CN203659799U - Short arc type discharge lamp with long service lifetime - Google Patents
Short arc type discharge lamp with long service lifetime Download PDFInfo
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- CN203659799U CN203659799U CN201320839305.2U CN201320839305U CN203659799U CN 203659799 U CN203659799 U CN 203659799U CN 201320839305 U CN201320839305 U CN 201320839305U CN 203659799 U CN203659799 U CN 203659799U
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- Prior art keywords
- discharge lamp
- anode
- short arc
- groove
- long
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- Expired - Lifetime
Links
- 238000010891 electric arc Methods 0.000 claims description 18
- 230000015572 biosynthetic process Effects 0.000 claims description 4
- 239000010405 anode material Substances 0.000 claims description 3
- 238000005286 illumination Methods 0.000 abstract description 7
- 238000000034 method Methods 0.000 abstract description 6
- 230000005855 radiation Effects 0.000 abstract description 2
- 208000003351 Melanosis Diseases 0.000 description 14
- 230000008020 evaporation Effects 0.000 description 6
- 238000001704 evaporation Methods 0.000 description 6
- XKRFYHLGVUSROY-UHFFFAOYSA-N Argon Chemical compound [Ar] XKRFYHLGVUSROY-UHFFFAOYSA-N 0.000 description 2
- 230000001174 ascending effect Effects 0.000 description 2
- 238000010586 diagram Methods 0.000 description 2
- 239000007772 electrode material Substances 0.000 description 2
- 239000007789 gas Substances 0.000 description 2
- 238000010438 heat treatment Methods 0.000 description 2
- 229910052786 argon Inorganic materials 0.000 description 1
- 230000007423 decrease Effects 0.000 description 1
- 230000007812 deficiency Effects 0.000 description 1
- 238000005516 engineering process Methods 0.000 description 1
- 230000005764 inhibitory process Effects 0.000 description 1
- 239000004973 liquid crystal related substance Substances 0.000 description 1
- 230000007774 longterm Effects 0.000 description 1
- 238000004519 manufacturing process Methods 0.000 description 1
- 239000000463 material Substances 0.000 description 1
- 230000002093 peripheral effect Effects 0.000 description 1
- 239000004065 semiconductor Substances 0.000 description 1
- 239000000126 substance Substances 0.000 description 1
- 229910052724 xenon Inorganic materials 0.000 description 1
- FHNFHKCVQCLJFQ-UHFFFAOYSA-N xenon atom Chemical compound [Xe] FHNFHKCVQCLJFQ-UHFFFAOYSA-N 0.000 description 1
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- Discharge Lamp (AREA)
Abstract
The utility model discloses a short arc type discharge lamp with a long service lifetime. The short arc type discharge lamp comprises a luminous tube, the inner part of the luminous tube is closed to form a discharge space, the upper end and the lower end in the discharge space are respectively provided with an anode and a cathode arranged in an opposite manner, the upper end of the anode is provided with an electrode shaft in an inverted T shape, the electrode shaft comprises a connecting seat and a shaft rod positioned at the axis of the connecting seat, the upper surface of the connecting seat forms an annular groove around the shaft rod, and the surface of the anode is provided with a heat radiation structure. According to the short arc type discharge lamp, the process is simple, the cost is low, blackening on an illumination surface is prevented, and the service lifetime of the discharge lamp is extended.
Description
Technical field
The utility model relates to a kind of short arc discharge lamp, specifically relates to a kind of a kind of short arc discharge lamp that is used as light source in the exposure process of semiconductor or liquid crystal manufacture.
Background technology
Existing a kind of short arc discharge lamp, has roughly glomerate luminous tube, and luminous tube enclose inside forms a discharge space, and the negative electrode of discharge space and anode are opposite each other on central shaft, and the inner envelope of discharge space has the luminescent substance such as xenon or argon gas.
When discharge lamp is switched on, collision by the electronics of emitting from negative electrode forms electric arc, anode becomes high temperature because the electron collision in its arc column is heated, wear and tear gradually along with the increase of lighting time, evaporate, when anode consumption, the electrode composition of evaporation will be as melanism thing along with air current flow is attached to the inwall of luminous tube and makes internal face melanism, if antianode end face and body surfaces are not processed, the long-time discharge lamp that uses, anode will consume very soon, accelerate evaporation and the adhering on luminous tube of melanism thing, shorten the life-span of discharge lamp.
