CN110395688A - A kind of micro-nano particle precipitation equipment - Google Patents
A kind of micro-nano particle precipitation equipment Download PDFInfo
- Publication number
- CN110395688A CN110395688A CN201910592267.7A CN201910592267A CN110395688A CN 110395688 A CN110395688 A CN 110395688A CN 201910592267 A CN201910592267 A CN 201910592267A CN 110395688 A CN110395688 A CN 110395688A
- Authority
- CN
- China
- Prior art keywords
- micro
- substrate
- suspension
- micropore diameter
- layer
- Prior art date
- Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
- Pending
Links
- 239000002105 nanoparticle Substances 0.000 title claims abstract description 16
- 238000001556 precipitation Methods 0.000 title claims abstract description 16
- 239000000758 substrate Substances 0.000 claims abstract description 77
- 239000000725 suspension Substances 0.000 claims abstract description 67
- 239000010410 layer Substances 0.000 claims abstract description 54
- 239000007788 liquid Substances 0.000 claims abstract description 38
- 239000002245 particle Substances 0.000 claims abstract description 28
- 238000006073 displacement reaction Methods 0.000 claims abstract description 23
- 230000010412 perfusion Effects 0.000 claims abstract description 16
- 239000011241 protective layer Substances 0.000 claims abstract description 13
- 230000008021 deposition Effects 0.000 claims description 9
- 239000000203 mixture Substances 0.000 claims description 7
- XMWRBQBLMFGWIX-UHFFFAOYSA-N C60 fullerene Chemical compound C12=C3C(C4=C56)=C7C8=C5C5=C9C%10=C6C6=C4C1=C1C4=C6C6=C%10C%10=C9C9=C%11C5=C8C5=C8C7=C3C3=C7C2=C1C1=C2C4=C6C4=C%10C6=C9C9=C%11C5=C5C8=C3C3=C7C1=C1C2=C4C6=C2C9=C5C3=C12 XMWRBQBLMFGWIX-UHFFFAOYSA-N 0.000 claims description 5
- 229910003472 fullerene Inorganic materials 0.000 claims description 5
- 229920002521 macromolecule Polymers 0.000 claims description 5
- 230000005540 biological transmission Effects 0.000 claims description 4
- 239000003822 epoxy resin Substances 0.000 claims description 4
- 238000012544 monitoring process Methods 0.000 claims description 4
- 229920000647 polyepoxide Polymers 0.000 claims description 4
- 229920001296 polysiloxane Polymers 0.000 claims description 4
- 239000002023 wood Substances 0.000 claims description 4
- 240000007594 Oryza sativa Species 0.000 claims 1
- 235000007164 Oryza sativa Nutrition 0.000 claims 1
- 235000009566 rice Nutrition 0.000 claims 1
- 230000032258 transport Effects 0.000 claims 1
- 238000000034 method Methods 0.000 abstract description 8
- 239000000470 constituent Substances 0.000 abstract description 6
- 230000009469 supplementation Effects 0.000 abstract description 5
- 238000001338 self-assembly Methods 0.000 abstract description 3
- 239000000463 material Substances 0.000 abstract description 2
- 238000010586 diagram Methods 0.000 description 10
- 239000006228 supernatant Substances 0.000 description 5
- 230000000694 effects Effects 0.000 description 3
- 238000002347 injection Methods 0.000 description 3
- 239000007924 injection Substances 0.000 description 3
- 239000007864 aqueous solution Substances 0.000 description 1
- 238000003491 array Methods 0.000 description 1
- 230000009286 beneficial effect Effects 0.000 description 1
- 230000007547 defect Effects 0.000 description 1
- 230000008020 evaporation Effects 0.000 description 1
- 238000001704 evaporation Methods 0.000 description 1
- 238000004519 manufacturing process Methods 0.000 description 1
- 230000009467 reduction Effects 0.000 description 1
- 239000002904 solvent Substances 0.000 description 1
- 239000013589 supplement Substances 0.000 description 1
Classifications
-
- B—PERFORMING OPERATIONS; TRANSPORTING
- B81—MICROSTRUCTURAL TECHNOLOGY
