CN203820919U - Built-in feeder for single crystal furnace - Google Patents
Built-in feeder for single crystal furnace Download PDFInfo
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- CN203820919U CN203820919U CN201420234686.6U CN201420234686U CN203820919U CN 203820919 U CN203820919 U CN 203820919U CN 201420234686 U CN201420234686 U CN 201420234686U CN 203820919 U CN203820919 U CN 203820919U
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- feeder
- built
- storage vat
- single crystal
- articulated elements
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Abstract
The utility model discloses a built-in feeder for a single crystal furnace. Thebuilt-in feeder comprises a storage barrel, a blocking piece and a lifting rope group, wherein the storage barrel is provided with an upper filling port and a lower discharging port and can be fixed in a predetermined position above a crucible in the single crystal furnace; the blocking piece is hinged to the storage barrel and can be used for blocking the lower discharging port; the lifting rope group is used for lifting the storage barrel with silicon materials stored into or out of the single crystal furnace; the lifting rope group comprises a plurality of lifting ropes, the upper end of each lifting rope is connected with a lifting device, and the lower end of each lifting rope is connected with the blocking piece. Secondary feeding for the single crystal furnace can be finished through the built-in feeder, so that the yield of the single crystal furnace within a single cycle is increased, the utilization rate of the quartz crucible is increased, and the manufacturing cost of single crystals is reduced. Besides, the built-in feeder has the characteristics of simple structure and compact and reasonable layout.
Description
Technical field
The utility model relates to secondary charging equipment technical field, particularly a kind of built-in feeder for single crystal growing furnace in single crystal growing furnace.
Background technology
Single crystal growing furnace is the equipment of produce single crystal silicon rod, its production process is that the quartz crucible of filling polycrystalline silicon material is put into single crystal growing furnace heating and melting under negative pressure state is liquid silicon material, be drawn into silicon single crystal by seed crystal again, liquid silicon material in quartz crucible is all drawn into silicon single crystal rod, opens after cooling single crystal growing furnace and takes out silicon single crystal rod finished product.
Single crystal growing furnace is in the process of pulling monocrystal, always in high temperature negative pressure state, solid silicon material is being melted into after liquid state, it takes up space and is less than the volume of quartz crucible, the segment space that is quartz crucible is not yet used, and output in the single cycle of single crystal growing furnace is directly proportional to the silicon material amount in crucible.
Be appreciated that after silicon material solid, liquid conversion the difference of shared volume in container, caused in the single cycle of current single crystal growing furnace and yielded poorly, and the low problem of quartz crucible utilization ratio.
In view of this, how improving the utilization ratio of interior output of single cycle of single crystal growing furnace and quartz crucible, is those skilled in the art's technical problems urgently to be resolved hurrily.
Utility model content
For above-mentioned defect, core object of the present utility model is, a kind of built-in feeder for single crystal growing furnace is provided, to solve the problem of the utilization ratio that has output in the single cycle and quartz crucible when current single crystal growing furnace is prepared monocrystalline.。
In order to address the above problem, the utility model provides a kind of built-in feeder of single crystal growing furnace, and this built-in feeder comprises:
Lifting device;
Storage vat, has upper feeding port and lower discharge opening, and can be fixed on the predetermined position of crucible top in described single crystal growing furnace;
Closeouts, hinged with described storage vat, can be used for descending discharge opening described in shutoff;
Lifting rope group, for the described storage vat that stores silicon material is hung in to described single crystal growing furnace or hung out,, and comprising some lifting ropes, the upper end of every described lifting rope is connected with described lifting device, lower end is connected with described closeouts.
Preferably, described closeouts comprises at least two closure parts, after two described closure part amalgamations, can described in shutoff, descend discharge opening; Each described closure part is hinged with described storage vat and be connected with lifting rope described at least one.
Preferably, the pin joint of two described closure parts and described storage vat is symmetrical with respect to the axis of described storage vat, and each described closure part is at least connected with two described lifting ropes, and two tie points are symmetrical arranged with respect to described pin joint.
