CN105431922A - Discharge lamp, method for producing discharge lamp, and electrode for discharge lamp - Google Patents
Discharge lamp, method for producing discharge lamp, and electrode for discharge lamp Download PDFInfo
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- CN105431922A CN105431922A CN201480041336.0A CN201480041336A CN105431922A CN 105431922 A CN105431922 A CN 105431922A CN 201480041336 A CN201480041336 A CN 201480041336A CN 105431922 A CN105431922 A CN 105431922A
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- H—ELECTRICITY
- H01—ELECTRIC ELEMENTS
- H01J—ELECTRIC DISCHARGE TUBES OR DISCHARGE LAMPS
- H01J61/00—Gas-discharge or vapour-discharge lamps
- H01J61/02—Details
- H01J61/04—Electrodes; Screens; Shields
- H01J61/06—Main electrodes
- H01J61/073—Main electrodes for high-pressure discharge lamps
- H01J61/0732—Main electrodes for high-pressure discharge lamps characterised by the construction of the electrode
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- H—ELECTRICITY
- H01—ELECTRIC ELEMENTS
- H01J—ELECTRIC DISCHARGE TUBES OR DISCHARGE LAMPS
- H01J61/00—Gas-discharge or vapour-discharge lamps
- H01J61/84—Lamps with discharge constricted by high pressure
- H01J61/86—Lamps with discharge constricted by high pressure with discharge additionally constricted by close spacing of electrodes, e.g. for optical projection
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- H—ELECTRICITY
- H01—ELECTRIC ELEMENTS
- H01J—ELECTRIC DISCHARGE TUBES OR DISCHARGE LAMPS
- H01J9/00—Apparatus or processes specially adapted for the manufacture, installation, removal, maintenance of electric discharge tubes, discharge lamps, or parts thereof; Recovery of material from discharge tubes or lamps
- H01J9/02—Manufacture of electrodes or electrode systems
- H01J9/04—Manufacture of electrodes or electrode systems of thermionic cathodes
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- Engineering & Computer Science (AREA)
- Manufacturing & Machinery (AREA)
- Discharge Lamp (AREA)
- Physics & Mathematics (AREA)
- Plasma & Fusion (AREA)
- Chemical & Material Sciences (AREA)
- Analytical Chemistry (AREA)
Abstract
The objective of the present invention is to form electrodes with improved bonding strength in electrodes that are formed by solid-phase bonding a plurality of members. A cathode (20) comprising a distal end-side metal member (20A) and a rear end-side metal member (20B) is formed by solid-phase bonding and machining. On the tapered surface (20Q) of the cathode formed during machining, a grooved part (R) comprising fine grooves (r) and wide grooves formed by laser irradiation is formed so as to straddle the bonding surface (S1). At this time, machining is carried out in such a manner that scratches occur in the metal member (20B), but do not occur in the metal member (20A).
Description
Technical field
The present invention relates at middle discharge lamps used such as exposure devices, particularly relate to the structure of the electrode engaged by multiple metal parts.
Background technology
In short arc discharge lamp, the illumination of high brightness is mapped to the exposure object things such as substrate.Due to the maximization of exposure object thing, also in order to improve output, requiring the high output of discharge lamp, being accompanied by this, require the increase of rated consumption power.
When realizing high-power, in the existing electrode structure based on single metal, electronic emission, Thermal release, durability etc. are affected.In addition, the weight due to electrode becomes heavy, and the load of electrode support rod etc. is large.
Therefore, propose multiple metal bond to form the scheme of electrode.Such as, by the electrode leading section be made up of the thorium tungsten etc. containing thorium with the rear main part solidstate bonding to be made up of pure tungsten etc. to form electrode (with reference to patent documentation 1,2).
Prior art document
Patent documentation
Patent documentation 1: Japanese Unexamined Patent Publication 2011-154927 publication
Patent documentation 2: Japanese Unexamined Patent Publication 2011-070823 publication
Summary of the invention
Invent problem to be solved
When different metal solidstate bondings is formed electrode, due to the difference etc. of coefficient of thermal expansion, easily near the outer rim on composition surface, produce gap along with heating, cooling when engaging.If electrode becomes high temperature when lamp is lighted, then likely gap enlargement and cause electrode damaged.In addition, even if by the electrode of identical metal parts solidstate bonding, the gap of wedge shape also can be formed near composition surface.
