CN102059161A - Microfluidic chip and manufacturing method thereof - Google Patents
Microfluidic chip and manufacturing method thereof Download PDFInfo
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- CN102059161A CN102059161A CN 200910237741 CN200910237741A CN102059161A CN 102059161 A CN102059161 A CN 102059161A CN 200910237741 CN200910237741 CN 200910237741 CN 200910237741 A CN200910237741 A CN 200910237741A CN 102059161 A CN102059161 A CN 102059161A
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Abstract
The invention relates to a microfluidic chip and a manufacturing method thereof. The microfluidic chip comprises an upper chip unit and a lower chip unit; the surfaces of the chip units are respectively provided with a liquid storing hole, a liquid channel communicated with the liquid storing holes and a microchannel communicated with the liquid channel; the upper chip unit and the lower chip unit are attached to each other and the microchannel is sealed between the two chip units; the microfluidic chip also comprises a micro valve, wherein the micro-valve main body is one of the following structures: a three-dimensional micrometer and three-dimensional nanometer hierarchical structure of polymers formed on the microchannel in array arrangement, a three-dimensional micrometer structure of polymers formed on the microchannel in array arrangement or a three-dimensional nanometer structure of polymers formed on the microchannel in array arrangement; the polymers can generate specific responses to an external field under the action of the external field; and the specific responses are reversibility transformation of one or more of surface chemical compositions of the polymers, the above structures and surface properties, thus realizing controllable operations for the flow state of a microfluid in the microchannel. The micro valve in the microfluidic chip is manufactured in situ and miniaturized on the microfluidic chip, thus realizing switch gradient control for the flow of the microfluid and fast switch reversibility transformation.
Description
Technical field
The present invention relates to a kind of micro-fluidic chip and preparation method thereof.
Background technology
In recent years; micro-fluidic chip has microminiaturization, automation, advantage such as integrated, convenient and quick as a kind of novel analysis platform; obtained to use widely in a lot of fields; for example, cell biology, analytical chemistry, environmental monitoring and protection, judicial expertise, fields such as medicine synthetic screening, materialogy and organizational engineering.In micro-fluidic chip, the accurate sample introduction of micro liquid is the key of sample treatment and analysis, for example, micro-fluid control chip electrophoretic separates, chromatographic isolation, just need such operation in the immunoassay, this is because the characteristics of micro-fluidic chip will operate and control the microfluid under the micro-scale, and it is extremely small as the Fluid Volume of operation and control object, cause the flow behavior and the macroscopic view of microfluid to be very different, negligible phenomenon becomes the major influence factors that fluid flows under micro-scale under macro-scale, especially the microfluid flow velocity is little rises to receiving/minute the time, traditional mechanical valve or mechanical pump just can not satisfy requirement of actual application.
Control to microfluidic flow in the micro-fluidic chip can realize by little valve.In recent years,, developed a lot of methods and device, realized control to a certain extent, but also had certain limitation simultaneously microfluidic flow in the micro-fluidic chip along with the development and the maturation of micro-fluidic chip technology.Whether dynamic driving mechanism is divided into active valve and passive valves according to little valve, active valve comprises the little valve of electromagnetism, the little valve of static, the little valve of marmem, piezoelectric micromotor valve and hot pneumatic micro valve etc., the little valve of this class can be realized the Kai Heguan of valve, braking ability is better, seal is high, but that shortcoming is complex structure, volume is big, be difficult to be implemented in integrated on the micro-fluidic chip.And passive valves does not need the external impetus braking, and the pressure differential of dependence valve both sides realizes the switch of valve, and volume is less, but passive valves can not initiatively be carried out the open and close or the switching of valve.At present, also there are some to utilize passive valves to the driving of microfluid and the research of control, but its technical scheme focuses mostly in the physical responses to the decorative layer molecular configuration that constitutes the passive valves material, for example, decorative layer is a gel, gel responds under can changing at the microfluid pH of the temperature or the passive valves of flowing through, but effects limit such as preparation process complexity, condition harshness their application, and, existing research just merely realizes the Kai Heguan of passive little valve, and can not realize that the switch gradual change control of passive little valve and the quick invertibity of switch change.
Summary of the invention
The passive little valve that the objective of the invention is to overcome microfluid in the realization control micro-fluidic chip of prior art can not realize that the quick invertibity of switch gradual change control and switch changes, thus the micro-fluidic chip that provides a kind of quick invertibity that realizes little threshold switch gradual change control and switch to change.
A further object of the present invention provides the preparation method of a kind of preparation method and the simple micro-fluidic chip of condition.
Micro-fluidic chip of the present invention comprises chip unit and following chip unit, described surface of going up chip unit and/or following chip unit comprises liquid storage hole, the fluid passage that is communicated with liquid storage hole and the microchannel that is communicated with the fluid passage, and last chip unit and following chip unit are fitted mutually and the microchannel is enclosed between chip unit and the following chip unit; Wherein, described micro-fluidic chip also comprises little valve, and described little valve is a kind of in the 3-D nano, structure of polymer of the three-dimensional micrometer structure that is formed on the three-dimensional micron of the polymer that the array on the microchannel arranges and the polymer that three-dimensional manometer hierarchy, array are arranged, array arrangement; Described polymer has under outer field action can produce specific response to the outfield, described specific response is that the surface chemistry of polymer is formed, three-dimensional micron and three-dimensional manometer hierarchy, the three-dimensional micrometer structure of polymer, the 3-D nano, structure of polymer and the surface property of polymer of polymer (change as wellability: between hydrophily-hydrophobicity, the invertibity of one or more or lipophile-oleophobic property) changes, thereby can realize the controllable operating to the flow regime of microfluid in the microchannel.
Described outfield is selected from one or more in the ionic strength of the pH value of light, electricity, temperature, microfluid and microfluid.
The invertibity that the surface chemistry of described polymer is formed changes, in this way the oxidation state of polymer and the invertibity transformation of going back between the ortho states.
The three-dimensional micron of described polymer and the invertibity of three-dimensional manometer hierarchy change, the structure of the three-dimensional manometer yardstick of polymer changes back the reversible transition of the structure of three-dimensional manometer yardstick again after the structure of three-dimensional micro-meter scale changes in this way, and the structure of three-dimensional micro-meter scale returns former three-dimensional micro-meter scale after more the structure of the three-dimensional micro-meter scale of large scale changes.
The invertibity of the three-dimensional micrometer structure of described polymer changes, and the structure of the three-dimensional micro-meter scale of polymer returns after more the structure of the three-dimensional micro-meter scale of large scale changes and is similar to former three-dimensional micro-meter scale in this way.
The invertibity of the 3-D nano, structure of described polymer changes, and the structure of the three-dimensional manometer yardstick of polymer returns after more the structure of the three-dimensional manometer yardstick of large scale changes and is similar to former three-dimensional manometer yardstick in this way.
