JPH02304857A - Short arc type high pressure mercury vapor lamp - Google Patents
Short arc type high pressure mercury vapor lampInfo
- Publication number
- JPH02304857A JPH02304857A JP12428789A JP12428789A JPH02304857A JP H02304857 A JPH02304857 A JP H02304857A JP 12428789 A JP12428789 A JP 12428789A JP 12428789 A JP12428789 A JP 12428789A JP H02304857 A JPH02304857 A JP H02304857A
- Authority
- JP
- Japan
- Prior art keywords
- cathode
- pressure
- mercury vapor
- pressure mercury
- arc
- Prior art date
- Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
- Pending
Links
- QSHDDOUJBYECFT-UHFFFAOYSA-N mercury Chemical compound [Hg] QSHDDOUJBYECFT-UHFFFAOYSA-N 0.000 title claims abstract description 48
- WFKWXMTUELFFGS-UHFFFAOYSA-N tungsten Chemical compound [W] WFKWXMTUELFFGS-UHFFFAOYSA-N 0.000 claims abstract description 20
- 229910052721 tungsten Inorganic materials 0.000 claims abstract description 20
- 239000010937 tungsten Substances 0.000 claims abstract description 20
- 229910052753 mercury Inorganic materials 0.000 claims abstract description 16
- 239000000843 powder Substances 0.000 claims abstract description 9
- 230000005855 radiation Effects 0.000 abstract description 6
- 230000002195 synergetic effect Effects 0.000 abstract description 3
- 239000007789 gas Substances 0.000 description 11
- 239000004973 liquid crystal related substance Substances 0.000 description 6
- 230000000052 comparative effect Effects 0.000 description 5
- 238000007639 printing Methods 0.000 description 4
- 150000001722 carbon compounds Chemical class 0.000 description 3
- 239000011248 coating agent Substances 0.000 description 3
- 238000000576 coating method Methods 0.000 description 3
- 238000010586 diagram Methods 0.000 description 3
- 230000004907 flux Effects 0.000 description 3
- 230000003287 optical effect Effects 0.000 description 3
- XKRFYHLGVUSROY-UHFFFAOYSA-N Argon Chemical compound [Ar] XKRFYHLGVUSROY-UHFFFAOYSA-N 0.000 description 2
- 230000000694 effects Effects 0.000 description 2
- 238000010891 electric arc Methods 0.000 description 2
- 238000000034 method Methods 0.000 description 2
- 229910052756 noble gas Inorganic materials 0.000 description 2
- 238000005245 sintering Methods 0.000 description 2
- DKPFZGUDAPQIHT-UHFFFAOYSA-N Butyl acetate Natural products CCCCOC(C)=O DKPFZGUDAPQIHT-UHFFFAOYSA-N 0.000 description 1
- 239000000020 Nitrocellulose Substances 0.000 description 1
- RTAQQCXQSZGOHL-UHFFFAOYSA-N Titanium Chemical compound [Ti] RTAQQCXQSZGOHL-UHFFFAOYSA-N 0.000 description 1
- QCWXUUIWCKQGHC-UHFFFAOYSA-N Zirconium Chemical compound [Zr] QCWXUUIWCKQGHC-UHFFFAOYSA-N 0.000 description 1
- 229910052786 argon Inorganic materials 0.000 description 1
- 239000000470 constituent Substances 0.000 description 1
- 230000007423 decrease Effects 0.000 description 1
- 230000006866 deterioration Effects 0.000 description 1
- 238000005516 engineering process Methods 0.000 description 1
- 238000011156 evaluation Methods 0.000 description 1
- 230000008020 evaporation Effects 0.000 description 1
- 238000001704 evaporation Methods 0.000 description 1
- 238000002474 experimental method Methods 0.000 description 1
- 230000017525 heat dissipation Effects 0.000 description 1
- FUZZWVXGSFPDMH-UHFFFAOYSA-N hexanoic acid Chemical compound CCCCCC(O)=O FUZZWVXGSFPDMH-UHFFFAOYSA-N 0.000 description 1
- 239000000463 material Substances 0.000 description 1
- 239000000203 mixture Substances 0.000 description 1
- 229920001220 nitrocellulos Polymers 0.000 description 1
- 239000002245 particle Substances 0.000 description 1
- 238000007789 sealing Methods 0.000 description 1
- 239000002904 solvent Substances 0.000 description 1
- 239000000758 substrate Substances 0.000 description 1
- 230000008961 swelling Effects 0.000 description 1
- 229910052715 tantalum Inorganic materials 0.000 description 1
- GUVRBAGPIYLISA-UHFFFAOYSA-N tantalum atom Chemical compound [Ta] GUVRBAGPIYLISA-UHFFFAOYSA-N 0.000 description 1
- 229910052719 titanium Inorganic materials 0.000 description 1
- 239000010936 titanium Substances 0.000 description 1
- 229910052724 xenon Inorganic materials 0.000 description 1
- FHNFHKCVQCLJFQ-UHFFFAOYSA-N xenon atom Chemical compound [Xe] FHNFHKCVQCLJFQ-UHFFFAOYSA-N 0.000 description 1
- 229910052726 zirconium Inorganic materials 0.000 description 1
Abstract
Description
【発明の詳細な説明】
〔産業上の利用分野〕
本発明は、ショートアーク型高圧水銀蒸気ランプに関し
、特に、大面積のプリント基板や液晶基板の焼き付は用
光源として有用な大型のショートアーク型高圧水銀蒸気
ランプに関する。Detailed Description of the Invention [Field of Industrial Application] The present invention relates to a short-arc type high-pressure mercury vapor lamp, and in particular, a large-sized short-arc lamp useful as a light source for printing large-area printed circuit boards and liquid crystal boards. Regarding high-pressure mercury vapor lamps.
