523780 A7 ___ B7 __ 五、發明説明（1 ) 【發明所屬之技術領域】 (請先閲讀背面之注意事項再填寫本頁) 本發明係關於一種短電弧型高壓放電燈，特別是關於 短電弧型高壓放電燈的電極的側面形狀。 【以往之技術】 近年來，短電弧型高壓放電燈，係在例如液晶彩色濾 光器的製程中也就是光解析工程中作爲光源來加以使用， 此時的放射光，係使用包含波長爲3 6 5 n m或者是波長 爲436nm的高亮度光譜。 另一方面，從市場面看來，所追求的是彩色濾光鏡的 大型化以及曝光時間的縮短化，於是短電弧型高壓放電燈 遂被要求增大放射光量，特別是期待增加波長爲3 6 5 .n m左右的放射光量。 短電弧型高壓放電燈的放射光量，係與對放電燈的輸 入電量成比例，這是在以往就已爲人所周知的。也就是說 ，若是對放電燈增加輸入電量的話，則可以增加放射光量 〇 經濟部智慧財產局員工消費合作社印製 在此，對於增加短電弧型高壓放電燈的輸入電量存在 著以下的方法。第一，伸長電極間的距離，使短電弧型高 壓放電燈的發光長度變長。第二，增加封入在放電燈內的 水銀量，使之在超高壓的狀態下點燈。第三，提高對放電 燈的輸入電流。 可是，前述的各種方法分別有各自的問題。 在第一種方法中，用伸長發光長度的方法，通常，和 I紙張尺度適用中國國家標準（CNS ) A4規格（210X297公釐） ' -4- 523780 A7 B7 五、發明説明（2 ) (請先閲讀背面之注意事項再填寫本頁) 所使用的點光源放電燈相比之下，發光部會變大。而在光 解析用的曝光裝置上作爲光源來使用的情況下’由&和^照 射光學系的關係中最好是用點光源，所以像這樣將發光長 加以伸長，而作爲該曝光裝置的光源成爲不同方向的話’ 則即使放射光量有所改善，在實際上也是不能使用的° 在第二種方法中，由於短電弧型高壓放電燈的內壓變 大，所以發光管的機械性強度會有問題。在以往的短電弧 型高壓放電燈中，被封在內部的7jC銀的點燈時的蒸氣壓大 多被設計成接近放電燈內壓強度上限的壓力，比此壓力更 高的高壓點燈會造成對短電弧型高壓放電燈的破壞。也就 是說，無法同時增加比以往短電弧型高壓放電燈的水銀封 入量，而同時以更超高壓的點燈方法來提高放射量來加以 使用。 經濟部智慧財產局員工消費合作社印製 再第三種方法中，若是放電燈電流增加的話，則陽極 前端部會因爲電子流的增加而被加熱而使陽極部的溫度上 昇。通常，在陽極所產生的熱，可以藉由陽極的熱傳導釋 放到外部，也可以從陽極的表面上藉由放射面釋放到外部 。可是，使放電燈電流增加的方法中，與藉由電子流增加 所導致的加熱相比之下，被朝向外部釋放出去的熱量並不 夠充份，結果，隨著陽極溫度的上升，會有促使陽極構件 熱蒸發、發光管的內壁會黑化、放電燈的壽命縮短等等的 問題發生。 爲了解決該問題，而提出了提升來自陽極的熱放射效 率，降低陽極溫度的方法。 本紙張尺度適用中國國家標準（CNS ) A4規格（210X297公釐） 經濟部智慧財產局員工消費合作社印製 523780 A7 __ B7_ 五、發明説明（3 ) 例如，在曰本特告昭第3 9 - 1 1 1 2 8號公報中， 揭示有在陽極側面裝設V字形溝槽的方法。具體的記載是 ，以1mm〜3mm左右的深度，且，裝設開口角度爲 9 0 °的冷卻溝槽，且，藉由使鎢燒結在該冷卻溝槽的表面 上，來更進一步提高來自該當陽極表面的熱放射。 可是，在這種方法中，由陽極的溫度會導致碳游離， 而使短電弧型高壓放電燈的發光管黑化，或者是碳移動到 電極前端而造成電極熔化的問題。 再者，在日本特開平9 — 2 3 1 9 4 6號公報中，揭 示有使鎢粉末燒結在陽極表面而提升電極表面的熱放射率 〇 在第9圖中雖然顯示了這樣的結構，但是在陽極（ 9 0 )的所定的表面領域上，形成有微粒子狀的鎢燒結層 (9 1 )。這種鎢微粒子的粒徑大約是0 . 1 // m到1 // m左右，作爲燒結層利用設置在陽極表面來增大表面積 。藉由這樣的構造，來提高來自陽極表面的熱放射量，降 低電極溫度。 不過，這種構造和不塗抹鎢粉末的狀態相比之下，雖 然可以增大來自電極的熱反射，但是當提高對放電燈的輸 入電量時會使該當電極的冷卻變得不安定，結果，會有從 電極的熱放射量不充份的問題。 【發明所欲解決之課題】 本發明所欲解決的課題，係針對用來使放射光量增大 本紙張尺度適用中國國家標準（CNS ) A4規格（210X297公釐） 一 — · ~ L-----------,——、玎.——1 0 (請先閲讀背面之注意事項再填寫本頁) 523780 Α7 Β7 五、發明説明（4 ) 的放電燈的輸入電力變大的短電弧放電燈，來改善由電極 所導致的熱放射特性，而有效地降低電極的溫度。 (請先閱讀背面之注意事項再填寫本頁) 然後，藉由有效地降低電極溫度，就可以抑制從陽極 前端部之電極構成物質的蒸發，而使之緩和，又，可以緩 和電極前端的耗損或熱變形，結果，就可以達到使放電燈 的發光以長時間地維持穩定的目的。 【解決課題之手段】 一種短電弧型局壓放電燈，係於發光管內具有一組電 極的短電弧型高壓放電燈，其特徵爲：在前述電極中至少 其中一方的電極上，其側面至少一部份上形成溝部，該溝 部的深度D爲該當電極直徑的1 2 %以內，且，溝部的深 .度D和節距P之間的關係爲D / P - 2。 又，前述溝部的特徵係由V字型的溝槽所構成。 又，前述溝槽底部以及/或者的特徵是頂部被設有曲 面。 經濟部智慧財產局員工消費合作社印製 又，前述電極的特徵係在前端具有錐體部，前述溝部 的特徵則是被形成在該錐體部上。 【發明的實施形態】 第1圖係表示短電弧型高壓放電燈之整體圖。 放電燈（1 0 )，係由發光管部（1 1 )和封止管部 (1 2 )所構成的，在發光管部（1 1 )中係由鎢所構成 的陽極（2 0 )和陰極（3 0 )兩者的前端以相距1 0 本紙張尺度適用中國國家標準（CNS ) A4規格（2ΐ〇χ297公釐)~~ 523780 經濟部智慧財產局員工消費合作社印製 A7 B7 五、發明説明（5 ) m m左右的程度相互對向配置著。陽極（2 0 )和陰極（ 3 0)，係分別地被埋設在封止管（1 2 )中，而和外部 端子（1 3 )通電連接著。 在發光管（1 1)中，係如氙、氬、氪等的稀有氣體 或者是將這些加以混合所成的封入氣體，以及水銀等的發 光物質加以封入。封入氣體的壓力，在封入時爲例如 0· 1〜10大氣壓，水銀封入量對發光管（11)的內 容積當量之重量爲1 0〜6 〇mg/ c c。 該放電燈係以例如定額5 Ο V、定額5 K W來加以點 燈。 第2圖係表示陽極（2 0 )的擴大圖，其中（a )係 表示陽極（2 0 )的形狀之側面圖，（b )和（c )係_ 示被形成於陽極側面的溝部的擴大剖面圖。 在第2 (a)圖中，陽極（20)係由前端部（21 )、錐體部（2 2 )、胴體部（2 3 )所構成。前端部（ 2 1 )爲平面狀，與陰極相對向。在錐體部（2 2 )上係 被裝設有將前端部（2 1 )和胴體部（2 3 )予以連結之 圓錐。然後，在胴體部（2 3 )上，其側面形成有v字形 的溝部（2 4 )。至於陽極，若以舉出數値爲例的話’則 胴體部（2 3)爲直徑0 25mm，長度爲45mm ’錐 體部（2 2 )的張開角度爲1 2 0 °，前端部（2 1 )的直 徑爲0 8 m m。 在第2 (b)圖中，溝部（24)係由凸部（25) 和凹部（2 6 )所構成的V字形構造，凸部（2 5 )的頂 本紙張尺度適用中國國家標準（CNS ) A4規格（210X 297公釐） ^^壯衣 ^ 訂 (請先閲讀背面之注意事項再填寫本頁) 8- 523780 經濟部智慧財產局員工消費合作社印製 A7 B7 五、發明説明（6 ) 點上形成了頂邰（2 7 )，凹部（2 6 )的底面上形成了 底部（2 8 )。又’鄰接的凸部（2 5 )的諸頂部（2 7 )間隔形成了溝槽的節距P，從頂部（2 7 )起到底部（ 2 8 )爲止的深度爲所形成的溝槽的深度d。圖中所示的 構造，係由凸部（2 5 )的頂部（2 7 )和凹部（2 6 ) 的底部（2 8 )所形成的尖銳的形狀，整體而言就形成了 完全的V字形結構。像這樣的V字形結構的優點，在於根 底粗大形狀安定，不會產生形狀的變化。若以舉出數値爲 例的話，則如溝槽構造的節距P爲〇 . 5 m m，如溝槽的 深度D爲1 · 5 m m，陽極（2 0 )的側面上4 〇 m m的 範圍內形成了 8 0個溝槽。 在桌2 ( c )圖中，雖係表示相同的胴體部（2 3 ) 的溝槽部的擴大圖，不過和（b )不同的是，.頂部（3 3 )和底部（3 4 )並不是尖銳的形狀，而是被形成爲曲面 狀。像這種形狀的優點，會在後續中提及，可以防止開始 點燈時的電場集中。 在此’關於被設於陽極的溝槽構造，並不只限定在第 2圖中所示的物件。 在第3 ( a )〜（e )圖中，係以例示溝槽構造的其 他的實施形態。 在第3 ( a )圖中，被設於陽極（2 〇 )的胴體部（ 2 3 )上的溝部（2 0 )的溝槽方向，並不是陽極（2 〇 )的圓周方向，而是被形成爲陽極（2 〇 )的伸展方向。 在第3 ( b )圖中，溝部（2 4 )並非被形成於胴體 本紙張尺度適用中國國家標準（CNS ) A4規格（210X297公釐） 批衣 Ί—--1T------- (請先閲讀背面之注意事項再填寫本頁) -9- 523780 經濟部智慧財產局員工消費合作社印製 A7 B7 五、發明説明（7 ) 部（2 3 )上而是被形成於錐體部（2 2 )上。又，溝部 (2 4 )也可以同時裝設在錐體部（2 2 )和胴體部（ 2 3 )上。 在第3 ( c )圖中，被裝設在胴體部（2 3 )上的溝 邰（2 4 )之溝槽方向係呈螺旋狀，溝槽係以連續性地連 結所形成的。 在第3 ( d )圖中，被設置於胴體部（2 3 )上的溝 口β ( 2 0 )係被形成爲網眼狀的物件。另外，溝槽方向並 不只限定於圖中所示，又，也可以將第3 ( c )圖中所示 的螺旋狀溝槽以兩條加以設成的形式來形成網眼狀的溝槽 〇 在第3 ( e )圖中，溝部（‘ 2 0 )係隨機地形成於胴 體部（2 3 )。這些係藉由將雷射光隨機地劃分照射，最 後在胴體部（2 3 )上形成不規則狀的溝槽。因此，雷射 照射係對胴體部（2 3 )的表面上的方向以不規則地予以 照射。 在本發明中所謂電極的「側面」並不單指胴體部，同 時也意指錐體部。又，在上述的實施例（第2 ( a )圖、 第3 (a)圖 '第3 (c)圖、第3 (d)圖、第3 (e )圖）中，溝部（2 4 )雖然是被設置在胴體部（2 3 ) 的前方部份，不過，既可以形成於胴體部（2 3 )的側面 全區域’也可以設置於特定的某一部份。 又’錐體部並不只限定在圓錐台形狀，也包含有曲面 狀的錐體部。 本紙張尺度適用中國國家標準（CNS ) A4規格（210X 297公釐） I ^wi ^ ^1T, (請先閲讀背面之注意事項再填寫本頁) -10- 523780 Α7 Β7 五、發明説明（8 ) (請先閲讀背面之注意事項再填寫本頁) 又’上述實施例中，雖然是以將溝部（2 4 )設置於 陽( 2 0 )上來作爲例示，不過，在陰極上也可以設置 同樣的溝部。再者，針對交流點燈的放電燈，可以在其中 一方電極或者是兩方上的電極同時裝設上述例示的溝部。 