CN101907452A - A calibration device and method for sinusoidal mechanism in ultra-high vacuum environment - Google Patents

Abstract

The invention discloses a sine mechanism calibration device and a sine mechanism calibration method used under an ultrahigh vacuum environment, which relate to the field of sine mechanism calibration. The sine mechanism calibration device comprises a high-accuracy photoelectric auto-collimator, an auto-collimator bracket, a polyhedral angle prism, a prism rack, a sine mechanism, a vacuum prism box and a support platform, wherein the high-accuracy photoelectric auto-collimator is arranged on the auto-collimator bracket; a light-emitting hole of the high-accuracy photoelectric auto-collimator is dead against an observation window on the vacuum prism box; the vacuum prism box is arranged on the support platform; the sine mechanism is arranged in the vacuum prism box; the polyhedral angle prism is fixed at one end of a sine bar of the sine mechanism through the prism rack; the first prism face of the angle prism is vertical to the axis of the high-accuracy photoelectric auto-collimator; the high-accuracy photoelectric auto-collimator is arranged outside the vacuum prism box; the second prism face of the angle prism forms an angle of two degrees to the first prism face of the angle prism; the third prism face of the angle prism forms the angle of two degrees to the second prism face; and the fourth prism face of the angle prism forms the angle of two degrees to the third prism face. The sine mechanism calibration device and the sine mechanism calibration method have the advantages of capability of realizing the real-time calibration of the sine mechanism under the ultrahigh vacuum environment, simple structure, high calibration accuracy, low cost and application to synchrotron radiation beam line engineering.

Description

A calibration device and method for sinusoidal mechanism in ultra-high vacuum environment

technical field

The invention relates to the field of sinusoidal mechanism calibration, in particular to a sinusoidal mechanism calibration device and method in an ultra-high vacuum environment.

Background technique

In various scientific projects, such as large-scale synchrotron radiation beamline systems, the calibration of sinusoidal mechanisms in ultra-high vacuum environments is a key technology to realize angular rotation components. The sinusoidal mechanism that has been calibrated in the atmosphere in the past, when working in an ultra-high vacuum environment, is caused by factors such as pressure, which causes changes in the calibration results and reduces the quality of work. Due to the lack of methods and devices for real-time monitoring and calibration of sinusoidal mechanisms in an ultra-high vacuum environment, the above problems have not been well resolved. Therefore, it is imperative to develop a method and device capable of real-time monitoring and calibration of sinusoidal mechanisms in an ultra-high vacuum environment.

Contents of the invention

In view of the above situation, in order to solve the defects of the prior art, the object of the present invention is to provide a device and method for calibrating sinusoidal mechanisms in an ultra-high vacuum environment, which can effectively solve the problem that the sinusoidal mechanism cannot be monitored in real time in an ultra-vacuum environment. and calibration issues.

The technical solution adopted by the present invention to solve the technical problem is: a sine mechanism calibration device used in an ultra-high vacuum environment includes a high-precision photoelectric autocollimator, an autocollimator bracket, a polyhedral corner prism, a prism frame, a sine mechanism, Vacuum mirror box and support platform, the high-precision photoelectric autocollimator is installed on the autocollimator bracket, and its light-emitting hole is aligned with the observation window on the vacuum mirror box, the vacuum mirror box is placed on the support platform, and the sinusoidal mechanism is installed on the vacuum mirror box. Inside the mirror box, the polyhedral corner prism is fixed on one end of the sine rod of the sine mechanism through the prism frame, the first prism surface of the polyhedron corner prism is perpendicular to the axis of the high-precision photoelectric autocollimator, and the high-precision photoelectric autocollimator is placed in the vacuum mirror box The outside of said polyhedral corner prism is between the second prism face and the first prism face, between the third prism face and the second prism face, and between the fourth prism face and the third prism face.

The application method of the present invention for the calibration device of the sinusoidal mechanism in the ultra-high vacuum environment, the specific steps are as follows:

1) Adjust the turntable so that the parallel light emitted by the photoelectric autocollimator vertically illuminates the first prism surface of the polyhedral corner prism, that is, the reading of the high-precision photoelectric autocollimator is "0";

2) Through the driving mechanism of the precision sliding table assembly, the sine rod is driven to rotate, and the polyhedral corner prism is driven to rotate. When the parallel light is vertically irradiated on the second prism surface of the corner prism, the angle through which the sine rod rotates is the angle calibrated by the polyhedron corner prism α ₁ , simultaneously record the readings of the high-precision photoelectric autocollimator and the linear displacement h ₁ measured by the corresponding linear encoder, and complete the measurement of the first angle;

