CN101962774A - 蚀刻装置及蚀刻方法 - Google Patents
蚀刻装置及蚀刻方法 Download PDFInfo
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- CN101962774A CN101962774A CN2009103048374A CN200910304837A CN101962774A CN 101962774 A CN101962774 A CN 101962774A CN 2009103048374 A CN2009103048374 A CN 2009103048374A CN 200910304837 A CN200910304837 A CN 200910304837A CN 101962774 A CN101962774 A CN 101962774A
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CN200910304837A CN101962774B (zh) | 2009-07-24 | 2009-07-24 | 蚀刻装置及蚀刻方法 |
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CN200910304837A CN101962774B (zh) | 2009-07-24 | 2009-07-24 | 蚀刻装置及蚀刻方法 |
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CN101962774A true CN101962774A (zh) | 2011-02-02 |
CN101962774B CN101962774B (zh) | 2012-10-17 |
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CN200910304837A Expired - Fee Related CN101962774B (zh) | 2009-07-24 | 2009-07-24 | 蚀刻装置及蚀刻方法 |
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Cited By (3)
Publication number | Priority date | Publication date | Assignee | Title |
---|---|---|---|---|
CN105195381A (zh) * | 2015-10-28 | 2015-12-30 | 深圳市华星光电技术有限公司 | 喷淋装置及方法 |
CN106900140A (zh) * | 2015-12-21 | 2017-06-27 | 上海申和热磁电子有限公司 | 一种保持覆铜陶瓷基板上铜粒间距尺寸均匀的方法及基板 |
CN111508874A (zh) * | 2020-04-27 | 2020-08-07 | 南昌欧菲显示科技有限公司 | 喷管安装组件及蚀刻装置 |
Family Cites Families (3)
Publication number | Priority date | Publication date | Assignee | Title |
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US4985111A (en) * | 1990-03-02 | 1991-01-15 | Chemcut Corporation | Process and apparatus for intermittent fluid application |
DE19524562A1 (de) * | 1995-07-06 | 1997-01-09 | Schmid Gmbh & Co Geb | Vorrichtung zum Behandeln von flexiblen platten- bzw. blattförmigen Gegenständen, insbesondere Leiterplatten |
CN101113523B (zh) * | 2006-07-28 | 2010-10-06 | 富葵精密组件(深圳)有限公司 | 蚀刻液喷射装置及蚀刻方法 |
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2009
- 2009-07-24 CN CN200910304837A patent/CN101962774B/zh not_active Expired - Fee Related
Cited By (4)
Publication number | Priority date | Publication date | Assignee | Title |
---|---|---|---|---|
CN105195381A (zh) * | 2015-10-28 | 2015-12-30 | 深圳市华星光电技术有限公司 | 喷淋装置及方法 |
CN106900140A (zh) * | 2015-12-21 | 2017-06-27 | 上海申和热磁电子有限公司 | 一种保持覆铜陶瓷基板上铜粒间距尺寸均匀的方法及基板 |
CN106900140B (zh) * | 2015-12-21 | 2019-03-05 | 上海申和热磁电子有限公司 | 一种保持覆铜陶瓷基板上铜粒间距尺寸均匀的方法及基板 |
CN111508874A (zh) * | 2020-04-27 | 2020-08-07 | 南昌欧菲显示科技有限公司 | 喷管安装组件及蚀刻装置 |
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CN101962774B (zh) | 2012-10-17 |
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C53 | Correction of patent for invention or patent application | ||
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Address after: 518103 Shenzhen Province, Baoan District Town, Fuyong Tong tail Industrial Zone, factory building, building 5, floor, 1 Applicant after: Fuku Precision Components (Shenzhen) Co.,Ltd. Co-applicant after: Zhending Technology Co., Ltd. Address before: 518103 Shenzhen Province, Baoan District Town, Fuyong Tong tail Industrial Zone, factory building, building 5, floor, 1 Applicant before: Fuku Precision Components (Shenzhen) Co.,Ltd. Co-applicant before: Honsentech Co., Ltd. |
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Owner name: HONGQISHENG PRECISION ELECTRONICS (QINHUANGDAO) CO Free format text: FORMER OWNER: FUKUI PRECISION ASSEMBLY (SHENZHEN) CO., LTD. Effective date: 20140904 |
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Free format text: CORRECT: ADDRESS; FROM: 518103 SHENZHEN, GUANGDONG PROVINCE TO: 066000 QINHUANGDAO, HEBEI PROVINCE |
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Effective date of registration: 20140904 Address after: 066000 Qinhuangdao economic and Technological Development Zone, Hebei Tengfei Road, No. 18 Patentee after: Hongqisheng Precision Electronic (Qinhuangdao) Co., Ltd. Patentee after: Zhending Technology Co., Ltd. Address before: 518103 Shenzhen Province, Baoan District Town, Fuyong Tong tail Industrial Zone, factory building, building 5, floor, 1 Patentee before: Fuku Precision Components (Shenzhen) Co.,Ltd. Patentee before: Zhending Technology Co., Ltd. |
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TR01 | Transfer of patent right |
Effective date of registration: 20161228 Address after: 225000 Jiangsu city in Yangzhou Province Economic Development Zone Gaoyou Ling Road Patentee after: Jiangsu Transimage Technology Co.,Ltd. Address before: 066000 Qinhuangdao economic and Technological Development Zone, Hebei Tengfei Road, No. 18 Patentee before: Hongqisheng Precision Electronic (Qinhuangdao) Co., Ltd. Patentee before: Zhen Ding Tech. Co.,Ltd. |
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CB03 | Change of inventor or designer information |
Inventor after: Zou Weimin Inventor after: Mao Wuyun Inventor after: Meng Yuting Inventor before: Bai Yaowen Inventor before: Tang Pan Inventor before: Li Xiaoping |
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CF01 | Termination of patent right due to non-payment of annual fee |
Granted publication date: 20121017 Termination date: 20170724 |
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CF01 | Termination of patent right due to non-payment of annual fee |