又’本發明的溝槽構造，並不只限定在上述的物件， 其他的構造也包含在其中 本發明的短電弧型高壓放電燈，雖然係利用將如上述 般的溝槽構造相對於電極加以設置，來改善來自該當電極 的熱放:射率’不過，進而言之，若制定了溝槽部的節距和 深度之間的關係，則可以使該效果更進一步的提升。 以下’雖就此點加以說明，不過，此處的電極形狀並 非圓柱形’而是考慮到在平板上形成了溝槽構造的模型。 .在第4圖中，平板（4 0 )上也形成了如第2圖中所示相 同的溝槽構造。 這種情況下，溝部（4 1 )的節距P、深度D和熱放 射率ε之間的關係可以用下述的數學式來表不。 經濟部智慧財產局員工消費合作社印製 ε = ε0/[1-(1-ε0){1-δίη(α/2)}]............(第 1 式） 在此’ 「e 0」爲材料固有的放射率，例如使用鎢來 作爲電極材料時的放射率約爲〇 · 4。又，「α」爲溝槽 部頂邰或者是底部所形成的角度。 而’以實效而言，α愈小則放射率ε就會愈大，値得 注意的是’ α値小所意指的是，相對於溝槽的深度d之節 本紙張尺度適用中國國家標準（CNS ) Α4規格（2歐297公董) ' --- -11 - 523780 A7 B7 五、發明説明（9 ) 距P的比率會愈大，也就是說，D / P會愈大。 (請先閲讀背面之注意事項再填寫本頁) 第5圖，由於係表示在第2圖中所示的溝槽構造中的 角度和熱放射率之間的關係，所以藉由第4圖中所示的平 板構造，可顯示以近似法所求得的計算結果。 然後，將溝槽的角度（頂部和底部）以1 〇 °、2 0 ° 、：3〇〇、4〇〇、50。、60〇、7〇。、8〇〇、9〇。 、1 8 0 ◦來加以變化的話，則求取當將溝槽作爲相同時的 溝槽深度D和節距P的比率D / P，進而，由上述第1式 來求取各別的熱放射率。 在此，所謂V字形溝槽的角度1 8 0 °係指沒有溝槽的 平面狀態。 該計算的結果，所顯示的是，裝設有V字形溝槽構造 的放射率遠比沒有裝設有V字形溝槽構造的放射率還要高 。又，若是V字形溝槽的角度若是在3 0 °以下的話，在溝 槽上的放射率就·可以達到0 . 7以上的數値。 其次，爲了證實根據上述計算所作的預測，而在放電 燈的電極上做了熱放射的測定實驗。 經濟部智慧財產局員工消費合作社印製 在該實驗中，係對直徑0 2 0 m m、全長4 0 m m的 圓筒狀的鎢，使溝槽節距共通爲0 . 5 m m，至於溝槽深 度 D ，則是以 〇 . 5mm、〇 . 75mm、1 . 〇mm、 1 · 5 m m加以變化的四種類的電極所作成。 然後，藉由將該四種電極以高頻加熱，使之昇溫到 2 0 0 0 °C，再來測定對各個電極的熱放射率。該測定， 係使用波長λ = 〇 . 6 8 // m的熱高溫計來進行。 本紙張尺度適用中國國家標準（CNS ) A4規格（210 X 297公釐） -12- 523780 A7 B7 五、發明説明（1〇 ) (請先閲讀背面之注意事項再填寫本頁) 在第6圖中所顯示的實驗結果，爲溝槽深度D和節距 P之間的關係，當P / D - 2時的放射率爲0 · 7，可知 這遠比不設溝槽時更具效果。 又，即使是用前述習知技術來說明的第9圖中所示的 塗布了鎢微粒子電極，當同樣地試著測定到熱放射率時’ 放射率約爲0 . 6左又的程度。 也就是說，在本發明的溝槽構造中以製作成P / D 2 2的這種結構，可以使該熱放射率提升到0 . 7，可知此 種方法遠比以往的塗布鎢微粒子的方法更爲優越。 又，即使是設有溝槽部的情況下，依溝槽角度的不同 ，有時會有比塗布鎢微粒子的方法效果更差的狀況出現（ 例如當P / D二1時），所以顯示不只是溝槽部的設置， 即使是其節距及深度也是極爲重要的。 加工溝槽部的方法，有藉由鑽石切割的方法、雷射光 照射法、電子束照射法。這些方法中，可以視溝槽的節距 ，而更具效果地加以使用。 經濟部智慧財產局員工消費合作社印製 例如，當節距約5 0 〇 // m以上溝槽深度爲節距的兩 倍以上時，最好是使用具有V字形的刃尖之鑽石切割法。 又，若是溝槽節距約爲1 5 0//m〜5 0 0//m，而 溝槽深度爲節距的2〜3倍左右的話，則藉由脈衝雷射的 雷射加工法較爲適宜。此時，形成如第2 ( c )圖中所示 的溝槽底部的曲面，可以藉由適當地選擇雷射光的焦點來 加工。 再者，溝槽部的節距若是約在1 5 0 // m以下的話， 本紙張尺度適用中國國家標準（CNS ) A4規格（210X297公釐） -13- 523780 A7 B7 五、發明説明（11) 藉由電子束加工則是最理想的。 (請先閲讀背面之注意事項再填寫本頁) 其次，說明關於具有本發明的電極之短電弧型高壓放 電燈的壽命。 茲先測定具有本發明溝槽構造的放電燈，和具有塗布 鎢粉末的電極之放電燈兩者的點燈時間和照度之間的關係 〇 本發明的放電燈，係使用定額輸入1 2 K W、定額電 流1 2 A、水銀封入量2 4 m g / c c、使用以氙氣來作 爲緩衝氣體，而陽極中，係直徑爲0 2 9 m m，全長6 0 m m的圓筒狀，前端部的直徑爲0 1 〇 m m，錐體部的張 開角度爲1 2 0度。溝槽構造係藉由雷射加工來進行，溝 槽的節距爲2 0 0 // m，溝槽的深度爲6 〇 〇 // m，如第 2 ( a )圖所示的構造。 又，用來對照用的放電燈，除了在陽極不形成溝槽部 而以塗布鎢的粉末來取代之外，係採用同一種的放電燈。 經濟部智慧財產局員工消費合作社印製 在第7圖中所顯示的實驗結果，縱軸係表示相對於點 燈開始時的照度之照度比率，縱軸係表示點燈所經過的時 間。 如圖所示，本發明之短電弧型高壓放電燈，與以往的 短電弧高壓放電燈相比之下，以照度維持率而言可以見到 顯著的改善。 換言之，以往的短電弧型高壓放電燈，在點燈2 〇 〇 小時後照度維持率會衰減到8 5 %以下，相對於此，本發 明之短電弧型高壓放電燈即使在點燈8 〇 〇小時之後，照 本紙張尺度適用中國國家標準（CNS ) A4規格（210X29?公釐） " ~ 一 -14- 523780 A7 B7 五、發明説明（12 ) 度維持率仍可維持在接近9 〇 %的數値。 (請先閲讀背面之注意事項再填寫本頁) 此係藉由在電極上施以溝槽構造，使得來自於陽極表 面的熱放射率提昇，由放電燈點燈所發生的熱有效地加以 放射’因此’陽極的溫度降低了，並且可以抑制從陽極來 的鎢等的飛散或蒸發，由結果可知，藉由防止朝這些發光 管的附著，而可以長時間維持高照度。 如上所述’藉由形成具有預定的溝槽深度和溝槽節距 之電極’可以使來自該當電極的熱放射顯著的提高，在此 ，利用溝槽構造，電極的實質上的截面積減小了，藉此， 從電極透過鉬箔或外部導向器的熱傳導所導致的熱放出機 率也就變低了。 一般而言，藉由熱傳導所導致的熱放出，係與電極的 截面積成比例，即使如本發明般地形成了溝槽構造，若是 相對於電極直徑之溝槽深度變得太大的話，則反而會使來 自電極的熱放射特性降低。 經濟部智慧財產局員工消費合作社印製 具體而言，在溝槽構造中將溝槽深度以相對於該當電 極的直徑更深入1 2 %地被裝設的話，則可知無法有效地 降低電極的溫度。 又，施加本發明的溝槽構造之短電弧型高壓放電燈， 雖然具有降低電極溫度和藉此具有優越的照度維持率的特 點，不過藉由設置溝槽，在’開始點燈時，有時會發生異常 放電，無法順利點燈的問題。 在第8圖中，係顯示溝槽的深度和發生異常放電的關 係，由此可知溝槽的深度愈深，異常放電的發生就會愈顯 本紙張尺度適用中國國家標準（CNS ) A4規格（210X297公釐)~~~ -15 - 523780 A7 ___B7 五、發明説明（13 ) 著。 (請先閲讀背面之注意事項再填寫本頁) 此原因一般認爲是，當溝槽部的前端也就是頂部爲銳 角時，電場容易集中，點燈初期所形成的電暈狀放電會被 形成於該前端頂部。又，當溝槽底部爲銳角時，藉由中空 效果，變得容易引起電軍狀放電。 在本發明中’爲了減低這種異常放電的發生，如第2 (c )圖所示’將溝的頂部或底部不形成尖銳狀改而形成 曲面狀爲佳。 像這樣的曲面形狀，若形成爲例如曲率半徑爲5 // m 左右的§舌即可。然後’像追樣的曲面形狀，由於意味著除 去了尖銳的前端，所以同樣地可以形成第3圖中任一種實 施形態的電極。 對設於這樣的溝槽部之曲面的加工，例如，對外周面 的銳角部施加拋光硏磨，然後，在濃度爲1 〇 %的燒鹼溶 液中利用施加電解硏磨來進行。又，對溝槽底部進形溝槽 加工，也可以將例如鑽石切斷砥石等的前端形狀事先製作 成施加了作爲半徑的形狀來予以形成。 經濟部智慧財產局員工消費合作社印製 又，也可以在真空中高溫下利用熱處理來形成。具體 而言，可以將V字形構造的溝槽用2 0 0 0 t 1 2 0分鐘 的熱處理來作成曲面。 另外，本發明的溝槽構造，對輸入電量高的放電燈特 別有效，具體而言，這是一種對放電燈的輸入電流爲 1 0 0安培以上的短電弧型放電燈而言很有效的構造。 本紙張尺度適财關家標準（CNS ) M規格（2ωχ297公釐） ' -16 - 523780 A7 B7 五、發明説明（14 ) 【發明之效果】 (請先閲讀背面之注意事項再填寫本頁) 如上述的說明，本發明之短電弧型高壓放電燈，在至 少其中一方的電極上，由於在其側面至少一部份上形成具 有一定節距和深度的溝部，所以就可以提高來自該電極的 熱放射率，既可以提高該當放電燈的輸入電量，又可以因 爲有效地熱放射而提高放射光量。 【圖式之簡單說明】 第1圖係表示短電弧型高壓放電燈之整體圖。 第2圖係表示本發明之短電弧型高壓放電燈的陽極擴 大圖。 第3圖係表示本發明之短電弧型高壓放電燈的陽極的 實施形態。 第4圖係表示用來說明本發明溝槽效果的圖面。 第5圖係表示本發明溝槽構造的效果。 第6圖係表示本發明溝槽構造的效果。 第7圖係表示本發明溝槽構造的效果。 經濟部智慧財產局員工消費合作社印製 第8圖係表示本發明溝槽構造的效果。 第9圖表示習知的電極構造。 【符號說明】 1〇：短電弧型高壓放電燈 1 1 :發光管部 1 2 :封止管部 本紙張尺度適用中國國家標準（CNS ) A4規格（210X297公釐） -17- 523780 A7 B7 五、發明説明（15 ) 1 3 .金屬泊 1 4 :外部導線 經濟部智慧財產局員工消費合作社印製523780 A7 ___ B7 __ V. Description of the invention (1) [Technical field to which the invention belongs] (Please read the precautions on the back before filling out this page) The present invention relates to a short-arc high-pressure discharge lamp, especially about a short-arc type The side shape of the electrode of a high-pressure discharge lamp. [Previous technology] In recent years, short-arc high-pressure discharge lamps have been used as a light source in, for example, the process of liquid crystal color filters, that is, in the light analysis process. At this time, the emitted light has a wavelength of 3 inclusive. 