CN102079448A - Inspection apparatus for appearance of workpiece and inspection method thereof - Google Patents
Inspection apparatus for appearance of workpiece and inspection method thereof Download PDFInfo
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- CN102079448A CN102079448A CN2010105617870A CN201010561787A CN102079448A CN 102079448 A CN102079448 A CN 102079448A CN 2010105617870 A CN2010105617870 A CN 2010105617870A CN 201010561787 A CN201010561787 A CN 201010561787A CN 102079448 A CN102079448 A CN 102079448A
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Abstract
The invention provides an inspection apparatus for the appearance of a workpiece and an inspection method thereof,wherein workpieces can be correctly positioned on a conveyance workbench and the electrostatic destruction or the characteristic deterioration of the workpieces are avoided.The inspection apparatus (30) for the appearance of workpieces comprises a linear feeder (1) for transferring hexahedron-shaped workpieces (W),a conveyance workbench (2), a transferring arrangement unit (21), an electrifying unit (6A) and an imaging unit(20).The conveyance workbench (2) transfers and transports the workpieces (W) obtained from the linear feeder (1).The workpieces (W) obtained from the linear feeder (1) are then transferred and arranged on the conveyance workbench (2) by the transferring arrangement unit (21).The lower surface of the conveyance workbench (2) is electrified and the workpieces are held by the electrifying unit (6A).The six surfaces of the workpieces (W) are recorded by the imaging unit (20).The transferring arrangement unit (21) comprises a vibration-free part (4) arranged between the linear feeder (1) and the conveyance workbench (2) and an arrangement guiding part (7).The workpieces are arranged in a W shape by the arrangement guiding part (7).When viewed from a plane, the arrangement guiding part (7) is equipped with a linear guiding face (7a).
Description
Technical field
The present invention relates to the appearance inspection device of the workpiece of being made a video recording in the hexahedral workpiece of a kind of limit conveyance limit by the hexahedron of this workpiece and the appearance inspection method of workpiece.
Background technology
All the time, appearance inspection device as the chip form electronic component (hereinafter referred to as " workpiece ") of the resistance of hexahedral shape or electric capacity etc., known just like lower device, promptly, workpiece is positioned on the conveyance bench board that the transparent body by glass etc. constitutes, the limit makes the conveyance bench board rotate the conveyance workpiece, is made a video recording to each face by the image unit of photographic camera etc. and carry out exterior check in the limit.
In this case, the work transporting bench board of appearance inspection device utilizes static to come the electrostatic adherence workpiece to carry out conveyance.
Promptly, at first, on the linear loader (Linear Feeder) of workpiece being arranged conveyance by vibration, make workpiece charged, this workpiece is positioned on the conveyance bench board, and conveyance simultaneously, makes the workpiece mounting surface of conveyance bench board and workpiece polarity charged on the contrary to the job position of regulation, thus, on the workpiece mounting surface with workpiece electrostatic adherence (with reference to patent documentation 1).
[patent documentation 1] TOHKEMY 2008-260594 communique.
But there are the following problems for the appearance inspection device of workpiece in the past.
First problem is that workpiece is being difficult to position during from linear loader transfer to the conveyance bench board.Workpiece on the conveyance bench board has six faces altogether,, has two faces on the conveyance direction that is, has two faces on above-below direction, has two faces about the conveyance direction.For these six faces are made a video recording, must use fixing image unit that these six faces are made a video recording accurately.But, with the workpiece transfer on the linear loader to the conveyance bench board the time, workpiece may not all be by transfer towards fixing direction, because the posture of workpiece is fixed because of electrostatic adherence after the transfer, so on the posture of each workpiece, produce delicate difference during shooting, might make the shooting precise decreasing.
In addition, make it charged on linear loader inner edge conveyance workpiece limit, thus in conveyance by the adsorption of static, workpiece is attracted on the linear loader, thereby might cause conveyance speed to descend, and causes workpiece to stop in the worst case.
Second problem is that the electrostatic adherence power after making the workpiece transfer descends.The workpiece mounting surface of conveyance bench board is opposite with the charged polarity of workpiece, so even guaranteed enough attractive forces before workpiece is about to transfer, when by the workpiece transfer workpiece mounting surface being contacted with workpiece, electric charge is offset at contact point, its total amount reduces.Therefore, the electrostatic adherence power that acts on the workpiece that is positioned on the conveyance bench board descends.
In addition, under the charged situation of the workpiece mounting surface that makes the conveyance bench board,, spray and the electric charge that makes the charged opposite charge polarity of workpiece to workpiece from the ion generator (ionizer) of the upper surface that is arranged on the conveyance bench board.Therefore, transfer soon is cancelled to the part of charge of conveyance bench board workpiece before, and in this case, the electrostatic adherence power that acts on the workpiece that is positioned on the conveyance bench board descends.
The 3rd problem is the influence of static to workpiece.By above-mentioned workpiece transfer, when the workpiece mounting surface is contacted with workpiece, owing to follow movement of electric charges to cause electric charge to be offset, thereby, there is the hidden danger of the electrostatic breakdown of workpiece or deterioration in characteristics etc.
Summary of the invention
The present invention considers the problems referred to above and proposes, its purpose is, providing a kind of can position workpiece when linear loader transfer is to the conveyance bench board accurately, and the electrostatic adherence power after the workpiece transfer is descended, and workpiece is not had the appearance inspection device of electrostatic influence and the appearance inspection method of workpiece.
The present invention is a kind of appearance inspection device of workpiece, it is characterized in that, has: linear loader, carry out conveyance to the workpiece of hexahedral shape; Circular conveyance bench board is constituted and is rotated freely by the transparent body, workpiece from linear loader transfer point by transfer and mounting under the state of this workpiece, on the work transporting circular arc, this workpiece is carried out conveyance; The transfer arrangement units is configured between linear loader and the conveyance bench board, will and be arranged on the conveyance bench board from the workpiece transfer of linear loader; Holding unit is configured in conveyance bench board below, and the workpiece of mounting in the conveyance bench board kept; And image unit, six faces of the workpiece on the conveyance bench board to be made a video recording, the transfer arrangement units has: friction portion is arranged between linear loader and the conveyance bench board; And arrangement guide portion, be arranged on the downstream of friction portion, observe guide surface from the plane of arranging workpiece with linearity, arrange the guide surface of guide portion, linear with respect to the S. A. that links transfer point and conveyance bench board acutangulates in the plane, and forms the tangent line of work transporting circular arc in the downstream of transfer point.
