CN206052201U - A kind of straight pull type single crystal furnace silicon material throws device again - Google Patents

A kind of straight pull type single crystal furnace silicon material throws device again Download PDF

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Publication number
CN206052201U
CN206052201U CN201621024055.7U CN201621024055U CN206052201U CN 206052201 U CN206052201 U CN 206052201U CN 201621024055 U CN201621024055 U CN 201621024055U CN 206052201 U CN206052201 U CN 206052201U
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CN
China
Prior art keywords
charging chamber
hoppers
tremie pipe
overturning hinge
single crystal
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Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Expired - Fee Related
Application number
CN201621024055.7U
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Chinese (zh)
Inventor
傅林坚
曹建伟
倪军夫
沈兴潮
陈丽婷
Current Assignee (The listed assignees may be inaccurate. Google has not performed a legal analysis and makes no representation or warranty as to the accuracy of the list.)
Zhejiang Jingsheng Mechanical and Electrical Co Ltd
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Zhejiang Jingsheng Mechanical and Electrical Co Ltd
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Publication date
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Priority to CN201621024055.7U priority Critical patent/CN206052201U/en
Application granted granted Critical
Publication of CN206052201U publication Critical patent/CN206052201U/en
Expired - Fee Related legal-status Critical Current
Anticipated expiration legal-status Critical

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Abstract

This utility model is related to straight pull type single crystal furnace, it is desirable to provide a kind of straight pull type single crystal furnace silicon material throws device again.This kind of straight pull type single crystal furnace silicon material throws device again includes charging chamber and tremie pipe, charging chamber is divided at least two hoppers, corresponding overturning hinge door is housed below each hopper, suspension ring are installed on each overturning hinge door, the lower muzzle of the top and charging chamber of tremie pipe is closed to be installed, and the top of tremie pipe is welded with cross lifting strip;Charging chamber's upper cover plate and charging chamber's upper flange are provided with above charging chamber, lifting motor and cylinder are disposed with charging chamber's upper cover plate, lifting motor connects cross lifting strip by steel wire rope, for controlling the lifting of tremie pipe, each cylinder is connected with the suspension ring on corresponding overturning hinge door by steel wire rope respectively, for controlling the opening and closing of correspondence overturning hinge door.This utility model can complete multiple composite feeding-material by an evacuation, time-consuming.

