of the present invention among the step S323 of unloading transport path is shown, and is the main portion section-drawing of the related article carrying apparatus of the 3rd embodiment of the present invention.
Figure 14 D is the figure that the action of the related article carrying apparatus of the 3rd embodiment of the present invention among the step S324 of unloading transport path is shown, and is the main portion section-drawing of the related article carrying apparatus of the 3rd embodiment of the present invention.
Figure 14 E is the figure that the action of the related article carrying apparatus of the 3rd embodiment of the present invention among the step S325 of unloading transport path is shown, and is the main portion section-drawing of the related article carrying apparatus of the 3rd embodiment of the present invention.
Figure 14 F is the figure that the action of the related article carrying apparatus of the 3rd embodiment of the present invention among the step S326 of unloading transport path is shown, and is the main portion section-drawing of the related article carrying apparatus of the 3rd embodiment of the present invention.
Figure 15 A is the figure that the action of the related article carrying apparatus of the 3rd embodiment of the present invention among the step S3A is shown, and is the schematic stereoscopic figure of the related article carrying apparatus of the 3rd embodiment of the present invention.
Figure 15 B is the figure that the action of the related article carrying apparatus of the 3rd embodiment of the present invention among the step S3B is shown, and is the schematic stereoscopic figure of the related article carrying apparatus of the 3rd embodiment of the present invention.
Figure 15 C is the figure that the action of the related article carrying apparatus of the 3rd embodiment of the present invention among the step S3C is shown, and is the schematic stereoscopic figure of the related article carrying apparatus of the 3rd embodiment of the present invention.
Figure 15 D is the figure that the action of the related article carrying apparatus of the 3rd embodiment of the present invention among the step S3D is shown, and is the schematic stereoscopic figure of the related article carrying apparatus of the 3rd embodiment of the present invention.
Figure 15 E is the figure that the action of the related article carrying apparatus of the 3rd embodiment of the present invention among the step S3E is shown, and is the schematic stereoscopic figure of the related article carrying apparatus of the 3rd embodiment of the present invention.
Figure 15 F is the figure that the action of the related article carrying apparatus of the 3rd embodiment of the present invention among the step S3F is shown, and is the schematic stereoscopic figure of the related article carrying apparatus of the 3rd embodiment of the present invention.
Figure 15 G is the figure that the action of the related article carrying apparatus of the 3rd embodiment of the present invention among the step S3G is shown, and is the schematic stereoscopic figure of the related article carrying apparatus of the 3rd embodiment of the present invention.
Figure 15 H is the figure that the action of the related article carrying apparatus of the 3rd embodiment of the present invention among the step S3H is shown, and is the schematic stereoscopic figure of the related article carrying apparatus of the 3rd embodiment of the present invention.
Figure 15 I is the figure that the action of the related article carrying apparatus of the 3rd embodiment of the present invention among the step S3I is shown, and is the schematic stereoscopic figure of the related article carrying apparatus of the 3rd embodiment of the present invention.
Figure 15 J is the figure that the action of the related article carrying apparatus of the 3rd embodiment of the present invention among the step S3J is shown, and is the schematic stereoscopic figure of the related article carrying apparatus of the 3rd embodiment of the present invention.
Figure 15 K is the figure that the action of the related article carrying apparatus of the 3rd embodiment of the present invention among the step S3K is shown, and is the schematic stereoscopic figure of the related article carrying apparatus of the 3rd embodiment of the present invention.
Figure 15 L is the figure that the action of the related article carrying apparatus of the 3rd embodiment of the present invention among the step S3L is shown, and is the schematic stereoscopic figure of the related article carrying apparatus of the 3rd embodiment of the present invention.
Figure 15 M is the figure that the action of the related article carrying apparatus of the 3rd embodiment of the present invention among the step S3M is shown, and is the schematic stereoscopic figure of the related article carrying apparatus of the 3rd embodiment of the present invention.
Figure 15 N is the figure that the action of the related article carrying apparatus of the 3rd embodiment of the present invention among the step S3N is shown, and is the schematic stereoscopic figure of the related article carrying apparatus of the 3rd embodiment of the present invention.
Figure 15 O is the figure that the action of the related article carrying apparatus of the 3rd embodiment of the present invention among the step S3O is shown, and is the schematic stereoscopic figure of the related article carrying apparatus of the 3rd embodiment of the present invention.
Figure 15 P is the figure that the action of the related article carrying apparatus of the 3rd embodiment of the present invention among the step S3P is shown, and is the schematic stereoscopic figure of the related article carrying apparatus of the 3rd embodiment of the present invention.
Figure 15 Q is the figure that the action of the related article carrying apparatus of the 3rd embodiment of the present invention among the step S3Q is shown, and is the schematic stereoscopic figure of the related article carrying apparatus of the 3rd embodiment of the present invention.
Figure 15 R is the figure that the action of the related article carrying apparatus of the 3rd embodiment of the present invention among the step S3R is shown, and is the schematic stereoscopic figure of the related article carrying apparatus of the 3rd embodiment of the present invention.
Figure 15 S is the figure that the action of the related article carrying apparatus of the 3rd embodiment of the present invention among the step S3S is shown, and is the schematic stereoscopic figure of the related article carrying apparatus of the 3rd embodiment of the present invention.
Figure 15 T is the figure that the action of the related article carrying apparatus of the 3rd embodiment of the present invention among the step S3T is shown, and is the schematic stereoscopic figure of the related article carrying apparatus of the 3rd embodiment of the present invention.
Figure 15 U is the figure that the action of the related article carrying apparatus of the 3rd embodiment of the present invention among the step S3U is shown, and is the schematic stereoscopic figure of the related article carrying apparatus of the 3rd embodiment of the present invention.
Figure 15 V is the figure that the action of the related article carrying apparatus of the 3rd embodiment of the present invention among the step S3V is shown, and is the schematic stereoscopic figure of the related article carrying apparatus of the 3rd embodiment of the present invention.
Figure 15 W is the schematic stereoscopic figure that has filled the related article carrying apparatus of the 3rd embodiment of the present invention under the state of handling the back glass substrate in second box.
Figure 16 is the birds-eye view of the first existing article carrying apparatus.
Figure 17 is the birds-eye view of the second existing article carrying apparatus.
Nomenclature
100,200,300,400,500... article carrying apparatus; 110,210,310... load-transfer device portion; 111,211,311... first load-transfer device; 112,212,312... second load-transfer device; 120,320... first elevator; 130,330... second elevator; 121,131,281,321,331,381... first lifting unit; 122,132,282,322,332,382... second lifting unit; 140, the 440... first article transition platform (first bench board); 141,441... first box; 150, the 450... second article transition platform (second bench board); 151,451... second box; 160,460... supplies with the end; 170,470... discharges the end; 211a, the 311a... first load-transfer device front part; Quadrate part behind 211b, 311b... first load-transfer device; Discharge the end 260... supply with; 280,380... the 3rd elevator; 312a... the second load-transfer device front part; 312b... quadrate part behind second load-transfer device; 350... the 3rd bench board; 351... the 3rd box; 410... load-transfer device; 480... first direction interpreter; 490... second direction interpreter; 580... self-propelled conveyer.
The specific embodiment
Below the related article carrying apparatus of embodiments of the present invention is described.
For example has the glass substrate that in FPD panels such as LCD, PDP, organic EL, uses as the article that utilize the related article carrying apparatus of embodiments of the present invention to carry.In this case, be to be used for glass substrate treating device that glass substrate is handled as article handling device.The film that for example has mask process, clean or a vacuum evaporation etc. as the processing of glass substrate forms to be handled etc.In addition, also comprise glass substrate inspecting apparatus as glass substrate treating device.
, handle preceding article herein, will utilize article handling device to handle article afterwards and be called processing back article utilizing article handling device processing article before to be called.Therefore, using glass substrate treating device, using as article under the situation of glass substrate as article handling device as mentioned above, article are to handle front glass substrate before the above-mentioned processing, and article are to handle the back glass substrate after the above-mentioned processing.
Below, for the related article carrying apparatus of each embodiment of the present invention, to using glass substrate treating device as article handling device, using the situation of glass substrate to describe as article.
(first embodiment)
At first, use Fig. 1 and Fig. 2 A～Fig. 2 C that the related article carrying apparatus 100 of first embodiment of the present invention is described.Fig. 1 is the birds-eye view of the related article carrying apparatus 100 of first embodiment of the present invention.Fig. 2 A～Fig. 2 C is the section-drawing of the article carrying apparatus 100 after cutting off along A-A ' line shown in Figure 1, B-B ' line, C-C ' line.
As shown in Figure 1, the related article carrying apparatus 100 of first embodiment of the present invention is configured between stakcer crane STK and the glass substrate treating device EQ.
The related article carrying apparatus 100 of first embodiment of the present invention will be delivered to glass substrate treating device EQ from the processing front glass substrate G1 that stakcer crane STK moves into.Then, will be delivered to stakcer crane STK from glass substrate G2 after the processing of glass substrate treating device EQ discharge.
As shown in Figure 1, the related article carrying apparatus 100 of first embodiment of the present invention is by following component set-up: load-transfer device portion 110; First elevator 120, the article that this first elevator 120 is configured in load-transfer device portion 110 are moved into side; Second elevator 130, the article that this second elevator 130 is configured in conveyer 110 are taken out of side; The first article transition platform (hereinafter referred to as " first bench board ") 140, this first article transition platform 140 is configured between first elevator 120 and the stakcer crane STK; The second article transition platform (hereinafter referred to as " second bench board ") 150, this second article transition platform 150 is configured between second elevator 130 and the stakcer crane STK; Supply with end 160, this supply end 160 is configured between second elevator 130 and the glass substrate treating device EQ; And discharge end 170, this discharge end 170 is configured between first elevator 120 and the glass substrate treating device EQ.
As shown in Figure 2, first bench board 140 is the mounting tables that are used for mounting first box 141, takes in multi-disc by glass substrate (processing front glass substrate) G1 before the glass substrate treating device EQ processing in this first box 141.And then, also have the transfer function that is used for this processing front glass substrate G1 is transferred load to first elevator 120.This transfer function for example can realize by driving the roll-type load-transfer device.First box 141 is by the predetermined shelf outbound of stakcer crane STK from Automatic Warehouse.In first box 141, for example be level and how layeredly accommodate 50 processing front glass substrate G1 with predetermined interval.First bench board 140 also has elevating function, and 141 multistages of first box ground is descended.By the elevating function and the transfer function of first bench board 140, handle front glass substrate G1 and in first box 141, be discharged from and then transferred load to first elevator 120 one by one.
Second bench board 150 is the mounting tables that are used for mounting second box 151, takes in glass substrate (the handling the back glass substrate) G2 after multi-disc is handled by glass substrate treating device EQ in this second box 151.And then, also have the function that receives this processing back glass substrate G2 from second elevator 130.Second box 151 constitutes the shape same with first box 141, for example constitutes can be level and how layeredly to hold 50 sheet glass substrates.Second bench board 150 also has elevating function, and 151 multistages of second box ground is risen.And second bench board 150 for example has by driving the transfer function that the roll-type load-transfer device constitutes.By the elevating function and the transfer function of second bench board 150, glass substrate G2 is accommodated in second box 151 one by one after the processing of second elevator, 130 transfers.When after the processing of taking in pre-stator number (for example 50) in second box 151 during glass substrate G2, second box 151 is put predetermined shelf to Automatic Warehouse in storage by stakcer crane STK.As described later, the ground-surface height of second bench board, 150 distances is identical with the ground-surface height of first bench board, 140 distances.For the height of this first bench board and second bench board, will handle front glass substrate G1 from the height of the position that first box 141 takes out with will to handle the height setting that back glass substrate G2 is accommodated in the position of second box 151 be benchmark.