Appearance inspection device of the present invention is characterized in that, circular conveyance bench board is made of the vitreous glazing body.
Appearance inspection device of the present invention is characterized in that, holding unit is sprayed charged ion and the charged charged elements of conveyance bench board lower surface is constituted by the lower surface towards the conveyance bench board.
Appearance inspection device of the present invention is characterized in that, holding unit is made of the conductor of the below that is configured in the conveyance bench board, and this conductor is applied vdc to produce electric field.
Appearance inspection device of the present invention is characterized in that, based on the work transporting speed of conveyance bench board greater than work transporting speed based on linear loader.
Appearance inspection device of the present invention is characterized in that, arranges the guide surface of guide portion, forms the acute angle of 75 degree～88 degree in the plane with respect to the straight line that links transfer point and conveyance bench board.
The present invention is a kind of appearance inspection method of workpiece, and the appearance inspection device that it uses workpiece is characterized in that, comprising: the operation of coming the workpiece of conveyance hexahedral shape by linear loader; Will be from the workpiece of linear loader via friction portion and arrange the transfer point of guide portion transfer to the circular conveyance bench board, and, the operation that workpiece is arranged by the guide surface of arranging guide portion; By holding unit to mounting under the state that the workpiece on the conveyance bench board keeps, workpiece is carried out conveyance on the work transporting circular arc of conveyance bench board operation; By six the operations that face make a video recording of image unit to the workpiece on the conveyance bench board.
According to the present invention, by being configured in the holding unit of conveyance bench board lower surface, the workpiece that is positioned in upper surface is kept, thus, with workpiece when linear loader transfer is to the conveyance bench board, utilize based on the maintenance of holding unit and arrange guide portion, make workpiece on the conveyance bench board, be spaced apart almost fixed, and the posture of relative conveyance direction is fixed, thereby can locate accurately workpiece.For this reason, the shooting precision of image unit improves, and can carry out high-precision exterior check.In addition, owing to can not make the workpiece mounting surface of workpiece or conveyance bench board charged, and workpiece is kept, so can electrostatic adherence power be descended in workpiece counteracting because of electric charge after the transfer of conveyance bench board by the holding unit that is configured in conveyance bench board lower surface.Therefore, the processing capacity of appearance inspection device improves, and then, owing to do not make workpiece charged, so there is not harmful effect to the electrostatic breakdown of workpiece or deterioration in characteristics etc.
Description of drawings
[Fig. 1] Fig. 1 is the planar view of appearance inspection device of the workpiece of first embodiment of the present invention.
[Fig. 2] Fig. 2 is the block diagram of expression workpiece.
[Fig. 3] Fig. 3 is the amplification view of the region S of presentation graphs 1.
[Fig. 4] Fig. 4 is the transparent view of seeing from the region S of direction observation Fig. 1 of arrow Y.
[Fig. 5] Fig. 5 is the scheme drawing of the workpiece of expression in first embodiment of the present invention towards the absorption of conveyance bench board.
[Fig. 6] Fig. 6 (a) and Fig. 6 (b) are the instruction diagrams of the principle of the electrostatic induction in expression first embodiment of the present invention.
[Fig. 7] Fig. 7 (a) and Fig. 7 (b) are the instruction diagrams of the principle of the dielectric polarization in expression first embodiment of the present invention.
[Fig. 8] Fig. 8 (a) and Fig. 8 (b) are the instruction diagrams of the electric wireline in first embodiment of the present invention.
[Fig. 9] Fig. 9 (a) and Fig. 9 (b) are the Action Specification figure of the arrangement guide portion in first embodiment of the present invention.
[Figure 10] Figure 10 is the transparent view of appearance inspection device of the workpiece of second embodiment of the present invention, is the figure corresponding to Fig. 4 in first embodiment.
[Figure 11] Figure 11 is the amplification view of appearance inspection device of the workpiece of second embodiment of the present invention.
[Figure 12] Figure 12 is the scheme drawing of the workpiece of expression in second embodiment of the present invention towards the absorption of conveyance bench board.
[Figure 13] Figure 13 is the instruction diagram of the electric wireline in second embodiment of the present invention.
[Figure 14] Figure 14 is the instruction diagram of the electric wireline in second embodiment of the present invention.
[Figure 15] Figure 15 is the instruction diagram of the electric wireline in second embodiment of the present invention.
Wherein, description of reference numerals is as follows:
1 linear loader
2 conveyance bench board
The center shaft of 3 conveyance bench board
4 friction portions
4x transfer point
5 work transporting circular arcs
6 ion generators
The 6A charged elements
7 arrange guide portion
The 7a guide surface
The 7x junction of two streams
8 side camera sections
9 inside face camera sections
10 upper surface camera sections
11 lower surface camera sections
12 front surface camera sections
13 rear surface camera sections
14 discharge portions
15 conductive plates
20 image units
21 transfer arrangement units
The appearance inspection device of 30 workpiece
The W workpiece
The electrode of Wa, Wb workpiece
The main body of Wd workpiece.
The specific embodiment
First embodiment
Below, with reference to accompanying drawing, embodiments of the present invention are described.Fig. 1 to Fig. 9 is the figure of first embodiment of the appearance inspection method of expression appearance inspection device of workpiece of the present invention and workpiece.
At first, utilize Fig. 2, the workpiece of being checked by the appearance inspection device of workpiece is described.
In Fig. 2, the workpiece W that is made of chip elements such as electric capacity or resistance is hexahedral shape, the electrode Wa, the Wb that have the main body Wd that is made of insulator, be made of the electric conductor at the both ends of the length direction that is formed on main body Wd.This workpiece W is being carried out under the situation of exterior check, workpiece W is being positioned on the conveyance bench board 2 described later, making the direction rotation of the arrow Z of conveyance bench board 2 in Fig. 2, coming conveyance workpiece W.Then, made a video recording in the side of paper opposition side from the direction of arrow A by image unit 20, from the direction of arrow B made a video recording in paper side at the moment, from the direction of arrow C upper surface is made a video recording, from the direction of arrow D lower surface is made a video recording, from the direction of arrow E front surface is made a video recording, made a video recording in the rear surface from the direction of arrow F.At this moment,, have in mounting under the state of workpiece W, can make a video recording whole six faces of above-mentioned workpiece W by using the transparent conveyance bench board 2 of glass.
