CN102076607A - 通过循环硅细粉来提高多晶硅反应器生产效率的方法 - Google Patents

通过循环硅细粉来提高多晶硅反应器生产效率的方法 Download PDF

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Publication number
CN102076607A
CN102076607A CN2009801245747A CN200980124574A CN102076607A CN 102076607 A CN102076607 A CN 102076607A CN 2009801245747 A CN2009801245747 A CN 2009801245747A CN 200980124574 A CN200980124574 A CN 200980124574A CN 102076607 A CN102076607 A CN 102076607A
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China
Prior art keywords
silicon
reaction chamber
silica soot
fines
described method
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CN2009801245747A
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English (en)
Chinese (zh)
Inventor
M·S·库尔卡尼
S·金贝尔
J·伊布拉希姆
V·雷万卡尔
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SunEdison Inc
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SunEdison Inc
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Publication of CN102076607A publication Critical patent/CN102076607A/zh
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    • C—CHEMISTRY; METALLURGY
    • C01—INORGANIC CHEMISTRY
    • C01B—NON-METALLIC ELEMENTS; COMPOUNDS THEREOF; METALLOIDS OR COMPOUNDS THEREOF NOT COVERED BY SUBCLASS C01C
    • C01B33/00—Silicon; Compounds thereof
    • C01B33/02—Silicon
    • C01B33/021—Preparation
    • C01B33/027—Preparation by decomposition or reduction of gaseous or vaporised silicon compounds other than silica or silica-containing material

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  • Chemical & Material Sciences (AREA)
  • Organic Chemistry (AREA)
  • Inorganic Chemistry (AREA)
  • Silicon Compounds (AREA)
  • Devices And Processes Conducted In The Presence Of Fluids And Solid Particles (AREA)
CN2009801245747A 2008-06-27 2009-06-26 通过循环硅细粉来提高多晶硅反应器生产效率的方法 Pending CN102076607A (zh)

Applications Claiming Priority (3)

Application Number Priority Date Filing Date Title
US7637108P 2008-06-27 2008-06-27
US61/076,371 2008-06-27
PCT/US2009/048916 WO2009158650A1 (en) 2008-06-27 2009-06-26 Methods for increasing polycrystalline silicon reactor productivity by recycle of silicon fines

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CN102076607A true CN102076607A (zh) 2011-05-25

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CN2009801245747A Pending CN102076607A (zh) 2008-06-27 2009-06-26 通过循环硅细粉来提高多晶硅反应器生产效率的方法

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Country Link
US (1) US20090324819A1 (enExample)
EP (1) EP2310317A1 (enExample)
JP (1) JP2011526239A (enExample)
KR (1) KR20110037967A (enExample)
CN (1) CN102076607A (enExample)
TW (1) TW201006950A (enExample)
WO (1) WO2009158650A1 (enExample)

Cited By (2)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
CN104395740A (zh) * 2012-06-18 2015-03-04 信越化学工业株式会社 多晶硅的晶体取向度评价方法、多晶硅棒的选择方法、多晶硅棒、多晶硅块以及单晶硅的制造方法
CN114132933A (zh) * 2021-11-02 2022-03-04 江苏中能硅业科技发展有限公司 一种颗粒硅生产方法和系统

Families Citing this family (8)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
US20100061911A1 (en) * 2008-08-04 2010-03-11 Hariharan Alleppey V METHOD TO CONVERT SILICON POWDER TO HIGH PURITY POLYSILICON THROUGH INTERMEDIATE SiF4
CN103787336B (zh) 2008-09-16 2016-09-14 储晞 生产高纯颗粒硅的方法
JP5956461B2 (ja) 2010-12-20 2016-07-27 エムイーエムシー・エレクトロニック・マテリアルズ・インコーポレイテッドＭｅｍｃ Ｅｌｅｃｔｒｏｎｉｃ Ｍａｔｅｒｉａｌｓ，Ｉｎｃｏｒｐｏｒａｔｅｄ 不均化操作を伴う実質的に閉ループの方法における多結晶シリコンの製造
US9156705B2 (en) 2010-12-23 2015-10-13 Sunedison, Inc. Production of polycrystalline silicon by the thermal decomposition of dichlorosilane in a fluidized bed reactor
CN103842070B (zh) 2011-09-30 2017-07-21 Memc电子材料有限公司 通过使硅烷在流化床反应器中热分解而制备多晶硅
WO2013049325A1 (en) 2011-09-30 2013-04-04 Memc Electronic Materials, Inc. Production of polycrystalline silicon by the thermal decomposition of silane in a fluidized bed reactor
WO2014106090A1 (en) 2012-12-31 2014-07-03 Sunedison, Inc. Improving operation of fluidized bed reactors by optimizing temperature gradients via particle size distribution control
US10252916B2 (en) 2014-09-04 2019-04-09 Corner Star Limited Methods for separating halosilanes

