CN101937827A - Short arc type discharge lamp and anode thereof - Google Patents
Short arc type discharge lamp and anode thereof Download PDFInfo
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- CN101937827A CN101937827A CN2010102153573A CN201010215357A CN101937827A CN 101937827 A CN101937827 A CN 101937827A CN 2010102153573 A CN2010102153573 A CN 2010102153573A CN 201010215357 A CN201010215357 A CN 201010215357A CN 101937827 A CN101937827 A CN 101937827A
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- H—ELECTRICITY
- H01—ELECTRIC ELEMENTS
- H01J—ELECTRIC DISCHARGE TUBES OR DISCHARGE LAMPS
- H01J61/00—Gas-discharge or vapour-discharge lamps
- H01J61/02—Details
- H01J61/04—Electrodes; Screens; Shields
- H01J61/06—Main electrodes
- H01J61/073—Main electrodes for high-pressure discharge lamps
- H01J61/0732—Main electrodes for high-pressure discharge lamps characterised by the construction of the electrode
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Abstract
The object of the invention is to provide a short arc type discharge lamp and an anode thereof, wherein the discharge lamp can obtain brilliance coordinative with that of the existing discharge lamp and restrain consumption of the anode. A central shaft arranged on a front end face of the anode is provided with a dent, the anode is characterized in that the anode includes an anode inner wall surface hollowing toward the inner side from the anode front end face and arranged along the circumference; a plain anode inner bottom surface connected with the anode inner wall surface and arranged on the inner side relative to the anode front end face; and an annular corner part arranged on the upper circumference of the boundary of the anode inner wall surface and the anode front end face, and protruding outwards from the anode central shaft in the radial direction.
Description
Technical field
The present invention relates to anode and the short arc discharge lamp used as the short arc discharge lamp that uses with light source by the exposure device that forms the fine circuits pattern towards the semiconductor substrate irradiation ultraviolet radiation.
Background technology
The discharge lamp of existing short-arc type, known is possess the central portion bulging quartz glass system luminous tube and in the inside of the bulge of this luminous tube the anode of configuration and negative electrode etc. and the structure that constitutes relatively.When switching in this discharge lamp, electronics of emitting from negative electrode and the gas collisions in the lamp and generate charged particle.Repeat to bump, the mercury of inclosure luminous tube inside etc. becomes plasmoid, and these charged particle anode circulate and form electric arc at two interpolars.
During with discharge lamp lighting, the collision by the electronics of emitting from negative electrode forms electric arc, and anode becomes high temperature owing to the electron collision in its arc column is heated, and evaporates and consumes.And then when making anode consumption because of the collision of electronics, the tungsten of evaporation is attached to the inwall of luminous tube and makes the internal face melanism.And when using discharge lamp for a long time, the consumption of the leading section of anode development, and the activity of discharge lamp descends gradually surpasses under the situation of service limits in the decline of this activity, discharge lamp need be replaced by the discharge lamp of new product.
Therefore, all the time,, various researchs have been carried out for by suppressing the rise countermeasure of development of melanism of the consumption that delays anode and luminous tube internal face of the temperature of anode when the discharge lamp lighting.
For example, according to patent documentation 1, anode except the side of leading section on the mixture that constitutes of cemented tungsten carbide (WC), ramet (TaC) and tungsten (W), form porous layer, thus, make the connecting airtight property of porous layer and mother metal good, the temperature that therefore can suppress anode aptly rises, reduce the consumption of anode and the melanism of luminous tube internal face, thereby can prolong the life-span of discharge lamp.
But, described anode construction since on the surface of anode three kinds high melting point materials of sintering, be the mixture of tungsten carbide, ramet and tungsten, so anode construction becomes complicated, in addition, also existence makes the manufacturing of anode need long problem owing to manufacturing engineering becomes complicated.
The anode 43 that patent documentation 2,3 and 4 is put down in writing respectively is provided with recess 43A at the anode leading section relative with negative electrode 42 shown in Fig. 5 (A), this recess 43A forms the electric field strength that produces near the point at the electronics of accepting to emit from negative electrode 42.These documents point out, the electric current distribution on the anode surface is disperseed, and can reduce the consumption of anode and prolong life-span of discharge lamp.