65 5 nm or a high-brightness spectrum with a wavelength of 436 nm. On the other hand, from the perspective of the market, the size of color filters and the reduction of exposure time are being pursued. Therefore, short-arc high-pressure discharge lamps are required to increase the amount of emitted light, especially to increase the wavelength to 3 Amount of emitted light around 6 5 .nm. The amount of light emitted by a short-arc high-pressure discharge lamp is proportional to the amount of power input to the discharge lamp, and this has been known in the past. In other words, if the input power to the discharge lamp is increased, the amount of radiated light can be increased. ○ Printed by the Consumer Cooperatives of the Intellectual Property Bureau of the Ministry of Economic Affairs. Here are the following methods to increase the input power of short-arc high-pressure discharge lamps. First, the distance between the electrodes is extended to make the light emission length of the short-arc high-pressure discharge lamp longer. Second, increase the amount of mercury enclosed in the discharge lamp so that it lights up under ultra-high voltage. Third, increase the input current to the discharge lamp. However, each of the aforementioned methods has its own problems. In the first method, the method of extending the luminous length is usually applied to the Chinese paper standard (CNS) A4 (210X297 mm) and I paper size. -4- 523780 A7 B7 V. Description of the invention (2) (please (Please read the precautions on the back before filling out this page.) Compared to the point light source discharge lamp used, the light emitting part becomes larger. When used as a light source in an exposure device for photoanalysis, it is best to use a point light source in the relationship between & and ^ irradiation optics, so the light emission length is extended as this, If the light source is in a different direction, 'even if the amount of emitted light is improved, it cannot be used in practice. ° In the second method, the internal pressure of the short-arc high-pressure discharge lamp increases, so the mechanical strength of the arc tube something wrong. In the conventional short-arc high-pressure discharge lamps, the vapor pressure of 7jC silver sealed inside was mostly designed to be a pressure close to the upper limit of the internal pressure intensity of the discharge lamp. Destruction of short arc type high pressure discharge lamps. That is to say, it is not possible to increase the amount of mercury contained in a conventional short-arc high-pressure discharge lamp at the same time, and at the same time to use a more ultra-high-voltage lighting method to increase the amount of radiation used. Printed by the Consumer Cooperative of the Intellectual Property Bureau of the Ministry of Economic Affairs In the third method, if the discharge lamp current is increased, the anode front end portion will be heated due to the increase in electron flow, which will increase the temperature of the anode portion. Generally, the heat generated at the anode can be released to the outside by the heat conduction of the anode, or it can be released to the outside from the surface of the anode through the radiation surface. However, in the method for increasing the discharge lamp current, the amount of heat released to the outside is not sufficient compared with the heating caused by the increase in the electron flow. As a result, as the anode temperature rises, it will promote the Problems such as thermal evaporation of the anode member, blackening of the inner wall of the arc tube, shortening of the life of the discharge lamp, and the like occur. In order to solve this problem, a method of increasing the heat radiation efficiency from the anode and reducing the temperature of the anode has been proposed. This paper size applies the Chinese National Standard (CNS) A4 specification (210X297 mm) printed by the Consumer Cooperatives of the Intellectual Property Bureau of the Ministry of Economic Affairs 523780 A7 __ B7_ V. Description of the invention (3) For example, in the Japanese Special Publication No. 3 9- Japanese Unexamined Patent Publication No. 1 1 2 8 discloses a method of installing a V-shaped groove on the anode side. The specific description is that a cooling groove with an opening angle of 90 ° is installed at a depth of about 1 mm to 3 mm, and the tungsten groove is sintered on the surface of the cooling groove to further improve the performance Heat radiation from the anode surface. However, in this method, the temperature of the anode causes carbon to be liberated, so that the arc tube of the short-arc high-pressure discharge lamp is blackened, or the carbon moves to the front end of the electrode and causes the