CN101964379B - Thin film solar cell template current density compensation method - Google Patents
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- CN101964379B CN101964379B CN2010102540646A CN201010254064A CN101964379B CN 101964379 B CN101964379 B CN 101964379B CN 2010102540646 A CN2010102540646 A CN 2010102540646A CN 201010254064 A CN201010254064 A CN 201010254064A CN 101964379 B CN101964379 B CN 101964379B
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- 238000000034 method Methods 0.000 title claims abstract description 26
- 239000010409 thin film Substances 0.000 title claims abstract description 20
- 238000004519 manufacturing process Methods 0.000 claims abstract description 21
- 238000005520 cutting process Methods 0.000 claims description 18
- 239000010408 film Substances 0.000 claims description 12
- 229910021417 amorphous silicon Inorganic materials 0.000 claims description 6
- 238000006243 chemical reaction Methods 0.000 abstract description 7
- 238000012935 Averaging Methods 0.000 abstract 1
- 230000001105 regulatory effect Effects 0.000 abstract 1
- 238000010586 diagram Methods 0.000 description 16
- 238000000151 deposition Methods 0.000 description 11
- 230000008021 deposition Effects 0.000 description 9
- 238000009826 distribution Methods 0.000 description 8
- 239000000758 substrate Substances 0.000 description 5
- XUIMIQQOPSSXEZ-UHFFFAOYSA-N Silicon Chemical compound [Si] XUIMIQQOPSSXEZ-UHFFFAOYSA-N 0.000 description 4
- 238000005516 engineering process Methods 0.000 description 4
- 229910052710 silicon Inorganic materials 0.000 description 4
- 239000010703 silicon Substances 0.000 description 4
- 230000004048 modification Effects 0.000 description 3
- 238000012986 modification Methods 0.000 description 3
- 239000003245 coal Substances 0.000 description 2
- 230000000694 effects Effects 0.000 description 2
- 230000005284 excitation Effects 0.000 description 2
- 239000012528 membrane Substances 0.000 description 2
- 239000003921 oil Substances 0.000 description 2
- 238000000623 plasma-assisted chemical vapour deposition Methods 0.000 description 2
- 238000000427 thin-film deposition Methods 0.000 description 2
- YGLMVCVJLXREAK-MTVMDMGHSA-N 1,1-dimethyl-3-[(1S,2R,6R,7S,8R)-8-tricyclo[5.2.1.02,6]decanyl]urea Chemical compound C([C@H]12)CC[C@@H]1[C@@H]1C[C@@H](NC(=O)N(C)C)[C@H]2C1 YGLMVCVJLXREAK-MTVMDMGHSA-N 0.000 description 1
- 239000000956 alloy Substances 0.000 description 1
- 229910045601 alloy Inorganic materials 0.000 description 1
- 238000013459 approach Methods 0.000 description 1
- 229910052799 carbon Inorganic materials 0.000 description 1
- 230000011712 cell development Effects 0.000 description 1
- 239000002800 charge carrier Substances 0.000 description 1
- 238000010276 construction Methods 0.000 description 1
- 230000018109 developmental process Effects 0.000 description 1
- 230000005684 electric field Effects 0.000 description 1
- 239000011521 glass Substances 0.000 description 1
- 238000001556 precipitation Methods 0.000 description 1
- 230000001172 regenerating effect Effects 0.000 description 1
- 239000004065 semiconductor Substances 0.000 description 1
- 239000002210 silicon-based material Substances 0.000 description 1
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- Y—GENERAL TAGGING OF NEW TECHNOLOGICAL DEVELOPMENTS; GENERAL TAGGING OF CROSS-SECTIONAL TECHNOLOGIES SPANNING OVER SEVERAL SECTIONS OF THE IPC; TECHNICAL SUBJECTS COVERED BY FORMER USPC CROSS-REFERENCE ART COLLECTIONS [XRACs] AND DIGESTS
- Y02—TECHNOLOGIES OR APPLICATIONS FOR MITIGATION OR ADAPTATION AGAINST CLIMATE CHANGE
- Y02P—CLIMATE CHANGE MITIGATION TECHNOLOGIES IN THE PRODUCTION OR PROCESSING OF GOODS
- Y02P70/00—Climate change mitigation technologies in the production process for final industrial or consumer products
- Y02P70/50—Manufacturing or production processes characterised by the final manufactured product
Abstract
The invention discloses a thin film solar cell template current density compensation method which comprises the following steps of: (1) randomly selecting M templates, and measuring the current of each cell unit of each template; (2) calculating the average current value of the cell units of the M templates in corresponding positions, and acquiring a relation curve between the current values of the cell units and the positions of the cell units on the templates; (3) averaging the current values of all cell units of the M templates, as a current reference value; and (4) regulating and determining the width of the cell unit in each position in the subsequent production according to the comparison relation between the current value of the cell unit in each position and the current reference value. The thin film solar cell template current density compensation method can further increase the photoelectric conversion efficiency of the solar cell templates.