- B81C—PROCESSES OR APPARATUS SPECIALLY ADAPTED FOR THE MANUFACTURE OR TREATMENT OF MICROSTRUCTURAL DEVICES OR SYSTEMS
- B81C1/00—Manufacture or treatment of devices or systems in or on a substrate
- B81C1/00349—Creating layers of material on a substrate
- B81C1/00373—Selective deposition, e.g. printing or microcontact printing
-
- B—PERFORMING OPERATIONS; TRANSPORTING
- B81—MICROSTRUCTURAL TECHNOLOGY
- B81C—PROCESSES OR APPARATUS SPECIALLY ADAPTED FOR THE MANUFACTURE OR TREATMENT OF MICROSTRUCTURAL DEVICES OR SYSTEMS
- B81C2201/00—Manufacture or treatment of microstructural devices or systems
- B81C2201/01—Manufacture or treatment of microstructural devices or systems in or on a substrate
- B81C2201/0174—Manufacture or treatment of microstructural devices or systems in or on a substrate for making multi-layered devices, film deposition or growing
- B81C2201/0181—Physical Vapour Deposition [PVD], i.e. evaporation, sputtering, ion plating or plasma assisted deposition, ion cluster beam technology
Abstract
The present invention relates to new materials to research and develop field, a kind of micro-nano particle precipitation equipment, including syringe pump, perfusion tube, coverslip, protective layer, microfluidic layer, suspension liquid bridge, substrate, displacement platform and microscope, microfluidic layer includes micropore diameter, microchannel group, main channel and inlet, using microfluidic structures and it is based on capillarity, device carries out particle self assembly by forming the suspension liquid bridge comprising particle to be deposited between micropore diameter and removable substrate, and suspension is supplied using the microfluidic structures of special designing, continuous supplementation suspension and the constituent of its suspended particulates can be adjusted in an assembling process, device can adjust the constituent and continuous supplementation suspension of its suspended particulates in particle self assembling process, it is easy to operate, it is low in cost.
Description
Technical field
The present invention relates to new materials to research and develop field, especially a kind of using microfluidic structures and one based on capillarity
Kind micro-nano particle precipitation equipment.
Background technique
Particle assembling based on capillarity is a kind of (bottom-up) the particle self assembling process from bottom to top of progress
Technology, use a surface that there is the substrate and a coverslip being located above substrate of ordered micro structure, and by one
The drop of a suspension comprising particle to be deposited is limited between substrate and coverslip, then makes coverslip relative to substrate
It is slowly mobile, a cambered surface region, with the evaporation of moisture in suspension, the cambered surface are being formed close to the position of substrate surface
Particle concentration to be deposited in region increases, and a portion deposited particles are deposited on substrate and assembled in an orderly manner.Existing skill
Art defect: the droplet size of suspension is restricted in the prior art, and can not supplement suspension again in an assembling process,
Also it can not change the constituent of drop, a kind of micro-nano particle precipitation equipment is able to solve problem.
Summary of the invention
To solve the above-mentioned problems, apparatus of the present invention between micropore diameter and removable substrate by forming comprising to be deposited
The suspension liquid bridge of particle supplies suspension using the microfluidic structures of special designing to carry out particle self assembly, is assembling
Continuous supplementation suspension and the constituent of its suspended particulates can be adjusted in the process.