Preferably, along in perpendicular, the cross-sectional shape after two described closure part amalgamations is inverted trapezoidal, and has and can be communicated with described lower discharge opening and for the space of accommodating silicon material.。
Preferably, described closeouts and described storage vat are hinged by linkwork, and described linkwork comprises the first articulated elements, the second articulated elements and rotating shaft, and the middle part of described rotating shaft is articulated in described the first articulated elements and its both ends are articulated in described the second articulated elements;
In described the first articulated elements and described the second articulated elements, one is fixedly connected on described closeouts, and another one is fixedly connected on described storage vat.
Preferably, described the second articulated elements is fixed on described storage vat and has spaced two hooks, described the first articulated elements is between two described hooks, and described rotating shaft is through described the first articulated elements and by two described hooks and described the second articulated elements pivot joint.
Preferably, described lifting device is specially the crystal lifting device of single crystal growing furnace.
Preferably, also comprise web plate, described web plate has the lifting hole(eyelet) suitable with the suspension hook of described lifting device, and the upper end of described lifting rope is fixedly connected on described web plate.
Preferably, described storage vat comprises staving and support ring, and described support ring is set in the internal diameter that described staving and its external diameter are greater than described auxiliary furnace of mono-crystal chamber.
Preferably, described storage vat also comprises centering ring, and described centering ring is set in described staving and is positioned at described support ring top, for storage vat self-centering in single crystal growing furnace.
Built-in feeder provided by the utility model comprises storage vat, closeouts and lifting rope group, and wherein, storage vat has upper feeding port and lower discharge opening, and can be fixed on the predetermined position of crucible top in single crystal growing furnace; Closeouts and storage vat are hinged and can be used for discharge opening under shutoff; Lifting rope group is used for the storage vat that stores silicon material hang in to single crystal growing furnace or hang out,, comprise several lifting ropes, the upper end of each lifting rope is connected with lifting device, lower end is connected with closeouts.
The specific works process of this built-in feeder is, under the filler of built-in feeder and haul operating mode, controlling lifting device pulls lifting rope group that closeouts is turned to discharge opening under shutoff with respect to storage vat, fill silicon material, then control lifting device storage vat is transported to the predetermined position above crucible in single crystal growing furnace; Under the discharging operating mode of built-in feeder, control lifting device declines, closeouts turns to lower discharge opening with respect to storage vat and opens under the overall action of gravity of self and silicon material, in storage vat, silicon material is settled down in crucible, again controls lifting device and close lower discharge opening and storage vat is hung out by single crystal growing furnace after having fed in raw material.
Can complete the secondary charging work to single crystal growing furnace by above-mentioned built-in feeder, improve the output of single crystal growing furnace within the single process-cycle, the utilization ratio of quartz crucible, thereby reduce the manufacturing cost of preparing monocrystalline.In addition, the built-in feeder in this programme has simple in structure, compact in design, rational feature.
In a preferred version of the present utility model, the closeouts of above-mentioned built-in feeder comprises two closure parts, two closure parts all can be used for discharge opening under shutoff after and amalgamation hinged with storage vat, wherein, the pin joint of two closure parts and storage vat is arranged symmetrically with respect to the axis of storage vat, each closure part is connected with two lifting ropes, and two tie points are symmetrical arranged with respect to pin joint.
It should be noted that, first the closeouts of this programme adopts split type two valve structures, be appreciated that compared with adopting integral type closeouts, built-in feeder under discharging operating mode, closeouts under self and the action of gravity of silicon material, rotate with respect to storage vat so that lower discharge opening to open required working space less.Therefore, for the single crystal growing furnace of same volume, closeouts is rotated required working space I and is correspondingly increased the length of storage vat at vertical direction, can increase it and can hold silicon material amount, obviously can increase further like this output of single crystal growing furnace.
In addition, concrete structure this programme based on closeouts further define two closure parts of closeouts and storage vat pin joint position with and with the decoration form of lifting rope tie point, be that each closeouts has a pin joint and two tie points, and two tie points are arranged symmetrically with respect to pin joint, the tension uniform that can make like this lifting rope put on closure part is arranged, closure part is being rotated under moment comparatively uniformly, thereby both can ensure the tightness of time discharge opening sealing; In haul process, storage vat is formed at least four relatively equally distributed Heave Heres simultaneously, thereby can improve the safety and reliability under haul operating mode.