The invertibity of the surface property of described polymer changes, in this way between the hydrophily of polymer and the hydrophobicity or the invertibity between lipophile and the oleophobic property change.
It is the Superhydrophilic and the transformation of the invertibity between the super-hydrophobicity of polymer that the hydrophily of described polymer and the invertibity between the hydrophobicity change, and it is the super lipophile and the transformation of the invertibity between the super oleophobic property of polymer that the lipophile of described polymer and the invertibity between the oleophobic property change.
The volume of the three-dimensional micrometer structure of the polymer that the three-dimensional micron of the polymer that the described array that is formed on the microchannel is arranged and three-dimensional manometer hierarchy, array are arranged or the 3-D nano, structure of the polymer that array is arranged all is the 60-90% that accounts for whole microchannel total measurement (volume).
The three-dimensional micrometer structure of the polymer that the three-dimensional micron of the polymer that described array is arranged and three-dimensional manometer hierarchy, array are arranged or the 3-D nano, structure of the polymer that array is arranged all can be one or more in nano-wire array structure, triangular array structure, mastoid process shape array structure and the gear shape array structure.
Described liquid storage hole, fluid passage and microchannel are preferably formed in down the surface of chip unit, and described little valve is formed on this microchannel.
Described polymer is selected from one or more in azobenzene polymer, polypyrrole, polyaniline, PNIPAM, poly-isopropyl methyl acrylamide, carbopol gel and the polyurethane hydrogel etc.
The preparation method of micro-fluidic chip of the present invention may further comprise the steps:
(1) will go up chip unit fits mutually with following chip unit, described surface of going up chip unit and/or following chip unit comprises liquid storage hole, the fluid passage that is communicated with liquid storage hole and the microchannel that is communicated with the fluid passage, the surface of described microchannel is formed with a kind of in the 3-D nano, structure of three-dimensional micrometer structure that three-dimensional micron that array arranges and three-dimensional manometer hierarchy, array arranges or array arrangement, and the mode of described applying is enclosed between chip unit and the following chip unit microchannel;
The substrate surface that the described preparation method who goes up chip unit and/or following chip unit is included in chip unit and/or following chip unit forms liquid storage hole, fluid passage and microchannel, described liquid storage hole is communicated with described fluid passage, and described microchannel is communicated with described fluid passage; Form a kind of in the 3-D nano, structure of three-dimensional micrometer structure that three-dimensional micron that array arranges and three-dimensional manometer hierarchy, array arranges or array arrangement in described microchannel surface then;
(2) in the microchannel, import polymer monomer solution, the surperficial corresponding polymerization of the 3-D nano, structure that three-dimensional micrometer structure that the three-dimensional micron that the array that polymer monomer is formed in step (1) is arranged and three-dimensional manometer hierarchy, array are arranged or array are arranged forms three-dimensional micron and the three-dimensional micrometer structure of the polymer that three-dimensional manometer hierarchy, array are arranged or the 3-D nano, structure of the polymer that array is arranged of the polymer of array arrangement, forms little valve thus; Described polymer has under outer field action can produce specific response to the outfield, described specific response is that the surface chemistry of polymer is formed, three-dimensional micron and three-dimensional manometer hierarchy, the three-dimensional micrometer structure of polymer, the 3-D nano, structure of polymer and the surface property of polymer of polymer (change as wellability: between hydrophily-hydrophobicity, the invertibity of one or more or lipophile-oleophobic property) changes, thereby can realize the controllable operating to the flow regime of microfluid in the microchannel.
Described outfield is selected from one or more in the ionic strength of the pH value of light, electricity, temperature, microfluid and microfluid.
The invertibity of the invertibity transformation of the invertibity transformation of the invertibity transformation of the invertibity transformation of the surface chemistry composition of described polymer, the three-dimensional micron of polymer and three-dimensional manometer hierarchy, the three-dimensional micrometer structure of polymer, the 3-D nano, structure of polymer and the surface property of polymer changes like preceding described.
Described liquid storage hole, fluid passage and microchannel are preferably formed in down the surface of chip unit, and the 3-D nano, structure that three-dimensional micrometer structure that the three-dimensional micron that described array is arranged and three-dimensional manometer hierarchy, array are arranged or array are arranged is formed on this microchannel; Described little valve is the 3-D nano, structure of the polymer of the three-dimensional micrometer structure of the three-dimensional micron of the polymer arranged of the corresponding array that is formed on the 3-D nano, structure that three-dimensional micrometer structure that three-dimensional micron that this array arranges and three-dimensional manometer hierarchy, array arranges or array arranges and the polymer that three-dimensional manometer hierarchy, array are arranged or array arrangement.
The 3-D nano, structure that three-dimensional micrometer structure that the three-dimensional micron that the described array that forms in microchannel surface is arranged and three-dimensional manometer hierarchy, array are arranged or array are arranged, and the 3-D nano, structure of the polymer of the three-dimensional micrometer structure of the polymer of the three-dimensional micron of the polymer arranged of described array and three-dimensional manometer hierarchy, array arrangement or array arrangement all can be in nano-wire array structure, triangular array structure, mastoid process shape array structure and the gear shape array structure one or more.
The volume of the 3-D nano, structure that three-dimensional micrometer structure that the three-dimensional micron that the described array that forms in microchannel surface is arranged and three-dimensional manometer hierarchy, array are arranged or array are arranged all is the 50-80% that accounts for whole microchannel total measurement (volume).
Described polymer monomer selects one or more in order azobenzene polymer, polypyrrole, polyaniline, PNIPAM, poly-isopropyl methyl acrylamide, carbopol gel and the polyurethane hydrogel etc.
The method of described formation liquid storage hole, fluid passage and microchannel is selected from numerical control and mills in quarter, laser-induced thermal etching, photoetching-electroforming-injection molding technology, method of molding, pressure sintering, chemical attack, the soft etching etc. one or more; The method of the 3-D nano, structure that three-dimensional micrometer structure that the three-dimensional micron that described formation array is arranged and three-dimensional manometer hierarchy, array are arranged or array are arranged is physical method and/or chemical method.
Described base material is selected from one or more in quartz, glass, monocrystalline silicon, polymethyl methacrylate, Merlon, polyamide, polyethylene, polypropylene, polystyrene, dimethyl silicone polymer, copper, aluminium, stainless steel and the nickel etc.
