CN210764308U - Micro-nano particle deposition device - Google Patents

Micro-nano particle deposition device Download PDF

Info

Publication number
CN210764308U
CN210764308U CN201921021115.3U CN201921021115U CN210764308U CN 210764308 U CN210764308 U CN 210764308U CN 201921021115 U CN201921021115 U CN 201921021115U CN 210764308 U CN210764308 U CN 210764308U
Authority
CN
China
Prior art keywords
micro
substrate
suspension
layer
main channel
Prior art date
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Active
Application number
CN201921021115.3U
Other languages
Chinese (zh)
Inventor
张向平
范晓雯
方晓华
Current Assignee (The listed assignees may be inaccurate. Google has not performed a legal analysis and makes no representation or warranty as to the accuracy of the list.)
Jinhua Polytechnic
Original Assignee
Jinhua Polytechnic
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed by Jinhua Polytechnic filed Critical Jinhua Polytechnic
Priority to CN201921021115.3U priority Critical patent/CN210764308U/en
Application granted granted Critical
Publication of CN210764308U publication Critical patent/CN210764308U/en
Active legal-status Critical Current
Anticipated expiration legal-status Critical

Links

Images

Landscapes

  • Physical Or Chemical Processes And Apparatus (AREA)

Abstract

The utility model relates to a new material research and development field, a receive granule deposition apparatus a little, including the syringe pump, the transfer line, a cover glass, the protective layer, little fluid layer, the suspension bridge, the substrate, displacement platform and microscope, little fluid layer includes the micropore footpath, microchannel group, main entrance and inlet, adopt microfluid structure and be based on capillary action, the device carries out the particle self-assembly through form the suspension bridge that contains treating the deposit particle between micropore footpath and portable substrate, and adopt special design's microfluid structure to supply with suspension, can supply suspension and adjust its suspended particle's composition in succession at the assembly process, the device can adjust its suspended particle's composition and continue to supply suspension at particle self-assembly in-process, and is easy and simple to handle, low cost.

