CN103308450B - Electrostatic induction absorption type electronic unit monitor station - Google Patents
Electrostatic induction absorption type electronic unit monitor station Download PDFInfo
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- CN103308450B CN103308450B CN201310054213.8A CN201310054213A CN103308450B CN 103308450 B CN103308450 B CN 103308450B CN 201310054213 A CN201310054213 A CN 201310054213A CN 103308450 B CN103308450 B CN 103308450B
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- H—ELECTRICITY
- H01—ELECTRIC ELEMENTS
- H01L—SEMICONDUCTOR DEVICES NOT COVERED BY CLASS H10
- H01L21/00—Processes or apparatus adapted for the manufacture or treatment of semiconductor or solid state devices or of parts thereof
- H01L21/67—Apparatus specially adapted for handling semiconductor or electric solid state devices during manufacture or treatment thereof; Apparatus specially adapted for handling wafers during manufacture or treatment of semiconductor or electric solid state devices or components ; Apparatus not specifically provided for elsewhere
- H01L21/683—Apparatus specially adapted for handling semiconductor or electric solid state devices during manufacture or treatment thereof; Apparatus specially adapted for handling wafers during manufacture or treatment of semiconductor or electric solid state devices or components ; Apparatus not specifically provided for elsewhere for supporting or gripping
- H01L21/6831—Apparatus specially adapted for handling semiconductor or electric solid state devices during manufacture or treatment thereof; Apparatus specially adapted for handling wafers during manufacture or treatment of semiconductor or electric solid state devices or components ; Apparatus not specifically provided for elsewhere for supporting or gripping using electrostatic chucks
- H01L21/6833—Details of electrostatic chucks
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- B—PERFORMING OPERATIONS; TRANSPORTING
- B23—MACHINE TOOLS; METAL-WORKING NOT OTHERWISE PROVIDED FOR
- B23Q—DETAILS, COMPONENTS, OR ACCESSORIES FOR MACHINE TOOLS, e.g. ARRANGEMENTS FOR COPYING OR CONTROLLING; MACHINE TOOLS IN GENERAL CHARACTERISED BY THE CONSTRUCTION OF PARTICULAR DETAILS OR COMPONENTS; COMBINATIONS OR ASSOCIATIONS OF METAL-WORKING MACHINES, NOT DIRECTED TO A PARTICULAR RESULT
- B23Q3/00—Devices holding, supporting, or positioning work or tools, of a kind normally removable from the machine
- B23Q3/15—Devices for holding work using magnetic or electric force acting directly on the work
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- G—PHYSICS
- G01—MEASURING; TESTING
- G01R—MEASURING ELECTRIC VARIABLES; MEASURING MAGNETIC VARIABLES
- G01R31/00—Arrangements for testing electric properties; Arrangements for locating electric faults; Arrangements for electrical testing characterised by what is being tested not provided for elsewhere
- G01R31/01—Subjecting similar articles in turn to test, e.g. "go/no-go" tests in mass production; Testing objects at points as they pass through a testing station
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- H—ELECTRICITY
- H02—GENERATION; CONVERSION OR DISTRIBUTION OF ELECTRIC POWER
- H02N—ELECTRIC MACHINES NOT OTHERWISE PROVIDED FOR
- H02N13/00—Clutches or holding devices using electrostatic attraction, e.g. using Johnson-Rahbek effect
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Abstract
The present invention relates to and utilize electrostatic force to be placed in electrostatic induction absorption type electronic unit monitor station fixing to the electronic unit absorption detecting position transfer on check-out console, comprise: check-out console (110), it for placing input electronic unit (C), and is made up of transparent material; Swivel plate (151,151a), it makes above-mentioned check-out console (110) rotate, and electrochemical above-mentioned check-out console (110), make above-mentioned electronic unit (C) be absorbed and fixed on above-mentioned check-out console (110) by electrostatic force; Rotation motor (130), it is connected to the central side of above-mentioned swivel plate (151,151a), and above-mentioned check-out console (110) is rotated; And power supplier (140), it supplies electrostatic induction power supply to above-mentioned swivel plate (151,151a).
Description
Technical field
The present invention relates to and utilize electrostatic force to be positioned over electrostatic induction absorption type electronic unit monitor station fixing to the electronic unit absorption detected in the transfer of position on check-out console, more specifically, relate to following electrostatic induction absorption type electronic unit monitor station, it utilizes the direct electrochemical check-out console of swivel plate that check-out console is rotated, thus Electrostatic Absorption is positioned over the electronic unit on check-out console upper surface, do not need separately to establish electrostatic inductor.
