CN101907452A - Sine mechanism calibration device and method used under ultrahigh vacuum environment - Google Patents
Sine mechanism calibration device and method used under ultrahigh vacuum environment Download PDFInfo
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- CN101907452A CN101907452A CN201010222823.0A CN201010222823A CN101907452A CN 101907452 A CN101907452 A CN 101907452A CN 201010222823 A CN201010222823 A CN 201010222823A CN 101907452 A CN101907452 A CN 101907452A
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Abstract
The invention discloses a sine mechanism calibration device and a sine mechanism calibration method used under an ultrahigh vacuum environment, which relate to the field of sine mechanism calibration. The sine mechanism calibration device comprises a high-accuracy photoelectric auto-collimator, an auto-collimator bracket, a polyhedral angle prism, a prism rack, a sine mechanism, a vacuum prism box and a support platform, wherein the high-accuracy photoelectric auto-collimator is arranged on the auto-collimator bracket; a light-emitting hole of the high-accuracy photoelectric auto-collimator is dead against an observation window on the vacuum prism box; the vacuum prism box is arranged on the support platform; the sine mechanism is arranged in the vacuum prism box; the polyhedral angle prism is fixed at one end of a sine bar of the sine mechanism through the prism rack; the first prism face of the angle prism is vertical to the axis of the high-accuracy photoelectric auto-collimator; the high-accuracy photoelectric auto-collimator is arranged outside the vacuum prism box; the second prism face of the angle prism forms an angle of two degrees to the first prism face of the angle prism; the third prism face of the angle prism forms the angle of two degrees to the second prism face; and the fourth prism face of the angle prism forms the angle of two degrees to the third prism face. The sine mechanism calibration device and the sine mechanism calibration method have the advantages of capability of realizing the real-time calibration of the sine mechanism under the ultrahigh vacuum environment, simple structure, high calibration accuracy, low cost and application to synchrotron radiation beam line engineering.
Description
Technical field
The present invention relates to the sine mechanism calibration field, particularly a kind ofly be used for sine mechanism calibration device and method under the ultra-high vacuum environment.
Background technology
In all kinds of science engineerings, in large-scale synchrotron radiation light beam line system, the demarcation of sine mechanism is the gordian technique that realizes the angular turn parts under ultra-high vacuum environment.The sine mechanism of in the past having demarcated in atmosphere is operated in ultra-high vacuum environment following time, due to factors such as pressure, causes calibration result to change, and reduces work quality.Owing to lack the method and apparatus that offset of sinusoidal mechanism monitors in real time, demarcates under ultra-high vacuum environment, the problems referred to above are not well solved.Therefore, developing can be imperative at the method and apparatus that offset of sinusoidal mechanism under the ultra-high vacuum environment monitors in real time, demarcates.
Summary of the invention
At above-mentioned situation, for solving the defective of prior art, purpose of the present invention just is to provide a kind of be used for sine mechanism calibration device and method under the ultra-high vacuum environment, can effectively solve under the ultravacuum environment problem of can not offset of sinusoidal mechanism monitoring in real time and demarcating.
The technical scheme that technical solution problem of the present invention is adopted is: a kind ofly be used for that sine mechanism calibration device comprises the high precision photoelectric autocollimator under the ultra-high vacuum environment, the autocollimator support, the polyhedron angle prism, prism holder, sine mechanism, vacuum mirrored cabinet and support platform, the high precision photoelectric autocollimator is contained on the autocollimator support, its lightening hole is aimed at the view window on the vacuum mirrored cabinet, the vacuum mirrored cabinet is placed on the support platform, sine mechanism is contained in vacuum mirrored cabinet the inside, the polyhedron angle prism is fixed on an end of the sine bar of sine mechanism by prism holder, the vertical high precision photoelectric autocollimator of first prism facets axis of polyhedron angle prism, the high precision photoelectric autocollimator is placed on the outside of vacuum mirrored cabinet, between second prism facets and first prism facets of said polyhedron angle prism, between the prism surface and second prism facets, all differ angle twice between the 4th prism facets and the prism surface.