Thus, in the electrode formed by solidstate bonding, need to improve the bond strength near composition surface.
For the means of dealing with problems
Discharging lamps and lanterns of the present invention is standby: discharge tube; And pair of electrodes, they are configured in discharge tube, and at least one electrode is formed by by the electrode of front parts and rear end side parts solidstate bonding.Front parts are positioned at electrode front end face side, namely close with another electrode side position, and rear end side parts are positioned at the position close with electrode support rod.And the ductility of rear end side parts is higher than front parts/large.
Front parts and rear end side parts can be made up of metal parts.Such as, can be become by thorium tungsten structure front parts, and rear end side parts can be made up of the molybdenum that ductility is relatively high.
In the present invention, with cross over the composition surface between front parts and rear end side parts mode, namely in composition surface mode between, electrode side formed groove portion.Wherein, " electrode side " comprises the whole of the side (outer peripheral face) of taper surface and the main part being formed in electrode front.
The groove portion formed to improve bond strength has than the spacing of millimetre-sized heat transmission groove, separation, groove depth that the degree of depth is little.Such as, can be formed there is the spacing of less than 100 μm, the groove of the degree of depth.By forming so fine groove, be out of shape deeper near the composition surface outer rim of the rear end side parts making ductility high.
About the groove portion comprising such composition surface, the surface roughness Ra of rear end side parts side is preferably made to be more than 1.2 μm.In addition, the surface roughness Ra of parts side, front is preferably made to be less than 0.7 μm.In addition, groove portion is formed in the mode that the reflectivity of the parts side, luminance factor front making rear end side parts side is little.By meeting such numerical value, composition surface intensity can be improved.
About fine groove, by forming the groove more coarse than front parts, distortion near wedge can be made.Such as, preferably groove is formed in rear end side parts side in the mode producing " cut " (groove or burr).That is, preferably to carry out scraping to local or the mode peeled off forms groove.On the other hand, consider stable arc discharge, preferably form the fine groove of no marking in the parts side, front in groove portion.
In addition, the depth ratio of fine groove at rear end side parts side place can be also configured to dark in parts side, front.Near wedge, rear end side metal part surface is easily out of shape.
When manufacturing electrode by cut, in the cut preferably after solidstate bonding is carried out to electrode, form groove portion.By forming groove portion when employing the cut of lathe etc. simultaneously, make manufacturing process can not become complicated.
In groove portion, can composition surface be crossed over and form spacing and the large wide cut groove of the fine groove of depth ratio.
In the manufacture method of the discharge lamp of other modes of the present invention, by rear end side parts solidstate bonding higher than front parts to front parts and ductility, and cut is carried out to the side of the electrod assembly after solidstate bonding, in the manufacture method of this discharge lamp, in cut, to cross over the mode on the composition surface between front parts and rear end side parts, form groove portion in electrod assembly side.Such as, in cut, preferably form the fine groove based on cut in rear end side parts side.
The electrode for discharge lamp of other modes of the present invention possesses: front parts; And rear end side parts, itself and front parts solidstate bonding, cross over the composition surface between front parts and rear end side parts and define groove portion at electrode side.Also can simultaneously by parts solidstate bonding identical for ductility.
Invention effect
According to the present invention, by the electrode of multiple parts solidstate bonding, the electrode that improve bond strength can be formed.
Accompanying drawing explanation
Fig. 1 is the vertical view of the short arc discharge lamp schematically showing the 1st execution mode.
Fig. 2 is the summary end view of anode, negative electrode.
Fig. 3 is the partial side view of negative electrode.
Fig. 4 is the figure amplified near the metal parts composition surface in target.
Fig. 5 is the partial side view of the negative electrode in the 2nd execution mode.
Fig. 6 shows the figure of the photo of the negative electrode near composition surface.
Fig. 7 shows the figure of the enlarged photograph of Fig. 6.
Fig. 8 show utilize electron microscope to obtain composition surface near the figure of photo.
