CN102011177A - Re-feeding device for Czochralski silicon single crystal furnace - Google Patents
Re-feeding device for Czochralski silicon single crystal furnace Download PDFInfo
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- CN102011177A CN102011177A CN 201010607220 CN201010607220A CN102011177A CN 102011177 A CN102011177 A CN 102011177A CN 201010607220 CN201010607220 CN 201010607220 CN 201010607220 A CN201010607220 A CN 201010607220A CN 102011177 A CN102011177 A CN 102011177A
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- pull bar
- back cover
- sleeve pipe
- feeding
- frustum
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Abstract
The invention relates to a re-feeding device for a Czochralski silicon single crystal furnace, comprising a feeding barrel, a flange, a cone frustum for sealing bottom, a pull rod, a pull rod pipe sleeve, a molybdenum nut and the like which are made of steel. With respect to the device, steel is utilized as the structural material, the cone frustum made of steel is utilized for sealing the bottom and the pull rod and the pull rod pipe sleeve are utilized as the control structure to control feeding, thus the control structure is simpler than the complex control structure formed by a pressure rod, a control connecting rod, a pressure rod pulley, a slide damper and the like. The bottom of the feeding barrel has smaller diameter, so that material feeding is more centralized, thus avoiding the polycrystal material lumps from falling outside a crucible during feeding. The device not only has simple structure and is durable and simple and convenient to operate, but also is more stable in use.
Description
Technical field
The present invention relates to the monocrystal stove support equipment, particularly a kind of composite feeding-material device of straight pulling silicon single crystal furnace.
Background technology
Single in the czochralski silicon monocrystal production feed intake not enough problem and quartz crucible short problem in work-ing life, the vertical pulling composite feeding-material device of multiple structure and material is invented and is put in the production, purpose provides the yield rate of silicon crystal bar and the life-span of quartz crucible, to reach the purpose that improves output and reduce cost.
At present common monocrystal stove continuous dosing device has three kinds on the domestic market: make with quartzy for first kind, but quartz frangible, be not durable and cost higher; Second kind is adopted stainless steel is structured material, and back cover is carried out by the combination of three to six stainless steel blades and weight in the bottom, and blade adopts hinge to be connected with barrel.But this kind apparatus structure is comparatively complicated, and the hinge structure of bottom easily when feeding intake by high-temperature softening deformation even come off the use properties instability; The third adopts depression bar, control link and depression bar pulley, push-pull valve etc. as control texture, and in use needs to carry out back cover in the bottom of the tube that feeds intake with silicon chip.Not only complex structure need equipment is transformed, and operation is comparatively loaded down with trivial details.
Summary of the invention
The object of the present invention is to provide a kind of composite feeding-material device of simple in structure, durable, easy and simple to handle and good stability.
For reaching above purpose, it is structured material that composite feeding-material device of the present invention adopts steel, does not re-use steel blade and back covers such as weight, silicon chip in the back cover structure, only adopts a frustum of a cone of steel to carry out back cover.Control texture then only adopts pull bar and drag link sleeve pipe to be used for control and feeds intake, and is simply more a lot of than the complicated control texture that adopts depression bar, control link and depression bar pulley, push-pull valve etc. to form like this.And the tube bottom diameter that feeds intake is less, and it is more concentrated that material is thrown in, thereby the polycrystal piece drops to the situation of crucible outside when avoiding feeding intake.
The present invention realizes by such technical scheme: a kind of composite feeding-material device of straight pulling silicon single crystal furnace is characterized in that: described device is made of feed intake tube, back cover frustum, molybdenum nut and fixed link of pull bar, pull bar sleeve pipe, flange, steel; A described top peripheral solder that feeds intake has steel flanges; A described internal structure that feeds intake is made up of movable part and two parts of fixing part;
Described movable part comprises the back cover frustum of a cone and pull bar, and the pull bar lower end is processed with screw thread, and back cover frustum center is processed with through hole, and the pull bar lower end passes back cover frustum centre hole, and by using molybdenum nut locking, back cover frustum and pull bar are fastenedly connected;
Described fixing part comprises pull bar sleeve pipe and fixing, and the pull bar sleeve pipe is fixed on the fixed link, and fixed link is fixed on the inwall that feeds intake;
Drag link sleeve is in the pull bar sleeve pipe, and pull bar spurs the back cover frustum up and down, by the back cover frustum seal feed intake tin at the bottom of mouth;
Pull bar and pull bar sleeve pipe are slidingly matched;
The taper platform that the lower base diameter is less.
