CN101387005A - Material feeder for single crystal furnace - Google Patents
Material feeder for single crystal furnace Download PDFInfo
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- CN101387005A CN101387005A CNA2008101215791A CN200810121579A CN101387005A CN 101387005 A CN101387005 A CN 101387005A CN A2008101215791 A CNA2008101215791 A CN A2008101215791A CN 200810121579 A CN200810121579 A CN 200810121579A CN 101387005 A CN101387005 A CN 101387005A
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- cylindrical shell
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Abstract
The present invention discloses a feeder for a single-crystal furnace, which comprises a cylinder body. A center shaft with a shaft sleeve is arranged inside an inner cavity of the cylinder body, and the shaft sleeve is positioned on the cylinder body through a radial supporting bar; the lower end of the center shaft is provided with a weight which is upwardly extended from a lower port of the cylinder body. A plurality of hinge plates are circumferentially arranged on the port wall of the lower port of the cylinder body. The weight is provided with a lapping plane. The center shaft is upwardly extended from an upper port of the cylinder body. The top part of the center shaft is a connection part. The structure of the connection part is matched with the structure of the seed crystal weight connection part in a secondary chamber of the single-crystal furnace. A shaft below the connection part of the center shaft is provided with a plurality of positioning pin holes. A hanging edge is protruded from the end face of the upper port of the cylinder body. By using the feeder, materials can be added during the process of drawing a single crystal bar in the single-crystal furnace. Thus, the feeder has the advantages that enough material feeding can be ensured, the utilization ratio and the yield of the silica crucible are high, and the tailing of the single crystal bar can be sufficiently used.
Description
[technical field]
The invention belongs to a kind of annex that uses with the single crystal growing furnace coupling, especially belong to a kind of material feeder for single crystal furnace of giving quartz crucible interpolation raw material in the single crystal growing furnace main chamber.
[background technology]
Before the present invention makes, utilize single crystal growing furnace pulling monocrystal rod, in the disposable main chamber's quartz crucible of packing into of raw material, then, control single crystal growing furnace pulling monocrystal rod according to processing requirement.There are the following problems for this mode: 1, because the silicon single crystal raw material is solid state, certainly exist the gap between solid and the solid, make disposable feeding intake often can not accomplish that capacity feeds intake, and quartz crucible is disposable rapid wear product, therefore, quartz crucible can not be brought into play maximum utility, and utilization ratio is low.The single crystal rod that 2, particular requirement is arranged at some resistivity, as: requiring under the narrower situation of single crystal rod electrical resistivity range, realize reinforced owing in the pulling monocrystal process, have no idea, therefore, also just have no idea to reach the purpose that makes full use of tailing by adding primary polycrystalline to improve the resistivity of afterbody monocrystalline, to such an extent as to prior art is after single crystal rod pulls, also need clip defective part, after cleaning, drying, melt down the cost height of wasting time and energy again.
[summary of the invention]
For overcoming the above-mentioned defective that prior art exists, the present invention aims to provide a kind of material feeder for single crystal furnace, this feeder is arranged after, existing single crystal growing furnace is in the pulling monocrystal rod motion, just can realize the purpose that capacity feeds intake, thereby bring into play quartz crucible effectiveness to greatest extent, improve single crystal growing furnace production efficiency, reduce single crystal rod and draw cost, in addition, at some resistivity the single crystal rod of particular requirement is arranged, can improve the resistivity of afterbody monocrystalline, reach the purpose that makes full use of tailing by adding primary polycrystalline.
For achieving the above object, the present invention has adopted following technical scheme:
The structural feature of this material feeder for single crystal furnace is: a kind of material feeder for single crystal furnace is characterized in that: the cylindrical shell of a both ends open straight-tube shape, be equipped with a central shaft in the cylinder lumen with axle sleeve, and axle sleeve is positioned on the cylindrical shell by radial strut; Described central shaft lower end is provided with a weight, and weight stretches out the lower port of cylindrical shell downwards, is equipped with the multi-disc hinge on the port wall of cylindrical shell lower port, has an overlap joint plane on the weight, and described overlap joint plane is the admittance face of horizontality lower jaw; Described central shaft protrudes upward the upper port of cylindrical shell, the top of central shaft is a connection section, the structure of the seed crystal weight connection section in this connection section structure and the single crystal growing furnace concubine is complementary, and the central shaft of connection section below is provided with several and places restrictions on central shaft and make axially movable dowel hole; The upper port end face evagination of described cylindrical shell forms one and hangs the edge.