Shown in Fig. 2 B1, first elevator 120 has first lifting unit 121 and second lifting unit, 122, the first lifting units 121 and second lifting unit 122 and has rising function and decline function.First lifting unit 121 is upside lifting units that the mode with the top that is positioned at second lifting unit 122 is provided with.And second lifting unit 122 is downside lifting units that the mode with the below that is positioned at first lifting unit 121 is provided with.First lifting unit 121 in first elevator 120 and second lifting unit 122 constitute respectively and drive independently.In the present embodiment, shown in Fig. 2 B1 and Fig. 2 B2, first lifting unit 121 of first elevator 120 and second lifting unit 122 are driven in the mode that rises under the state of keeping the relative position of each other relation and descend respectively.That is, remain certain distance between first lifting unit 121 and second lifting unit 122, the lifting action that first lifting unit 121 and second lifting unit 122 link.In addition, shown in present embodiment, under the situation of keeping the relative position relation between first lifting unit 121 and second lifting unit 122, first lifting unit 121 and second lifting unit 122 can constitute one.
In first elevator 120, be positioned at first lifting unit, the 121 transport process front glass substrate G1 on upper strata.Receive the processing front glass substrate G1 that comes from 140 transfers of first bench board one by one, have under the state of handling front glass substrate G1 in mounting and rise, will handle first load-transfer device 111 that front glass substrate G1 transfers load to load-transfer device portion 110 then.
On the other hand, second lifting unit 122 that is positioned at the lower floor of first lifting unit 121 is used for glass substrate G2 after the transport process.Receive one by one from discharging glass substrate G2 after the processing that end 170 transfers come, have under the state of handling back glass substrate G2 in mounting to descend, glass substrate G2 transfers load to second load-transfer device 112 of load-transfer device portion 110 after will handling then.
In addition, in the present embodiment, first lifting unit 121 in first elevator 120 and second lifting unit 122 only constitute respectively transport process front glass substrate G1 and glass substrate G2 after the transport process only.But constituting the function of first lifting unit 121 and the function of second lifting unit 122 can switch.Thus, also can constitute the function of the function of first load-transfer device 111 and second load-transfer device 112 has been carried out the article carrying apparatus that switches.
And, can drive the roll-type load-transfer device and wait and handle front glass substrate G1 and handle the transfer of back glass substrate G2 by being provided with at first lifting unit 121 and second lifting unit 122 with respect to load-transfer device portion 110.And as shown in Figure 1, processing front glass substrate G1 is moved into first elevator 120 from first bench board 140 direction forms the right angle with the direction that this processing front glass substrate G1 is taken out of from first elevator 120 to first load-transfer device 111.Similarly, handling back glass substrate G2 is moved into the direction of first elevator 120 and this processings back glass substrate G2 and is taken out of direction formation right angle to first load-transfer device 111 from first elevator 120 from discharging end 170.That is, the throughput direction that has glass substrate of first elevator 120 in the present embodiment carries out translation function for translation.Thus, handle throughput direction conversion 90 degree of front glass substrate G1 or processing back glass substrate G2.
Shown in Fig. 2 B1 and Fig. 2 B2, load-transfer device portion 110 is load-transfer devices of the two-layer that is made of first load-transfer device 111 and second load-transfer device 112.First load-transfer device 111 and second load-transfer device 112 are to be used for the load-transfer device of the one chip of automatic transport glass substrate one by one.First load-transfer device 111 is the upside load-transfer devices that are arranged at the top of second load-transfer device 112, and second load-transfer device 112 is the downside load-transfer devices that are arranged at the below of first load-transfer device 111.
First load-transfer device 111 that is positioned at the upper strata is the driving roll-type load-transfer devices that are used for the processing front glass substrate G1 that first lifting unit 121 from first elevator 120 transports is delivered to second elevator 130.First load-transfer device 111 is the processing front glass substrate load-transfer devices that are used for transport process front glass substrate G1.In addition, in the present embodiment, use as first load-transfer device 111 to drive the roll-type load-transfer devices, still, also can use air to float other load-transfer device such as load-transfer device.
On the other hand, second load-transfer device 112 that is positioned at lower floor with respect to first load-transfer device 111 is driving roll-type load-transfer devices that glass substrate G2 is delivered to second elevator 130 after the processing that is used for second lifting unit 122 from first elevator 120 is transported.Second load-transfer device 112 is to be used for glass substrate load-transfer device after the processing of glass substrate G2 after the transport process.In addition, in the present embodiment, use as second load-transfer device 112 to drive the roll-type load-transfer devices, still, also can use air to float other load-transfer device such as load-transfer device.
In addition, first load-transfer device 111 forms identical structure with second load-transfer device 112, in the same direction (the paper left of Fig. 1 and Fig. 2 B1 to) transport process front glass substrate G1 and handle back glass substrate G2.And, though also not shown,, first load-transfer device 111 and second load-transfer device 112 are fixed with predetermined method.
Second elevator 130 forms the structure same with first elevator 120, has first lifting unit 131 and second lifting unit, 132, the first lifting units 131 and second lifting unit 132 and has rising function and decline function.First lifting unit 131 is upside lifting units that the mode with the top that is positioned at second lifting unit 132 is provided with.And second lifting unit 132 is downside lifting units that the mode with the below that is positioned at first lifting unit 131 is provided with.First lifting unit 131 in second elevator 130 and second lifting unit 132 constitute respectively and drive independently.In the present embodiment, shown in Fig. 2 B1 and Fig. 2 B2, first lifting unit 131 of second elevator 130 and second lifting unit 132 are driven in the mode that rises under the state of keeping the relative position of each other relation and descend respectively.That is, keep certain distance all the time between first lifting unit 131 and second lifting unit 132, the lifting action that first lifting unit 131 and second lifting unit 132 link.In addition, as present embodiment, under the situation of keeping the relative position relation between first lifting unit 131 and second lifting unit 132, first lifting unit 131 and second lifting unit 132 can constitute one.
In second elevator 130, first lifting unit 131 that is positioned at the upper strata is used for transport process front glass substrate G1.Receive the processing front glass substrate G1 that comes from first load-transfer device, 111 transfers of load-transfer device portion 110 one by one, have under the state of handling front glass substrate G1 in mounting to descend, will handle front glass substrate G1 then and transfer load to supply end 160.
On the other hand, second lifting unit 132 that is positioned at the lower floor of first lifting unit 131 is used for glass substrate G2 after the transport process.Receive glass substrate G2 after the processing that comes from second load-transfer device, 112 transfers of load-transfer device portion 110 one by one, have under the state of handling back glass substrate G2 in mounting and to rise, will handle back glass substrate G2 then and be accommodated in mounting one by one in second box 151 of second bench board 150.
In addition, in the present embodiment, first lifting unit 131 in second elevator 130 and second lifting unit 132 only constitute respectively transport process front glass substrate G1 and glass substrate G2 after the transport process only.But constituting the function of first lifting unit 131 and the function of second lifting unit 132 can switch, and thus, also can constitute the function of first load-transfer device 111 and the function of second load-transfer device 112 have been carried out the article carrying apparatus that switches.
And, can drive the roll-type load-transfer device and wait and handle front glass substrate G1 with respect to the transfer of supplying with end 160 with handle the transfer of back glass substrate G2 by being provided with at first lifting unit 131 and second lifting unit 132 with respect to second box 151.And as shown in Figure 1, processing front glass substrate G1 is moved into the direction of second elevator 130 and handles front glass substrate G1 and taken out of from second elevator 130 to the direction formation right angle of supplying with end 160 from first load-transfer device 111.Similarly, handling back glass substrate G2 is moved into the direction of second elevator 130 and is handled the direction that back glass substrate G2 taken out of from second elevator 130 to second bench board 150 and formed the right angle from second load-transfer device 112.That is, the throughput direction that has glass substrate of second elevator 130 carries out translation function for translation.Thus, handle throughput direction conversion 90 degree of front glass substrate G1 or processing back glass substrate G2.
As shown in Figure 1, supplying with end 160 is arranged on across second elevator 130 and second bench board, 150 opposed positions.Supplying with end 160 is the mounting tables that are used for receiving one by one from the next processing front glass substrate G1 of first lifting unit, 131 transfers of second elevator 130.And then, have the function that this processing front glass substrate G1 is supplied to glass substrate treating device EQ.Handle front glass substrate G1 for example can wait and carry out with respect to the supply of glass substrate treating device EQ by driving the roll-type load-transfer device.Supply with end 160 by this, handle front glass substrate G1 and be supplied to glass substrate treating device EQ.In addition, wait for that the processing front glass substrate G1 that glass substrate treating device EQ is supplied with is supplying with end 160 standbies.
As shown in Figure 1, discharging end 170 is arranged on across first elevator 120 and first bench board, 140 opposed positions.Discharge end 170 and be the mounting table that is used for receiving one by one glass substrate G2 after the processing of discharging from glass substrate treating device EQ.And then, have the function that this processing back glass substrate G2 is delivered to first elevator 120.Handle back glass substrate G2 for example can wait and carry out with respect to the conveying of first elevator 120 by driving the roll-type load-transfer device.
Height relationships to the position that each inscape disposed that constitutes in the above described manner describes.Shown in Fig. 2 A～Fig. 2 C, the height of establishing first bench board 140 and second bench board 150 is H1 S1, H1 S2, the height of establishing first load-transfer device 111 and second load-transfer device 112 is H1 VC1, H1 VC2And, highly be H1 when the maximum of establishing first lifting unit 121 in first elevator 120 rises when height and maximum decline L11max, H1 L11min, highly be H1 when the maximum of establishing second lifting unit 122 in first elevator 120 rises when height and maximum decline L12max, H1 L12minHighly be H1 when similarly, the maximum of establishing first lifting unit 131 of second elevator 130 rises when height and maximum decline L21max, H1 L21min, highly be H1 when the maximum of establishing second lifting unit 132 of second elevator 130 rises when height and maximum decline L22max, H1 L22minAnd establishing the height of supplying with end 160 and discharging end 170 is H1 P1And H1 P2
In this case, the height relationships that is positioned at the inscape of uppermost position in fig-ure is: H1 VC1=H1 L11max=H1 L21max, the height relationships that is positioned at the inscape of the second place is: H1 S1=H1 S2=H1 L11min=H1 L21min=H1 L12max=H1 L22max=H1 P1=H1 P2, the height relationships that is positioned at the inscape of upper/lower positions is: H1 VC2=H1 L12min=H1 L22minLike this, the related inscape of present embodiment is configured to 3 layers height and position.
In addition, height for first bench board 140 and second bench board 150, the height itself of first bench board 140 and second bench board 150 is unimportant, importantly will handle front glass substrate G1 from the height of the position that first box 141 takes out with will handle the height that back glass substrate G2 is accommodated in the position of second box 151.Therefore, the height of this first bench board 140 is that benchmark is set will handle front glass substrate G1 from the height of the position that first box 141 takes out.And the height of second bench board 150 is that benchmark is set with the height that glass substrate G2 after will handling is accommodated in the position of second box 151.