Embodiment
Below, with reference to accompanying drawing, embodiments of the present invention are described.
Fig. 1 is the vertical view of the short arc discharge lamp schematically showing the 1st execution mode.
Short arc discharge lamp 10 is the discharge lamps that can use in the light source etc. of exposure device (not shown) carrying out pattern formation, possesses the discharge tube (luminous tube) 12 of transparent quartz glass.In discharge tube 12, negative electrode 20 and anode 30 separate predetermined distance and are oppositely disposed.
In the both sides of discharge tube 12, sealed tube 13A, 13B of quartz glass are wholely set with discharge tube 12 in an opposing fashion, and the two ends of sealed tube 13A, 13B are closed by lamp holder 19A, 19B.Here, the mode that discharge lamp 10 is in upside with anode 30, negative electrode 20 is in downside configures along vertical direction.
In the inside of sealed tube 13A, 13B, be equipped with electrode support rod 17A, 17B of the negative electrode 20 of bearing metal and the conductivity of anode 30, electrode support rod 17A, 17B are connected with lead-in wire rod 15A, 15B of conductivity respectively via becket (not shown) and such metal forming 16A, the 16B of molybdenum.Sealed tube 13A, 13B deposition is in being arranged on the glass tube in sealed tube 13A, 13B (not shown), and thus, the discharge space DS being sealed with mercury and rare gas is sealed.
Go between excellent 15A, 15B is connected with outside power supply unit (not shown), applies voltage via lead-in wire excellent 15A, 15B, metal forming 16A, 16B and electrode support excellent 17A, 17B between negative electrode 20 and anode 30.When powering to discharge lamp 10, produce arc discharge in-between the electrodes, the bright line (ultraviolet light) of radiation mercury.
Fig. 2 is the summary end view of anode, negative electrode.
Negative electrode 20 is made up of metal parts (front parts) 20A with the electrode front end face 20S vertical with electrode axis E and metal parts (rear end side parts) 20B that engages with metal parts 20A in its rear.The metal parts 20B supported by electrode support rod 17A is made up of circular cylinder shaped portion 23B and truncated cone shape part 23A, and the metal parts 20A of truncated cone shape engages with the truncated cone shape part 23A of metal parts 20B.
Anode 30 is made up of metal parts (front parts) 30A with the electrode front end face 30S vertical with electrode axis E and metal parts (rear end side parts) 30B that engages with metal parts 30A.Metal parts 30A is made up of truncated cone shape part 33A and circular cylinder shaped portion 33B, and columned metal parts 30B engages with the circular cylinder shaped portion 33B of metal parts 30A.
The refractory metal such as alloy or pure tungsten (W) that the metal parts 20A of front take tungsten as principal component by thorium tungsten etc. is formed.On the other hand, the metal parts 20B of rear end side is by the ductility metal higher than metal parts 20A or formed with the alloy that this metal is principal component.Here, metal parts 20B is made up of molybdenum (Mo).Metal parts 30A, 30B of anode 30 are made up of pure tungsten (W) and molybdenum (Mo) respectively.
Fig. 3 is the partial side view of negative electrode.Fig. 4 is the figure amplified near the metal parts composition surface in target.Use Fig. 3,4, the groove portion being formed in cathode side is described.
According to discharge plasma sintering (SPS sintering) mode, solidstate bonding by metal-powder sintering after solid, the raw material that form metal parts 20A, 20B, then, utilize lathe to carry out cut, produce negative electrode 20 thus.By cut, form taper surface (undergauge face) 20Q of negative electrode 20.
In cut, along the direction vertical with electrode axis E, namely circumference is cut metal parts 20A, 20B.Here, implement to cut with the angle [alpha] of less than ± 10 ° to composition surface S1.And, for the formation of having in the cutting process of electrode of taper surface 20Q, form groove portion R simultaneously.
Groove portion R crosses over composition surface S1 and is formed, and it is made up of fine groove (hereinafter referred to as fine groove).Fine groove r is that intervals P1 determines in the scope of 1 μm ~ 5 μm when cut process with the groove that the intervals P1 of regulation is formed simultaneously.It is enough little compared with the heat transmission groove formed in existing discharge lamp.In the diagram, about fine groove r, the fine groove being formed in metal parts 20A is shown for " r1A ", the fine groove being formed in metal parts 20B is shown for " r1B ".
