TWI472749B - Electrostatic attraction type inspection table for electric parts - Google Patents

Electrostatic attraction type inspection table for electric parts Download PDF

Info

Publication number
TWI472749B
TWI472749B TW102104413A TW102104413A TWI472749B TW I472749 B TWI472749 B TW I472749B TW 102104413 A TW102104413 A TW 102104413A TW 102104413 A TW102104413 A TW 102104413A TW I472749 B TWI472749 B TW I472749B
Authority
TW
Taiwan
Prior art keywords
plate
detecting
electrostatic
electric component
auxiliary
Prior art date
Application number
TW102104413A
Other languages
Chinese (zh)
Other versions
TW201337242A (en
Inventor
Dong Hyun Kim
Jung Tae Bae
Tae Bok Kim
Guk Hyeon Kim
Original Assignee
Win Tech Co Ltd
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed by Win Tech Co Ltd filed Critical Win Tech Co Ltd
Publication of TW201337242A publication Critical patent/TW201337242A/en
Application granted granted Critical
Publication of TWI472749B publication Critical patent/TWI472749B/en

Links

Classifications

    • HELECTRICITY
    • H01ELECTRIC ELEMENTS
    • H01LSEMICONDUCTOR DEVICES NOT COVERED BY CLASS H10
    • H01L21/00Processes or apparatus adapted for the manufacture or treatment of semiconductor or solid state devices or of parts thereof
    • H01L21/67Apparatus specially adapted for handling semiconductor or electric solid state devices during manufacture or treatment thereof; Apparatus specially adapted for handling wafers during manufacture or treatment of semiconductor or electric solid state devices or components ; Apparatus not specifically provided for elsewhere
    • H01L21/683Apparatus specially adapted for handling semiconductor or electric solid state devices during manufacture or treatment thereof; Apparatus specially adapted for handling wafers during manufacture or treatment of semiconductor or electric solid state devices or components ; Apparatus not specifically provided for elsewhere for supporting or gripping
    • H01L21/6831Apparatus specially adapted for handling semiconductor or electric solid state devices during manufacture or treatment thereof; Apparatus specially adapted for handling wafers during manufacture or treatment of semiconductor or electric solid state devices or components ; Apparatus not specifically provided for elsewhere for supporting or gripping using electrostatic chucks
    • H01L21/6833Details of electrostatic chucks
    • BPERFORMING OPERATIONS; TRANSPORTING
    • B23MACHINE TOOLS; METAL-WORKING NOT OTHERWISE PROVIDED FOR
    • B23QDETAILS, COMPONENTS, OR ACCESSORIES FOR MACHINE TOOLS, e.g. ARRANGEMENTS FOR COPYING OR CONTROLLING; MACHINE TOOLS IN GENERAL CHARACTERISED BY THE CONSTRUCTION OF PARTICULAR DETAILS OR COMPONENTS; COMBINATIONS OR ASSOCIATIONS OF METAL-WORKING MACHINES, NOT DIRECTED TO A PARTICULAR RESULT
    • B23Q3/00Devices holding, supporting, or positioning work or tools, of a kind normally removable from the machine
    • B23Q3/15Devices for holding work using magnetic or electric force acting directly on the work
    • GPHYSICS
    • G01MEASURING; TESTING
    • G01RMEASURING ELECTRIC VARIABLES; MEASURING MAGNETIC VARIABLES
    • G01R31/00Arrangements for testing electric properties; Arrangements for locating electric faults; Arrangements for electrical testing characterised by what is being tested not provided for elsewhere
    • G01R31/01Subjecting similar articles in turn to test, e.g. "go/no-go" tests in mass production; Testing objects at points as they pass through a testing station
    • HELECTRICITY
    • H02GENERATION; CONVERSION OR DISTRIBUTION OF ELECTRIC POWER
    • H02NELECTRIC MACHINES NOT OTHERWISE PROVIDED FOR
    • H02N13/00Clutches or holding devices using electrostatic attraction, e.g. using Johnson-Rahbek effect

Landscapes

  • Engineering & Computer Science (AREA)
  • Physics & Mathematics (AREA)
  • General Physics & Mathematics (AREA)
  • Condensed Matter Physics & Semiconductors (AREA)
  • Manufacturing & Machinery (AREA)
  • Computer Hardware Design (AREA)
  • Microelectronics & Electronic Packaging (AREA)
  • Power Engineering (AREA)
  • Mechanical Engineering (AREA)
  • Container, Conveyance, Adherence, Positioning, Of Wafer (AREA)

Description

用於電氣元件的靜電吸引型檢測台 INSPECTION TABLE FOR ELECTRIC PARTSElectrostatic suction type test bench for electrical components INSPECTION TABLE FOR ELECTRIC PARTS

本發明涉及利用靜電力將放置於檢測板上向檢測位置移送中之電氣元件吸引固定之用於電氣元件的靜電吸引型檢測台,更具體而言,涉及如下之用於電氣元件的靜電吸引型檢測台,其利用使檢測板旋轉的旋轉板直接電化檢測板,從而靜電吸引放置於檢測板上表面上的電氣元件,不需要另設靜電感應裝置。The present invention relates to an electrostatic attraction type detecting station for an electric component that is attracted and fixed by an electrostatic element to be placed on a detecting plate and transferred to a detecting position, and more particularly to an electrostatic attracting type for an electric component as follows. The inspection table directly electrodesives the detection plate by a rotating plate that rotates the detection plate, thereby electrostatically attracting electrical components placed on the surface of the detection plate, and does not require an electrostatic induction device.

而且,本發明涉及如下之用於電氣元件的靜電吸引型檢測台,其通過直接塗層在上述旋轉板之外的檢測板下表面的輔助靜電感應層,輔助對放置於檢測板的上表面的電氣元件的靜電吸引,從而能夠進一步提高靜電力。Further, the present invention relates to an electrostatic attraction type detecting table for an electric component which assists an electric pair placed on an upper surface of the detecting plate by directly coating an auxiliary electrostatic sensing layer on a lower surface of the detecting plate other than the rotating plate The electrostatic attraction of the element makes it possible to further increase the electrostatic force.

另外,本發明涉及如下之用於電氣元件的靜電吸引型檢測 台,其根據檢測板的旋轉速度、及同時被移送的電氣元件數量等檢測環境,可變地分別調整供給到輔助靜電感應層的電源的大小、以及與上述輔助靜電感應層接觸並供給電源的旋轉板的大小,從而能夠以最優的條件向電氣元件施加靜電力。In addition, the present invention relates to the following electrostatic attraction type detection for electrical components The table variably adjusts the size of the power source supplied to the auxiliary electrostatic induction layer and the rotating plate that is in contact with the auxiliary electrostatic induction layer and supplies power according to the detection environment such as the rotation speed of the detection plate and the number of electrical components to be transferred at the same time. The size is such that an electrostatic force can be applied to the electrical component under optimal conditions.

通常,除了多層陶瓷電容器(Multilayer ceramic capacitor,MLCC)、電阻器、以及電感器等被動元件之外,還包括主動元件的各種電氣元件需要進行檢測已生產的電氣元件來自動地篩選及去除不良品的程序,以適應批量生產的同時還能夠減少不良率。In general, in addition to passive components such as multilayer ceramic capacitors (MLCCs), resistors, and inductors, various electrical components including active components are required to detect the manufactured electrical components to automatically screen and remove defective products. The program can be adapted to mass production while also reducing the non-performing rate.

為此使用電氣元件外觀檢測裝置,其在部件供給部向透明的檢測板(即,檢測台)上供給電氣元件,利用攝像機分別拍攝放置於旋轉中之檢測板上的電氣元件的上/下、前/後、以及左/右面,並進行分析,從而自動檢測電氣元件是否存在不良。For this purpose, an electrical component appearance detecting device is used which supplies an electrical component to a transparent detecting plate (ie, a detecting table) at a component supply portion, and photographs the upper/lower parts of the electrical component placed on the rotating detecting plate by the camera, Front/back, and left/right sides, and analyze to automatically detect the presence of electrical components.

另一方面,由於電氣元件以放置於旋轉中的檢測板上的狀態被移送到設有攝像機的檢測位置,因此若為了提高檢測效率而高速地旋 轉檢測板,則不僅會向各電氣元件施加離心力,而且還會隨著檢測板的振動而使電氣元件產生晃動。On the other hand, since the electrical component is transferred to the detection position where the camera is provided in a state of being placed on the rotating detection board, if the detection efficiency is increased, the rotation is performed at a high speed. When the detecting plate is turned, not only centrifugal force is applied to each electric component, but also the electric component is shaken with the vibration of the detecting plate.