Secondly, use Fig. 1, Fig. 3 A～Fig. 3 E and Fig. 4 A～Fig. 4 E that the action of the related article carrying apparatus 100 of first embodiment of the present invention is described.Herein, blank arrow shown in Figure 1 represents to handle the loading transport path R11 that front glass substrate G1 is transferred, and black arrow represents to handle the unloading transport path R12 that back glass substrate G2 is transferred.Fig. 3 A～Fig. 3 E is the figure that the action of the related article carrying apparatus of first embodiment of the present invention among the loading transport path R11 shown in Figure 1 is shown.And Fig. 4 A～Fig. 4 E is the figure that the action of the related article carrying apparatus of first embodiment of the present invention among the unloading transport path R12 shown in Figure 1 is shown.
At first, the loading transport path R11 that handles front glass substrate G1 is described.In addition, in fact, processing back glass substrate G2 also is transferred simultaneously when processing front glass substrate G1 is transferred, and still, herein in order to make explanation simple, only the conveying to processing front glass substrate G1 describes.
At first, as shown in Figure 3A, take in multi-disc and handle first box, 141 mountings of front glass substrate G1 in first bench board 140.Then, by the transfer function of first bench board 140, be positioned at undermost first and handle front glass substrate G1 is transferred load to first elevator 120 from first box 141 first lifting unit 121 (step S111).
Secondly, shown in Fig. 3 B, first elevator 120 rises, and thus, mounting has first lifting unit 121 of handling front glass substrate G1 to rise to the height (step S112) of first load-transfer device 111.At this moment, first box 141 is by the elevating function decline one-level of first bench board 140, and second of carrying subsequently handles the conveying of front glass substrate G1 and prepare.
Secondly, shown in Fig. 3 C, processing front glass substrate G1 is transferred load to first load-transfer device 111 by the transfer function of first elevator 120, then, handles front glass substrate G1 is delivered to second elevator 130 by first load-transfer device 111 first lifting unit 131 (step S113).Thus, handle front glass substrate G1 mounting in first lifting unit 131 of second elevator 130.
Secondly, shown in Fig. 3 D, second elevator 130 descends, and thus, mounting has first lifting unit 131 of second elevator 130 of handling front glass substrate G1 to drop to the height (step S114) of supplying with end 160.
Secondly, shown in Fig. 3 E, processing front glass substrate G1 is transferred load to supply end 160 (step S115) by the transfer function of second elevator 130 from second elevator 130.Mounting is implemented predetermined processing by glass substrate treating device EQ subsequently in the processing front glass substrate G1 that supplies with end 160.At this moment, second of following a slice handled front glass substrate G1 is transferred load to first elevator 120 from first box 141 first lifting unit 121.
In addition, after, returning the action of Fig. 3 A, the processing front glass substrate G1 in first box 141 carries out the later same action of Fig. 3 B till carrying and finishing repeatedly.
Secondly, with reference to Fig. 4 A～Fig. 4 E to processing shown in Figure 1 after the unloading transport path R12 of glass substrate G2 describe.In addition, as mentioned above, in fact, handle front glass substrate G1 when glass substrate G2 is transferred after processing and also be transferred simultaneously, still, in order to make explanation simple, only the conveying of handling back glass substrate G2 is described herein.
At first, shown in Fig. 4 A, be discharged to glass substrate G2 after the processing of discharging end 170 and transferred load to second lifting unit 122 (step S121) of first elevator 120 from discharging end 170 by the transfer function of discharging end 170.
Secondly, shown in Fig. 4 B, first elevator 120 descends, and thus, mounting has second lifting unit 122 of first elevator 120 of handling back glass substrate G2 to drop to the height (step S122) of second load-transfer device 112.
Secondly, shown in Fig. 4 C, glass substrate G2 is transferred load to after second load-transfer device 112 by the transfer function of first elevator 120 after processing, then utilizes second load-transfer device 112 will handle second lifting unit 132 (step S123) that back glass substrate G2 is delivered to second elevator 130.Thus, handle back glass substrate G2 mounting in second lifting unit 132 of second elevator 130.
Secondly, shown in Fig. 4 D, second elevator 130 rises, and thus, mounting has second lifting unit 132 of second elevator 130 of handling back glass substrate G2 to rise to the height (step S124) of second bench board 150.At this moment, in the present embodiment, following a slice is handled back glass substrate G2 and is discharged to discharge end 170.
Secondly, shown in Fig. 4 E, glass substrate G2 is transferred load to mounting by the transfer function of second elevator 130 in second box 151 of second bench board 150 (step S125) from second elevator 130 after handling.Then, take in second box, the 151 rising one-levels of handling back glass substrate G2, handle back glass substrate G2 to take in down a slice.At this moment, following a slice is handled first lifting unit 121 that back glass substrate G2 transfers load to first elevator 120.
In addition, after, return the action of Fig. 4 A, in second box 151, take in after the processing of pre-stator number and carry out the later same action of Fig. 4 B repeatedly till the glass substrate G2.
Secondly, with reference to Fig. 5 A～Fig. 5 J the action of while transport process front glass substrate G1 in the related article carrying apparatus 100 of first embodiment of the present invention and processing back glass substrate G2 is described.Fig. 5 A～Fig. 5 J is the figure that the action of the related article carrying apparatus 100 of first embodiment of the present invention is shown, and is the stereoscopic figure of the related article carrying apparatus 100 of schematically illustrated first embodiment of the present invention.In addition, in Fig. 5 A～Fig. 5 J, be conceived to handle front glass substrate G1 and handle the action of back glass substrate G2, structure is in addition simplified or omitted.And, in each figure, handle front glass substrate G1 and represent by space rectangles, handle back glass substrate G2 and represent by shaded rectangle.The action that first elevator 120 or second elevator 130 rise or descend is represented in the motion that thin arrow among each figure is represented to handle front glass substrate G1 or handled back glass substrate G2, blank thick arrow.In addition, in first box 141 and the sheet number of the glass substrate in second box 151 be example.
At first, shown in Fig. 5 A, will transfer load to first elevator 120 (step S1A) in first box 141 of first processing front glass substrate G1 from mounting in first bench board.
Secondly, shown in Fig. 5 B, first elevator 120 is risen, make first to handle the height and position (step S1B) that front glass substrate G1 moves to first load-transfer device 111.At this moment, glass substrate G2 is discharged to and discharges end 170 after first processing.In addition, glass substrate G2 just is discharged under the situation of discharging end 170 after handling before rising at first elevator 120, all makes processing back glass substrate G2 discharge end 170 standbies till first elevator 120 rises.On the other hand, even if, make first elevator 120 standby under the state after the rising when also not being discharged at glass substrate G2 after the 120 rising post-processings of first elevator under the situation of discharging end 170.In this case, also transport process front glass substrate G1 continuously.These in following action too.
Secondly, shown in Fig. 5 C, glass substrate G2 after first processing is transferred load to first elevator 120 (step S1C) from discharging end 170.
Then, shown in Fig. 5 D, handle front glass substrate G1 with first and transfer load to first load-transfer device 111, then, utilize first load-transfer device 111 to handle front glass substrate G1 and be delivered to second elevator 130 (step S1D) first from first elevator 120.In addition, the conveying operation (S1D) that this processing front glass substrate G1 is delivered to second elevator 130 transfers load to first elevator 120 (S1C) and carries out afterwards from discharging end 170 at the back glass substrate G2 that will handle shown in Fig. 5 C.But, also can after will handling, carry out before transferring load to first elevator 120 from discharge end 170 by glass substrate G2.This in following action too.
Secondly, shown in Fig. 5 E, make mounting have first elevator 120 of glass substrate G2 after first processing and mounting that first second elevator 130 of handling front glass substrate G1 descend simultaneously (step S1E) arranged.In addition, though be that first elevator 120 and second elevator 130 are descended simultaneously,, the moment of decline also can stagger.But,, first elevator 120 and second elevator 130 are descended simultaneously for even improve cycle time slightly.
Secondly, shown in Fig. 5 F, mounting is transferred load to supply end 160 in first processing front glass substrate G1 of second elevator 130.And, glass substrate G2 after first processing is transferred load to second load-transfer device 112 from first elevator 120, then, utilize second load-transfer device 112 with first processing after glass substrate G2 be delivered to second elevator 130 (step S1F).In order to improve cycle time, these handle the transfer of front glass substrate G1 and the conveying of processing back glass substrate G2 is preferably carried out simultaneously, constantly carry out but also can stagger.In addition, at this moment, handle front glass substrate G1 for second and transferred load to first elevator 120 from first box 141.
Secondly, shown in Fig. 5 G, make mounting that second elevator 130 of glass substrate G2 rise (step S1G) be arranged after first processing.At this moment, make mounting have second first elevator 120 of handling front glass substrate G1 also to rise simultaneously.At this moment, glass substrate G2 is discharged to and discharges end 170 after second processing.
Secondly, shown in Fig. 5 H, glass substrate G2 after first processing is transferred load to second bench board 150 from second elevator 130, glass substrate G2 after first processing is accommodated in second box 151 that is positioned in second bench board 150 (step S1H).At this moment, mounting glass substrate G2 after second processing of discharging end 170 is transferred load to first elevator 120 from discharging end 170.
Secondly, shown in Fig. 5 I, handle front glass substrate G1 with second and transfer load to first load-transfer device 111, then, utilize first load-transfer device 111 to handle front glass substrate G2 and be delivered to second elevator 130 (step S1I) second from first elevator 120.In addition, this action is identical with the action shown in Fig. 5 D.
After, second is handled after front glass substrate G1 and second processing glass substrate G2 and processing front glass substrate G1 after this and handle back glass substrate G2 and carry out the action shown in above-mentioned Fig. 5 E～Fig. 5 H repeatedly.Thus, final, shown in Fig. 5 J, become empty in first box 141, take in glass substrate G2 after the processing of pre-stator number in second box 151.
In addition, filled second box 151 of handling back glass substrate G2 and put predetermined shelf in storage by stakcer crane STK subsequently to Automatic Warehouse.And, needs newly handle glass substrate situation under, utilize stakcer crane STK to take in and handle the next one first box 141 mountings of front glass substrate G1 in first bench board 140.
More than, the related article carrying apparatus 100 of first embodiment of the present invention utilizes first load-transfer device 111 and second load-transfer device 112 while transport process front glass substrate G1 and processing back glass substrate G2 dividually respectively.And the related article carrying apparatus 100 of first embodiment of the present invention alternately loads the reception of glass substrate G2 after processing front glass substrate G1 in the conveying and the unloading processing in carrying and the action of supply by using first elevator 120 and second elevator 130.Therefore, can and handle back glass substrate G2 with high productive temp transport process front glass substrate G1.Therefore, owing to can carry out continuously supplying with the supply operation of glass substrate and the discharge operation that glass substrate is discharged from glass substrate treating device EQ, therefore can improve cycle time significantly towards glass substrate treating device EQ.And, because first load-transfer device 111 and second load-transfer device 112 in the above-below direction overlay configuration, therefore need not make the area that is provided with of article carrying apparatus increase and just article carrying apparatus can be set.
(second embodiment)
Secondly, use Fig. 6 and Fig. 7 A～Fig. 7 C that the related article carrying apparatus 200 of second embodiment of the present invention is described.Fig. 6 is the planar view of the related article carrying apparatus 200 of second embodiment of the present invention.Fig. 7 A～Fig. 7 C is the section-drawing of the article carrying apparatus 200 after cutting off along A-A ' line shown in Figure 6, B-B ' line, C-C ' line.
The related article carrying apparatus 100 of the basic structure of the article carrying apparatus 200 that second embodiment of the present invention is related and first embodiment of the present invention is identical.The difference of the article carrying apparatus 100 that the related article carrying apparatus of second embodiment of the present invention 200 and first embodiment of the present invention are related is following each point: the structure of load-transfer device portion, supply with the end and carry the end structure, second bench board allocation position and have the 3rd elevator.In addition, to the identical symbol of the structure mark identical and omit or simplified illustration with the related article carrying apparatus of first embodiment of the present invention 100.