Description
Technical field
The present invention relates to photovoltaic solar cell manufacturing technology field, be specifically related to a kind of semiconductor thin-film solar cell, particularly relate to thin-film solar cells template current density compensation method.
Background technology
Continuous increase along with energy resource consumption, main source as the energy, the CO2 emission that a large amount of uses of oil and coal cause is pollution of ecological environment seriously, and oil and coal resources also face exhausted condition, therefore, seek low-carbon emission and inexhaustible regenerative resource becomes more and more urgent, and solar energy a kind of so inexhaustible renewable new forms of energy just.People pay attention to day by day to the development and utilization based on the solar cell of photovoltaic effect, and market is to more large tracts of land, the demand lighter and thinner and novel solar battery that production cost is lower increase day by day.In these novel solar batteries, characteristics such as few with the silicon amount with it based on alloy firm (for example amorphous silicon a-Si:H) solar cell of silicon materials, low-cost and high volume production become a new trend of solar cell development.
Thin-film solar cells is multilayer device; as shown in Figure 1; the p-i-n laminated construction that typical thin-film solar cells generally includes electrode 110 before glass substrate 100, the electrically conducting transparent, is made up of p layer 120, i layer 130 and n layer 140, and back electrode 150 and carry on the back baffle 160.Wherein p layer 120, i layer 130 and n layer 140 are respectively p-type doping film silicon layer, i type (membrane silicon layer of non-doping or intrinsic) and n type doping film silicon layer.P layer 120 and n layer 140 are set up an internal electric field between i layer 130, incident light makes and produces photic charge carrier in the i layer 130, and just electron hole pair is collected by p layer 120 and n layer 140, through preceding electrode 110 and back electrode 150 output electric energy.Three layers of combination of this p-i-n are called a photovoltaic element, or one " knot ".The unijunction thin-film solar cells contains single photovoltaic element, and the multi-knot thin film solar cell then contains two or more p-i-n photovoltaic elements that is superimposed and closely links to each other, to improve the whole photoelectric conversion efficiency of solar cell.
Each layer of large area film solar cell p-i-n structure is in the large area film precipitation equipment, utilizes plasma enhanced chemical vapor deposition (PECVD) process deposits to form.In the patent No. is 200820008274.5 Chinese patent, above-mentioned film deposition apparatus has been described, Fig. 2 is this film deposition apparatus simplified structure schematic diagram, as shown in Figure 2, in the thin film deposition zone 120 of reative cell 110, alternately arrange large tracts of land exciting electrode plate and grounding electrode plate at interval, its both side surface is all placed solar energy in large area cell substrates 121, and reative cell 110 has air inlet 102 and gas outlet 106.Reacting gas enters deposition region 120 by air inlet 102, and 108 pairs of exciting electrode plates of excitation power supply provide radio-frequency (RF) energy, thus with reacting gas ionization be plasma at the substrate surface deposit film, remaining gas is discharged by gas outlet 106.In this membrane deposition method, reacting gas enters reative cell by air inlet 102 and is ionized the back by gas outlet 106 discharges, and reacting gas dynamically flows along the arrow direction.
Because what adopt is the broad-area electrode plate, substrate also is the broad-area electrode plate, reative cell 110 overall volume are bigger, reacting gas flows in deposition region 120 from top to bottom, the reacting gas that enters into 120 tops, deposition region is ionized earlier, be not ionized with ionization after remaining gas be ionized again after flowing to the bottom, therefore the reacting gas concentration of bottom reduces relatively, that is to say, the up and down distribution of reacting gas in deposition region 120 is also inhomogeneous, the reacting gas concentration on 120 tops, deposition region is greater than the reacting gas concentration of 120 bottoms, deposition region, this certainly will cause substrate on, depositing thin film is inhomogeneous, thereby influences Solar cell performance.This electric current that shows each battery unit (cell) on the monoblock cell panel module is inconsistent, and the relation of each battery unit formula series connection, so the total current of cell panel module just depends on the battery unit of electric current minimum.This can influence the photoelectric conversion efficiency of cell panel undoubtedly.