従来のショートアーク型高圧水銀蒸気ランプにおいては
、希ガスとともに水銀が封入された発光管内に陰極と陽
極とが対向配置されてなり、陽極に対して陰極が上方に
位置するよう電極間方向がほぼ垂直な姿勢とされた状態
で点灯されている。In a conventional short-arc type high-pressure mercury vapor lamp, a cathode and an anode are placed facing each other in an arc tube filled with mercury and rare gas, and the direction between the electrodes is approximately oriented so that the cathode is located above the anode. It is lit in a vertical position.
このように陰極を陽極の上方に位置させて点灯している
のは、次のような理由による。The reason why the cathode is placed above the anode and lit is as follows.
（１）定常点灯状態に移行するまでの始動時間を短くす
るた狛には、発光管内の水銀をできるだけ早く蒸発させ
ることが必要であり、そのためには、熱放射率の高い陽
極を陰極の下方に位！させることが有効である。(1) In order to shorten the starting time before transitioning to steady lighting, it is necessary to evaporate the mercury in the arc tube as quickly as possible. To do this, the anode with high thermal emissivity is placed below the cathode. Second place! It is effective to do so.
（２）陰極の構成材料としては、トリエーテッドタング
ステンが好ましく用いられているが、このトリエーテッ
ドタングステンは、動作温度が約３０００にと高く、そ
のため陰極を上方に位置させた方が動作が安定しやすい
。特に、小型のショートアーク型高圧水銀蒸気ランプで
は人力電力が小さいことから、陰極の動作温度を約３０
００ Ｋに維持するために陰極を上方に位置させること
が肝要となる。(2) Thoriated tungsten is preferably used as a constituent material for the cathode, but thoriated tungsten has a high operating temperature of approximately 3000°C, so the operation is more stable if the cathode is positioned above. Cheap. In particular, since the human power required for small short-arc high-pressure mercury vapor lamps is small, the operating temperature of the cathode is set at approximately 30°C.
It is important to position the cathode upward in order to maintain it at 00K.
（３）プリント基板や液晶基板の焼き付は用光源として
用いられる場合には、被照射面に対して上方側に光源が
配置されて、上方から下方に向かって光照射することか
ら、凹面反射鏡はその開口部が下側に位置するよう組合
せられる。従って、凹面反射鏡による光の集光を高めて
光の利用率の向上を図るためには、陰極の先端近傍に形
成されるアーク輝点との関係から陰極を上方に位置させ
た方が有利となる。(3) When used as a light source for printing on printed circuit boards or liquid crystal boards, the light source is placed above the irradiated surface and irradiates light from above to below, resulting in concave reflection. The mirrors are assembled so that their openings are on the bottom side. Therefore, in order to improve the light utilization rate by increasing the concentration of light by the concave reflector, it is advantageous to position the cathode upward in relation to the arc bright spot formed near the tip of the cathode. becomes.
以上のような理由から、ショートアーク型高圧水銀蒸気
ランプは、陰極が陽極の上方に位置する状態で点灯使用
されているが、従来のショートアーク型高圧水銀蒸気ラ
ンプは一般に小型であり、人力電力が５００Ｗ未満で、
放電電流も１５Ａ未満であるものが多い。For the reasons mentioned above, short-arc high-pressure mercury vapor lamps are used with the cathode positioned above the anode, but conventional short-arc high-pressure mercury vapor lamps are generally small and require little human power. is less than 500W,
In many cases, the discharge current is less than 15A.
しかるに、最近においては、プリント基板や液晶基板の
焼き付けにおいて、大面積を一度に焼き付けることがで
きる大型のショートアーク型高圧水銀蒸気ランプの必要
性が高まり、具体的には、定常点灯時において水銀の蒸
気圧と希ガスの圧力の和が８気圧以上で放電電流が２０
Ａ以上となる大型のものが必要とされるに至った。However, recently, when printing printed circuit boards and liquid crystal boards, there has been an increasing need for large short-arc high-pressure mercury vapor lamps that can burn large areas at once. When the sum of vapor pressure and noble gas pressure is 8 atmospheres or more, the discharge current is 20
A large-sized one with a size of A or higher has come to be needed.