Little valve in the micro-fluidic chip provided by the invention is an in-situ preparing and microminiaturized on micro-fluidic chip, it comes down to a kind of passive little valve, the embodiment of its function, be at outer field action during in little valve, little valve can carry out intelligent control to the flow regime of the microfluid in the micro-fluidic chip, improved the flow regime of control microfluid in chip microchannel simultaneously, especially to microlitre or the mobile control of other microfluid of upgrading received, can realize that the quick invertibity of the switch gradual change control of little valve and switch changes; And little valve can integrate with other additional functional unit such as sample injection unit, microfluid driver element, analytic unit and the detecting unit on the micro-fluidic chip, formation has multifunctional integrated chip lab, with the various fields that is widely used in controllable reaction, controlled mixing, controlled sample introduction, medicine controlled releasing and analyzes, significant to the development that utilizes the micro-fluidic chip analytical technology based on micro-fluidic chip.
Description of drawings
Fig. 1 is the schematic cross-section of micro-fluidic chip provided by the invention.
Reference numeral
1. 3. microchannels, liquid storage hole 2. fluid passages
4. three-dimensional micron and three-dimensional manometer hierarchy, three-dimensional micrometer structure, 3-D nano, structure
The specific embodiment
According to the present invention, described micro-fluidic chip comprises chip unit and following chip unit, described surface of going up chip unit and/or following chip unit comprises liquid storage hole, fluid passage that is communicated with liquid storage hole and the microchannel that is communicated with the fluid passage, last chip unit and following chip unit are fitted mutually and the microchannel are enclosed between chip unit and the following chip unit, wherein, described micro-fluidic chip also comprises little valve, and described little valve is three-dimensional micron and the three-dimensional manometer hierarchy that is formed on the polymer of the array arrangement on the microchannel, the three-dimensional micrometer structure of the polymer that array is arranged, a kind of in the 3-D nano, structure of the polymer that array is arranged; Described polymer has under outer field action can produce specific response to the outfield, described specific response is that the surface chemistry of polymer is formed, three-dimensional micron and three-dimensional manometer hierarchy, the three-dimensional micrometer structure of polymer, the 3-D nano, structure of polymer and the surface property of polymer of polymer (change as wellability: between hydrophily-hydrophobicity, the invertibity of one or more or lipophile-oleophobic property) changes, thereby can realize the controllable operating to the flow regime of microfluid in the microchannel.
According to the present invention, the three-dimensional micron and the three-dimensional manometer hierarchy of the polymer that described array is arranged, the three-dimensional micrometer structure of polymer, or the 3-D nano, structure of polymer is three-dimensional micron and three-dimensional manometer hierarchy that the corresponding array that is formed on is as shown in Figure 1 arranged, the three-dimensional micrometer structure that array is arranged, or the three-dimensional micron and the three-dimensional manometer hierarchy of the polymer of the array arrangement on the 3-D nano, structure 4 of array arrangement, the three-dimensional micrometer structure of the polymer that array is arranged, or the 3-D nano, structure of the polymer of array arrangement, its array structure both can be the structure of micron level, also can be the structure of Nano grade; Structure that also can existing micron level has the structure of Nano grade again, therefore is called micron and nanometer hierarchy.When producing specific response under outer field action when, the structure of Nano grade might become the structure of micron level, becomes big effect and size takes place.
For example: the surface property of this polymer such as wellability can be carried out outfield response reversible transition from Superhydrophilic-super-hydrophobicity or from super lipophile-super oleophobic property under the regulation and control of outfield, therefore, when polymer contacted with water, water can carry out reversible variation from 150 ° to 5 ° at the contact angle of polymer surfaces; Perhaps the reversible transition of expansion takes place in the volume of polymer under the regulation and control of outfield, thereby regulates and control the flow regime of microfluid in the microchannel effectively, as flowing velocity and flow direction; Perhaps the surface chemistry of polymer is formed under the regulation and control of outfield (as electric field) and the invertibity transformation is taken place in oxidation state with going back between the ortho states; In addition, because the three-dimensional micrometer structure of the polymer that the three-dimensional micron of the polymer that array is arranged and three-dimensional manometer hierarchy, array are arranged or the 3-D nano, structure of the polymer that array is arranged can increase the roughness of microchannel surface, thereby can have amplification to polymer surfaces performance such as infiltrating transformation.
The microchannel of micro-fluidic chip provided by the invention is according to microfluid being carried out intelligent control and preparing, the three-dimensional micron and the three-dimensional manometer hierarchy of polymer wherein with array arrangement, the three-dimensional micrometer structure of the polymer that array is arranged, the 3-D nano, structure of the polymer that array is arranged, it is the combination of a kind of micron and/or nanoscale, can be under the regulation and control of outfield, change back the reversible transition of the structure of three-dimensional manometer yardstick after the structure of the three-dimensional micron of polymer and the three-dimensional manometer yardstick of the polymer in the three-dimensional manometer hierarchy might change to the structure of three-dimensional micro-meter scale again, and the structure of three-dimensional micro-meter scale returns former three-dimensional micro-meter scale after more the structure of the three-dimensional manometer yardstick of large scale changes; Three-dimensional micrometer structure for polymer then might can return former three-dimensional micro-meter scale after more the structure of the three-dimensional micro-meter scale of large scale changes; 3-D nano, structure for polymer then might can return former three-dimensional manometer yardstick after more the structure of the three-dimensional manometer yardstick of large scale changes.Above-mentioned reversible transition carries out organic response control to the flow regime of the microfluid in the microchannel, be the coarse adjustment of microchannel and meticulous " ON/OFF " regulation and control (meticulous adjusting of the structure channel of the polymer of arranging in conjunction with array in promptly under the coarse adjustment of microchannel itself of nanochannel, thereby realize " ON/OFF " regulation and control to the microfluid in the microchannel "), also comprise regulation and control from " opening " to a series of intermediatenesses such as " passes ".
According to the present invention, described liquid storage hole, the fluid passage that is communicated with liquid storage hole and the microchannel that is communicated with the fluid passage both can be in last chip unit or chip unit surface formation down, perhaps a part is in last chip or chip unit surface formation down, another part following chip or on the chip unit surface form, also can form on the surface of upper and lower chip simultaneously, under the preferable case, described liquid storage hole, the fluid passage that is communicated with liquid storage hole and the microchannel that is communicated with the fluid passage are formed on down the surface of chip unit, and described little valve is formed on the surface of this microchannel.
As shown in Figure 1, described chip unit surface down comprises liquid storage hole 1, fluid passage 2 and the microchannel 3 that is connected the fluid passage, and the three-dimensional micrometer structure that the three-dimensional micron that described array is arranged and three-dimensional manometer hierarchy, array are arranged, the 3-D nano, structure 4 that array is arranged are formed on the surface of microchannel 3.