The fine groove r1B formed at the metal parts 20B of rear end side is the groove with cut (む れ), and groove depth d reaches the position darker than tool cutting edges crest line position.Wherein, groove depth d is shown the distance of the line for being linked up groove peak maximum to bottom here.On the other hand, in the metal parts 20A that ductility is relatively low, be formed with no marking or produce the fine groove r1A of cut hardly.About groove depth d, the groove depth d of metal parts 20A side is less than metal parts 20B side (shallow).
Revolution/the rotating speed of lathe when cut, the material, cut-in angle, approach etc. of sword are adjusted, makes to clip the different fine groove r of such surface state such as composition surface S1 Formation Depth, roughness.Here, during carrying out cut continuously, adjust, make the difference producing groove with composition surface S1 for boundary.
About the groove depth d in metal parts 20B, owing to being the groove based on cut, so relatively there is deviation, but the approach etc. of counter blade adjusts, and becomes more than 5 μm to make the degree of depth.On the other hand, approach etc. is adjusted, to prevent from producing cut in metal parts 20A.
When metal surface becomes coarse, the diffuse reflection increase of light and reflectivity diminishes.Originally molybdenum is larger than tungsten to light reflectance, but, owing to defining fine groove r (r1A, r1B), so the reflectivity of the luminance factor metal parts 20A side of metal parts 20B side in groove portion R is little.In addition, by cut, the surface roughness Ra of metal parts 20B becomes more than 1.2 μm and the surface roughness Ra of metal parts 20A becomes less than 0.7 μm.
As mentioned above, the metal parts 20B be made up of molybdenum (Mo) of rear end side is compared with the metal parts 20A be made up of tungsten (W) of front, and ductility is high and be easily out of shape.Thus, when by metal parts 20A, 20B solidstate bonding, near the outer rim of composition surface S1, easily produce wedge W as shown in Figure 3.This wedge W produces with micrometer level (Microorderlevel) as a rule.
But, when fine groove r is formed near the S1 of composition surface, in the metal parts 20B that ductility is relatively high, forms the fine groove r1B of the degree producing cut, thus, near the outer rim of composition surface S1, produce plastic deformation.This is method by adjusting the power etc. being applied to metal parts 20B when cutting and realizes along the method etc. that composition surface S1 (within 10 °) carries out cut.As the benchmark forming so fine groove r1A, carry out cut in the mode making above-mentioned surface roughness Ra become more than 1.2 μm.
Its result is, the shape of wedge W also changes and becomes the size with the fine groove r same degree be formed near the S1 of composition surface.There is change of shape in the wedge W produced at S1 place, composition surface, and according to circumstances become the state of caving in from being cut into the state of electrode centers side dearly.This prevent in lamp is lighted is the junction surface breakage that starting point occurs with wedge because of the difference of the thermal expansion near the S1 of composition surface.
Particularly, in taper surface 20Q, current density is high, and the thermal stress caused because of the difference of coefficient of thermal expansion acts on metal parts 20A largely from metal parts 20B, but, because bond strength is high, so high thermal conductivity and conductivity can be maintained.Thereby, it is possible to minimally retain the thorium content in the metal parts 20A of front with necessity.
In addition, by also forming fine groove r1A at the metal parts 20A of front, when being applied with thermal stress from metal parts 20B to metal parts 20A in lighting at lamp, utilizing fine groove r1A to carry out releasing heat stress, can prevent S1 vicinity, composition surface from producing breach thus.In order to realize this scheme, form fine groove r1A in the mode making surface roughness Ra become less than 0.7 μm.
In addition, by making metal parts 20B near surface, through cut, plastic deformation occur, near the composition surface S1 of metal parts 20B, forming the fine groove r1B to the incision of electrode centers side, the joint of the outer rim vicinity of composition surface S1 can be made to become firm.Particularly, by forming metal parts 20B by pure molybdenum, easily producing cut, easily making surface roughness Ra increase.