And, the present invention relates to following electrostatic induction absorption type electronic unit monitor station, it is by the auxiliary electrostatic inductive layer of the lower surface of direct coating check-out console outside above-mentioned swivel plate, assist the Electrostatic Absorption of the electronic unit to the upper surface being positioned over check-out console, thus electrostatic force can be improved further.
In addition, the present invention relates to following electrostatic induction absorption type electronic unit monitor station, it is according to the rotational speed of check-out console and simultaneously by testing environments such as the electronic unit quantity transferred, adjustment is supplied to the size of the power supply of auxiliary electrostatic inductive layer and contacts with above-mentioned auxiliary electrostatic inductive layer and the size of the swivel plate of supply power respectively changeably, thus can apply electrostatic force with the condition of optimum to electronic unit.
Background technology
Usually, except the passive devices such as chip multilayer ceramic capacitor (MLCC:Multilayer ceramic capacitor), resistor and inductor, the various electronic unit needs also comprising active member carry out detecting the electronic unit produced and automatically screen and remove the operation of defective products, can also reduce fraction defective while adapting to batch production.
Use electronic unit appearance delection device for this reason, it supplies electronic unit at parts supply unit on transparent check-out console (namely, monitor station), video camera is utilized to take the up/down of the electronic unit be positioned in rotation on check-out console, front/rear and left/right face respectively, and analyze, thus automatically whether detection electronics exists bad.
On the other hand, because electronic unit is shifted into the detection position being provided with video camera with the state be positioned on the check-out console in rotation, if therefore raising detection efficiency and rotate check-out console at high speed, then not only can apply centrifugal force to each electronic unit, but also electronic unit generation can be made along with the vibration of check-out console to rock.
Thus, produce following problem, namely, cannot detect because electronic unit drops to the outside of check-out console, or the normal electronic unit dropped into due to posture bad and be not suitable for detecting, or uneven due to the spacing between each electronic unit and air that is that can not apply high pressure is separated the electronic unit of discharging as good, bad respectively.
To this, following technical scheme is have employed in KR published patent 2011-59524 publication, namely, as shown in Figure 1, by non-vibration part 4 to foldback platform 2(namely, check-out console) the upper workpiece W dropped into as detected object electronic unit, now utilize direct supply 16 to separate preset distance and current-carrying plate 15 supply power arranged to the downside of foldback platform 2, thus utilize electrostatic induction to adsorb fixation workpiece W.
But, according to prior art as above, owing to needing to be arranged on the current-carrying plate 15 that foldback platform 2 produces electrostatic induction phenomenon, therefore exist and need to add the problem arranging electrostatic inductor in addition.
And, because the downside from foldback platform 2 is separately provided with current-carrying plate 15, therefore the size acting on the electrostatic force of workpiece W is less, the electrostatic force acting on foldback platform 2 only acts on partial section etc., electrostatic force can not act on foldback platform 2 on the whole equably, thus there is the problem that when applying to impact or utilize pressure-air discharge workpiece W from outside, workpiece departs from.
In addition, owing to possessing current-carrying plate 15 and direct supply 16 in the downside of foldback platform 2, therefore can be subject to restriction spatially, thus there is the problem being difficult to arrange the detection video camera for detecting workpiece W lower surface etc. in the downside of foldback platform 2.
And, be positioned on foldback platform 2 according to the difference of the row supply of the interval between workpiece W or workpiece W or two row supplies etc. simultaneously and can be changed by the workpiece W quantity transferred, if and the rotational speed of foldback platform 2 changes along with detection speed, then need the size of the electrostatic force thereupon changing applying, with the state of optimum absorption workpiece W, but before existing, failed the problem of corresponding this change.
Summary of the invention
Technical matters to be solved by this invention
The present invention proposes to solve problem as above, following electrostatic induction absorption type electronic unit monitor station is provided, it utilizes the direct electrochemical check-out console of swivel plate that check-out console is rotated, thus Electrostatic Absorption is positioned over the electronic unit on check-out console upper surface, do not need separately to establish electrostatic inductor.
And, the invention provides following electrostatic induction absorption type electronic unit monitor station, it is by the auxiliary electrostatic inductive layer of the lower surface of direct coating check-out console outside above-mentioned swivel plate, assist the Electrostatic Absorption of the electronic unit to the upper surface being positioned over check-out console, thus the size of electrostatic force is comparatively large and even.
In addition, the invention provides following electrostatic induction absorption type electronic unit monitor station, it is according to testing environment, adjustment is supplied to the size of the power supply of auxiliary electrostatic inductive layer and contacts with above-mentioned auxiliary electrostatic inductive layer and the size of the swivel plate of supply power respectively changeably, thus can apply electrostatic force with the condition of optimum to electronic unit.