But, anode construction shown in above-mentioned Fig. 5 (A) as described later, because it is less to be attracted to the ratio of electric current of edge part 431A of recess 43A,, therefore there is the problem that can not fully suppress the consumption of electrode so can not fully suppress near the electric current anode center the concentrating of part.
The discharge lamp of the short-arc type shown in the patent documentation 5 is provided with recess at the front end with respect to negative electrode of anode as mentioned above, and, with the front end of negative electrode according to and the relation of recess be configured in the position of regulation.The document points out, by the reflection of the recess of anode, makes light in the recess reflection in the reflection of the nose circle tapering of negative electrode from the radiating light of electric arc bright spot again, can improve the utilization ratio of the light of discharge lamp thus.
But, the anode construction of the document and patent documentation 2 to 4 disclosed anodes are similarly, because it is less to be attracted to the ratio of electric current of edge part of the recess that forms at anode, so can not fully suppress near concentrating of part, electric current anode center, therefore have the problem that can not fully suppress the consumption of electrode.
And the discharge lamp of the short-arc type shown in the patent documentation 6 on the tabular surface of the leading section of anode 43, surpassing from its center on 40% the position of interelectrode distance, is provided with endless belt recess 43B shown in Fig. 5 (B).The document is pointed out, even producing on the tabular surface of the leading section of anode 43 under the situation of crateriform pit, be deposited in the endless belt recess 43B that forms on the tabular surface of leading section of anode 43 in advance because of atom moves electrode constitute that (migration) move, can prevent also that thus the tabular surface of the leading section of anode from deforming.
But, in the anode construction of the document, shown in Fig. 5 (B), the electric field strength height of the bight A of the electric field ratio outer circumferential side of the bight B of interior all sides, so electric current is concentrated in the medial region of the bight of interior all sides B.The outflow that flows into the direction outside, energy anode footpath of this bight B is subjected to endless belt recess 43B and hinders, and only the direction of principal axis to the central portion 431B that is surrounded by endless belt recess 43B conducts.Therefore, the outflow path of energy narrows down in fact, so the temperature of central portion 431B becomes than other regional temperature height.Thus, the middle body of anode is easy to evaporation, consequently, has the problem of the illumination sustainment rate decline of discharge lamp.
Like this, existing each discharge lamp according to above-mentioned is difficult to suppress the consumption of anode.
No. the 3598475th, patent documentation 1 Japan Patent
No. the 3136511st, patent documentation 2 Japan Patents
No. the 4054198th, patent documentation 3 Japan Patents
No. the 4132879th, patent documentation 4 Japan Patents
Patent documentation 5 TOHKEMY 2004-119024
Patent documentation 6 TOHKEMY 2003-346709
Summary of the invention
The present invention in view of the above problems, its purpose is, provides a kind of and can obtain with the equal briliancy of the briliancy of existing discharge lamp and can suppress the discharge lamp of the consumption of anode.
In short arc discharge lamp, by applying voltage between the anode that possesses at discharge lamp and the negative electrode, electronics is emitted towards anode from cathode portion, between anode and negative electrode, form electric arc.In the field of this discharge lamp, known is, as principle, along with uprising near anodes centre's axle electric field strength, thereby electronics is attracted by the anode center position, therefore, and near the current density height of the electric arc anodes centre's axle.
Therefore, in existing discharge lamp, can think that along with lighting a lamp time lapse of discharge lamp, near the position the central shaft of the anode that the current density of electric arc is high consumes, near the position the central shaft of anode forms pit.
By the problem of the pit of described anode is made great efforts research, the inventor obtains following understanding.
(1) if axially making the higher zone of current density in the footpath direction foreign side position of separating from anodes centre, make near current density ratio prior art low of anodes centre's axle thus, then can suppress the consumption of anode.
(2) current density is increased along with close anodes centre's axle, and make current density high, can access thus and the equal briliancy of the briliancy of existing discharge lamp to the nonexpendable degree of anode.
The present invention is based on above-mentioned cognition, take following measure to solve described problem.