Description

Micro-nano particle deposition device
Technical Field
The utility model belongs to the technical field of new material research and development and specifically relates to an adopt microfluid structure and receive granule deposition apparatus a little based on capillary action.
Background
Particle assembly based on capillary action is a technology for performing a bottom-up (bottom-up) particle self-assembly process, which adopts a substrate with an ordered microstructure on the surface and a cover glass positioned above the substrate, and limits a liquid drop containing a suspension of particles to be deposited between the substrate and the cover glass, then the cover glass is slowly moved relative to the substrate, a cambered surface area is formed at a position close to the surface of the substrate, the concentration of the particles to be deposited in the cambered surface area is increased along with the evaporation of water in the suspension, and a part of the deposited particles are deposited on the substrate and are assembled in an ordered way. The prior art has the defects that: the volume of the liquid drop of the suspension liquid is limited in the prior art, the suspension liquid cannot be replenished again in the assembling process, the composition of the liquid drop cannot be changed, and the micro-nano particle deposition device can solve the problem.
SUMMERY OF THE UTILITY MODEL
In order to solve the above problems, the present invention provides an apparatus for self-assembly of particles by forming a suspension bridge containing the particles to be deposited between the micro-pores and a movable substrate, and supplying the suspension using a specially designed micro-fluidic structure, which is capable of continuously replenishing the suspension and adjusting the composition of the suspended particles during the assembly process.
The utility model adopts the technical proposal that:
the micro-nano particle deposition device comprises an injection pump, a liquid conveying pipe, a cover glass, a protective layer, a micro-fluid layer, a suspension bridge, a substrate, a displacement table and a microscope, wherein the micro-fluid layer comprises a micro-aperture, a micro-channel group, a main channel and a liquid inlet, xyz is a three-dimensional coordinate system, the substrate is positioned on the displacement table, and the displacement table is light-transmitting and can move in three dimensions; a protective layer made of siloxane material and having a thickness of 2 mm is covered on the microfluidic layer, a cover glass is fixed on the protective layer through epoxy resin, and a microscope is positioned at a position 15 cm below the displacement table and used for monitoring suspension liquid between the micro-aperture and the substrate; the surface of the substrate is provided with a micro-nano array; the micro-fluid layer is made of SU-8 resin material sheets through a micro-processing technology, a liquid inlet, a main channel, a micro-channel group and micro-apertures are sequentially communicated, the liquid inlet is connected to an injection pump through a liquid conveying pipe, the injection pump transmits suspension containing particles to be deposited to the micro-apertures through the liquid conveying pipe, the liquid inlet, the main channel and the micro-channel group in sequence, the micro-apertures penetrate through the upper surface and the lower surface of the micro-fluid layer, the micro-channel group consists of three micro-fluid grooves with rectangular sections, and the main channel is a micro-fluid groove with a rectangular section; when the substrate is 0.4 mm below the pore size, the suspension can drip down from the pore size and form a suspension bridge between the microfluidic layer and the substrate; the length of the microfluidic layer is 20 mm, the width of the microfluidic layer is 15 mm, the thickness of the microfluidic layer is 1mm, the length of the micropore diameter is 7 mm, the width of the micropore diameter is 0.7 mm, the height of the sections of the microfluidic grooves of the microchannel group is 80 microns, the width of the sections of the microfluidic grooves of the microchannel group is 120 microns, the length of the main channel is 12 mm, the height of the sections of the microfluidic grooves of the main channel is 80 microns, the width of the sections of the microfluidic grooves of the main channel is 160 microns, and the diameter of the liquid; the micro-nano array is a structure directly obtained by micro-nano processing on the surface of the substrate, can be a fullerene molecular cluster with an ordered molecular structure deposited on the surface of the substrate, and can also be an organic macromolecular array with an ordered molecular structure deposited on the surface of the substrate; the microfluid layer has a liquid inlet, the main channel is a straight channel, the microfluid layer can have two liquid inlets, and the microfluid layer can also have a long S-shaped main channel.
The utility model has the advantages that:
the utility model discloses the device can adjust its suspended particle's composition and continuously supply suspension at particle self-assembly in-process, and is easy and simple to handle, low cost.
Drawings
The following is further illustrated in connection with the figures of the present invention:
FIG. 1 is a schematic view of the present invention;
FIG. 2 is an enlarged schematic view of a substrate;
FIG. 3 is an enlarged schematic view of one of the microfluidic layers;
FIG. 4 is an enlarged schematic view of a second microfluidic layer;
FIG. 5 is an enlarged schematic view of the third microfluidic layer.
In the figure, 1 is an injection pump, 2 is a liquid conveying pipe, 3 is a cover glass, 4 is a protective layer, 5 is a microfluid layer, 5-1 is a micro-pore diameter, 5-2 is a micro-channel group, 5-3 is a main channel, 5-4 is a liquid inlet, 6 is a suspension bridge, 7 is a substrate, 7-1 is a micro-nano array, 8 is a displacement platform, and 9 is a microscope.
Detailed Description
