CN204265883U - A kind of vertical pulling method single crystal preparation stove with secondary charging device - Google Patents
A kind of vertical pulling method single crystal preparation stove with secondary charging device Download PDFInfo
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- CN204265883U CN204265883U CN201420683647.4U CN201420683647U CN204265883U CN 204265883 U CN204265883 U CN 204265883U CN 201420683647 U CN201420683647 U CN 201420683647U CN 204265883 U CN204265883 U CN 204265883U
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- charging device
- secondary charging
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Abstract
The utility model relates to a kind of vertical pulling method single crystal preparation stove with secondary charging device, comprise body of heater, the attachment of body of heater internal surface is provided with heater coil, centre is provided with quartz crucible, wherein, body of heater upper end has opening for feed, in this opening for feed place, hovering has secondary charging device, described secondary charging device comprises, anchor ear, lifting wirerope, lifting wirerope one end is connected to sling the molybdenum rod of plate, molybdenum rod is provided with the anchor ear clamping primary polycrystalline, use molybdenum rod lifting plate, expect end to end, exempt and bulk plate is knocked the step being ground into fritter, silica dust can not be produced, also splash without a large amount of, improve material use efficiency also to avoid damaging operator ' s health, use anchor ear can clamp primary polycrystalline, molybdenum rod, anchor ear collaborative work, increase the material amount of increasing, greatly improve reinforced efficiency, with the single crystal growing furnace of secondary charging device, equipment integrated degree is higher has extremely wide universality.
Description
Technical field
This device belongs to a kind of for single crystal preparation device field, particularly relates to a kind of vertical pulling method single crystal preparation stove with secondary charging device.
Background technology
In the making of polysilicon, first need seed crystal to be fixed in the cable car mechanism that is provided with in single crystal growing furnace, control cable car mechanism seed crystal is inserted with in the crucible of melt, slowly upwards seed crystal is lifted after seed crystal and the abundant welding of melt, silicon body just grows in seed crystal lower end, in crystal growing process, seed crystal and crucible are always relative rotates and rotation direction is contrary, and be irregular roundness cylindricality after silicon crystal bar is shaping, upper and lower ends is taper.
Silicon crystal is necessary for solid shape in actual use, such as circular slice or square tangent plane, this just makes the silicon crystal bar produced to reinvent profile, namely carry out: cut-out, evolution, will produce head (being commonly called as shoulder material), panel material, tailing three part scrap stock in this process, these three parts scrap stock can be used as starting material and proceed melt back process after cleaning is qualified.
Because quartz crucible cost occupies very large share in pulling of crystals system, be limited to the constraint of cost, in order to improve capacity efficiency, each company generally adopts the method for continuous charging technique and secondary charging, the quartz barrel that the feeding device general suspender connection diameter that existing secondary charging method uses is 20mm, quartz barrel bottom has discharge port, discharge port part is provided with blocking material plate, be connected to blocking material plate by a connecting rod and control quartz barrel discharging, fritter silicon material is filled with in quartz barrel, utilize connecting rod to swing blocking material plate after going deep into boiler certain distance, controlling quartz barrel dumps into crucible reinforced to complete by silicon material.
In on 02 22nd, 2012 patent No.s be: the Chinese patent of 201120270321.5, disclose one " to have the single crystal growing furnace of secondary feeding device in the preparation of vertical pulling method silicon single crystal " it proposes: charging device comprises the lifting device of feeding barrel and lifting feeding barrel, the position corresponding to crucible, bell top has the opening for feed and corresponding sealing cover that supply feeding barrel to pass in and out; The bottom of feeding barrel has discharge opening and corresponding stripper, and described stripper is connected with connecting rod, and realizes closing and opening by moving up and down of connecting rod.
Problems existing like this is: when 1, quartz ware is more, and connecting rod and stripper produce in-plane stress and easily cause quartz barrel to damage; 2, silicon material processing cost is higher, bulk plate being ground into fritter by manually knocking, need consuming a large amount of human costs; 3, produce a large amount of silica dust when being knocked and be ground into fritter by bulk plate, affect operator healthy; 4, being knocked by plate in the process being ground into fritter along with a large amount of splashing, waste of material is caused.
Utility model content
For solving the problem, the solution proposed is: provide a kind of vertical pulling method single crystal preparation stove with secondary charging device, it comprises, body of heater, the attachment of body of heater internal surface is provided with heater coil, and centre is provided with quartz crucible, wherein, body of heater upper end has opening for feed, and in this opening for feed place, hovering has secondary charging device; Described secondary charging device comprises, anchor ear, lifting wirerope, lifting wirerope one end is connected to counterweight post, counterweight post lower end is provided with joint pin, joint pin lower surface center has screw, corresponding, described Jiong shape connecting rod upper surface center also has screw, joint pin is connected by screw with Jiong shape connecting rod, and Jiong shape connecting rod two leg places are all connected with boatswain chair; Each boatswain chair lower end all has screw, and described anchor ear both sides are provided with contiguous block, and contiguous block has jack, by a molybdenum rod through described screw and described jack, boatswain chair and anchor ear to be connected as one.