The invention of technical scheme 1, the anode that provides a kind of short arc discharge lamp to use is formed with recess on anodes centre's axle of anode front end face, it is characterized in that,
Described anode possesses: the anode internal face forms towards interior side's side depression and along Zhou Fangxiang from described anode front end face; Smooth anode inner bottom surface, continuing and compare described anode front end face with described anode internal face forms in interior side's side; And the ring-type bight, form at the upper edge, border of described anode internal face and described anode front end face Zhou Fangxiang, and from anodes centre axial footpath direction foreign side separate.
The invention of technical scheme 2 provides a kind of short arc discharge lamp, and the anode that is formed with recess on anodes centre's axle of anode front end face and negative electrode dispose in that the inside of luminous tube is relative, it is characterized in that,
Described anode possesses: the anode internal face forms towards interior side's side depression and along Zhou Fangxiang from described anode front end face; Smooth anode inner bottom surface, continuing and compare described anode front end face with described anode internal face forms in interior side's side; And the ring-type bight, form at the upper edge, border of described anode internal face and described anode front end face Zhou Fangxiang, and from anodes centre axial footpath direction foreign side separate.
Anode of the present invention possesses recess, this recess has the anode inner bottom surface of comparing the anode front end face and being formed flatly in interior side's side, the footpath direction foreign side separation of anode central shaft and the ring-type bight that forms along Zhou Fangxiang, therefore, the electronics in the electric arc that forms between negative electrode and anode disperses respectively and concentrates on anode inner bottom surface and ring-type bight.Therefore, becoming near the high state of current density anodes centre's axle to the nonexpendable degree of anode, thus can obtain and the equal briliancy of the briliancy of existing discharge lamp, and can suppress the consumption of anode and prolong life-span of discharge lamp.
Description of drawings
Fig. 1 is the profile of summary of the formation of expression short arc discharge lamp of the present invention.
Fig. 2 is the partial enlarged drawing that A portion shown in Figure 1 is amplified.
Fig. 3 is the concept map that the electron density distribution in the electric arc is represented with anode.
Fig. 4 is the chart of expression for the data of the illumination sustainment rate of discharge lamp of the present invention and existing discharge lamp mensuration.
Fig. 5 is the profile that the formation of existing anode is represented with the formation of negative electrode.
Embodiment
Fig. 1 is the profile of summary of the formation of expression short arc discharge lamp of the present invention.Fig. 2 is the partial enlarged drawing that the leading section of negative electrode and anode is amplified expression.
Discharge lamp 10 possesses luminous tube 1, and this luminous tube 1 constitutes by forming the 12A of sealing portion and the 12B of roughly spherical illuminating part 11 with the straight tube-like that is connected with the two ends of illuminating part 11 respectively.Luminous tube 1 is for example formed by quartz glass.Be separately installed with the lamp holder 13A and the 13B of power supply usefulness on 12A of sealing portion and the 12B with drum.
In the discharge space S that the inside of luminous tube 1 forms, negative electrode 2 and anode 3 dispose on the axle X of anodes centre toward each other, and inclosure has luminescent substance.
As luminescent substance, enclosing has above xenon or argon gas and the above mercury of 1mg/cc of 0.5MPa under the room temperature.In addition, as luminescent substance, also can only enclose the either party in these rare gas and the mercury.
In negative electrode 2, columned metastomium 2A and form cone shape leading section 2B and for example form by tungsten, described metastomium 2A is kept by the 12A of sealing portion and stretches out to discharge space S, and the front end of described leading section 2B and metastomium 2A continues and along with being tapered towards the front end external diameter.
In anode 3, columned metastomium 3B, continue with the front of metastomium 3B and base end side respectively and the 3A of frustum of a cone portion and the 3C that form are for example formed by tungsten.On the 3C of frustum of a cone portion of base end side, be connected with the diameter shaft-like leading part (not shown) littler integratedly than metastomium 3B, leading part is kept by the 12B of sealing portion.
Fig. 2 is the partial enlarged drawing that A portion shown in Figure 1 is amplified expression.Fig. 2 (A) is the profile that comprises the axle X of anodes centre.Fig. 2 (B) is a front view of observing the anode front end face from the direction of the arrow B shown in Fig. 2 (A).