Fig. 1 is a schematic diagram of the present invention, which includes an injection pump (1), an infusion tube (2), a cover glass (3), a protective layer (4), a microfluidic layer (5), a suspension bridge (6), a substrate (7), a displacement table (8) and a microscope (9), wherein the microfluidic layer (5) includes a micro-aperture (5-1), a micro-channel group (5-2), a main channel (5-3) and a liquid inlet (5-4), xyz is a three-dimensional coordinate system, the substrate (7) is located on the displacement table (8), and the displacement table (8) is transparent and can move three-dimensionally; the suspension forms a suspension bridge (6) between the microfluidic layer (5) and the substrate (7), a protective layer (4) made of a siloxane material and having a thickness of 2 mm covers the microfluidic layer (5), a cover glass (3) is fixed on the protective layer (4) through epoxy resin, and a microscope (9) is located 15 cm below the displacement table (8) and used for monitoring the suspension between the micropore diameter (5-1) and the substrate (7).
Fig. 2 is an enlarged schematic view of the substrate, the micro-nano array (7-1) is arranged on the surface of the substrate (7), the micro-nano array (7-1) is a structure directly obtained by micro-nano processing on the surface of the substrate (7), and the micro-nano array (7-1) can be an ordered molecular structure deposited on the surface of the substrate (7), such as a fullerene molecular cluster, an organic macromolecular array, and the like.
As shown in the enlarged schematic diagram of one of the microfluidic layers in figure 3, the microfluidic layer (5) is provided with a liquid inlet (5-4), the main channel (5-3) is a straight channel, the microfluidic layer (5) is made of SU-8 resin material sheets through micromachining technology, the liquid inlet (5-4), the main channel (5-3), the microchannel group (5-2) and the micro-aperture (5-1) are sequentially communicated, the liquid inlet (5-4) is connected to the injection pump (1) through the liquid conveying pipe (2), the injection pump (1) transmits suspension containing particles to be deposited to the micro-aperture (5-1) through the liquid conveying pipe (2), the liquid inlet (5-4), the main channel (5-3) and the micro-channel group (5-2) in sequence, and the micro-aperture (5-1) penetrates through the upper surface and the lower surface of the microfluidic layer (5), the micro-channel group (5-2) consists of three micro-fluid grooves with rectangular cross sections, and the main channel (5-3) is a micro-fluid groove with a rectangular cross section; when the substrate (7) is located 0.4 mm below the micro-pore size (5-1), the suspension can drip from the micro-pore size (5-1) and form a suspension bridge (6) between the microfluidic layer (5) and the substrate (7); the microfluidic layer (5) has a length of 20 mm, a width of 15 mm and a thickness of 1mm, the micro-pore diameter (5-1) has a length of 7 mm and a width of 0.7 mm, the sections of the microfluidic grooves of the micro-channel group (5-2) are all 80 microns in height and 120 microns in width, the main channel (5-3) has a length of 12 mm, the height of the section of the microfluidic groove of the main channel (5-3) is 80 microns and 160 microns in width, and the liquid inlet (5-4) has a diameter of 900 microns.
As shown in FIG. 4, which is an enlarged schematic view of the second microfluidic layer, the microfluidic layer (5) has two liquid inlets (5-4), and two injection pumps (1) can be used to inject suspensions of different compositions into the two liquid inlets (5-4), respectively.
As fig. 5 is an enlarged schematic view of the third microfluidic layer, the microfluidic layer (5) has long S-shaped main channels (5-3) which enable a more uniform distribution of the particles to be deposited in the suspension.
In the embodiment, as shown in FIG. 2, the micro-nano array (7-1) is a structure directly obtained by micro-nano processing on the surface of a substrate (7);
in the embodiment, the micro-nano array (7-1) is a fullerene molecular cluster with an ordered molecular structure deposited on the surface of a substrate (7);
in the embodiment, the micro-nano array (7-1) is an organic macromolecular array with an ordered molecular structure deposited on the surface of a substrate (7);
in the embodiment, as shown in FIG. 3, the microfluidic layer (5) has a liquid inlet (5-4), and the main channel (5-3) is a straight channel;
in the embodiment, as shown in FIG. 4, the microfluidic layer (5) has two liquid inlets (5-4), and two injection pumps (1) can be used to inject suspensions with different components into the two liquid inlets (5-4);
in an embodiment, as shown in fig. 5, the microfluidic layer (5) has a long S-shaped main channel (5-3) which enables the particles to be deposited to be distributed more uniformly in the suspension.
The working principle of the device is as follows: the substrate (7) is moved to a position 0.4 mm below the micro-aperture (5-1) through a displacement table (8), a suspension containing particles to be deposited is transmitted to the micro-aperture (5-1) through a liquid conveying pipe (2), a liquid inlet (5-4), a main channel (5-3) and a micro-channel group (5-2) in sequence by a syringe pump (1), the suspension overflows from the micro-aperture (5-1), flows downwards and is in contact with the upper surface of the substrate (7), and as a result, the suspension between the micro-aperture (5-1) and the substrate (7) forms a suspension bridge (6), and the included angle between the liquid level at the outer side of the suspension bridge (6) and the substrate (7) is 90 degrees; the size of the suspension bridge (6) depends on the length and the width of the micropore (5-1) and the contact angle of the suspension relative to the substrate (7), and the height of the suspension bridge (6) can be controlled by adjusting the relative position of the substrate (7) and the micropore (5-1) in the vertical y direction; defining one side of a suspension bridge (6) in the positive z direction as the front side of the suspension bridge (6), enabling the substrate (7) to translate along the positive z direction through a displacement table (8), enabling the suspension in the contact part of the suspension bridge (6) and the substrate (7) to move towards the positive z direction under the influence of the movement of the substrate (7), enabling the included angle between the front side of the suspension bridge (6) and the contact part of the substrate (7) to be reduced from 90 degrees, leading the external surface area, corresponding to the front side of the suspension bridge (6), in contact with the atmospheric environment to be increased, of the suspension bridge, enabling the evaporation effect of the solvent in the suspension to generate a laminar flow on the front side of the suspension bridge (6), and pulling the particles in the suspension to the front side of the suspension bridge (6), and particularly generating particle accumulation with larger density on the contact part of the front side of the suspension bridge (6) and the substrate (7); along with the continuous movement of the substrate (7), the contact surface between the front side of the suspension bridge (6) and the substrate (7) generates local breakage, and particles in the broken liquid part are acted by a strong capillary force, so that most of the particles can be deposited on the substrate (7) and assembled in the micro-nano array (7-1).