從而,產生如下問題,即,由於電氣元件掉落到檢測板的外側而無法進行檢測,或者正常投入的電氣元件由於姿勢不良而不適合進行檢測,或者由於各電氣元件之間的間距不均勻而不能施加高壓的空氣來分別分離排出為良好或不良的電氣元件。Therefore, there arises a problem that the electrical component cannot be detected because it is dropped to the outside of the detecting plate, or the electrical component that is normally put into place is not suitable for detection due to poor posture, or cannot be detected due to uneven spacing between the electrical components. High pressure air is applied to separately separate electrical components that are discharged as good or bad.

對此,韓國公開專利第2011-59524號公報中採用了如下的技術方案,即,如第1圖所示,通過無振動部4向返送台2(即,檢測板)上投入作為檢測對象電氣元件的工件W,此時利用直流電源16向返送台2的下側分開預定距離而設置的導電板15供給電源,從而利用靜電感應來吸引固定工件W。In the above-mentioned Japanese Patent Laid-Open Publication No. 2011-59524, a technique is adopted in which the non-vibration portion 4 is placed on the returning table 2 (that is, the detecting plate) as the object to be detected. At this time, the workpiece W of the element is supplied with power by the conductive plate 15 provided by the DC power source 16 separated from the lower side of the return stage 2 by a predetermined distance, and the workpiece W is attracted and fixed by electrostatic induction.

但是,根據如上所述的現有技術,由於需要設置在返送台2產生靜電感應現象的導電板15,因此存在需要另外追加設置靜電感應裝置的問題。However, according to the prior art as described above, since it is necessary to provide the conductive plate 15 in which the electrostatic induction phenomenon is generated in the return table 2, there is a problem that it is necessary to additionally provide an electrostatic induction device.

而且,由於從返送台2的下側分開而設置了導電板15,因此作用於工件W的靜電力的大小較小,作用於返送台2的靜電力僅作用於部分區間等、靜電力不能均勻地作用於返送台2整體上,從而存在從外部施加衝擊或利用高壓空氣排出工件W時工件偏離的問題。Further, since the conductive plate 15 is provided separately from the lower side of the returning table 2, the magnitude of the electrostatic force acting on the workpiece W is small, and the electrostatic force acting on the returning table 2 acts only on a partial section or the like, and the electrostatic force is not uniform. The ground acts on the entire returning table 2, so that there is a problem that the workpiece is deviated when an impact is applied from the outside or the workpiece W is discharged by the high-pressure air.

另外,由於在返送台2的下側具備導電板15及直流電源16,因此會受到空間上的制約,從而存在難以在返送台2的下側設置用於檢測工件W的下表面的檢測用攝像機等的問題。Further, since the conductive plate 15 and the DC power source 16 are provided on the lower side of the returning table 2, there is a space constraint, and it is difficult to provide a detecting camera for detecting the lower surface of the workpiece W on the lower side of the returning table 2. Etc.

而且,根據工件W之間的間隔、或工件W的一列供給或二列供給等的差異而同時放置於返送台2上被移送的工件W數量會產生變化,且若返送台2的旋轉速度隨著檢測速度而變化,則需要隨之變化施加的靜電力的大小,以最優的狀態吸引工件W,但存在以前未能對應這種變化的問題。Further, the number of workpieces W that are simultaneously placed on the returning table 2 is changed depending on the interval between the workpieces W, or the difference in the supply of one row of the workpieces W or the supply of the two rows, and the rotational speed of the returning table 2 varies. When the detection speed changes, it is necessary to change the magnitude of the applied electrostatic force to attract the workpiece W in an optimum state, but there is a problem that the change has not been previously matched.

本發明是為了解決如上所述的問題而提出的,提供如下之 用於電氣元件的靜電吸引型檢測台,其利用使檢測板旋轉的旋轉板直接電化檢測板,從而靜電吸引放置於檢測板上表面上的電氣元件,不需要另設靜電感應裝置。The present invention has been made to solve the above problems, and provides the following An electrostatic attraction type detecting table for an electric component directly electrodesives a detecting plate by a rotating plate that rotates the detecting plate, thereby electrostatically attracting electrical components placed on the surface of the detecting plate, and does not require an electrostatic induction device.

而且,本發明提供如下之用於電氣元件的靜電吸引型檢測台,其通過直接塗層在上述旋轉板之外的檢測板下表面的輔助靜電感應層,輔助對放置於檢測板的上表面的電氣元件的靜電吸引,從而靜電力的大小較大且均勻。Moreover, the present invention provides an electrostatic attraction type detecting station for an electric component which assists an electric device placed on the upper surface of the detecting plate by directly coating an auxiliary electrostatic sensing layer on the lower surface of the detecting plate other than the above rotating plate The electrostatic attraction of the component causes the electrostatic force to be large and uniform.

另外,本發明提供如下之用於電氣元件的靜電吸引型檢測台,其根據檢測環境,可變地分別調整供給到輔助靜電感應層的電源的大小、以及與上述輔助靜電感應層接觸並供給電源的旋轉板的大小,從而能夠以最優的條件向電氣元件施加靜電力。Further, the present invention provides an electrostatic attraction type detecting station for an electric component that variably adjusts a size of a power source supplied to an auxiliary electrostatic induction layer and a rotation in contact with the auxiliary electrostatic induction layer and supplies power according to a detection environment. The size of the board is such that electrostatic forces can be applied to the electrical components under optimal conditions.

為了解決上述課題,本發明的用於電氣元件之靜電吸引型檢測台的特徵在於,包括:檢測板,其用於放置所投入的電氣元件,並由透明的材質構成;旋轉板,其使上述檢測板旋轉,並電化上述檢測板,使上述電氣元件由靜電力吸引固定在上述檢測板上;旋轉馬達,其連接於上述旋轉板的中心側,使上述檢測板旋轉;以及電源供給裝置,其向上述旋轉板供給靜電感應用電源。In order to solve the above problems, an electrostatic attraction type detecting station for an electric component according to the present invention includes: a detecting plate for placing an input electric component and being made of a transparent material; and a rotating plate which makes the above The detecting plate rotates and electrically elects the detecting plate to fix the electric component to the detecting plate by electrostatic force; a rotating motor connected to a center side of the rotating plate to rotate the detecting plate; and a power supply device A static sensitive application power source is supplied to the above rotating plate.

此時,優選還包括輔助靜電感應層,其塗層在上述檢測板的下表面,並從上述旋轉板接收靜電感應用電源,對被放置於上述檢測板上而移動的電氣元件施加靜電力。In this case, it is preferable to further include an auxiliary electrostatic induction layer which is coated on the lower surface of the detecting plate and receives a static-sensing application power source from the rotating plate, and applies an electrostatic force to the electric component moved by being placed on the detecting plate.

另外,較佳上述輔助靜電感應層是以包括放置電氣元件的檢測板的邊緣部分的方式被塗層、且由透明的材質構成的透明電極。Further, it is preferable that the auxiliary electrostatic induction layer is a transparent electrode which is coated with an edge portion of the detecting plate on which the electrical component is placed and which is made of a transparent material.

而且,較佳上述輔助靜電感應層是塗層在放置電氣元件的檢測板的除了邊緣部分的部分上、且由透明或不透明的材質構成的導電性電極。Further, it is preferable that the auxiliary electrostatic induction layer is a conductive electrode whose coating layer is formed on a portion other than the edge portion of the detecting plate on which the electric component is placed and which is made of a transparent or opaque material.

另外,較佳根據通過上述輔助靜電感應層向上述電氣元件感應的靜電力的大小調節上述旋轉板的大小。Further, it is preferable to adjust the size of the rotating plate in accordance with the magnitude of the electrostatic force induced to the electric component by the auxiliary electrostatic induction layer.

而且,較佳在上述檢測板的上表面設有與上述旋轉板一起固定上述檢測板的上部固定板。Further, it is preferable that an upper fixing plate for fixing the detecting plate together with the rotating plate is provided on an upper surface of the detecting plate.

另外,較佳上述電源供給裝置包括:用於供給靜電感應用電源的電壓產生裝置;用於傳輸電源的電壓線;設置在上述旋轉馬達的中心側的旋轉電源供給裝置;以及與旋轉板接觸並供給電源的接觸端子。Further, preferably, the power supply device includes: a voltage generating device for supplying a static-sensing application power source; a voltage line for transmitting a power source; a rotary power supply device provided at a center side of the rotary motor; and a contact with the rotating plate and supplying Contact terminal for the power supply.