According to the present invention, the three-dimensional micrometer structure that the three-dimensional micron that described array is arranged and three-dimensional manometer hierarchy, array are arranged, the 3-D nano, structure of array arrangement can be in nano-wire array structure, triangular array structure, mastoid process shape array structure and the gear shape array structure etc. one or more.As shown in Figure 1, wherein, array structure arranged a is the nano-wire array structure, and structure b is a mastoid process shape array structure, and structure c is the gear shape array structure.Specifically, three-dimensional micron that described array is arranged and the micrometer structure in the three-dimensional manometer hierarchy refer to its array main body (height and width of boss all are microns) structure and are of a size of micron, there is nanostructured on the surface of its array agent structure, and/or is of a size of nanometer (recess position) size between its array agent structure; For example the mastoid process in the mastoid process shape array is micron (height and width all are microns) size, and there is nanostructured (as the little mastoid process of nanoscale) on the surface of mastoid process, is of a size of nano-scale between the mastoid process; Gear in the gear shape array is micron (height and width all are microns) size, and gear surface has nanostructured, is of a size of nanometer between the gear; Nano wire in the nanometer linear array is micron (height and width all are microns) size, and vertically the nanowire surface of arranging has nanostructured, is of a size of nanometer between the nano wire; Therefore just be called the combination of micrometer/nanometer hierarchy.Micrometer structure in the three-dimensional micrometer structure of the polymer that described array is arranged refers to its array main body (height and width of boss all are microns) structure and is of a size of micron, is of a size of micron or nanometer (recess position) size between its array agent structure; Nanostructured in the 3-D nano, structure of the polymer that described array is arranged refers to its array main body (height and width of boss all are nanometers) structure and is of a size of nanometer, is of a size of micron or nanometer (recess position) size between its array agent structure.Under certain outer field action, the surface nano-structure of mastoid process, gear or vertical nano wire of arranging might carry out reversible transition to micrometer structure, simultaneously, between the mastoid process, between the gear or the nano wire and the spacing between the nano wire of vertically arranging also reversible variation can take place on Nano grade.
According to the present invention, the selectable range broad of the volume of the 3-D nano, structure that three-dimensional micrometer structure that the three-dimensional micron that described array is arranged and three-dimensional manometer hierarchy, array are arranged or array are arranged, under the preferable case, the volume of the 3-D nano, structure that three-dimensional micrometer structure that the three-dimensional micron that described array is arranged and three-dimensional manometer hierarchy, array are arranged or array are arranged all is the 50-80% that accounts for whole microchannel total measurement (volume), more preferably 60-70%.The measuring method of described volume can adopt conventional method to measure, for example liquid-gas displacement method.
According to the present invention, described outfield can be selected from one or more in the ionic strength of pH value, microfluid of light (being " L " among Fig. 1), electricity (being " E " among Fig. 1), temperature (being " T " among Fig. 1), microfluid; Described polymer can be the various polymer that light, electricity, heat, pH value and ionic strength produced response, under the preferable case, these materials can be selected from one or more in azobenzene polymer, polypyrrole, polyaniline, PNIPAM, poly-isopropyl methyl acrylamide, carbopol gel and the polyurethane hydrogel.
For example, described PNIPAM and poly-isopropyl methyl acrylamide can produce response to temperature/heat (for example, 20-50 ℃), and take place super hydrophilic-transformation between super-hydrophobic; Described azobenzene polymer can produce response to light, at ultraviolet light (365nm) and blue light (436nm) alternately after the irradiation, take place super hydrophilic-transformation between super-hydrophobic; Described polypyrrole, polyaniline and polythiophene can produce response to electric field, and take place super hydrophilic-transformation between super-hydrophobic and the transformation between super oleophylic-super oleophobic, its corresponding OR voltage can be respectively: 0.6/1.0V ,-0.2/1.0V ,-0.1/0.7V; Described carbopol gel can produce response to pH (1-13) value, and take place super hydrophilic-transformation between super-hydrophobic; Described polyurethane hydrogel can produce response to ion concentration (for example under the NaCl of 0.01-1mol/L), and take place super hydrophilic-transformation between super-hydrophobic.
According to the present invention, generally as the part of fluid passage, its two ends are communicated with the fluid passage respectively in described microchannel, and the length of described microchannel generally can be the 10-20 millimeter, and width can be the 0.1-0.3 millimeter, and the degree of depth can be the 0.1-0.3 millimeter.
According to the present invention, described liquid storage hole is used for storing the microfluid that is imported into micro-fluidic chip, and the diameter of described liquid storage hole generally can be the 1-3 millimeter.
According to the present invention, described fluid passage is communicated with liquid storage hole and microchannel, is used for handling microfluidic, and the length of described fluid passage generally can be the 5-20 millimeter, and width can be the 0.3-0.5 millimeter, and the degree of depth can be the 0.3-0.5 millimeter.
Described liquid storage hole generally can be for a plurality of, described fluid passage and microchannel generally can be many, every the fluid passage all is communicated with at least one liquid storage hole and at least one microchannel, and described fluid passage can be used as the part of microchannel, its two ends are communicated with the microchannel respectively, also can be communicated with the microchannel by an end; Many fluid passages and/or microchannel can also can be series relationship for the parallel connection relation, can select suitable annexation according to the different control methods to microfluid.
According to the present invention, the size of described micro-fluidic chip can be the size of the micro-fluidic chip of routine, and for example, the length of described micro-fluidic chip can be 3-5 centimetre usually, and width can be 3-5 centimetre usually, and thickness can be the 1-5 millimeter usually.
According to the present invention, the preparation method of described micro-fluidic chip comprises:
(1) will go up chip unit fits mutually with following chip unit, described surface of going up chip unit and/or following chip unit comprises liquid storage hole, the fluid passage that is communicated with liquid storage hole and the microchannel that is communicated with the fluid passage, the surface of described microchannel is formed with three-dimensional micron and three-dimensional manometer hierarchy, the three-dimensional micrometer structure of array arrangement or the 3-D nano, structure that array is arranged that array is arranged, and the mode of described applying is enclosed between chip unit and the following chip unit microchannel;
The substrate surface that the described preparation method who goes up chip unit and/or following chip unit is included in chip unit and/or following chip unit forms liquid storage hole, fluid passage and microchannel, described liquid storage hole is communicated with described fluid passage, and described microchannel is communicated with described fluid passage; Form a kind of in the 3-D nano, structure of three-dimensional micrometer structure that three-dimensional micron that array arranges and three-dimensional manometer hierarchy, array arranges or array arrangement in described microchannel surface then;
(2) in the microchannel, import polymer monomer solution, the surperficial corresponding polymerization of the 3-D nano, structure that three-dimensional micrometer structure that the three-dimensional micron that the array that polymer monomer is formed in step (1) is arranged and three-dimensional manometer hierarchy, array are arranged or array are arranged forms three-dimensional micron and the three-dimensional micrometer structure of the polymer that three-dimensional manometer hierarchy, array are arranged or the 3-D nano, structure of the polymer that array is arranged of the polymer of array arrangement, forms little valve thus; Described polymer has under outer field action can produce specific response to the outfield, described specific response is that the surface chemistry of polymer is formed, three-dimensional micron and three-dimensional manometer hierarchy, the three-dimensional micrometer structure of polymer, the 3-D nano, structure of polymer and the surface property of polymer of polymer (change as wellability: between hydrophily-hydrophobicity, the invertibity of one or more or lipophile-oleophobic property) changes, thereby can realize the controllable operating to the flow regime of microfluid in the microchannel.