Then, the appearance inspection device to workpiece describes.As Fig. 1 and shown in Figure 3, the appearance inspection device 30 of workpiece has: linear loader 1, its conveyance workpiece W; Circular conveyance bench board 2, it is made of the transparent body, and workpiece W puts 4x from linear loader 1 transfer to transfer, has in mounting under the state of this workpiece W, carries out conveyance on work transporting circular arc 5; Transfer arrangement units 21 makes from the workpiece W transfer of linear loader 1 and is arranged on the conveyance bench board 2; Charged elements 6A, as holding unit performance function, it is configured in the below of conveyance bench board 2, and makes conveyance bench board 2 lower surfaces charged, and the workpiece W that is positioned on the conveyance bench board 2 is kept; Image unit 20 is made a video recording to six faces of the workpiece W on the conveyance bench board 2.
Wherein, transfer arrangement units 21 has: be arranged on the friction portion 4 between linear loader 1 and the conveyance bench board 2; With the arrangement guide portion 7 that workpiece W is arranged in the downstream that is arranged on friction portion 4, arrange guide portion 7 and comprise and be used for guide surface 7a that workpiece W is arranged.7a is linearly for this guide surface from viewed in plan (observing from the top).
In addition, as hereinafter described, image unit 20 has side camera section 8, inside face camera section 9, upper surface camera section 10, lower surface camera section 11, front surface camera section 12, rear surface camera section 13.
Then, based on Fig. 1 to Fig. 4 each component part of the appearance inspection device 30 of workpiece is further described.
At this, Fig. 1 is that the workpiece W with the shape shown in Fig. 2 is the planar view of appearance inspection device of the workpiece of object, and Fig. 3 is the amplification view of the with dashed lines area surrounded S of Fig. 1, and Fig. 4 is the transparent view of being seen from the direction viewing area S of arrow Y among Fig. 1.
In Fig. 1, the linear loader 1 of linearity vibrates by not shown drive source, make the workpiece W of the not shown feed appliance (Parts Feeder) of putting into the upstream side that is arranged in linear loader 1 be arranged in row, and by the direction conveyance of vibration to arrow N.
The conveyance bench board 2 of below that is arranged on linear loader 1 is for to be made by vitreous glazing, and the on even keel setting, by not shown drive source, is middle mind-set clockwise direction (the arrow directions X of Fig. 1) rotation with S. A. 3.As shown in Figure 4, linear loader 1 has small inclination and descends towards conveyance bench board 2, and in its downstream end, friction portion 4 has minim gap ground with conveyance bench board 2 and is connected, and this friction portion 4 has the inclination identical with linear loader 1 and can not vibrate.Thus, workpiece W descends via friction portion 4 gradually from linear loader 1, and transfer is to conveyance bench board 2.
Near the outer edge of the upper surface of conveyance bench board 2, shown in the long and short dash line of Fig. 1, as being the circular arc at center with S. A. 3, be formed with work transporting circular arc 5, workpiece W from 4 transfers of friction portion to conveyance bench board 2 on after, by the effect of arrangement guide portion 7 described later, be arranged on the work transporting circular arc 5.At this, work transporting circular arc 5 is for making workpiece W arrange the target location of supposing, is not to put on any mark that can discern work transporting circular arc 5 by visual at the upper surface of conveyance bench board 2.
In addition, charged elements 6A is as the holding unit performance function that the workpiece W that is positioned on the conveyance bench board 2 is kept.This charged elements 6A is made of the ion generator 6 at the place, front a little of the position that is arranged on friction portion 4, this ion generator 6 be arranged on conveyance bench board 2 under, and towards the lower surface of conveyance bench board 2 ejection positive ion (hereinafter referred to as " electric charge "), so that the lower surface positively charged of conveyance bench board 2.
In addition, in above-mentioned each component part, constitute transfer arrangement units 21 with guide portion 7 with guide surface 7a by friction portion 4.
In addition, in Fig. 3, the arrangement guide portion 7 with guide surface 7a of linearity be arranged on conveyance bench board 2 outer edge portion side directly over, and have small gap with conveyance bench board 2.Among Fig. 3, the straight line that links the S. A. 3 of transfer point 4x and conveyance bench board 2 is expressed as dotted line K.
As shown in Figure 3, arranging guide portion 7 is provided with in the following manner, promptly, the angle [alpha] that guide surface 7a and dotted line K form is the acute angles of 75 degree～88 degree, and guide surface 7a becomes the tangent line of work transporting circular arc 5 comparing the junction of two streams 7x of work transporting circular arc 5 that transfer point 4x is positioned at the conveyance direction downstream of workpiece W.That is, when with dashed lines L represented to link the straight line of S. A. 3 of junction of two streams 7x and conveyance bench board 2, the angle beta that dotted line L and guide surface 7a form was 90 degree.
In addition, as shown in Figure 1, downstream in friction portion 4, along the hand of rotation of conveyance bench board 2, be provided with the side camera section 8, inside face camera section 9, upper surface camera section 10, lower surface camera section 11, front surface camera section 12, the rear surface camera section 13 that constitute image unit 20.By this image unit 20,, can carry out exterior check respectively to making a video recording with each face of the workpiece W shown in arrow A～F among Fig. 2 to the workpiece W on the work transporting circular arc 5.At this moment, the conveyance direction of the workpiece W that represents with arrow Z among Fig. 2 is consistent with the hand of rotation X of conveyance bench board 2 among Fig. 1.
Specifically, to workpiece W, the side A of 8 pairs of paper opposition sides of side camera section makes a video recording, 9 pairs of papers of inside face camera section side B at the moment makes a video recording, 10 couples of upper surface C of upper surface camera section make a video recording, 11 couples of lower surface D of lower surface camera section make a video recording, and 12 couples of front surface E of front surface camera section make a video recording, and camera section 13 couples of rear surface F in rear surface make a video recording.
And then as shown in Figure 1, the downstream from the hand of rotation of the conveyance bench board 2 of image unit 20 beginning is provided with the discharge portion 14 as deliverying unit.Be through with the workpiece W of exterior check corresponding to the result of exterior check, be discharged to the not shown containing box from the work transporting circular arc by discharge portion 14.
Then, describe the appearance inspection method of the workpiece of the appearance inspection device that has used the workpiece that constitutes by this structure in detail.