The micro-nano particle deposition device comprises an injection pump (1), a liquid conveying pipe (2), a cover glass (3), a protective layer (4), a micro-fluidic layer (5), a suspension bridge (6), a substrate (7), a displacement table (8) and a microscope (9), wherein the micro-fluidic layer (5) comprises micro-apertures (5-1), a micro-channel group (5-2), a main channel (5-3) and a liquid inlet (5-4), xyz is a three-dimensional coordinate system, the substrate (7) is positioned on the displacement table (8), and the displacement table (8) is light-transmitting and can move three-dimensionally; a protective layer (4) made of siloxane material and having the thickness of 2 mm covers the microfluidic layer (5), a cover glass (3) is fixed on the protective layer (4) through epoxy resin, and a microscope (9) is positioned at a position 15 cm below the displacement table (8) and used for monitoring suspension liquid between the micropore diameter (5-1) and the substrate (7); the surface of the substrate (7) is provided with a micro-nano array (7-1); the microfluidic layer (5) is made of SU-8 resin material sheets through micromachining technology, a liquid inlet (5-4), a main channel (5-3), a microchannel group (5-2) and a micropore (5-1) are sequentially communicated, the liquid inlet (5-4) is connected to an injection pump (1) through a liquid conveying pipe (2), the injection pump (1) sequentially passes through the liquid conveying pipe (2) with suspension liquid containing particles to be deposited, the liquid inlet (5-4), the main channel (5-3) and the micro-channel group (5-2) are transmitted to a micro-aperture (5-1), the micro-aperture (5-1) penetrates through the upper surface and the lower surface of the micro-fluid layer (5), the micro-channel group (5-2) is composed of three micro-fluid grooves with rectangular sections, and the main channel (5-3) is a micro-fluid groove with a rectangular section; when the substrate (7) is located 0.4 mm below the micro-pore size (5-1), the suspension can drip from the micro-pore size (5-1) and form a suspension bridge (6) between the microfluidic layer (5) and the substrate (7); the length of the microfluidic layer (5) is 20 mm, the width is 15 mm, the thickness is 1mm, the length of the micropore diameter (5-1) is 7 mm, the width is 0.7 mm, the sections of the microfluidic grooves of the microchannel group (5-2) are all 80 microns in height and 120 microns in width, the length of the main channel (5-3) is 12 mm, the height of the section of the microfluidic groove of the main channel (5-3) is 80 microns, the width is 160 microns, and the diameter of the liquid inlet (5-4) is 900 microns; the micro-nano array (7-1) is a structure directly obtained by micro-nano processing on the surface of the substrate (7), the micro-nano array (7-1) can be a fullerene molecular cluster with an ordered molecular structure deposited on the surface of the substrate (7), and the micro-nano array (7-1) can also be an organic macromolecular array with an ordered molecular structure deposited on the surface of the substrate (7); the micro-fluid layer (5) is provided with one liquid inlet (5-4), the main channel (5-3) is a straight channel, the micro-fluid layer (5) can be provided with two liquid inlets (5-4), and the micro-fluid layer (5) can also be provided with a long S-shaped main channel (5-3).
The method for assembling the particles on the surface of the substrate by using the micro-nano particle deposition device comprises the following steps:
selecting a proper substrate according to the size and type of particles to be deposited, so that the particles to be deposited can be orderly assembled in a micro-nano array of the substrate;
moving the substrate to a position 0.4 mm below the micro-aperture through a displacement table;
step three, preparing a suspension containing particles to be deposited, and an aqueous solution with the concentration of the particles to be deposited being 0.1 mM;
step four, a suspension containing the particles to be deposited is transmitted to the micro-pore diameter by a syringe pump through a liquid conveying pipe, a liquid inlet, a main channel and a micro-channel group in sequence, the flow rate of the suspension output by the syringe pump ranges from 1 to 10 microlitres/minute, the suspension overflows from the micro-pore diameter, flows downwards and contacts with the upper surface of the substrate, and as a result, a suspension bridge is formed between the micro-pore diameter and the substrate;
fifthly, the substrate translates along the positive z direction through the displacement table, the suspension liquid of the contact part of the suspension liquid bridge and the substrate moves towards the positive z direction under the influence of the movement of the substrate, so that the included angle between the front side of the suspension liquid bridge and the contact part of the substrate is reduced from 90 degrees, and the included angle ranges from 35 degrees to 55 degrees by adjusting the translation speed of the displacement table along the positive z direction;
and sixthly, along with the continuous movement of the substrate, the contact surface of the front side of the suspension bridge and the substrate generates local breakage, and particles in the broken liquid part are acted by a strong capillary force, so that most of particles can be deposited on the substrate and assembled in the micro-nano array.
The utility model discloses the device carries out particle self-assembly through form the suspension bridge between the microfluid structure of special design and mobilizable substrate, can adjust its suspended particles's composition and continuously supply suspension at the assembly in-process.

