CN102110627B - 用于垂直氧化炉管的三柱石英舟 - Google Patents
用于垂直氧化炉管的三柱石英舟 Download PDFInfo
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- CN102110627B CN102110627B CN2009102020259A CN200910202025A CN102110627B CN 102110627 B CN102110627 B CN 102110627B CN 2009102020259 A CN2009102020259 A CN 2009102020259A CN 200910202025 A CN200910202025 A CN 200910202025A CN 102110627 B CN102110627 B CN 102110627B
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CN2009102020259A CN102110627B (zh) | 2009-12-24 | 2009-12-24 | 用于垂直氧化炉管的三柱石英舟 |
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CN102110627A CN102110627A (zh) | 2011-06-29 |
CN102110627B true CN102110627B (zh) | 2012-11-07 |
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CN102709219B (zh) * | 2012-03-20 | 2015-05-06 | 湖州奥博石英科技有限公司 | 多功能石英舟 |
CN103928375A (zh) * | 2013-01-15 | 2014-07-16 | 上海华虹宏力半导体制造有限公司 | 一种适用于大气压炉的新型石英舟 |
CN117038537A (zh) * | 2022-11-16 | 2023-11-10 | 杭州盾源聚芯半导体科技有限公司 | 一种基于倾斜沟齿降低硅片损伤的硅舟 |
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Owner name: SHANGHAI HUAHONG GRACE SEMICONDUCTOR MANUFACTURING Free format text: FORMER OWNER: HUAHONG NEC ELECTRONICS CO LTD, SHANGHAI Effective date: 20140108 |
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Effective date of registration: 20140108 Address after: 201203 Shanghai city Zuchongzhi road Pudong New Area Zhangjiang hi tech Park No. 1399 Patentee after: Shanghai Huahong Grace Semiconductor Manufacturing Corporation Address before: 201206, Shanghai, Pudong New Area, Sichuan Road, No. 1188 Bridge Patentee before: Shanghai Huahong NEC Electronics Co., Ltd. |