JP3136511B2 - Anode structure of short arc type discharge lamp - Google Patents
Anode structure of short arc type discharge lampInfo
- Publication number
- JP3136511B2 JP3136511B2 JP09082645A JP8264597A JP3136511B2 JP 3136511 B2 JP3136511 B2 JP 3136511B2 JP 09082645 A JP09082645 A JP 09082645A JP 8264597 A JP8264597 A JP 8264597A JP 3136511 B2 JP3136511 B2 JP 3136511B2
- Authority
- JP
- Japan
- Prior art keywords
- anode
- discharge lamp
- cathode
- short arc
- arc type
- Prior art date
- Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
- Expired - Lifetime
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Description
【０００１】[0001]
【発明の属する技術分野】本発明は、放電灯の寿命を延
長できるショートアーク型放電灯の陽極構造に関するも
のである。BACKGROUND OF THE INVENTION 1. Field of the Invention The present invention relates to an anode structure of a short arc type discharge lamp capable of extending the life of the discharge lamp.
【０００２】[0002]
【従来の技術】半導体の配線パターンを画像形成する
際、紫外線を照射するために使用される光源としてショ
ートアーク型の水銀ランプ又はキセノンランプ等が広く
採用されている。2. Description of the Related Art In forming an image of a semiconductor wiring pattern, a short arc type mercury lamp or a xenon lamp is widely used as a light source for irradiating ultraviolet rays.
【０００３】ショートアーク型の放電灯１は図８に示す
ように、中央部が膨出した石英ガラス製の発光管２と、
この発光管の膨出部３の内部に対向配置した陰極４及び
陽極５等によって構成されており、この放電灯１に通電
すると、発光管の内部に封入したキセノン等の不活性ガ
スの中で水銀がベーパライズしてプラズマ状態となり、
陰極４から放出された電子が陽極５に流通して両極間に
アークが発生し、放電灯１が点灯するようになってい
る。As shown in FIG. 8, a short arc type discharge lamp 1 has an arc tube 2 made of quartz glass having a central portion bulging out.
The discharge lamp 1 includes a cathode 4 and an anode 5 which are opposed to each other inside the bulging portion 3 of the arc tube. When the discharge lamp 1 is energized, the discharge lamp 1 is filled with an inert gas such as xenon. Mercury is vaporized into a plasma state,
Electrons emitted from the cathode 4 flow through the anode 5 to generate an arc between the two electrodes, so that the discharge lamp 1 is turned on.
【０００４】ランプを点灯すると、陽極は陰極から放出
された電子の衝突によって加熱され高温になり、蒸発、
消耗する。さらに、電子の衝突によって電極が消耗する
と、蒸発したタングステンが発光管２の内壁面に付着し
て、内壁面を黒化させる。そして、放電灯を長時間使用
すると、陽極先端部の消耗が進行すると共に、放電灯の
放射強度が順次、低下し、この低下が使用限度を越える
と放電管を新品と交換する必要がある。When the lamp is turned on, the anode is heated by the collision of electrons emitted from the cathode to a high temperature, and evaporates.
exhaust. Further, when the electrodes are consumed by the collision of electrons, the evaporated tungsten adheres to the inner wall surface of the arc tube 2 and blackens the inner wall surface. If the discharge lamp is used for a long time, the tip of the anode will be consumed and the radiation intensity of the discharge lamp will gradually decrease. If the decrease exceeds the usage limit, it is necessary to replace the discharge tube with a new one.
【０００５】そこで、陽極の温度上昇を抑制することに
よって陽極の消耗と発光管内壁面の黒化の進行をおくら
せる対策が種々、検討された結果、陽極の表面に熱放射
率の大きい炭化タンタルとタングステン等の混合物を焼
結する対策が実施された。しかし、この対策には、炭
化タンタルとタングステンがいずれも高融点物質である
ことおよび母材（陽極）に対する密着性が悪いため、陽
極の温度上昇を充分に抑制することができず、更に前
記混合物が陽極から剥離して逆に発光管内壁面の黒化を
促進するという問題点があった。[0005] Therefore, various measures have been studied to suppress the temperature rise of the anode, thereby increasing the consumption of the anode and the progress of the blackening of the inner wall surface of the arc tube. As a result, tantalum carbide having a large thermal emissivity was formed on the surface of the anode. Measures have been taken to sinter mixtures such as tungsten. However, in order to prevent this, since both tantalum carbide and tungsten are high-melting substances and have poor adhesion to the base material (anode), the temperature rise of the anode cannot be sufficiently suppressed. However, there is a problem in that the flakes are peeled off from the anode to promote blackening of the inner wall surface of the arc tube.