しかし、従来の構造のショートアーク型高圧水銀蒸気ラ
ンプにふいては、陰極がトリニーテッド゛ タングステ
ンからなるため、単に大型化しただけでは、アーク放電
による高温の対流熱によって上方に位置された陰極の動
作温度が過大となり、そのため陰極を構成するタングス
テンの蒸発が著しくなり、陰極先端が早期に消耗し、管
壁が黒化する問題があった。However, in short-arc high-pressure mercury vapor lamps with a conventional structure, the cathode is made of trined tungsten, so simply increasing the size of the cathode will not work because of the high-temperature convection heat generated by the arc discharge. The operating temperature became excessive, which caused significant evaporation of the tungsten constituting the cathode, leading to early wear of the cathode tip and blackening of the tube wall.
本発明は以上の如き事情に基づいてなされたも′のであ
って、その目的は、定常点灯時において水銀の蒸気圧と
希ガスの圧力の和が８気圧以上で放電電流が２０Ａ以上
となる大型のショートアーク型高圧水銀蒸気ランプにお
いて、陰極の消耗を抑制することにより、管壁の黒化を
防止し、使用寿命を長くすることにある。The present invention has been made based on the above-mentioned circumstances, and its object is to provide a large-sized device with a discharge current of 20 A or more when the sum of the vapor pressure of mercury and the pressure of the rare gas is 8 atmospheres or more during steady lighting. The purpose of this short-arc high-pressure mercury vapor lamp is to prevent blackening of the tube wall and extend its service life by suppressing cathode wear.
以上の目的を達成するため、本発明のショートアーク型
高圧水銀蒸気ランプにおいては、希ガスとともに水銀が
封入された発光管内に陰極と陽極とが対向配置されてな
り、前記陽極に対して前記陰極が上方に位置するよう電
極間方向がほぼ垂直な姿勢で点灯され、当該陰極を主と
してタングステンにより作製しかつその先端を除く外表
面の少なくとも一部に当該タングステンよりも熱放射率
の高い粉末を焼結し、定常点灯時に右いては、水銀の蒸
気圧と希ガスの圧力の和が８気圧以上でかつ放電電流が
２０Ａ以上で点灯される構成を採用する。In order to achieve the above object, in the short arc type high pressure mercury vapor lamp of the present invention, a cathode and an anode are arranged facing each other in an arc tube filled with mercury together with a rare gas. The cathode is made of tungsten, and at least part of its outer surface, excluding the tip, is sintered with powder having a higher thermal emissivity than the tungsten. In conclusion, during steady lighting, a configuration is adopted in which the lamp is lit when the sum of the vapor pressure of mercury and the pressure of the rare gas is 8 atmospheres or more and the discharge current is 20 A or more.
陰極を主としてタングステンにより作製し、かつ、その
先端を除く外表面の少なくとも一部に当該タングステン
よりも熱放射率の高い粉末を焼結しているので、当該焼
結部分により陰極の熱放射が促進され、しかも焼結部分
により陰極の放熱面積が増加し、これらの相乗作用によ
り、点灯時における陰極の温度上昇を十分に抑制するこ
とができる。The cathode is mainly made of tungsten, and at least part of its outer surface, excluding the tip, is sintered with powder that has a higher thermal emissivity than the tungsten, so the sintered part promotes heat radiation from the cathode. Moreover, the heat dissipation area of the cathode is increased by the sintered portion, and the synergistic effect of these factors makes it possible to sufficiently suppress the rise in temperature of the cathode during lighting.
従って、定常点灯時の水銀の蒸気圧と希ガスの圧力の和
が８気圧以上で放電電流が２０Ａ以上となる大型のショ
ートアーク型高圧水銀蒸気ランプにおいて、陰極の消耗
を十分に抑制することができ、管壁の黒化を防止し、使
用寿命を長くすることができる。Therefore, in a large short-arc high-pressure mercury vapor lamp in which the sum of the mercury vapor pressure and the noble gas pressure is 8 atm or more and the discharge current is 20 A or more during steady operation, cathode wear cannot be sufficiently suppressed. It is possible to prevent blackening of the tube wall and extend the service life.
以下、本発明の実施例を具体的に説明する。Examples of the present invention will be specifically described below.
Ｃ実施例１〕
本実施例のショートアーク型高圧水銀蒸気ランプにおい
ては、第り図に示すように、石英ガラス製の発光管１０
の中央の膨出部１１内に、陰極２０と陽極３０が、発光
管１０の管軸に沿って所定の電極間距離をおいて対向す
るよう配置されている。４１．４２は端部封止部を覆う
口金である。C Example 1] In the short arc type high pressure mercury vapor lamp of this example, as shown in Fig.
A cathode 20 and an anode 30 are arranged to face each other along the tube axis of the arc tube 10 with a predetermined inter-electrode distance in the central bulge 11 . 41 and 42 are caps that cover the end sealing portion.