而且,較佳上述電源供給裝置包括電壓調節器,該電壓調節器根據檢測環境能夠改變供給到上述輔助靜電感應層的靜電感應用電源的大小。Moreover, it is preferable that the power supply device includes a voltage regulator that can change the size of the electrostatic-sensing application power supplied to the auxiliary electrostatic induction layer in accordance with the detection environment.

根據如上所述的本發明,在利用靜電力將放置於檢測板上向檢測位置移送中的電氣元件吸引固定時,利用使檢測板旋轉的旋轉板直接電化檢測板。從而靜電吸引放置於檢測板上表面上的電氣元件,不需要另設靜電感應裝置,且在檢測板的下部設置攝像機時可以不受到空間的制約,能夠自由地設置。According to the invention as described above, when the electric component placed on the detecting plate and transferred to the detecting position is suction-fixed by the electrostatic force, the detecting plate is directly electro-oxidized by the rotating plate that rotates the detecting plate. Therefore, the electrostatic components are attracted to the electrical components placed on the surface of the detecting board, and it is not necessary to separately provide an electrostatic induction device, and the camera can be freely disposed without being restricted by space when the camera is disposed at the lower portion of the detecting plate.

而且,本發明通過塗層在檢測板下表面的輔助靜電感應層,輔助對放置於檢測板的上表面的電氣元件的靜電吸引。從而不僅可以充分地加大靜電力的大小,且提供均勻的靜電力,在檢測板的下部設置攝像機時可以不受到空間的制約,能夠自由地設置。Moreover, the present invention assists electrostatic attraction of electrical components placed on the upper surface of the test panel by coating an auxiliary electrostatic sensing layer on the lower surface of the test panel. Therefore, not only the magnitude of the electrostatic force can be sufficiently increased, but also a uniform electrostatic force can be provided, and when the camera is disposed at the lower portion of the detecting plate, it can be freely disposed without being restricted by the space.

另外,本發明根據檢測板的旋轉速度、及同時被移送的電氣元件數量等檢測環境,可變地分別調整供給到輔助靜電感應層的電源的大小、以及與上述輔助靜電感應層接觸並供給電源的旋轉板的大小。從而能夠以最優的條件向電氣元件施加靜電力。Further, according to the detection environment such as the rotation speed of the detection plate and the number of electrical components to be transferred at the same time, the present invention variably adjusts the size of the power supply supplied to the auxiliary electrostatic induction layer and the rotation of the auxiliary electrostatic induction layer and the supply of the power supply. The size of the board. Thereby, an electrostatic force can be applied to the electrical component under optimal conditions.

B‧‧‧邊緣部分B‧‧‧Edge section

C‧‧‧電氣元件C‧‧‧Electrical components

H‧‧‧組裝孔H‧‧‧Assembled holes

S1‧‧‧基板S1‧‧‧ substrate

S2‧‧‧支撐架S2‧‧‧ support frame

W‧‧‧工件W‧‧‧Workpiece

2‧‧‧返送台2‧‧‧ returning station

4‧‧‧無振動部4‧‧‧No vibration department

15‧‧‧導電板15‧‧‧ Conductive plate

16‧‧‧直流電源16‧‧‧DC power supply

100‧‧‧電氣元件的靜電吸引型檢測台100‧‧‧Electrostatic suction type test bench for electrical components

110‧‧‧檢測板110‧‧‧Test board

120、120a‧‧‧輔助靜電感應層120, 120a‧‧‧Auxiliary electrostatic induction layer

130‧‧‧旋轉馬達130‧‧‧Rotary motor

140‧‧‧電源供給裝置140‧‧‧Power supply unit

141‧‧‧電壓產生裝置141‧‧‧Voltage generating device

142‧‧‧電壓調節器142‧‧‧Voltage regulator

143‧‧‧電壓線143‧‧‧voltage line

144‧‧‧旋轉電源供給裝置144‧‧‧Rotary power supply unit

145‧‧‧接觸端子145‧‧‧Contact terminal

150‧‧‧支撐部150‧‧‧Support

151、151a‧‧‧旋轉板151, 151a‧‧‧ rotating plate

152、152a‧‧‧上部固定板152, 152a‧‧‧ upper fixed plate

153‧‧‧連接塊153‧‧‧Connection block

154‧‧‧絕緣層154‧‧‧Insulation

第1圖是表示現有技術靜電吸引型檢測台的局部剖視圖;第2圖是表示本發明第一實施例之用於電氣元件之靜電吸引型檢測台的局部立體圖;第3圖是表示本發明第一實施例之用於電氣元件之靜電吸引型檢測台的立體圖;第4圖是表示本發明第一實施例之用於電氣元件之靜電吸引型檢測台的剖視圖; 第5圖是表示本發明第一實施例之用於電氣元件之靜電吸引型檢測台的檢測板的立體圖;第6圖是表示本發明第二實施例之用於電氣元件之靜電吸引型檢測台的剖切立體圖;第7圖是表示本發明第二實施例之用於電氣元件之靜電吸引型檢測台的檢測板的立體圖;以及第8圖是表示本發明第二實施例之用於電氣元件之靜電吸引型檢測台的剖視圖。1 is a partial cross-sectional view showing a conventional electrostatic attraction type inspection table; FIG. 2 is a partial perspective view showing an electrostatic attraction type detection table for an electric component according to a first embodiment of the present invention; and FIG. 3 is a view showing the present invention. Fig. 4 is a perspective view showing an electrostatic attraction type detecting table for an electric component according to a first embodiment of the present invention; and Fig. 4 is a cross-sectional view showing an electrostatic attraction type detecting table for an electric component according to a first embodiment of the present invention; 5 is a perspective view showing a detecting plate of an electrostatic attraction type detecting table for an electric component according to a first embodiment of the present invention; and FIG. 6 is a view showing an electrostatic attracting type detecting table for an electric component according to a second embodiment of the present invention. Fig. 7 is a perspective view showing a detecting plate of an electrostatic attraction type detecting table for an electric component according to a second embodiment of the present invention; and Fig. 8 is a view showing a second embodiment of the present invention for an electric component A cross-sectional view of an electrostatic attraction type inspection station.

下面,參照所附圖式詳細說明本發明較佳實施例之用於電氣元件的靜電吸引型檢測台。Hereinafter, an electrostatic attraction type detecting stage for an electric component according to a preferred embodiment of the present invention will be described in detail with reference to the accompanying drawings.

首先,如第2圖所示,本發明第一實施例之用於電氣元件的靜電吸引型檢測台100通過線路供給裝置F(line feeder)等投入裝置接收例如多層式陶瓷電容器(MLCC)等的各種電氣元件C,並進行移送的同時,以拍攝電氣元件C的各面而進行分析的方式檢測良好與否,並且能夠根據檢測結果而分離排出。First, as shown in Fig. 2, the electrostatic attraction type detecting stage 100 for an electric component according to the first embodiment of the present invention receives, for example, a multilayer ceramic capacitor (MLCC) or the like by an input device such as a line feeder F (line feeder). The various electric components C are conveyed and detected while photographing the respective faces of the electric component C, and can be separated and discharged according to the detection result.

此時,如第3圖及第4圖所示,本發明用於電氣元件的靜電吸引型檢測台100包括:檢測板110,其將投入到上表面的電氣元件C旋轉並使其移動到檢測位置;支撐部150,其具有旋轉板151,該旋轉板151支撐上述檢測板110的同時電化檢測板110,使電氣元件C吸引固定在檢測板110上;以及旋轉馬達130,其使上述支撐部150旋轉。At this time, as shown in FIGS. 3 and 4, the electrostatic attraction type detecting stage 100 for an electric component of the present invention includes a detecting board 110 that rotates and moves the electric component C thrown to the upper surface to the detection. a support portion 150 having a rotating plate 151 that supports the detecting plate 110 while electrically detecting the detecting plate 110, causing the electric component C to be attracted and fixed to the detecting plate 110, and a rotating motor 130 that causes the supporting portion 150 rotations.

另外,包括向旋轉板151供給靜電感應用電源的電源供給裝置140,根據需要還包括輔助靜電感應層120,其塗層在檢測板110的下表面,並輔助對被放置於檢測板110上的電氣元件C施加靜電力。Further, a power supply device 140 including a static-sensing application power supply to the rotating plate 151 is further included, as needed, an auxiliary electrostatic induction layer 120 coated on the lower surface of the detecting plate 110 and assisting the electrical components placed on the detecting plate 110. C applies an electrostatic force.

作為本發明之用於電氣元件的靜電吸引型檢測台100的一個範例,通常設置於基板S1及固定於上述基板S1的支撐架S2上,但也可以使用除此之外的其他結構的支撐部件。As an example of the electrostatic attraction type detecting stage 100 for an electric component of the present invention, it is usually provided on the substrate S1 and the support frame S2 fixed to the substrate S1, but other supporting members other than the above may be used. .