The 3A of frustum of a cone portion forms smooth anode front end face 3D at leading section as shown in Figure 2, and forms recess 30 in the mode that comprises the axle X of anodes centre at anode front end face 3D.
In recess 30, the section that comprises the axle X of anodes centre is rectangular-shaped, and promptly recess 30 has cylindrical shape.In addition, recess 30 is not limited to cylindrical shape, also can be rotational circle frustum shape.
In the discharge lamp of the present invention, when between negative electrode 2 and anode 3, applying high voltage, between negative electrode 2 and anode 3, form electric arc.
In anode 3, principle according to above-mentioned discharge lamp, electric field strength uprises along with the close axle X of anodes centre, but owing to possess ring-type bight 30C in the position of separating from the axle X of anodes centre towards footpath direction foreign side, therefore also becomes the higher state of electric field strength in this position.
Promptly, anode 3 becomes near electric field strength of the axle X of anodes centre and all higher state of electric field strength both sides of ring-type bight 30C, the electronics that sends from negative electrode 2 is disperseed respectively and is attracted near the axle X of anodes centre and ring-type bight 30C thus, has therefore reduced the amount that attracted near the electronics of the axle X of anodes centre.
And, anode 3 possesses anode inner bottom surface 30B by interior side's side of anode comparing anode front end face 3D, and anode inner bottom surface 30B is formed flatly, on anode inner bottom surface 30B, according to the principle of above-mentioned discharge lamp, become near the higher state of current density of the axle X of anodes centre.
In other words, anode 3 possesses the both sides of anode inner bottom surface 30B and ring-type bight 30C, a ring-type bight 30C who attracted to the footpath direction foreign side that is positioned at the axle X of anodes centre of the electronics that sends from negative electrode 2 thus, remaining electronics that does not attracted to ring-type bight 30C is assembled near the axle X of anodes centre of anode inner bottom surface 30B, and near the current density the axle X of anodes centre is high to the nonexpendable degree of anode.
Fig. 3 represents to simulate for discharge lamp of the present invention that possesses anode shown in Figure 2 and the existing discharge lamp that possesses the anode shown in Fig. 5 (A) respectively the result of the electric-field intensity distribution in the electric arc.The longitudinal axis of Fig. 3 is represented electric field strength, and transverse axis is represented the distance with the axle X of anodes centre.The solid line of Fig. 3 is represented the electric field strength of anode of the present invention, and dotted line is represented the electric field strength of existing anode (diagram among Fig. 5 (A)).
Shown in solid line among Fig. 3, in anode of the present invention, the spike of electric field strength shows in the pairing position of 30C, ring-type bight periphery, recess 30 of the axle X of anodes centre, can infer that the electronics that in the electric arc concentrates on the form of ring-type bight 30C.Therefore, can infer the large percentage that the electric current that attracted to ring-type bight 30C in the anode of the present invention.
On the other hand, can't see such peak value in the existing anode (Fig. 5 (A) in diagram), can infer that therefore the ratio of electric current of the edge part 431A that to attracted to recess 43A is less.
Like this, possesses the ring-type bight 30C that the footpath direction foreign side of the axle X of the oriented anodes centre of Discharging lamps and lanterns of anode 3 of the present invention forms discretely, disperse with ring-type bight 30C both sides near the electric current anode central shaft X thus, therefore relax near concentrating of the part of electric current anode central shaft X, and having anode inner bottom surface 30B, near the current density anodes centre's axle X is moderately high to the nonexpendable degree of anode thus.
Therefore, the discharge lamp that possesses anode 3 of the present invention can obtain and the equal briliancy of the briliancy of existing discharge lamp, and compares with the discharge lamp that possesses existing anode, can suppress the consumption of anode reliably.
In addition, the depth H (distance of anode front end face 3D and anode inner bottom surface 30B) that is located at the recess 30 of anode 3 can suit to determine according to the specification of discharge lamp, but preferably in the scope of 0.1mm～0.5mm.
During the depth H of recess 30 is not enough 0.1mm, the electric field strength of ring-type bight 30C can not uprise, and therefore can not attract the electronics that sends from negative electrode 2 fully, so can not suppress the consumption of anode.