The technical scheme adopted by the invention is that:
A kind of micro-nano particle precipitation equipment includes syringe pump, perfusion tube, coverslip, protective layer, microfluidic layer, suspension
Liquid bridge, substrate, displacement platform and microscope, microfluidic layer include micropore diameter, microchannel group, main channel and inlet, and xyz is three-dimensional
Coordinate system, substrate are located on displacement platform, displacement platform light transmission and can be three-dimensional mobile；Silicone compositions are covered with above microfluidic layer
The manufactured protective layer with a thickness of 2 millimeters, the upper surface of protective layer are fixed with coverslip by epoxy resin, and microscope is located at displacement
15 centimeters below platform, for monitoring the suspension between micropore diameter and substrate；Substrate surface has micro-nano array；Microfluid
Layer is made up of SU-8 resinous wood tablet of micro-processing technology, and inlet, main channel, microchannel group and micropore diameter are sequentially communicated,
Inlet is connected to syringe pump by perfusion tube, syringe pump by the suspension comprising particle to be deposited pass sequentially through perfusion tube, into
Liquid mouth, main channel and microchannel group, are transmitted to micropore diameter, and micropore diameter penetrates through the upper and lower surfaces of microfluidic layer, microchannel
Group is that rectangular microfluid slot forms by three sections, and main channel is that a section is rectangular microfluid groove；Lining
When bottom is located at below micropore diameter 0.4 millimeter, suspension can drip from micropore diameter and be formed between microfluidic layer and substrate outstanding
Supernatant liquid bridge；The length of microfluidic layer is 20 millimeters, width is 15 millimeters, with a thickness of 1 millimeter, and the length of micropore diameter is 7 millimeters, wide
Degree be 0.7 millimeter, the microfluid slot cross-section of microchannel group be height for 80 microns, width be 120 microns, the length of main channel
It is 12 millimeters, the height of the microfluid groove section of main channel is 80 microns, width is 160 microns, and the diameter of inlet is 900
Micron；Micro-nano array is the structure directly obtained in substrate surface by micro-nano technology, and micro-nano array can be substrate surface deposition
Orderly molecular structure fullerene molecule cluster, micro-nano array be also possible to substrate surface deposition orderly molecular structure
Organic macromolecule array；Microfluidic layer has an inlet, and main channel is straight way, and microfluidic layer can have two feed liquors
Mouthful, microfluidic layer also can have the main channel of long S-shaped.
The step of being assembled using the particle that a kind of micro-nano particle precipitation equipment carries out substrate surface are as follows:
Step 1 selects suitable substrate according to the size and type of particle to be deposited, and particle to be deposited is existed
Ordered fabrication is carried out in the micro-nano array of substrate；
Substrate is moved to 0.4 millimeter of position below micropore diameter by displacement platform by step 2；
Step 3, configuration include the suspension of particle to be deposited, the aqueous solution of particle concentration 0.1mM to be deposited；
Suspension comprising particle to be deposited is passed sequentially through perfusion tube, inlet using syringe pump, leads and lead to by step 4
Road, microchannel group are transmitted to micropore diameter, and the suspension flow rates of syringe pump output are 1 to 10 mul/min, and suspension is from micro-
Aperture overflow, flow downward and contacted with upper surface of substrate, as a result, the suspension between micropore diameter and substrate form it is outstanding
Supernatant liquid bridge；
Step 5 translates substrate along z positive direction by displacement platform, the suspension in suspension liquid bridge with substrate contact part
Liquid by substrate it is mobile influenced it is also mobile to z positive direction so that the angle of the front side of suspension liquid bridge and substrate contact part from
90 degree of reductions, the speed translated by adjusting displacement platform along z positive direction, so that the angular range from 35 to 55 is spent；
Step 6, with the continuous movement of substrate, the front side of suspension liquid bridge and the contact surface of substrate generate the broken of local and lack,
Effect of the particle in scarce liquid portion by stronger capillary force is broken to be assembled into so that most of can deposit to substrate
In micro-nano array.
The beneficial effects of the present invention are:
Apparatus of the present invention can adjust the constituent of its suspended particulates in particle self assembling process and continuous supplementation is outstanding
Supernatant liquid, it is easy to operate, it is low in cost.
Detailed description of the invention
It is further illustrated below with reference to figure of the invention:
Fig. 1 is schematic diagram of the present invention；
Fig. 2 is the enlarged diagram of substrate；
Fig. 3 is the enlarged diagram of one of microfluidic layer；
Fig. 4 is two enlarged diagram of microfluidic layer；
Fig. 5 is three enlarged diagram of microfluidic layer.