根據如上所述的結構,若電氣元件C以一定的間隔投入到檢測板110上,則被支撐部150支撐的檢測板110由旋轉馬達130而旋轉, 從而將電氣元件C移送到設置有攝像機的檢測位置。According to the configuration described above, when the electric component C is thrown into the detecting plate 110 at a constant interval, the detecting plate 110 supported by the supporting portion 150 is rotated by the rotary motor 130. Thereby, the electrical component C is transferred to the detection position where the camera is provided.

此時,由於利用由電源供給裝置140供給了電源的旋轉板151電化檢測板110,因此不需要另設靜電感應裝置,可以僅利用穩定地支撐檢測板110的支撐部150便能夠吸引固定電氣元件C。At this time, since the detecting plate 110 is electrically operated by the rotating plate 151 supplied with the power source by the power supply device 140, it is not necessary to separately provide an electrostatic induction device, and the electric component C can be attracted and fixed only by the support portion 150 that stably supports the detecting plate 110. .

而且,根據需要還可以進一步具備通過旋轉板151接收了靜電感應用電源的輔助靜電感應層120,從而電化檢測板110引發靜電感應現象,能夠以更大的靜電力吸引固定電氣元件C。Further, if necessary, the auxiliary electrostatic induction layer 120 that receives the electrostatic-sensing application power source through the rotating plate 151 can be further provided, whereby the electrochemical detection plate 110 induces an electrostatic induction phenomenon, and the electric component C can be attracted and fixed with a larger electrostatic force.

從而,以前是需要另外具備用於產生靜電感應現象之相當於靜電感應裝置的導電板15,與此相比,本發明將穩定地支撐檢測板110的支撐部150的旋轉板151作為靜電感應裝置而使用,因此不需要另外的靜電感應裝置。Therefore, in the past, it is necessary to additionally provide the conductive plate 15 corresponding to the electrostatic induction device for generating an electrostatic induction phenomenon, and the present invention uses the rotary plate 151 which stably supports the support portion 150 of the detection plate 110 as an electrostatic induction device. Therefore no additional electrostatic induction device is required.

而且,以前導電板15從返送台2的下側隔開而設置,因此作用於工件W的靜電力小,且不均勻,與此相比,由於在本發明由旋轉板151及輔助靜電感應層120電化檢測板110,因此靜電力大,且均勻。Further, since the conductive plates 15 are previously spaced apart from the lower side of the returning table 2, the electrostatic force acting on the workpiece W is small and uneven, compared to the rotating plate 151 and the auxiliary electrostatic sensing layer 120 in the present invention. The detection board 110 is electrochemically detected, so that the electrostatic force is large and uniform.

另外,以前由於需要在返送台2的下側設置導電板15及直流電源16,因此受到了空間上的制約,難以在返送台2的下側設置檢測用攝像機等。但是,在本發明將旋轉板151作為靜電感應裝置而使用,且電源供給裝置150也是通過旋轉馬達130的中心側連接於輔助靜電感應層120,因此設置檢測用攝像機等時不受到空間上的制約。In addition, since it is necessary to provide the conductive plate 15 and the DC power source 16 on the lower side of the return table 2, space constraints are imposed, and it is difficult to provide a detection camera or the like on the lower side of the return table 2. However, in the present invention, the rotary plate 151 is used as a static induction device, and the power supply device 150 is also connected to the auxiliary electrostatic induction layer 120 by the center side of the rotary motor 130. Therefore, when the detection camera or the like is installed, it is not subject to space constraints.

並且,即使具備輔助靜電感應層120,由於輔助靜電感應層120一體地塗層在檢測板110的下表面,因此不會受到空間上的制約。Further, even if the auxiliary electrostatic induction layer 120 is provided, since the auxiliary electrostatic induction layer 120 is integrally coated on the lower surface of the detecting plate 110, it is not subject to space constraints.

另外,以前,即使同時放置於返送台2上被移送的工件W數量變化或返送台2的旋轉速度隨著檢測速度而變化,一直供給了相同大小的靜電力。但是,在本發明,若電氣元件C的數量或檢測板110的旋轉速度變化,則如在後所詳細說明,通過最優地改變供給電源的大小及旋轉板151的大小,從而能夠以最優的狀態吸引電氣元件C。Further, conventionally, even if the number of workpieces W placed on the return table 2 is changed or the rotation speed of the return table 2 changes in accordance with the detection speed, the same amount of electrostatic force is always supplied. However, in the present invention, if the number of electric components C or the rotational speed of the detecting plate 110 is changed, as will be described in detail later, the size of the power supply and the size of the rotating plate 151 can be optimally changed, thereby being optimal. The state attracts the electrical component C.

更具體而言,檢測板110由透明材質構成,投入的電氣元件C被放置也可以通過透明的檢測板110的下表面拍攝電氣元件C的下面,從而進行檢測。當然,除此之外的其他面也可以利用設置在各自所需位置的攝像機進行檢測。More specifically, the detecting plate 110 is made of a transparent material, and the input electric component C is placed, and the lower surface of the transparent detecting plate 110 can be photographed under the electric component C to be detected. Of course, other planes other than this can also be detected by cameras provided at their respective desired positions.

這種檢測板110通常由玻璃材質構成,但是並不限定於此,只要是能夠電化而可靜電感應,則也可以使用例如透明的塑膠等各種材質。Such a detecting plate 110 is usually made of a glass material, but is not limited thereto. Any material such as a transparent plastic may be used as long as it can be electrochemically charged and electrostatically sensitive.

輔助靜電感應層120用於通過電化檢測板110而輔助產生靜電感應現象,直接塗層在檢測板110的下表面。尤其是,如第5圖所示,在以包括放置電氣元件C的檢測板110的邊緣部分B的方式塗層的情況下,作為輔助靜電感應層120使用透明材質構成的“透明電極”。The auxiliary electrostatic induction layer 120 is used to assist in generating an electrostatic induction phenomenon by electrochemically detecting the plate 110, and is directly coated on the lower surface of the detection plate 110. In particular, as shown in FIG. 5, in the case of coating the edge portion B including the detecting plate 110 on which the electrical component C is placed, a "transparent electrode" made of a transparent material is used as the auxiliary electrostatic sensing layer 120.

由於只需要以包含放置電氣元件C的檢測板110的邊緣部分B的方式進行塗層,因此,可以如第5圖所示包含檢測板110的邊緣部分B而塗層在檢測板110的下表面的整體上,但除此之外也可以從檢測板110的邊緣部分B向內側塗層至一定部分。Since it is only necessary to perform coating in a manner including the edge portion B of the detecting plate 110 on which the electrical component C is placed, the edge portion B of the detecting plate 110 may be included as shown in FIG. 5 to be coated on the lower surface of the detecting plate 110. Overall, but in addition to this, it is also possible to coat from the edge portion B of the detecting plate 110 to the inner side to a certain portion.

由於這種輔助靜電感應層120由導電性材質構成,若從電源供給裝置140施加(+)或(-)電源,則會電化檢測板110。從而,放置於檢測板110上的電氣元件C由靜電力被吸引固定,因此即使施加離心力或振動,也能夠克服其力,保持電氣元件C的姿勢。Since the auxiliary electrostatic induction layer 120 is made of a conductive material, when the (+) or (-) power source is applied from the power supply device 140, the detection board 110 is electrified. Therefore, the electric component C placed on the detecting plate 110 is attracted and fixed by the electrostatic force, so that even if centrifugal force or vibration is applied, the force can be overcome and the posture of the electric component C can be maintained.

作為一例,若通過旋轉板151向輔助靜電感應層120施加(+)電源,則在檢測板110的下側配置(-)電荷,在檢測板110的上側配置(+)電荷。從而,由於靜電感應,在電氣元件C的下側配置(-)電荷,在電氣元件C的上側配置(+)電荷,從而電氣元件C吸引在檢測板110。As an example, when a (+) power supply is applied to the auxiliary electrostatic induction layer 120 by the rotating plate 151, (-) electric charge is placed on the lower side of the detecting plate 110, and (+) electric charge is placed on the upper side of the detecting plate 110. Therefore, due to electrostatic induction, (-) electric charge is disposed on the lower side of the electric component C, and (+) electric charge is placed on the upper side of the electric component C, so that the electric component C is attracted to the detecting plate 110.