electrode to melt. Furthermore, Japanese Patent Application Laid-Open No. 9-2 3 1 9 4 6 discloses that a tungsten powder is sintered on the surface of the anode to increase the thermal emissivity of the electrode surface. Although such a structure is shown in FIG. 9, A fine particle-like tungsten sintered layer (9 1) is formed on a predetermined surface area of the anode (9 0). The particle size of this tungsten fine particle is about 0.1 // m to 1 // m, and it is used as a sintering layer to increase the surface area by being disposed on the anode surface. With this structure, the amount of heat radiation from the anode surface is increased, and the electrode temperature is reduced. However, in comparison with the state where the tungsten powder is not applied, this structure can increase the heat reflection from the electrode, but when the input power to the discharge lamp is increased, the cooling of the electrode becomes unstable. As a result, There is a problem that the amount of heat emitted from the electrode is insufficient. [Problem to be solved by the invention] The problem to be solved by the present invention is to increase the amount of radiated light. The paper size is applicable to the Chinese National Standard (CNS) A4 specification (210X297 mm). --------, —— 、 玎 .—— 1 0 (Please read the precautions on the back before filling this page) 523780 Α7 Β7 V. Description of the invention (4) The input power of the discharge lamp becomes large Short arc discharge lamp to improve the heat radiation characteristics caused by the electrode and effectively reduce the temperature of the electrode. (Please read the precautions on the back before filling in this page.) Then, by effectively lowering the electrode temperature, it is possible to suppress the evaporation of the electrode constituent material from the anode front end, so as to ease it, and to reduce the wear on the electrode front end. Or thermal deformation, as a result, the purpose of maintaining the light emission of the discharge lamp for a long time can be achieved. [Means for solving the problem] A short-arc partial pressure discharge lamp is a short-arc high-pressure discharge lamp having a set of electrodes in a light-emitting tube, characterized in that at least one of the electrodes has a side surface of at least one of the electrodes. A groove is formed on a part, and the depth D of the groove is within 12% of the diameter of the electrode, and the relationship between the depth D of the groove and the pitch P is D / P-2. The feature of the groove portion is a V-shaped groove. The bottom and / or the groove is characterized in that the top is provided with a curved surface. Printed by the Consumer Cooperative of the Intellectual Property Bureau of the Ministry of Economic Affairs. The electrode is characterized by having a tapered portion at the front end, and the groove is characterized by being formed on the tapered portion. [Embodiment of the invention] Fig. 1 is an overall view showing a short-arc high-pressure discharge lamp. The discharge lamp (1 0) is composed of a light-emitting tube portion (1 1) and a sealing tube portion (1 2). In the light-emitting tube portion (1 1), an anode (2 0) composed of tungsten and The front ends of the cathode (30) are separated by 10. This paper size is applicable to the Chinese National Standard (CNS) A4 specification (2ΐ〇χ297mm) ~~ 523780 Printed by the Consumer Cooperative of the Intellectual Property Bureau of the Ministry of Economic Affairs A7 B7 V. Invention Note that the degree of (5) mm is arranged facing each other. The anode (20) and the cathode (30) are respectively buried in the sealing tube (12), and are electrically connected to the external terminal (13). In the light-emitting tube (11), a rare gas such as xenon, argon, krypton, or the enclosed gas formed by mixing these, and a light-emitting substance such as mercury are enclosed. The pressure of the enclosed gas is, for example, 0.1 to 10 atmospheres at the time of encapsulation, and the weight of the enclosed mercury amount to the internal volume equivalent of the light-emitting tube (11) is 10 to 60 mg / c c. This discharge lamp is lit at, for example, a rating of 50 V and a rating of 5 KW. FIG. 2 is an enlarged view of the anode (20), where (a) is a side view showing the shape of the anode (20), and (b) and (c) are _ shows an enlargement of a groove formed on the side of the anode Sectional view. In Fig. 2 (a), the anode (20) is composed of a front end portion (21), a cone portion (2 2), and a carcass portion (2 3). The front end portion (2 1) is planar and faces the cathode. The cone portion (2 2) is provided with a cone connecting the front end portion (2 1) and the carcass portion (2 3). Then, a v-shaped groove (2 4) is formed on the side of the corpus callosum (2 