In Fig. 1, workpiece W is put to the not shown feed appliance of the upstream side that is arranged in linear loader 1, the workpiece W that puts in the feed appliance is arranged in row by the effect of the linear loader 1 that vibrates by not shown drive source, and along the direction of the arrow N of Fig. 1 by the conveyance of connecting.At this moment, workpiece W is arranged in the length direction mode consistent with the conveyance direction, and the arrow Z among Fig. 2 becomes the conveyance direction of workpiece W.That is, the direction of the arrow Z among Fig. 2 is consistent with the direction of arrow N among Fig. 1.
Then, utilize Fig. 4, describe the effect of linear loader 1 in detail.Fig. 4 is the figure of expression by the state of the workpiece W of linear loader 1 conveyance, is to observe the transparent view that with dashed lines area surrounded S is seen Fig. 1 from the direction of arrow Y.Fig. 4 is the transparent view that dots the position of arranging guide portion 7 for the state that is easy to observe the workpiece W on the conveyance bench board 2.In addition, for workpiece W, the workpiece on each component part is expressed as workpiece W
0～W
6, do not limit the general workpiece in place to be expressed as workpiece W.
As shown in Figure 4, linear loader 1 has small inclination towards the conveyance bench board 2 that on even keel is positioned at its below, and the workpiece W that the vibration by linear loader 1 is advanced by follow-up workpiece W pushing is as with W
0Shown on fore-and-aft direction, descend bit by bit towards conveyance bench board 2 continuously like that.Because linear loader 1 vibrates, so, with workpiece W when linear loader 1 transfer is to conveyance bench board 2, when make linear loader 1 be close to conveyance bench board 2 directly over during the position, butt might take place with conveyance bench board 2 in then linear loader 1.For this is prevented, between the downstream end and conveyance bench board 2 of linear loader 1, be provided with non-vibrating friction portion 4.
In addition, though considered deviation because of the vibration of linear loader 1, the situation of the conveyance velocity deviation of workpiece W can take place in linear loader 1,, by friction portion 4 is installed between linear loader 1 and the conveyance bench board 2, can make this conveyance speed homogenization.
And, the workpiece W of the downstream end of arrival friction portion 4
1Be positioned at the workpiece W that closelys follow later
0Pushing, and the transfer point 4x of transfer to the conveyance bench board 2, the rotation by conveyance bench board 2 afterwards is to the direction conveyance of the arrow X of Fig. 4.At this, when the length of friction portion 4 is too short, be difficult to make the homogenization of conveyance speed, on the contrary, when this length is long, might cause workpiece W to stop on the way.In embodiments of the present invention, because the length of friction portion 4 is 8 times of size of the length direction of workpiece, so under the situation that workpiece W is stopped, realizing the homogenization of the conveyance speed of workpiece W.
And then, as mentioned above, being provided with ion generator 6 at the downside of conveyance bench board 2, this ion generator 6 makes the lower surface positively charged of conveyance bench board 2 towards the lower surface ejection positive charge of conveyance bench board 2.In Fig. 4, schematically with+represent this positive charge.Like this, by making the lower surface positively charged of conveyance bench board 2, transfer is attracted to the upper surface of conveyance bench board 2 to the workpiece W of transfer point 4x.
Then, utilize Fig. 5 to Fig. 7 that the adsorption of the workpiece W on the conveyance bench board 2 is described.
Wherein, Fig. 6 (a) is the instruction diagram of the principle of expression electrostatic induction (b).Electrode Wa in an end of the length direction of workpiece W shown in Fig. 6 (a).Electrode Wa is made of electric conductor, and in the normal state shown in Fig. 6 (a), portion within it is present in the ccasual position with the positive charge of+expression with the negative charge of-expression.Positive charge is from the state of left near this electrode Wa shown in Fig. 6 (b).
At this, make positively charged charged body T approaching.At this moment, the negative charge in the electrode Wa is attracted by the positive charge in the charged body T, and negative charge focuses on the left side WaL side with the approaching electrode Wa of charged body T.In addition, the positive charge in the electrode Wa is repelled by the positive charge in the charged body T, focuses on the right side WaR side away from the electrode Wa of charged body T.At this moment, negative charge appears in the WaL side on the left side, and positive charge appears in the WaR side on the right side.In addition, because electrode Wa is made of electric conductor, so the in-to-in charge energy moves freely, therefore, in Fig. 6 (b), the part between the left side of electrode Wa WaL and right side WaR becomes and does not have electric charge.This phenomenon is called electrostatic induction.
In addition, because electrostatic induction between the negative charge and the positive charge in the charged body T of the left side WaL side that focuses on electrode Wa, is worked with the gravitation shown in the arrow G among Fig. 6 (b).Therefore, electrode Wa is attracted by charged body T.As charged body T during away from electrode Wa, the electric charge in the electrode Wa turns back to the state of Fig. 6 (a) once more.For electrode Wb too.
Fig. 7 (a) is the instruction diagram of the principle of expression dielectric polarization (b).Wherein, Fig. 7 (a) expression is positioned at the main body Wd of the length direction central portion of workpiece W.Main body Wd is an insulator, and in the normal state, shown in Fig. 7 (a), portion within it will be present in the ccasual position as one group molecule (ellipse of dotted line) with the positive charge of+expression with the negative charge of-expression.
The expression positive charge is from the state of left near this main body Wd in Fig. 7 (b).At this, make positively charged charged body T approaching.At this moment, the negative charge in the main body Wd is attracted by the positive charge in the charged body T, and the positive charge in the main body Wd is repelled by the positive charge in the charged body T.Therefore, the molecule in the main body Wd towards becoming negative charge with left side WdL side with the approaching main body Wd of charged body T, the mode that becomes positive charge away from the right side WdR side of the main body Wd of charged body T is arranged.
Shown in Fig. 7 (b), negative charge appears in the WdL side on the left side of main body Wd, and positive charge appears in the WdR side on the right side.In addition, because main body Wd is an insulator, so the in-to-in electric charge can't move freely, between left side WdL and right side WdR, molecules align is a fixed-direction.This phenomenon is called dielectric polarization.In addition, because dielectric polarization between negative charge and the positive charge in charged body T that the left side of main body Wd WaL side occurs, works with the gravitation shown in the arrow G in Fig. 7 (b).Therefore, main body Wd is attracted by charged body T.As charged body T during away from main body Wd, the molecule in the main body Wd turns back to the state of Fig. 7 (a) once more.