As shown in Figure 6, in the related article carrying apparatus 200 of second embodiment of the present invention, load-transfer device portion 210 is divided into 2 parts at the throughput direction of glass substrate, disposes the 3rd elevator 280 between the load-transfer device that this quilt separates.And second bench board 150 that is used for mounting second box 151 is configured in and the 3rd elevator 280 opposed positions.And, possess the supply discharge end 260 that dual-purpose is done the supply end 160 in first embodiment and discharged end 170 in the present embodiment.Supplying with discharge end 260 is configured between second elevator 130 and the glass substrate treating device EQ.
Shown in Fig. 7 B1 and Fig. 7 B2, the related load-transfer device portion 210 of present embodiment is load-transfer devices of 2 laminars that are made of first load-transfer device 211 and second load-transfer device 212.First load-transfer device 211 and second load-transfer device 212 are to be used for the load-transfer device of the one chip of automatic transport glass substrate one by one.First load-transfer device 211 is the upside load-transfer devices that are arranged at the top of second load-transfer device 212, and second load-transfer device 212 is downside load-transfer devices.
First load-transfer device 211 that is positioned at the upper strata is load-transfer devices of transport process front glass substrate G1 only, and after the fore-and-aft direction of the throughput direction of handling front glass substrate G1 further is divided into the first load-transfer device front part 211a and first load-transfer device quadrate part 211b.Be positioned at respect to throughput direction that quadrate part 211b is the driving roll-type load-transfer device that is used for the processing front glass substrate G1 that first lifting unit 121 from first elevator 120 transports is delivered to first lifting unit 281 of the 3rd elevator 280 behind first load-transfer device at rear.The first load-transfer device front part 211a that is positioned at the place ahead with respect to throughput direction is the driving roll-type load-transfer device that is used for the processing front glass substrate G1 that first lifting unit 281 from the 3rd elevator 280 transports is delivered to first lifting unit 131 of second elevator 130.
On the other hand, second load-transfer device 212 that is positioned at lower floor with respect to first load-transfer device 211 is load-transfer devices of glass substrate G2 after the transport process only, and only is configured in the opposed position with the first load-transfer device front part 211a.Second load-transfer device 212 is driving roll-type load-transfer devices that glass substrate G2 is delivered to second lifting unit 282 of the 3rd elevator 280 after the processing that is used for second lifting unit 132 from second elevator 130 is transported.
In addition, the throughput direction of handling front glass substrate G1 be Fig. 6, Fig. 7 B1 and Fig. 7 B2 the paper left to, the throughput direction of handling back glass substrate G2 is the paper right of Fig. 6, Fig. 7 B1 and Fig. 7 B2.In the present embodiment, the throughput direction of processing front glass substrate G1 in the load-transfer device portion 210 and processing back glass substrate G2 is opposite direction.And though also not shown, first load-transfer device 211 and second load-transfer device 212 are fixed with predetermined method.
The 3rd elevator 280 forms and first elevator 120 and the same structure of second elevator 130, the 3rd elevator 280 has first lifting unit 281 and second lifting unit, 282, the first lifting units 281 and second lifting unit 282 and has rising function and decline function.First lifting unit 281 is upside lifting units that the mode with the top that is positioned at second lifting unit 282 is provided with.And second lifting unit 282 is downside lifting units that the mode with the below that is positioned at first lifting unit 281 is provided with.First lifting unit 281 in the 3rd elevator 280 and second lifting unit 282 constitute respectively and are driven independently.In the present embodiment, shown in Fig. 7 B1 and Fig. 7 B2, first elevator 281 of the 3rd elevator 280 and second elevator 282 are driven in the mode that rises under the state of keeping the relative position of each other relation and descend respectively.That is, remain certain distance between first lifting unit 281 and second lifting unit 282, the lifting action that first lifting unit 281 and second lifting unit 282 link.In addition, shown in present embodiment, under the situation of keeping the relative position relation between first lifting unit 281 and second lifting unit 282, first lifting unit 281 and second lifting unit 282 can constitute one.
In the 3rd elevator 280, first lifting unit 281 that is positioned at the upper strata is used for transport process front glass substrate G1.And then, receive the processing front glass substrate G1 that quadrate part 211b transports behind first load-transfer device of first load-transfer device 211 one by one, and should handle front glass substrate G1 and be delivered to the first load-transfer device front part 211a.
On the other hand, second lifting unit 282 that is positioned at the lower floor of first lifting unit 281 is used for glass substrate G2 after the transport process.And then, receiving glass substrate G2 after the processing that transports from second load-transfer device 212 one by one, mounting is handled back glass substrate G2 and is risen, and glass substrate G2 is accommodated in mounting one by one in second box 151 of second bench board 150 after will handling then.
In addition, in the present embodiment, first lifting unit 281 in the 3rd elevator 280 and second lifting unit 282 only constitute respectively transport process front glass substrate G1 and glass substrate G2 after the transport process only.
And the transfer of glass substrate G2 can drive the roll-type load-transfer device and waits and carry out by being provided with at first lifting unit 281 and second lifting unit 282 after the transfer of the processing front glass substrate G1 that is undertaken by first lifting unit 281 and the processing undertaken by second lifting unit 282.And, as shown in Figure 6, handle back glass substrate G2 moved into the 3rd elevator 280 from second load-transfer device 212 direction and handle back glass substrate G2 and taken out of from the 3rd elevator 280 to the direction of second bench board 150 and meet at right angles.That is, at least the second lifting unit 282 has the translation function of the throughput direction of conversion glass substrate in the 3rd elevator 280, thus, handles throughput direction conversion 90 degree of back glass substrate G2.On the other hand, do not utilize the throughput direction of first lifting unit, 281 conversion process front glass substrate G1.In addition, can use and first elevator 120 or the identical device of second elevator 130 as the 3rd elevator 280.
As shown in Figure 6, supplying with discharge end 260 is configured in and second elevator, 130 opposed positions.With the supply end 160 of first embodiment similarly, supplying with and discharging end 260 is the mounting tables that are used for receiving one by one the processing front glass substrate G1 that comes from first lifting unit, 131 transfers of second elevator 130.And then, also have the function that this processing front glass substrate G1 is supplied to glass substrate treating device EQ.Further, supply with to discharge the mounting table that end 260 still is used for receiving one by one glass substrate G2 after the processing of discharging from glass substrate treating device EQ, and have with this processings afterwards glass substrate G2 be delivered to the function of second elevator 130.That is, supply with to discharge end 260 and have the related supply end of first embodiment and 160 and discharge end 170 both sides' function concurrently.
In addition, handle front glass substrate G1 with respect to the supply of glass substrate treating device EQ or handle back glass substrate G2 and for example also can wait and carry out by driving the roll-type load-transfer device with respect to the supply of second elevator 130.And processing front glass substrate G1 does not carry out from the discharge of glass substrate treating device EQ simultaneously with respect to supply and the processing back glass substrate G2 of glass substrate treating device EQ.Only mounting has a certain side among the glass substrate G2 after processing front glass substrate G1 and the processing in supply discharge end 260.
In addition, shown in Fig. 7 B1, the first related elevator 120 of present embodiment forms the first elevator 120 identical structure related with first embodiment.But in the present embodiment, second lifting unit 122 of the downside of first elevator 120 is not carried glass substrate, therefore can not have second lifting unit 122 yet.
Height relationships to the position that each inscape disposed that constitutes in the above described manner describes.Shown in Fig. 7 A～Fig. 7 C, the height of establishing first bench board 140 and second bench board 150 is H2 S1, H2 S2, the height of establishing first load-transfer device 211 and second load-transfer device 212 is H2 VC1, H2 VC2And, highly be H2 when the maximum of establishing first lifting unit 121 in first elevator 120 rises when height and maximum decline L11max, H2 L11min, highly be H2 when the maximum of establishing second lifting unit 122 in first elevator 120 rises when height and maximum decline L12max, H2 L12minSimilarly, for the inscape separately of second elevator 130 and the 3rd elevator 280, establishing highly is H2 L21max, H2 L21min, H2 L22max, H2 L22min, H2 L31max, H2 L31min, H2 L32max, H2 L32minAnd establishing and supplying with the height of discharging end 260 is H2 P1
In this case, the height relationships that is positioned at the inscape of uppermost position in fig-ure is: H2 VC1=H2 L11max=H2 L21max=H2 L31max, the height relationships that is positioned at the inscape of the second place is: H2 S1=H2 S2=H2 P1=H2 L11min=H2 L21min=H2 L31min=H2 L12max=H2 L22max=H2 L32ma x, the height relationships that is positioned at the inscape of upper/lower positions is: H2 VC2=H2 L12min=H2 L22min=H2 L32minLike this, the related inscape of present embodiment is configured to 3 layers height and position.
Secondly, use Fig. 6, Fig. 8 A～Fig. 8 E and Fig. 9 A～Fig. 9 E that the action of the related article carrying apparatus 200 of second embodiment of the present invention that constitutes is in the above described manner described.Herein, blank arrow shown in Figure 6 represents to handle the loading transport path R21 that front glass substrate G1 is transferred, and black arrow represents to handle the unloading transport path R22 that back glass substrate G2 is transferred.Fig. 8 A～Fig. 8 E is the figure that the action of the related article carrying apparatus of second embodiment of the present invention among the loading transport path R21 shown in Figure 6 is shown.And Fig. 9 A～Fig. 9 E is the figure that the action of the related article carrying apparatus of second embodiment of the present invention among the unloading transport path R22 shown in Figure 6 is shown.
At first, the loading transport path R21 that handles front glass substrate G1 is described.In addition, in fact, processing back glass substrate G2 also is transferred simultaneously when processing front glass substrate G1 is transferred, and still, herein in order to make explanation simple, only the conveying to processing front glass substrate G1 describes.
At first, shown in Fig. 8 A, take in multi-disc and handle first box, 141 mountings of front glass substrate G1 in first bench board 140.Then, by the transfer function of first bench board 140, be positioned at undermost first and handle front glass substrate G1 is transferred load to first elevator 120 from first box 141 first lifting unit 121 (step S211).
Secondly, shown in Fig. 8 B, first elevator 120 rises, and thus, mounting has first lifting unit 121 of handling front glass substrate G1 to rise to the height (step S212) of first load-transfer device 211.At this moment, first box 141 is by the elevating function decline one-level of first bench board 140, and the conveying of the processing front glass substrate G1 that carries is subsequently prepared.
Secondly, shown in Fig. 8 C, handle quadrate part 211b behind front glass substrate G1 transferred load to first load-transfer device 211 by the transfer function of first elevator 120 first load-transfer device.And then, handle front glass substrate G1 is delivered to the 3rd elevator 280 by first load-transfer device 111 first lifting unit 281.Then, be transported to first lifting unit 131 (step S213) of second elevator 130 by the 3rd elevator 280.Thus, handle front glass substrate G1 mounting in first lifting unit 131 of second elevator 130.
Secondly, shown in Fig. 8 D, the 3rd elevator 130 descends, and thus, mounting has first lifting unit 131 of second elevator 130 of handling front glass substrate G1 to drop to the height (step S214) of supplying with discharge end 260.
Secondly, shown in Fig. 8 E, processing front glass substrate G1 is transferred load to supply discharge end 260 (step S215) by the transfer function of second elevator 130 from second elevator 130.Mounting is implemented predetermined processing by glass substrate treating device EQ subsequently in supplying with the processing front glass substrate G1 that discharges end 260.At this moment, second of following a slice processing front glass substrate G1 transferred load to first elevator 120 from first box 141.