【０００６】そこで、前記の問題点を解決するため、次
の対策が本願と同一の発明者によって提案された（詳細
は特願平７−２７２１５９号を参照）。この対策は、図
９に示すように陽極５の先端部７を除く陽極の部分、例
えば陽極の側面に炭化タングステン（ＷＣ）と炭化タン
タル（ＴａＣ）とタングステン（Ｗ）からなる混合物を
焼結して多孔質層６を形成するもので、この対策による
と、多孔質層６と母材の密着性が良いので陽極の温度上
昇を適切に抑制することが可能になり、陽極の消耗と発
光管の黒化を少くして、放電灯の寿命を延長することが
できた。Therefore, in order to solve the above problem, the following measures have been proposed by the same inventor as the present application (for details, see Japanese Patent Application No. 7-272159). As a countermeasure, as shown in FIG. 9, a mixture of tungsten carbide (WC), tantalum carbide (TaC), and tungsten (W) is sintered on the anode part except the tip part 7 of the anode 5, for example, on the side surface of the anode. According to this measure, the adhesion between the porous layer 6 and the base material is good, so that the temperature rise of the anode can be appropriately suppressed, and the consumption of the anode and the arc tube can be suppressed. And the life of the discharge lamp was extended.
【０００７】[0007]
【発明が解決しようとする課題】しかし、前記の陽極構
造は、三種類の高融点物質、すなわち炭化タングステ
ン、炭化タンタルおよびタングステンの混合物を陽極表
面に焼結するため、陽極の構造が複雑となり、また製造
工程も複雑で長時間を要するという問題点があった。本
発明は前記の問題に鑑み、簡単な構造でありながら陽極
の消耗を抑制して、放電灯の寿命を延長できるショート
アーク型放電灯の陽極構造を提供することを課題とす
る。However, the above-mentioned anode structure sinters a mixture of three kinds of high-melting substances, that is, tungsten carbide, tantalum carbide and tungsten, on the surface of the anode. There is also a problem that the manufacturing process is complicated and requires a long time. In view of the above problems, an object of the present invention is to provide an anode structure of a short arc type discharge lamp which has a simple structure and can suppress the consumption of the anode and extend the life of the discharge lamp.
【０００８】[0008]
【課題を解決するための手段】先ず、本願発明の原理に
ついて述べ、その次に発明の構成について説明する。本
願の発明者は陽極の消耗と陽極の形状について考察した
結果、次のように陽極の形状を定めることによって陽極
の消耗を軽減できると考えた。First, the principle of the present invention will be described, and then the configuration of the present invention will be described. The inventor of the present application has considered the consumption of the anode and the shape of the anode, and as a result, considered that the consumption of the anode can be reduced by determining the shape of the anode as follows.
【０００９】図１のように陰極１１の先端部を点電荷Ｑ
と考えたときに、陽極１３の先端側の電界の強さは次式 Ｅ＝Ｑ／（４πε0 ｘ2 ） ……式 で表される。ただし、Ｅは電界、ε0 は誘電率、ｘは電
極間の距離である。前記式は、点電荷Ｑからの距離ｘ
が遠いほど電界Ｅが強くなるという意味である。したが
って図１の場合は、Ｐ1 の位置よりもＰ0 の位置のほう
が電界強度が弱く、電流密度が高いので、電極表面の消
耗が激しく、点灯時間が長くなるほどその電極表面がく
ぼんだ形になってくると考えられる。As shown in FIG. 1, a point charge Q
, The strength of the electric field on the tip side of the anode 13 is expressed by the following equation: E = Q / (4πε 0 x 2 ). Here, E is an electric field, ε 0 is a dielectric constant, and x is a distance between electrodes. The above equation represents the distance x from the point charge Q.