而且,由於作為輔助靜電感應層120的透明電極由透明的材質構成,因此,即使以包含檢測板110下表面中的邊緣部分B的方式進行塗層,層疊的檢測板110和輔助靜電感應層120整體是透明的。從而在檢測板110的下側利用攝像機拍攝放置於檢測板110的上表面的電氣元件C並檢測電氣元件C的下面。Further, since the transparent electrode as the auxiliary electrostatic induction layer 120 is made of a transparent material, even if the coating is performed so as to include the edge portion B in the lower surface of the detecting plate 110, the laminated detecting plate 110 and the auxiliary electrostatic sensing layer 120 as a whole are transparent. Thereby, the electric component C placed on the upper surface of the detecting board 110 is photographed by the camera on the lower side of the detecting board 110 and the lower surface of the electric component C is detected.

在第5圖中為了表示輔助靜電感應層120的塗層位置,在圖中將輔助靜電感應層120表示為有色,但實際上是透明的,且作為輔助靜電感應層120的透明電極可以使用ITO(Indium Tin Oxide)、透明石墨烯(graphene)、SnO2 (tin oxide)、ZnO(zinc oxide)、以及透明奈米碳管等各種材質。In order to show the coating position of the auxiliary electrostatic sensing layer 120 in FIG. 5, the auxiliary electrostatic sensing layer 120 is shown as colored in the drawing, but is actually transparent, and ITO (Indium Tin) can be used as the transparent electrode of the auxiliary electrostatic sensing layer 120. Various materials such as Oxide), graphene, SnO 2 (tin oxide), ZnO (zinc oxide), and transparent carbon nanotubes.

但是,雖然在上面表述為輔助靜電感應層120被塗層在檢 測板110,但是“塗層”不僅指直接塗層在檢測板110的下表面,還包括在檢測板110的下表面塗敷透明電極的方式或利用透明黏接劑將另外準備的透明電極層黏接在檢測板110的下表面的方式。However, although it is stated above that the auxiliary electrostatic induction layer 120 is coated, The test plate 110, but the "coating" refers not only to the direct coating on the lower surface of the detecting plate 110, but also to a method of applying a transparent electrode on the lower surface of the detecting plate 110 or a separately prepared transparent electrode layer using a transparent adhesive. The manner of bonding to the lower surface of the detecting plate 110.

旋轉馬達130用於旋轉檢測板110,在本發明,旋轉馬達130的旋轉軸連接於旋轉板151的中心部,檢測板110固定於旋轉板151,因此,利用該旋轉馬達130使旋轉板151旋轉時,檢測板110也會一起旋轉。The rotation motor 130 is used to rotate the detection plate 110. In the present invention, the rotation shaft of the rotation motor 130 is coupled to the center portion of the rotary plate 151, and the detection plate 110 is fixed to the rotary plate 151. Therefore, the rotary plate 151 is rotated by the rotary motor 130. When the detection board 110 is also rotated together.

作為這種旋轉馬達130的一例,使用噪音、振動、以及用電量小的直接驅動馬達(direct drive motor),由微處理器調節旋轉馬達130的動作速度,從而可以根據監測速度來變化檢測板110的旋轉速度。As an example of such a rotary motor 130, a direct drive motor with a small amount of electric power is used, and the operating speed of the rotary motor 130 is adjusted by the microprocessor, so that the detection plate can be changed according to the monitoring speed. The rotational speed of 110.

即,在要通過提高檢測速度來提高檢測效率時,控制成提高旋轉馬達130的動作速度,相反地,要通過降低檢測速度來提高檢測精度時,控制成降低旋轉馬達130的動作速度。In other words, when the detection efficiency is to be increased by increasing the detection speed, the operation speed of the rotary motor 130 is controlled to be increased. Conversely, when the detection accuracy is lowered by reducing the detection speed, the operation speed of the rotary motor 130 is controlled to be lowered.

檢測可以採用如下的方式,即,以設定的間距及一列或兩列等向檢測板110供給電氣元件C後,利用檢測攝像機拍攝放置於檢測板110上被移送的電氣元件C。根據檢測結果,利用高壓空氣分別噴射判斷出其優良與否的電氣元件,分離排出到收集筒。The detection may be such that the electrical component C is supplied to the detecting plate 110 at a set pitch and one or two columns, and then the electrical component C placed on the detecting plate 110 is captured by the detecting camera. According to the detection result, the electric components which are judged to be excellent or not by the high-pressure air are separately ejected and separated and discharged to the collecting cylinder.

電源供給裝置140用於向旋轉板151供給(+)或(-)的靜電感應用電源,只要能夠與旋轉板151接觸並供給靜電感應用電源,對其結構沒有特別的限制,作為一例包括:例如靜電卡盤(Electro Static Chuck,ESC)等的電壓產生裝置141;調節上述電壓產生裝置141的供給電源的大小的電壓調節器142;電壓線143;旋轉電源供給裝置144;以及與輔助靜電感應層120接觸並供給電源的接觸端子145。The power supply device 140 is for supplying a (+) or (-) electrostatic-sensing application power to the rotating plate 151, and is not particularly limited as long as it can be in contact with the rotating plate 151 and supplied with a static-sensing application power source, and includes, for example, static electricity. a voltage generating device 141 such as a chuck (Electro Static Chuck, ESC); a voltage regulator 142 that adjusts the magnitude of the power supply of the voltage generating device 141; a voltage line 143; a rotary power supply device 144; and a contact with the auxiliary electrostatic sensing layer 120 And the contact terminal 145 of the power supply is supplied.

其中,旋轉電源供給裝置144作為一例可以使用滑動環(slip ring),以往滑動環被用作為了使電流從外部向發動機的轉子流動而設在轉子軸上的接觸端子,通過將此適用於本發明,可以貫通旋轉馬達130的旋轉中心軸將電源供給到旋轉板151。In addition, the rotary power supply device 144 can use a slip ring as an example, and the conventional slip ring is used as a contact terminal provided on the rotor shaft for flowing a current from the outside to the rotor of the engine, and this is applied to this. According to the invention, the power source can be supplied to the rotating plate 151 through the rotation center axis of the rotary motor 130.

從而,若從電壓產生裝置141施加高電壓,則通過電壓線143施加到旋轉電源供給裝置144,施加到旋轉電源供給裝置144的高電壓通過接觸端子145供給到旋轉板151。並且,在包括輔助靜電感應層120的 情況下,通過旋轉板151傳遞到輔助靜電感應層120,由此可以將此用作靜電感應用電源。Therefore, when a high voltage is applied from the voltage generating device 141, it is applied to the rotary power supply device 144 via the voltage line 143, and the high voltage applied to the rotary power supply device 144 is supplied to the rotary plate 151 through the contact terminal 145. And, including the auxiliary electrostatic induction layer 120 In this case, it is transmitted to the auxiliary electrostatic induction layer 120 through the rotating plate 151, whereby this can be used as a static-sensing application power source.

尤其是,由於在電壓產生裝置141設有電壓調節器142,因此若電氣元件C的數量隨著投入到檢測板110上的電氣元件C的間距及一列或兩列供給而變化,則靜電感應用電源的大小也可以隨之作出適應性調節。從而,可以對各電氣元件C施加最優大小的靜電力。In particular, since the voltage regulator 141 is provided in the voltage generating device 141, if the number of the electrical components C varies depending on the pitch of the electrical components C and the one or two columns supplied to the detecting board 110, the electrostatic power source is applied. The size can also be adjusted accordingly. Thereby, an electrostatic force of an optimum magnitude can be applied to each of the electric components C.

當然,為了調節檢測速度,隨著調節檢測板110的速度,離心力的大小或振動的大小變化時,可以對應於此適應性地調節靜電幹應用電源的大小。例如,若提高檢測板110的旋轉速度,則作用於電氣元件C的離心力及振動也會變大,因此可以增加供給電源的大小,從而以充分的靜電力固定電氣元件C。Of course, in order to adjust the detection speed, as the speed of the detection plate 110 is adjusted, the magnitude of the centrifugal force or the magnitude of the vibration changes, the size of the electrostatic dry application power source can be adaptively adjusted accordingly. For example, when the rotation speed of the detecting plate 110 is increased, the centrifugal force and vibration acting on the electric component C are also increased. Therefore, the size of the power supply can be increased, and the electric component C can be fixed with a sufficient electrostatic force.

但是,雖然在第4圖中作為電壓調節器142例舉了按鈕式調節器,但本發明不限定於此,也可以使用通過感應到投入的電氣元件C的數量及檢測板110的旋轉速度而自動地調節電壓的微處理器等。However, although the push button type adjuster is exemplified as the voltage regulator 142 in FIG. 4, the present invention is not limited thereto, and the number of electric components C that are input by induction and the rotational speed of the detecting plate 110 may be used. A microprocessor or the like that automatically adjusts the voltage.