点灯中においては陰極２０の先端近傍にアーク輝点が形
成され、実質上点光源となる。このショートアーク型高
圧水銀蒸気ランプは、陽極３Ｇに対して陰極２０が上方
に位置するよう電極間方向Ｐがはぼ垂直な姿勢に保持さ
れた状態で点灯使用される。During lighting, an arc bright spot is formed near the tip of the cathode 20, essentially becoming a point light source. This short-arc type high-pressure mercury vapor lamp is used while being lit in a state in which the inter-electrode direction P is maintained in a nearly vertical posture so that the cathode 20 is located above the anode 3G.
ここで「電極間方向Ｐがほぼ垂直な姿勢」とは、厳密に
垂直であることは必要でなく、実用上許容できる範囲で
あれば、電極間方向Ｐが垂直方向から多少ずれていても
よい。Here, "a posture in which the inter-electrode direction P is almost vertical" does not necessarily have to be strictly vertical, and the inter-electrode direction P may be slightly deviated from the vertical direction as long as it is within a practically acceptable range. .
発光管１０内には、アルゴン等の始動用の希ガスととも
に、水銀が封入されている。水銀の封入量は、定常点灯
時において発光管１０内の水銀の蒸気圧と希ガスの圧力
の和が８気圧以上となる割合である。Mercury is sealed in the arc tube 10 along with a rare gas for starting, such as argon. The amount of mercury enclosed is such that the sum of the vapor pressure of mercury and the pressure of the rare gas in the arc tube 10 becomes 8 atmospheres or more during steady lighting.
このショートアーク型高圧水銀蒸気ランプの定常点灯時
における放電電流は２ＯＡ以上である。具体的には、水
銀の封入量を上記のように設定するほか、発光管１０の
大きさ、陰極２０および陽極３０の大きさ等を設定する
ことにより放電電流を２０Ａ以上とすることができる。The discharge current of this short arc type high pressure mercury vapor lamp during steady operation is 2OA or more. Specifically, in addition to setting the amount of mercury enclosed as described above, the discharge current can be set to 20 A or more by setting the size of the arc tube 10, the size of the cathode 20, the anode 30, etc.
陰極２０は、第２図にも示すように、主としてタングス
テン例えばトリエーテッドタングステンにより作製され
、かつ、その先端を除く外表面の少なくとも一部には、
当該タングステンよりも熱放射率の高い粉末が焼結され
ている。第２図において網目状の斜線を付した部分が焼
結部分５０を示し、この例では、大径の胴部２１の外表
面の全体と、コーン状の先端部２２の先端を除く外表面
に焼結部分が設けられている。先端を除くのは、アーク
放電に支障がないようにするためである。陰極２０の先
端には小さな平坦面２３が形成されている。この平坦面
２３の代わりに半球面であってもよい。As shown in FIG. 2, the cathode 20 is mainly made of tungsten, for example, thoriated tungsten, and at least a portion of its outer surface except for its tip is made of
A powder having a higher thermal emissivity than the tungsten is sintered. In FIG. 2, the hatched part indicates the sintered part 50, and in this example, the entire outer surface of the large-diameter body part 21 and the outer surface of the cone-shaped tip part 22 except for the tip are shown as the sintered part 50. A sintered part is provided. The reason for excluding the tip is to ensure that there is no problem with arc discharge. A small flat surface 23 is formed at the tip of the cathode 20. This flat surface 23 may be replaced by a hemispherical surface.
熱放射率の高い粉末としては、例えばタンタルと炭素の
化合物（Ｔ ａ Ｃ、Ｔ ａ ２ Ｃ） 、チタンと炭
素の化合物（ＴｉＣ） 、ジルコニウムと炭素の化合物
（ＺｒＣ）等が好ましい。なお、タングステンの熱放射
率は約０．３であるのに対し、ＴａＣ・は約０．８、Ｔ
ａ２Ｃは約０，４乃至０．４５、ＴｉＣは約０．４乃至
０．６、ＺｒＣは約０４５乃至０．５である。Preferred examples of the powder with high thermal emissivity include tantalum and carbon compounds (T a C, T a 2 C), titanium and carbon compounds (TiC), zirconium and carbon compounds (ZrC), and the like. Note that the thermal emissivity of tungsten is approximately 0.3, while that of TaC is approximately 0.8, and T
a2C is about 0.4 to 0.45, TiC is about 0.4 to 0.6, and ZrC is about 045 to 0.5.
焼結手段としては、タングステンよりも熱放射率の高い
粉末を陰極の外表面の所定部分に塗布し、次いでこれを
高温で加熱して焼結する方法が好適である。As the sintering means, a method is suitable in which a powder having a higher thermal emissivity than tungsten is applied to a predetermined portion of the outer surface of the cathode, and then this is heated at a high temperature and sintered.