Description

A kind of straight pull type single crystal furnace silicon material throws device again
Technical field
This utility model is that, with regard to straight pull type single crystal furnace field, more particularly to a kind of straight pull type single crystal furnace silicon material throws dress again Put.
Background technology
In straight pull type single crystal furnace crystal pulling production, due to silica crucible service life it is limited, therefore in the silica crucible life-span In the range of inventory it is more, pulled crystal is heavier, unit source consume it is less, production efficiency is also higher.Therefore Straight pull The addition of silicon material after one stove silicon material crystal pulling of single crystal growing furnace is completed, is completed in the case where not blowing out is cooled down, blowing out can be saved cold But the time with evacuation, production cycle, improve production efficiency are greatly shortened.
As silicon material had gap before thawing, and silicon material regular array can not possibly be accomplished in crucible when throwing again It is interior, therefore the silicon solution that can reach crucible volume just can not possibly can be obtained by once feeding intake, need evacuation, throwing in batches Material, thawing, then evacuation feed intake, melt again, the silicon solution until reaching crucible volume.
The silicon material for having occurred in the market throws device again all can not be under conditions of furnace chamber of single crystal furnace vacuum not be destroyed Complete the work that feeds intake in batches.The multiple throwing apparatus structure for occurring in the market is complicated, it has not been convenient to mobile, and can only throw again straight Silicon material of the footpath less than 40mm, the requirement to silicon material are higher.
Utility model content
Main purpose of the present utility model is to overcome deficiency of the prior art, there is provided one kind carries out an evacuation, The multiple throwing device that multiple silicon material throws work again is completed just.To solve above-mentioned technical problem, solution of the present utility model is:
A kind of straight pull type single crystal furnace silicon material is provided and throws device, including charging chamber and tremie pipe again, the charging chamber be divided into Few two hoppers, are equipped with corresponding overturning hinge door, are provided with suspension ring on each overturning hinge door below each hopper;
The lower muzzle of the top and charging chamber of the tremie pipe is closed to be installed, and tremie pipe can free movement in the vertical direction; Tremie pipe upper flange, and the diameter with diameter greater than charging chamber Xia Kou of tremie pipe upper flange are provided with above tremie pipe, for limiting Tremie pipe processed moves up and down stroke;The top of tremie pipe opens up 4 welding groove (line across), and is welded with cross lifting Bar (two lifting strips intersections are welded into);The inside of tremie pipe is additionally provided with helical barriers;
Charging chamber's upper cover plate and charging chamber's upper flange are provided with above charging chamber, charging chamber's upper flange is evenly equipped with (12) spiral shell Pit, for installing charging chamber's upper cover plate;Lifting motor is disposed with charging chamber's upper cover plate, lifting motor is connected by steel wire rope Cross lifting strip, for controlling the lifting of tremie pipe;Quantity and hopper quantity identical cylinder are additionally provided with charging chamber's upper cover plate, Each cylinder is connected with the suspension ring on corresponding overturning hinge door by steel wire rope respectively, for controlling the opening and closing of correspondence overturning hinge door;Charging Sealing flange is provided with below room, for preventing extraneous air from entering charging chamber.
Used as further improvement, the hopper, overturning hinge door, cylinder are respectively provided with six, i.e., described charging chamber is equally divided into Number hopper, No. two hoppers, No. three hoppers, No. four hoppers, No. five hoppers, No. six hoppers, an overturning hinge door are mounted in a hopper Lower section, No. two overturning hinge doors are mounted in below No. two hoppers, and No. three overturning hinge doors are mounted in below No. three hoppers, and No. four overturning hinge doors are mounted in No. four Below hopper, No. five overturning hinge doors are mounted in below No. five hoppers, and No. six overturning hinge doors are mounted in below No. six hoppers, cylinder, No. two Cylinder, No. three cylinders, No. four cylinders, No. five cylinders, No. six cylinders are distributed on charging chamber's upper cover plate.
Used as further improvement, it can be not advising for 80mm to maximum gauge that the straight pull type single crystal furnace silicon material throws device again Then single crystal silicon materials carry out multiple throwing (80mm diameters are almost the maximum gauge of silicon material, and this device is not required to silicon material size).
Used as further improvement, the blanking inside pipe wall, hopper inwall, the surface of helical barriers are coated with Teflon Material.
Compared with prior art, the beneficial effects of the utility model are:
1st, charging chamber is divided into six, can complete six composite feeding-materials by an evacuation, time-consuming;
2nd, this utility model can reach 80mm to the multiple diameter maximum for throwing silicon material, reduce the requirement to silicon material, save Cost;
3rd, the screw of tremie pipe can slow down silicon material gliding speed, prevent silicon material from smashing crucible, it is to avoid splashing of silicon liquid.
Description of the drawings
Fig. 1 is charging chamber's vertical view cutaway drawing of the present utility model.
Fig. 2 is charging chamber's top view of the present utility model.
Fig. 3 is of the present utility model right regarding sectional view.
Fig. 4 is initial position figure of the present utility model.
Location drawing when Fig. 5 is this utility model blanking.