3). As for the anode, if you take a few examples as an example, then the carcass part (23) has a diameter of 0 25mm and a length of 45mm. The opening angle of the cone part (2 2) is 1 2 0 °, and the front end part (2 1) The diameter is 0 8 mm. In Fig. 2 (b), the groove portion (24) is a V-shaped structure composed of the convex portion (25) and the concave portion (2 6), and the top paper size of the convex portion (2 5) applies the Chinese national standard (CNS ) A4 size (210X 297mm) ^^ Zhuangyi ^ (Please read the precautions on the back before filling out this page) 8- 523780 Printed by the Consumers ’Cooperative of the Intellectual Property Bureau of the Ministry of Economic Affairs A7 B7 V. Invention Description (6) A vertex (2 7) is formed on the point, and a bottom (2 8) is formed on the bottom surface of the recess (2 6). Also, the tops (2 7) of the adjacent convex portions (2 5) form the pitch P of the grooves, and the depth from the tops (2 7) to the bottoms (2 8) is the depth of the grooves formed. Depth d. The structure shown in the figure is a sharp shape formed by the top (2 7) of the convex portion (2 5) and the bottom (2 8) of the concave portion (2 6). As a whole, it forms a complete V shape. structure. The advantage of a V-shaped structure like this is that the underlying shape is stable and does not change shape. For example, the pitch P of the trench structure is 0.5 mm, the depth D of the trench is 1.5 mm, and the range of 4 mm on the side of the anode (20) is given as an example. 80 grooves were formed in it. In Table 2 (c), although the enlarged view shows the groove part of the same carcass part (2 3), the difference from (b) is that the top (3 3) and bottom (3 4) are combined. It is not a sharp shape but is formed into a curved shape. The advantages of this shape will be mentioned later, and it is possible to prevent the electric field from being concentrated at the start of lighting. Here, the trench structure provided on the anode is not limited to only those shown in FIG. 2. In FIGS. 3 (a) to (e), other embodiments of the trench structure are illustrated. In FIG. 3 (a), the groove direction of the groove portion (20) provided on the carcass portion (23) of the anode (20) is not the circumferential direction of the anode (20), but is Formed as the extension direction of the anode (20). In Figure 3 (b), the groove (2 4) is not formed on the carcass. The paper size is applicable to the Chinese National Standard (CNS) A4 specification (210X297 mm). (Please read the precautions on the back before filling out this page) -9- 523780 Printed by the Consumer Cooperatives of the Intellectual Property Bureau of the Ministry of Economic Affairs A7 B7 V. The description of the invention (7) The part (2 3) is formed in the cone part (2 2). In addition, the groove portion (2 4) may be installed on the cone portion (2 2) and the carcass portion (2 3) at the same time. In Fig. 3 (c), the groove direction of the groove (2 4) installed on the carcass portion (2 3) is spiral, and the grooves are formed by continuous connection. In Fig. 3 (d), the groove opening β (20) provided on the corpus callosum (2 3) is a mesh-shaped object. In addition, the groove direction is not limited to the one shown in the figure, and the spiral groove shown in FIG. 3 (c) may be formed in two to form a mesh groove. In Fig. 3 (e), the groove portion ('2 0) is randomly formed in the corpus callosum portion (2 3). These are randomly divided and irradiated with laser light, and finally an irregular groove is formed in the carcass part (2 3). Therefore, the laser irradiation is irradiated irregularly to the direction on the surface of the carcass body (2 3). In the present invention, the "side" of the electrode does not refer only to the corpus callosum, but also means the pyramidal portion. Further, in the above-mentioned embodiment (FIG. 2 (a), FIG. 3 (a), FIG. 3 (c), FIG. 3 (d), and FIG. 3 (e)), the groove portion (2 4) Although it is provided in the front part of the carcass part (2 3), it may be formed in the whole side area of the carcass part (2 3) or in a specific part. The 'taper portion is not limited to a truncated cone shape, but also includes a curved portion. This paper size applies to Chinese National Standard (CNS) A4 specification (210X 297 mm) I ^ wi ^ ^ 1T, (Please read the precautions on the back before filling this page) -10- 523780 Α7 Β7 V. Description of the invention (8 ) (Please read the precautions on the back before filling in this page) In the above-mentioned embodiment, although the groove portion (2 4) is set on the anode (20) as an example, the same can be provided on the cathode. Groove section. Furthermore, for the discharge lamp for AC lighting, the grooves as exemplified above may be provided on one or both electrodes at the same time. The