本実施例のショートアーク型高圧水銀蒸気ランプによれ
ば、陰極２０が、主としてタングステンにより作製され
、かつ、その先端を除く外表面の少なくとも一部に当該
タングステンよりも熱放射率の高い粉末が焼結されてい
るので、当該焼結部分５０により陰極２０の熱放射が促
進され、しかも焼結部分５０により陰極２０の放熱面積
が増加し、これらの相乗作用により、点灯時における陰
極２０の温度上昇を十分に抑制することができる。According to the short-arc high-pressure mercury vapor lamp of this embodiment, the cathode 20 is mainly made of tungsten, and a powder having a higher thermal emissivity than the tungsten is baked on at least a part of the outer surface excluding the tip. Since the sintered portion 50 promotes the heat radiation of the cathode 20, and the sintered portion 50 increases the heat radiation area of the cathode 20, the synergistic effect of these increases the temperature rise of the cathode 20 during lighting. can be sufficiently suppressed.
従って、定常点灯時の水銀の蒸気圧と希ガスの圧力の和
が８気圧以上で放電電流が２０Ａ以上となる大型のショ
ートアーク型高圧水銀蒸気ランプにおいて、陰極２０の
消耗を十分に抑制することができ、発光管１０の管壁の
黒化を防止し、使用寿命を長くすることができる。Therefore, in a large short-arc type high-pressure mercury vapor lamp in which the sum of the vapor pressure of mercury and the pressure of the rare gas is 8 atm or more and the discharge current is 20 A or more during steady operation, the consumption of the cathode 20 must be sufficiently suppressed. This makes it possible to prevent the tube wall of the arc tube 10 from darkening and extend its service life.
〔実施例２〕
本実施例においては、上記実施例１のショートアーク型
高圧水銀蒸気ランプを、大面積のプリント基板や液晶基
板の焼き付は用光源として用いる場合について説明する
。[Example 2] In this example, a case will be described in which the short arc type high pressure mercury vapor lamp of Example 1 is used as a light source for printing large area printed circuit boards and liquid crystal boards.
第３図に示すように、ンヨートアータ型高圧水銀蒸気ラ
ンプ８１は、プリント基板や液晶基板が位置される被照
射面８２に対して上方側に配置されて上方から下方に向
かって光照射するようにする。As shown in FIG. 3, the Nyotoata type high-pressure mercury vapor lamp 81 is arranged above an irradiated surface 82 on which a printed circuit board or a liquid crystal board is placed, and irradiates light from above to below. do.
従って、凹面反射鏡８３はその開口部８４が下側に位置
するようショートアーク型高圧水銀蒸気ランプ８１に組
合せられる。凹面反射鏡８３による集光性を高めて光の
利用率の向上を図るために、陰極の先端近傍に形成され
るアーク輝点を凹面反射鏡８３の焦点に位置させる。８
５は光学系、８６はシャッター、８７は点灯用電源であ
る。Therefore, the concave reflector 83 is combined with the short arc type high pressure mercury vapor lamp 81 so that its opening 84 is located on the lower side. In order to improve the light collection efficiency of the concave reflector 83 and improve the light utilization efficiency, an arc bright spot formed near the tip of the cathode is positioned at the focal point of the concave reflector 83. 8
5 is an optical system, 86 is a shutter, and 87 is a lighting power source.
このような使用の態様によれば、大面積のプリント基板
や液晶基板の焼き付けを効率的に達成することができる
。According to this mode of use, it is possible to efficiently print large-area printed circuit boards and liquid crystal substrates.
また、第４図に示すように、装置の高さを大きくせずに
必要な光路長を得るために、二枚の反射鏡８８．８９
とレンズ系９０を用いた構造を採用してもよい。In addition, as shown in Fig. 4, in order to obtain the necessary optical path length without increasing the height of the device, two reflecting mirrors 88 and 89 are installed.
A structure using a lens system 90 may also be adopted.
〔実施例３〕
酢酸ブチル（溶剤）とニトロセルロースを混合した液に
、粒径ｌμ肩乃至２ｎ程度のＴａＣの粉末を加えて塗布
液′を調製した。[Example 3] A coating solution' was prepared by adding TaC powder with a particle size of about 1μ to about 2n to a mixture of butyl acetate (solvent) and nitrocellulose.
この塗布液を用いて、第２図と同様の形状で主としてト
リエーテッドタングステンよりなる陰極の外表面の所定
部分に塗布膜を形成し、これを乾燥し、次いで減圧雰囲
気下において１９５０℃で１５分間にわたり焼結処理し
て、第２図と同様の領域に焼結部分を形成した。Using this coating solution, a coating film is formed on a predetermined portion of the outer surface of a cathode made mainly of thoriated tungsten and has a shape similar to that shown in FIG. A sintering process was performed over the entire length to form a sintered part in the same area as shown in FIG.
なお、陰極２０の全体の長さＬｌは２２ｍｍ、胴部２１
の外径Ｄ１は１０ｍｍ、先端部２２の平坦面２３の直径
Ｄ２は０．５ｍｍ、先端部２２において焼結されていな
い部分の長さＬ２は６ｍｍ、コーン状の先端部２２の角
度αは５０°である。なお、この角度αは、軸に沿った
切断面における角度である。Note that the overall length Ll of the cathode 20 is 22 mm, and the body 21
The outer diameter D1 of the tip 22 is 10 mm, the diameter D2 of the flat surface 23 of the tip 22 is 0.5 mm, the length L2 of the unsintered part of the tip 22 is 6 mm, and the angle α of the cone-shaped tip 22 is 50 mm. °. Note that this angle α is an angle on a cut plane along the axis.