In figure, 1. syringe pumps, 2. perfusion tubes, 3. coverslips, 4. protective layers, 5. microfluidic layers, 5-1. micropore diameter, 5-2. is micro-
Channel group, the main channel 5-3., 5-4. inlet, 6. suspension liquid bridges, 7. substrates, 7-1. micro-nano array, 8. displacement platforms, 9. is micro-
Mirror.
Specific embodiment
If Fig. 1 is schematic diagram of the present invention, including syringe pump (1), perfusion tube (2), coverslip (3), protective layer (4), miniflow
Body layer (5), suspension liquid bridge (6), substrate (7), displacement platform (8) and microscope (9), microfluidic layer (5) include micropore diameter (5-1),
Microchannel group (5-2), main channel (5-3) and inlet (5-4), xyz are three-dimensional system of coordinate, and substrate (7) is located at displacement platform (8)
On, displacement platform (8) light transmission and can be three-dimensional mobile；Suspension forms suspension liquid bridge between microfluidic layer (5) and substrate (7)
(6), microfluidic layer (5) is covered with the protective layer (4) made of silicone compositions with a thickness of 2 millimeters above, protective layer (4) it is upper
Face is fixed with coverslip (3) by epoxy resin, and microscope (9) is located at 15 centimeters below displacement platform (8), micro- for monitoring
Suspension between aperture (5-1) and substrate (7).
If Fig. 2 is the enlarged diagram of substrate, substrate (7) surface has micro-nano array (7-1), and micro-nano array (7-1) is
The structure directly obtained on substrate (7) surface by micro-nano technology, micro-nano array (7-1) can be having for substrate (7) surface deposition
The molecular structure of sequence, such as fullerene molecule cluster, organic macromolecule array.
If Fig. 3 is the enlarged diagram of one of microfluidic layer, microfluidic layer (5) has an inlet (5-4), main channel
(5-3) is straight way, and microfluidic layer (5) is made up of SU-8 resinous wood tablet of micro-processing technology, inlet (5-4), main channel
(5-3), microchannel group (5-2) and micropore diameter (5-1) are sequentially communicated, and inlet (5-4) is connected to syringe pump by perfusion tube (2)
(1), the suspension comprising particle to be deposited is passed sequentially through perfusion tube (2), inlet (5-4), main channel (5- by syringe pump (1)
3) it with microchannel group (5-2), is transmitted to micropore diameter (5-1), micropore diameter (5-1) penetrates through upper surface and the following table of microfluidic layer (5)
Face, the section microchannel group (5-2) You Sangen are rectangular microfluid slot composition, and main channel (5-3) is that a section is length
Rectangular microfluid groove；When substrate (7) is located at below micropore diameter (5-1) 0.4 millimeter, suspension can be from micropore diameter (5-1)
It drips and forms suspension liquid bridge (6) between microfluidic layer (5) and substrate (7)；The length of microfluidic layer (5) is 20 millimeters, wide
Degree is 15 millimeters, with a thickness of 1 millimeter, and the length of micropore diameter (5-1) is 7 millimeters, width is 0.7 millimeter, microchannel group (5-2)
Microfluid slot cross-section be height for 80 microns, width be 120 microns, the length of main channel (5-3) is 12 millimeters, main channel
The height of the microfluid groove section of (5-3) is 80 microns, width is 160 microns, and the diameter of inlet (5-4) is 900 microns.
If Fig. 4 is two enlarged diagram of microfluidic layer, there are two inlet (5-4) for microfluidic layer (5) tool, can adopt
With two syringe pumps (1) respectively to the suspension of two inlet (5-4) injection different components.
If Fig. 5 is three enlarged diagram of microfluidic layer, microfluidic layer (5) has the main channel (5-3) of long S-shaped, energy
Enough so that particle to be deposited is more evenly distributed in suspension.