The scheme of technical solution problem
In order to solve the problems of the technologies described above, the feature of electrostatic induction absorption type electronic unit monitor station of the present invention is, comprising: check-out console, it for placing input electronic unit, and is made up of transparent material; Swivel plate, it makes above-mentioned check-out console rotate, and electrochemical above-mentioned check-out console, make above-mentioned electronic unit be absorbed and fixed on above-mentioned check-out console by electrostatic force; Rotation motor, it is connected to the central side of above-mentioned swivel plate, and above-mentioned check-out console is rotated; And power supplier, it is to above-mentioned swivel plate supply electrostatic induction power supply.
Now, preferably also comprise auxiliary electrostatic inductive layer, its coating at the lower surface of above-mentioned check-out console, and receives electrostatic induction power supply from above-mentioned swivel plate, applies electrostatic force to being placed on the electronic unit of movement on above-mentioned check-out console.
In addition, preferred above-mentioned auxiliary electrostatic inductive layer comprises the coated and transparency electrode that is that be made up of transparent material of the mode of marginal portion of the check-out console placing electronic unit.
And preferred above-mentioned auxiliary electrostatic inductive layer is the conductive electrode except the part of marginal portion in and by transparent or opaque material form of coating at the check-out console of placement electronic unit.
In addition, preferably according to the size of the above-mentioned swivel plate of size adjustment of the electrostatic force responded to above-mentioned electronic unit by above-mentioned auxiliary electrostatic inductive layer.
And, the top tie plate fixing above-mentioned check-out console together with above-mentioned swivel plate is preferably provided with at the upper surface of above-mentioned check-out console.
In addition, preferred above-mentioned power supplier comprises: for supplying the device for generating voltage of electrostatic induction power supply; For transmitting the pressure-wire of power supply; Be arranged on the rotary power source feedway of the central side of above-mentioned rotation motor; And contact and the contact terminal of supply power with swivel plate.
And preferred above-mentioned power supplier comprises voltage regulator, this voltage regulator can change the size of the electrostatic induction power supply being supplied to above-mentioned auxiliary electrostatic inductive layer according to testing environment.
Invention effect
According to the present invention as above, utilizing electrostatic force by when being positioned over fixing to the electronic unit absorption detected in the transfer of position on check-out console, utilize the direct electrochemical check-out console of swivel plate that check-out console is rotated, thus Electrostatic Absorption is positioned over the electronic unit on check-out console upper surface, do not need separately to establish electrostatic inductor, and the restriction in space when video camera is set in the bottom of check-out console, can not be subject to, can freely arrange.
And the present invention, by the auxiliary electrostatic inductive layer of coating at the lower surface of check-out console, assists the Electrostatic Absorption to the electronic unit being positioned over check-out console upper surface.Thus not only can strengthen the size of electrostatic force fully, and uniform electrostatic force is provided, the restriction in space can not be subject to when video camera is set in the bottom of check-out console, can freely arrange.
In addition, the present invention is according to the rotational speed of check-out console and simultaneously by testing environments such as the electronic unit quantity transferred, and adjustment is supplied to the size of the power supply of auxiliary electrostatic inductive layer and contact the size of swivel plate of also supply power with above-mentioned auxiliary electrostatic inductive layer respectively changeably.Thus electrostatic force can be applied with the condition of optimum to electronic unit.
Accompanying drawing explanation
Fig. 1 is the partial sectional view of the electrostatic induction absorption type monitor station representing prior art.
Fig. 2 is the partial perspective view of the electrostatic induction absorption type electronic unit monitor station representing first embodiment of the invention.
Fig. 3 is the stereographic map of the electrostatic induction absorption type electronic unit monitor station representing first embodiment of the invention.
Fig. 4 is the cut-open view of the electrostatic induction absorption type electronic unit monitor station representing first embodiment of the invention.
Fig. 5 is the stereographic map of the check-out console of the electrostatic induction absorption type electronic unit monitor station representing first embodiment of the invention.
Fig. 6 is the perspective cut-away view of the electrostatic induction absorption type electronic unit monitor station representing second embodiment of the invention.
Fig. 7 is the stereographic map of the check-out console of the electrostatic induction absorption type electronic unit monitor station representing second embodiment of the invention.
Fig. 8 is the cut-open view of the electrostatic induction absorption type electronic unit monitor station representing second embodiment of the invention.
Wherein, description of reference numerals is as follows:
110 check-out consoles
120,120a auxiliary electrostatic inductive layer
130 rotation motors
140 power suppliers
141 device for generating voltage
142 voltage regulators
143 pressure-wires
144 rotary power source feedwaies (slip ring)
145 contact terminals
150 support portions
Embodiment
Below, the electrostatic induction absorption type electronic unit monitor station of present invention will be described in detail with reference to the accompanying preferred embodiment.