Aforesaid material feeder for single crystal furnace is characterized in that: described axle sleeve is a single piece, and the upper port plane of the upper surface of axle sleeve and described cylindrical shell is on the same horizontal plane, and described central shaft dowel hole then is higher than the upper port plane of described cylindrical shell.
Aforesaid material feeder for single crystal furnace is characterized in that: be arranged on and have 6 turnover plate type hinges on the described cylindrical shell lower port, every hinge is the fan type, has the gap between hinge and the hinge.
Aforesaid material feeder for single crystal furnace is characterized in that: described extension is along being the cyclic single piece.
Beneficial effect: before the present invention makes, do not appear in the newspapers and use.After inventing this feeder, thoroughly changed existing single crystal growing furnace pulling monocrystal rod, raw material needs the present situation of the disposable main chamber's quartz crucible of packing into, utilize this feeder, if during the insufficient raw material in the discovery quartz crucible after the fusing, can open the single crystal growing furnace concubine and add raw material, realize in single crystal growing furnace pulling monocrystal rod motion, adding the purpose of raw material.Can add raw material midway, its meaning is: guarantee that 1, every quartz crucible can both obtain capacity and feed intake, solved between raw material solid and the solid and have the gap that the defective that can not capacity feeds intake makes every quartz crucible can both bring into play maximum utility, the utilization ratio height.2, every stove single crystal rod draws, and clout all is certain at the bottom of the crucible, owing to can add raw material midway, has effectively improved the yield rate of single crystal rod.The single crystal rod that 3, particular requirement is arranged at some resistivity can reach the purpose that makes full use of tailing by adding the resistivity of primary polycrystalline raising afterbody monocrystalline; And can also carry out as requested feeding in raw material the second stage employ quartz crucible once more.
[description of drawings]
Fig. 1 is the perspective view of one embodiment of the invention.Clear for representing, figure middle cylinder body lower port place has made rotation treatment.
Among the figure: weight 1, hinge 2, central shaft 3, permanent seat 4, web member 41, locating shaft 42, cylindrical shell 5, lower port 51, cambered surface 6 on the weight, and the joint nut 61, overlap joint plane 62, support bar 7, cylinder inboard wall 8, axle sleeve 9, open slot 10, following latch 11, dowel hole 111 is hung along 12.
[embodiment]
Referring to Fig. 1.Cylindrical shell 5 is top with the open slot 10 at central shaft 3 places.
The diameter of cylindrical shell 5, length can be decided according to the single crystal growing furnace structure that coupling is used, that is: diameter is a benchmark to be arranged on main chamber to the sealing place internal diameter of the aditus laryngis valve between concubine (flap valve or push-pull valve), length is benchmark with plane on the aditus laryngis valve to quartz crucible top correct position then, diameter, the length of decision cylindrical shell 5.
Dock with weight 1 screw thread through joint nut 61 central shaft 3 lower ends, can certainly adopt one-piece construction.Has an overlap joint plane 62 on the weight 1.On the port wall of cylindrical shell 5 lower port 51 permanent seat 4 is set, has a locating shaft 42 on the permanent seat 4, be fixedly coupled part 41 with hinge 2 and be hinged on the locating shaft 42, hinge 2 is promptly turning thus.Be provided with 6 hinges 2 on the circular port wall altogether, it is fan-shaped that the shape of every hinge 2 all is, and have the gap each other.Segmental hinge 2 all can overlap with the overlap joint plane 62 of weight 1 when horizontality mutually.
The upper port of cylindrical shell 5, port wall evagination forms annular and hangs along 12, and hanging should be horizontal along 12 bottom surface.The top of central shaft 3 is a connection section, this connection section structure can be with the connection section structural changes of seed crystal weight in the single crystal growing furnace concubine, present embodiment is a kind of concave-convex type syndeton, open slot 10 is used to admit the convex structure of seed crystal weight connection section, when adopting other syndeton, as long as both can be linked together.