On the other hand, at the fine groove r1A of metal parts 20A side, do not produce cut in fact, therefore become the groove that spacing, the degree of depth are not disorderly.Thus, can not to crack in the metal parts 20A that the tungsten low by ductility is formed, breach, thus lamp light in arc discharge stablize.Owing to forming so fine groove r with cut simultaneously, so electrode manufacturing process can not become numerous and diverse.
Above, the groove portion R that the taper surface 20Q at negative electrode 20 is formed is illustrated, and also forms the groove portion same with negative electrode 20 in anode 30.Its result is, the metal parts 30A be made up of tungsten and the metal parts 30B be made up of molybdenum forms groove portion at sandwich composition surface S2, and forms the fine groove producing cut at metal parts 30B.Thereby, it is possible to improve bond strength, thermal conductivity and conductivity.
Like this, according to the present embodiment, by solidstate bonding and cut, the negative electrode 20 be made up of the metal parts 20A of front and the metal parts 20B of rear end side is formed.The taper surface 20Q of the negative electrode 20 formed when cut is formed with the groove portion R forming fine groove r.Now, to produce cut and do not produce the mode of cut in metal parts 20B in metal parts 20A, cut is implemented.
Next, use Fig. 5, the short arc discharge lamp of the 2nd execution mode is described.In the 2nd execution mode, form heat transmission groove portion further.
Fig. 5 is the end view of the negative electrode in the 2nd execution mode.
Negative electrode 200 is made up of the front metal parts 200A and rear end side metal parts 200B comprising front end face 200S.And, when forming the cut of conical surface 200Q, form the groove portion 100R be made up of fine groove.
In addition, after defining fine groove r, irradiated by laser and form the large groove rr of spacing (hereinafter referred to as wide cut groove) overlappingly.Wide cut groove rr has spacing P2 and the degree of depth d ' (not shown) of enough large levels (grade level) compared with fine groove.Here, spacing P2 determines in the scope of 0.1mm ~ 1.0mm, and degree of depth d ' determines in the scope of 0.1 ~ 0.5mm.Particularly, preferably spacing P2 is defined as 0.2mm ~ 0.5mm, degree of depth d ' is defined as 0.2mm ~ 0.5mm.
Irradiated by laser after cut and the wide cut groove rr that is formed in groove portion R improves electrode radiating effect, and, through laser irradiate and the metallic member landfill of melting in wedge W, make bond strength further improve thus.
About fine groove, also can be formed by the method except cut, and form the fine groove/male and fomale(M&F) not utilizing cut.Formed in the scope improving composition surface intensity and there is the suitable degree of depth and the groove of spacing.Particularly, the groove portion that the groove depth of rear end side is larger than front groove depth is preferably formed.
Such as, form fine groove with the spacing of less than 100 μm, and in the mode making fine groove and become the degree of depth of less than 100 μm, cut is carried out to rear end side metal parts.This is because, owing to producing wedge W with micrometer level as a rule, so cannot landfill wedge W fully when the groove larger than above-mentioned groove.
About the forming range in groove portion, can be only the part near composition surface, or can also be formed in the scope of whole taper surface 20Q.In addition, the large wide cut groove of spacing can be formed by the method (cut etc.) except laser irradiation, also only can form fine groove or wide cut groove.
About the raw material metal of the metal parts 20A of front, the metal parts 20B of rear end side, select to make the ductility of metal parts 20B mode relatively high compared with metal parts 20A.Such as, metal parts 20B can be formed by tantalum/molybdenum or with the alloy that tantalum/molybdenum is principal component.
In addition, also electrode can be formed respectively by the metal parts of more than 3.In addition, can be the structure only forming groove portion near the composition surface of an electrode, also can be formed as taper surface, periphery any side composition surface in also form groove portion.In addition, by the parts solidstate bonding except metal parts, the discharge lamp beyond short arc discharge lamp can also be gone for.
In the 1st, the 2nd execution mode, although by different metal parts solidstate bondings, also can by the metal parts solidstate bonding of identical type.Even if the ductility of metal parts is identical, also easily producing small wedge on composition surface, can preventing wedge from expanding by forming fine groove.
Below, use Fig. 6 ~ Fig. 8, embodiments of the invention are described.