支撐部150包括:在下側固定檢測板110的旋轉板151;在上側固定檢測板110的上部固定板152;相互組裝上述旋轉板151和上部固定板152的連接塊153;以及插入到旋轉板151與旋轉馬達130之間的絕緣層154。The support portion 150 includes: a rotary plate 151 that fixes the detection plate 110 on the lower side; an upper fixed plate 152 that fixes the detection plate 110 on the upper side; a connection block 153 that mutually assembles the above-described rotary plate 151 and the upper fixed plate 152; and is inserted into the rotary plate 151 An insulating layer 154 with the rotating motor 130.

旋轉板151以支撐塗層有輔助靜電感應層120的檢測板110的下表面的方式水平地設置在檢測板110的下部,並與旋轉馬達130連接。從而,與旋轉馬達130的動作速度同步地使檢測板110旋轉。The rotary plate 151 is horizontally disposed at a lower portion of the detection plate 110 in a manner of supporting a lower surface of the detection plate 110 coated with the auxiliary electrostatic induction layer 120, and is coupled to the rotary motor 130. Thereby, the detecting plate 110 is rotated in synchronization with the operating speed of the rotary motor 130.

而且,旋轉板151由導電性材質構成,並且與接觸端子145電連接。從而,利用通過接觸端子145供給的靜電感應用電源電化檢測板110,使由靜電感應現象引起的靜電力作用於放置在檢測板110上的電氣元件C。Further, the rotating plate 151 is made of a conductive material and is electrically connected to the contact terminal 145. Therefore, the power source electrochemical detecting plate 110 is applied by the electrostatic sensation supplied through the contact terminal 145, and the electrostatic force caused by the electrostatic induction phenomenon acts on the electric component C placed on the detecting board 110.

但是,旋轉板151的大小較佳能夠根據如第8圖所示通過輔助靜電感應層120感應到電氣元件C的靜電力的大小來調節,將在下面對此進行更詳細的說明。However, the size of the rotating plate 151 can preferably be adjusted according to the magnitude of the electrostatic force induced to the electric component C by the auxiliary electrostatic sensing layer 120 as shown in Fig. 8, which will be described in more detail below.

由於上部固定板152水平地設置在檢測板110的上表面,因此在組裝時,對檢測板110的上表面加壓的同時進行固定,且由於由非 導電性材質構成,因此不會被接觸端子145電化。Since the upper fixing plate 152 is horizontally disposed on the upper surface of the detecting plate 110, at the time of assembly, the upper surface of the detecting plate 110 is pressed while being fixed, and Since it is made of a conductive material, it is not electrically connected to the contact terminal 145.

由於連接塊153貫通上部固定板152、檢測板110、以及旋轉板151而組裝,因此上部固定板152與旋轉板151對插入兩者之間的檢測板110加壓的同時進行固定。從而在高速旋轉時也能夠防止檢測板110的振動,保障穩定的旋轉。Since the connection block 153 is assembled through the upper fixing plate 152, the detection plate 110, and the rotating plate 151, the upper fixing plate 152 and the rotating plate 151 are fixed while being pressed by the detection plate 110 inserted therebetween. Therefore, it is possible to prevent the vibration of the detecting plate 110 at the time of high-speed rotation, and to ensure stable rotation.

如第5圖所示,在檢測板110的中心部形成有組裝孔H,這種組裝孔H還分別形成於上部固定板152以及旋轉板151,因此可以將連接塊153插入組裝孔H來進行組裝。As shown in FIG. 5, an assembly hole H is formed in the center portion of the detecting plate 110. The assembly hole H is also formed in the upper fixing plate 152 and the rotating plate 151, respectively, so that the connecting block 153 can be inserted into the assembly hole H. Assembly.

絕緣層154插入旋轉板151和旋轉馬達130之間,作用為絕緣體,因此,即使通過接觸端子145向旋轉板151供給電源,配置在旋轉板151的下側的旋轉馬達130上也不會有電流流動。The insulating layer 154 is inserted between the rotary plate 151 and the rotary motor 130 to function as an insulator. Therefore, even if power is supplied to the rotary plate 151 through the contact terminal 145, no current is applied to the rotary motor 130 disposed on the lower side of the rotary plate 151. flow.

下面,參照附圖詳細說明本發明第二實施例之用於電氣元件的靜電吸引型檢測台。Hereinafter, an electrostatic attraction type detecting stage for an electric component according to a second embodiment of the present invention will be described in detail with reference to the accompanying drawings.

在上面說明的本發明的第一實施例,由於在檢測板110的下表面邊緣部分B也塗層有輔助靜電感應層120,因此作為輔助靜電感應層120需要使用透明的電極(即,“透明電極”)。In the first embodiment of the present invention described above, since the auxiliary electrostatic sensing layer 120 is also coated on the lower surface edge portion B of the detecting plate 110, it is necessary to use a transparent electrode (i.e., "transparent electrode" as the auxiliary electrostatic sensing layer 120. ).

但是,本發明的第二實施例的區別點在於,由於在檢測板110的邊緣部分B未塗層有輔助靜電感應層120,因此不需要必須使用透明的電極,只要是“導電性電極”即可。However, the second embodiment of the present invention is different in that since the auxiliary electrostatic sensing layer 120 is not coated on the edge portion B of the detecting plate 110, it is not necessary to use a transparent electrode as long as it is a "conductive electrode". .

即,如第6圖所示,本發明的靜電感應吸引型電氣元件檢測台包括:將電氣元件C旋轉移動到檢測位置的檢測板110;向電氣元件C施加靜電力的輔助靜電感應層120a;支撐檢測板110的支撐部150;通過上述支撐部150使檢測板110旋轉的旋轉馬達130;以及向輔助靜電感應層120a供給靜電感應用電源的電源供給裝置140。That is, as shown in Fig. 6, the electrostatic induction suction type electric component inspection table of the present invention includes: a detection plate 110 that rotationally moves the electric component C to the detection position; an auxiliary electrostatic induction layer 120a that applies an electrostatic force to the electric component C; and support detection The support portion 150 of the plate 110; the rotary motor 130 that rotates the detection plate 110 by the support portion 150; and the power supply device 140 that supplies the electrostatic induction application power to the auxiliary electrostatic induction layer 120a.

而且,支撐部150包括旋轉板151、上部固定板152、連接塊153、以及絕緣層154,電源供給裝置140包括電壓產生裝置141、電壓調節器142、電壓線143、旋轉電源供給裝置144、以及接觸端子145,通過這些結構向放置於檢測板110上的電氣元件C施加靜電力而吸引固定電氣元件C的原理與上述的本發明的第一實施例相同。Moreover, the support portion 150 includes a rotating plate 151, an upper fixing plate 152, a connection block 153, and an insulating layer 154, and the power supply device 140 includes a voltage generating device 141, a voltage regulator 142, a voltage line 143, a rotary power supply device 144, and The principle in which the contact terminal 145 applies an electrostatic force to the electric component C placed on the detecting board 110 by these structures to attract the fixed electric component C is the same as that of the first embodiment of the present invention described above.

但是,在本發明的第二實施例,如第7圖所示只在檢測板 110中除了放置電氣元件C的邊緣部分B以外的部分塗層有輔助靜電感應層120a。However, in the second embodiment of the present invention, as shown in Fig. 7, only in the detection board A portion of the coating other than the edge portion B on which the electrical component C is placed in the 110 has an auxiliary electrostatic sensing layer 120a.

從而,由於通過透明的檢測板110的下側能夠直接看到電氣元件C,因此與輔助靜電感應層120a的材質是否透明無關,使用了只要是導電性材質就可以的“導電性電極”。Therefore, since the electrical component C can be directly seen through the lower side of the transparent detecting plate 110, regardless of whether or not the material of the auxiliary electrostatic sensing layer 120a is transparent, a "conductive electrode" which is a conductive material can be used.

在作為輔助靜電感應層120a的導電性電極是透明的材質的情況下,如上所述,可以使用ITO、透明石墨烯、SnO2 、ZnO、以及透明奈米碳管等,在不透明的情況下,可以使用銅箔等。In the case where the conductive electrode as the auxiliary electrostatic induction layer 120a is a transparent material, as described above, ITO, transparent graphene, SnO 2 , ZnO, a transparent carbon nanotube, or the like can be used, and in the case of opacity, Use copper foil, etc.

即使,在除了檢測板110的邊緣部分B,實施導電性電極的塗層,也可以充分地電化至檢測板110的未塗層有導電性電極的邊緣部分B,因此利用導電性電極也可以在電氣元件C產生靜電感應現象,以靜電力吸引電氣元件C。Even in the edge portion B of the detecting plate 110, the coating layer on which the conductive electrode is applied can be sufficiently electrically ionized to the edge portion B of the detecting plate 110 which is not coated with the conductive electrode, so that the conductive electrode can also be used. The electrical component C generates an electrostatic induction phenomenon and attracts the electrical component C with an electrostatic force.