According to the present invention, the method that forms liquid storage hole, fluid passage and microchannel at substrate surface can adopt conventional the whole bag of tricks, for example, can mill methods such as quarter, laser-induced thermal etching, LIGA technology (photoetching-electroforming-injection molding technology), method of molding, pressure sintering, chemical attack by numerical control, also can utilize processing methods such as soft lithographic technique.
According to the present invention, can all form liquid storage hole, fluid passage and microchannel on the surface of last chip unit and following chip unit, then upper and lower chip unit is fitted; Under the preferable case, in order to simplify the operation and to save cost, can make described liquid storage hole, fluid passage only be formed on down the surface of chip unit, then another plate substrate directly be fitted as last chip unit and this following chip unit that is formed with liquid storage hole, fluid passage.
According to the present invention, can adopt conventional the whole bag of tricks in the microchannel, to form three-dimensional micron and three-dimensional manometer hierarchy, the three-dimensional micrometer structure of array arrangement or the 3-D nano, structure that array is arranged that array is arranged, for example, can pass through physical method, mill processing methods such as quarter, soft lithographic technique as numerical control, preparation triangular array, mastoid process shape array and gear shape array; Also can pass through chemical method, the preparation nano-wire array, for example, zinc oxide nano-wire array, TiOx nano linear array, tin oxide nano linear array, carbon nano pipe array, metal nanometer line array, silicon nanowire array etc.; The preparation method of described nano-wire array can adopt the method for this area routine to carry out, the example that is prepared as with zinc oxide nanowire, can prepare zinc oxide (ZnO) nano-wire array in microchannel surface by two step solwution methods: ZnO colloidal sol evenly is applied to the quartz surfaces that is formed with the microchannel, 420 ℃ of annealing down, form the crystal seed film of one deck 100-200 nanometer thickness, then quartz is immersed in the aqueous solution of zinc nitrate hexahydrate (0.025M) and hexa (0.025M), heated 15 hours down at 85 ℃.At last, use washed with de-ionized water, 85 ℃ of oven dry down.Obtain zinc oxide nano-wire array.
According to the present invention, the method of last chip unit and following chip unit involution can be adopted the method for various routines, for example, heat sealing, adhesive involution, the auxiliary involution of surface active (comprising glass room temperature bonding, crosslinked polymer bonding, the auxiliary bonding of plasma and ultraviolet irradiation activation bonding) and methods such as anode linkage and low temperature adhesion.
According to the present invention, import polymer monomer solution in the microchannel, the surperficial corresponding polymerization of the 3-D nano, structure that three-dimensional micrometer structure that the three-dimensional micron that the array that polymer monomer is formed in step (1) is arranged and three-dimensional manometer hierarchy, array are arranged or array are arranged forms three-dimensional micron and the three-dimensional micrometer structure of the polymer that three-dimensional manometer hierarchy, array are arranged or the 3-D nano, structure of the polymer that array is arranged of the polymer of array arrangement; The condition of described polymerization is decided on different polymer monomer solution, and the amount of the monomer solution of described formation polymer will satisfy the three-dimensional micron and the three-dimensional manometer hierarchy of the polymer that can access the array arrangement, the three-dimensional micrometer structure of the polymer that array is arranged, or the needs of the 3-D nano, structure of the polymer of array arrangement, the consumption that is preferably formed the monomer solution of polymer will make the three-dimensional micron and the three-dimensional manometer hierarchy of the polymer that the array of formation arranges, the three-dimensional micrometer structure of the polymer that array is arranged, or the volume of the 3-D nano, structure of the polymer arranged of array accounts for the 60-90% of whole microchannel total measurement (volume), is preferably 70-80%.
Described monomer is selected from the monomer of one or more polymer in azobenzene polymer, polypyrrole, polyaniline, PNIPAM, poly-isopropyl methyl acrylamide, carbopol gel and the polyurethane hydrogel.
According to the present invention, when needs are utilized the effect in outfield that described polymer is had can to produce specific response to described outfield, the outfield need be connected with micro-fluidic chip or the outfield is directly acted on micro-fluidic chip, difference according to the outfield, can adopt diverse ways that the outfield is connected with micro-fluidic chip, for example: can on following chip, plate metal wire (gold, copper) back and be connected with external electrical field; Three electrodes in the integrated electrochemical polymerization of chip up and down are connected with the electrode of electrochemical workstation; Chip is placed on makes temperature (heat) outfield directly act on chip on the hot platform; Directly chip is placed under the light source, makes the light outfield directly act on chip.
According to the present invention, after method of the present invention also is included in chip unit surface formation liquid storage hole, fluid passage and microchannel, the step of behind the 3-D nano, structure of the three-dimensional micrometer structure of the polymer that three-dimensional micron and three-dimensional manometer hierarchy, the array of the polymer that array is arranged are arranged or the polymer that array is arranged, the microchannel being cleaned, the method of described cleaning is conventionally known to one of skill in the art, for example, can clean with in deionized water, ethanol, the acetone one or more, remove the impurity in the passage.
Described base material can be the various materials that are used to prepare micro-fluidic chip, for example, can be selected from quartz, glass, monocrystalline silicon, polymethyl methacrylate, dimethyl silicone polymer, polyamide, polyethylene, Merlon, copper, aluminium, stainless steel and the nickel one or more.
Micro-fluidic chip provided by the invention, can select one or more outfields to the micro-fluidic chip effect as required, can realize control to the flow regime of microfluid in the microchannel, have intelligent controllability, preparation/simple to operate, applied widely, accuracy is high, easily and other functional unit characteristics such as integrated on chip.
To further describe in detail the present invention by specific embodiment below.
Present embodiment is used to illustrate the preparation of micro-fluidic chip
As shown in Figure 1, draw the design configuration of micro-fluidic chip by CAD (CAD), according to design drawing, (length is 4 centimetres at a slice quartz plate with the laser ablation method, width is 3 centimetres, and thickness is 1 millimeter) surface etch goes out required chip liquid storage hole 1 (diameter is 1 millimeter a circular hole), fluid passage 2 (20 * 0.3 * 0.3 millimeter (length/width/degree of depth)) and microchannel 3 (15 * 0.2 * 0.2 millimeter (length/width/degree of depth)).Clean quartz plate one by one with deionized water, ethanol, acetone, deionized water, and 100 ℃ of oven dry down.