In addition, the air-flow of bulb in conventional discharge lamps discharge process is carried out to convection current emulation, it contains by the flow trace of the air-flow of the melanism thing composition of discharge generation as shown in Figure 1.As seen from Figure 1, the shape of the luminous tube end face side of the anode of conventional discharge lamps is also downward-sloping toward the outer side from electrode centers.Use as a lamp when bright, between anode and negative electrode, produce arc-plasma, now produce from the air-flow in Shang Sheng path, cathode side anode side.This air-flow is shunted near the luminous tube of anode is distolateral, part air flow direction also with luminous tube collision, and adhere to more melanism thing at collision area.General collision area is all lower, is on the irradiation region of luminous tube, along with the prolongation of the time of lighting a lamp, on luminous tube irradiation area, deposit soon a large amount of melanism things, covered the light of discharge lamp, the illumination of discharge lamp declines very fast, has shortened the life-span of discharge lamp.Therefore, in order to extend the useful life of discharge lamp, be necessary to change the position (attachment position of melanism thing) of air-flow and luminous tube collision area, make its irradiation region of departing from luminous tube, thereby make lamp maintain for a long time initial illumination.
Utility model content
The purpose of this utility model is to overcome above-mentioned the deficiencies in the prior art, provides one can reduce the impact of melanism thing, extends the discharge lamp long-life short arc discharge lamp of one in useful life.
For achieving the above object, the utility model adopts following technical proposals:
A kind of long-life short arc discharge lamp, there is the luminous tube that enclose inside becomes a discharge space, top and bottom in described discharge space are relatively set with respectively anode and negative electrode, the upper end of described anode is provided with the electrode axis that is inverted T shape, described electrode axis comprises Connection Block and the mandrel rod that is positioned at described Connection Block axle center, and the upper surface of described Connection Block forms the groove of an annular around described mandrel rod.
The described groove cross section around mandrel rod is trapezoidal.
Described anode is formed with recess on the end face relative with described negative electrode, in described recess, be provided with one with the insertosome of the identical formation of described anode material, between described insertosome and described recess, be formed with space.
Described insertosome core is provided with groove, when described insertosome is inserted described recess, between described groove and described recess, forms described space.
The groove cross section of above-mentioned insertosome is configured as U-shaped.
The groove cross section of above-mentioned insertosome is configured as V-arrangement.
The surface of described anode is provided with radiator structure, and the groove that described radiator structure is arc by cross section forms.And preferably, this groove is spiral grooves.
Adopt after technique scheme, compared with prior art, tool has the following advantages the utility model:
1, groove of the present utility model has changed the attachment position of melanism thing at luminous tube inner face, make the attachment position of melanism thing depart from the irradiation region of luminous tube, while preventing long-term lighting, the illumination of lamp sharply declines, thereby extends the useful life of lamp, and technique is simple, with low cost.
2, the utility model discharge lamp is provided with an insertosome in the lower surface of anode, between lower surface and insertosome, is formed with space, and space avoids outstanding generation the in anode lower end to be out of shape; In addition, the utility model discharge lamp is also provided with radiator structure at anode surface.Thereby can suppress the problem of the discharge lamp illumination decline causing because of the blackening that the evaporation of anode material causes, ensure the useful life of discharge lamp.
Brief description of the drawings
Fig. 1 is that the air-flow of bulb in conventional discharge lamps discharge process carries out convection current analogous diagram;
Fig. 2 is structural representation of the present utility model;
Fig. 3 is the schematic cross-sectional exploded view of the utility model anode;
Fig. 4 is the cross section combination schematic diagram of the utility model anode;
Fig. 5 is the structural representation of the anode of another embodiment of the utility model;
Fig. 6 is the utility model structural representation of the anode of an embodiment again.
Embodiment
In order to make the purpose of this utility model, technical scheme and advantage clearer, below in conjunction with drawings and Examples, the utility model is further elaborated.Should be appreciated that specific embodiment described herein is only in order to explain the utility model, and be not used in restriction the utility model.
Embodiment mono-
As shown in Figure 2, the utility model discloses a kind of long-life short arc discharge lamp, discharge lamp has roughly glomerate luminous tube 1, and the enclose inside of luminous tube 1 forms a discharge space 2, and the top and bottom in discharge space 2 are relatively set with respectively anode 3 and negative electrode 4.
As shown in Figure 3, the upper end of anode 3 is provided with the electrode axis 31 that is inverted T shape, and electrode axis 31 comprises Connection Block 311 and the mandrel rod 312 that is positioned at Connection Block 311 axle center, and the upper surface of Connection Block 311 forms the groove 313 of an annular around mandrel rod 312.In the present embodiment, be trapezoidal around groove 313 cross sections of mandrel rod 312.