Then, express transfer is adsorbed to the upper surface of conveyance bench board 2 because of electrostatic induction and dielectric polarization to the workpiece W of transfer point 4x state by Fig. 5.In Fig. 5, the lower surface of conveyance bench board 2 is positively charged by the effect of ion generator 6.Because the material of conveyance bench board 2 is that glass is insulator, so the positive charge that exists on the lower surface by conveyance bench board 2 produces above-mentioned dielectric polarization, negative charge appears in lower face side in the inside of conveyance bench board 2, and positive charge appears in upper surface side.In addition, similarly, about the workpiece W of the transfer point 4x on from 4 transfers of friction portion to conveyance bench board 2
2, on electrode Wa and Wb by electrostatic induction, perhaps on main body Wd by dielectric polarization, negative charge appears in separately lower face side, positive charge appears in upper surface side.
In Fig. 5, at negative charge that the lower face side of electrode Wa, Wb and main body Wd occurs be present between the positive charge of lower surface of conveyance bench board 2, work with the electrostatic adherence power G shown in the arrow, thus, workpiece W
2Be attracted to the upper surface of conveyance bench board 2.At this moment, at workpiece W
2Lower surface and the upper surface of conveyance bench board 2, only electric charge occurs, thereby can not take place to move and cause charged by electric charge by electrostatic induction or dielectric polarization.Therefore, the counteracting of electric charge can not take place when absorption, adsorption affinity can not descend yet after absorption.Like this, workpiece W
2Under the state of the upper surface that is attracted to conveyance bench board 2, by the rotation of conveyance bench board 2, to the direction conveyance of arrow X.
Then, the workpiece W of the transfer point 4x on from 4 transfers of friction portion to conveyance bench board 2 is expressed as workpiece W
2, under the state that is adsorbed on the conveyance bench board 2, the rotation by conveyance bench board 2 is to the direction conveyance of arrow X.
In this case, make conveyance speed that the rotation by conveyance bench board 2 brings, and make between the workpiece on the conveyance bench board 2 (W for example greater than the conveyance speed of bringing by linear loader 1 and friction portion 4
2And W
3Between) have at interval.Like this, have between the workpiece on the conveyance bench board 2 at interval by making, front surface E at 12 couples of workpiece W shown in Figure 2 of front surface camera section of Fig. 1 makes a video recording, when perhaps the rear surface F of 13 couples of workpiece W shown in Figure 2 of the rear surface camera section of Fig. 1 makes a video recording, can make a video recording to whole faces reliably.
That is, when workpiece W from transfer point 4x transfer when conveyance bench board 2 comes conveyance, at the interval P of Fig. 3, workpiece W by the state of electrostatic adherence under, as W
2→ W
3→ W
4Like that, accelerated to the conveyance speed of conveyance bench board 2 apace, at interval Q, the interval of workpiece such as W
4And W
5Between enlarge like that.
At this moment, between friction portion 4 and conveyance bench board 2, have small gap, and the conveyance speed of being brought by the rotation of conveyance bench board 2 is greater than the conveyance speed of being brought by friction portion 4, thereby, at workpiece W
2Fully be adsorbed onto in the absence on the conveyance bench board 2 moment of the transfer point 4x on from 4 transfers of friction portion to conveyance bench board 2, workpiece W
2Delicate jump takes place.In this case, the jump that takes place on workpiece W has deviation by each workpiece W, thereby produces deviation on the interval of the workpiece W on the conveyance bench board 2 after the acceleration.With respect to this, according to the present invention, because workpiece W
2Fully be adsorbed onto on the conveyance bench board 2, thus the moment of the transfer point 4x on from 4 transfers of friction portion to conveyance bench board 2, workpiece W
2Can not take place to jump and be fixed on the conveyance bench board 2.Therefore, can make the interval of the workpiece W after the acceleration remain almost fixed.
Directly over the transfer point 4x of the outer edge of conveyance bench board 2, be provided with the arrangement guide portion 7 of the guide surface 7a with linearity, this arrangement guide portion 7 has small gap with conveyance bench board 2.As mentioned above, in Fig. 3, when the straight line that will link transfer point 4x and S. A. 3 is made as dotted line K, to arrange guide portion 7 is provided with in the following manner, promptly, the angle [alpha] that guide surface 7a and dotted line K form is an acute angle, and guide surface 7a becomes the tangent line of work transporting circular arc 5 at the junction of two streams 7x of the downstream direction that is positioned at transfer point 4x.That is to say that when representing to link the straight line of junction of two streams 7x and S. A. 3 with dotted line L, the angle beta that dotted line L and guide surface 7a form is 90 degree.For this reason, transfer point 4x is positioned at the outer edge portion side of conveyance bench board 2 with respect to work transporting circular arc 5.Therefore, transfer is the direction towards guide surface 7a to the conveyance direction (arrow X) of the workpiece W of transfer point 4x, can revise the workpiece W on the transfer point 4x posture delicate difference and become identical.
Then, utilize Fig. 9 (a) (b), the alignment of arranging guide portion 7 is described.
At this, the workpiece W of Fig. 9 (a) expression transfer to the transfer point 4x
2ElPosture with respect to correct direction situation slightly left.The position of transfer point 4x is in the outer edge portion side of conveyance bench board 2 with respect to work transporting circular arc 5, and in Fig. 9 (a), the hand of rotation of the conveyance bench board 2 shown in the arrow X and the track of work transporting circular arc 5 are same direction, workpiece W
2ElThe conveyance direction be direction towards guide surface 7a.For this reason, workpiece W
2ElAs workpiece W
2E2Be connected to like that after the guide surface 7a, just be pushed on the guide surface 7a.At this moment, workpiece W
2ElWith than act on and guide surface 7a between the stronger power of friction force be attracted on the glass table 2, therefore, even under the state that is pushed on the guide surface 7a, also can not slow down with along the mode of guide surface 7a by conveyance.
The workpiece W of Fig. 9 (b) expression transfer to the transfer point 4x
2E3Posture with respect to correct direction situation slightly to the right.In this case, workpiece W
2E3The conveyance direction also be direction towards guide surface 7a, workpiece W
2E3As workpiece W
2E4Be connected to like that after the guide surface 7a, just be pushed to guide surface 7a, as W
2Like that with along the mode of guide surface 7a by conveyance.So, based on by the absorption that electric charge produced of the lower surface that is present in conveyance bench board 2 and the effect of guide surface 7a, so that the interval almost fixed of workpiece W on conveyance bench board 2 and the mode also fixing with respect to the posture of conveyance direction can precision position well.