Zinc oxide (ZnO) nano-wire array prepares in microchannel surface by two step solwution methods: ZnO colloidal sol evenly is applied to the quartz surfaces that is formed with the microchannel, 420 ℃ of annealing down, form the crystal seed film of one deck 100-200 nanometer thickness, then quartz is immersed in the aqueous solution of zinc nitrate hexahydrate (0.025M) and hexa (0.025M), heated 15 hours down at 85 ℃.At last, use washed with de-ionized water, 85 ℃ of oven dry down.Obtain the three-dimensional manometer linear array of zinc oxide, nano wire average diameter 80 nanometers highly are about 150 microns, and the average headway between nano wire and the nano wire is 100 nanometers, and three-dimensional zinc oxide nano-wire array accounts for 40% of microchannel volume.On this basis, carry out gold-platedly on the three-dimensional manometer linear array surface of zinc oxide, and the electrode of a vertical microchannel connects gold thread.
Prepare the onesize quartz plate of another sheet according to the method described above, then above-mentioned two bauerite sheets are carried out involution as last chip unit and following chip unit by the heat sealing method respectively, and liquid storage hole, fluid passage and microchannel be enclosed between the two bauerite sheets (if, liquid storage hole and fluid passage and microchannel are on different chips up and down, and what liquid storage hole should be with the fluid passage so is terminal corresponding; If preparation is (last or following) on a chip, another chip is the involution effect, and is so undoubted, and liquid storage hole is the end in the fluid passage certainly).
Have the three-dimensional micron and the three-dimensional manometer hierarchy of the polymer that corresponding array arranges in the surface preparation of above-mentioned three-dimensional zinc oxide nano-wire array (being equivalent to the 3-D nano, structure 4 among Fig. 1).After the logical nitrogen deaeration of aniline-vinyl sulfonic acid sodium-hydrochloric acid (concentration of hydrochloric acid is 1 mol) solution (aniline-vinyl sulfonic acid sodium-hydrochloric acid is 186 μ L/2mL/7.8mL), import in the microchannel by syringe pump,-0.2 to 1.1V, flow velocity is under the 10 μ L/min, carried out electrochemical polymerization 30 minutes by CV method (cyclic voltammetry), make a three-dimensional micron and the three-dimensional manometer hierarchy with polyaniline that corresponding array arranges on the surface of above-mentioned zinc oxide nano-wire array, three-dimensional micron of the polyaniline that array is arranged and three-dimensional manometer hierarchy account for 80% of microchannel volume.With syringe pump deionized water is imported and to clean the microchannel in the micro-fluidic chip, obtain intelligent little valve based on micro-fluidic chip.The wavelength that hockets is that placed 2 hours the UV-irradiation 30 minutes and the dark place of 365 nanometers, and the surface property of zinc oxide (there is polyaniline the zinc oxide outside, but is not to cover fully, and the space is arranged) will carry out reversible transition between hydrophilic super-hydrophobic and super; To descend gold thread on the quartz plate of chip with after external electrical field is connected simultaneously, externally electric field regulation and control (0.2V to 1.0V) down, polyaniline both taken place surface property hydrophilic and hydrophobic between change, volume also changes between pucker ﹠ bloat simultaneously.Therefore, the three-dimensional micron of the polyaniline of being arranged by array and this little valve that the three-dimensional manometer hierarchy forms can be under the coordinated regulations of light and electric field, and surface property and the bulk effect of polyaniline of gradual change ground by controlling zinc oxide and polyaniline carried out in the microchannel the mobile intelligent response of microfluid and controlled.And, (working pressure range of constant pressure pump is 0-10MPa by constant pressure pump, pressure is that 0＜pressure≤10MPa) applies above-mentioned light and electric coordinative role when deionized water being delivered in the microchannel of micro-fluidic chip and to this micro-fluidic chip in the enforcement, in chip fluid outlet the carrying out measurement of de-ionized water flow rate, the flow of discovery deionized water changes with the change of light and current field condition, and the flow velocity of final deionized water is 0, intelligent little valve that above-mentioned micro-fluidic chip is described thus can produce Based Intelligent Control to microfluidic flow really under light and electric field synergistic effect, when the little valve of intelligence cut out fully, the flow velocity of microfluid was zero.
Present embodiment is used to illustrate the preparation of micro-fluidic chip
As shown in Figure 1, draw the design configuration of micro-fluidic chip by CAD (CAD), according to design drawing, (length is 5 centimetres at a bauerite with the quasi-molecule laser etching machine, width is 4 centimetres, thickness is 2 millimeters) surface etch goes out required chip liquid storage hole (diameter is 2 millimeters a circular hole), fluid passage (20 * 0.2 * 0.2 millimeter (length/width/dark)) and microchannel (15 * 0.2 * 0.2 millimeter (length/width/deeply)), clean substrate surface, and dry naturally with deionized water, ethanol, deionized water, ethanol.
Pass through two-step method: soft etching and chemical corrosion method, decline rice and nanometer hierarchy of preparation papillary tapered array in the microchannel, easy steps is as follows: the photomask that utilizes the preparation of chromium layer, pass through photo-etching machine exposal, the design transfer of mask is arrived the quartz plate surface, carry out degree of depth chemical attack (15ml hydrofluoric acid/0.1699g silver nitrate/35ml water) again, the single mastoid process that obtains at last is of a size of: 150 μ m/50 μ m (height/middle part is wide), spacing between the mastoid process is 10 μ m, on the surface of mastoid process be the nano particle of 100-200 nanometer form bunch.
The quartz plate that another sheet is onesize is as last chip, with the quartz plate of chip under the above-mentioned conduct with the double pressure adhesive membrane (
8890) carry out involution, and the microchannel is enclosed between the two bauerite sheets.
Carry out the polymerization of N-N-isopropylacrylamide at last, easy steps is as follows: the following chip of above-mentioned preparation was immersed in the sodium hydroxide solution (0.1 mol) 2 minutes, refluxed 6 hours in the toluene solution that contains 5% (percentage by weight) aminopropyl triethoxysilane.At last under 2-bromo isobutyl acylbromide (1.2 mMs/liter) causes, carry out the polymerization of N-isopropyl third rare acid amides, on the papillary tapered array, prepare the three-dimensional micron/three-dimensional manometer hierarchy of poly-N-isopropyl third rare acid amides of respective shapes, account for the 70-80% of microchannel volume.