下面,參照附圖說明本發明第三實施例之用於電氣元件的靜電吸引型檢測台。Next, an electrostatic attraction type detecting stage for an electric component according to a third embodiment of the present invention will be described with reference to the drawings.

本發明的第三實施例的區別在於,根據靜電感應用電源的大小,將旋轉板151a的大小調節為最優的狀態而進行設置。The third embodiment of the present invention differs in that the size of the rotating plate 151a is adjusted to an optimum state in accordance with the size of the electrostatic power application power source.

即,如第8圖所示,本發明用於電氣元件的靜電吸引型檢測台包括檢測板110、輔助靜電感應層120、支撐部150、旋轉馬達130、以及電源供給裝置140。That is, as shown in Fig. 8, the electrostatic attraction type detecting stage for an electric component of the present invention includes a detecting board 110, an auxiliary electrostatic sensing layer 120, a supporting portion 150, a rotary motor 130, and a power supply device 140.

而且,支撐部150包括旋轉板151a、上部固定板152a、連接塊153、以及絕緣層154,電源供給裝置140包括電壓產生裝置141、電壓調節器142、電壓線143、旋轉電源供給裝置144、以及接觸端子145。Moreover, the support portion 150 includes a rotating plate 151a, an upper fixing plate 152a, a connection block 153, and an insulating layer 154, and the power supply device 140 includes a voltage generating device 141, a voltage regulator 142, a voltage line 143, a rotary power supply device 144, and Contact terminal 145.

此時,在本發明的第三實施例,根據感應到電氣元件C的靜電力的大小,調節直接電化檢測板110或通過輔助靜電感應層120來電化檢測板110的旋轉板151a的大小(尤其是直徑)而製作後進行組裝。At this time, in the third embodiment of the present invention, the size of the rotating plate 151a of the detecting board 110 is adjusted by the direct electrochemical detection board 110 or by the auxiliary electrostatic sensing layer 120 according to the magnitude of the electrostatic force induced to the electric component C (especially The diameter is manufactured and assembled.

從而,若同時移送中的電氣元件C的數量隨著電氣元件C供給的間距變窄或同時以兩列進行供給而增加或隨著提高檢測板110的旋轉速度而導致離心力變大,則通過使用大小相對較大的旋轉板151a,能夠提高靜電力。Therefore, if the number of electric components C being simultaneously transferred is increased as the pitch supplied from the electric component C is narrowed or supplied in two rows at the same time or the centrifugal force is increased as the rotational speed of the detecting plate 110 is increased, the use is made. The rotating plate 151a having a relatively large size can increase the electrostatic force.

第8圖中舉的例子是由於旋轉板151a的大小充分地大而即 使不具備輔助靜電感應層120也可以充分地電化檢測板110整體,因此不具備輔助靜電感應層120的情況,但選擇性地進一步具備輔助靜電感應層120是顯而易知的。The example given in Fig. 8 is because the size of the rotating plate 151a is sufficiently large, that is, Although the entire detection board 110 can be sufficiently electrically provided without the auxiliary electrostatic induction layer 120, the auxiliary electrostatic induction layer 120 is not provided. However, it is obvious that the auxiliary electrostatic induction layer 120 is selectively provided.

相反,在需要縮小靜電力的情況下,可以通過使用大小相對較小的旋轉板151a,僅利用旋轉板151a電化檢測板110,如果是選擇性地具備了輔助靜電感應層120的情況,則可以通過減小來自輔助靜電感應層120的靜電力來防止電力浪費,可以最小化對周邊裝置的影響。On the contrary, in the case where it is necessary to reduce the electrostatic force, the detecting plate 110 can be made only by the rotating plate 151a by using the rotating plate 151a having a relatively small size, and if the auxiliary electrostatic sensing layer 120 is selectively provided, it can pass The electrostatic force from the auxiliary electrostatic induction layer 120 is reduced to prevent power waste, and the influence on peripheral devices can be minimized.

當然,若增大或縮小旋轉板151a,則較佳與之相對應地調節上部固定板152的大小。Of course, if the rotating plate 151a is increased or decreased, the size of the upper fixing plate 152 is preferably adjusted correspondingly.

以上,詳細說明了本發明的特定實施例。但,在本技術領域具有通常的知識的人員清楚,本發明的思想及範圍不限定於這些特定實施例,在不變更本發明的要旨的範圍內,可以進行多種修改及變形。The specific embodiments of the present invention have been described in detail above. However, it is apparent to those skilled in the art that the present invention is not limited to the specific embodiments, and various modifications and changes can be made without departing from the spirit and scope of the invention.

從而,以上敍述的實施例是為了向在本發明所屬的技術領域具有通常的知識的人員完全地告知發明的範疇而提供的,在所有方面只不過是示例,而不是限定性的,本發明應由申請專利範圍的範圍來定義。Therefore, the embodiments described above are provided to fully disclose the scope of the invention to those having ordinary knowledge in the technical field to which the present invention pertains, and are merely exemplary in all aspects, and not limiting, the present invention should It is defined by the scope of the patent application scope.

100‧‧‧電氣元件的靜電吸引型檢測台100‧‧‧Electrostatic suction type test bench for electrical components

110‧‧‧檢測板110‧‧‧Test board

130‧‧‧旋轉馬達130‧‧‧Rotary motor

145‧‧‧接觸端子145‧‧‧Contact terminal

150‧‧‧支撐部150‧‧‧Support

151‧‧‧旋轉板151‧‧‧Rotating plate

152‧‧‧上部固定板152‧‧‧Upper fixed plate

153‧‧‧連接塊153‧‧‧Connection block

Claims (7)

一種用於電氣元件的靜電吸引型檢測台,包括:一檢測板,其用於放置所投入的電氣元件,並由一透明的材質構成;一旋轉板,其使該檢測板旋轉,並電化該檢測板,使該電氣元件由靜電力吸引而固定在該檢測板上;一旋轉馬達,其連接於該旋轉板的一中心側,使該檢測板旋轉;一電源供給裝置,其向上述旋轉板供給一靜電感應用電源;以及一輔助靜電感應層,其塗層在該檢測板的一下表面,並從該旋轉板接收該靜電感應用電源,對被放置於該檢測板上而移動的該電氣元件施加靜電力。 An electrostatic attraction type inspection table for an electrical component, comprising: a detection plate for placing an input electrical component and being composed of a transparent material; a rotating plate that rotates the detection plate and electrifies the electrical component Detecting the board, the electric component is attracted to the detecting board by electrostatic force; a rotating motor is connected to a center side of the rotating board to rotate the detecting board; and a power supply device to the rotating board Supplying a static-sensing application power source; and an auxiliary electrostatic induction layer coated on a lower surface of the detecting board, and receiving the static-sensing application power source from the rotating board, applying static electricity to the electrical component moved by being placed on the detecting board force. 依據申請專利範圍第1項所述之用於電氣元件的靜電吸引型檢測台,上述輔助靜電感應層是以包括放置該電氣元件的該檢測板的一邊緣部分的方式被塗層,並且該輔助靜電感應層係由一透明的材質構成的一透明電極。 According to the electrostatic attraction type detecting station for an electric component described in claim 1, the auxiliary electrostatic sensing layer is coated in such a manner as to include an edge portion of the detecting plate on which the electrical component is placed, and the auxiliary electrostatic sensing The layer is a transparent electrode made of a transparent material. 依據申請專利範圍第1項所述之用於電氣元件的靜電吸引型檢測台,上述輔助靜電感應層是塗層在放置該電氣元件的該檢測板的除了一邊緣部分的一部分上,並且該輔助靜電感應層係由一透明或不透明的材質構成的一導電性電極。 According to the electrostatic attraction type detecting station for an electric component according to claim 1, the auxiliary electrostatic sensing layer is coated on a portion of the detecting plate on which the electrical component is placed, and the auxiliary electrostatic sensing The layer is a conductive electrode composed of a transparent or opaque material. 依據申請專利範圍第1項至第3項中任一項所述之用於電氣元件的靜電吸引型檢測台,根據通過該輔助靜電感應層向該電氣元件感應的靜電力的大小而調節該旋轉板的大小。 The electrostatic attraction type detecting station for an electric component according to any one of claims 1 to 3, wherein the rotating plate is adjusted according to a magnitude of an electrostatic force induced to the electric component by the auxiliary electrostatic sensing layer the size of. 依據申請專利範圍第4項所述之用於電氣元件的靜電吸引型檢測台,在該檢測板的一上表面設有與該旋轉板一起固定該檢測板的一上部固定板。 According to the electrostatic attraction type detecting table for an electric component according to the fourth aspect of the invention, an upper fixing plate for fixing the detecting plate together with the rotating plate is provided on an upper surface of the detecting plate. 依據申請專利範圍第1項至第3項中任一項所述之用於電氣元件的靜電吸引型檢測台,該電源供給裝置包括:用於供給該靜電感應用電源的一電壓產生裝置;用於傳輸電源的一電壓線;設置在該旋轉馬達的一中心側的一旋轉電源供給裝置;以及與該旋轉板接觸並供給電源的一接觸端子。 An electrostatic attraction type detecting station for an electric component according to any one of claims 1 to 3, wherein the power supply device includes: a voltage generating device for supplying the static sensitive application power source; a voltage line for transmitting power; a rotary power supply device disposed on a center side of the rotary motor; and a contact terminal in contact with the rotary plate and supplying power. 依據申請專利範圍第1項或第2項所述之用於電氣元件的靜電吸引型檢測台,該電源供給裝置包括一電壓調節器,該電壓調節器根據一檢測環境能夠改變供給到該輔助靜電感應層的該靜電感應用電源的大小。 According to the electrostatic attraction type detecting station for an electric component according to claim 1 or 2, the power supply device includes a voltage regulator capable of changing the supply to the auxiliary electrostatic induction according to a detection environment. The electrostatic sense of the layer applies the size of the power source.
TW102104413A 2012-03-09 2013-02-05 Electrostatic attraction type inspection table for electric parts TWI472749B (en)