Means that the electric field E increases as the distance increases. For Figure 1 is therefore weak electric field strength towards the position of P 0 from the position of P 1, the current density is high, severe wear of the electrode surface, the shape of concave is more the electrode surface lighting time becomes longer It is thought to become.
【００１０】この発明は、陽極先端部を図２のような構
造にすることで、Ｐ0 、Ｐ1 点でのそれぞれの電界の強
さを近づけ（ｘ0 ≒ｘ1 ）、陽極表面での電流密度が分
散されるようにしたものである。本願の発明者は前記の
考察に立脚して陽極の形状を種々、設定し、実験を行っ
た結果、本願発明の課題は、次の請求項に記載した２通
りの発明によって達成されることが判明した。According to the present invention, the strength of each electric field at points P 0 and P 1 is made closer (x 0 ≒ x 1 ) by forming the tip of the anode as shown in FIG. The current density is dispersed. Based on the above considerations, the inventors of the present application set various shapes of the anode and conducted experiments, and as a result, it was found that the object of the present invention can be achieved by the two inventions described in the following claims. found.
【００１１】（１）請求項１の発明は中央部が膨らんだ
発光管の内部に陽極と陰極の距離を一定にし対向して配
置し、前記陽極と陰極の間に電圧を印加してアークを発
生させるショートアーク型放電灯の電極構造において、
陰極に対向する陽極先端部に凹部を設け、前記凹部は、
前記陰極から放出される電子を受け止める点で発生する
電界の強さを近づけるように形成したことを特徴とする
ショートアークたものである。この構成によると、放電
中、陰極から放出された電子は陽極の凹部で受け止めら
れるので、陽極構成物質が電子の衝突によって弾き出さ
れる度合いが低下する。従って、陽極の消耗が少くな
り、発光管内部の黒化を抑制することができる。(1) According to the first aspect of the present invention , the distance between the anode and the cathode is fixed and arranged opposite to each other inside the arc tube whose central portion is swollen, and a voltage is applied between the anode and the cathode to generate an arc. In the electrode structure of the short arc discharge lamp to be generated,
A concave portion is provided at the anode tip portion facing the cathode, and the concave portion is
Occurs at the point where electrons emitted from the cathode are received
This is a short arc characterized by being formed so that the intensity of the electric field is close . According to this configuration, during discharge, the electrons emitted from the cathode are received by the concave portions of the anode, so that the degree to which the anode constituent material is repelled by the collision of the electrons is reduced. Therefore, consumption of the anode is reduced, and blackening inside the arc tube can be suppressed.
【００１２】請求項２の発明は、請求項１の発明におけ
る凹部を、陽極と陰極とを結ぶ中心線の周りに形成した
回転面で形成したものである。この構成によると、電子
が回転面に一様に入射するので、請求項１の効果に加え
て陽極先端部がほぼ均等に消耗するという利点がある。
また、前記回転面は、円錐面、球面、楕円面、円筒面又
は、これ等を２以上組み合わせたものであっても良い。According to a second aspect of the present invention, the concave portion according to the first aspect of the present invention is formed by a rotating surface formed around a center line connecting the anode and the cathode. According to this configuration, since the electrons are uniformly incident on the rotating surface, in addition to the effect of the first aspect, there is an advantage that the tip of the anode is almost uniformly consumed.
Further, the rotation surface may be a conical surface, a spherical surface, an elliptical surface, a cylindrical surface, or a combination of two or more of these.