3) Continue to rotate the sine rod. When the parallel light emitted by the high-precision photoelectric autocollimator is vertically irradiated on the third prism surface and the fourth prism surface of the polyhedral corner prism, the sine rod rotates through the α ₂ and α ₃ angles, and records the respective The readings of the autocollimator and the linear displacement h ₂ and h ₃ measured by the corresponding linear encoder complete the measurement of the second and third angles; so far, the measurements of the three angles that have been completed are taken as a set of one-way measurements ;

4) Repeat the above steps to complete multiple sets of measurements;

5) After the angle measurement is completed, through the relationship between the rotation angle a, the linear displacement h and the length L of the sine mechanism rod: Combining the actual angle α ₁ , α ₂ , α ₃ and the linear displacement h ₁ , h ₂ , h ₃ to get the following equations:

${\mathrm{<span\; class="notranslate">\; a</span>}}_{\mathrm{<span\; class="notranslate">\; 1</span>}}<span\; class="notranslate">\; =</span>\mathrm{<span\; class="notranslate">\; arcsin</span>}<span\; class="notranslate">\; (</span>\frac{{\mathrm{<span\; class="notranslate">\; h</span>}}_{\mathrm{<span\; class="notranslate">\; 1</span>}}<span\; class="notranslate">\; +</span>{\mathrm{<span\; class="notranslate">\; h</span>}}_{\mathrm{<span\; class="notranslate">\; 0</span>}}}{\mathrm{<span\; class="notranslate">\; L</span>}}<span\; class="notranslate">\; )</span><span\; class="notranslate">\; -</span>{\mathrm{<span\; class="notranslate">\; a</span>}}_{\mathrm{<span\; class="notranslate">\; 0</span>}}<span\; class="notranslate">\; -</span><span\; class="notranslate">\; -</span><span\; class="notranslate">\; -</span><span\; class="notranslate">\; (</span>\mathrm{<span\; class="notranslate">\; 1</span>}<span\; class="notranslate">\; )</span>$

${\mathrm{<span\; class="notranslate">\; a</span>}}_{\mathrm{<span\; class="notranslate">\; 2</span>}}<span\; class="notranslate">\; =</span>\mathrm{<span\; class="notranslate">\; arcsin</span>}<span\; class="notranslate">\; (</span>\frac{{\mathrm{<span\; class="notranslate">\; h</span>}}_{\mathrm{<span\; class="notranslate">\; 2</span>}}<span\; class="notranslate">\; +</span>{\mathrm{<span\; class="notranslate">\; h</span>}}_{\mathrm{<span\; class="notranslate">\; 0</span>}}}{\mathrm{<span\; class="notranslate">\; L</span>}}<span\; class="notranslate">\; )</span><span\; class="notranslate">\; -</span>{\mathrm{<span\; class="notranslate">\; a</span>}}_{\mathrm{<span\; class="notranslate">\; 0</span>}}<span\; class="notranslate">\; -</span><span\; class="notranslate">\; -</span><span\; class="notranslate">\; -</span><span\; class="notranslate">\; (</span>\mathrm{<span\; class="notranslate">\; 2</span>}<span\; class="notranslate">\; )</span>$

${\mathrm{<span\; class="notranslate">\; a</span>}}_{\mathrm{<span\; class="notranslate">\; 3</span>}}<span\; class="notranslate">\; =</span>\mathrm{<span\; class="notranslate">\; arcsin</span>}<span\; class="notranslate">\; (</span>\frac{{\mathrm{<span\; class="notranslate">\; h</span>}}_{\mathrm{<span\; class="notranslate">\; 3</span>}}<span\; class="notranslate">\; +</span>{\mathrm{<span\; class="notranslate">\; h</span>}}_{\mathrm{<span\; class="notranslate">\; 0</span>}}}{\mathrm{<span\; class="notranslate">\; L</span>}}<span\; class="notranslate">\; )</span><span\; class="notranslate">\; -</span>{\mathrm{<span\; class="notranslate">\; a</span>}}_{\mathrm{<span\; class="notranslate">\; 0</span>}}<span\; class="notranslate">\; -</span><span\; class="notranslate">\; -</span><span\; class="notranslate">\; -</span><span\; class="notranslate">\; (</span>\mathrm{<span\; class="notranslate">\; 3</span>}<span\; class="notranslate">\; )</span>$

Among them, h ₀ is the initial deviation displacement, α ₀ is the initial deviation angle; from the above equations, after data processing, L, h ₀ and α ₀ are obtained to realize the calibration of the sinusoidal mechanism.