以上の構成の陰極を用いて、第１図と同様の構成のショ
ートアーク型高圧水銀蒸気ランプを作製した。なお、希
ガスとしてはキセノンガスを用い、水銀の封入量は、定
常点灯時において発光管内の水銀の蒸気圧と希ガスの圧
力の和が８気圧となる割合である。そして、放電電流は
８３Ａである。A short arc type high pressure mercury vapor lamp having a structure similar to that shown in FIG. 1 was manufactured using the cathode having the above structure. Note that xenon gas is used as the rare gas, and the amount of mercury sealed is such that the sum of the vapor pressure of mercury in the arc tube and the pressure of the rare gas is 8 atmospheres during steady lighting. And the discharge current is 83A.
以上のようにして作製されたショートアーク型高圧水銀
蒸気ランプを、陰極２０が陽極３０に対して上方に位置
するよう電極間方向Ｐをほぼ垂直な姿勢に保持した状態
で実際に点灯する実験を行い、下記の項目について評価
した。An experiment was conducted in which the short-arc high-pressure mercury vapor lamp fabricated as described above was actually lit with the inter-electrode direction P held in a substantially vertical position so that the cathode 20 was positioned above the anode 30. and evaluated the following items.
（評価項目）
（１）光束の経時的変化
波長３６５ｎｍの紫外線の放射強度を測定し、初期値を
１００％としたときの相対値を求めた。結果は第５図に
示したとありである。(Evaluation Items) (1) Change in Luminous Flux over Time The radiation intensity of ultraviolet rays with a wavelength of 365 nm was measured, and the relative value was determined when the initial value was taken as 100%. The results are shown in FIG.
（２）電極間距離の経時的変化
電極間距離を実測した。なお、電極間距離の初期値は７
ｍｍである。結果は第６図に示したとおりである。(2) Change in inter-electrode distance over time The inter-electrode distance was actually measured. The initial value of the distance between the electrodes is 7.
It is mm. The results are shown in Figure 6.
〔比較例１〕
比較のため、陰極の外表面に焼結部分を形成しないほか
は上記実施例３と同様にして比較用のンヨートアーク型
高圧水銀蒸気ランプを作製し、このランプについても同
様にして評価した。[Comparative Example 1] For comparison, a comparative Nyoto arc type high-pressure mercury vapor lamp was manufactured in the same manner as in Example 3 above, except that no sintered portion was formed on the outer surface of the cathode, and this lamp was also manufactured in the same manner. evaluated.
なお、第５図および第６図において、曲線Ａは実施例３
の結果を表し、曲線ａは比較例１の結果を表す。
′
この第５図および第６図から明らかなように、実施例３
の本発明に係るショートアーク型高圧水銀蒸気ランプに
よれば、長時間にわたり十分な量の光束が得られ、長い
使用寿命が得られる。そして、電極間距離の経時的変化
がきわめて小さいため、反射鏡と組合せて使用する場合
に、陰極の先端近傍に形成されるアーク輝点の反射鏡の
焦点からの位置ずれが生じにくく、長時間にわたり十分
な集光性を維持することができる。In addition, in FIG. 5 and FIG. 6, curve A corresponds to Example 3.
Curve a represents the results of Comparative Example 1.
' As is clear from FIGS. 5 and 6, Example 3
According to the short arc type high pressure mercury vapor lamp according to the present invention, a sufficient amount of luminous flux can be obtained over a long period of time, and a long service life can be obtained. In addition, because the change in the distance between the electrodes over time is extremely small, when used in combination with a reflector, it is difficult for the arc bright spot formed near the tip of the cathode to shift from the focus of the reflector. Sufficient light-gathering performance can be maintained over the entire period.
これに対して、比較例１の比較用のショートアーク型高
圧水銀蒸気ランプによれば、短時間で光束が大幅に減少
し、使用寿命がきわめて短い。また、短時間で陰極の先
端が著しく消耗するため、アーク輝点の反射鏡の焦点か
らの位置ずれが生じやすく、集光性が早期に悪化する。On the other hand, according to the comparative short-arc high-pressure mercury vapor lamp of Comparative Example 1, the luminous flux decreases significantly in a short period of time, and the service life is extremely short. Furthermore, since the tip of the cathode is significantly worn out in a short period of time, the position of the arc bright spot is likely to shift from the focal point of the reflecting mirror, leading to early deterioration of light collection.