Taked certain methods to reduce the inhomogeneities of thin film deposition at present, for example taked the mode activated plasma of pulse excitation and strengthen measure such as gas flow.Though obtained more gratifying effect, but how from other angle, for example the angle of process management improves the electric current consistency of battery unit, is the problem that those skilled in the art make great efforts to explore thereby further improve conversion efficiency on the basis of existing technology always.
Summary of the invention
The object of the present invention is to provide a kind of thin-film solar cells template current density compensation method, can further improve the photoelectric conversion efficiency of solar cell template.
For achieving the above object, thin-film solar cells template current density compensation method provided by the invention comprises:
A. picked at random M template measured the electric current of each battery unit of each template;
B. calculate the current average of the battery unit of M template relevant position, the current value of acquisition battery unit and the relation curve of present position on template;
C. the electric current of all battery units of M template is averaged as the current reference value;
D. determine the width of the battery unit of this position in the subsequent production according to the comparison adjustment of the current value of the battery unit of each position and current reference value.
Optionally, the span of described M is 5～15.
Optionally, described step a carries out a period of time state of the art in production and carries out after stable.
In the steps d, if the current value of described battery unit then reduces the width of the battery unit of this position greater than the current reference value in subsequent production; If the current value of described battery unit less than the current reference value, then increases the width of the battery unit of this position in subsequent production.
Optionally, described battery unit utilizes laser that described solar cell template is carried out cutting line back to obtain.
Optionally, the width of the interval determination battery unit of described laser scribing cutting.
Optionally, the step of described laser scribing cutting comprises that infrared laser TCO cutting, green laser amorphous silicon film are steps such as cutting, the cutting of green laser back electrode.
Compared with prior art, the present invention has the following advantages:
Thin-film solar cells template current density compensation method of the present invention compensates the inconsistency of cell electric current by the variation that utilizes the cell width, and the electric current of each cell of solar cell template is reached unanimity.With the compensation before compare, the current value of each cell after the compensation reaches unanimity, and the minimum current value of compensation back cell must be higher than the minimum current value of the preceding cell of compensation, thereby improve the output current value of whole template, on the basis that does not change other process conditions, further improved the photoelectric conversion efficiency of battery template.
Description of drawings
By the more specifically explanation of the preferred embodiments of the present invention shown in the accompanying drawing, above-mentioned and other purpose, feature and advantage of the present invention will be more clear.Reference numeral identical in whole accompanying drawings is indicated identical part.Painstakingly do not draw accompanying drawing in proportion, focus on illustrating purport of the present invention.
Fig. 1 is typical film solar battery structure schematic diagram;
Fig. 2 is film deposition apparatus simplified structure schematic diagram;
Fig. 3 is the flow chart of thin-film solar cells template current density compensation method of the present invention;
Fig. 4 is the cell distribution schematic diagram according to battery template before the compensation of the embodiment of the invention;
Fig. 5 is according to battery template cell change width schematic diagram before the compensation of the embodiment of the invention;
Fig. 6 changes schematic diagram according to battery template cell electric current before the compensation of the embodiment of the invention;
Fig. 7 is the cell distribution schematic diagram according to battery template after the compensation of the embodiment of the invention;
Fig. 8 is according to battery template cell change width schematic diagram after the compensation of the embodiment of the invention;
Fig. 9 changes schematic diagram according to battery template cell electric current after the compensation of the embodiment of the invention.
Described diagram is illustrative, and nonrestrictive, can not excessively limit protection scope of the present invention at this.
Embodiment
For above-mentioned purpose of the present invention, feature and advantage can be become apparent more, below in conjunction with accompanying drawing the specific embodiment of the present invention is described in detail.A lot of details have been set forth in the following description so that fully understand the present invention.But the present invention can implement much to be different from alternate manner described here, and those skilled in the art can do similar popularization under the situation of intension of the present invention.Therefore the present invention is not subjected to the restriction of following public specific embodiment.
Fig. 3 is the flow chart of thin-film solar cells template current density compensation method of the present invention.As shown in Figure 3, thin-film solar cells template current density compensation method of the present invention, at first picked at random M template and measure the electric current (S101) of each battery unit of each template; Calculate the current average (S102) of the battery unit of this M each relevant position of template then, with the current value of acquisition battery unit and the relation curve of present position on template; Subsequently the electric current of all battery units of M template is averaged, make this value as current reference value (S103); Then, determine the width (S104) of the battery unit of this position in the subsequent production according to the comparison adjustment of the current value of the battery unit of each position and current reference value.Below in conjunction with Fig. 4 to Fig. 6 method of the present invention is described in further detail.