In addition, after, returning the action of Fig. 8 A, the processing front glass substrate G1 in first box 141 carries out the later same action of Fig. 8 B till carrying and finishing repeatedly.
Secondly, with reference to Fig. 9 A～Fig. 9 E the unloading transport path R22 that handles back glass substrate G2 is described.In addition, as mentioned above, in fact, handle front glass substrate G1 when glass substrate G2 is transferred after processing and also be transferred simultaneously, still, in order to make explanation simple, only the conveying of handling back glass substrate G2 is described herein.
At first, shown in Fig. 9 A, be discharged to the processing of supply with discharging end 260 after glass substrate G2 discharged second lifting unit 132 (step S221) that end 260 is transferred load to second elevator 130 by supplying with the transfer function of discharging end 260 from supplying with.
Secondly, shown in Fig. 9 B, second elevator 130 descends, and thus, mounting has second lifting unit 132 of second elevator 130 of handling back glass substrate G2 to drop to the height (step S222) of second load-transfer device 212.
Secondly, shown in Fig. 9 C, glass substrate G2 is transferred load to after second load-transfer device 212 by the transfer function of second elevator 130 after processing, then utilizes second load-transfer device 212 will handle second lifting unit 282 (step S223) that back glass substrate G2 is delivered to the 3rd elevator 280.Thus, handle back glass substrate G2 mounting in second lifting unit 282 of the 3rd elevator 280.
Secondly, shown in Fig. 9 D, the 3rd elevator 280 rises, and thus, mounting has second lifting unit 282 of the 3rd elevator 280 of handling back glass substrate G2 to rise to the height (step S224) of second bench board 150.At this moment, in the present embodiment, following a slice is handled back glass substrate G2 and is discharged to supply discharge end 260.
Secondly, shown in Fig. 9 E, glass substrate G2 is transferred load to mounting by the transfer function of the 3rd elevator 280 in second box 151 of second bench board 150 (step S225) from the 3rd elevator 280 after handling.Then, take in second box, the 151 rising one-levels of handling back glass substrate G2, handle back glass substrate G2 to take in down a slice.At this moment, following a slice is handled second lifting unit 132 that back glass substrate G2 transfers load to second elevator 130.
In addition, after, return the action of Fig. 9 A, in second box 151, take in after the processing of pre-stator number and carry out the later same action of Fig. 9 B repeatedly till the glass substrate G2.
Secondly, with reference to Figure 10 A～Figure 10 I the action of while transport process front glass substrate in the related article carrying apparatus 200 of second embodiment of the present invention and processing back glass substrate is described.Figure 10 A～Figure 10 I is the figure that the action of the related article carrying apparatus 200 of second embodiment of the present invention is shown, and is the stereoscopic figure of the related article carrying apparatus 200 of schematically illustrated second embodiment of the present invention.In addition, in Figure 10 A～Figure 10 I, be conceived to handle front glass substrate G1 and handle the action of back glass substrate G2, structure is in addition simplified or omitted.And, in each figure, handle front glass substrate G1 and represent by space rectangles, handle back glass substrate G2 and represent by shaded rectangle.The action that first elevator 120, second elevator 130 or the 3rd elevator 280 rise or descend is represented in the motion that thin arrow among each figure is represented to handle front glass substrate G1 or handled back glass substrate G2, blank thick arrow.In addition, in first box 141 and the sheet number of the glass substrate in second box 151 be example.
At first, shown in Figure 10 A, will transfer load to first elevator 120 (step S2A) in first box 141 of first processing front glass substrate G1 from mounting in first bench board 140.
Secondly, shown in Figure 10 B, first elevator 120 is risen, make first to handle the height and position (step S2B) that front glass substrate G1 moves to first load-transfer device 211.At this moment, glass substrate G2 is discharged to supply with and discharges end 260 after first processing.
Secondly, shown in Figure 10 C, handle front glass substrate G1 with first and transfer load to quadrate part 211b behind first load-transfer device from first elevator 120, then, utilize quadrate part 211b behind first load-transfer device, the 3rd elevator 280 and the first load-transfer device front part 211a to handle front glass substrate G1 and be delivered to second elevator 130 first.And, at this moment, glass substrate G2 after first processing is transferred load to second elevator 130 (step S2C) from supplying with discharge end 260.
Secondly, shown in Figure 10 D, make mounting have first to handle after front glass substrate G1 and first processing second elevator 130 of glass substrate G2 descend (step S2D).
Secondly, shown in Figure 10 E, mounting is transferred load to supply in first processing front glass substrate G1 of second elevator 130 discharge end 260.And, glass substrate G2 after first processing is transferred load to second load-transfer device 212 from second elevator 130, then, utilize second load-transfer device 212 with first processing after glass substrate G2 be delivered to the 3rd elevator 280 (step S2E).At this moment, handle front glass substrate G1 with second and transfer load to first elevator 120 from first box 141.
Secondly, shown in Figure 10 F, make mounting have that the 3rd elevator 280 of glass substrate G2 rises after first processing.At this moment, make mounting that second also rising (step S2F) simultaneously of first elevator 120 of handling front glass substrate G1 be arranged.At this moment, glass substrate G2 is discharged to supply with and discharges end 260 after second processing.
Secondly, shown in Figure 10 G, glass substrate G2 after first processing is transferred load to second bench board 150 from the 3rd elevator 280, glass substrate G2 after first processing is accommodated in second box 151 that is positioned in second bench board 150 (step S2G).Simultaneously, with similarly above-mentioned, handle front glass substrate G1 with second and be delivered to second elevator 130 from first elevator 120.And at this moment, glass substrate G2 after supplying with second processing of discharging end 260 transfers load to second elevator 130 from supplying with discharge end 260 with mounting.
Secondly, shown in Figure 10 H, with Figure 10 D similarly, make mounting have second to handle after front glass substrate G1 and second processing second elevator 130 of glass substrate G2 descend (step S2H).
After, second is handled after front glass substrate G1 and second processing glass substrate G2 and processing front glass substrate G1 after this and handle back glass substrate G2 and carry out repeatedly and above-mentioned Figure 10 E～same action of Figure 10 H.Thus, final, shown in Figure 10 I, become empty in first box 141, take in glass substrate G2 after the processing of pre-stator number in second box 151.
In addition, filled second box 151 of handling back glass substrate G2 and put predetermined shelf in storage by stakcer crane STK subsequently to Automatic Warehouse.And, newly handle at needs under the situation of glass substrate, utilize stakcer crane STK will take in the next one first box 141 mountings of processing front glass substrate G1 in first bench board 140.
More than, same with the article carrying apparatus 100 that first embodiment of the present invention is related, the related article carrying apparatus 200 of second embodiment of the present invention also utilizes first load-transfer device 211 and second load-transfer device 212 while transport process front glass substrate G1 and processing back glass substrate G2 dividually respectively.And the related article carrying apparatus 200 of second embodiment of the present invention alternately loads the reception of glass substrate G2 after processing front glass substrate G1 in the conveying and the unloading processing in carrying and the action of supply by using first elevator 120, second elevator 130 and the 3rd elevator 280.Therefore, can and handle back glass substrate G2 with high productive temp transport process front glass substrate G1.Therefore, owing to can carry out continuously supplying with the supply operation of glass substrate and the discharge operation that glass substrate is discharged from glass substrate treating device EQ, therefore can improve cycle time significantly towards glass substrate treating device EQ.
(the 3rd embodiment)
Secondly, use Figure 11 and Figure 12 A～Figure 12 C that the related article carrying apparatus 300 of the 3rd embodiment of the present invention is described.Figure 11 is the birds-eye view of the related article carrying apparatus 300 of the 3rd embodiment of the present invention.Figure 12 A～Figure 12 C is the section-drawing of the article carrying apparatus 300 after cutting off along A-A ' line shown in Figure 11, B-B ' line, C-C ' line.In addition, in Figure 12 B1, Figure 12 B2 and Figure 12 C, in order to distinguish the height relationships of each inscape, the inscape that in section-drawing, does not occur shown in broken lines.
The related article carrying apparatus 100 of the basic structure of the article carrying apparatus 300 that the 3rd embodiment of the present invention is related and first embodiment of the present invention is identical.The difference of the article carrying apparatus 100 that article carrying apparatus 200 that the 3rd embodiment of the present invention is related and first embodiment of the present invention are related is following each point: the structure of load-transfer device portion, from the position that first bench board take out to be handled the height of front glass substrate G1 and will be handled the short transverse between the height of height that back glass substrate G2 is accommodated in second bench board and supply end and discharge end, the action of first elevator and second elevator, and have the 3rd bench board and the 3rd elevator.In addition, to the identical symbol of the structure mark identical and omit or simplified illustration with the related article carrying apparatus of the related article carrying apparatus 100 of first embodiment of the present invention and second embodiment of the present invention 200.
As shown in figure 11, in the related article carrying apparatus 300 of the 3rd embodiment of the present invention, 2 layers load-transfer device portion 310 is divided into 2 parts at the throughput direction of glass substrate, disposes the 3rd elevator 380 between the load-transfer device that this quilt separates.And the 3rd article transition platform (hereinafter referred to as " the 3rd bench board ") 350 that is used for mounting the 3rd box 351 is configured in and the 3rd elevator 380 opposed positions.In addition, as described later, the 3rd bench board 350 and the 3rd box 351 can be set also in the present embodiment.
Shown in Figure 11 and Figure 12 A, same with Fig. 1 and Fig. 2 A, dispose first bench board 140 that is used for mounting first box 141 and second bench board 150 that is used for mounting second box.The 3rd bench board 350 is configured between first bench board 140 and second bench board 150.
The 3rd bench board 350 has the function same with second bench board 150, is to be used for mounting to take in the mounting table that multi-disc is handled the 3rd box 351 of back glass substrate G2, has from the 3rd elevator 380 to receive these processing function of glass substrate G2 afterwards.The 3rd box 351 forms the shape same with second box 151, for example constitutes can be level and how layeredly to hold 50 sheet glass substrates.The 3rd bench board 350 also has elevating function, and 351 multistages of the 3rd box ground is risen.And the 3rd bench board 350 for example has by driving the transfer function that the roll-type load-transfer device constitutes.By the elevating function and the transfer function of the 3rd bench board 350, glass substrate G2 after the processing that comes from 380 transfers of the 3rd elevator can be contained in the 3rd box 351 one by one.
Mounting is standby of second box 151 of second bench board 150 in the 3rd box 351 of the 3rd bench board 350.Second box 151 filled handle the back glass substrate and can't further hold under the situation of handling the back glass substrate or when want to hold when handling the back glass substrate second box 151 not mounting under the situation of second bench board 150, glass substrate after can utilizing the 3rd box 351 to hold to handle.
Shown in Figure 12 B1 and Figure 12 B2, related first elevator 120 of first elevator 320 that present embodiment is related and the basic structure of second elevator 330 and first embodiment is identical with second elevator 130.That is, the first related elevator 320 of present embodiment has first lifting unit 321 and second lifting unit 322 that has rising function and decline function respectively.First lifting unit 321 is upside lifting units that the mode with the top that is positioned at second lifting unit 322 is provided with.And second lifting unit 322 is downside lifting units that the mode with the below that is positioned at first lifting unit 321 is provided with.
