KR20110037967A - 실리콘 미분의 재순환에 의한 다결정 실리콘 반응로 생산성 향상 방법 - Google Patents

실리콘 미분의 재순환에 의한 다결정 실리콘 반응로 생산성 향상 방법 Download PDF

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Publication number
KR20110037967A
KR20110037967A KR1020107029115A KR20107029115A KR20110037967A KR 20110037967 A KR20110037967 A KR 20110037967A KR 1020107029115 A KR1020107029115 A KR 1020107029115A KR 20107029115 A KR20107029115 A KR 20107029115A KR 20110037967 A KR20110037967 A KR 20110037967A
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South Korea
Prior art keywords
silicon
reaction chamber
dust
discharged
particles
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KR1020107029115A
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English (en)
Korean (ko)
Inventor
밀린드 에스. 쿨카르니
스티븐 킴벨
자밀 이브라힘
비탈 레반카르
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엠이엠씨 일렉트로닉 머티리얼즈, 인크.
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Publication of KR20110037967A publication Critical patent/KR20110037967A/ko
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    • C—CHEMISTRY; METALLURGY
    • C01—INORGANIC CHEMISTRY
    • C01B—NON-METALLIC ELEMENTS; COMPOUNDS THEREOF; METALLOIDS OR COMPOUNDS THEREOF NOT COVERED BY SUBCLASS C01C
    • C01B33/00—Silicon; Compounds thereof
    • C01B33/02—Silicon
    • C01B33/021—Preparation
    • C01B33/027—Preparation by decomposition or reduction of gaseous or vaporised silicon compounds other than silica or silica-containing material

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  • Chemical & Material Sciences (AREA)
  • Organic Chemistry (AREA)
  • Inorganic Chemistry (AREA)
  • Silicon Compounds (AREA)
  • Devices And Processes Conducted In The Presence Of Fluids And Solid Particles (AREA)
KR1020107029115A 2008-06-27 2009-06-26 실리콘 미분의 재순환에 의한 다결정 실리콘 반응로 생산성 향상 방법 Withdrawn KR20110037967A (ko)

Applications Claiming Priority (2)

Application Number Priority Date Filing Date Title
US7637108P 2008-06-27 2008-06-27
US61/076,371 2008-06-27

Publications (1)

Publication Number Publication Date
KR20110037967A true KR20110037967A (ko) 2011-04-13

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KR1020107029115A Withdrawn KR20110037967A (ko) 2008-06-27 2009-06-26 실리콘 미분의 재순환에 의한 다결정 실리콘 반응로 생산성 향상 방법

Country Status (7)

Country Link
US (1) US20090324819A1 (enExample)
EP (1) EP2310317A1 (enExample)
JP (1) JP2011526239A (enExample)
KR (1) KR20110037967A (enExample)
CN (1) CN102076607A (enExample)
TW (1) TW201006950A (enExample)
WO (1) WO2009158650A1 (enExample)

Families Citing this family (10)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
US20100061911A1 (en) * 2008-08-04 2010-03-11 Hariharan Alleppey V METHOD TO CONVERT SILICON POWDER TO HIGH PURITY POLYSILICON THROUGH INTERMEDIATE SiF4
CN103787336B (zh) 2008-09-16 2016-09-14 储晞 生产高纯颗粒硅的方法
JP5956461B2 (ja) 2010-12-20 2016-07-27 エムイーエムシー・エレクトロニック・マテリアルズ・インコーポレイテッドＭｅｍｃ Ｅｌｅｃｔｒｏｎｉｃ Ｍａｔｅｒｉａｌｓ，Ｉｎｃｏｒｐｏｒａｔｅｄ 不均化操作を伴う実質的に閉ループの方法における多結晶シリコンの製造
US9156705B2 (en) 2010-12-23 2015-10-13 Sunedison, Inc. Production of polycrystalline silicon by the thermal decomposition of dichlorosilane in a fluidized bed reactor
CN103842070B (zh) 2011-09-30 2017-07-21 Memc电子材料有限公司 通过使硅烷在流化床反应器中热分解而制备多晶硅
WO2013049325A1 (en) 2011-09-30 2013-04-04 Memc Electronic Materials, Inc. Production of polycrystalline silicon by the thermal decomposition of silane in a fluidized bed reactor
JP2014001096A (ja) * 2012-06-18 2014-01-09 Shin Etsu Chem Co Ltd 多結晶シリコンの結晶配向度評価方法、多結晶シリコン棒の選択方法、多結晶シリコン棒、多結晶シリコン塊、および、単結晶シリコンの製造方法
WO2014106090A1 (en) 2012-12-31 2014-07-03 Sunedison, Inc. Improving operation of fluidized bed reactors by optimizing temperature gradients via particle size distribution control
US10252916B2 (en) 2014-09-04 2019-04-09 Corner Star Limited Methods for separating halosilanes
CN114132933A (zh) * 2021-11-02 2022-03-04 江苏中能硅业科技发展有限公司 一种颗粒硅生产方法和系统

Family Cites Families (11)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
US3012861A (en) * 1960-01-15 1961-12-12 Du Pont Production of silicon
US3012862A (en) * 1960-08-16 1961-12-12 Du Pont Silicon production
US4818495A (en) * 1982-11-05 1989-04-04 Union Carbide Corporation Reactor for fluidized bed silane decomposition
US4820587A (en) * 1986-08-25 1989-04-11 Ethyl Corporation Polysilicon produced by a fluid bed process
US4784840A (en) * 1986-08-25 1988-11-15 Ethyl Corporation Polysilicon fluid bed process and product
JPH01239013A (ja) * 1988-03-22 1989-09-25 Nkk Corp 多結晶シリコンの製造方法及び装置
CA2038175A1 (en) * 1990-04-02 1991-10-03 Albemarle Corporation Polysilicon and process therefor
DE10063862A1 (de) * 2000-12-21 2002-07-11 Solarworld Ag Verfahren zur Herstellung von hochreinem, granularen Silizium
DE10124848A1 (de) * 2001-05-22 2002-11-28 Solarworld Ag Verfahren zur Herstellung von hochreinem, granularem Silizium in einer Wirbelschicht
US7291222B2 (en) * 2004-06-18 2007-11-06 Memc Electronic Materials, Inc. Systems and methods for measuring and reducing dust in granular material
US20060105105A1 (en) * 2004-11-12 2006-05-18 Memc Electronic Materials, Inc. High purity granular silicon and method of manufacturing the same

Also Published As

Publication number Publication date
TW201006950A (en) 2010-02-16
JP2011526239A (ja) 2011-10-06
WO2009158650A1 (en) 2009-12-30
US20090324819A1 (en) 2009-12-31
EP2310317A1 (en) 2011-04-20
CN102076607A (zh) 2011-05-25

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Date Code Title Description
PA0105 International application

Patent event date: 20101224

Patent event code: PA01051R01D

Comment text: International Patent Application

PG1501 Laying open of application
PC1203 Withdrawal of no request for examination
WITN Application deemed withdrawn, e.g. because no request for examination was filed or no examination fee was paid