CN101958264A - 无尘式真空动力传送装置 - Google Patents
无尘式真空动力传送装置 Download PDFInfo
- Publication number
- CN101958264A CN101958264A CN 201010171183 CN201010171183A CN101958264A CN 101958264 A CN101958264 A CN 101958264A CN 201010171183 CN201010171183 CN 201010171183 CN 201010171183 A CN201010171183 A CN 201010171183A CN 101958264 A CN101958264 A CN 101958264A
- Authority
- CN
- China
- Prior art keywords
- power transmission
- vacuum chamber
- transmission shaft
- magnetic force
- shaft
- Prior art date
- Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
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- H—ELECTRICITY
- H01—ELECTRIC ELEMENTS
- H01L—SEMICONDUCTOR DEVICES NOT COVERED BY CLASS H10
- H01L21/00—Processes or apparatus adapted for the manufacture or treatment of semiconductor or solid state devices or of parts thereof
- H01L21/67—Apparatus specially adapted for handling semiconductor or electric solid state devices during manufacture or treatment thereof; Apparatus specially adapted for handling wafers during manufacture or treatment of semiconductor or electric solid state devices or components ; Apparatus not specifically provided for elsewhere
- H01L21/683—Apparatus specially adapted for handling semiconductor or electric solid state devices during manufacture or treatment thereof; Apparatus specially adapted for handling wafers during manufacture or treatment of semiconductor or electric solid state devices or components ; Apparatus not specifically provided for elsewhere for supporting or gripping
- H01L21/687—Apparatus specially adapted for handling semiconductor or electric solid state devices during manufacture or treatment thereof; Apparatus specially adapted for handling wafers during manufacture or treatment of semiconductor or electric solid state devices or components ; Apparatus not specifically provided for elsewhere for supporting or gripping using mechanical means, e.g. chucks, clamps or pinches
- H01L21/68714—Apparatus specially adapted for handling semiconductor or electric solid state devices during manufacture or treatment thereof; Apparatus specially adapted for handling wafers during manufacture or treatment of semiconductor or electric solid state devices or components ; Apparatus not specifically provided for elsewhere for supporting or gripping using mechanical means, e.g. chucks, clamps or pinches the wafers being placed on a susceptor, stage or support
- H01L21/68792—Apparatus specially adapted for handling semiconductor or electric solid state devices during manufacture or treatment thereof; Apparatus specially adapted for handling wafers during manufacture or treatment of semiconductor or electric solid state devices or components ; Apparatus not specifically provided for elsewhere for supporting or gripping using mechanical means, e.g. chucks, clamps or pinches the wafers being placed on a susceptor, stage or support characterised by the construction of the shaft
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- Engineering & Computer Science (AREA)
- Physics & Mathematics (AREA)
- Condensed Matter Physics & Semiconductors (AREA)
- General Physics & Mathematics (AREA)
- Manufacturing & Machinery (AREA)
- Computer Hardware Design (AREA)