The application process that is used for sine mechanism calibration device under the ultra-high vacuum environment of the present invention, concrete steps are as follows:
1) regulate turntable, directional light vertical irradiation polyhedron angle prism first prism facets that photoelectric auto-collimator is sent, promptly high precision photoelectric autocollimator reading is " 0 ";
2) driving mechanism by accurate slide unit assembly promotes sine bar and rotates, and drives the rotation of polyhedron angle prism, and when directional light vertical irradiation during in angle prism second prism facets, sine bar turns over angle and is the angle [alpha] that the polyhedron angle prism is demarcated
1, write down the straight-line displacement h that high precision photoelectric autocollimator reading and corresponding linear scrambler are measured simultaneously
1, finish the measurement of the 1st angle;
3) be rotated further sine bar, vertical irradiation is when the prism surface of polyhedron angle prism, the 4th prism facets respectively for the directional light that sends when the high precision photoelectric autocollimator, and sine bar turns over α
2, α
3Angle, the record autocollimator reading separately and the straight-line displacement h of corresponding linear scrambler measurement
2, h
3, finish the measurement of the 2nd, the 3rd angle; So far, the measurement of completed 3 angles is as one group of unidirectional measurement;
4) repeat above-mentioned steps, finish many groups and measure;
5) after measurement of angle is finished, by the relational expression between rotational angle a and straight-line displacement h and the long L of sine mechanism bar:
In conjunction with actual angle α
1, α
2, α
3And straight-line displacement h
1, h
2, h
3Get following system of equations:
Wherein, h
0For initially departing from displacement, α
0Be initial deviation angle; By above system of equations,, promptly try to achieve L, h through data processing
0, α
0, realize the demarcation of sine mechanism.
Present invention can be implemented in the real-time calibration of offset of sinusoidal mechanism under the ultra-high vacuum environment, have easy to operate, simple in structure, stated accuracy is high and low cost and other advantages, can be widely used in the synchrotron radiation light beam line engineering.
Description of drawings
Fig. 1 is a kind of structural front view that is used for sine mechanism calibration device under the ultra-high vacuum environment of the present invention.
Fig. 2 is a kind of vertical view that is used for sine mechanism calibration device under the ultra-high vacuum environment of the present invention.
Fig. 3 is a kind of structural drawing that is used for the polyhedron angle prism of sine mechanism calibration device under the ultra-high vacuum environment of the present invention.
Fig. 4 is a kind of schematic diagram that is used for sine mechanism calibration method under the ultra-high vacuum environment of the present invention.
Among the figure, 1, first prism facets, 2, second prism facets, 3, prism surface, 4, the 4th prism facets, 5, the high precision photoelectric autocollimator, 6, the polyhedron angle prism, 7, prism holder, 8, sine bar, 9, first clothes-hook, 10, extension spring, 11, second clothes-hook, 12, sine mechanism push rod, 13, accurate slide unit assembly, 14, linear encoder, 15, turntable, 16, support, 17, support platform, 18, autocollimator support, 19, the vacuum mirrored cabinet, 20, view window.
Embodiment
Elaborate to of the present invention below in conjunction with accompanying drawing.
By Fig. 1, shown in 2, of the present inventionly a kind ofly be used for that sine mechanism calibration device comprises high precision photoelectric autocollimator 5 under the ultra-high vacuum environment, autocollimator support 18, polyhedron angle prism 6, prism holder 7, sine mechanism, vacuum mirrored cabinet 19 and support platform 17, high precision photoelectric autocollimator 5 is contained on the autocollimator support 18, its lightening hole is aimed at the view window 20 on the vacuum mirrored cabinet 19, vacuum mirrored cabinet 19 is placed on the support platform 17, sine mechanism is contained in vacuum mirrored cabinet 19 the insides, polyhedron angle prism 6 is fixed on an end of the sine bar 8 of sine mechanism by prism holder 7, first prism facets, 1 vertical high precision photoelectric autocollimator 5 axis of polyhedron angle prism, high precision photoelectric autocollimator 5 is placed on the outside of vacuum mirrored cabinet 19, between second prism facets 2 and first prism facets 1 of said polyhedron angle prism 6, between the prism surface 3 and second prism facets 2, all differ angle twice between the 4th prism facets 4 and the prism surface 3.
The end that said sine bar 8 links to each other with sine mechanism push rod 12 is equipped with first clothes-hook 9, the end that sine mechanism push rod 12 links to each other with sine bar 8 is equipped with second clothes-hook 11, first clothes-hook 9 links to each other by extension spring 10 with second clothes-hook 11, sine mechanism push rod 12 vertical support frames 16 shaft centerlines.
Said sine mechanism also comprises accurate slide unit assembly 13, and accurate slide unit assembly 13 is positioned at below the support platform 17, links to each other with the other end of sine mechanism push rod 12, in the accurate slide unit assembly 13 linear encoder 14 is housed.