Claims (6)

1. A micro-nano particle deposition device comprises an injection pump (1), a transfusion tube (2), a cover glass (3), a protective layer (4), a micro-fluid layer (5), a suspension bridge (6), a substrate (7), a displacement table (8) and a microscope (9), wherein the micro-fluid layer (5) comprises micro-apertures (5-1), a micro-channel group (5-2), a main channel (5-3) and a liquid inlet (5-4), xyz is a three-dimensional coordinate system, the substrate (7) is positioned on the displacement table (8), the displacement table (8) is light-transmitting and can move three-dimensionally,
the method is characterized in that: a protective layer (4) made of siloxane material and having the thickness of 2 mm covers the microfluidic layer (5), a cover glass (3) is fixed on the protective layer (4) through epoxy resin, and a microscope (9) is positioned at a position 15 cm below the displacement table (8) and used for monitoring suspension liquid between the micropore diameter (5-1) and the substrate (7); the surface of the substrate (7) is provided with a micro-nano array (7-1); the microfluidic layer (5) is made of SU-8 resin material sheets through micromachining technology, a liquid inlet (5-4), a main channel (5-3), a microchannel group (5-2) and a micropore (5-1) are sequentially communicated, the liquid inlet (5-4) is connected to an injection pump (1) through a liquid conveying pipe (2), the injection pump (1) sequentially passes through the liquid conveying pipe (2) with suspension liquid containing particles to be deposited, the liquid inlet (5-4), the main channel (5-3) and the micro-channel group (5-2) are transmitted to a micro-aperture (5-1), the micro-aperture (5-1) penetrates through the upper surface and the lower surface of the micro-fluid layer (5), the micro-channel group (5-2) is composed of three micro-fluid grooves with rectangular sections, and the main channel (5-3) is a micro-fluid groove with a rectangular section; when the substrate (7) is located 0.4 mm below the pore size (5-1), the suspension is able to drip from the pore size (5-1) and form a suspension bridge (6) between the microfluidic layer (5) and the substrate (7).
2. The micro-nano particle deposition device according to claim 1, which is characterized in that: the microfluidic layer (5) has a length of 20 mm, a width of 15 mm and a thickness of 1mm, the micro-pore diameter (5-1) has a length of 7 mm and a width of 0.7 mm, the sections of the microfluidic grooves of the micro-channel group (5-2) are all 80 microns in height and 120 microns in width, the main channel (5-3) has a length of 12 mm, the height of the section of the microfluidic groove of the main channel (5-3) is 80 microns and 160 microns in width, and the liquid inlet (5-4) has a diameter of 900 microns.
3. The micro-nano particle deposition device according to claim 1, which is characterized in that: the micro-nano array (7-1) is a structure directly obtained by micro-nano processing on the surface of the substrate (7).
4. The micro-nano particle deposition device according to claim 1, which is characterized in that: the micro-fluid layer (5) is provided with a liquid inlet (5-4), and the main channel (5-3) is a straight channel.
5. The micro-nano particle deposition device according to claim 1, which is characterized in that: the microfluidic layer (5) has two liquid inlets (5-4).
6. The micro-nano particle deposition device according to claim 1, which is characterized in that: the microfluidic layer (5) has a long S-shaped main channel (5-3).
CN201921021115.3U 2019-06-24 2019-06-24 Micro-nano particle deposition device Active CN210764308U (en)