Further, described molybdenum rod has two sections of screw threads, and the screw of the rear hanging plate that is connected just can be engaged on two sections of screw thread central authorities.
The beneficial effect brought is:
Use secondary charging device to carry out secondary charging, wherein use molybdenum rod lifting plate, expect end to end, exempt and bulk plate is knocked the step being ground into fritter, can not silica dust be produced, also splash without a large amount of, improve material use efficiency and also avoid damaging operator ' s health.
Use anchor ear can clamp primary polycrystalline, make equipment not only can add the processing residue material such as plate, head, shoulder material, molybdenum rod, anchor ear collaborative work, increase the material amount of increasing, greatly improve reinforced efficiency.
Use counterweight post as weight, ensure that secondary charging device is concentric with crucible height, the joint pin that its lower end is provided with forms open syndeton in Jiong shape connecting rod, can carry out according to demand dismantling and also can add multiple Jiong shape connecting rod, increase molybdenum rod number to connect multiple boatswain chair, promote feeding quantity further.
Molybdenum rod has two sections of screw threads corresponding with the screw of boatswain chair, ensure molybdenum rod position stability, the stationarity of filling process can not be promoted by play back and forth.
This device increases on single crystal growing furnace secondary charging device, and simplification secondary charging device structure is suitable for installing at single crystal growing furnace more, the Novel structure used can not produce in-plane stress, more durable, single crystal growing furnace coupling heating coils heat crucible, equipment integrated degree is higher has extremely wide universality.
Accompanying drawing explanation
Fig. 1 faces structural representation for this device
Fig. 2 is this device section axonometric drawing
Fig. 3 is the mark of A shown in Fig. 2 (secondary throwing device structural representation)
Embodiment
This device comprises, lifting wirerope 1, counterweight post 2, Jiong shape connecting rod 3, boatswain chair 4, molybdenum rod 5, anchor ear 6, heater coil 7, quartz crucible 8, body of heater 9.
Wherein,
Counterweight post is also provided with joint pin 2a 2 times;
Molybdenum rod 5 has screw thread 5a.
As Fig. 1, shown in 2, body of heater 9 is as housing, its bottom surface is connected to pedestal, pedestal is fixed on the ground by some interconnecting piece, pedestal and ground is made to connect as one to ensure the rock steady structure of body of heater heating system entirety, the furnace chamber internal surface of body of heater 9 is attached with heater coil 7, center is provided with quartz crucible 8, heater coil 7 surrounds quartz crucible 8, quartz crucible 8 lower surface is connected on the rotating mechanism that is provided with bottom body of heater 9, rotating mechanism plays and supports and the effect driving it to rotate, body of heater 9 also has gap and is connected to vacuum extractor and gas-filling device, opening for feed 9a is had corresponding to the opening of body of heater 9 and quartz crucible 8, secondary charging device is had in this opening for feed 9a place's hanging.
Composition graphs 2, shown in 3, secondary charging feeding device comprises, lifting wirerope 1, lifting wirerope 1 upper end is connected to cable car mechanism, cable car organization establishes is relative with fire door 9a in body of heater 9 upper end, after sealing up bell, cable car mechanism is in single crystal furnace body inside, lower end connects a counterweight post 2, counterweight post 2 is cylindrical, its diameter is less than opening for feed 9a diameter, counterweight post 2 lower center place is provided with joint pin 2a, joint pin 2a diameter is less than counterweight post 2, joint pin 2a lower surface center has screw, Jiong shape connecting rod 3 structure is " Jiong " shape, it is in upper surface and joint pin equal diameters and also have screw in center, joint pin 2a is relative with the screw of Jiong shape connecting rod 3 is screwed into screw, so that Jiong shape connecting rod 3 is fixed on joint pin 2a lower end, each leg place, Jiong shape connecting rod 3 lower end has been bolted a boatswain chair 4, each boatswain chair 4 lower end all has screw, corresponding, molybdenum rod 5 has two sections of screw thread 5a, distance between two sections of screw threads is not less than the Opening length of Jiong shape connecting rod 3, anchor ear 6 both sides are provided with contiguous block upwards, each contiguous block has jack, described molybdenum rod 5 is through the jack that contiguous block has, the screw that boatswain chair 4 lower end has, so that boatswain chair 4 and anchor ear 6 are coupled together, form syndeton, and the screw that boatswain chair 4 has just can be engaged on two sections of screw thread middle positions that molybdenum rod 5 has.Described anchor ear 6 is four to fill the span of a man's arms hoop.