Shown in Fig. 3,4, a kind of sine mechanism calibration method concrete steps that are used under the ultra-high vacuum environment of the present invention are as follows:
1) regulate turntable 15, directional light vertical irradiation polyhedron angle prism 6 first prism facets 1 that photoelectric auto-collimator is sent, promptly the autocollimator reading is " 0 ";
2) driving mechanism by accurate slide unit assembly 13 promotes sine bar 8 and rotates, and drives 6 rotations of polyhedron angle prism, and when directional light vertical irradiation during in angle prism second prism facets 2, sine bar 8 turns over angle and is the angle [alpha] that polyhedron angle prism 6 is demarcated
1, write down the straight-line displacement h that high precision photoelectric autocollimator 5 readings and corresponding linear scrambler 14 are measured simultaneously
1, finish the measurement of the 1st angle;
3) be rotated further sine bar 8, distinguish prism surface 3, four prism facets 4 of vertical irradiation at polyhedron angle prism 6 when the directional light that high precision photoelectric autocollimator 5 sends, sine bar 8 turns over α
2, α
3Angle, record autocollimator 5 readings separately and the straight-line displacement h of corresponding linear scrambler 14 measurements
2, h
3, finish the measurement of the 2nd, the 3rd angle; So far, the measurement of completed 3 angles is as one group of unidirectional measurement;
4) repeat above-mentioned steps, finish many groups and measure;
5) after measurement of angle is finished, by the relational expression between rotational angle a and straight-line displacement h and the long L of sine mechanism bar:
In conjunction with actual angle α
1, α
2, α
3And straight-line displacement h
1, h
2, h
3Get following system of equations:
Wherein, h
0For initially departing from displacement, α
0Be initial deviation angle.By above system of equations,, promptly try to achieve L, h through data processing
0, α
0, realize the demarcation of sine mechanism.
Using this device offset of sinusoidal mechanism calibration is that vacuum mirrored cabinet of the present invention inside is the ultravacuum environment.
Present invention can be implemented in the real-time calibration of offset of sinusoidal mechanism under the ultra-high vacuum environment, have easy to operate, simple in structure, stated accuracy is high and low cost and other advantages, can be widely used in the synchrotron radiation light beam line engineering.
Claims (5)
1. one kind is used for sine mechanism calibration device under the ultra-high vacuum environment, it is characterized in that, comprise high precision photoelectric autocollimator (5), autocollimator support (18), polyhedron angle prism (6), prism holder (7), sine mechanism, vacuum mirrored cabinet (19) and support platform (17), high precision photoelectric autocollimator (5) is contained on the autocollimator support (18), its lightening hole is aimed at the view window (20) on the vacuum mirrored cabinet (19), vacuum mirrored cabinet (19) is placed on the support platform (17), sine mechanism is contained in vacuum mirrored cabinet (19) the inside, polyhedron angle prism (6) is fixed on an end of the sine bar (8) of sine mechanism by prism holder (7), vertical high precision photoelectric autocollimator (5) axis of first prism facets (1) of polyhedron angle prism, high precision photoelectric autocollimator (5) is placed on the outside of vacuum mirrored cabinet (19), between second prism facets (2) and first prism facets (1) of said polyhedron angle prism (6), between prism surface (3) and second prism facets (2), all differ angle twice between the 4th prism facets (4) and the prism surface (3).
2. according to claim 1ly be used for sine mechanism calibration device under the ultra-high vacuum environment, it is characterized in that, said sine mechanism comprises sine bar (8), sine mechanism push rod (12), turntable (15), support (16) and accurate slide unit assembly (13), support (16) is fixed on the support platform (17), turntable (15) is installed in the rotating shaft of support (16), sine bar (8) is contained on the turntable (15), support platform (17) has the through hole corresponding to sine mechanism push rod (12) on the position of sine bar (8) other end, sine mechanism push rod (12) passes through hole and links to each other with the other end of sine bar (8).
3. according to claim 1ly be used for sine mechanism calibration device under the ultra-high vacuum environment, it is characterized in that, the end that said sine bar (8) links to each other with sine mechanism push rod (12) is equipped with first clothes-hook (9), the end that sine mechanism push rod (12) links to each other with sine bar (8) is equipped with second clothes-hook (11), first clothes-hook (9) links to each other by extension spring (10) with second clothes-hook (11), sine mechanism push rod (12) vertical support frame (16) shaft centerline.
4. according to claim 1ly be used for sine mechanism calibration device under the ultra-high vacuum environment, it is characterized in that, said sine mechanism also comprises accurate slide unit assembly (13), accurate slide unit assembly (13) is positioned at below the support platform (17), link to each other with the other end of sine mechanism push rod (12), linear encoder (14) is housed in the accurate slide unit assembly (13).