It is structured material that composite feeding-material device of the present invention adopts steel, does not re-use steel blade and back covers such as weight, silicon chip in the back cover structure, only adopts a frustum of a cone of steel to carry out back cover.This composite feeding-material device is not only simple in structure, durable, easy and simple to handle but also comparatively stable when using.
Description of drawings
Fig. 1 partly cuts open figure for what throw device again;
Fig. 2 is for throwing the vertical view of device again;
Fig. 3 is for throwing device process 1 synoptic diagram that feeds intake again;
Fig. 4 is for throwing device process 2 synoptic diagram that feed intake again.
Among the figure: on pull bar 1, pull bar sleeve pipe 2, flange 3, feed intake tube 4, back cover frustum 5, molybdenum nut 6, the fixed link 7.
Embodiment
For a more clear understanding of the present invention, describe the present invention in conjunction with the accompanying drawings and embodiments in detail:
As shown in Figure 1 and Figure 2, device is made of feed intake tube 4, back cover frustum (5), molybdenum nut 6, fixed link 7 of pull bar 1, pull bar sleeve pipe 2, flange 3, steel; The tube 4 top peripheral solder that feed intake have steel flanges 3; Tube 4 internal structures that feed intake are made up of movable part and two parts of fixing part;
Movable part comprises back cover frustum 5 and pull bar 1, and pull bar 1 lower end is processed with screw thread, and back cover frustum 5 centers are processed with through hole, and pull bar 1 lower end passes back cover frustum 5 centre holes, and by locking with molybdenum nut 6, back cover frustum 5 is fastenedly connected with pull bar 1;
Fixing part comprises pull bar sleeve pipe 2 and fixed link 7, and pull bar sleeve pipe 2 is fixed on the fixed link 7, and fixed link 7 is fixed on tube 4 inwalls that feed intake;
Pull bar 1 is enclosed within the pull bar sleeve pipe 2, and pull bar 1 spurs back cover frustum 5 up and down, by back cover frustum 5 seal feed intake tin at the bottom of mouth;
Pull bar 1 is slidingly matched with pull bar sleeve pipe 2;
As shown in Figure 3, Figure 4, after change material process is finished, owing to have the gap between the buik silicon material, so fusion silicon liquid level is more much lower than quartz crucible mouth.To throw polycrystal again this moment and pack in the multiple throwing device, close flap valve, carry out the applying argon gas step after, with the concubine oven door opening, pull bar is hung on the wireline.Close fire door and replace, open flap valve afterwards, the described composite feeding-material device that descends stops to descend after throwing device flange and turnover panel valve port joint again.
Rising crucible position is about 15cm to liquid level and composite feeding-material bottom of device distance, the chuck that descends afterwards, and back cover frustum (5) decline with chuck under the action of gravity of throwing polycrystal again descends like this.Descend and stop behind about 10cm descending.Along with the decline of back cover frustum 5, the multiple throwing polycrystal in the tube 4 that feeds intake can landing enter into silicon melt, thereby finishes multiple throwing process.
Throw by multiple, " thermal field rises to 15kg by charging capacity 75kg to the Ф 18 of CG6000 stove, and yield rate has obtained effective raising.