First, as shown in Figure 2, the electrostatic induction absorption type electronic unit monitor station 100 of first embodiment of the invention receives the various electronic unit C of such as chip multilayer ceramic capacitor (MLCC) etc. by feeding devices such as circuit feedwaies (line feeder), and while carrying out transferring, to take each of electronic unit C and whether good the mode of carrying out analyzing detect, can be separated according to testing result and discharge.
Now, as shown in Figures 3 and 4, electrostatic induction absorption type electronic unit monitor station 100 of the present invention comprises: check-out console 110, and the electronic unit C putting into upper surface rotates and moves it and detects position by it; Support portion 150, it has swivel plate 151, and while this swivel plate 151 supports above-mentioned check-out console 110, electrification check-out console 110, makes electronic unit C be absorbed and fixed on check-out console 110; And rotation motor 130, it makes above-mentioned support portion 150 rotate.
In addition, comprise the power supplier 140 supplying electrostatic induction power supply to swivel plate 151, also comprise auxiliary electrostatic inductive layer 120 as required, its coating is at the lower surface of check-out console 110, and the auxiliary electronic unit C to being placed on check-out console 110 applies electrostatic force.
This electrostatic induction absorption type electronic unit monitor station 100 of the present invention, as an example, is usually arranged at substrate S1 and is fixed on the bracing frame S2 of aforesaid substrate S1, but also can use the support component of other structures in addition.
According to structure as above, if electronic unit C puts on check-out console 110 at certain intervals, then the check-out console 110 that supported portion 150 supports is rotated by rotation motor 130, thus electronic unit C is transplanted on the detection position being provided with video camera.
Now, supplied to give the electrochemical check-out console 110 of swivel plate 151 of power supply owing to utilizing by power supplier 140, therefore do not need separately to establish electrostatic inductor, can only utilize the support portion 150 stably supporting check-out console 110 just can adsorb fixing electronic unit C.
And, the auxiliary electrostatic inductive layer 120 that be have received electrostatic induction power supply by swivel plate 151 can also be possessed as required further, thus electrochemical check-out console 110 causes electrostatic induction phenomenon, can with the fixing electronic unit C of larger electrostatic force absorption.
Thus, need to possess the current-carrying plate 15 being equivalent to electrostatic inductor for generation of electrostatic induction phenomenon in addition in the past, in contrast to this, the swivel plate 151 of the support portion 150 stably supporting check-out console 110 uses as electrostatic inductor by the present invention, does not therefore need other electrostatic inductor.
And former current-carrying plate 15 separates from the downside of foldback platform 2 and arranges, and the electrostatic force therefore acting on workpiece W is little, and uneven, in contrast to this, due in the present invention by swivel plate 151 and the electrochemical check-out console 110 of auxiliary electrostatic inductive layer 120, therefore electrostatic force is large, and evenly.
In addition, in the past owing to needing to arrange current-carrying plate 15 and direct supply 16 in the downside of foldback platform 2, therefore received restriction spatially, and be difficult to arrange detection video camera etc. in the downside of foldback platform 2.But, in the present invention, swivel plate 151 is used as electrostatic inductor, and power supplier 150 is also be connected to auxiliary electrostatic inductive layer 120 by the central side of rotation motor 130, when therefore detection video camera etc. is set, is not subject to restriction spatially.
Further, even if possess auxiliary electrostatic inductive layer 120, due to auxiliary electrostatic inductive layer 120 integratedly coating at the lower surface of check-out console 110, therefore can not be subject to restriction spatially.
In addition, in the past, changed along with detection speed by the rotational speed of the workpiece W number change transferred or foldback platform 2 even if be positioned on foldback platform 2 simultaneously, always for the electrostatic force giving formed objects.But, in the present invention, if the rotational speed change of the quantity of electronic unit C or check-out console 110, then as described in detail rear, by the size of the size and swivel plate 151 that optimally change supply power, thus can with the state attract electrons parts C of optimum.
More specifically, check-out console 110 is made up of transparent material, and the electronic unit C of input is placed and also by below the lower surface shooting electronic unit C of transparent check-out console 110, thus can detects.Certainly, other faces in addition also can utilize the video camera being arranged on respective desired location to detect.
This check-out console 110 is made up of glass material usually, but is not limited thereto, as long as can electrification and can electrostatic induction, then also can use the various materials such as such as transparent plastics.