Reference in figure is:No. 1 hoppers;No. 2 overturning hinge doors;3 No. two hoppers;4 No. two overturning hinge doors;5 No. three material Bucket;6 No. three overturning hinge doors;7 No. four hoppers;8 No. four overturning hinge doors;9 No. five hoppers;10 No. five overturning hinge doors;11 No. six hoppers;12 No. six Overturning hinge door;13 cross lifting strips;No. 14 cylinders;15 No. two cylinders;16 No. three cylinders;17 No. four cylinders;18 No. five cylinders;19 No. six cylinders;20 steel wire ropes;21 charging chamber's upper cover plates;22 charging chamber's upper flanges;23 sealing flanges;24 helical barriers;Under 25 Expects pipe;26 tremie pipe upper flanges.
Specific embodiment
This utility model is described in further detail with specific embodiment below in conjunction with the accompanying drawings:
A kind of straight pull type single crystal furnace silicon material as shown in Figure 1, Figure 2, Figure 3 shows throws device again includes charging chamber and tremie pipe 25, In the case of an evacuation, it is possible to achieve repeatedly multiple to the maximum irregular single crystal silicon materials less than a diameter of 80mm Throw.
Charging chamber is equally divided into the hopper 9, six of hopper 7, five of hopper 5, four of hopper 3, three of a hopper 1, two Hopper 11, is mounted in below a hopper 1 equipped with corresponding overturning hinge door, i.e., No. one overturning hinge door 2 below each hopper, No. two overturning hinge doors 4 are mounted in below No. two hoppers 3, and No. three overturning hinge doors 6 are mounted in below No. three hoppers 5, and No. four overturning hinge doors 8 are mounted in below No. four hoppers 7, No. five overturning hinge doors 10 are mounted in below No. five hoppers 9, and No. six overturning hinge doors 12 are mounted in below No. six hoppers 11.Install on each overturning hinge door There are suspension ring.
Charging chamber's upper cover plate 21 and charging chamber's upper flange 22, charging chamber's upper flange 22 uniform 12 are provided with above charging chamber Screwed hole, for installing charging chamber's upper cover plate 21.Lifting motor is disposed with charging chamber's upper cover plate 21, lifting motor passes through steel wire Rope 20 connects the lifting that cross lifting strip 13 controls tremie pipe 25, and lifting motor is used to lift tremie pipe 25.Charging chamber's upper cover plate Six cylinders, i.e., No. one cylinder 14, two cylinder 15, three cylinder 16, four cylinder 17, five cylinder are evenly equipped with 21 also 18th, No. six cylinders 19, each cylinder are connected with the suspension ring on corresponding overturning hinge door by steel wire rope 20 respectively, for controlling correspondence conjunction The opening and closing of page door, so as to control the whereabouts of silicon material in corresponding hopper.Sealing flange 23 is provided with below charging chamber, for preventing Extraneous air enters charging chamber.
The top of the tremie pipe 25 is provided with tremie pipe upper flange 26, and tremie pipe 25 is closed with muzzle under charging chamber and installed, under 25 above-below direction of expects pipe may move, and 26 external diameter of tremie pipe upper flange is more than charging chamber Xia Kou, moves down on tremie pipe 25 for limiting Dynamic stroke.The upper cross shape of tremie pipe 25 opens up four welding grooves, and intersection is welded with two lifting strips and forms cross lifting strip 13, Cross lifting strip 13 is lifted for controlling tremie pipe 25.The inside of tremie pipe 25 is additionally provided with helical barriers 24, for slowing down silicon The speed that material glides, prevents silicon material from smashing crucible, it is to avoid splashing of silicon liquid.
Teflon material is coated with the surface of 25 inwall of tremie pipe, hopper inwall, helical barriers 24, it is to avoid silicon material exists Rub with which in dropping process, cause to scrape into impurity, affect crystal growth.
During work:
After a stove crystal pulling is completed, single crystal growing furnace multiple furnace chamber is outwarded winding, straight pull type single crystal furnace silicon material is thrown into six, device again Loading hopper, is then coordinated with single crystal growing furnace by charging chamber's sealing flange 23 and is completed, and device initial position is as shown in Figure 4.Then The chamber device that feeds is carried out after evacuation completes, to pass through steel wire rope 20 first with lifting motor 17 and cross lifting strip 13 will Tremie pipe 25 declines, and until tremie pipe upper flange 26 is just coordinated with charging chamber's sealing flange 23, now 25 bottom of tremie pipe connects Nearly crucible, is opened cylinder 15 and is opened an overturning hinge door 2 below a hopper 1 by steel wire rope 20, and in a hopper 1, silicon material is opened Begin by slipping in crucible under tremie pipe 25 and spiral 24, after the completion of blanking, control lifting motor 17 passes through 20 He of steel wire rope Cross lifting strip 13 withdraws tremie pipe 25 in charging chamber 19, followed by material.It is as shown in Figure 5 during device blanking.
After the completion of material, tremie pipe 25 is fallen again, control No. two overturning hinge doors 4 by No. two hoppers 3 by No. two cylinders 15 Enter under interior silicon material in crucible, lift tremie pipe 25, complete silicon material material.Thus, being sequentially completed 5, No. four hoppers of No. three hoppers 7th, the blanking of silicon material and material in 9, No. six hoppers 11 of No. five hoppers, then release the cooperation of this device and single crystal growing furnace, remove this Throw device outside silicon material again, it is outer to finish into again
Finally it should be noted that listed above is only specific embodiment of the utility model.Obviously, this practicality is new Type is not limited to above example, can also have many variations.One of ordinary skill in the art can be from disclosed in this utility model The all deformations directly derived in content or associate, are considered as protection domain of the present utility model.