Embodiment, such as Fig. 2, micro-nano array (7-1) are the structures directly obtained on substrate (7) surface by micro-nano technology；
Embodiment, micro-nano array (7-1) are the fullerene molecule groups of the orderly molecular structure of substrate (7) surface deposition
Cluster；
Embodiment, micro-nano array (7-1) are the organic macromolecule battle arrays of the orderly molecular structure of substrate (7) surface deposition
Column；
Embodiment, such as Fig. 3, microfluidic layer (5) have an inlet (5-4), and main channel (5-3) is straight way；
Embodiment, such as Fig. 4, there are two inlet (5-4) for microfluidic layer (5) tool, can be using two syringe pumps (1) respectively
To the suspension of two inlet (5-4) injection different components；
Embodiment, such as Fig. 5, microfluidic layer (5) have the main channel (5-3) of long S-shaped, enable to particle to be deposited outstanding
It is more evenly distributed in supernatant liquid.
Present apparatus working principle: substrate (7) is moved to by 0.4 millimeter of position below micropore diameter (5-1) by displacement platform (8)
It sets, the suspension comprising particle to be deposited is passed sequentially through by perfusion tube (2), inlet (5-4), main channel using syringe pump (1)
(5-3), microchannel group (5-2) are transmitted to micropore diameter (5-1), suspension from micropore diameter (5-1) overflow, flow downward and and substrate
(7) upper surface contacts, as a result, the suspension between micropore diameter (5-1) and substrate (7) forms suspension liquid bridge (6), at this time
Angle between the outside liquid level and substrate (7) of suspension liquid bridge (6) is 90 degree；The size of suspension liquid bridge (6) depends not only on micro-
The length and width in aperture (5-1) also depend on contact angle of the suspension relative to substrate (7), and can pass through adjusting
Substrate (7) and micropore diameter (5-1) control the height of suspension liquid bridge (6) in the relative position in the vertical direction y；Define suspension liquid bridge
(6) positive z direction side is the front side of suspension liquid bridge (6), by displacement platform (8) substrate (7) is translated along z positive direction, hangs
It is influenced by substrate (7) movement also to the movement of z positive direction in supernatant liquid bridge (6) with the suspension of substrate (7) contact portion, so that
The front side of suspension liquid bridge (6) and the angle of substrate (7) contact portion reduce from 90 degree, cause the front side of suspension liquid bridge (6) corresponding
The exterior surface area that is contacted with atmospheric environment increase, the evaporative effect of solvent can be in the front side of suspension liquid bridge (6) in suspension
Generate a laminar flow, the particle in suspension be pulled to the front side of suspension liquid bridge (6), especially with suspension liquid bridge (6)
The part that front side is contacted with substrate (7) generates the particulate buildup of greater density；With the continuous movement of substrate (7), suspension liquid bridge
(6) contact surface of front side and substrate (7) generates the broken of local and lacks, and breaks the particle in scarce liquid portion by stronger capillary
The effect of Guan Li is assembled into micro-nano array (7-1) so that most of can deposit to substrate (7).
A kind of micro-nano particle precipitation equipment include syringe pump (1), perfusion tube (2), coverslip (3), protective layer (4),
Microfluidic layer (5), suspension liquid bridge (6), substrate (7), displacement platform (8) and microscope (9), microfluidic layer (5) include micropore diameter (5-
1), microchannel group (5-2), main channel (5-3) and inlet (5-4), xyz are three-dimensional system of coordinate, and substrate (7) is located at displacement platform
(8) on, displacement platform (8) light transmission and can be three-dimensional mobile；Microfluidic layer (5) be covered with above made of silicone compositions with a thickness of
2 millimeters of protective layer (4), the upper surface of protective layer (4) are fixed with coverslip (3) by epoxy resin, and microscope (9) is located at displacement
15 centimeters below platform (8), for monitoring the suspension between micropore diameter (5-1) and substrate (7)；Substrate (7) surface has
Micro-nano array (7-1)；Microfluidic layer (5) is made up of SU-8 resinous wood tablet of micro-processing technology, and inlet (5-4), master are logical