Citations (4)

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EP0450393A2 (en) * 1990-04-02 1991-10-09 Ethyl Corporation Improved polysilicon and process therefor
US20040052715A1 (en) * 2000-12-21 2004-03-18 Karl-Ludwig Metzger Method for producing highly purified, granular silicium
US20040151652A1 (en) * 2001-05-22 2004-08-05 Heiko Herold Method for producing highly pure, granular silicon in a fluidised bed
CN101006008A (zh) * 2004-06-18 2007-07-25 Memc电子材料有限公司 用于生产颗粒材料以及用于测量和减少颗粒材料中的粉尘的系统和方法

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US3012861A (en) * 1960-01-15 1961-12-12 Du Pont Production of silicon
US3012862A (en) * 1960-08-16 1961-12-12 Du Pont Silicon production
US4818495A (en) * 1982-11-05 1989-04-04 Union Carbide Corporation Reactor for fluidized bed silane decomposition
US4820587A (en) * 1986-08-25 1989-04-11 Ethyl Corporation Polysilicon produced by a fluid bed process
US4784840A (en) * 1986-08-25 1988-11-15 Ethyl Corporation Polysilicon fluid bed process and product
JPH01239013A (ja) * 1988-03-22 1989-09-25 Nkk Corp 多結晶シリコンの製造方法及び装置
US20060105105A1 (en) * 2004-11-12 2006-05-18 Memc Electronic Materials, Inc. High purity granular silicon and method of manufacturing the same

Patent Citations (4)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
EP0450393A2 (en) * 1990-04-02 1991-10-09 Ethyl Corporation Improved polysilicon and process therefor
US20040052715A1 (en) * 2000-12-21 2004-03-18 Karl-Ludwig Metzger Method for producing highly purified, granular silicium
US20040151652A1 (en) * 2001-05-22 2004-08-05 Heiko Herold Method for producing highly pure, granular silicon in a fluidised bed
CN101006008A (zh) * 2004-06-18 2007-07-25 Memc电子材料有限公司 用于生产颗粒材料以及用于测量和减少颗粒材料中的粉尘的系统和方法

Cited By (4)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
CN104395740A (zh) * 2012-06-18 2015-03-04 信越化学工业株式会社 多晶硅的晶体取向度评价方法、多晶硅棒的选择方法、多晶硅棒、多晶硅块以及单晶硅的制造方法
US9274069B2 (en) 2012-06-18 2016-03-01 Shin-Etsu Chemical Co., Ltd. Method for evaluating degree of crystalline orientation of polycrystalline silicon, method for selecting polycrystalline silicon rod, polycrystalline silicon rod, polycrystalline silicon ingot, and method for manufacturing monocrystalline silicon
CN104395740B (zh) * 2012-06-18 2016-08-10 信越化学工业株式会社 多晶硅的晶体取向度评价方法、多晶硅棒的选择方法、多晶硅棒、多晶硅块以及单晶硅的制造方法
CN114132933A (zh) * 2021-11-02 2022-03-04 江苏中能硅业科技发展有限公司 一种颗粒硅生产方法和系统

Also Published As

Publication number Publication date
TW201006950A (en) 2010-02-16
JP2011526239A (ja) 2011-10-06
WO2009158650A1 (en) 2009-12-30
US20090324819A1 (en) 2009-12-31
EP2310317A1 (en) 2011-04-20
KR20110037967A (ko) 2011-04-13

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Application publication date: 20110525