trench structure of the present invention is not limited to the above-mentioned objects. Other structures are also included in the short-arc high-pressure discharge lamp of the present invention. Although the trench structure as described above is provided for the electrode, In order to improve the thermal radiation from the current electrode: the emissivity '. However, if the relationship between the pitch and the depth of the groove portion is established, this effect can be further improved. Although "the point is described below, the electrode shape here is not cylindrical", but a model in which a groove structure is formed in a flat plate is considered. In Fig. 4, the same groove structure as shown in Fig. 2 is also formed on the flat plate (40). In this case, the relationship between the pitch P, the depth D, and the thermal radiation rate ε of the groove portion (4 1) can be expressed by the following mathematical formula. Printed by the Consumer Cooperative of the Intellectual Property Bureau of the Ministry of Economic Affairs ε = ε0 / [1- (1-ε0) {1-δίη (α / 2)}] ............ (Formula 1) Here, "" e0 "is the intrinsic emissivity of the material. For example, when tungsten is used as the electrode material, the emissivity is about 0.4. In addition, "α" is an angle formed by the top or bottom of the groove portion. And 'in practical terms, the smaller the α, the greater the emissivity ε, it should be noted that' α small means that the section d relative to the depth of the groove d applies to Chinese paper standards (CNS) Α4 specification (2 Euro 297 directors) '--- -11-523780 A7 B7 V. Description of the invention (9) The larger the ratio from P, that is, the larger D / P will be. (Please read the precautions on the back before filling in this page.) Figure 5 shows the relationship between the angle and thermal emissivity in the trench structure shown in Figure 2. The flat plate structure shown shows the calculation results obtained by the approximation method. Then, the angles (top and bottom) of the grooves were changed to 10 °, 20 °, 300, 400, 50. 60, 70. , 800, 90. And 1 8 0 ◦ If the grooves are made the same, the ratio D / P of the groove depth D and the pitch P is obtained, and the respective heat radiation is obtained from the above-mentioned first equation. rate. Here, the angle 180 ° of the V-shaped groove refers to a planar state without the groove. The result of this calculation shows that the emissivity of the structure with the V-shaped groove structure is much higher than that of the structure without the V-shaped groove structure. If the angle of the V-shaped groove is 30 ° or less, the emissivity on the groove can reach a value of 0.7 or more. Secondly, in order to confirm the prediction made based on the above calculations, a heat radiation measurement experiment was performed on the electrodes of the discharge lamp. Printed by the Consumer Cooperative of the Intellectual Property Bureau of the Ministry of Economic Affairs in this experiment, the cylindrical tungsten with a diameter of 0 20 mm and a total length of 40 mm was used to make the groove pitch common to 0.5 mm, as for the groove depth D is made of four types of electrodes with 0.5 mm, 0.75 mm, 1.0 mm, and 1.5 mm. Then, the four electrodes were heated at a high frequency to raise the temperature to 2000 ° C, and the thermal emissivity of each electrode was measured. This measurement was performed using a thermal pyrometer having a wavelength of λ = 0.68 // m. This paper size applies to Chinese National Standard (CNS) A4 (210 X 297 mm) -12- 523780 A7 B7 V. Description of the invention (1〇) (Please read the precautions on the back before filling this page) Figure 6 The experimental results shown in the figure are the relationship between the groove depth D and the pitch P. The emissivity at P / D-2 is 0 · 7, which shows that this is far more effective than without grooves. In addition, even if the tungsten fine particle coated electrode shown in Fig. 9 described by the conventional technique is used, the thermal emissivity is measured in the same manner. The emissivity is about 0.6. In other words, in the trench structure of the present invention, the structure made of P / D 2 2 can increase the thermal emissivity to 0.7. It can be seen that this method is far more than the conventional method of coating tungsten particles. More superior. In addition, even when the groove portion is provided, depending on the groove angle, the effect may be worse than the method of applying tungsten fine particles (for example, when P / D 2 is 1). It is only the placement of the grooves that is extremely important even the pitch and depth. Examples of the method for processing the grooves include a diamond cutting method, a laser light irradiation method, and an electron beam irradiation