本発明によれば、定常点灯時において水銀の蒸気圧と希
ガスの圧力の和が８気圧以上で放電電流が２０Ａ以上と
なる大型のショートアーク型高圧水銀蒸気ランプにおい
て、陰極の消耗を十分に抑制することができ、管壁の黒
化を防止し、使用寿命を長くすることができる。According to the present invention, in a large short-arc high-pressure mercury vapor lamp in which the sum of mercury vapor pressure and rare gas pressure is 8 atm or more and the discharge current is 20 A or more during steady operation, cathode consumption can be sufficiently reduced. It is possible to prevent blackening of the tube wall and extend the service life.
第１図はショートアーク型高圧水銀蒸気ランプの断面図
、第２図は陰極および陽極の拡大図、第３図はショート
アーク型高圧水銀蒸気ランプを焼き付は用の光源として
用いる場合の使用の態様の一例を示す説明図、第４図は
使用の態様の他の例を示す説明図、第５図は光束の経時
的変化を示すグラフ、第６図は電極間距離の経時的変化
を示すグラフである。
１０・・・発光管 １１・・・膨出部２０・
・・陰極 ３０・・・陽極４１．４２・・
・口金 Ｐ・・・電極間方向５０・・・焼結部
分 ２Ｆ・・胴部２２・・・先端部
２３・・・平坦面８１・・・ショートアーク型高圧水
銀蒸気ランプ８２・・・被照射面 ８３・・・
凹面反射鏡８４・・・開口部 ８５・・・光
学系８６・・・ンヤッター″ ８７・・・点灯用電
源８８．８９・・・反射鏡 ９０・・・レンズ系
矛１図 や２図
十３図
八
＋５図
占、太■時藺 ｆｈｒｌ
＋−４図
−＋６図
７す、文子時間（ｈ「）Figure 1 is a cross-sectional view of a short-arc type high-pressure mercury vapor lamp, Figure 2 is an enlarged view of the cathode and anode, and Figure 3 is a diagram showing the use of a short-arc type high-pressure mercury vapor lamp when used as a light source for burn-in. FIG. 4 is an explanatory diagram showing an example of the mode of use, FIG. 4 is an explanatory diagram showing another example of the mode of use, FIG. 5 is a graph showing the change in luminous flux over time, and FIG. 6 is a graph showing the change over time in the distance between electrodes. It is a graph. 10... Arc tube 11... Swelling part 20.
...Cathode 30...Anode 41.42...
・Base P...Interelectrode direction 50...Sintered part 2F...Body part 22...Tip part
23...Flat surface 81...Short arc type high pressure mercury vapor lamp 82...Irradiated surface 83...
Concave reflector 84...Aperture 85...Optical system 86...Nyatter'' 87...Lighting power supply 88.89...Reflector 90...Lens system 1 and 2 Figure 13 Figure 8 + 5 illustration fortune-telling, thick ■ time fhrl + - 4 figure - + 6 figure 7 Su, Fumiko time (h ``)
Claims (1)
と陽極とが対向配置されてなり、前記陽極に対して前記
陰極が上方に位置するよう電極間方向がほぼ垂直な姿勢
で点灯され、当該陰極を主としてタングステンにより作
製しかつその先端を除く外表面の少なくとも一部に当該
タングステンよりも熱放射率の高い粉末を焼結し、定常
点灯時においては、水銀の蒸気圧と希ガスの圧力の和が
８気圧以上でかつ放電電流が２０Ａ以上で点灯されるこ
とを特徴とするショートアーク型高圧水銀蒸気ランプ。(1) A cathode and an anode are arranged facing each other in an arc tube in which mercury is sealed together with a rare gas, and the direction between the electrodes is substantially perpendicular to the anode so that the cathode is positioned above the anode. The cathode is mainly made of tungsten, and a powder having a higher thermal emissivity than the tungsten is sintered on at least a part of the outer surface excluding the tip, and during steady lighting, the vapor pressure of mercury and the pressure of rare gas are sintered. A short-arc high-pressure mercury vapor lamp characterized in that it is lit at a sum of 8 atm or more and a discharge current of 20 A or more.