- Microelectronics & Electronic Packaging (AREA)
- Power Engineering (AREA)
- Sealing Using Fluids, Sealing Without Contact, And Removal Of Oil (AREA)
- Container, Conveyance, Adherence, Positioning, Of Wafer (AREA)
Abstract
Description
Claims (8)
Priority Applications (2)
Application Number | Priority Date | Filing Date | Title |
---|---|---|---|
CN2010101711835A CN101958264B (zh) | 2010-05-06 | 2010-05-06 | 无尘式真空动力传送装置 |
PCT/CN2011/071914 WO2011137693A1 (zh) | 2010-05-06 | 2011-03-17 | 无尘式真空动力传送装置 |
Applications Claiming Priority (1)
Application Number | Priority Date | Filing Date | Title |
---|---|---|---|
CN2010101711835A CN101958264B (zh) | 2010-05-06 | 2010-05-06 | 无尘式真空动力传送装置 |
Publications (2)
Publication Number | Publication Date |
---|---|
CN101958264A true CN101958264A (zh) | 2011-01-26 |
CN101958264B CN101958264B (zh) | 2012-06-20 |
Family
ID=43485522
Family Applications (1)
Application Number | Title | Priority Date | Filing Date |
---|---|---|---|
CN2010101711835A Expired - Fee Related CN101958264B (zh) | 2010-05-06 | 2010-05-06 | 无尘式真空动力传送装置 |
Country Status (2)
Country | Link |
---|---|
CN (1) | CN101958264B (zh) |
WO (1) | WO2011137693A1 (zh) |
Cited By (10)
Publication number | Priority date | Publication date | Assignee | Title |
---|---|---|---|---|
WO2011137693A1 (zh) * | 2010-05-06 | 2011-11-10 | 东莞宏威数码机械有限公司 | 无尘式真空动力传送装置 |
CN108624869A (zh) * | 2018-07-16 | 2018-10-09 | 深圳先进技术研究院 | 用于片材双面沉积涂层的夹具及沉积装置 |
WO2019033507A1 (zh) * | 2017-08-18 | 2019-02-21 | 武汉华星光电半导体显示技术有限公司 | 一种基板传送设备 |
CN109415799A (zh) * | 2016-07-01 | 2019-03-01 | 山高刀具公司 | 涂层切削工具 |
CN111455341A (zh) * | 2020-06-18 | 2020-07-28 | 上海陛通半导体能源科技股份有限公司 | 基于磁耦合旋转的物理气相沉积设备 |
CN112654426A (zh) * | 2018-07-17 | 2021-04-13 | 鲍施+施特勒贝尔机械伊尔斯霍芬有限两合公司 | 运输系统 |
CN112849959A (zh) * | 2019-11-12 | 2021-05-28 | 中国科学院微电子研究所 | 一种用于真空设备的无油传送装置 |
CN112850084A (zh) * | 2019-11-12 | 2021-05-28 | 中国科学院微电子研究所 | 一种传送真空设备样品的装置 |
CN113492244A (zh) * | 2020-03-20 | 2021-10-12 | 上海朗仕电子设备有限公司 | 一种用于真空回流焊炉的外接传动机构 |
CN115158964A (zh) * | 2022-08-03 | 2022-10-11 | 中国电子科技集团公司第二十四研究所 | 一种密封环境内动力传输的装置及其使用方法 |
Families Citing this family (11)
Publication number | Priority date | Publication date | Assignee | Title |
---|---|---|---|---|
US9399091B2 (en) | 2009-09-30 | 2016-07-26 | Medtronic, Inc. | System and method to regulate ultrafiltration |
US9192707B2 (en) | 2011-04-29 | 2015-11-24 | Medtronic, Inc. | Electrolyte and pH monitoring for fluid removal processes |
CN105848581B (zh) | 2013-11-04 | 2019-01-01 | 美敦力公司 | 用于管理身体中的体液体积的方法和装置 |
US10994064B2 (en) | 2016-08-10 | 2021-05-04 | Medtronic, Inc. | Peritoneal dialysate flow path sensing |
US10874790B2 (en) | 2016-08-10 | 2020-12-29 | Medtronic, Inc. | Peritoneal dialysis intracycle osmotic agent adjustment |
US11013843B2 (en) | 2016-09-09 | 2021-05-25 | Medtronic, Inc. | Peritoneal dialysis fluid testing system |
US11806457B2 (en) | 2018-11-16 | 2023-11-07 | Mozarc Medical Us Llc | Peritoneal dialysis adequacy meaurements |
US11806456B2 (en) | 2018-12-10 | 2023-11-07 | Mozarc Medical Us Llc | Precision peritoneal dialysis therapy based on dialysis adequacy measurements |
US11850344B2 (en) | 2021-08-11 | 2023-12-26 | Mozarc Medical Us Llc | Gas bubble sensor |