Brief description of the drawings
Fig. 1 shows the structural representation of built-in feeder embodiment provided by the utility model;
The master that Fig. 2 shows Fig. 1 looks schematic diagram;
Fig. 3 shows the schematic side view of Fig. 1;
Fig. 4 shows the schematic top plan view of Fig. 1;
Fig. 5 shows the structural representation under built-in feeder discharging operating mode shown in Fig. 1;
Fig. 6 shows the local enlarged diagram in A place of Fig. 5.
Corresponding relation in Fig. 1 to 6 between Reference numeral and all parts title:
1 storage vat, 11 stavings, 12 support rings, 13 centering rings, 2 closeouts, 21 closure parts, 3 lifting ropes, 4 web plates, 41 lifting hole(eyelet)s, 5 linkworks, 51 first articulated elements, 52 second articulated elements, 521 hooks, 53 rotating shafts.
Embodiment
Core of the present utility model is, a kind of built-in feeder of single crystal growing furnace is provided, to add silicon material to secondary in its body of heater in single crystal growing furnace working process, to increase the output in the single process-cycle of single crystal growing furnace.
Now, in conjunction with Figure of description, concrete structure and the principle of work thereof of built-in feeder provided by the utility model is described.Need to illustrate, related noun of locality "up" and "down" is set as benchmark taking Figure of description herein, is appreciated that the appearance of the above-mentioned noun of locality does not limit protection domain of the present utility model.In addition, the predetermined position that related storage vat reaches herein, refers to the position of the suitable secondary charging in crucible top in single crystal growing furnace, and particular location is determined by the concrete structure of single crystal growing furnace.
Refer to Fig. 1, the figure shows the structural representation of built-in feeder embodiment provided by the utility model.
As shown in Figure 1, the built-in feeder that this programme provides comprises storage vat 1, closeouts 2 and lifting rope group, and wherein, storage vat 1 has upper feeding port and lower discharge opening, and can be fixed on the predetermined position of crucible top in monocrystalline 1 stove; Closeouts 2 is hinged and can be used for discharge opening under shutoff with storage vat 1; Lifting rope group is used for the storage vat 1 that stores silicon material hang in to single crystal growing furnace or hang out,, lifting rope group comprises several lifting ropes 3, the upper end of each lifting rope 3 is connected with lifting device, lower end is connected with closeouts 2.For the ease of understanding better the concrete structure of this feeder, please also refer to Fig. 2 to Fig. 5, wherein, the master that Fig. 2 shows Fig. 1 looks schematic diagram, Fig. 3 shows the schematic side view of Fig. 1, Fig. 4 shows the schematic top plan view of Fig. 1, and Fig. 5 shows the structural representation under built-in feeder discharging operating mode shown in Fig. 1.
The specific works process of this built-in feeder is, under the filler of built-in feeder and haul operating mode, controls lifting device and pulls 3 groups of lifting ropes that closeouts 2 is turned to discharge opening under shutoff with respect to storage vat 1, fills silicon material; After filling completes, control lifting device is transported to storage vat 1 in the predetermined position of crucible top in single crystal growing furnace; Under the discharging operating mode of built-in feeder, control lifting device declines, closeouts 2 turns to the interior silicon material of lower discharge opening opened condition storage vat 1 shown in Fig. 5 with respect to storage vat 1 and is settled down in crucible under the overall action of gravity of self and silicon material, again controls lifting device and close lower discharge opening and storage vat 1 is hung out by single crystal growing furnace after having fed in raw material.
Can complete the secondary charging to single crystal growing furnace by above-mentioned built-in feeder, improve the output of single crystal growing furnace within the single process-cycle, the utilization ratio of quartz crucible, thereby reduce the manufacturing cost of preparing monocrystalline.In addition, the built-in feeder in this programme has simple in structure, compact in design, rational feature.
Next,, in conjunction with the Fig. 1 in Figure of description, Fig. 5 and Fig. 6, the concrete structure of above-mentioned built-in each assembly of feeder and mutual annexation are described.Wherein, Fig. 6 shows the local enlarged diagram in A place of Fig. 5.