【００１３】[0013]
【発明の実施の形態】以下、本発明の実施の形態を図面
を参照して説明する。図３（ａ）は半導体の配線パター
ンを画像形成するために使用される消費電力が５キロワ
ットのショートアーク型の水銀蒸気放電灯を示すもの
で、この放電灯は、石英ガラスでつくられ、かつ中央部
に膨出部１５を形成すると共に、この膨出部１５の両端
に封止管１６，１６を一体に形成した発光管１７と、前
記膨出部１５の内部の発光空間に対向配置した陽極１３
および陰極１１等によって構成されている。Embodiments of the present invention will be described below with reference to the drawings. FIG. 3 (a) shows a short arc type mercury vapor discharge lamp with a power consumption of 5 kilowatts used for forming an image of a semiconductor wiring pattern. This discharge lamp is made of quartz glass, and A bulging portion 15 is formed in the center, and a luminous tube 17 having sealing tubes 16 and 16 integrally formed at both ends of the bulging portion 15 and a luminous space inside the bulging portion 15 are disposed to face each other. Anode 13
And a cathode 11 and the like.
【００１４】封止管１６，１６の各端部には口金１８，
１８が設けてあって、この口金１８，１８と各電極１
１，１３の間は板厚が０．０２ｍｍ程度のモリブデン箔
（図示せず）によって接続されている。なお、発光管１
７の内部には、１ｍｇ／ｃｃの水銀と、不活性ガスとし
て作用する常温で０．３気圧のキセノンガス又はアルゴ
ンガスが封入されている。At each end of the sealing tubes 16, 16, a base 18,
18 and the bases 18 and 18 and each electrode 1 are provided.
Moles 1 and 13 are connected by a molybdenum foil (not shown) having a thickness of about 0.02 mm. The arc tube 1
7 is filled with 1 mg / cc of mercury and 0.3 atm of xenon gas or argon gas at room temperature acting as an inert gas.
【００１５】陽極１３はタングステンでつくられてい
て、図３（ｂ）に示すように先端部の平坦な端面１９の
中心部に球面状の凹部２０が設けられている。凹部２０
の直径Ｄは１０ｍｍ、凹部の深さＨは２ｍｍであり、陽
極１３と陰極１１間の距離Ｌは４ｍｍである。前記構成
の放電灯を、陽極を上にして垂直な姿勢で点灯し、この
放電灯が照射した波長３６５ｎｍの紫外線の放射強度を
長時間に亘って測定した。The anode 13 is made of tungsten. As shown in FIG. 3B, a spherical concave portion 20 is provided at the center of a flat end surface 19 at the tip. Recess 20
Has a diameter D of 10 mm, a depth H of the concave portion is 2 mm, and a distance L between the anode 13 and the cathode 11 is 4 mm. The discharge lamp having the above configuration was turned on in a vertical posture with the anode facing upward, and the radiation intensity of the ultraviolet light having a wavelength of 365 nm irradiated by the discharge lamp was measured over a long period of time.
【００１６】そして、測定値から発光効率（初期値を１
００％とした相対的な放射強度）の経時的変化を求め、
その結果を図４に実線の折れ線２２で示した。なお、図
４には、同じ消費電力をもった従来製品の発光効率の変
化を破線の折れ線２３で示した。From the measured values, the luminous efficiency (initial value is 1)
Change over time of the relative radiation intensity (assumed to be 00%)
The result is shown by a solid broken line 22 in FIG. In FIG. 4, a change in the luminous efficiency of the conventional product having the same power consumption is indicated by a broken line 23.
【００１７】図４に示すように、この発明の陽極構造に
よると、放電灯の寿命、すなわち発光効率が８５％に低
下するまでの使用時間が３８０時間となり、この使用時
間は従来のものに比べて大幅に延長されたことが理解で
きる。また、３８０時間使用したのちの陽極の消耗量は
図９に示す陽極のそれとほぼ同程度であった。As shown in FIG. 4, according to the anode structure of the present invention, the life of the discharge lamp, that is, the use time until the luminous efficiency is reduced to 85% is 380 hours, which is longer than that of the conventional one. It can be understood that it has been greatly extended. The consumption of the anode after 380 hours of use was almost the same as that of the anode shown in FIG.