US11965763B2 (en) | 2021-11-12 | 2024-04-23 | Mozarc Medical Us Llc | Determining fluid flow across rotary pump |
US11944733B2 (en) | 2021-11-18 | 2024-04-02 | Mozarc Medical Us Llc | Sodium and bicarbonate control |
Citations (4)
Publication number | Priority date | Publication date | Assignee | Title |
---|---|---|---|---|
DE10203457A1 (de) * | 2002-01-28 | 2003-07-31 | Cfs Gmbh Kempten | System zum Antreiben von Fördermitteln |
KR100485943B1 (ko) * | 2002-03-05 | 2005-04-29 | (주)에스티아이 | 비접촉 전동기에 의하여 구동되는 로울러 컨베이어 |
KR20100012065A (ko) * | 2008-07-28 | 2010-02-05 | 주성엔지니어링(주) | 기판 처리 장치 및 이를 이용한 박막 형성 방법 |
CN201732774U (zh) * | 2010-05-06 | 2011-02-02 | 东莞宏威数码机械有限公司 | 真空动力传送装置 |
Family Cites Families (5)
Publication number | Priority date | Publication date | Assignee | Title |
---|---|---|---|---|
US4226669A (en) * | 1979-05-09 | 1980-10-07 | Savant Instruments, Inc. | Vacuum centrifuge with magnetic drive |
JP4562424B2 (ja) * | 2004-05-25 | 2010-10-13 | 三機工業株式会社 | ホイールコンベヤ |
CN201439455U (zh) * | 2009-06-04 | 2010-04-21 | 东莞宏威数码机械有限公司 | 传输机构 |
CN101630893B (zh) * | 2009-08-04 | 2011-08-31 | 东莞宏威数码机械有限公司 | 真空磁性传动机构 |
CN101958264B (zh) * | 2010-05-06 | 2012-06-20 | 东莞宏威数码机械有限公司 | 无尘式真空动力传送装置 |
-
2010
- 2010-05-06 CN CN2010101711835A patent/CN101958264B/zh not_active Expired - Fee Related
-
2011
- 2011-03-17 WO PCT/CN2011/071914 patent/WO2011137693A1/zh active Application Filing
Patent Citations (4)
Publication number | Priority date | Publication date | Assignee | Title |
---|---|---|---|---|
DE10203457A1 (de) * | 2002-01-28 | 2003-07-31 | Cfs Gmbh Kempten | System zum Antreiben von Fördermitteln |
KR100485943B1 (ko) * | 2002-03-05 | 2005-04-29 | (주)에스티아이 | 비접촉 전동기에 의하여 구동되는 로울러 컨베이어 |
KR20100012065A (ko) * | 2008-07-28 | 2010-02-05 | 주성엔지니어링(주) | 기판 처리 장치 및 이를 이용한 박막 형성 방법 |
CN201732774U (zh) * | 2010-05-06 | 2011-02-02 | 东莞宏威数码机械有限公司 | 真空动力传送装置 |
Cited By (13)
Publication number | Priority date | Publication date | Assignee | Title |
---|---|---|---|---|
WO2011137693A1 (zh) * | 2010-05-06 | 2011-11-10 | 东莞宏威数码机械有限公司 | 无尘式真空动力传送装置 |
CN109415799A (zh) * | 2016-07-01 | 2019-03-01 | 山高刀具公司 | 涂层切削工具 |
CN109415799B (zh) * | 2016-07-01 | 2022-01-04 | 山高刀具公司 | 涂层切削工具 |
US10954590B2 (en) | 2016-07-01 | 2021-03-23 | Seco Tools Ab | Coated cutting tool |
WO2019033507A1 (zh) * | 2017-08-18 | 2019-02-21 | 武汉华星光电半导体显示技术有限公司 | 一种基板传送设备 |
CN108624869A (zh) * | 2018-07-16 | 2018-10-09 | 深圳先进技术研究院 | 用于片材双面沉积涂层的夹具及沉积装置 |
CN112654426A (zh) * | 2018-07-17 | 2021-04-13 | 鲍施+施特勒贝尔机械伊尔斯霍芬有限两合公司 | 运输系统 |
CN112654426B (zh) * | 2018-07-17 | 2022-11-01 | 鲍施+施特勒贝尔机械伊尔斯霍芬有限两合公司 | 运输系统 |
CN112849959A (zh) * | 2019-11-12 | 2021-05-28 | 中国科学院微电子研究所 | 一种用于真空设备的无油传送装置 |
CN112850084A (zh) * | 2019-11-12 | 2021-05-28 | 中国科学院微电子研究所 | 一种传送真空设备样品的装置 |
CN113492244A (zh) * | 2020-03-20 | 2021-10-12 | 上海朗仕电子设备有限公司 | 一种用于真空回流焊炉的外接传动机构 |
CN111455341A (zh) * | 2020-06-18 | 2020-07-28 | 上海陛通半导体能源科技股份有限公司 | 基于磁耦合旋转的物理气相沉积设备 |
CN115158964A (zh) * | 2022-08-03 | 2022-10-11 | 中国电子科技集团公司第二十四研究所 | 一种密封环境内动力传输的装置及其使用方法 |
Also Published As
Publication number | Publication date |
---|---|
CN101958264B (zh) | 2012-06-20 |
WO2011137693A1 (zh) | 2011-11-10 |
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