Dowel hole is used to admit latch, among Fig. 1, following latch 11 is inserted in the dowel hole on top, axle sleeve 9 upper surface, dowel hole 111 is used to admit latch, during use, last latch is fixedly shape, in case seed crystal weight and central shaft 3 connection section slippages, weight 1 and central shaft 3 fall in the quartz crucible, cause the accident.
For sharpening understanding, tell the use of this feeder below.
The feeder of Shi Yonging need carry out acid corrosion first, and to remove oxide compound and other foreign material of surface of stainless steel, the scrutiny weld is checked to have or not rosin joint, with purified rinse water clean after, clean with alcohol gauze again, use clean hairbrush outwash at last.
Pull-up central shaft 3, the overlap joint plane 62 of weight 1 are closed 6 hinges 2, insert latch 11 down, make weight 1 fix hinge 2, make hinge 2 be in closing condition.Feeder is placed in the container of a diameter greater than cylindrical shell 5 reinforced (the material footpath should be complementary with the feeder diameter, and material directly should be considered the axle sleeve 9 of central shaft 3 and the gap length between the cylinder inboard wall 8)
After reinforced, whole feeder and external container are moved to the concubine lower end of single crystal growing furnace, then, decline seed crystal weight, by the open slot 10 on central shaft 3 tops, be connected with the seed crystal weight connection section that is positioned at the concubine internal upper part, through the original lifting gear of single crystal growing furnace, seed crystal weight and feeder rise, and make feeder unsettled.
Then, transfer to latch 11 down, feeder rises up in the single crystal growing furnace concubine, takes external container away, seals concubine, vacuumizes.After vacuumizing, open aditus laryngis valve, decline feeder, make the feeder bottom enter the main chamber through aditus laryngis, extension is shelved on aditus laryngis along 12 and seals on the anchor ring, then, falls central shaft 3 with a some flowing mode, weight 1 is slowly separated with hinge 2, hinge 2 is slowly opened, raw material falls in the quartz crucible.
Raw material is promoted to feeder in the concubine after falling only, closes aditus laryngis valve (flap valve or push-pull valve).Toward the concubine applying argon gas, pressure is opened concubine to internal and external equilibrium, takes out feeder.
As also feeding in raw material, can use feeder by above step cycle, reach requirement and end.Feeder can adopt stainless material to make.
Claims (4)
1, a kind of material feeder for single crystal furnace is characterized in that: the cylindrical shell of a both ends open straight-tube shape (5), be equipped with a central shaft (3) in cylindrical shell (5) inner chamber with axle sleeve (9), and axle sleeve (9) is positioned on the cylindrical shell (5) by radial strut (7); Described central shaft (3) lower end is provided with a weight (1), weight (1) stretches out the lower port (51) of cylindrical shell (5) downwards, be equipped with multi-disc hinge (2) on the port wall of cylindrical shell (5) lower port (51), have an overlap joint plane (62) on the weight (1), described overlap joint plane (62) is the admittance face of horizontality lower jaw (2); Described central shaft (3) protrudes upward the upper port of cylindrical shell (5), the top of central shaft (3) is a connection section, the structure of the seed crystal weight connection section in this connection section structure and the single crystal growing furnace concubine is complementary, and the central shaft (3) of connection section below is provided with several and places restrictions on central shaft (3) and make axially movable dowel hole; The upper port end face evagination of described cylindrical shell (5) forms one and hangs along (12).
2, material feeder for single crystal furnace as claimed in claim 1, it is characterized in that: described axle sleeve (9) is single piece, the upper port plane of the upper surface of axle sleeve (9) and described cylindrical shell (5) is on the same horizontal plane, and described central shaft (3) dowel hole then is higher than the upper port plane of described cylindrical shell (5).
3, material feeder for single crystal furnace as claimed in claim 1 is characterized in that: be arranged on and have 6 turnover plate type hinges (2) on described cylindrical shell (5) lower port (51), every hinge (2) is the fan type, has the gap between hinge (2) and the hinge (2).
4, material feeder for single crystal furnace as claimed in claim 1 is characterized in that: described extension is the cyclic single piece along (12).