As shown in Figure 6, the closeouts 2 of this built-in feeder comprises two closure parts 21, two closure parts 21 all can be used for discharge opening under shutoff after and amalgamation hinged with storage vat 1, wherein, two closure parts 21 are arranged symmetrically with respect to the axis of storage vat 1 with the pin joint of storage vat 1, each closure part 21 is connected with two lifting ropes 3, and two tie points are symmetrical arranged with respect to pin joint.For the ease of understanding better the concrete structure of closeouts 2, please also refer to Fig. 5.Particularly, in this programme, lower discharge opening is shaped as circle, the cross-sectional shape of closeouts 2 after two closure part 21 amalgamations in horizontal plane is semicircle, be appreciated that, meeting on the basis of discharge opening function under shutoff, processing and assembly technology requirement, the cross section of this closeouts portion also can be other arbitrary shapes.
It should be noted that, first the closeouts 2 of this programme adopts split type two valve structures, be appreciated that compared with adopting integral type closeouts 2, built-in feeder under discharging operating mode, closeouts 2 under self and the action of gravity of silicon material, rotate with respect to storage vat 1 so that lower discharge opening to open required working space less.Therefore, for the single crystal growing furnace of same volume, closeouts 2 is rotated required working space I and is correspondingly increased the length of storage vat 1 at vertical direction, can increase it and can hold silicon material amount, obviously can increase further like this output of single crystal growing furnace.
In addition, two closure parts 21 that concrete structure this programme based on closeouts 2 further defines closeouts 2 and storage vat 1 pin joint position with and with the decoration form of lifting rope 3 tie points, be that each closeouts 2 has a pin joint and two tie points, and two tie points are arranged symmetrically with respect to pin joint, the tension uniform that can make like this lifting rope 3 put on closure part 21 is arranged, closure part 21 is being rotated under moment comparatively uniformly, thereby both can ensure the tightness of time discharge opening sealing; In haul process, storage vat is formed at least four relatively equally distributed Heave Heres simultaneously, thereby can improve the safety and reliability under haul operating mode.
Certainly, meet under filler, haul and discharging operating mode thereof ensure under on the basis of discharge opening unlatching or closing function, processing and assembly technology requirement, this closeouts 2 also can adopt other usual structures of integral type or this area, and according to the concrete structure of closeouts 2, the quantity of lifting rope 3 in 3 groups of lifting ropes is carried out to accommodation.Additionally, as long as discharge opening under can shutoff after 21 amalgamations of multiple closure parts, the number of closure part 21 also can be other numerical value.
Further, as shown in Figures 2 and 3, along in perpendicular, the cross-sectional shape after two closure part 21 amalgamations is inverted trapezoidal, and has and can be communicated with the space for accommodating silicon material with lower discharge opening.。
Due to extreme temperatures in single crystal growing furnace and higher the closer to crucible liquid level temperature, the closure part 21 that this programme is inverted trapezoidal structure by cross-sectional shape, in the distance that ensures to strengthen as far as possible under the maximized prerequisite of storing amount storage vat 1 bottom and crucible liquid level, and the heating surface area of closeouts 2, thereby can reduce both temperature distortion amounts, and then extend the work-ing life of storage vat 1 and closeouts 2.Certainly, closure part 21 also can adopt platy structure.
In addition, as shown in Figure 6, storage vat 1 in this programme and closeouts 2 are hinged by linkwork, this linkwork comprises the first articulated elements 51, the second articulated elements 52 and rotating shaft 53, wherein, the first articulated elements 51 is fixedly connected on closeouts 2 and has pivoted hole, and the middle part of rotating shaft 53 is by pivoted hole and the first articulated elements 51 pivot joints, its both ends and the second articulated elements pivot joint that is fixedly connected on storage vat 1.