As Fig. 2, shown in 3, secondary charging device is arranged at directly over body of heater 9 by lifting wirerope 1, the material after pulverizing is filled in crucible 8, the pneumatic rear crucible 8 of single crystal growing furnace starts to heat up under heater coil 7 acts on, because being non-homogeneous shape after crushing material, gap is had between each material, after heating becomes liquid, gap disappearance can make liquid far below crucible 8 upper surface, it is now cost-saving and the shaping rear quality of increase silicon single crystal, secondary charging can be carried out, the plate (after evolution remaining sides corner material) having jack is hung on molybdenum rod 5 both sides, primary polycrystalline (polycrystalline bar) is snapped in anchor ear 6, start cable car mechanism decline secondary charging device, secondary charging device passes fire door 9a by primary polycrystalline, plate drops in the melt that quartz crucible 8 fills gradually, material is dissolved in melt gradually in decline process, until dosage enough after, by cable car, material is mentioned by mechanism, take off leftover materials and treat that next time uses, bell is closed after seed crystal is installed, start rotating mechanism and fall seed crystal, seed crystal and crucible reverse rotation, in rotary course, silicon body just grows in seed crystal lower end.
After treating silicon bulk-growth, open bell and take out silicon body, reuse secondary charging device and continue unspent material to melt down process and carry out continuity and feed in raw material, body of heater 9 need not be taken apart and take off crucible 8, seed crystal is installed after reinforced and continue to produce.
Claims (2)
1. the vertical pulling method single crystal preparation stove with secondary charging device, it is characterized in that, comprise body of heater (9), heater coil (7) and quartz crucible (8) are installed in body of heater (9), wherein, body of heater (9) upper end has opening for feed (9a), and in this opening for feed (9a) place, hovering has secondary charging device; Described secondary charging device comprises anchor ear (6) and lifting wirerope (1), lifting wirerope (1) one end is connected to counterweight post (2), counterweight post (2) lower end is provided with joint pin (2a), joint pin (2a) lower surface center has screw, corresponding, Jiong shape connecting rod (3) upper surface center also has screw, joint pin (2a) is connected by screw with Jiong shape connecting rod (3), and Jiong shape connecting rod (3) two leg places are all connected with boatswain chair (4); Each boatswain chair (4) lower end all has screw, described anchor ear (6) both sides are provided with contiguous block, contiguous block has jack, by a molybdenum rod (5) through described screw and described jack, so that boatswain chair (4) and anchor ear (6) are connected as one.
2. the vertical pulling method single crystal preparation stove with secondary charging device according to claim 1, it is characterized in that: described molybdenum rod (5) has two sections of screw threads (5a), and the screw of the rear hanging plate that is connected (4) just can be engaged on two sections of screw thread (5a) central authorities.
Priority Applications (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| CN201420683647.4U CN204265883U (en) | 2014-11-13 | 2014-11-13 | A kind of vertical pulling method single crystal preparation stove with secondary charging device |
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| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| CN201420683647.4U CN204265883U (en) | 2014-11-13 | 2014-11-13 | A kind of vertical pulling method single crystal preparation stove with secondary charging device |
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| CN204265883U true CN204265883U (en) | 2015-04-15 |
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Cited By (3)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| CN105332047A (en) * | 2015-12-09 | 2016-02-17 | 天津市环欧半导体材料技术有限公司 | Device for repeatedly feeding materials to pulling single crystal furnace |
| CN107604428A (en) * | 2017-10-18 | 2018-01-19 | 青海日晶光电有限公司 | A kind of monocrystalline silicon continuous production crystallization charging (feeding) equipment and technique |
| CN116200805A (en) * | 2023-04-27 | 2023-06-02 | 北京大学 | Continuous Czochralski crystal pulling device and application method thereof |
-
2014
- 2014-11-13 CN CN201420683647.4U patent/CN204265883U/en active Active
Cited By (4)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| CN105332047A (en) * | 2015-12-09 | 2016-02-17 | 天津市环欧半导体材料技术有限公司 | Device for repeatedly feeding materials to pulling single crystal furnace |
| CN107604428A (en) * | 2017-10-18 | 2018-01-19 | 青海日晶光电有限公司 | A kind of monocrystalline silicon continuous production crystallization charging (feeding) equipment and technique |
| CN116200805A (en) * | 2023-04-27 | 2023-06-02 | 北京大学 | Continuous Czochralski crystal pulling device and application method thereof |
| CN116200805B (en) * | 2023-04-27 | 2023-08-11 | 北京大学 | Continuous Czochralski crystal pulling device and application method thereof |
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| Date | Code | Title | Description |
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| C14 | Grant of patent or utility model | ||
| GR01 | Patent grant | ||
| TR01 | Transfer of patent right |
Effective date of registration: 20220713 Address after: 055550 Jing Long Street, Ningjin County, Xingtai, Hebei Patentee after: JA SOLAR Co.,Ltd. Address before: 055550 279 Jing Long Street, Ningjin County, Xingtai, Hebei. Patentee before: NINGJIN SONGGONG ELECTRONIC MATERIAL Co.,Ltd. |
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| TR01 | Transfer of patent right |