As mentioned above because the conveyance speed of being brought by the rotation of conveyance bench board 2 is greater than the conveyance speed of being brought by linear loader 1 and friction portion 4, so the workpiece W that is positioned in the interval P of Fig. 3 under by the state of electrostatic adherence, as W
2→ W
3→ W
4Be accelerated to like that the conveyance speed that the rotation by conveyance bench board 2 brings apace, the interval of workpiece such as W in interval Q
4And W
5Between enlarge like that.And, workpiece W
5Be urged at the same rand of interval P in guide surface 7a top by conveyance, move closer to work transporting circular arc 5 afterwards.And, the workpiece W of the junction of two streams 7x that arrival guide surface 7a contacts with work transporting circular arc 5
6Conveyance direction direction with work transporting circular arc 5 in interval R consistent, workpiece W
6Towards the direction of leaving guide surface 7a by conveyance.That is, since the positive charge of lower surface that is present in conveyance bench board 2 to the workpiece W on the conveyance bench board 2
6Effect has electrostatic adherence power, therefore, and workpiece W
6Be attracted to and keep intact constantly on the conveyance bench board 2,7a leaves from guide surface, is arranged in state on the work transporting circular arc 5 by conveyance with mounting afterwards.
Then, workpiece W arrives image unit 20, utilize side camera section 8, inside face camera section 9, upper surface camera section 10, lower surface camera section 11, front surface camera section 12, the rear surface camera section 13 of image unit 20, from Fig. 2, each face is made a video recording, carry out exterior check with the direction shown in arrow A～F.In this case, because by the absorption of the electric charge on the lower surface that is present in conveyance bench board 2 and the effect of guide surface 7, precision positions workpiece W well, so the shooting precision of image unit 20 improves.The workpiece W of exterior check of being through with arrives discharge portion 14, according to the result of exterior check, discharges to not shown containing box.
Discharge under the situation of workpiece W in discharge portion 14, for example the interior all sides from conveyance bench board 2 spray pressurized air to the side B at the moment of paper Fig. 2, make workpiece W fly to the outer circumferential side of conveyance bench board 2, are directed in the containing box.Though the workpiece W in the containing box has the state shown in Fig. 6 (b), Fig. 7 (b) because of the positive charge that is present in the lower surface on the conveyance bench board 2, by turn back to the state of Fig. 6 (a), Fig. 7 (a) away from positive charge.During this period, workpiece W from can not produce on one's body by static cause charged.
As mentioned above, in the present embodiment,, utilize Fig. 8 (a) (b) not illustrate and can situations such as electrostatic breakdown or deterioration in characteristics take place because of static makes workpiece W though utilize static that workpiece W is adsorbed on the conveyance bench board 2.
When Fig. 8 (a) is illustrated in workpiece W is positioned in the upper surface of conveyance bench board 2 and makes the lower surface positively charged of conveyance bench board 2, the state of the electric wireline that produces by the positive charge on the lower surface that is present in conveyance bench board 2.Shown in Fig. 8 (a), electric wireline is emitted in negative charge from positive charge to be finished.In this case, be present in a unlimited distant place,, pass conveyance bench board 2 and workpiece W and towards the top so electric wireline E1 sends from the positive charge of the lower surface that is present in conveyance bench board 2 owing to consider negative charge.In addition, also exist from this positive charge send and towards the below or about electric wireline, but because it doesn't matter with the present invention, so diagram not.At this moment, on the electrode Wa of workpiece W and Wb by electrostatic induction or on main body Wd by dielectric polarization, negative charge appears on lower surface separately, at separately upper surface positive charge appears simultaneously.At this moment, because electrode Wa and Wb are electric conductor, so positive charge concentrates on its upper surface, negative charge concentrates on lower surface.Therefore, produce electric wireline E2 because of these electric charges in the inside of electrode Wa and Wb.It finishes at the negative charge that is present in lower surface towards sending from the positive charge that is present in upper surface.
Therefore, in electrode Wa and Wb, electric wireline El and E2 oppositely exist each other and offset, and shown in Fig. 8 (b), become the state that does not have electric wireline in electrode Wa and the Wb.Like this, in Fig. 8 (b), be illustrated in the electric wireline of electrode Wa and Wb cut-out with E1'.Under this state, owing to do not have electric wireline in electrode Wa and the Wb, so electrode Wa and electrode Wb are idiostatic.That is, between electrode Wa and electrode Wb, do not apply voltage, the electrostatic breakdown of workpiece or deterioration in characteristics etc. can not take place.
Also considered under the transition condition of workpiece W on from 4 transfers of friction portion to conveyance bench board 2, cause is based on the electrostatic induction of the electric charge of the lower surface that is present in conveyance bench board 2, move in each electrode on electric charge limit in electrode Wa, the Wb of workpiece W, the situation that electrode Wa, Wb and friction portion 4 and conveyance bench board 2 limits contact repeatedly or separate.Also considered in the contact of electrode Wa, Wb or when separating, when the electric charge in electrode Wa, the Wb and the outside between when mobile, the situation of electrostatic breakdown then takes place by discharge.In this case because the same material that uses insulators etc. to have high resistance of friction portion 4 and conveyance bench board 2 constitutes, so and electrode Wa, Wb between movement of electric charges can not take place.
In addition, in the above-described embodiment, though show the example of the lower surface positively charged that makes conveyance bench board 2, as required also can be electronegative.In addition, though show the example that conveyance bench board 2 is made of the material of glass,, then be not limited to glass if the material of conveyance bench board 2 is the transparent body.
Second embodiment
Below, utilize Figure 10 to Figure 15, second embodiment of the present invention is described.
Figure 10 extremely second embodiment of the present invention and the first embodiment difference shown in Figure 15 only is, substitute configuration charged elements 6A below conveyance bench board 2, and below conveyance bench board 2, disposing conductive plate (conductor) 15, other structures and Fig. 1 are roughly the same to first embodiment shown in Figure 9.
At Figure 10 to second embodiment shown in Figure 15, with Fig. 1 to the identical identical mark of part mark of first embodiment shown in Figure 9, and omit detailed explanation.