Storage vat 1 and closeouts 2 are hinged by the linkwork of said structure, have feature simple in structure.Certainly, meeting on the basis of storage vat 1 and closeouts 2 hinge functions, processing and assembly technology requirement, other linkworks that both also can commonly use by this area are hinged.In addition, the first articulated elements 51 and the second articulated elements 52 also can oppositely arrange, and the first articulated elements 51 is fixedly connected on storage vat 1, the second articulated elements 52 and is fixedly connected on closeouts 2.
Further, the second articulated elements 52 has spaced two hooks, and the both ends of rotating shaft 53 are respectively by two hooks and the second articulated elements 52 pivot joints.
This programme, by limiting the concrete structure of the second articulated elements 52, in the disassembly process of closeouts 2 and storage vat 1, without adopting auxiliary means, only need be taken out closeouts 2 by hook, thereby has simplified the dismounting process of feeder module.
As shown in Figure 1, storage vat 1 comprises staving 11, support ring 12 and centering ring 13, and wherein, support ring 12 and centering ring 13 are set in staving 11, and the external diameter of support ring 12 is greater than the internal diameter of concubine in single crystal growing furnace and is positioned at the below of centering ring 13.Carried after auxiliary chamber of single crystal furnace at built-in feeder, by the crystal lifting device of single crystal growing furnace, in stove, feeder is slowly dropped to quartz crucible top, drop to after certain altitude, because the external diameter of support ring 12 is greater than the size of concubine internal diameter in single crystal growing furnace, the weight of whole built-in feeder can be supported by support ring 12, will be no longer stressed with the wireline that equipment crystal-driven motor is connected.At this moment discharge openings place can be because of the weight of silicon material and the deadweight of itself, and in open mode, silicon material will all leak as in quartz crucible.
Be appreciated that and storage vat 1 be fixed on the basis of predetermined position function, processing and assembly technology requirement meeting, this storage vat 1 also can adopt the conventional mode in other this areas to realize and the matching relationship of single crystal growing furnace.
And the object that centering ring 13 is set is, storage vat 1 under lifting gear effect in single crystal growing furnace in decline process, can adopt centering ring 13 to produce certralizing ability, to prevent that storage vat 1 from tilting and catching phenomenon, thereby ensure job security and the reliability of built-in feeder.
In addition, built-in feeder also comprises web plate 4, and this web plate 4 has the lifting hole(eyelet) 41 suitable with the suspension hook of lifting gear, and lifting rope 3 is fixedly connected on this web plate 4.
Be appreciated that, concrete structure feature based on closeouts 2, this programme comprises many lifting ropes 3, is connected with lifting device by further restriction lifting rope 3 by web plate 4, many scattered lifting ropes 3 can be concentrated on to web plate 4, thereby make built-in feeder compact overall structure, entirety.Certainly, lifting rope 3 can be directly connected in lifting device.
Finally, it should be noted that lifting device in this programme specifically utilizes the crystal lifting device of single crystal growing furnace, built-in feeder is without configuring independently lifting device, thereby reduced its manufacturing cost.
The foregoing is only preferred implementation of the present utility model, do not form the restriction to the utility model protection domain.Any any amendment of doing within spirit of the present utility model and principle, be equal to and replace and improvement etc., within all should being included in claim protection domain of the present utility model.
Claims (10)
1. for a built-in feeder for single crystal growing furnace, it is characterized in that, comprising:
Lifting device;
Storage vat (1), has upper feeding port and lower discharge opening, and can be fixed on the predetermined position of crucible top in described single crystal growing furnace;
Closeouts (2), hinged with described storage vat (1), can be used for descending discharge opening described in shutoff;
Lifting rope group, for the described storage vat (1) that stores silicon material is hung in to described single crystal growing furnace or is hung out, comprise some lifting ropes (3), the upper end of every described lifting rope (3) is connected with described lifting device, lower end is connected with described closeouts (2).
2. built-in feeder as claimed in claim 1, is characterized in that, described closeouts (2) comprises at least two closure parts (21), after the amalgamation of two described closure parts (21), can described in shutoff, descend discharge opening; Each described closure part (21) is hinged with described storage vat (1) and be connected with lifting rope described at least one (3).
3. built-in feeder as claimed in claim 2, it is characterized in that, two described closure parts (21) are symmetrical with respect to the axis of described storage vat (1) with the pin joint of described storage vat (1), each described closure part (21) is at least connected with two described lifting ropes (3), and two tie points are symmetrical arranged with respect to described pin joint.