5. the described application process that is used for sine mechanism calibration device under the ultra-high vacuum environment of claim 1 is characterized in that concrete steps are as follows:
1) regulate turntable (15), directional light vertical irradiation polyhedron angle prism (6) first prism facets (1) that photoelectric auto-collimator is sent, promptly high precision photoelectric autocollimator (5) reading is " 0 ";
2) driving mechanism by accurate slide unit assembly (13), promoting sine bar (8) rotates, drive polyhedron angle prism (6) rotation, when directional light vertical irradiation during in angle prism second prism facets (2), sine bar (8) turns over angle and is the angle [alpha] that polyhedron angle prism (6) is demarcated
1, write down the straight-line displacement h that high precision photoelectric autocollimator (5) reading and corresponding linear scrambler (14) are measured simultaneously
1, finish the measurement of the 1st angle;
3) be rotated further sine bar (8), vertical irradiation is when the prism surface (3) of polyhedron angle prism (6), the 4th prism facets (4) respectively for the directional light that sends when high precision photoelectric autocollimator (5), and sine bar (8) turns over α
2, α
3Angle, the record autocollimator reading separately and the straight-line displacement h of corresponding linear scrambler (14) measurement
2, h
3, finish the measurement of the 2nd, the 3rd angle; So far, the measurement of completed 3 angles is as one group of unidirectional measurement;
4) repeat above-mentioned steps, finish many groups and measure;
5) after measurement of angle is finished, by the relational expression between rotational angle a and straight-line displacement h and the long L of sine mechanism bar:
In conjunction with actual angle α
1, α
2, α
3And straight-line displacement h
1, h
2, h
3Get following system of equations:
Wherein, h
0For initially departing from displacement, α
0Be initial deviation angle; By above system of equations,, promptly try to achieve L, h through data processing
0, α
0, realize the demarcation of sine mechanism.
Priority Applications (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| CN201010222823.0A CN101907452A (en) | 2010-07-12 | 2010-07-12 | Sine mechanism calibration device and method used under ultrahigh vacuum environment |
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|---|---|---|---|
| CN201010222823.0A CN101907452A (en) | 2010-07-12 | 2010-07-12 | Sine mechanism calibration device and method used under ultrahigh vacuum environment |
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Cited By (4)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| CN102798409A (en) * | 2011-05-23 | 2012-11-28 | 长春翔翼科技有限公司 | Calibration device of absolute type shaft angle encoder |
| CN104483741A (en) * | 2014-11-20 | 2015-04-01 | 中国工程物理研究院激光聚变研究中心 | Method for accurately setting optical axis of wedge lens |
| CN104483757A (en) * | 2014-11-20 | 2015-04-01 | 中国工程物理研究院激光聚变研究中心 | Precise axis fixing method for abaxial non-spherical element |
| CN105403977A (en) * | 2014-08-28 | 2016-03-16 | 上海微电子装备有限公司 | Prism centering adjustment mechanism |
Citations (3)
| Publication number | Priority date | Publication date | Assignee | Title |
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| JP2004117232A (en) * | 2002-09-27 | 2004-04-15 | Jeol Ltd | Stage position measuring device for scanning electronic microscope |
| CN101153819A (en) * | 2006-09-29 | 2008-04-02 | 中国科学院长春光学精密机械与物理研究所 | Method for optical spectrum tuning angle calibration of monochromator with variable included angle |
| CN201318988Y (en) * | 2008-11-25 | 2009-09-30 | 河南平高电气股份有限公司 | Index head calibrating device |
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2010
- 2010-07-12 CN CN201010222823.0A patent/CN101907452A/en active Pending
Patent Citations (3)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| JP2004117232A (en) * | 2002-09-27 | 2004-04-15 | Jeol Ltd | Stage position measuring device for scanning electronic microscope |
| CN101153819A (en) * | 2006-09-29 | 2008-04-02 | 中国科学院长春光学精密机械与物理研究所 | Method for optical spectrum tuning angle calibration of monochromator with variable included angle |
| CN201318988Y (en) * | 2008-11-25 | 2009-09-30 | 河南平高电气股份有限公司 | Index head calibrating device |
Non-Patent Citations (1)
| Title |
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| 《光学精密工程》 20100131 吴坤等 SX-700单色器光栅正弦机构转角重复精度的模拟分析与测量 45－51页 1－5 第18卷, 第1期 2 * |
Cited By (6)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| CN102798409A (en) * | 2011-05-23 | 2012-11-28 | 长春翔翼科技有限公司 | Calibration device of absolute type shaft angle encoder |
| CN105403977A (en) * | 2014-08-28 | 2016-03-16 | 上海微电子装备有限公司 | Prism centering adjustment mechanism |
| CN104483741A (en) * | 2014-11-20 | 2015-04-01 | 中国工程物理研究院激光聚变研究中心 | Method for accurately setting optical axis of wedge lens |
| CN104483757A (en) * | 2014-11-20 | 2015-04-01 | 中国工程物理研究院激光聚变研究中心 | Precise axis fixing method for abaxial non-spherical element |
| CN104483741B (en) * | 2014-11-20 | 2017-07-18 | 中国工程物理研究院激光聚变研究中心 | Wedge-shaped lens precision axis fixation method |
| CN104483757B (en) * | 2014-11-20 | 2018-01-12 | 中国工程物理研究院激光聚变研究中心 | Off-axis aspheric surface element precision axis fixation method |
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Application publication date: 20101208 |