At this, Figure 10 observes the transparent view that with dashed lines area surrounded S is seen Fig. 1 from the direction of arrow Y, corresponding to Fig. 4.In Figure 10, at the downside of conveyance bench board 2, with the lower surface of conveyance bench board 2 across the minim gap configuration by the conductive plate 15 that conductor constitutes, come the charged elements 6A that constitutes by ion generator 6 in the alternate figures 4.Conductive plate 15 is aspect, as shown in Figure 12, and its surperficial 15a and conveyance bench board 2 almost parallels.In addition, on conductive plate 15, be connected with direct supply 16 and apply vdc, constitute the electric field generation unit.Figure 11 represents the allocation position of conductive plate 15.The amplification view of the with dashed lines area surrounded S of Figure 11 presentation graphs 1 is corresponding to Fig. 3.In Figure 11, conductive plate 15 is elongate in the horizontal direction and extends, and be configured to from transfer point 4x to the conveyance bench board 2 of workpiece W on work transporting circular arc 5 and the downside of arranging the cooresponding conveyance bench board 2 of guide surface 7a of guide portion 7, length direction is along the work transporting circular arc 5 of workpiece W.
Then, utilize Figure 10 to Figure 15 that following explanation is carried out in the effect of second embodiment of the present invention.
In Figure 11, vibration by linear loader 1 with the workpiece W of a row conveyance by on the transfer point 4x of transfer to the conveyance bench board 2, utilization by with direct supply 16 bonded assembly conductive plates 15 in the effect of the electric charge that the produces electrostatic induction and the dielectric polarization that bring, be attracted to the upper surface of conveyance bench board 2.
This adsorbing state shown in Figure 12.In Figure 12, conductive plate 15 disposes across small gap with the lower surface of conveyance bench board 2, is connected with direct supply 16 on conductive plate 15, to apply positive vdc.Therefore, on conductive plate 15 positive charge appears.
By the effect of this positive charge, the same dielectric polarization that causes with Fig. 5 negative charge occurs with conductive plate 15 opposing lower surface sides in the inside of conveyance bench board 2, positive charge occurs in upper surface side.In addition, similarly, the workpiece W of the transfer point 4x on from 4 transfers of friction portion to conveyance bench board 2
2In, in electrode Wa and Wb by electrostatic induction or on main body Wd by dielectric polarization, negative charge appears in separately lower face side, positive charge appears in upper surface side.
And between the positive charge of negative charge that the lower face side of electrode Wa, Wb and main body Wd occurs and conductive plate 15, the electrostatic adherence power G shown in the arrow works, thus, and workpiece W
2Under the state of the upper surface that is adsorbed to conveyance bench board 2, the rotation by conveyance bench board 2 is to the direction conveyance of arrow X.
In this case, identical with first embodiment of Fig. 8 (a) shown in (b) since workpiece W from do not produce on one's body by static cause charged, so can not make workpiece W that electrostatic breakdown or deterioration in characteristics take place.
In addition, in the explanation of above-mentioned embodiment, the face of conductive plate 15 and the face almost parallel of conveyance bench board 2 have been described, but the relation of the position between the face of the face of conductive plate 15 and conveyance bench board 2 is not limited to this.Figure 13 illustrates L direction among Figure 11 to looking enlarged drawing, the state of the electric wireline that sends from the positive charge of conductive plate 15 shown in Figure 13.
As shown in figure 13, electric wireline causes electrostatic induction and dielectric polarization by passing conveyance bench board 2 and workpiece W, at the lower surface generation negative charge of workpiece W, at the upper surface generation positive charge of workpiece W.At this, for the sake of simplicity, do not illustrate the electric charge that in conveyance bench board 2, produces because of dielectric polarization.
As shown in figure 13, the electric wireline that the positive charge from conductive plate 15 sends, it is the such character of outside curve of conductive plate 15 that the electric wireline that near the positive charge the end face 15x that is present in conductive plate 15 sends (Ex the figure) has to there not being electric charge one side.Therefore, also can replace formation shown in Figure 13, as shown in Figure 14 conductive plate 15 is configured to its surperficial 15a and conveyance bench board 2 and be roughly the right angle.In this case, conductive plate 15 is elongate in the horizontal direction and extends, and be configured to the downside of the cooresponding conveyance bench board 2 of guide surface 7a of arranging guide portion 7 in, work transporting circular arc 5 almost parallels of length direction and workpiece W.
In Figure 14, from the electric wireline that the positive charge of conductive plate 15 sends, the electric wireline that sends near the positive charge the end face 15x passes conveyance bench board 2 and workpiece W.For this reason, identical with situation shown in Figure 13, by electrostatic induction and dielectric polarization, at the lower surface generation negative charge of workpiece W, at the upper surface generation positive charge of workpiece W.
And then, as shown in figure 15, the conductive plate 15 of the section with L word shape can be set also.In this case, among two surperficial 15b, the 15c of the intersection of conductive plate 15, surperficial 15b is configured to roughly meet at right angles with conveyance bench board 2, surperficial 15c is configured to and conveyance bench board 2 almost parallels.In this case, electric conductor 15 is elongate in the horizontal direction and extends, and be configured to the downside of the cooresponding conveyance bench board 2 of guide surface 7a of arranging guide portion 7 in, work transporting circular arc 5 almost parallels of length direction and workpiece W.
In Figure 15, because electric wireline has disjoint character each other, so from the electric wireline that the positive charge of conductive plate 15 sends, the electric wireline that sends near the positive charge that is present in the end face 15x passes conveyance bench board 2 and workpiece W.For this reason, identical with Figure 13, by electrostatic induction and dielectric polarization, at the lower surface generation negative charge of workpiece W, at the upper surface generation positive charge of workpiece W.
In addition, in the explanation of above-mentioned second embodiment, though illustration make conductive plate 15 positively chargeds, as required, also can make conductive plate 15 electronegative.
Claims (7)
1. the appearance inspection device of a workpiece is characterized in that, has:
Linear loader carries out conveyance to the workpiece of hexahedral shape;
Circular conveyance bench board is constituted and is rotated freely by the transparent body, workpiece from linear loader transfer point by transfer and mounting under the state of this workpiece, on the work transporting circular arc, this workpiece is carried out conveyance;
The transfer arrangement units is configured between linear loader and the conveyance bench board, will and be arranged on the conveyance bench board from the workpiece transfer of linear loader;
Holding unit is configured in conveyance bench board below, and the workpiece of mounting in the conveyance bench board kept; And
Image unit is made a video recording to six faces of the workpiece on the conveyance bench board,
The transfer arrangement units has:
Friction portion is arranged between linear loader and the conveyance bench board; And
Arrange guide portion, be arranged on the downstream of friction portion, and observe, have the guide surface of linearity from the plane of arranging workpiece,
Arrange the guide surface of guide portion, in the plane, acutangulate with respect to the linear of the S. A. that links transfer point and conveyance bench board, and at the tangent line of the downstream of transfer point formation work transporting circular arc.