The difference of first elevator 120 that first elevator 320 that present embodiment is related and first embodiment are related is: in the first related elevator 120 of first embodiment, first lifting unit 121 and second lifting unit 122 move keeping under the state of relative position relation, relative therewith, in the first related elevator 320 of present embodiment, first lifting unit 321 and second lifting unit 322 do not move keeping under the state of relative position relation.In addition, first lifting unit 121 of first elevator 120 that first lifting unit 321 of first elevator 320 and the function separately of second lifting unit 322 and action and first embodiment are related is identical with second lifting unit 122, so omits its explanation.
For second elevator 330 too, the second related elevator 330 of present embodiment possesses first lifting unit 331 and second lifting unit 332 with rising function and decline function.First lifting unit 331 is upside lifting units that the mode with the top that is positioned at second lifting unit 332 is provided with.And second lifting unit 332 is downside lifting units that the mode with the below that is positioned at first lifting unit 331 is provided with.
The difference of second elevator 130 that second elevator 330 that present embodiment is related and first embodiment are related is: in the second related elevator 130 of first embodiment, first lifting unit 131 and second lifting unit 132 move in linkage, relative therewith, in the second related elevator 330 of present embodiment, first lifting unit 331 and second lifting unit 332 move independently.In addition, first lifting unit 131 of second elevator 130 that first lifting unit 331 of second elevator 330 and the function separately of second lifting unit 332 and action and first embodiment are related is identical with second lifting unit 132, so omits its explanation.
The 3rd elevator 380 has the second elevator 330 same structure related with present embodiment.The 3rd related elevator 380 of present embodiment possesses first lifting unit 381 and second lifting unit 382 with rising function and decline function.First lifting unit 381 is upside lifting units that the mode with the top that is positioned at second lifting unit 382 is provided with.And second lifting unit 382 is downside lifting units that the mode with the below that is positioned at first lifting unit is provided with.
Same with the second above-mentioned elevator 330, first lifting unit 381 and second lifting unit 382 of the 3rd elevator 380 that present embodiment is related move independently.In addition, first lifting unit 381 of the 3rd elevator 380 is identical with second lifting unit 332 with first lifting unit 331 of second elevator 330 with action with the function separately of second lifting unit 382, therefore omits its explanation.
The related load-transfer device portion 310 of present embodiment is load-transfer devices of 2 laminars that are made of first load-transfer device 311 and second load-transfer device 312.First load-transfer device 311 and second load-transfer device 312 are to be used for the load-transfer device of the one chip of automatic transport glass substrate one by one.First load-transfer device 311 is the upside load-transfer devices that are arranged at the top of second load-transfer device 312.And second load-transfer device 312 is downside load-transfer devices.
First load-transfer device 311 that is positioned at the upper strata is load-transfer devices of transport process front glass substrate G1 only, and after the fore-and-aft direction of the throughput direction of handling front glass substrate G1 further is divided into the first load-transfer device front part 311a and first load-transfer device quadrate part 311b.
Be positioned at respect to throughput direction that quadrate part 311b is the driving roll-type load-transfer device that is used for the processing front glass substrate G1 that first lifting unit 321 from first elevator 320 transports is delivered to first lifting unit 381 of the 3rd elevator 380 behind first load-transfer device at rear.The first load-transfer device front part 311a that is positioned at the place ahead with respect to throughput direction is the driving roll-type load-transfer device that is used for the processing front glass substrate G1 that first lifting unit 381 from the 3rd elevator 380 transports is delivered to first lifting unit 331 of second elevator 330.
Second load-transfer device 312 that is positioned at lower floor with respect to first load-transfer device 311 is load-transfer devices of glass substrate G2 after the transport process only.Same with first load-transfer device 311, second load-transfer device 312 is quadrate part 312b after the fore-and-aft direction of the throughput direction of glass substrate G2 after the processing further is divided into the second load-transfer device front part 312a and second load-transfer device.
Be positioned at respect to throughput direction that quadrate part 312b is the driving roll-type load-transfer device that glass substrate G2 is delivered to second lifting unit 382 of the 3rd elevator 380 after the processing that is used for second lifting unit 322 from first elevator 320 is transported behind second load-transfer device at rear.The second load-transfer device front part 312a that is positioned at the place ahead with respect to throughput direction is the driving roll-type load-transfer device that glass substrate G2 is delivered to second lifting unit 332 of second elevator 330 after the processing that is used for second lifting unit 382 from the 3rd elevator 380 is transported.
In addition, the throughput direction of handling the throughput direction of front glass substrate G1 and handling back glass substrate G2 all be Figure 11, Figure 12 B1 and Figure 12 B2 the paper left to.And though also not shown, first load-transfer device 311 and second load-transfer device 312 are fixed with predetermined method.
The structure and first embodiment of supply end 160 in the present embodiment and discharge end 170 are same, and still, the supply end 160 in the present embodiment is different with first embodiment with the allocation position of the short transverse of discharging end 170.That is, in the first embodiment, the height of supplying with end 160, discharge end 170, first bench board 140 and second bench board 150 is all identical.But, in the present embodiment, supply with end 160 and discharge end 170 and be configured in than first bench board 140 and the low position of second bench board 150.That is, the height of supplying with the position that end 160 disposed with take out the height of the position of handling front glass substrate G1 from first bench board (first box) or will handle back glass substrate G2 that to be accommodated in the height of position of second bench board (second box) different.And, the height of discharging the position that end 170 disposed also with take out the height of the position of handling front glass substrate G1 from first bench board (first box) or will handle back glass substrate G2 that to be accommodated in the height of position of second bench board (second box) different.In addition, supply with end 160 and discharge end 170 height each other, or first bench board 140 is identical respectively with second bench board 150 height each other.
Height relationships to the position that each inscape disposed that constitutes in the above described manner describes.Shown in Figure 12 A～Figure 12 C, the height of establishing first bench board 140, second bench board 150 and the 3rd bench board is H3 S1, H3 S2, H3 S3, the height of establishing first load-transfer device 311 and second load-transfer device 312 is H3 VC1, H3 VC2And, highly be H3 when the maximum of establishing first lifting unit 321 in first elevator 320 rises when height and maximum decline L11max, H3 L11min, highly be H3 when the maximum of establishing second lifting unit 322 in first elevator 320 rises when height and maximum decline L12max, H3 L12minSimilarly, for the inscape separately of second elevator 330 and the 3rd elevator 380, establishing highly is H3 L21max, H3 L21min, H3 L22max, H3 L22min, H3 L31max, H3 L31min, H3 L32max, H3 L32minAnd establishing the height of supplying with end 160 and discharging end 170 is H3 P1And H3 P2
In this case, the height relationships that is positioned at the inscape of uppermost position in fig-ure is: H3 VC1=H3 L11max=H3 L21max=H3 L31max, the height relationships that is positioned at the inscape of the second place is: H3 S1=H3 S2=H3 S3=H3 L11min=H3 L22max=H3 L32max, the height relationships that is positioned at the inscape of the 3rd position is: H3 L21min=H3 L31min=H3 L12max=H3 P1=H3 P2, the height relationships that is positioned at the inscape of upper/lower positions is: H3 VC2=H3 L22min=H3 L32minLike this, different with first embodiment and second embodiment 3 layers, the related inscape of present embodiment is configured to 4 layers height and position.
Secondly, use Figure 11, Figure 13 A～Figure 13 F and Figure 14 A～Figure 14 F that the action of the related article carrying apparatus 300 of the 3rd embodiment of the present invention that constitutes is in the above described manner described.Herein, blank arrow shown in Figure 11 represents to handle the loading transport path R31 that front glass substrate G1 is transferred, and black arrow represents to handle the unloading transport path R32 that back glass substrate G2 is transferred.Figure 13 A～Figure 13 F is the figure that the action of the related article carrying apparatus of the 3rd embodiment of the present invention among the loading transport path R31 shown in Figure 11 is shown.And Figure 14 A～Figure 14 F is the figure that the action of the related article carrying apparatus of the 3rd embodiment of the present invention among the unloading transport path R32 shown in Figure 11 is shown.
At first, the loading transport path R31 that handles front glass substrate G1 is described.In addition, in fact, processing back glass substrate G2 also is transferred simultaneously when processing front glass substrate G1 is transferred, and still, herein in order to make explanation simple, only the conveying to processing front glass substrate G1 describes.
At first, as shown in FIG. 13A, take in multi-disc and handle first box, 141 mountings of front glass substrate G1 in first bench board 140.Then, by the transfer function of first bench board 140, be positioned at undermost first and handle front glass substrate G1 is transferred load to first elevator 320 from first box 141 first lifting unit 321 (step S311).
Secondly, shown in Figure 13 B, first lifting unit 321 of first elevator 320 rises, and thus, mounting has first lifting unit 321 of handling front glass substrate G1 to rise to the height (step S312) of first load-transfer device 311.At this moment, first box 141 is followed second conveying of handling front glass substrate G1 of carrying and is prepared by the elevating function decline one-level of first bench board 140.In addition, second lifting unit 322 of first elevator 320 not with the rising of first lifting unit 321 interlock.
Secondly, shown in Figure 13 C, handle quadrate part 311b behind front glass substrate G1 transferred load to first load-transfer device 311 by the transfer function of first lifting unit 321 of first elevator 130 first load-transfer device, then, handle front glass substrate G1 by first load-transfer device after quadrate part 311b be delivered to first lifting unit 381 (step S313) of the 3rd elevator 380.Thus, handle front glass substrate G1 mounting in first lifting unit 381 of the 3rd elevator 380.At this moment, first lifting unit 331 of second elevator 330 moves to the height of first load-transfer device 311.
Secondly, shown in Figure 13 D, handle front glass substrate G1 is transferred load to first load-transfer device 311 by the transfer function of the 3rd elevator 380 the first load-transfer device front part 311a.Then, handle front glass substrate G1 is delivered to second elevator 330 by the first load-transfer device front part 311a first lifting unit 331 (step S314).
Secondly, shown in Figure 13 E, first lifting unit 331 of second elevator 330 descends, and thus, mounting has first lifting unit 331 of second elevator 330 of handling front glass substrate G1 to drop to the height (step S315) of supplying with end 160.At this moment, following a slice is handled first lifting unit 321 that front glass substrate G1 is transferred load to first elevator 320.
Secondly, shown in Figure 13 F, processing front glass substrate G1 is transferred load to supply end 160 (step S316) by the transfer function of first lifting unit 331 of second elevator 330 by first lifting unit 331 from second elevator 330.Mounting is implemented predetermined processing by glass substrate treating device EQ subsequently in the processing front glass substrate G1 that supplies with end 160.
In addition, after, returning the action of Figure 13 A, the processing front glass substrate G1 in first box 141 carries out the later same action of Figure 13 B till carrying and finishing repeatedly.
Secondly, with reference to Figure 14 A～Figure 14 F the unloading transport path R32 that handles back glass substrate G2 is described.In addition, as mentioned above, in fact, handle front glass substrate G1 when glass substrate G2 is transferred after processing and also be transferred simultaneously, still, in order to make explanation simple, only the conveying of handling back glass substrate G2 is described herein.
At first, shown in Figure 14 A, be discharged to glass substrate G2 after the processing of discharging end 170 and transferred load to second lifting unit 322 (step S321) of first elevator 320 from discharging end 170 by the conveying function of discharging end 170.
Secondly, as shown in Figure 14B, second lifting unit 322 of first elevator 320 descends, and thus, mounting has second lifting unit 322 of first elevator 320 of handling back glass substrate G2 to drop to the height (step S322) of second load-transfer device 312.In addition, first lifting unit 321 can be not and the action interlock of second lifting unit 322 yet.In the present embodiment shown in Figure 14 B, the down maneuver of first lifting unit 321 and second lifting unit rises accordingly.