Priority Applications (1)

Application Number Priority Date Filing Date Title
CN201921021115.3U CN210764308U (en) 2019-06-24 2019-06-24 Micro-nano particle deposition device

Applications Claiming Priority (1)

Application Number Priority Date Filing Date Title
CN201921021115.3U CN210764308U (en) 2019-06-24 2019-06-24 Micro-nano particle deposition device

Publications (1)

Publication Number Publication Date
CN210764308U true CN210764308U (en) 2020-06-16

Family

ID=71043146

Family Applications (1)

Application Number Title Priority Date Filing Date
CN201921021115.3U Active CN210764308U (en) 2019-06-24 2019-06-24 Micro-nano particle deposition device

Country Status (1)

Country Link
CN (1) CN210764308U (en)

Cited By (1)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
CN110395688A (en) * 2019-06-24 2019-11-01 金华职业技术学院 A kind of micro-nano particle precipitation equipment

Cited By (2)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
CN110395688A (en) * 2019-06-24 2019-11-01 金华职业技术学院 A kind of micro-nano particle precipitation equipment
CN110395688B (en) * 2019-06-24 2024-06-25 金华职业技术学院 Micro-nano particle deposition device

Similar Documents

Publication Publication Date Title
Si et al. Liquids unidirectional transport on dual-scale arrays
CN104324769B (en) Generation method based on the drop of microchannel
US20200048841A1 (en) Silane based surfaces with extreme wettabilities
EP3500662B1 (en) High-throughput system and method for the temporary permeabilization of cells
EP2621631B1 (en) Microfluidic device for production and collection of droplets of a fluid
US11794187B2 (en) Highly parallelized droplet microfluidic apparatus
CN104084247A (en) Elastic wall surface micro-fluidic chip based on T-shaped micro-channel
CN103954786B (en) Semi-contact under-oil continuous droplet sample applying and liquid adding method
CN108472647A (en) Microfluid is arranged
CN103285947A (en) Droplet micro-fluidic chip and operation method thereof
CN210764308U (en) Micro-nano particle deposition device
CN106007794A (en) Method for inducing wettability changes of super-hydrophobic film through solvent and application
Shi et al. Ladderlike conical micropillars facilitating underwater gas-bubble manipulation in an aqueous environment
CN103055982A (en) Micro-fluidic chip with controllable micro-droplet flowing and preparation method thereof
CN209752915U (en) Multichannel liquid drop generating device based on macroporous perfusion microspheres
CN207680633U (en) A kind of centrifugal type microfludic chip for Water-In-Oil drop formation
CN106391152B (en) The two deformable micro-fluidic chips in wall surface designated position above and below channel
CN110395689B (en) Assembly method of microparticles
CN110395688B (en) Micro-nano particle deposition device
CN101093227B (en) Gravity drive pump of microflow controlled chip system
CN111760600A (en) Microfluidic chip, preparation method thereof and cell sorting method
CN112857956B (en) Capillary pressure difference enhanced concentration permeation chip
CN103028354B (en) Preparation method for droplet-in-oil array structure
CN109985681A (en) A kind of microlayer model generation device
CN105910878A (en) Device for removing gas in micro-fluid passageway

Legal Events

Date Code Title Description
GR01 Patent grant
GR01 Patent grant