Auxiliary electrostatic inductive layer 120 produces electrostatic induction phenomenon for auxiliary by electrochemical check-out console 110, and direct coating is at the lower surface of check-out console 110.Especially, as shown in Figure 5, when the mode coating of the edge part B to comprise the check-out console 110 placing electronic unit C, as " transparency electrode " that auxiliary electrostatic inductive layer 120 uses transparent material to form.
Because the mode only needing the edge part B comprising the check-out console 110 placing electronic unit C carries out coating, therefore, the edge part B of check-out console 110 can be comprised as shown in Figure 5 and coating check-out console 110 lower surface on the whole, but in addition also can from the edge part B of check-out console 110 to the inside coating to definite part.
Because this auxiliary electrostatic inductive layer 120 is made up of conductive material, if apply (+) or (-) power supply from power supplier 140, then can electrochemical check-out console 110.Thus the electronic unit C be positioned on check-out console 110 is adsorbed fixing by electrostatic force, even if therefore apply centrifugal force or vibration, also can overcome its power, keep the posture of electronic unit C.
As an example, if apply (+) power supply by swivel plate 151 to auxiliary electrostatic inductive layer 120, then at the downside of check-out console 110 configuration (-) electric charge, at the upside of check-out console 110 configuration (+) electric charge.Thus due to electrostatic induction, at the downside of electronic unit C configuration (-) electric charge, at the upside of electronic unit C configuration (+) electric charge, thus electronic unit C is adsorbed on check-out console 110.
And, because the transparency electrode as auxiliary electrostatic inductive layer 120 is made up of transparent material, therefore, even if carry out coating in the mode of the edge part B in the lower surface comprising check-out console 110, stacked check-out console 110 and auxiliary electrostatic inductive layer 120 entirety are transparent.Thus utilize in the downside of check-out console 110 video camera take be positioned over the upper surface of check-out console 110 electronic unit C and below detection electronics C.
In Figure 5 in order to represent the coating location of auxiliary electrostatic inductive layer 120, in the drawings auxiliary electrostatic inductive layer 120 is expressed as coloured, but be actually transparent, and ITO(Indium Tin Oxide can be used as the transparency electrode of auxiliary electrostatic inductive layer 120), transparent graphene (graphene), SnO2(tin oxide), ZnO(zinc oxide) and the various material such as transparent nano carbon pipe.
But, although be expressed as auxiliary electrostatic inductive layer 120 above coated at check-out console 110, but " coating " not only refers to the lower surface of direct coating at check-out console 110, be also included in the mode of the lower surface coating transparency electrode of check-out console 110 or utilize transparent adhesive the transparent electrode layer prepared in addition to be bonded in the mode of the lower surface of check-out console 110.
Rotation motor 130 is for rotating check-out console 110, and in the present invention, the turning axle of rotation motor 130 is connected to the central part of swivel plate 151, check-out console 110 is fixed on swivel plate 151, therefore, when utilizing this rotation motor 130 that swivel plate 151 is rotated, check-out console 110 also can rotate together.
As an example of this rotation motor 130, use the DD motor (direct drive motor) that noise, vibration and power consumption are little, regulated the responsiveness of rotation motor 130 by microprocessor, thus the rotational speed of check-out console 110 can be changed according to monitoring velocity.
That is, when detection efficiency will be improved by raising detection speed, be controlled to the responsiveness improving rotation motor 130, on the contrary, when will improve accuracy of detection by reduction detection speed, be controlled to the responsiveness reducing rotation motor 130.
Detection can adopt following mode, after namely, with the spacing set and arrange or two row etc. supplies electronic unit C to check-out console 110, utilizes the shooting of detection video camera to be positioned on check-out console 110 by the electronic unit C transferred.According to testing result, the electronic unit utilizing pressure-air to spray respectively to judge that whether excellent it is, is separated and is discharged to surge drum.
Power supplier 140 is for supplying the electrostatic induction power supply of (+) or (-) to swivel plate 151, as long as can contact with swivel plate 151 and supply electrostatic induction power supply, its structure is had no particular limits, comprises as an example: such as ESC(Electro Static Chuck) etc. device for generating voltage 141; Reconcile the voltage regulator 142 of the size of the supply power of above-mentioned device for generating voltage 141; Pressure-wire 143; Rotary power source feedway 144; And contact and the contact terminal 145 of supply power with auxiliary electrostatic inductive layer 120.
Wherein, power supplier 144 can use slip ring (slip ring) as an example, slip ring was used as to make electric current be located at contact terminal on armature spindle externally to the rotor flow of engine in the past, by this is applicable to the present invention, the rotary middle spindle of through rotation motor 130 power supply can be supplied to swivel plate 151.