Priority Applications (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| JP12428789A JPH02304857A (en) | 1989-05-19 | 1989-05-19 | Short arc type high pressure mercury vapor lamp |
Applications Claiming Priority (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| JP12428789A JPH02304857A (en) | 1989-05-19 | 1989-05-19 | Short arc type high pressure mercury vapor lamp |
Publications (1)
| Publication Number | Publication Date |
|---|---|
| JPH02304857A true JPH02304857A (en) | 1990-12-18 |
Family
ID=14881604
Family Applications (1)
| Application Number | Title | Priority Date | Filing Date |
|---|---|---|---|
| JP12428789A Pending JPH02304857A (en) | 1989-05-19 | 1989-05-19 | Short arc type high pressure mercury vapor lamp |
Country Status (1)
| Country | Link |
|---|---|
| JP (1) | JPH02304857A (en) |
Cited By (11)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| EP0791950A2 (en) * | 1996-02-23 | 1997-08-27 | Ushiodenki Kabushiki Kaisha | Discharge lamp of the short arc type |
| EP0703600A3 (en) * | 1994-09-21 | 1998-05-06 | Patent-Treuhand-Gesellschaft für elektrische Glühlampen mbH | High pressure discharge lamp |
| JPH10261383A (en) * | 1997-03-18 | 1998-09-29 | Ushio Inc | Short arc discharge lamp |
| EP1047109A1 (en) * | 1999-04-21 | 2000-10-25 | Ushiodenki Kabushiki Kaisha | Short-arc discharge lamp |
| US6215247B1 (en) | 1997-10-03 | 2001-04-10 | Orc Manufacturing Co., Ltd. | Construction of electrode for high pressure discharge lamp and process for producing the same |
| KR100375617B1 (en) * | 1998-08-06 | 2003-03-10 | 파텐트-트로이한트-게젤샤프트 퓌어 엘렉트리쉐 글뤼람펜 엠베하 | Long-life electrode for high pressure discharge lamp |
| KR100389999B1 (en) * | 1995-06-26 | 2003-10-04 | 우시오덴키 가부시키가이샤 | Short arc type mercury lamp and its lighting method |
| JP2004259639A (en) * | 2003-02-27 | 2004-09-16 | Allied Material Corp | Discharge lamp and its electrode structure |
| JP2009105059A (en) * | 2009-01-05 | 2009-05-14 | Allied Material Corp | Electrode structure for discharge lamp |
| US7719193B2 (en) | 2007-02-02 | 2010-05-18 | Ushio Denki Kabushiki Kaisha | Discharge lamp cathode having tip, middle, and body portions |
| JP2012133994A (en) * | 2010-12-21 | 2012-07-12 | Orc Manufacturing Co Ltd | Discharge lamp |
Citations (2)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| JPS4840279A (en) * | 1971-09-27 | 1973-06-13 | ||
| JPS6056346A (en) * | 1983-09-08 | 1985-04-01 | Ushio Inc | Semiconductor exposure apparatus |
-
1989
- 1989-05-19 JP JP12428789A patent/JPH02304857A/en active Pending
Patent Citations (2)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| JPS4840279A (en) * | 1971-09-27 | 1973-06-13 | ||
| JPS6056346A (en) * | 1983-09-08 | 1985-04-01 | Ushio Inc | Semiconductor exposure apparatus |
Cited By (17)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| EP0703600A3 (en) * | 1994-09-21 | 1998-05-06 | Patent-Treuhand-Gesellschaft für elektrische Glühlampen mbH | High pressure discharge lamp |
| KR100389999B1 (en) * | 1995-06-26 | 2003-10-04 | 우시오덴키 가부시키가이샤 | Short arc type mercury lamp and its lighting method |
| EP0791950A2 (en) * | 1996-02-23 | 1997-08-27 | Ushiodenki Kabushiki Kaisha | Discharge lamp of the short arc type |
| EP0791950A3 (en) * | 1996-02-23 | 1997-12-10 | Ushiodenki Kabushiki Kaisha | Discharge lamp of the short arc type |
| US5929565A (en) * | 1996-02-23 | 1999-07-27 | Ushiodenki Kabushiki Kaisha | Short arc discharge lamp having anode with tungsten coating thereon |
| JPH10261383A (en) * | 1997-03-18 | 1998-09-29 | Ushio Inc | Short arc discharge lamp |
| KR100499618B1 (en) * | 1997-03-18 | 2005-10-24 | 우시오덴키 가부시키가이샤 | Short Arc Discharge Lamp |
| US6215247B1 (en) | 1997-10-03 | 2001-04-10 | Orc Manufacturing Co., Ltd. | Construction of electrode for high pressure discharge lamp and process for producing the same |
| KR100375617B1 (en) * | 1998-08-06 | 2003-03-10 | 파텐트-트로이한트-게젤샤프트 퓌어 엘렉트리쉐 글뤼람펜 엠베하 | Long-life electrode for high pressure discharge lamp |
| US6437508B1 (en) | 1999-04-21 | 2002-08-20 | Ushiodenki Kabushiki Kaisha | Short-arc discharge lamp |
| EP1047109A1 (en) * | 1999-04-21 | 2000-10-25 | Ushiodenki Kabushiki Kaisha | Short-arc discharge lamp |
| KR100528232B1 (en) * | 1999-04-21 | 2005-11-15 | 우시오덴키 가부시키가이샤 | Short Arc Electric Discharge Lamp |
| JP2004259639A (en) * | 2003-02-27 | 2004-09-16 | Allied Material Corp | Discharge lamp and its electrode structure |
| US7719193B2 (en) | 2007-02-02 | 2010-05-18 | Ushio Denki Kabushiki Kaisha | Discharge lamp cathode having tip, middle, and body portions |
| JP2009105059A (en) * | 2009-01-05 | 2009-05-14 | Allied Material Corp | Electrode structure for discharge lamp |
| JP2012133994A (en) * | 2010-12-21 | 2012-07-12 | Orc Manufacturing Co Ltd | Discharge lamp |
| TWI509655B (en) * | 2010-12-21 | 2015-11-21 | Univ Shinshu | Discharge lamp |
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