Road (5-3), microchannel group (5-2) and micropore diameter (5-1) are sequentially communicated, and inlet (5-4) is connected to injection by perfusion tube (2)
It pumps (1), the suspension comprising particle to be deposited is passed sequentially through perfusion tube (2), inlet (5-4), main channel by syringe pump (1)
(5-3) and microchannel group (5-2), is transmitted to micropore diameter (5-1), and micropore diameter (5-1) penetrates through the upper surface of microfluidic layer (5) under
Surface, the section microchannel group (5-2) You Sangen are rectangular microfluid slot composition, and main channel (5-3) is that a section is
Rectangular microfluid groove；When substrate (7) is located at below micropore diameter (5-1) 0.4 millimeter, suspension can be from micropore diameter (5-
1) it drips and forms suspension liquid bridge (6) between microfluidic layer (5) and substrate (7)；The length of microfluidic layer (5) be 20 millimeters,
Width is 15 millimeters, with a thickness of 1 millimeter, and the length of micropore diameter (5-1) is 7 millimeters, width is 0.7 millimeter, microchannel group (5-2)
Microfluid slot cross-section be height for 80 microns, width be 120 microns, the length of main channel (5-3) is 12 millimeters, main channel
The height of the microfluid groove section of (5-3) is 80 microns, width is 160 microns, and the diameter of inlet (5-4) is 900 microns；
Micro-nano array (7-1) is the structure directly obtained on substrate (7) surface by micro-nano technology, and micro-nano array (7-1) can be substrate
(7) the fullerene molecule cluster of the orderly molecular structure of surface deposition, micro-nano array (7-1) are also possible to substrate (7) surface
The organic macromolecule array of the orderly molecular structure of deposition；Microfluidic layer (5) has an inlet (5-4), main channel (5-
It 3) is straight way, microfluidic layer (5) can have two inlets (5-4), and the master that microfluidic layer (5) also can have long S-shaped is logical
Road (5-3).
Apparatus of the present invention by between the microfluidic structures of special designing and moveable substrate formed suspension liquid bridge come
Particle self assembly is carried out, the constituent and continuous supplementation suspension of its suspended particulates can be adjusted in an assembling process.
Claims (8)
1. a kind of micro-nano particle precipitation equipment, including syringe pump (1), perfusion tube (2), coverslip (3), protective layer (4), microfluid
Layer (5), suspension liquid bridge (6), substrate (7), displacement platform (8) and microscope (9), microfluidic layer (5) includes micropore diameter (5-1), micro-
Channel group (5-2), main channel (5-3) and inlet (5-4), xyz are three-dimensional system of coordinate, and substrate (7) is located on displacement platform (8),
Displacement platform (8) light transmission and can be three-dimensional mobile,
It is characterized in that: microfluidic layer (5) is covered with the protective layer (4) made of silicone compositions with a thickness of 2 millimeters, protection above
The upper surface of layer (4) is fixed with coverslip (3) by epoxy resin, and microscope (9) is located at 15 centimeters below displacement platform (8),
For monitoring the suspension between micropore diameter (5-1) and substrate (7)；Substrate (7) surface has micro-nano array (7-1)；Microfluid
Layer (5) is made up of SU-8 resinous wood tablet of micro-processing technology, inlet (5-4), main channel (5-3), microchannel group (5-2)
It is sequentially communicated with micropore diameter (5-1), inlet (5-4) is connected to syringe pump (1) by perfusion tube (2), and syringe pump (1) will include
The suspension of particle to be deposited passes sequentially through perfusion tube (2), inlet (5-4), main channel (5-3) and microchannel group (5-2), passes
It transports to micropore diameter (5-1), micropore diameter (5-1) penetrates through the upper and lower surfaces of microfluidic layer (5), and microchannel group (5-2) is by three
Root section is rectangular microfluid slot composition, and main channel (5-3) is that a section is rectangular microfluid groove；Substrate
(7) be located at micropore diameter (5-1) below 0.4 millimeter when, suspension can drip from micropore diameter (5-1) and microfluidic layer (5) with
Suspension liquid bridge (6) are formed between substrate (7).