With syringe pump deionized water is imported and to clean the microchannel in the micro-fluidic chip, obtain the intelligent little valve based on micro-fluidic chip, the little valve body of this intelligence is the temperature-responsive polymer, can be under the regulation and control of temperature microfluid mobile be carried out intelligent response control.Therefore, this little valve can be under temperature adjusting (20-50 ℃), the intelligent response that the flows control that gradual change ground carries out microfluid by the surface hydrophilic-hydrophobic performance and the bulk effect of control poly-N-isopropyl third rare acid amides.And, (working pressure range of constant pressure pump is 0-10MPa by constant pressure pump, pressure is 0＜pressure≤10MPa) deionized water is delivered in the chip microchannel in the enforcement, in chip fluid outlet the carrying out measurement of de-ionized water flow rate, the flow of discovery deionized water changes with the change of temperature, and the flow velocity of final deionized water is 0, intelligent little valve that above-mentioned micro-fluidic chip is described thus can produce intelligent response control to microfluidic flow really under temperature action, when the little valve of intelligence cut out fully, the flow velocity of microfluid was zero.
Present embodiment is used to illustrate the preparation of micro-fluidic chip
As shown in Figure 1, draw the design configuration of micro-fluidic chip by CAD (CAD), according to design drawing, is that (length is 4 centimetres to polymethyl methacrylate by numerical control CNC micro-machining system at a plate substrate, width is 4 centimetres, and thickness is 3 millimeters) the required chip liquid storage hole (diameter is 3 millimeters a circular hole) of surface preparation, fluid passage (15 * 0.4 * 0.4 millimeter (length/width/dark)) and microchannel (15 * 0.2 * 0.2 millimeter (length/width/deeply)).Then, by photoetching-chemical attack-replica technique, the micrometer/nanometer hierarchy of the similar gear-like of preparation on the microchannel of chip, the projection of half gear shape is at channel surface, the gear body diameter is 100 microns, the spacing of adjacent gear is 10 microns, and the little tooth width/ on the gear is the 50-100/50-100 nanometer.On this basis, carry out gold-platedly on the surface of similar gear-like, and the electrode of a vertical microchannel connects gold thread.
After the logical nitrogen deaeration of pyrroles/dodecylbenzenesulfonic acid solution (0.14 mol/0.015 mol), import in the microchannel by syringe pump, flow velocity is 1 μ L/min, under the 0.7V constant voltage, carry out electrochemical polymerization 20 minutes, micron and nanometer hierarchy surface preparation at the type gear shape obtain a polypyrrole thin layer, account for the 70-80% of microchannel volume.With syringe pump deionized water is imported and to clean the microchannel in the micro-fluidic chip, obtain the intelligent little valve based on micro-fluidic chip, this little valve body is the electric field response polymer, can carry out the intelligent response control of microfluidic flow under the regulation and control of electric field.With the gold thread on the polymethyl methacrylate of following chip with after external electrical field is connected, externally electric field regulation and control following (0.6/1.0V), that the surface of polypyrrole had both taken place was hydrophilic-hydrophobic between the transformation of performance, the while volume also changes between pucker ﹠ bloat.Therefore, this little valve can be under the regulation and control of electric field, the intelligent response that the flows control that gradual change ground carries out microfluid by the surface property and the bulk effect of control polypyrrole.And, (working pressure range of constant pressure pump is 0-10MPa by constant pressure pump, pressure is 0＜pressure≤10MPa) deionized water is delivered in the chip microchannel in the enforcement, in chip fluid outlet the carrying out measurement of de-ionized water flow rate, the flow of discovery deionized water changes with the change of electric field level, and the flow velocity of final deionized water is 0, intelligent little valve that above-mentioned micro-fluidic chip is described thus can produce intelligent response to microfluidic flow really under electric field action, when the little valve of intelligence cut out fully, the flow velocity of microfluid was zero.
For the little valve described in the present invention is to be formed on the three-dimensional micrometer structure of the polymer that the array on the microchannel arranges and the 3-D nano, structure of the polymer that array is arranged, and realizes the principle of the controllable operating of the flow regime of microfluid in the microchannel the same with this.
Claims (14)
1. micro-fluidic chip, this micro-fluidic chip comprises chip unit and following chip unit, described surface of going up chip unit and/or following chip unit comprises liquid storage hole, fluid passage that is communicated with liquid storage hole and the microchannel that is communicated with the fluid passage, last chip unit and following chip unit are fitted mutually and the microchannel are enclosed between chip unit and the following chip unit, it is characterized in that: described micro-fluidic chip also comprises little valve, and described little valve is three-dimensional micron and the three-dimensional manometer hierarchy that is formed on the polymer of the array arrangement on the microchannel, the three-dimensional micrometer structure of the polymer that array is arranged, a kind of in the 3-D nano, structure of the polymer that array is arranged; Described polymer has under outer field action can produce specific response to the outfield, described specific response is that the surface chemistry of polymer is formed, one or more the invertibity in the surface property of the 3-D nano, structure of the three-dimensional micrometer structure of the three-dimensional micron of polymer and three-dimensional manometer hierarchy, polymer, polymer and polymer changes, thereby can realize the controllable operating to the flow regime of microfluid in the microchannel;
Described outfield is selected from one or more in the ionic strength of the pH value of light, electricity, temperature, microfluid and microfluid.
2. micro-fluidic chip according to claim 1, wherein, the invertibity that the surface chemistry of described polymer is formed changes, and is the oxidation state of polymer and the invertibity transformation of going back between the ortho states;
The three-dimensional micron of described polymer and the invertibity of three-dimensional manometer hierarchy change, be the structure of the three-dimensional manometer yardstick of polymer changes back the structure of three-dimensional manometer yardstick again after the structure of three-dimensional micro-meter scale changes reversible transition, and the structure of three-dimensional micro-meter scale return former three-dimensional micro-meter scale after more the structure of the three-dimensional micro-meter scale of large scale changes;
The invertibity of the three-dimensional micrometer structure of described polymer changes, and is that the structure of the three-dimensional micro-meter scale of polymer returns former three-dimensional micro-meter scale after more the structure of the three-dimensional micro-meter scale of large scale changes;
The invertibity of the 3-D nano, structure of described polymer changes, and is that the structure of the three-dimensional manometer yardstick of polymer returns former three-dimensional manometer yardstick after more the structure of the three-dimensional manometer yardstick of large scale changes;
The invertibity of the surface property of described polymer changes, and is between the hydrophily of polymer and the hydrophobicity or the invertibity between lipophile and the oleophobic property changes.
3. micro-fluidic chip according to claim 2, wherein, it is the Superhydrophilic and the transformation of the invertibity between the super-hydrophobicity of polymer that the hydrophily of described polymer and the invertibity between the hydrophobicity change, and it is the super lipophile and the transformation of the invertibity between the super oleophobic property of polymer that the lipophile of described polymer and the invertibity between the oleophobic property change.