2. the appearance inspection device of workpiece as claimed in claim 1 is characterized in that,
Circular conveyance bench board is made of the vitreous glazing body.
3. the appearance inspection device of workpiece as claimed in claim 1 is characterized in that,
Holding unit is sprayed charged ion and the charged charged elements of conveyance bench board lower surface is constituted by the lower surface towards the conveyance bench board.
4. the appearance inspection device of workpiece as claimed in claim 1 is characterized in that,
Holding unit is made of the conductor of the below that is configured in the conveyance bench board, and this conductor is applied vdc to produce electric field.
5. the appearance inspection device of workpiece as claimed in claim 1 is characterized in that,
Based on the work transporting speed of conveyance bench board greater than work transporting speed based on linear loader.
6. the appearance inspection device of workpiece as claimed in claim 1 is characterized in that,
Arrange the guide surface of guide portion, in the plane, form the acute angle of 75 degree～88 degree with respect to the straight line that links transfer point and conveyance bench board.
7. the appearance inspection method of a workpiece, the appearance inspection device that it uses the described workpiece of claim 1 is characterized in that, comprising:
Come the operation of the workpiece of conveyance hexahedral shape by linear loader;
Will be from the workpiece of linear loader via friction portion and arrange the transfer point of guide portion transfer to the circular conveyance bench board, and, the operation that workpiece is arranged by the guide surface of arranging guide portion;
By holding unit to mounting under the state that the workpiece on the conveyance bench board keeps, workpiece is carried out conveyance on the work transporting circular arc of conveyance bench board operation; And
By six the operations that face make a video recording of image unit to the workpiece on the conveyance bench board.
Applications Claiming Priority (4)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| JP2009-270347 | 2009-11-27 | ||
| JP2009270347 | 2009-11-27 | ||
| JP2010-167323 | 2010-07-26 | ||
| JP2010167323A JP5598912B2 (en) | 2009-11-27 | 2010-07-26 | Work appearance inspection apparatus and work appearance inspection method |
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| Publication Number | Publication Date |
|---|---|
| CN102079448A true CN102079448A (en) | 2011-06-01 |
| CN102079448B CN102079448B (en) | 2013-09-04 |
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| Application Number | Title | Priority Date | Filing Date |
|---|---|---|---|
| CN 201010561787 Active CN102079448B (en) | 2009-11-27 | 2010-11-26 | Inspection apparatus for appearance of workpiece and inspection method thereof |
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| CN103017651A (en) * | 2011-09-23 | 2013-04-03 | 苏州比特速浪电子科技有限公司 | Reversible sample six-face detection device |
| CN103204375A (en) * | 2012-01-17 | 2013-07-17 | 东京威尔斯股份有限公司 | Appearance inspection apparatus of workpiece and appearance inspection method of workpiece |
| CN103308450A (en) * | 2012-03-09 | 2013-09-18 | 胜利科技股份有限公司 | Electrostatic inductive absorption type inspection table for electronic components |
| CN104101605A (en) * | 2013-04-12 | 2014-10-15 | 东京威尔斯股份有限公司 | Workpiece visual inspection device and workpiece visual inspection method |
| CN104375022A (en) * | 2014-10-10 | 2015-02-25 | 苏州杰锐思自动化设备有限公司 | Six-face testing machine |
| CN106442534A (en) * | 2015-08-04 | 2017-02-22 | 泰科电子(上海)有限公司 | Automatic detection platform |
| CN106483141A (en) * | 2015-08-26 | 2017-03-08 | 东京威尔斯股份有限公司 | The appearance inspection device of workpiece and the appearance inspection method of workpiece |
| CN110227663A (en) * | 2014-06-30 | 2019-09-13 | 夸利森斯股份公司 | Conveying equipment with vacuum belt |
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| CN103017651A (en) * | 2011-09-23 | 2013-04-03 | 苏州比特速浪电子科技有限公司 | Reversible sample six-face detection device |
| CN103204375B (en) * | 2012-01-17 | 2015-07-15 | 东京威尔斯股份有限公司 | Appearance inspection apparatus of workpiece and appearance inspection method of workpiece |
| CN103204375A (en) * | 2012-01-17 | 2013-07-17 | 东京威尔斯股份有限公司 | Appearance inspection apparatus of workpiece and appearance inspection method of workpiece |
| CN103308450A (en) * | 2012-03-09 | 2013-09-18 | 胜利科技股份有限公司 | Electrostatic inductive absorption type inspection table for electronic components |
| CN103308450B (en) * | 2012-03-09 | 2015-09-09 | 胜利科技股份有限公司 | Electrostatic induction absorption type electronic unit monitor station |
| CN104101605A (en) * | 2013-04-12 | 2014-10-15 | 东京威尔斯股份有限公司 | Workpiece visual inspection device and workpiece visual inspection method |
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| CN110227663A (en) * | 2014-06-30 | 2019-09-13 | 夸利森斯股份公司 | Conveying equipment with vacuum belt |
| CN110227663B (en) * | 2014-06-30 | 2021-06-22 | 夸利森斯股份公司 | Conveying device with vacuum belt |
| CN104375022A (en) * | 2014-10-10 | 2015-02-25 | 苏州杰锐思自动化设备有限公司 | Six-face testing machine |
| CN104375022B (en) * | 2014-10-10 | 2017-05-03 | 苏州杰锐思自动化设备有限公司 | Six-face testing machine |
| CN106442534A (en) * | 2015-08-04 | 2017-02-22 | 泰科电子(上海)有限公司 | Automatic detection platform |
| CN106442534B (en) * | 2015-08-04 | 2019-09-03 | 泰科电子(上海)有限公司 | Automaticly inspect platform |
| CN106483141A (en) * | 2015-08-26 | 2017-03-08 | 东京威尔斯股份有限公司 | The appearance inspection device of workpiece and the appearance inspection method of workpiece |
| CN106483141B (en) * | 2015-08-26 | 2020-09-22 | 东京威尔斯股份有限公司 | Workpiece appearance inspection device and workpiece appearance inspection method |
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