Applications Claiming Priority (1)

Application Number Priority Date Filing Date Title
KR1020120024177A KR101173578B1 (en) 2012-03-09 2012-03-09 Electrostatic attraction type inspection table for electric parts

Publications (2)

Publication Number Publication Date
TW201337242A TW201337242A (en) 2013-09-16
TWI472749B true TWI472749B (en) 2015-02-11

Family

ID=46880390

Family Applications (1)

Application Number Title Priority Date Filing Date
TW102104413A TWI472749B (en) 2012-03-09 2013-02-05 Electrostatic attraction type inspection table for electric parts

Country Status (5)

Country Link
JP (1) JP5683553B2 (en)
KR (1) KR101173578B1 (en)
CN (1) CN103308450B (en)
TW (1) TWI472749B (en)
WO (1) WO2013133492A1 (en)

Families Citing this family (8)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
TW201617631A (en) * 2014-11-10 2016-05-16 Tian Zheng Internat Prec Machinery Co Ltd Automatic layer inspection equipment
CN106370666A (en) * 2015-07-23 2017-02-01 台达电子工业股份有限公司 Electronic component appearance detection apparatus and electronic component appearance detection method
KR101919692B1 (en) * 2017-04-26 2018-11-16 윈텍 주식회사 Electrostatic attraction type inspection table for electric parts
KR101938592B1 (en) 2018-06-15 2019-01-15 김기석 Led inspection apparatus and disk for inspecting led
CN109807082A (en) * 2019-03-04 2019-05-28 肇庆市宏华电子科技有限公司 Crawler type detection device and detection system
JP7159942B2 (en) * 2019-03-28 2022-10-25 株式会社村田製作所 Appearance inspection device
JP7347386B2 (en) * 2020-09-25 2023-09-20 株式会社村田製作所 Electrostatic induction adsorption conveyor and electrostatic induction adsorption transfer device
KR102325078B1 (en) 2021-05-10 2021-11-11 주식회사 제이엔에스 Sorting Device for Multi-layer Ceramic Capacitor chip

Citations (3)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
CN101192557A (en) * 2006-11-30 2008-06-04 佳能安内华股份有限公司 Power supply apparatus and deposition method using the power supply apparatus
TW201035692A (en) * 2008-12-19 2010-10-01 Nikon Corp Movable body apparatus, exposure apparatus, exposure method, and device manufacturing method
US20110192347A1 (en) * 2009-08-31 2011-08-11 Hitachi Kokusai Electric Inc. Substrate processing apparatus and semiconductor devices manufacturing method

Family Cites Families (11)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JP3442224B2 (en) 1996-07-04 2003-09-02 松下電器産業株式会社 IC disposal equipment for flip chip mounting equipment
JP3855733B2 (en) * 2001-10-30 2006-12-13 株式会社村田製作所 Electronic component visual inspection apparatus and visual inspection method
JP4430442B2 (en) * 2004-03-24 2010-03-10 株式会社チップトン Work clamp device
KR20050116414A (en) * 2004-06-07 2005-12-12 삼성전자주식회사 Electronic static chuck for use in semiconductor manufacturing apparatus
JP2008260594A (en) * 2007-04-10 2008-10-30 Okano Denki Kk Part conveying device
JP5001432B2 (en) * 2008-09-08 2012-08-15 芝浦メカトロニクス株式会社 Substrate processing apparatus and substrate processing method
JP2010118480A (en) 2008-11-12 2010-05-27 Olympus Corp Substrate chucking device and substrate inspecting apparatus
CN102079448B (en) * 2009-11-27 2013-09-04 东京威尔斯股份有限公司 Inspection apparatus for appearance of workpiece and inspection method thereof
JP5598912B2 (en) * 2009-11-27 2014-10-01 株式会社 東京ウエルズ Work appearance inspection apparatus and work appearance inspection method
JP5510411B2 (en) * 2010-08-11 2014-06-04 Toto株式会社 Electrostatic chuck and method for manufacturing electrostatic chuck
CN102623379A (en) * 2011-01-27 2012-08-01 北京北方微电子基地设备工艺研究中心有限责任公司 Electrostatic holding device and semiconductor processing apparatus

Patent Citations (3)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
CN101192557A (en) * 2006-11-30 2008-06-04 佳能安内华股份有限公司 Power supply apparatus and deposition method using the power supply apparatus
TW201035692A (en) * 2008-12-19 2010-10-01 Nikon Corp Movable body apparatus, exposure apparatus, exposure method, and device manufacturing method
US20110192347A1 (en) * 2009-08-31 2011-08-11 Hitachi Kokusai Electric Inc. Substrate processing apparatus and semiconductor devices manufacturing method

Also Published As

Publication number Publication date
JP5683553B2 (en) 2015-03-11
JP2013187535A (en) 2013-09-19
CN103308450B (en) 2015-09-09
TW201337242A (en) 2013-09-16
CN103308450A (en) 2013-09-18
WO2013133492A1 (en) 2013-09-12
KR101173578B1 (en) 2012-08-13

Similar Documents

Publication Publication Date Title
TWI472749B (en) Electrostatic attraction type inspection table for electric parts
US8609454B2 (en) Self-assembly apparatus, device self-assembling method, and method of assembling thermoelectric devices
JP5500172B2 (en) Electrostatic adsorption structure and manufacturing method thereof
JP2019515483A (en) Apparatus for manufacturing at least two solar cell configurations, system for manufacturing at least two tiled solar cells, and method for manufacturing at least two solar cell configurations
WO2018036175A1 (en) Silk-screen printing device and silk-screen printing method
JP4808149B2 (en) Electrostatic chuck
JP4126084B1 (en) Method for controlling surface potential of electrostatic chuck
JP2010080431A (en) Ion generation method, ion generating electrode, and ion generating module
JP5957287B2 (en) Power supply device
KR20120049516A (en) Substrate transfering apparatus and manufacturing apparatus of display device using the same
JP7347386B2 (en) Electrostatic induction adsorption conveyor and electrostatic induction adsorption transfer device
WO2018123076A1 (en) Endless track, and traveling device traveling while adhering to wall surface
KR101919692B1 (en) Electrostatic attraction type inspection table for electric parts
JP6544481B2 (en) Transport apparatus for measuring characteristics of electronic components and method of manufacturing receiving member for characteristics of electronic components
JP2011155135A (en) Jig for semiconductor element transfer and method of transferring semiconductor element
JP2007150351A (en) Electrostatic chuck
JP2019117924A5 (en)
JP3942398B2 (en) Method for forming conductive pattern
KR101948279B1 (en) Adehesive clening apparatus and film laminating apparatus
JPH11163111A (en) Electrostatic chuck
EP2130791A1 (en) Neutralization apparatus and method for part feeder
KR20060059424A (en) Display apparatus
JPH10233436A (en) Electrostatic chuck
CN116847648A (en) Method and system for eliminating micro short circuit structure
JP2021072759A (en) Vibration type actuator, camera platform, and electronic device