method. These methods can be used more effectively depending on the pitch of the groove. Printed by the Consumer Cooperative of the Intellectual Property Bureau of the Ministry of Economy In addition, if the groove pitch is about 150 // m ~ 50 0 // m, and the groove depth is about 2 ~ 3 times the pitch, the laser processing method of pulse laser is used for comparison. As appropriate. At this time, the curved surface at the bottom of the groove as shown in Fig. 2 (c) can be formed by appropriately selecting the focus of the laser light. In addition, if the pitch of the groove portion is less than about 15 0 // m, the paper size applies the Chinese National Standard (CNS) A4 specification (210X297 mm) -13- 523780 A7 B7 V. Description of the invention (11 ) Electron beam machining is ideal. (Please read the precautions on the back before filling this page.) Next, the life of the short-arc high-pressure discharge lamp with the electrode of the present invention will be described. First, the relationship between the lighting time and illuminance of a discharge lamp having a trench structure of the present invention and a discharge lamp having an electrode coated with tungsten powder is measured. The discharge lamp of the present invention uses a fixed input of 1 2 KW, The rated current is 1 2 A, the amount of mercury enclosed is 24 mg / cc, and xenon is used as the buffer gas. The anode has a cylindrical shape with a diameter of 0 2 9 mm and a total length of 60 mm. The diameter of the front end is 0. 10mm, the opening angle of the cone is 120 °. The trench structure is performed by laser processing. The pitch of the trench is 2 0 // // m, and the depth of the trench is 6 0 0 // m. The structure is shown in Fig. 2 (a). The discharge lamp used for comparison is the same type of discharge lamp except that instead of forming a groove portion on the anode, a tungsten-coated powder is used instead. Printed by the Employees' Cooperative of the Intellectual Property Bureau of the Ministry of Economic Affairs. In the experimental results shown in Figure 7, the vertical axis represents the illuminance ratio relative to the illuminance at the start of lighting, and the vertical axis represents the elapsed time of lighting. As shown in the figure, the short-arc high-pressure discharge lamp of the present invention can significantly improve the illuminance maintenance ratio compared with the conventional short-arc high-pressure discharge lamp. In other words, the conventional short-arc high-pressure discharge lamp attenuates the illuminance maintenance rate to less than 85% after 2000 hours of lighting. In contrast, the short-arc high-pressure discharge lamp of the present invention is turned on even when it is turned on. Hours later, the Chinese National Standard (CNS) A4 specification (210X29? Mm) will be applied according to the paper size " ~ -14- 523780 A7 B7 V. Description of the invention (12) The degree maintenance rate can still be maintained close to 90%的 数 値。 of numbers. (Please read the precautions on the back before filling this page) This is to increase the thermal emissivity from the anode surface by applying a groove structure to the electrode, and the heat generated by the discharge lamp is effectively radiated. As a result, the temperature of the anode is reduced, and scattering or evaporation of tungsten or the like from the anode can be suppressed. As a result, it can be seen that by preventing adhesion to these light-emitting tubes, high illuminance can be maintained for a long time. As described above, 'by forming an electrode having a predetermined groove depth and a groove pitch', the heat radiation from the electrode can be significantly improved. Here, the groove structure reduces the substantial cross-sectional area of the electrode. As a result, the probability of heat release due to heat conduction from the electrode through the molybdenum foil or the external guide is reduced. Generally speaking, the heat release caused by heat conduction is proportional to the cross-sectional area of the electrode. Even if a trench structure is formed as in the present invention, if the depth of the trench with respect to the diameter of the electrode becomes too large, Instead, the heat radiation characteristics from the electrodes are reduced. Printed by the Consumer Cooperative of the Intellectual Property Bureau of the Ministry of Economic Affairs. Specifically, if the groove depth is set to be 12% deeper than the diameter of the electrode in the groove structure, it can be seen that the temperature of the electrode cannot be effectively reduced. . In addition, the short-arc high-pressure discharge lamp to which the trench structure of the present invention is applied has the characteristics of lowering the electrode temperature and thereby having