【００１８】なお、凹部２０の直径Ｄが２．６ｍｍ、凹
部２０の深さＨが２ｍｍ、陽極１３と陰極１１間の距離
Ｌが４ｍｍである構成の放電灯を、陽極１３を上にして
垂直な姿勢で点灯し、この放電灯灯が照射した波長３６
５ｎｍの紫外線の放射強度を長時間に亘って測定した。
その結果、陽極１３の凹部２０は、その直径Ｄがわずか
に拡大しており、放電灯内壁には黒化が発生し、紫外線
放射強度も従来品に対してわずかに効果が認められる程
度にとどまった。A discharge lamp having a configuration in which the diameter D of the concave portion 20 is 2.6 mm, the depth H of the concave portion 20 is 2 mm, and the distance L between the anode 13 and the cathode 11 is 4 mm is vertically mounted with the anode 13 facing upward. In a different position, and the wavelength 36
The emission intensity of 5 nm UV was measured over a long period of time.
As a result, the diameter D of the concave portion 20 of the anode 13 is slightly enlarged, blackening occurs on the inner wall of the discharge lamp, and the intensity of ultraviolet radiation is only slightly reduced as compared with the conventional product. Was.
【００１９】また、凹部２０の直径Ｄが１０ｍｍ，凹部
２０の深さＨが０．５ｍｍ、陽極１３と陰極１１間の距
離Ｌが４ｍｍである構成の放電灯を陽極１３を上にして
垂直な姿勢で点灯し、前記放電灯と同様に紫外線の放電
灯強度を長時間に亘って測定した。その結果、陽極１３
の凹部２０は、その深さＨがわずかに拡大しており、放
電灯内壁には黒化が発生し、紫外線放射強度も従来品に
対してわずかに効果が認められる程度にとどまった。A discharge lamp having a configuration in which the diameter D of the concave portion 20 is 10 mm, the depth H of the concave portion 20 is 0.5 mm, and the distance L between the anode 13 and the cathode 11 is 4 mm is perpendicular to the discharge lamp. The lamp was turned on in the posture, and the intensity of the ultraviolet discharge lamp was measured over a long period of time in the same manner as in the discharge lamp. As a result, the anode 13
The concave portion 20 has a slightly increased depth H, blackening occurs on the inner wall of the discharge lamp, and the intensity of ultraviolet radiation is only small enough to be more effective than the conventional product.
【００２０】前記の測定結果から、陽極１３と陰極１１
の距離Ｌを一定にした場合、凹部２０の直径Ｄは、２．
６ｍｍ以上であることが望ましく、また、凹部２０の深
さＨは２ｍｍ以上であることが望ましいことが分かる。From the above measurement results, the anode 13 and the cathode 11
Is constant, the diameter D of the recess 20 is 2.
It can be seen that it is desirable that the depth H be 6 mm or more, and that the depth H of the recess 20 be 2 mm or more.
【００２１】図３（ｂ）に示す陽極の第１の変形を図５
に示す。この変形の陽極１３ａは、陽極先端部を載頭円
錐体に形成して、その端面に球面状の凹部２０を設けた
もので、それ以外は図３（ｂ）に示すものと変わるとこ
ろはない。同じく、陽極の第２の変形を図６に示す。こ
の変形の陽極１３ｂは、陽極先端部を載頭球面体に形成
して、その端面に球面状の凹部２０を設けたもので、そ
れ以外は図３（ｂ）に示すものと変わるところはない。A first modification of the anode shown in FIG.
Shown in The anode 13a of this modification is such that the tip end of the anode is formed as a frustoconical body, and a spherical concave portion 20 is provided on the end surface thereof. Other than that, there is no difference from that shown in FIG. . Similarly, a second variant of the anode is shown in FIG. The anode 13b of this modification is such that the tip of the anode is formed as a mounted spherical body and a spherical concave portion 20 is provided on the end surface thereof. Other than that, there is no difference from that shown in FIG. .
【００２２】同じく陽極の第３の変形を図７に示す。こ
の変形の陽極１３ｃは、陽極先端部を球面状に形成し
て、球面の頂部に球面状の凹部２０を設けたもので、そ
れ以外は図３（ｂ）に示すものと変わるところはない。FIG. 7 shows a third modification of the anode. The modified anode 13c is formed by forming the tip of the anode into a spherical shape and providing a spherical concave portion 20 at the top of the spherical surface. Other than that, there is no difference from that shown in FIG. 3B.