Claims (2)
1. the composite feeding-material device of a straight pulling silicon single crystal furnace is characterized in that: described device is by pull bar (1), pull bar sleeve pipe (2), flange (3), steel feed intake tube (4), a back cover frustum (5), molybdenum nut (6) and fixed link (7) formation; Described tube (4) top peripheral solder that feeds intake has steel flanges (3); Described tube (4) internal structure that feeds intake is made up of movable part and two parts of fixing part; Described movable part comprises back cover frustum (5) and pull bar (1), pull bar (1) lower end is processed with screw thread, back cover frustum (5) center is processed with through hole, pull bar (1) lower end passes back cover frustum (5) centre hole, by locking with molybdenum nut (6), back cover frustum (5) is fastenedly connected with pull bar (1); Described fixing part comprises pull bar sleeve pipe (2) and fixed link (7), and pull bar sleeve pipe (2) is fixed on the fixed link (7), and fixed link (7) is fixed on tube (4) inwall that feeds intake; Pull bar (1) is enclosed within the pull bar sleeve pipe (2), and pull bar (1) spurs back cover frustum (5) up and down, by back cover frustum (5) seal feed intake tin at the bottom of mouth.
2. the composite feeding-material device of straight pulling silicon single crystal furnace according to claim 1, it is characterized in that: pull bar (1) is slidingly matched with pull bar sleeve pipe (2).
Priority Applications (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| CN 201010607220 CN102011177A (en) | 2010-12-27 | 2010-12-27 | Re-feeding device for Czochralski silicon single crystal furnace |
Applications Claiming Priority (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| CN 201010607220 CN102011177A (en) | 2010-12-27 | 2010-12-27 | Re-feeding device for Czochralski silicon single crystal furnace |
Publications (1)
| Publication Number | Publication Date |
|---|---|
| CN102011177A true CN102011177A (en) | 2011-04-13 |
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Family Applications (1)
| Application Number | Title | Priority Date | Filing Date |
|---|---|---|---|
| CN 201010607220 Pending CN102011177A (en) | 2010-12-27 | 2010-12-27 | Re-feeding device for Czochralski silicon single crystal furnace |
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| Country | Link |
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| CN (1) | CN102011177A (en) |
Cited By (2)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| CN102502815A (en) * | 2011-10-24 | 2012-06-20 | 江西晶安高科技股份有限公司 | Zircon sand feed device in zirconium oxychloride production |
| KR101456386B1 (en) * | 2013-06-25 | 2014-10-31 | 웅진에너지 주식회사 | separated type recharging apparatus for Polly Sillicon |
Citations (3)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| CN101387005A (en) * | 2008-10-14 | 2009-03-18 | 浙江华友电子有限公司 | Material feeder for single crystal furnace |
| CN201386144Y (en) * | 2009-04-03 | 2010-01-20 | 常州有则科技有限公司 | Doping hopper of single crystal furnace |
| CN201459275U (en) * | 2009-06-16 | 2010-05-12 | 宁晋赛美港龙电子材料有限公司 | Material transportation device for single crystal furnace |
-
2010
- 2010-12-27 CN CN 201010607220 patent/CN102011177A/en active Pending
Patent Citations (3)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| CN101387005A (en) * | 2008-10-14 | 2009-03-18 | 浙江华友电子有限公司 | Material feeder for single crystal furnace |
| CN201386144Y (en) * | 2009-04-03 | 2010-01-20 | 常州有则科技有限公司 | Doping hopper of single crystal furnace |
| CN201459275U (en) * | 2009-06-16 | 2010-05-12 | 宁晋赛美港龙电子材料有限公司 | Material transportation device for single crystal furnace |
Cited By (2)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| CN102502815A (en) * | 2011-10-24 | 2012-06-20 | 江西晶安高科技股份有限公司 | Zircon sand feed device in zirconium oxychloride production |
| KR101456386B1 (en) * | 2013-06-25 | 2014-10-31 | 웅진에너지 주식회사 | separated type recharging apparatus for Polly Sillicon |
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| C02 | Deemed withdrawal of patent application after publication (patent law 2001) | ||
| WD01 | Invention patent application deemed withdrawn after publication |
Open date: 20110413 |