Secondly, shown in Figure 14 C, handle quadrate part 312b behind back glass substrate G2 transferred load to second load-transfer device 312 by the transfer function of second lifting unit 322 of first elevator 320 second load-transfer device.Then, handle back glass substrate G2 by second load-transfer device after quadrate part 312b be delivered to second lifting unit 382 (step S323) of the 3rd elevator 380.Thus, handle back glass substrate G2 mounting in second lifting unit 382 of the 3rd elevator 380.And at this moment, second lifting unit 332 of second elevator 330 moves to the height of second load-transfer device 312.
Secondly, shown in Figure 14 D, handle back glass substrate G2 is transferred load to second load-transfer device 312 by the transfer function of second lifting unit 382 of the 3rd elevator 380 the second load-transfer device front part 312a.Then, handle back glass substrate G2 is delivered to second elevator 330 by the second load-transfer device front part 312a second lifting unit 332 (step S324).Thus, handle back glass substrate G2 by second lifting unit 332 of mounting in second elevator 330.
Secondly, shown in Figure 14 E, second lifting unit 332 of second elevator 330 rises, and thus, mounting has second lifting unit 332 of second elevator 330 of handling back glass substrate G2 to rise to the height (step S325) of second bench board 150.At this moment, in the present embodiment, following a slice is handled back glass substrate G2 and is discharged to discharge end 170.
Secondly, shown in Figure 14 F, glass substrate G2 is transferred load to mounting by the transfer function of second lifting unit 332 of second elevator 330 in second box 151 of second bench board 150 (step S326) by second lifting unit 332 from second elevator 330 after handling.At this moment, following a slice is handled second lifting unit 322 that back glass substrate G2 is transferred load to first elevator 320.Subsequently, take in second box, the 151 rising one-levels of handling back glass substrate G2, handle back glass substrate G2 to take in down a slice.
In addition, after, return the action of Figure 14 A, in second box 151, take in after the processing of pre-stator number and carry out the later same action of Figure 14 B repeatedly till the glass substrate G2.
Secondly, with reference to Figure 15 A～Figure 15 W the action of while transport process front glass substrate in the related article carrying apparatus 300 of the 3rd embodiment of the present invention and processing back glass substrate is described.Figure 15 A～Figure 15 W is the figure that the action of the related article carrying apparatus 300 of the 3rd embodiment of the present invention is shown, and is the stereoscopic figure of the related article carrying apparatus 300 of schematically illustrated the 3rd embodiment of the present invention.In addition, in Figure 15 A～Figure 15 W, be conceived to handle front glass substrate G1 and handle the action of back glass substrate G2, structure is in addition simplified or omitted.And, in each figure, handle front glass substrate G1 and represent by space rectangles, handle back glass substrate G2 and represent by shaded rectangle.The motion that thin arrow among each figure is represented to handle front glass substrate G1 or handled back glass substrate G2, blank thick arrow is represented first lifting unit 321 or first lifting unit, 331 risings of second elevator 330 or the action that descends of first elevator 320, and the thick arrow of shade is represented second lifting unit 322 or second lifting unit, 332 risings of second elevator 330 or the action that descends of first elevator 320.In addition, in first box 141 and the sheet number of the glass substrate in second box 151 be example.
At first, shown in Figure 15 A, glass substrate G2 is expelled to from glass substrate treating device EQ and is discharged end 170 (step S3A) after first processing.
Secondly, shown in Figure 15 B, glass substrate G2 after first processing is transferred load to second lifting unit 322 of first elevator 320.Meanwhile, handle first lifting unit 321 (step S3B) that transfers load to first elevator 320 in first box 141 of front glass substrate G1 from mounting in first bench board 140 with first.
Secondly, shown in Figure 15 C, first lifting unit 321 of first elevator 320 is risen, make first to handle the height and position that front glass substrate G1 moves to first load-transfer device 311.Meanwhile, second lifting unit 322 of first elevator 320 is descended, make glass substrate G2 after first processing move to the height and position of second load-transfer device 312.
Secondly, shown in Figure 15 D, handle quadrate part 311b behind front glass substrate G1 transfers load to first load-transfer device 311 from first lifting unit 321 of first elevator 320 first load-transfer device with first, then, utilize that quadrate part 311b handles first lifting unit 381 that front glass substrate G1 is delivered to the 3rd elevator 380 with first behind first load-transfer device.Meanwhile, glass substrate G2 after first processing is transferred load to quadrate part 312b behind second load-transfer device of second load-transfer device 312 from second lifting unit 322 of first elevator 320, then, utilize quadrate part 312b behind second load-transfer device with first processing after glass substrate G2 be delivered to second lifting unit 382 (step S3D) of the 3rd elevator 380.
Secondly, shown in Figure 15 E, make first lifting unit 321 of first elevator 320 move to the position of first bench board 140, simultaneously, make second lifting unit 322 move to the position (step S3E) of discharging end 170.At this moment, glass substrate G2 is discharged to and discharges end 170 after second processing.In addition, first handle front glass substrate G1 and first processing after glass substrate G2 in 380 standbies of the 3rd elevator.
Secondly, shown in Figure 15 F, glass substrate G2 after second processing is transferred load to second lifting unit 322 of first elevator 320, simultaneously, handle first lifting unit 321 (step S3F) that front glass substrate G1 transfers load to first elevator 320 in first box 141 second.At this moment, first handle front glass substrate G1 and first processing after glass substrate G2 in 380 standbies of the 3rd elevator.
Secondly, shown in Figure 15 G, first lifting unit 321 of first elevator 320 is risen, make second to handle the height and position that front glass substrate G1 moves to first load-transfer device 311, simultaneously, second lifting unit 322 of first elevator 320 is descended, make glass substrate G2 after second processing move to the height and position (step S3G) of second load-transfer device 312.At this moment, first handle front glass substrate G1 and first processing after glass substrate G2 in 380 standbies of the 3rd elevator.
Secondly, shown in Figure 15 H, handle front glass substrate G1 transfers load to first load-transfer device 311 from first lifting unit 381 of the 3rd elevator 380 the first load-transfer device front part 311a with first, then, utilize the first load-transfer device front part 311a to handle first lifting unit 331 that front glass substrate G1 is delivered to second elevator 330 with first.Meanwhile, glass substrate G2 after first processing is transferred load to the second load-transfer device front part 312a of second load-transfer device 312 from second lifting unit 382 of the 3rd elevator 380, then, utilize the second load-transfer device front part 312a with first processing after glass substrate G2 be delivered to second lifting unit 332 of second elevator 330.Further, meanwhile, handle front glass substrate G1 is delivered to the 3rd elevator 380 from first lifting unit 321 of first elevator 320 first lifting unit 381 via quadrate part 311b behind first load-transfer device of first load-transfer device 311 with second, simultaneously, via quadrate part 312b behind second load-transfer device of second load-transfer device 312 with second processing after glass substrate G2 be delivered to second lifting unit 382 (step S3H) of the 3rd elevator 380 from second lifting unit 322 of first elevator 320.
Secondly, shown in Figure 15 I, make first lifting unit 321 of first elevator 320 move to the position of first bench board 140, simultaneously, make second lifting unit 322 move to the position (step S3I) of discharging end 170.At this moment, glass substrate G2 is discharged to and discharges end 170 after the 3rd processing.In addition, first handle front glass substrate G1 and first processing after glass substrate G2 in 330 standbies of second elevator, second handle front glass substrate G1 and second processing after glass substrate G2 in 380 standbies of the 3rd elevator.
Secondly, shown in Figure 15 J, make mounting have second lifting unit 332 of second elevator 330 of glass substrate G2 after first processing to rise to the position (step S3J) of second bench board 150.At this moment, glass substrate G2 after the 3rd processing is transferred load to second lifting unit 322 of first elevator 320, simultaneously, handle first lifting unit 321 that front glass substrate G1 transfers load to first elevator 320 in first box 141 the 3rd.In addition, first handle front glass substrate G1, second and handle front glass substrate G1 and second processing after glass substrate G2 with original state standby.
Secondly, shown in Figure 15 K, glass substrate G2 after first processing is accommodated in second box 151 (step S3K) that is positioned in second bench board 150.At this moment, first lifting unit 321 of first elevator 320 is risen, make the 3rd to handle the height and position that front glass substrate G1 moves to first load-transfer device 311.Meanwhile, second lifting unit 322 of first elevator 320 is descended, make glass substrate G2 after the 3rd processing move to the height and position of second load-transfer device 312.In addition, first handle front glass substrate G1, second and handle front glass substrate G1 and second processing after glass substrate G2 with original state standby.
Secondly, shown in Figure 15 L, make mounting have first first lifting unit 331 of handling second elevator 330 of front glass substrate G1 to drop to the position (step S3L) of supplying with end 160.At this moment, make second lifting unit 332 of second elevator 330 that becomes empty drop to the position of second load-transfer device 312.In addition, glass substrate G2 was with original state standby after second and the 3rd handled front glass substrate G1 and second and the 3rd processing.
Secondly, shown in Figure 15 M, handle front glass substrate G1 with first and transfer load to supply end 160 (step S3M).At this moment, utilize with the same method of above-mentioned method glass substrate G2 after second and the 3rd processing is delivered to second elevator 330 and the 3rd elevator 380 respectively.
Secondly, shown in Figure 15 N, make second lifting unit 322 of first elevator 320 that becomes empty rise to the position (step S3N) of discharging end 170.At this moment, glass substrate G2 is discharged to and discharges end 170 after the 4th processing.In addition, glass substrate G2 was with original state standby after second and the 3rd handled front glass substrate G1 and second and the 3rd processing.
Secondly, shown in Figure 15 O, make mounting have second lifting unit 332 of second elevator 330 of glass substrate G2 after second processing to rise to the position (step S3O) of second bench board 150.At this moment, make first lifting unit 331 of second elevator 330 that becomes empty move to the position of first load-transfer device 311.In addition, glass substrate G2 was with original state standby after second and the 3rd handled front glass substrate G1 and second and the 3rd processing.
Secondly, shown in Figure 15 P, glass substrate G2 after second processing is transferred load to second box 151 from second lifting unit 332 of second elevator 330, simultaneously, glass substrate G2 after the 4th processing is transferred load to second lifting unit 322 (step S3P) of first elevator 320 from discharging end 170.At this moment, utilize method same as the above-mentioned method to handle front glass substrate G1 and be delivered to second elevator 330 and the 3rd elevator 380 respectively second and the 3rd.In addition, after the 3rd processing glass substrate G2 with original state standby.
Secondly, shown in Figure 15 Q, make mounting have second first lifting unit 331 of handling second elevator 330 of front glass substrate G1 to drop to the position (step S3Q) of supplying with end 160.At this moment, make second lifting unit 332 of second elevator 330 that becomes empty drop to the position of second load-transfer device 312.And, make mounting have second lifting unit 322 of first elevator 320 of glass substrate G2 after the 4th processing to drop to the position of second load-transfer device 312.And, handle front glass substrate G1 transfers load to first elevator 320 from first box 141 first lifting unit 321 with the 4th.In addition, after the 3rd processing glass substrate G2 with original state standby.
After, shown in step S3R～step S3V of Figure 15 R～Figure 15 V, can when handling front glass substrate G1 with second to be delivered to supply end 160 (Figure 15 R, step S3R), handle front glass substrate G1 and be delivered to supply end 160 successively the 3rd and the 4th.And, glass substrate G2 after the 3rd and the 4th processing can be accommodated in second box 151 successively.Finally, shown in Figure 15 W, become empty in first box 141, filled glass substrate G2 after the processing of pre-stator number in second box 151.