an excellent illuminance maintenance rate. An abnormal discharge may occur and the lighting may not be performed smoothly. In Figure 8, the relationship between the depth of the groove and the occurrence of abnormal discharge is shown. It can be seen that the deeper the depth of the groove, the more obvious the occurrence of abnormal discharge. This paper is applicable to the Chinese National Standard (CNS) A4 specification ( 210X297 mm) ~~~ -15-523780 A7 ___B7 V. Description of Invention (13). (Please read the precautions on the back before filling this page.) This reason is generally believed that when the front end of the groove part, that is, the top part, is at an acute angle, the electric field is easy to concentrate, and the corona discharge formed at the initial stage of lighting will be formed. On top of the front end. In addition, when the bottom of the trench has an acute angle, the hollow effect makes it easy to cause electrical discharge. In the present invention, in order to reduce the occurrence of such an abnormal discharge, as shown in Fig. 2 (c), it is preferable that the top or bottom of the groove is not formed into a sharp shape and is formed into a curved shape. A curved surface like this may be formed as a § tongue with a radius of curvature of about 5 // m, for example. Then, the shape of the curved surface like the chase means that the sharp tip is removed, so that an electrode of any of the embodiments shown in FIG. 3 can be formed in the same manner. The processing of the curved surface provided in such a groove portion is performed by, for example, polishing and honing the acute corner portion of the outer peripheral surface, and then applying electrolytic honing in a caustic soda solution having a concentration of 10%. In addition, the groove bottom may be formed by forming a tip shape such as a diamond cut vermiculite into a shape having a radius applied thereto in advance. Printed by the Consumer Cooperatives of the Intellectual Property Bureau of the Ministry of Economic Affairs. It can also be formed by heat treatment under high temperature in a vacuum. Specifically, a V-shaped groove can be formed into a curved surface by heat treatment at 2000 to 1220 minutes. In addition, the trench structure of the present invention is particularly effective for a discharge lamp having a high input power. Specifically, it is a structure that is very effective for a short arc type discharge lamp having an input current of 100 amperes or more. . This paper is suitable for financial standards (CNS) M specifications (2ωχ297 mm) '-16-523780 A7 B7 V. Description of the invention (14) [Effect of the invention] (Please read the precautions on the back before filling this page) As described above, in the short-arc high-pressure discharge lamp of the present invention, since grooves having a certain pitch and depth are formed on at least one part of the side surface of at least one of the electrodes, the Thermal emissivity can not only increase the input power of the discharge lamp, but also increase the amount of emitted light due to effective thermal radiation. [Brief description of the drawings] Fig. 1 is an overall view of a short arc high pressure discharge lamp. Fig. 2 is an enlarged view showing an anode of a short-arc high-pressure discharge lamp according to the present invention. Fig. 3 shows an embodiment of an anode of a short-arc high-pressure discharge lamp according to the present invention. Fig. 4 is a drawing for explaining the effect of the groove of the present invention. Fig. 5 shows the effect of the trench structure of the present invention. Fig. 6 shows the effect of the trench structure of the present invention. Fig. 7 shows the effect of the trench structure of the present invention. Printed by the Consumer Cooperatives of the Intellectual Property Bureau of the Ministry of Economic Affairs. Figure 8 shows the effect of the trench structure of the present invention. Fig. 9 shows a conventional electrode structure. [Symbol description] 10: Short arc high pressure discharge lamp 1 1: Luminous tube section 1 2: Sealed tube section The paper size applies the Chinese National Standard (CNS) A4 specification (210X297 mm) -17- 523780 A7 B7 5 、 Explanation of invention (15) 1 3 .Metal parking 1 4: Printed by the Consumer Cooperative of the Intellectual Property Bureau of the Ministry of Economic Affairs
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部部部 距度 極端體體部部部部部部節深 陽前錐胴溝凸凹頂底陰槽槽 (請先閲讀背面之注意事項再填寫本頁) 本紙張尺度適用中國國家標準（CNS ) A4規格（210X297公釐） -18-Partial part pitch Extreme body part Partial part Deep part Anterior conical sulcus Concave concave bottom top female slot (Please read the precautions on the back before filling this page) This paper size applies to Chinese National Standard (CNS) A4 specifications (210X297 mm) -18-