In addition, when the depth H of recess 30 surpasses 0.5mm, the modulating voltage of the elongated and discharge lamp of the distance between negative electrode 2 and the anode 3 rises, thus, lamp current descends, and (this discharge lamp is generally used the power supply point lamp by lighting a lamp of firm power, therefore if the either party of modulating voltage and lamp current rises, then the opposing party descends), therefore radiate briliancy and descend.In addition, if the depth H of recess 30 surpasses 0.5mm, then electric arc is expanded along the footpath direction, so collection efficiency descends the plane of exposure illumination decline of exposure device etc.
Below the experiment and the experimental result thereof of carrying out in order to confirm effect of the present invention described.
When experimentizing, make the discharge lamp of the present invention, comparative example 1, comparative example 2 respectively according to formation shown in Figure 1.The details of each discharge lamp is as described below.
＜discharge lamp of the present invention 〉
(lamp)
Interelectrode distance: 10mm
Mercury enclosed volume: 25mg/cc
Rare gas enclosed volume: 0.15MPa
Input power: 10kW
(anode)
Recess is arranged
The diameter D:5mm of recess (30)
The depth H of recess (30): 0.4mm
The shape of anode inner bottom surface (30B): smooth
The discharge lamp of＜comparative example 1 〉
(lamp)
Identical with discharge lamp of the present invention
(anode)
No recess
The discharge lamp of＜comparative example 2 〉
(lamp)
Identical with discharge lamp of the present invention
(anode)
Recess is arranged
The diameter D:5mm of recess (43A)
The depth H of recess (43A): 0.4mm
The shape of anode inner bottom surface: sphere (diagram among Fig. 5 (A))
The discharge lamp of＜comparative example 3 〉
(lamp)
Identical with discharge lamp of the present invention
(anode)
Recess is arranged: the endless belt recess
The diameter D:5mm of endless belt recess (the bight A side of 43B)
The width of endless belt recess (43B) (distance between the AB of bight): 1mm
The depth H of endless belt recess (43B): 0.4mm
The shape of anode endless belt recess: ring-band shape groove (diagram among Fig. 5 (B))
Use lighting a lamp with power supply of constant electric power, measure the radiation illumination sustainment rate of each discharge lamp each above-mentioned discharge lamp lighting.Its result of expression among Fig. 4.The longitudinal axis of Fig. 4 represents to radiate the illumination sustainment rate, and transverse axis is represented the time of lighting a lamp.
The consumption of radiation illumination sustainment rate and anode is closely related.That is, the consumption of the high expression of radiation illumination sustainment rate anode is suppressed.
As shown in Figure 4, can confirm that for beginning from lighting a lamp through the radiation illumination sustainment rate after 800 hours, discharge lamp of the present invention is 95%, the discharge lamp of comparative example 1 is 84%, and the discharge lamp of comparative example 2 is 92%, and the discharge lamp of comparative example 3 is 86%.
Can confirm that from above-mentioned result discharge lamp of the present invention is compared with the discharge lamp of comparative example 1, comparative example 2 and comparative example 3, can suppress the consumption of anode.
As mentioned above, according to anode 3 of the present invention, owing to possess recess 30, the ring-type bight 30C that this recess 30 has the anode inner bottom surface 30B that compares the anode front end face 3D side's of being positioned at side and be formed flatly, separate from the axle X of anodes centre towards footpath direction foreign side and form along Zhou Fangxiang, therefore, the electronics in the electric arc that forms between negative electrode 2 and anode 3 disperses respectively and concentrates on anode inner bottom surface 30B and ring-type bight 30C.Therefore, becoming near the high state of current density the axle X of anodes centre to the nonexpendable degree of anode, thus can obtain and the equal briliancy of the briliancy of existing discharge lamp, and can suppress the consumption of anode and prolong life-span of discharge lamp 10.
Claims (2)
1. the anode that short arc discharge lamp is used is formed with recess on anodes centre's axle of anode front end face, it is characterized in that,
Described anode possesses:
The anode internal face forms towards interior side's side depression and along Zhou Fangxiang from described anode front end face;
Smooth anode inner bottom surface, continuing and compare described anode front end face with described anode internal face forms in interior side's side, and the degree of depth is 0.1mm～0.5mm; And
The ring-type bight forms at the upper edge, border of described anode internal face and described anode front end face Zhou Fangxiang, and from anodes centre axial footpath direction foreign side separate.