In addition, second box 151 that utilizes stakcer crane STK will fill processing back glass substrate G2 is then put the predetermined shelf to Automatic Warehouse in storage.And, newly handle at needs under the situation of glass substrate, utilize stakcer crane STK will take in the next one first box 141 mountings of processing front glass substrate G1 in first bench board 140.
More than, the related article carrying apparatus 300 of the 3rd embodiment of the present invention utilizes first load-transfer device 311 and second load-transfer device 312 while transport process front glass substrate G1 and processing back glass substrate G2 dividually respectively.And, the related article carrying apparatus 300 of the 3rd embodiment of the present invention constitutes: the position that makes first bench board (first box) and second bench board (second box) with supply with the end and discharge the height and position of end different, thereby the height that takes out the position of handling front glass substrate G1 from first bench board (first box) with will handle back glass substrate G2 and be accommodated in the height of position of second bench board (second box) with to supply with the end different with the height of discharge end.But,, can alternately load the reception of glass substrate G2 after processing front glass substrate G1 in the conveying and the unloading processing in carrying and the action of supply by using first elevator 320 and second elevator 330.Therefore, can and handle back glass substrate G2 with high productive temp transport process front glass substrate G1.Therefore, owing to can carry out continuously supplying with the supply operation of glass substrate and the discharge operation that glass substrate is discharged from glass substrate treating device EQ, therefore can improve cycle time significantly towards glass substrate treating device EQ.
In addition, do not use the 3rd box 351 in Figure 15 A～Figure 15 W, still, as mentioned above, the 3rd box 351 can suitably use as required.The 3rd box 351 is standby of second box 151 of second bench board 150.Second box 151 filled handle the back glass substrate and can't further hold under the situation of handling the back glass substrate or when want to hold when handling the back glass substrate second box 151 not mounting under the situation of second bench board 150, glass substrate after can utilizing the 3rd box 351 to hold to handle.Under the situation of using the 3rd box 351, can utilize the 3rd elevator 380 will handle back glass substrate G2 and be accommodated in the 3rd box.Like this,, when ConvertBox, also can handle the discharge of back glass substrate G2, therefore when ConvertBox, also can carry out the discharge of glass substrate continuously by using the 3rd box 351.
Further, in the related article carrying apparatus of the 3rd embodiment of the present invention, the situation that glass substrate G2 after will handling is accommodated in the 3rd box 351 is illustrated, and still, also can use the 3rd box 351 as taking in the box of handling front glass substrate G1.That is, when switching first box 141, the 3rd box 351 can be used as supplying with the box of handling front glass substrate G1.Thus, when ConvertBox, also can handle the supply of front glass substrate G1, therefore when ConvertBox, also can carry out the supply of glass substrate continuously.
Further, also can constitute with take in the box of handling front glass substrate G1 and take in handle back glass substrate G2 box alternately mounting in the 3rd bench board 350.Thus, when the box of first box 141 and second box 151 switches, also can handle the supply of front glass substrate G1 or the discharge of processing back glass substrate G2 continuously, therefore can further improve cycle time.
In addition, in the related article carrying apparatus of the 3rd embodiment of the present invention, do not using fully under the situation of the 3rd box 351, can form the structure of omitting the 3rd elevator 380 yet.
More than, according to first～the 3rd embodiment article carrying apparatus involved in the present invention is illustrated, still, article carrying apparatus involved in the present invention is not limited to these embodiments.
For example, in the first and the 3rd embodiment, supply with the end and be configured in identical height, still, also can dispose at various height with the discharge end.In this case, can constitute at first load-transfer device and/or second load-transfer device and be provided with the slope.And, also can be according to height setting first elevator and the upside lifting unit in second elevator and the height of downside lifting unit of supplying with end and discharge end.
And, in first～the 3rd embodiment, be provided with and supply with the end and discharge the end, still, also can not be provided with and supply with the end and discharge the end.And, be respectively that the situation that is used for the driving roll-type load-transfer device of mounting and transport process front glass substrate G1 and processing back glass substrate G2 is illustrated to supplying with end and discharge end portion, but be not limited thereto.For example, also can constitute supply port and discharge orifice with supplying with the end and discharging the end.In this case, supply port is the warehouse-in mouth that links to each other with the warehouse-in load-transfer device of article handling device, and discharge orifice is the outbound mouth that links to each other with the outbound load-transfer device of article handling device.That is, also can constitute directly to article handling device supply processing front glass substrate or directly from article handling device reception processing back glass substrate.
In addition, each embodiment is implemented various distortion that those skilled in the art expected and the embodiment that obtains or in the scope that does not break away from purport of the present invention, the inscape in each embodiment and function carried out combination in any and the embodiment that obtains also is contained in the present invention.
Article carrying apparatus involved in the present invention is useful for carry the article such as glass substrate that use in FPD panels such as LCD.

Claims (9)

1. article carrying apparatus, its be used to carry the article before handling by article handling device that is handle before article and handle by described article handling device after article that is handle the back article, it is characterized in that possessing:
First load-transfer device, this first used for conveyer belt is article before carrying described processing;
First elevator, this first elevator has rising function and decline function, makes preceding article rising of described processing or decline and transfers load to described first load-transfer device; And
Second load-transfer device, this second load-transfer device is configured in the top or the below of described first load-transfer device, is used to carry described processing back article.
2. article carrying apparatus according to claim 1 is characterized in that,
Described article carrying apparatus also possesses:
Supply with the end, this supply end is used for goods supply before the described processing to described article handling device;
Discharge the end, this discharge end is used for the described processing back article of mounting from described article handling device discharge; And
Second elevator, this second elevator has rising function and decline function,
Described first elevator will transfer load to described first load-transfer device by article before take in the described processing that first box of article transports out before the described processing, and the described processing back article that will transport from described discharge end transfer load to second load-transfer device,
Article transfer load to described supply end before the described processing that described second elevator will transport from described first load-transfer device, and will transfer load to second box from the described processing back article that described second load-transfer device transports.
3. article carrying apparatus according to claim 2 is characterized in that,
The height of the position that described supply end is disposed with take out described processing from described first box before the height of article or described processing back article storing is different in the height of described second box, perhaps, the height of the position that disposed, described discharge end with take out described processing from described first box before the height of article or described processing back article storing is different in the height of described second box.
4. article carrying apparatus according to claim 2 is characterized in that,
Described article carrying apparatus also possesses:
The first article transition platform that is used for described first box of mounting; And
The second article transition platform that is used for described second box of mounting.
5. article carrying apparatus according to claim 4 is characterized in that,
Described first article transition platform and described discharge end arranged opposite, and, described second article transition platform and described supply end arranged opposite.
6. article carrying apparatus according to claim 2 is characterized in that,
Described article carrying apparatus also possesses the 3rd elevator with rising function and decline function,
Described the 3rd elevator will transfer load to the 3rd box from the described processing back article that described second load-transfer device transports.
7. article carrying apparatus according to claim 2 is characterized in that,
Described article carrying apparatus also possesses the 3rd elevator with rising function and decline function,
Described the 3rd elevator with described processing before article the 3rd box of article transfers load to described first load-transfer device before the described processing from taking in.
8. article carrying apparatus according to claim 1 is characterized in that,
Described article carrying apparatus also possesses:
Supply with to discharge the end, this supply with discharge end with described processing before goods supply to described article handling device, and article after mounting described processings of discharging from described article handling device;
Second elevator, this second elevator has rising function and decline function; And
The 3rd elevator, the 3rd elevator have rising function and decline function,
Described first elevator will transfer load to described first load-transfer device by article before take in the described processing that first box of article transports out before the described processing,
Article transfer load to described supply and discharge the end before the described processing that described second elevator will transport from described first load-transfer device, and will from described supply discharge described processings that the end transfer comes afterwards article transfer load to described second load-transfer device,
Described the 3rd elevator will transfer load to second box from the described processing back article that described second load-transfer device transports.
9. article carrying apparatus according to claim 1 is characterized in that,
Described first load-transfer device is configured in the top of described second load-transfer device.
CN2010105418580A 2010-01-27 2010-11-10 Article conveying device Pending CN102134003A (en)

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JP2010016045A JP2011155156A (en) 2010-01-27 2010-01-27 Article transport device
JP2010-016045 2010-01-27

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CN102795494A (en) * 2012-08-03 2012-11-28 立晔科技股份有限公司 Chip feeding device
CN103010747A (en) * 2011-09-21 2013-04-03 瑞世达科技(厦门)有限公司 Transmission integration device and transmission method thereof
CN103223592A (en) * 2013-03-29 2013-07-31 无锡艾森保自动化装备有限公司 Island-type assembly line
CN105752687A (en) * 2016-04-26 2016-07-13 东旭（昆山）显示材料有限公司 Conveying device and processing system
WO2017161675A1 (en) * 2016-03-23 2017-09-28 深圳市华星光电技术有限公司 Diverting method, diverting device, and processing system for glass substrate
CN109941691A (en) * 2017-12-20 2019-06-28 广东溢达纺织有限公司 Material goes up and down transporting equipment
CN110052696A (en) * 2019-05-15 2019-07-26 天津航毅达科技有限公司 A kind of vehicle glass device for ultrasonic welding
CN112758387A (en) * 2020-12-28 2021-05-07 广东鑫光智能系统有限公司 Sorting device and method for glass warehouse-out
CN114341028A (en) * 2019-09-02 2022-04-12 自动存储科技股份有限公司 Method of providing operator access to target storage locations in an automated warehousing system and associated system

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CN103010747A (en) * 2011-09-21 2013-04-03 瑞世达科技(厦门)有限公司 Transmission integration device and transmission method thereof
CN103010747B (en) * 2011-09-21 2016-04-20 瑞世达科技(厦门)有限公司 Transmit integrating apparatus and transfer approach thereof
CN102795494A (en) * 2012-08-03 2012-11-28 立晔科技股份有限公司 Chip feeding device
CN103223592A (en) * 2013-03-29 2013-07-31 无锡艾森保自动化装备有限公司 Island-type assembly line
US10287106B2 (en) 2016-03-23 2019-05-14 Shenzhen China Star Optoelectronics Technology Co., Ltd Distribution method and distribution apparatus for distributing glass substrates and related processing system
WO2017161675A1 (en) * 2016-03-23 2017-09-28 深圳市华星光电技术有限公司 Diverting method, diverting device, and processing system for glass substrate
CN105752687A (en) * 2016-04-26 2016-07-13 东旭（昆山）显示材料有限公司 Conveying device and processing system
CN109941691A (en) * 2017-12-20 2019-06-28 广东溢达纺织有限公司 Material goes up and down transporting equipment
CN109941691B (en) * 2017-12-20 2023-07-25 广东溢达纺织有限公司 Material lifting transportation equipment
CN110052696A (en) * 2019-05-15 2019-07-26 天津航毅达科技有限公司 A kind of vehicle glass device for ultrasonic welding
CN114341028A (en) * 2019-09-02 2022-04-12 自动存储科技股份有限公司 Method of providing operator access to target storage locations in an automated warehousing system and associated system
CN114341028B (en) * 2019-09-02 2023-06-30 自动存储科技股份有限公司 Method for providing operators with access to target storage locations in an automated warehousing system and associated system
CN112758387A (en) * 2020-12-28 2021-05-07 广东鑫光智能系统有限公司 Sorting device and method for glass warehouse-out
CN112758387B (en) * 2020-12-28 2021-10-29 广东鑫光智能系统有限公司 Sorting device and method for glass warehouse-out

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