【００２３】なお、本発明は前記の発明の実施の形態に
のみ限定されるものではなく、例えば放電灯を使用する
際に、陽極を下に垂直な姿勢で点灯してもよいことや、
凹部の形状を、陽極と陰極とを結ぶ中心線の周りに形成
した回転面で形成し、その回転面を円錐面、球面、楕円
面、円筒面又は、これ等を２以上組み合わせたものとす
ることや、同一異種の回転面形状で一方を他方より小さ
くあるいは大きくした状態で重ねた形状の凹部として形
成する等、その他本発明の要旨を逸脱しない範囲内で種
々の変更を加え得ることは勿論である。The present invention is not limited to the above embodiment of the present invention. For example, when a discharge lamp is used, the anode may be turned on in a vertical position,
The shape of the concave portion is formed by a rotating surface formed around a center line connecting the anode and the cathode, and the rotating surface is a conical surface, a spherical surface, an elliptical surface, a cylindrical surface, or a combination of two or more of these. Of course, various other changes can be made without departing from the scope of the present invention, such as forming a concave portion having the same different kind of rotating surface shape and overlapping one another with one smaller or larger than the other. It is.
【００２４】[0024]
【発明の効果】以上述べたごとく、本発明のショートア
ーク型放電灯の陽極構造は、陽極の先端部に凹部を設
け、その凹部が、陰極から放出される電子を受け止める
点で発生する電界の強さを近づけるように形成したの
で、電流密度が分散され陽極の消耗が少なく、放電灯の
寿命を延長することができる。また、前記凹部を陽極と
陰極とを結ぶ中心線の周りに形成した回転面の構成とす
ることで、電子がその回転面に一様に入射でき、陽極先
端部がほぼ均等に消耗することができる。そのため、発
光管内の黒化を抑制することができる。 As described above, in the anode structure of the short arc type discharge lamp of the present invention, a recess is provided at the tip of the anode, and the recess receives electrons emitted from the cathode.
Since the intensity of the electric field generated at the point is made closer , the current density is dispersed , the consumption of the anode is reduced, and the life of the discharge lamp can be extended. Further, by forming the concave portion around the center line connecting the anode and the cathode, the rotating surface is formed so that electrons can be uniformly incident on the rotating surface and the tip of the anode can be consumed almost uniformly. it can. Therefore,
Blackening in the light tube can be suppressed.
【図１】発明の原理を説明するための電極の側面図であ
る。FIG. 1 is a side view of an electrode for explaining the principle of the invention.
【図２】同じく発明の原理を説明するための電極の側面
図である。FIG. 2 is a side view of an electrode for explaining the principle of the present invention.
【図３】（ａ）（ｂ）は本発明の実施の形態の一例であ
る陽極構造を装備した放電灯の切断側面図および陽極構
造の側面図である。FIGS. 3A and 3B are a cut-away side view and a side view of an anode structure of a discharge lamp equipped with an anode structure according to an embodiment of the present invention.
【図４】図３の放電灯の試験結果を説明する図である。4 is a diagram illustrating test results of the discharge lamp in FIG.
【図５】図３（ｂ）に示す陽極構造の第１の変形を示す
側面図である。FIG. 5 is a side view showing a first modification of the anode structure shown in FIG. 3 (b).
【図６】同じく第２の変形を示す側面図である。FIG. 6 is a side view showing a second modification.
【図７】同じく第３の変形を示す側面図である。FIG. 7 is a side view showing a third modification.
【図８】一般的なショートアーク型放電灯の切断側面図
である。FIG. 8 is a cut-away side view of a general short arc type discharge lamp.
【図９】従来の陽極構造の側面図である。FIG. 9 is a side view of a conventional anode structure.