Fig. 4 is the cell distribution schematic diagram according to battery template before the compensation of the embodiment of the invention, Fig. 5 is according to battery template cell change width schematic diagram before the compensation of the embodiment of the invention, and Fig. 6 changes schematic diagram according to battery template cell electric current before the compensation of the embodiment of the invention.In the lump referring to Fig. 4 to Fig. 6, the method according to this invention, after a period of time was carried out in production, the state of the art of each equipment was basicly stable, the battery template of picked at random specific quantity at this moment, for example 5～15, representative value is 10.Every template has n battery unit in the width range of template, be respectively C
1, C
2... C
N-1And C
n, these battery units C before compensation
1, C
2... C
N-1And C
nWidth d
1, d
2... d
N-1And d
nAll equate.Battery unit on the template utilizes laser that the solar cell template is carried out cutting line back and obtains the width of the interval determination battery unit of laser scribing cutting.Owing to aforesaid reason, battery unit C
1, C
2... C
N-1And C
nCURRENT DISTRIBUTION and inconsistent.Average by the electric current that calculates the battery unit of each relevant position on this M template, just to the corresponding d on M each template of template
1, d
2... d
N-1And d
nThe battery unit C of position
1, C
2... C
N-1And C
nCurrent summation, average respectively, can obtain the current value of each battery unit and the relation curve of present position on template, for example curve shown in Figure 6.Other distribution relation also may be arranged certainly, is that example describes at this with this distribution relation.d
1, d
2... d
N-1And d
nThe battery unit C of position
1, C
2... C
N-1And C
nElectric current I
1, I
2... I
N-1And I
nSize can present inconsistency, pass shown in Figure 6 is the closer to template d on one side
1The current value of the battery unit of position is more little, along with along d
1To d
nThe current value of the passing battery unit of direction is increasing, shown in current value curve among Fig. 6.Subsequently, average behind the current summation to all battery units of this M template, obtain a current reference value I, as shown in phantom in Figure 6.
Fig. 7 is the cell distribution schematic diagram according to battery template after the compensation of the embodiment of the invention, Fig. 8 is according to battery template cell change width schematic diagram after the compensation of the embodiment of the invention, and Fig. 9 changes schematic diagram according to battery template cell electric current after the compensation of the embodiment of the invention.With reference to Fig. 7 to Fig. 9, the method according to this invention is after the acquisition current reference value, according to each position d in the lump
1, d
2... d
N-1And d
nThe battery unit C of position
1, C
2... C
N-1And C
nCurrent value I
1, I
2... I
N-1And I
nWith the comparison of current reference value, adjust the width of determining the battery unit of this position in the subsequent production.If the current value of described battery unit then reduces the width of the battery unit of this position greater than the current reference value in subsequent production; If the current value of described battery unit less than the current reference value, then increases the width of the battery unit of this position in subsequent production.For example, if the preceding d of compensation
1Battery unit C
1Electric current I
1Less than current reference value I, then in subsequent production, by debugging laser scribing machine, increase this d of the template of subsequent production
1The battery unit C of position
1Width, just increase battery unit C
1Area, make its electric current I
1Increase; If d before the compensation
nBattery unit C
nElectric current I
nGreater than current reference value I, then in subsequent production, by debugging laser scribing machine, reduce this d of the template of subsequent production
nThe battery unit C of position
nWidth, just reduce battery unit C
nArea, make its electric current I
nReduce.The result who does like this makes the battery unit C after the adjustment
1, C
2... C
N-1To C
nWidth d
1, d
2... d
N-1And d
nReduce gradually, as shown in Figure 7 and Figure 8.After the compensation, d
1, d
2... d
N-1To d
nThe C of position
1, C
2... C
N-1And C
nCurrent value I
1, I
2... I
N-1And I
nDwindle with the difference of current reference value I, the current value curve approaches the fiducial value curve, and as shown in Figure 9, the electric current of each battery unit of the template after the feasible compensation reaches unanimity.And, having significantly improved the minimum current value, the output current that this has increased substantially the entire cell plate has undoubtedly improved photoelectric conversion efficiency.
The step of above-mentioned laser scribing cutting comprises that infrared laser TCO cutting, green laser amorphous silicon film are steps such as cutting, the cutting of green laser back electrode.Those of ordinary skills can realize the adjustment of battery unit width by the interval of debugging laser scribing.
Need to prove that the method for the invention described above is not only applicable to amorphous silicon thin-film solar cell, suitable too for the thin-film solar cells of other type.
The above only is preferred embodiment of the present invention, is not the present invention is done any pro forma restriction.Any those of ordinary skill in the art are not breaking away under the technical solution of the present invention scope situation, all can utilize the technology contents of above-mentioned announcement that technical solution of the present invention is made many possible changes and modification, or be revised as the equivalent embodiment of equivalent variations.Therefore, every content that does not break away from technical solution of the present invention, all still belongs in the protection range of technical solution of the present invention any simple modification, equivalent variations and modification that above embodiment does according to technical spirit of the present invention.