4. micro-fluidic chip according to claim 1, wherein, the volume of the 3-D nano, structure of the polymer of the three-dimensional micrometer structure of the three-dimensional micron of the polymer arranged of the described array that is formed on the microchannel and the polymer that three-dimensional manometer hierarchy, array are arranged or array arrangement accounts for the 60-90% of whole microchannel total measurement (volume).
5. according to claim 1,2 or 4 described micro-fluidic chips, wherein, the 3-D nano, structure of the three-dimensional micrometer structure of the polymer of the three-dimensional micron of the polymer of described array arrangement and three-dimensional manometer hierarchy, array arrangement or the polymer that array is arranged is one or more in nano-wire array structure, triangular array structure, mastoid process shape array structure and the gear shape array structure.
6. micro-fluidic chip according to claim 1, wherein, described liquid storage hole, fluid passage and microchannel are formed on down the surface of chip unit, and described little valve is formed on this microchannel.
7. according to claim 1,2 or 4 described micro-fluidic chips, wherein, described polymer is selected from one or more in azobenzene polymer, polypyrrole, polyaniline, PNIPAM, poly-isopropyl methyl acrylamide, carbopol gel and the polyurethane hydrogel.
8. the preparation method according to any described micro-fluidic chip of claim 1-7 is characterized in that, this method may further comprise the steps:
(1) will go up chip unit and fit mutually with following chip unit, described surface of going up chip unit and/or following chip unit comprises liquid storage hole, the fluid passage that is communicated with liquid storage hole and the microchannel that is communicated with the fluid passage; The surface of described microchannel is formed with three-dimensional micron and three-dimensional manometer hierarchy, the three-dimensional micrometer structure of array arrangement or the 3-D nano, structure that array is arranged that array is arranged, and the mode of described applying is enclosed between chip unit and the following chip unit microchannel;
The substrate surface that the described preparation method who goes up chip unit and/or following chip unit is included in chip unit and/or following chip unit forms liquid storage hole, fluid passage and microchannel, described liquid storage hole is communicated with described fluid passage, and described microchannel is communicated with described fluid passage; Form three-dimensional micron and three-dimensional manometer hierarchy, the three-dimensional micrometer structure of array arrangement or the 3-D nano, structure that array is arranged that array is arranged in described microchannel surface then;
(2) in the microchannel, import polymer monomer solution, the surperficial corresponding polymerization of the 3-D nano, structure that three-dimensional micrometer structure that the three-dimensional micron that the array that polymer monomer is formed in step (1) is arranged and three-dimensional manometer hierarchy, array are arranged or array are arranged forms three-dimensional micron and the three-dimensional micrometer structure of the polymer that three-dimensional manometer hierarchy, array are arranged or the 3-D nano, structure of the polymer that array is arranged of the polymer of array arrangement, forms little valve thus; Described polymer has under outer field action can produce specific response to the outfield, described specific response is that the surface chemistry of polymer is formed, one or more the invertibity in the surface property of the 3-D nano, structure of the three-dimensional micrometer structure of the three-dimensional micron of polymer and three-dimensional manometer hierarchy, polymer, polymer and polymer changes, thereby can realize the controllable operating to the flow regime of microfluid in the microchannel;
Described outfield is selected from one or more in the ionic strength of the pH value of light, electricity, temperature, microfluid and microfluid.
9. method according to claim 8, wherein, described liquid storage hole, fluid passage and microchannel are formed on down the surface of chip unit, and the 3-D nano, structure that three-dimensional micrometer structure that the three-dimensional micron that described array is arranged and three-dimensional manometer hierarchy, array are arranged or array are arranged is formed on this microchannel; Described little valve is the 3-D nano, structure of the polymer of the three-dimensional micrometer structure of the three-dimensional micron of the polymer arranged of the corresponding array that is formed on the 3-D nano, structure that three-dimensional micrometer structure that three-dimensional micron that this array arranges and three-dimensional manometer hierarchy, array arranges or array arranges and the polymer that three-dimensional manometer hierarchy, array are arranged or array arrangement.
10. according to Claim 8 or 9 described methods, wherein, three-dimensional micron and three-dimensional manometer hierarchy that the described array that forms in microchannel surface is arranged, the three-dimensional micrometer structure that array is arranged, or the 3-D nano, structure of array arrangement, and the three-dimensional micron and the three-dimensional manometer hierarchy of the polymer of described array arrangement, the three-dimensional micrometer structure of the polymer that array is arranged, or the 3-D nano, structure of the polymer of array arrangement is the nano-wire array structure, the triangular array structure, in mastoid process shape array structure and the gear shape array structure one or more.
11. method according to claim 10, wherein, the volume of the 3-D nano, structure of the three-dimensional micrometer structure arranged of the three-dimensional micron arranged of the described array that forms in microchannel surface and three-dimensional manometer hierarchy, array or array arrangement accounts for the 50-80% of whole microchannel total measurement (volume).
12. method according to claim 8, wherein, described polymer monomer is selected from one or more in azobenzene polymer, polypyrrole, polyaniline, PNIPAM, poly-isopropyl methyl acrylamide, carbopol gel and the polyurethane hydrogel.
13. method according to claim 8, wherein, the method for described formation liquid storage hole, fluid passage and microchannel is selected from numerical control and mills in quarter, laser-induced thermal etching, photoetching-electroforming-injection molding technology, method of molding, pressure sintering, chemical attack, the soft etching one or more; The method of the 3-D nano, structure that three-dimensional micrometer structure that the three-dimensional micron that described formation array is arranged and three-dimensional manometer hierarchy, array are arranged or array are arranged is physical method and/or chemical method.
14. method according to claim 8, wherein, described base material is selected from one or more in quartz, glass, monocrystalline silicon, polymethyl methacrylate, Merlon, polyamide, polyethylene, polypropylene, polystyrene, dimethyl silicone polymer, copper, aluminium, stainless steel and the nickel.
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| GB201419879D0 (en) | 2014-11-07 | 2014-12-24 | Ibm | Self-limited, anisotropic wet etching of transverse vias in microfluidic chips |
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| GB2404718B (en) * | 2003-08-05 | 2006-11-29 | E2V Tech Uk Ltd | Microfluidic components |
| KR100763922B1 (en) * | 2006-04-04 | 2007-10-05 | 삼성전자주식회사 | Valve unit and apparatus with the same |
| US20100093559A1 (en) * | 2007-03-28 | 2010-04-15 | Zhonghui Fan | Microfluidic Array Device and System for Simultaneous Detection of Multiple Analytes |
| US8152136B2 (en) * | 2007-11-26 | 2012-04-10 | The Hong Kong Polytechnic University | Polymer microvalve with actuators and devices |
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