Groove 313 is led back to the upper end of luminous tube 1 again for the air-flow that the upper end from luminous tube 1 is declined, because the attachment position of melanism thing on luminous tube 1 depends on the air-flow that the contains melanism thing position of collision at luminous tube, therefore by groove 313 shapes, thereby make the air-flow declining from luminous tube 1 upper end again get back to the gas flow of the upper end formation circulation of luminous tube 1, the direction of arrow as shown in Figure 2, make it can not hinder the ascending air that anode sides contains melanism thing composition, ascending air can be in more position and the luminous tube collision of upper end of luminous tube 1, thereby prevent at light-struck area part generation melanism.
As shown in Figure 3, anode 3 is formed with recess 32 on the end face with respect to negative electrode 4, in recess 32, be provided with one with the insertosome 5 of the identical formation of anode 3 material, between insertosome 5 and described recess 32, be formed with space.Insertosome 5 cores are provided with groove 51, and when insertosome 5 is inserted recess 32, its flange is butted on the inner bottom surface of recess 32, and the groove 51 of U-shaped has formed space 33(with the surface of recess 32 and coordinated shown in Fig. 4).
In short arc discharge lamp, form electric arc by applying voltage between the anode 3 at discharge lamp and negative electrode 4, anode 3 becomes high temperature because the electron collision in its arc column is heated, the shaft core position place temperature of the lower surface of anode 3 faces cathode 4 is the highest, around the peripheral position in axle center, variations in temperature is little comparatively speaking, due to the lower surface inequality and extremely overheated at shaft core position place of being heated, can make the shaft core position place expanded by heating of lower surface and be out of shape in the mode of giving prominence to, outstanding part continues at high temperature, can promote evaporation and electrode material adhesioluminescence pipe 1 inwall of electrode material, make the blackening of luminous tube inwall, cause that illumination declines.And the utility model is owing to being inserted with the recess 32 of insertosome 5 in the lower surface of anode 3, between insertosome 5 and recess 32, be formed with space 33, certain inhibition can be played by the rearward straight line conduction of anode front end to heat in space, and provide the space that can hold the dilatancy that insertosome 5 causes owing to being heated, suppress on the whole the distortion that anode lower end causes due to expanded by heating, consequently can prevent the blackening of the luminous tube 1 that the too fast evaporation of electrode causes, prevent the illumination fast-descending of discharge lamp, thereby ensure the useful life of discharge lamp.
Embodiment bis-
Shown in figure 5, compared with embodiment mono-, its difference is:
Embodiment tri-
Shown in figure 6, compared with embodiment mono-, its difference is:
The surface of anode 3 is provided with radiator structure 6, and the groove that radiator structure 6 is arc by cross section forms.
In the present embodiment, anode 3 body surfaces are established spiral grooves, can increase the surface area of anode 3, are conducive to the energy of loss on anode 3 with forms of radiation distribute heat, thereby reduce the temperature of anode 3.
The above; it is only preferably embodiment of the utility model; but protection range of the present utility model is not limited to this; any be familiar with those skilled in the art the utility model disclose technical scope in; the variation that can expect easily or replacement, within all should being encompassed in protection range of the present utility model.Therefore, protection range of the present utility model should be as the criterion with the protection range of claim.
Claims (8)
1. a long-life short arc discharge lamp, there is the luminous tube that enclose inside becomes a discharge space, top and bottom in described discharge space are relatively set with respectively anode and negative electrode, it is characterized in that: the upper end of described anode is provided with the electrode axis that is inverted T shape, described electrode axis comprises Connection Block and the mandrel rod that is positioned at described Connection Block axle center, and the upper surface of described Connection Block forms the groove of an annular around described mandrel rod.
2. the long-life short arc discharge lamp of one according to claim 1, is characterized in that: the described groove cross section around mandrel rod is trapezoidal.
3. the long-life short arc discharge lamp of one according to claim 1 and 2, it is characterized in that: described anode is formed with recess on the end face relative with described negative electrode, in described recess, be provided with one with the insertosome of the identical formation of described anode material, between described insertosome and described recess, be formed with space.
4. the long-life short arc discharge lamp of one according to claim 3, is characterized in that: described insertosome core is provided with groove, when described insertosome is inserted described recess, between described groove and described recess, forms described space.
5. the long-life short arc discharge lamp of one according to claim 4, is characterized in that: the groove cross section of described insertosome is configured as U-shaped.