Thus if apply high voltage from device for generating voltage 141, be then applied to rotary power source feedway 144 by pressure-wire 143, the high voltage being applied to rotary power source feedway 144 is supplied to swivel plate 151 by contact terminal 145.Further, when comprising auxiliary electrostatic inductive layer 120, being delivered to auxiliary electrostatic inductive layer 120 by swivel plate 151, this can being used as electrostatic thus and doing applied power source.
Especially, owing to being provided with voltage regulator 142 at device for generating voltage 141, if therefore electronic unit C quantity along with the electronic unit C put on check-out console 110 spacing and one row or two row supply and change, then the size of electrostatic induction power supply also can make thereupon adaptability regulate.Thus, the electrostatic force of optimal size can be applied to each electronic unit C.
Certainly, in order to regulate detection speed, along with regulating the speed of check-out console 110, during the size variation of the size of centrifugal force or vibration, can be corresponded to this and regulate electrostatic to do the size of applied power source adaptively.Such as, if improve the rotational speed of check-out console 110, then the centrifugal force and the vibration that act on electronic unit C also can become large, the size of power supply of therefore can increasing supply, thus fix electronic unit C with sufficient electrostatic force.
But, although plant at Fig. 4 and illustrate push button regulator as voltage regulator 142, but the present invention is not limited to this, the quantity of the electronic unit C by sensing input and the rotational speed of check-out console 110 also can be used and the microprocessor etc. of automatically regulation voltage.
Support portion 150 comprises: at the swivel plate 151 of downside fixed test plate 110; At the top tie plate 152 of upside fixed test plate 110; The contiguous block 153 of the above-mentioned swivel plate 151 of mutual assembling and top tie plate 152; And the insulation course 154 be inserted between swivel plate 151 and rotation motor 130.
Swivel plate 151 has the mode of the lower surface of the check-out console 110 of auxiliary electrostatic inductive layer 120 to be flatly arranged on the bottom of check-out console 110 to support coating, and is connected with rotation motor 130.Thus, synchronously make check-out console 110 rotate with the responsiveness of rotation motor 130.
And swivel plate 151 is made up of conductive material, and be electrically connected with contact terminal 145.Thus, utilizing the electrostatic induction power supply electrification check-out console 110 supplied by contact terminal 145, making the electrostatic forcing caused by electrostatic induction phenomenon in being placed on the electronic unit C on check-out console 110.
But the size of swivel plate 151 preferably can be regulated according to the size of the electrostatic force being sensed electronic unit C as illustrated in fig. 8 by auxiliary electrostatic inductive layer 120, will be described in detail this below.
Because top tie plate 152 is flatly arranged on the upper surface of check-out console 110, therefore when assembling, be fixed while the upper surface pressurization of check-out console 110, and owing to being made up of non-conductive material, therefore can not be touched terminal 145 electrification.
Assemble due to the through top tie plate 152 of contiguous block 153, check-out console 110 and swivel plate 151, therefore top tie plate 152 and swivel plate 151 are fixed while pressurizeing to the check-out console 110 inserted between the two.Thus the vibration of check-out console 110 also can be prevented when High Rotation Speed, ensure stable rotation.
As shown in Figure 5, be formed with assembly hole H at the central part of check-out console 110, this assembly hole H is also formed at top tie plate 152 and swivel plate 151 respectively, therefore contiguous block 153 can be inserted assembly hole H to assemble.
Insulation course 154 inserts between swivel plate 151 and rotation motor 130, plays the effect of insulator, therefore, even if by contact terminal 145 to swivel plate 151 supply power, the rotation motor 130 being configured in the downside of swivel plate 151 does not also have current flowing.
Below, the electrostatic induction absorption type electronic unit monitor station of the second embodiment that present invention will be described in detail with reference to the accompanying.
The above-described first embodiment of the present invention, because the lower surface edge part B at check-out console 110 also coating has auxiliary electrostatic inductive layer 120, therefore needs to use transparent electrode (namely, " transparency electrode ") as auxiliary electrostatic inductive layer 120.
But the distinctive points of the second embodiment of the present invention is, because the non-coating of edge part B at check-out console 110 has auxiliary electrostatic inductive layer 120, therefore do not need to use transparent electrode, as long as " conductive electrode ".
That is, as shown in Figure 6, electrostatic induction absorption type electronic unit C monitor station of the present invention comprises: electronic unit C is rotatably moved to the check-out console 110 detecting position; The auxiliary electrostatic inductive layer 120a of electrostatic force is applied to electronic unit C; Support the support portion 150 of check-out console 110; By the rotation motor 130 that above-mentioned support portion 150 makes check-out console 110 rotate; And the power supplier 140 of electrostatic induction power supply is supplied to auxiliary electrostatic inductive layer 120a.