2. a kind of micro-nano particle precipitation equipment as described in claim 1, it is characterized in that: the length of microfluidic layer (5) is 20 millis
Rice, width are 15 millimeters, with a thickness of 1 millimeter, and the length of micropore diameter (5-1) is 7 millimeters, width is 0.7 millimeter, microchannel group
The microfluid slot cross-section of (5-2) be height for 80 microns, width be 120 microns, the length of main channel (5-3) is 12 millimeters,
The height of the microfluid groove section of main channel (5-3) is 80 microns, width is 160 microns, and the diameter of inlet (5-4) is
900 microns.
3. a kind of micro-nano particle precipitation equipment as described in claim 1, it is characterized in that: micro-nano array (7-1) is directly to serve as a contrast
The structure that bottom (7) surface is obtained by micro-nano technology.
4. a kind of micro-nano particle precipitation equipment as described in claim 1, it is characterized in that: micro-nano array (7-1) is substrate (7) table
The fullerene molecule cluster of the orderly molecular structure of face deposition.
5. a kind of micro-nano particle precipitation equipment as described in claim 1, it is characterized in that: micro-nano array (7-1) is substrate (7) table
The organic macromolecule array of the orderly molecular structure of face deposition.
6. a kind of micro-nano particle precipitation equipment as described in claim 1, it is characterized in that: microfluidic layer (5) has a feed liquor
Mouth (5-4), main channel (5-3) is straight way.
7. a kind of micro-nano particle precipitation equipment as described in claim 1, it is characterized in that: there are two feed liquors for microfluidic layer (5) tool
Mouth (5-4).
8. a kind of micro-nano particle precipitation equipment as described in claim 1, it is characterized in that: microfluidic layer (5) has the master of long S-shaped
Channel (5-3).
Priority Applications (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| CN201910592267.7A CN110395688A (en) | 2019-06-24 | 2019-06-24 | A kind of micro-nano particle precipitation equipment |
Applications Claiming Priority (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| CN201910592267.7A CN110395688A (en) | 2019-06-24 | 2019-06-24 | A kind of micro-nano particle precipitation equipment |
Publications (1)
| Publication Number | Publication Date |
|---|---|
| CN110395688A true CN110395688A (en) | 2019-11-01 |
Family
ID=68323751
Family Applications (1)
| Application Number | Title | Priority Date | Filing Date |
|---|---|---|---|
| CN201910592267.7A Pending CN110395688A (en) | 2019-06-24 | 2019-06-24 | A kind of micro-nano particle precipitation equipment |
Country Status (1)
| Country | Link |
|---|---|
| CN (1) | CN110395688A (en) |
Citations (9)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| US6444150B1 (en) * | 1998-09-25 | 2002-09-03 | Sandia Corporation | Method of filling a microchannel separation column |
| US20050118338A1 (en) * | 2003-05-02 | 2005-06-02 | Johns Hopkins University | Control of the spatial distribution and sorting of micro-or nano-meter or molecular scale objects on patterned surfaces |
| US7744737B1 (en) * | 2007-07-26 | 2010-06-29 | Sandia Corporation | Microfluidic device for the assembly and transport of microparticles |
| CN102059161A (en) * | 2009-11-18 | 2011-05-18 | 中国科学院化学研究所 | Microfluidic chip and manufacturing method thereof |
| US20110212308A1 (en) * | 2007-06-25 | 2011-09-01 | Canatu Oy | Fibrous networks and a method and apparatus for continuous or batch fibrous network production |
| US20130287999A1 (en) * | 2010-06-08 | 2013-10-31 | Northeastern University | Interfacial Convective Assembly for High Aspect Ratio Structures Without Surface Treatment |
| CN108344866A (en) * | 2018-01-12 | 2018-07-31 | 天津大学 | A kind of fluidic chip detecting system and the method based on system progress sample detection |
| CN108432132A (en) * | 2015-11-11 | 2018-08-21 | 新加坡科技与设计大学 | Microfluid particle manipulation |
| CN210764308U (en) * | 2019-06-24 | 2020-06-16 | 金华职业技术学院 | Micro-nano particle deposition device |
-
2019