Claims (3)

1. a kind of straight pull type single crystal furnace silicon material throws device, including charging chamber and tremie pipe again, it is characterised in that the charging chamber point For at least two hoppers, corresponding overturning hinge door is housed below each hopper, suspension ring are installed on each overturning hinge door;
The lower muzzle of the top and charging chamber of the tremie pipe is closed to be installed, and tremie pipe can free movement in the vertical direction;Blanking Tremie pipe upper flange, and the diameter with diameter greater than charging chamber Xia Kou of tremie pipe upper flange are provided with above pipe, under restriction Expects pipe moves up and down stroke;The top of tremie pipe opens up 4 welding grooves, and is welded with cross lifting strip;The inside of tremie pipe is also It is provided with helical barriers;
Charging chamber's upper cover plate and charging chamber's upper flange are provided with above charging chamber, charging chamber's upper flange is evenly equipped with screwed hole, is used for Charging chamber's upper cover plate is installed;Lifting motor is disposed with charging chamber's upper cover plate, lifting motor connects cross by steel wire rope and lifted Bar, for controlling the lifting of tremie pipe;Quantity and hopper quantity identical cylinder, each cylinder are additionally provided with charging chamber's upper cover plate Connected with the suspension ring on corresponding overturning hinge door by steel wire rope respectively, for controlling the opening and closing of correspondence overturning hinge door;The lower section of charging chamber Sealing flange is provided with, for preventing extraneous air from entering charging chamber.
2. a kind of straight pull type single crystal furnace silicon material according to claim 1 throws device again, it is characterised in that the hopper, conjunction Page door, cylinder are respectively provided with six, i.e., described charging chamber be equally divided into a hopper, No. two hoppers, No. three hoppers, No. four hoppers, No. five hoppers, No. six hoppers, an overturning hinge door are mounted in below a hopper, and No. two overturning hinge doors are mounted in below No. two hoppers, No. three Overturning hinge door is mounted in below No. three hoppers, and No. four overturning hinge doors are mounted in below No. four hoppers, and No. five overturning hinge doors are mounted in below No. five hoppers, No. six overturning hinge doors are mounted in below No. six hoppers, cylinder, No. two cylinders, No. three cylinders, No. four cylinders, No. five cylinders, No. six Cylinder is distributed on charging chamber's upper cover plate.
3. a kind of straight pull type single crystal furnace silicon material according to claim 1 throws device again, it is characterised in that the Straight pull list Brilliant stove silicon material is thrown device again and can carry out multiple throwing to the irregular single crystal silicon materials that maximum gauge is 80mm.
CN201621024055.7U 2016-08-31 2016-08-31 A kind of straight pull type single crystal furnace silicon material throws device again Expired - Fee Related CN206052201U (en)

Priority Applications (1)

Application Number Priority Date Filing Date Title
CN201621024055.7U CN206052201U (en) 2016-08-31 2016-08-31 A kind of straight pull type single crystal furnace silicon material throws device again

Applications Claiming Priority (1)

Application Number Priority Date Filing Date Title
CN201621024055.7U CN206052201U (en) 2016-08-31 2016-08-31 A kind of straight pull type single crystal furnace silicon material throws device again

Publications (1)

Publication Number Publication Date
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Cited By (2)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
CN106119953A (en) * 2016-08-31 2016-11-16 浙江晶盛机电股份有限公司 Device thrown again by straight pull type single crystal furnace silicon material
CN111455452A (en) * 2020-04-10 2020-07-28 西安奕斯伟硅片技术有限公司 Feeding device, crystal pulling furnace and feeding method

Cited By (4)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
CN106119953A (en) * 2016-08-31 2016-11-16 浙江晶盛机电股份有限公司 Device thrown again by straight pull type single crystal furnace silicon material
CN106119953B (en) * 2016-08-31 2018-08-28 浙江晶盛机电股份有限公司 Straight pull type single crystal furnace silicon material throws device again
CN111455452A (en) * 2020-04-10 2020-07-28 西安奕斯伟硅片技术有限公司 Feeding device, crystal pulling furnace and feeding method
CN111455452B (en) * 2020-04-10 2021-11-30 西安奕斯伟材料科技有限公司 Feeding device, crystal pulling furnace and feeding method

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CF01 Termination of patent right due to non-payment of annual fee
CF01 Termination of patent right due to non-payment of annual fee

Granted publication date: 20170329

Termination date: 20180831