Priority Applications (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| CN2008101215791A CN101387005B (en) | 2008-10-14 | 2008-10-14 | Material feeder for single crystal furnace |
Applications Claiming Priority (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| CN2008101215791A CN101387005B (en) | 2008-10-14 | 2008-10-14 | Material feeder for single crystal furnace |
Publications (2)
| Publication Number | Publication Date |
|---|---|
| CN101387005A true CN101387005A (en) | 2009-03-18 |
| CN101387005B CN101387005B (en) | 2011-03-30 |
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| Application Number | Title | Priority Date | Filing Date |
|---|---|---|---|
| CN2008101215791A Expired - Fee Related CN101387005B (en) | 2008-10-14 | 2008-10-14 | Material feeder for single crystal furnace |
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| Country | Link |
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| CN (1) | CN101387005B (en) |
Cited By (6)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| CN102011177A (en) * | 2010-12-27 | 2011-04-13 | 天津市环欧半导体材料技术有限公司 | Re-feeding device for Czochralski silicon single crystal furnace |
| CN101698960B (en) * | 2009-11-09 | 2012-11-21 | 西安隆基硅材料股份有限公司 | Material supplementing method and material supplementing device for pulling of crystals |
| CN103603056A (en) * | 2013-11-06 | 2014-02-26 | 江苏华盛天龙光电设备股份有限公司 | Electric precise-control external feeding device of crystal growing furnace |
| US20140360428A1 (en) * | 2013-06-11 | 2014-12-11 | So Young Jang | Recharging apparatus |
| CN103243381B (en) * | 2013-05-23 | 2015-06-24 | 上海九晶电子材料股份有限公司 | Secondary feeding device and method of single crystal furnace |
| CN105133010A (en) * | 2015-08-31 | 2015-12-09 | 中卫市银阳新能源有限公司 | Repeated charging device for single-crystal furnace |
Family Cites Families (4)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| FI901413A0 (en) * | 1989-03-30 | 1990-03-21 | Nippon Kokan Kk | ANORDINATION FOR FRAMING A KISELENKRISTALLER. |
| CN1285772C (en) * | 2003-04-15 | 2006-11-22 | 西安理工大学 | Continuous charging device for artificial crystal growth |
| CN201089803Y (en) * | 2007-06-13 | 2008-07-23 | 浙江昱辉阳光能源有限公司 | Charge pipe for elemental crystal furnace |
| CN201277809Y (en) * | 2008-10-14 | 2009-07-22 | 浙江华友电子有限公司 | Monocrystalline silicon feeder |
-
2008
- 2008-10-14 CN CN2008101215791A patent/CN101387005B/en not_active Expired - Fee Related
Cited By (9)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| CN101698960B (en) * | 2009-11-09 | 2012-11-21 | 西安隆基硅材料股份有限公司 | Material supplementing method and material supplementing device for pulling of crystals |
| CN102011177A (en) * | 2010-12-27 | 2011-04-13 | 天津市环欧半导体材料技术有限公司 | Re-feeding device for Czochralski silicon single crystal furnace |
| CN103243381B (en) * | 2013-05-23 | 2015-06-24 | 上海九晶电子材料股份有限公司 | Secondary feeding device and method of single crystal furnace |
| US20140360428A1 (en) * | 2013-06-11 | 2014-12-11 | So Young Jang | Recharging apparatus |
| CN104233467A (en) * | 2013-06-11 | 2014-12-24 | Lg矽得荣株式会社 | Recharging apparatus |
| CN103603056A (en) * | 2013-11-06 | 2014-02-26 | 江苏华盛天龙光电设备股份有限公司 | Electric precise-control external feeding device of crystal growing furnace |
| CN103603056B (en) * | 2013-11-06 | 2016-04-13 | 江苏华盛天龙光电设备股份有限公司 | A kind of electric precision controls the outside feeder of crystal growing furnace |
| CN105133010A (en) * | 2015-08-31 | 2015-12-09 | 中卫市银阳新能源有限公司 | Repeated charging device for single-crystal furnace |
| CN105133010B (en) * | 2015-08-31 | 2017-12-26 | 中卫市银阳新能源有限公司 | A kind of single crystal growing furnace composite feeding-material device |
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| CN101387005B (en) | 2011-03-30 |
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