１１ 陰極 １３，１３ａ，１３ｂ，１３ｃ 陽極 １５ 膨出部 １７ 発光管 ２０ 凹部 Ｄ 球面状凹部の直径 Ｈ 球面状凹部の深さ Ｌ 陰極と陽極間の距離 DESCRIPTION OF SYMBOLS 11 Cathode 13, 13a, 13b, 13c Anode 15 Swelling part 17 Arc tube 20 Recess D Diameter of spherical recess H Depth of spherical recess L Distance between cathode and anode
Claims (2)
と陰極の距離を一定にし対向して配置し、前記陽極と陰
極の間に電圧を印加してアークを発生させるショートア
ーク型放電灯の電極構造において、 陰極に対向する陽極先端部に凹部を設け、前記凹部は、
前記陰極から放出される電子を受け止める点で発生する
電界の強さを近づけるように形成したことを特徴とする
ショートアーク型放電灯の陽極構造。1. A short arc type discharger in which a distance between an anode and a cathode is fixed and opposed to each other at the center of an arc tube whose center is expanded, and a voltage is applied between the anode and the cathode to generate an arc. In the electrode structure of an electric lamp, a concave portion is provided at an anode tip portion facing a cathode, and the concave portion is
Occurs at the point where electrons emitted from the cathode are received
An anode structure of a short arc type discharge lamp, wherein the anode structure is formed so as to reduce the intensity of an electric field .
りに形成した回転面である請求項1に記載のショートア
ーク型放電灯の陽極構造2. The anode structure of a short arc type discharge lamp according to claim 1, wherein the recess is a rotating surface formed around a center line connecting the anode and the cathode.
Priority Applications (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| JP09082645A JP3136511B2 (en) | 1997-04-01 | 1997-04-01 | Anode structure of short arc type discharge lamp |
Applications Claiming Priority (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| JP09082645A JP3136511B2 (en) | 1997-04-01 | 1997-04-01 | Anode structure of short arc type discharge lamp |
Publications (2)
| Publication Number | Publication Date |
|---|---|
| JPH10283988A JPH10283988A (en) | 1998-10-23 |
| JP3136511B2 true JP3136511B2 (en) | 2001-02-19 |
Family
ID=13780176
Family Applications (1)
| Application Number | Title | Priority Date | Filing Date |
|---|---|---|---|
| JP09082645A Expired - Lifetime JP3136511B2 (en) | 1997-04-01 | 1997-04-01 | Anode structure of short arc type discharge lamp |
Country Status (1)
| Country | Link |
|---|---|
| JP (1) | JP3136511B2 (en) |
Cited By (1)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| DE102010024240A1 (en) | 2009-06-30 | 2011-01-05 | Ushio Denki K.K. | Anode for use in fluorescent tube in short arc-discharge lamp utilized as light source for exposure device that forms little switching circuit pattern, has boundary area distanced from anode middle axis in radial outward aligned manner |
Families Citing this family (5)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| KR20010112865A (en) * | 2000-06-15 | 2001-12-22 | 김병관 | Electrode Device for Gas Lamp |
| JP5278235B2 (en) * | 2009-08-03 | 2013-09-04 | ウシオ電機株式会社 | Short arc type discharge lamp |
| DE102010044259B4 (en) | 2009-09-15 | 2012-11-15 | Ushio Denki K.K. | Short-arc discharge lamp |
| JP4715966B2 (en) * | 2009-09-15 | 2011-07-06 | ウシオ電機株式会社 | Short arc type discharge lamp |
| JP6570398B2 (en) * | 2015-09-30 | 2019-09-04 | 株式会社オーク製作所 | Discharge lamp |
-
1997
- 1997-04-01 JP JP09082645A patent/JP3136511B2/en not_active Expired - Lifetime
Cited By (1)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| DE102010024240A1 (en) | 2009-06-30 | 2011-01-05 | Ushio Denki K.K. | Anode for use in fluorescent tube in short arc-discharge lamp utilized as light source for exposure device that forms little switching circuit pattern, has boundary area distanced from anode middle axis in radial outward aligned manner |
Also Published As
| Publication number | Publication date |
|---|---|
| JPH10283988A (en) | 1998-10-23 |
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