2. short arc discharge lamp, the anode that is formed with recess on anodes centre's axle of anode front end face and negative electrode dispose in that the inside of luminous tube is relative, it is characterized in that,
Described anode possesses:
The anode internal face forms towards interior side's side depression and along Zhou Fangxiang from described anode front end face;
Smooth anode inner bottom surface, continuing and compare described anode front end face with described anode internal face forms in interior side's side, and the degree of depth is 0.1mm～0.5mm; And
The ring-type bight forms at the upper edge, border of described anode internal face and described anode front end face Zhou Fangxiang, and from anodes centre axial footpath direction foreign side separate.
Applications Claiming Priority (2)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| JP2009154651A JP2011014248A (en) | 2009-06-30 | 2009-06-30 | Anode for short-arc discharge lamp and the short-arc type discharge lamp |
| JP2009-154651 | 2009-06-30 |
Publications (1)
| Publication Number | Publication Date |
|---|---|
| CN101937827A true CN101937827A (en) | 2011-01-05 |
Family
ID=43299276
Family Applications (1)
| Application Number | Title | Priority Date | Filing Date |
|---|---|---|---|
| CN2010102153573A Pending CN101937827A (en) | 2009-06-30 | 2010-06-24 | Short arc type discharge lamp and anode thereof |
Country Status (5)
| Country | Link |
|---|---|
| JP (1) | JP2011014248A (en) |
| KR (1) | KR20110001904A (en) |
| CN (1) | CN101937827A (en) |
| DE (1) | DE102010024240A1 (en) |
| TW (1) | TW201126566A (en) |
Cited By (1)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| CN102024662A (en) * | 2009-09-15 | 2011-04-20 | 优志旺电机株式会社 | Short-arc type discharge lamp |
Families Citing this family (1)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| KR102436519B1 (en) * | 2015-08-18 | 2022-08-25 | 삼성전자주식회사 | Arc lamp and substrate heating apparatus having the arc lamp |
Family Cites Families (6)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| JP3598475B2 (en) | 1995-10-20 | 2004-12-08 | 株式会社オーク製作所 | Discharge lamp anode structure |
| JP3136511B2 (en) * | 1997-04-01 | 2001-02-19 | 株式会社オーク製作所 | Anode structure of short arc type discharge lamp |
| JP4054198B2 (en) * | 2002-02-07 | 2008-02-27 | 株式会社オーク製作所 | Short arc type discharge lamp electrode and short arc type discharge lamp |
| JP4132879B2 (en) * | 2002-03-06 | 2008-08-13 | 株式会社オーク製作所 | Short arc type discharge lamp electrode and short arc type discharge lamp |
| JP2003346709A (en) * | 2002-05-29 | 2003-12-05 | Ushio Inc | Electrode for discharge lamp |
| JP4337968B2 (en) * | 2002-09-24 | 2009-09-30 | ウシオ電機株式会社 | Short arc type discharge lamp |
-
2009
- 2009-06-30 JP JP2009154651A patent/JP2011014248A/en active Pending
-
2010
- 2010-06-07 TW TW99118383A patent/TW201126566A/en unknown
- 2010-06-18 DE DE201010024240 patent/DE102010024240A1/en not_active Withdrawn
- 2010-06-22 KR KR1020100059046A patent/KR20110001904A/en not_active Application Discontinuation
- 2010-06-24 CN CN2010102153573A patent/CN101937827A/en active Pending
Cited By (2)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| CN102024662A (en) * | 2009-09-15 | 2011-04-20 | 优志旺电机株式会社 | Short-arc type discharge lamp |
| CN102024662B (en) * | 2009-09-15 | 2015-03-11 | 优志旺电机株式会社 | Short-arc type discharge lamp |
Also Published As
| Publication number | Publication date |
|---|---|
| KR20110001904A (en) | 2011-01-06 |
| DE102010024240A1 (en) | 2011-01-05 |
| TW201126566A (en) | 2011-08-01 |
| JP2011014248A (en) | 2011-01-20 |
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Application publication date: 20110105 |