Claims (7)
1. thin-film solar cells template current density compensation method comprises:
A. picked at random M template measured the electric current of each battery unit of each template;
B. calculate the current average of the battery unit of M template relevant position, the current average of acquisition battery unit and the relation curve of present position on template;
C. the electric current of all battery units of M template is averaged as the current reference value;
D. determine the width of the battery unit of this position in the subsequent production according to the comparison adjustment of the current value of the battery unit of each position and current reference value.
2. method according to claim 1, it is characterized in that: the span of described M is 5～15.
3. method according to claim 1 is characterized in that: described step a carries out a period of time state of the art in production and carries out after stable.
4. method according to claim 1 is characterized in that: in the steps d, if the current value of described battery unit then reduces the width of the battery unit of this position greater than the current reference value in subsequent production; If the current value of described battery unit less than the current reference value, then increases the width of the battery unit of this position in subsequent production.
5. method according to claim 1 is characterized in that: described battery unit utilizes laser that described solar cell template is carried out cutting line back and obtains.
6. method according to claim 5 is characterized in that: the width of the interval determination battery unit of described laser scribing cutting.
7. method according to claim 6, it is characterized in that: the step of described laser scribing cutting comprises that infrared laser TCO cutting, green laser amorphous silicon film are cutting, green laser back electrode cutting step.
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| CN2010102540646A CN101964379B (en) | 2010-08-16 | 2010-08-16 | Thin film solar cell template current density compensation method |
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| CN101964379B true CN101964379B (en) | 2013-08-07 |
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| CN112054078B (en) * | 2019-06-05 | 2024-03-08 | 东君新能源有限公司 | Method and device for designing width of thin film solar cell and thin film solar cell |
Citations (2)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| TW200828716A (en) * | 2006-12-19 | 2008-07-01 | Ind Tech Res Inst | Power manabement apparatus using ambient light source as compensatory power source |
| CN101226968A (en) * | 2007-01-17 | 2008-07-23 | 易斌宣 | Method for reducing series resistance value of light gathering solar battery and light gathering solar battery obtained by the method |
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|---|---|---|---|---|
| JP2003133569A (en) * | 2001-10-30 | 2003-05-09 | Atsushi Iga | Method and apparatus for evaluating output of solar battery in field |
| JP4895686B2 (en) * | 2006-05-29 | 2012-03-14 | 三菱電機株式会社 | Solar power system |
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| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| TW200828716A (en) * | 2006-12-19 | 2008-07-01 | Ind Tech Res Inst | Power manabement apparatus using ambient light source as compensatory power source |
| CN101226968A (en) * | 2007-01-17 | 2008-07-23 | 易斌宣 | Method for reducing series resistance value of light gathering solar battery and light gathering solar battery obtained by the method |
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Application publication date: 20110202 Assignee: GUANGDONG HANERGY SOLAR PV CO., LTD. Assignor: Apollo Precision (Fujian) Limited Contract record no.: 2014990000773 Denomination of invention: Thin film solar cell template current density compensation method Granted publication date: 20130807 License type: Common License Record date: 20140926 Application publication date: 20110202 Assignee: Sichuan Hanergy Photovoltaic Co., Ltd. Assignor: Apollo Precision (Fujian) Limited Contract record no.: 2014990000775 Denomination of invention: Thin film solar cell template current density compensation method Granted publication date: 20130807 License type: Common License Record date: 20140926 Application publication date: 20110202 Assignee: Jiangsu Wujin Hanneng Photovoltaic Co., Ltd. Assignor: Apollo Precision (Fujian) Limited Contract record no.: 2014990000776 Denomination of invention: Thin film solar cell template current density compensation method Granted publication date: 20130807 License type: Common License Record date: 20140926 Application publication date: 20110202 Assignee: Shandong Yucheng Hanergy Photovoltaic Co., Ltd. Assignor: Apollo Precision (Fujian) Limited Contract record no.: 2014990000774 Denomination of invention: Thin film solar cell template current density compensation method Granted publication date: 20130807 License type: Common License Record date: 20140926 Application publication date: 20110202 Assignee: Heilongjiang Hanergy Thin-Film Solar Co., Ltd. Assignor: Apollo Precision (Fujian) Limited Contract record no.: 2014990000779 Denomination of invention: Thin film solar cell template current density compensation method Granted publication date: 20130807 License type: Common License Record date: 20140928 |
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