And, support portion 150 comprises swivel plate 151, top tie plate 152, contiguous block 153 and insulation course 154, power supplier 140 comprises device for generating voltage 141, voltage regulator 142, pressure-wire 143, rotary power source feedway 144 and contact terminal 145, applies electrostatic force and to adsorb the principle of fixing electronic unit C identical with first embodiment of the invention described above by these structures to the electronic unit C that is positioned on check-out console 110.
But in the second embodiment of the present invention, the partial coating as shown in Figure 7 only in check-out console 110 except placing the edge part B of electronic unit C has auxiliary electrostatic inductive layer 120a.
Thus, because electronic unit C can directly be seen in the downside by transparent check-out console 110, therefore whether transparent irrelevant with the material of auxiliary electrostatic inductive layer 120a, as long as employ conductive material just passable " conductive electrode ".
When the conductive electrode as auxiliary electrostatic inductive layer 120a is transparent material, as mentioned above, ITO, transparent graphene, SnO2, ZnO and transparent nano carbon pipe etc. can be used, in opaque situation, can Copper Foil etc. be used.
Even if, in the edge part B except check-out console 110, implement the coating of conductive electrode, also can fully electrification to the edge part B of the conductive electrode of non-coating of check-out console 110, therefore conductive electrode is utilized also can to produce electrostatic induction phenomenon, with electrostatic force attract electrons parts C at electronic unit C.
Below, the electrostatic induction absorption type electronic unit monitor station of third embodiment of the invention is described with reference to accompanying drawing.
The difference of the third embodiment of the present invention is, according to the size of electrostatic induction power supply, is that optimum state is arranged by the size adjustment of swivel plate 151a.
That is, as shown in Figure 8, electrostatic induction absorption type electronic unit monitor station of the present invention comprises check-out console 110, auxiliary electrostatic inductive layer 120, support portion 150, rotation motor 130 and power supplier 140.
And, support portion 150 comprises swivel plate 151a, top tie plate 152a, contiguous block 153 and insulation course 154, and power supplier 140 comprises device for generating voltage 141, voltage regulator 142, pressure-wire 143, rotary power source feedway 144 and contact terminal 145.
Now, in the third embodiment of the present invention, according to the size of electrostatic force sensing electronic unit C, regulate direct electrochemical check-out console 110 or assemble after being made by the size (especially diameter) of the swivel plate 151a of the electrochemical check-out console 110 of auxiliary electrostatic inductive layer 120.
Thus, if the quantity of the electronic unit C simultaneously in transfer narrows along with the spacing that electronic unit C supplies or carries out supplying with two row and increase or cause centrifugal force to become large along with the rotational speed improving check-out console 110 simultaneously, swivel plate 151a then by using size relatively large, can improve electrostatic force.
In Fig. 8 for example be due to even if the size of swivel plate 151a greatly and does not possess auxiliary electrostatic inductive layer 120 fully also can electrochemical check-out console 110 be overall fully, therefore do not possess the situation of auxiliary electrostatic inductive layer 120, but optionally to possess auxiliary electrostatic inductive layer 120 be further aobvious and easy to know.
On the contrary, when needs reduce electrostatic force, can by using the swivel plate 151a that size is relatively little, only utilize swivel plate 151a electrification check-out console 110, if optionally possessed the situation of auxiliary electrostatic inductive layer 120, then can prevent power wastage by the electrostatic force reduced from auxiliary electrostatic inductive layer 120, the impact on peripheral device can be minimized.
Certainly, if increase or reduce swivel plate 151a, then the size of top tie plate 152 is regulated with preferably corresponding.
Above, specific embodiment of the present invention is described in detail.But the personnel in the art with common knowledge are clear, thought of the present invention and scope are not limited to these specific embodiments, in the scope not changing main idea of the present invention, can carry out multiple amendment and distortion.
Thus, the embodiment more than described fully informs that the category of invention provides in order to the personnel to the technical field belonging to the present invention with common knowledge, only example in all respects, instead of determinate, the present invention should be defined by the scope of claim.
Claims (7)
1. an electrostatic induction absorption type electronic unit monitor station, is characterized in that, comprising:
Check-out console (110), it for placing input electronic unit (C), and is made up of transparent material;
Swivel plate (151,151a), it makes above-mentioned check-out console (110) rotate, and electrochemical above-mentioned check-out console (110), make above-mentioned electronic unit (C) be absorbed and fixed on above-mentioned check-out console (110) by electrostatic force;
Rotation motor (130), it is connected to the central side of above-mentioned swivel plate (151,151a), and above-mentioned check-out console (110) is rotated; And
Power supplier (140), it supplies electrostatic induction power supply to above-mentioned swivel plate (151,151a).