- 2019-06-24 CN CN201910592267.7A patent/CN110395688A/en active Pending
Patent Citations (9)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| US6444150B1 (en) * | 1998-09-25 | 2002-09-03 | Sandia Corporation | Method of filling a microchannel separation column |
| US20050118338A1 (en) * | 2003-05-02 | 2005-06-02 | Johns Hopkins University | Control of the spatial distribution and sorting of micro-or nano-meter or molecular scale objects on patterned surfaces |
| US20110212308A1 (en) * | 2007-06-25 | 2011-09-01 | Canatu Oy | Fibrous networks and a method and apparatus for continuous or batch fibrous network production |
| US7744737B1 (en) * | 2007-07-26 | 2010-06-29 | Sandia Corporation | Microfluidic device for the assembly and transport of microparticles |
| CN102059161A (en) * | 2009-11-18 | 2011-05-18 | 中国科学院化学研究所 | Microfluidic chip and manufacturing method thereof |
| US20130287999A1 (en) * | 2010-06-08 | 2013-10-31 | Northeastern University | Interfacial Convective Assembly for High Aspect Ratio Structures Without Surface Treatment |
| CN108432132A (en) * | 2015-11-11 | 2018-08-21 | 新加坡科技与设计大学 | Microfluid particle manipulation |
| CN108344866A (en) * | 2018-01-12 | 2018-07-31 | 天津大学 | A kind of fluidic chip detecting system and the method based on system progress sample detection |
| CN210764308U (en) * | 2019-06-24 | 2020-06-16 | 金华职业技术学院 | Micro-nano particle deposition device |
Similar Documents
| Publication | Publication Date | Title |
|---|---|---|
| Si et al. | Liquids unidirectional transport on dual-scale arrays | |
| CN102165076B (en) | Method and system for manufacturing integrated fluidic chips | |
| Zhao et al. | Airflow‐assisted 3D bioprinting of human heterogeneous microspheroidal organoids with microfluidic nozzle | |
| CN109201130B (en) | Double-emulsification glass capillary micro-fluidic chip and phase-change microcapsule prepared by same | |
| CN103954786B (en) | Semi-contact under-oil continuous droplet sample applying and liquid adding method | |
| CN104324769A (en) | Micro-pipeline-based liquid droplet generation method | |
| KR20160030939A (en) | System for additive menufacturing of three-dimensional structure and method for same | |
| CN110038655A (en) | A kind of microfluidic control chip and system | |
| WO2021185091A1 (en) | Detection chip and modification method therefor | |
| Je et al. | Progression in the fountain pen approach: from 2D writing to 3D free‐form micro/nanofabrication | |
| CN113304790A (en) | Three-dimensional microfluidic chip for realizing high-throughput preparation of micro-droplets by parallelization design | |
| Shi et al. | Ladderlike tapered pillars enabling spontaneous and consecutive liquid transport | |
| Wang et al. | Bioinspired tip-guidance liquid jetting and droplet emission at a rotary disk via a surface energy gradient | |
| CN110395688A (en) | A kind of micro-nano particle precipitation equipment | |
| CN210764308U (en) | Micro-nano particle deposition device | |
| CN103055982A (en) | Micro-fluidic chip with controllable micro-droplet flowing and preparation method thereof | |
| CN110395689A (en) | A kind of assemble method of microparticle | |
| CN106541574A (en) | It is a kind of to be based on robotization point gum machine printing equipment and Method of printing | |
| US8500964B2 (en) | Method of fabricating bubble-type micro-pump | |
| CN217140437U (en) | High-stability liquid drop sorting system and micro-fluidic chip comprising same | |
| JP5345747B2 (en) | Particulate collection device and particulate transportation equipment using the device | |
| CN210030701U (en) | Gene sequencing chip | |
| CN111036316B (en) | DNA synthesis-oriented efficient fluid distribution chip device | |
| CN106423696B (en) | Multi channel currents body sprays scanning system | |
| CN105910878A (en) | Device for removing gas in micro-fluid passageway |
Legal Events
| Date | Code | Title | Description |
|---|---|---|---|
| PB01 | Publication | ||
| PB01 | Publication | ||
| SE01 | Entry into force of request for substantive examination | ||
| SE01 | Entry into force of request for substantive examination |