4. built-in feeder as claimed in claim 2 or claim 3, is characterized in that, along in perpendicular, the cross-sectional shape after the amalgamation of two described closure parts (21) is inverted trapezoidal, and has and can be communicated with described lower discharge opening and for the space of accommodating silicon material.
5. built-in feeder as claimed in claim 2 or claim 3, it is characterized in that, described closeouts (2) and described storage vat (1) are hinged by linkwork, described linkwork comprises the first articulated elements (51), the second articulated elements (52) and rotating shaft (53), and the middle part of described rotating shaft (53) is articulated in described the first articulated elements (51) and its both ends are articulated in described the second articulated elements (52);
In described the first articulated elements (51) and described the second articulated elements (52), one is fixedly connected on described closeouts (2), and another one is fixedly connected on described storage vat (1).
6. built-in feeder as claimed in claim 5, it is characterized in that, described the second articulated elements (52) is fixed on described storage vat (1) and has spaced two hooks (521), described the first articulated elements (51) is positioned between two described hooks (521), and described rotating shaft (53) is through described the first articulated elements (51) and by two described hooks (521) and described the second articulated elements (52) pivot joint.
7. built-in feeder as claimed any one in claims 1 to 3, is characterized in that, described lifting device is specially the crystal lifting device of single crystal growing furnace.
8. built-in feeder as claimed any one in claims 1 to 3, it is characterized in that, also comprise web member (4), described web member (4) has the lifting hole(eyelet) suitable with the suspension hook of described lifting device (41), and the upper end of described lifting rope (3) is fixedly connected on described web member (4).
9. built-in feeder as claimed any one in claims 1 to 3, it is characterized in that, described storage vat (1) comprises staving (11) and support ring (12), and described support ring (12) is set in the internal diameter that described staving (11) and its external diameter are greater than described auxiliary furnace of mono-crystal chamber.
10. built-in feeder as claimed in claim 9, it is characterized in that, described storage vat (1) also comprises centering ring (13), and described centering ring (13) is set in described staving (11) and is positioned at described support ring (12) top.
Priority Applications (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| CN201420234686.6U CN203820919U (en) | 2014-05-08 | 2014-05-08 | Built-in feeder for single crystal furnace |
Applications Claiming Priority (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| CN201420234686.6U CN203820919U (en) | 2014-05-08 | 2014-05-08 | Built-in feeder for single crystal furnace |
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| Publication Number | Publication Date |
|---|---|
| CN203820919U true CN203820919U (en) | 2014-09-10 |
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| Application Number | Title | Priority Date | Filing Date |
|---|---|---|---|
| CN201420234686.6U Expired - Fee Related CN203820919U (en) | 2014-05-08 | 2014-05-08 | Built-in feeder for single crystal furnace |
Country Status (1)
| Country | Link |
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| CN (1) | CN203820919U (en) |
Cited By (2)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| CN105133010A (en) * | 2015-08-31 | 2015-12-09 | 中卫市银阳新能源有限公司 | Repeated charging device for single-crystal furnace |
| WO2017063410A1 (en) * | 2015-10-15 | 2017-04-20 | 严利容 | Secondary packing apparatus for single crystal furnace |
-
2014
- 2014-05-08 CN CN201420234686.6U patent/CN203820919U/en not_active Expired - Fee Related
Cited By (3)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| CN105133010A (en) * | 2015-08-31 | 2015-12-09 | 中卫市银阳新能源有限公司 | Repeated charging device for single-crystal furnace |
| CN105133010B (en) * | 2015-08-31 | 2017-12-26 | 中卫市银阳新能源有限公司 | A kind of single crystal growing furnace composite feeding-material device |
| WO2017063410A1 (en) * | 2015-10-15 | 2017-04-20 | 严利容 | Secondary packing apparatus for single crystal furnace |
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| CF01 | Termination of patent right due to non-payment of annual fee |
Granted publication date: 20140910 |
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| CF01 | Termination of patent right due to non-payment of annual fee |