Also comprise auxiliary electrostatic inductive layer (120,120a), its coating is at the lower surface of above-mentioned check-out console (110), and receive electrostatic induction power supply from above-mentioned swivel plate (151,151a), to being placed on that above-mentioned check-out console (110) is upper, the electronic unit of movement (C) applies electrostatic force.
2. electrostatic induction absorption type electronic unit monitor station according to claim 1, is characterized in that,
Above-mentioned auxiliary electrostatic inductive layer (120) is the coated and transparency electrode that is that be made up of transparent material of mode of edge (B) part comprising the check-out console (110) placing electronic unit (C).
3. electrostatic induction absorption type electronic unit monitor station according to claim 1, is characterized in that,
Above-mentioned auxiliary electrostatic inductive layer (120a) is coating at the check-out console (110) placing electronic unit (C) except in the part of edge (B) part and the conductive electrode be made up of transparent or opaque material.
4. electrostatic induction absorption type electronic unit monitor station as claimed in any of claims 1 to 3, is characterized in that,
According to the size of the above-mentioned swivel plate of size adjustment of the electrostatic force responded to above-mentioned electronic unit (C) by above-mentioned auxiliary electrostatic inductive layer (120,120a) (151,151a).
5. electrostatic induction absorption type electronic unit monitor station according to claim 4, is characterized in that,
The top tie plate (152,152a) fixing above-mentioned check-out console (110) together with above-mentioned swivel plate (151,151a) is provided with at the upper surface of above-mentioned check-out console (110).
6. electrostatic induction absorption type electronic unit monitor station as claimed in any of claims 1 to 3, is characterized in that,
Above-mentioned power supplier (140) comprising:
For supplying the device for generating voltage (141) of electrostatic induction power supply; For transmitting the pressure-wire (143) of power supply; Be arranged on the rotary power source feedway (144) of the central side of above-mentioned rotation motor (130); And contact and the contact terminal (145) of supply power with swivel plate (151,151a).
7. electrostatic induction absorption type electronic unit monitor station according to claim 1 and 2, is characterized in that,
Above-mentioned power supplier (140) comprises voltage regulator (142), and this voltage regulator (142) can change the size of the electrostatic induction power supply being supplied to above-mentioned auxiliary electrostatic inductive layer (120,120a) according to testing environment.
Applications Claiming Priority (2)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| KR1020120024177A KR101173578B1 (en) | 2012-03-09 | 2012-03-09 | Electrostatic attraction type inspection table for electric parts |
| KR10-2012-0024177 | 2012-03-09 |
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| CN103308450A CN103308450A (en) | 2013-09-18 |
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| JP (1) | JP5683553B2 (en) |
| KR (1) | KR101173578B1 (en) |
| CN (1) | CN103308450B (en) |
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| TW201617631A (en) * | 2014-11-10 | 2016-05-16 | Tian Zheng Internat Prec Machinery Co Ltd | Automatic layer inspection equipment |
| CN106370666A (en) * | 2015-07-23 | 2017-02-01 | 台达电子工业股份有限公司 | Electronic component appearance detection apparatus and electronic component appearance detection method |
| KR101919692B1 (en) * | 2017-04-26 | 2018-11-16 | 윈텍 주식회사 | Electrostatic attraction type inspection table for electric parts |
| KR101938592B1 (en) | 2018-06-15 | 2019-01-15 | 김기석 | Led inspection apparatus and disk for inspecting led |
| CN109807082A (en) * | 2019-03-04 | 2019-05-28 | 肇庆市宏华电子科技有限公司 | Crawler type detection device and detection system |
| JP7159942B2 (en) * | 2019-03-28 | 2022-10-25 | 株式会社村田製作所 | Appearance inspection device |
| JP7347386B2 (en) * | 2020-09-25 | 2023-09-20 | 株式会社村田製作所 | Electrostatic induction adsorption conveyor and electrostatic induction adsorption transfer device |
| KR102325078B1 (en) | 2021-05-10 | 2021-11-11 | 주식회사 제이엔에스 | Sorting Device for Multi-layer Ceramic Capacitor chip |
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| JP5683553B2 (en) | 2015-03-11 |
| KR101173578B1 (en) | 2012-08-13 |
| JP2013187535A (en) | 2013-09-19 |
| TW201337242A (en) | 2013-09-16 |
| CN103308450A (en) | 2013-09-18 |
| WO2013133492A1 (en) | 2013-09-12 |
| TWI472749B (en) | 2015-02-11 |
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