6. the long-life short arc discharge lamp of one according to claim 4, is characterized in that: the groove cross section of described insertosome is configured as V-arrangement.
7. the long-life short arc discharge lamp of one according to claim 1 and 2, is characterized in that: it is characterized in that: the surface of described anode is provided with radiator structure, the groove that described radiator structure is arc by cross section forms.
8. the long-life short arc discharge lamp of one according to claim 5, is characterized in that: it is characterized in that: described groove is spiral grooves.
Priority Applications (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| CN201320839305.2U CN203659799U (en) | 2013-12-18 | 2013-12-18 | Short arc type discharge lamp with long service lifetime |
Applications Claiming Priority (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| CN201320839305.2U CN203659799U (en) | 2013-12-18 | 2013-12-18 | Short arc type discharge lamp with long service lifetime |
Publications (1)
| Publication Number | Publication Date |
|---|---|
| CN203659799U true CN203659799U (en) | 2014-06-18 |
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Family Applications (1)
| Application Number | Title | Priority Date | Filing Date |
|---|---|---|---|
| CN201320839305.2U Expired - Lifetime CN203659799U (en) | 2013-12-18 | 2013-12-18 | Short arc type discharge lamp with long service lifetime |
Country Status (1)
| Country | Link |
|---|---|
| CN (1) | CN203659799U (en) |
Cited By (1)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| CN109427519A (en) * | 2017-08-28 | 2019-03-05 | 深圳凯世光研股份有限公司 | A kind of the recycling and reusing method and its anode electrode of short arc discharge lamp anode electrode |
-
2013
- 2013-12-18 CN CN201320839305.2U patent/CN203659799U/en not_active Expired - Lifetime
Cited By (1)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| CN109427519A (en) * | 2017-08-28 | 2019-03-05 | 深圳凯世光研股份有限公司 | A kind of the recycling and reusing method and its anode electrode of short arc discharge lamp anode electrode |
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Legal Events
| Date | Code | Title | Description |
|---|---|---|---|
| C14 | Grant of patent or utility model | ||
| GR01 | Patent grant | ||
| ASS | Succession or assignment of patent right |
Owner name: MEIZHOU KAIMING ELECTRIC LIGHT SOURCE CO., LTD. Free format text: FORMER OWNER: SHENZHEN CAIZ PHOTOELECTRIC TECHNOLOGY CO., LTD. Effective date: 20150407 Free format text: FORMER OWNER: MEIZHOU KAIMING ELECTRIC LIGHT SOURCE CO., LTD. Effective date: 20150407 |
|
| C41 | Transfer of patent application or patent right or utility model | ||
| COR | Change of bibliographic data |
Free format text: CORRECT: ADDRESS; FROM: 518000 SHENZHEN, GUANGDONG PROVINCE TO: 514000 MEIZHOU, GUANGDONG PROVINCE |
|
| TR01 | Transfer of patent right |
Effective date of registration: 20150407 Address after: 514000 Meizhou City, Meijiang Province, north of the city of Guangdong in the north of the city of five kiosks Patentee after: Meizhou Kaiming Electric Light Source Co., Ltd. Address before: Shenzhen City, Guangdong province Baoan District 518000 District three, COFCO Property Group Center 12 Building 1, room 2, 3 (Office) Patentee before: Shenzhen Caiz Photoelectric Technology Co., Ltd. Patentee before: Meizhou Kaiming Electric Light Source Co., Ltd. |
|
| TR01 | Transfer of patent right |
Effective date of registration: 20170315 Address after: 432000 Industrial Park, Xiaochang Economic Development Zone, Xiaogan, Hubei, China Patentee after: HUBEI KAICHANG PHOTOELECTRIC TECHNOLOGY CO., LTD. Address before: 514000 Meizhou City, Meijiang Province, north of the city of Guangdong in the north of the city of five kiosks Patentee before: Meizhou Kaiming Electric Light Source Co., Ltd. |
|
| TR01 | Transfer of patent right | ||
| TR01 | Transfer of patent right |
Effective date of registration: 20210818 Address after: 514000 Huanshi North Road, Wuliting, Chengbei, Meizhou City, Guangdong Province Patentee after: CAIZ TOPSHINE Ltd. Address before: 432000 Chengnan Industrial Park, Xiaochang Economic Development Zone, Xiaogan City, Hubei Province Patentee before: HUBEI KAICHANG PHOTOELECTRIC TECHNOLOGY Co.,Ltd. |
|
| TR01 | Transfer of patent right |