Embodiment 1
Be the negative electrode of the short arc discharge lamp of 5kW about rated power, according to SPS sintering processing by the metal parts be made up of thorium tungsten and the metal parts solidstate bonding be made up of molybdenum, then form cathode shape by cut.About anode, by the front be made up of tungsten metal parts is carried out cut to obtain with the rear end side metal parts solidstate bonding to be made up of molybdenum.About negative electrode, its overall length is 20mm, from cathode face to the distance on composition surface be 5mm, the diameter on composition surface is 16mm.
Fig. 6 shows the figure of the photo of the negative electrode near composition surface.Fig. 7 shows the figure of the enlarged photograph of Fig. 6.Fig. 8 show utilize electron microscope to obtain composition surface near the figure of photo.
As can be seen from Figure 6, groove portion to be formed on the direction on composition surface and to cross over composition surface S1 and be formed in front parts 20A and rear end side parts 20B.In addition, from Fig. 7,8, cut is produced at rear end side parts 20B.
To form groove portion along composition surface S1, and produce the mode of cut at rear end side parts 20B and carried out cut, therefore, the gap of wedge-like can not be produced in end, composition surface and the breakage at junction surface can not occur in lighting.
About the present invention, can carry out various change, displacement when not departing from the purport of the present invention and scope that are defined by appending claims, substituting.In addition, in the present invention, be not be intended to the technique of the particular implementation be limited to described in specification, device, manufacture, works, means, method and step.Those skilled in the art should recognize: according to disclosure of the present invention, can derive substantially play with here described in the same function of the function that realizes of execution mode or substantially realize equal effect, the device of effect, means and method.Thus, appending claims is intended to the scope being contained in such device, means, method.
The application is with Japanese publication (No. 2013-151647, Japanese Patent Application, in application on July 22nd, 2013) based on apply for the application of CLAIM OF PRIORITY, the disclosure comprising specification, accompanying drawing and claims of basis application by referring to and be incorporated in the application's entirety.
Label declaration
10: discharge lamp; 12: discharge tube; 20: negative electrode; 30: anode; S1: composition surface; R: groove portion; R: fine groove; Rr: wide cut groove.
Claims (11)
1. a discharge lamp, is characterized in that, this Discharging lamps and lanterns is standby:
Discharge tube; And
Pair of electrodes, they are configured in described discharge tube,
At least one electrode is by the electrode of rear end side parts solidstate bonding higher than described front parts to front parts and ductility,
Cross over the composition surface between described front parts and described rear end side parts and define groove portion at electrode side.
2. discharge lamp according to claim 1, is characterized in that,
The fine groove with cut is defined in the rear end side parts side in described groove portion.
3. discharge lamp according to claim 1 and 2, is characterized in that,
Described fine groove is dark in rear end side parts side than in parts side, front.
4. discharge lamp according to claim 1, is characterized in that,
Described groove portion is formed in cut after solidstate bonding.
5. discharge lamp according to claim 1, is characterized in that,
In described groove portion, cross over composition surface and form the wide cut groove that described in spacing and depth ratio, fine groove is large.
6. discharge lamp according to claim 1, is characterized in that,
In described groove portion, the surface roughness Ra of rear end side parts side is more than 1.2 μm.
7. discharge lamp according to claim 1, is characterized in that,
In described groove portion, the surface roughness Ra of parts side, front is less than 0.7 μm.
8. discharge lamp according to claim 1, is characterized in that,
In described groove portion, the reflectivity of the parts side, luminance factor front of rear end side parts side is little.
9. a manufacture method for discharge lamp, by rear end side parts solidstate bonding higher than described front parts to front parts and ductility, and carries out cut to the electrod assembly side after solidstate bonding,
The feature of this manufacture method is,
In described cut, to cross over the mode on the composition surface between described front parts and described rear end side parts, form groove portion in electrod assembly side.
10. the manufacture method of discharge lamp according to claim 9, is characterized in that,
In described cut, form the fine groove based on cut in rear end side parts side.
11. 1 kinds of electrode for discharge lamp, is characterized in that, this electrode for discharge lamp possesses:
Front parts; And
Rear end side parts, itself and described front parts solidstate bonding,
Cross over the composition surface between described front parts and described rear end side parts and define groove portion at electrode side.
Applications Claiming Priority (3)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| JP2013-151647 | 2013-07-22 | ||
| JP2013151647 | 2013-07-22 | ||
| PCT/IB2014/062847 WO2015033239A1 (en) | 2013-07-22 | 2014-07-04 | Discharge lamp, method for producing discharge lamp, and electrode for discharge lamp |
Publications (2)
| Publication Number | Publication Date |
|---|---|
| CN105431922A true CN105431922A (en) | 2016-03-23 |
| CN105431922B CN105431922B (en) | 2017-07-14 |
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| CN201480041336.0A Active CN105431922B (en) | 2013-07-22 | 2014-07-04 | Discharge lamp, the manufacture method of discharge lamp and electrode for discharge lamp |
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| Country | Link |
|---|---|
| JP (1) | JP6483020B2 (en) |
| KR (1) | KR102206779B1 (en) |
| CN (1) | CN105431922B (en) |
| TW (1) | TWI621151B (en) |
| WO (1) | WO2015033239A1 (en) |
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| JP6564598B2 (en) * | 2015-03-31 | 2019-08-21 | 株式会社オーク製作所 | Discharge lamp |
| JP1673314S (en) | 2020-02-20 | 2020-11-24 |
Citations (3)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| TW523780B (en) * | 2000-08-03 | 2003-03-11 | Ushio Electric Inc | Short-arc high-pressure discharge lamp |
| CN102142353A (en) * | 2010-01-28 | 2011-08-03 | 优志旺电机株式会社 | Discharge lamp |
| JP2011216442A (en) * | 2010-04-02 | 2011-10-27 | Ushio Inc | Short arc type discharge lamp |
Family Cites Families (6)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| JP4513031B2 (en) * | 2000-08-03 | 2010-07-28 | ウシオ電機株式会社 | Short arc type high pressure discharge lamp |
| JP4512968B2 (en) * | 2000-08-03 | 2010-07-28 | ウシオ電機株式会社 | Short arc type high pressure discharge lamp |
| JP4636156B2 (en) * | 2008-10-01 | 2011-02-23 | ウシオ電機株式会社 | Short arc type discharge lamp |
| JP4484958B1 (en) | 2009-09-24 | 2010-06-16 | 株式会社オーク製作所 | Discharge lamp |
| JP5365799B2 (en) | 2009-10-23 | 2013-12-11 | ウシオ電機株式会社 | High pressure discharge lamp and method of manufacturing high pressure discharge lamp |
| JP5580136B2 (en) * | 2010-08-11 | 2014-08-27 | 株式会社オーク製作所 | Discharge lamp |
-
2014
- 2014-07-04 WO PCT/IB2014/062847 patent/WO2015033239A1/en active Application Filing
- 2014-07-04 JP JP2015535169A patent/JP6483020B2/en active Active
- 2014-07-04 CN CN201480041336.0A patent/CN105431922B/en active Active
- 2014-07-04 KR KR1020157036298A patent/KR102206779B1/en active IP Right Grant
- 2014-07-21 TW TW103124880A patent/TWI621151B/en active
Patent Citations (3)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| TW523780B (en) * | 2000-08-03 | 2003-03-11 | Ushio Electric Inc | Short-arc high-pressure discharge lamp |
| CN102142353A (en) * | 2010-01-28 | 2011-08-03 | 优志旺电机株式会社 | Discharge lamp |
| JP2011216442A (en) * | 2010-04-02 | 2011-10-27 | Ushio Inc | Short arc type discharge lamp |
Also Published As
| Publication number | Publication date |
|---|---|
| CN105431922B (en) | 2017-07-14 |
| JP6483020B2 (en) | 2019-03-13 |
| KR102206779B1 (en) | 2021-01-22 |
| WO2015033239A1 (en) | 2015-03-12 |
| JPWO2015033239A1 (en) | 2017-03-02 |
| TW201511080A (en) | 2015-03-16 |
| KR20160033663A (en) | 2016-03-28 |
| TWI621151B (en) | 2018-04-11 |
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