The invention can realize the real-time calibration of the sinusoidal mechanism in an ultra-high vacuum environment, has the advantages of convenient operation, simple structure, high calibration precision and low cost, and can be widely used in synchrotron radiation beamline engineering.

Description of drawings

Fig. 1 is a structural front view of a sinusoidal mechanism calibration device used in an ultra-high vacuum environment according to the present invention.

Fig. 2 is a top view of a sinusoidal mechanism calibration device used in an ultra-high vacuum environment according to the present invention.

Fig. 3 is a structural diagram of a polyhedral corner prism used in a sinusoidal mechanism calibration device in an ultra-high vacuum environment according to the present invention.

FIG. 4 is a schematic diagram of a method for calibrating a sinusoidal mechanism in an ultra-high vacuum environment according to the present invention.

In the figure, 1, the first prism surface, 2, the second prism surface, 3, the third prism surface, 4, the fourth prism surface, 5, high-precision photoelectric autocollimator, 6, polyhedron corner prism, 7, prism frame , 8, sine rod, 9, the first peg, 10, tension spring, 11, the second peg, 12, sine mechanism push rod, 13, precision sliding table assembly, 14, linear encoder, 15, turntable, 16 , bracket, 17, support platform, 18, autocollimator bracket, 19, vacuum mirror box, 20, observation window.

Detailed ways

The present invention will be described in detail below in conjunction with the accompanying drawings.

Shown in Fig. 1, 2, a kind of calibration device for sinusoidal mechanism of the present invention comprises high-precision photoelectric autocollimator 5, autocollimator support 18, polyhedron corner prism 6, prism frame 7 under ultra-high vacuum environment , sine mechanism, vacuum mirror box 19 and support platform 17, high-precision photoelectric autocollimator 5 is contained on the autocollimator support 18, and its luminescent hole is aimed at the observation window 20 on the vacuum mirror box 19, vacuum mirror box 19 Placed on the support platform 17, the sinusoidal mechanism is contained in the vacuum mirror box 19 inside, and the polyhedral angular prism 6 is fixed on one end of the sinusoidal rod 8 of the sinusoidal mechanism by the prism frame 7, and the first prism face 1 of the polyhedral angular prism is vertical and high-precision photoelectric Collimator 5 axis, high-precision photoelectric autocollimator 5 is placed on the outside of vacuum mirror box 19, between the second prism face 2 of said polyhedron corner prism 6 and the first prism face 1, the third prism face 3 and the first prism face 1. There is an angle difference of two degrees between the second prism surfaces 2 and between the fourth prism surface 4 and the third prism surface 3 .

The end that said sine bar 8 links to each other with sine mechanism push rod 12 is equipped with the first peg 9, and the end that sine mechanism push rod 12 links to each other with sine bar 8 is equipped with the second peg 11, the first peg 9 and the first peg 9. The two pegs 11 are connected by extension springs 10, and the sinusoidal mechanism push rod 12 is vertical to the central line of the support 16 rotating shafts.

Said sinusoidal mechanism also includes a precision slide assembly 13, which is located under the support platform 17 and connected to the other end of the push rod 12 of the sinusoidal mechanism, and a linear encoder 14 is housed in the precision slide assembly 13.

As shown in Figures 3 and 4, the specific steps of a method for calibrating a sinusoidal mechanism in an ultra-high vacuum environment according to the present invention are as follows:

1) Adjust the turntable 15 so that the parallel light emitted by the photoelectric autocollimator vertically irradiates the first prism surface 1 of the polyhedral corner prism 6, that is, the reading of the autocollimator is "0";

2) Through the driving mechanism of the precision slide assembly 13, the sinusoidal rod 8 is pushed to rotate, and the polyhedron corner prism 6 is driven to rotate. When the parallel light is vertically irradiated on the second prism surface 2 of the corner prism, the angle through which the sinusoidal rod 8 rotates is the polyhedron angle The angle α ₁ calibrated by the prism 6, while recording the reading of the high-precision photoelectric autocollimator 5 and the corresponding linear displacement h ₁ measured by the linear encoder 14, completes the measurement of the first angle;

3) Continue to rotate the sine rod 8. When the parallel light emitted by the high-precision photoelectric autocollimator 5 is respectively vertically irradiated on the third prism face 3 and the fourth prism face 4 of the polyhedral corner prism 6, the sine rod 8 rotates through α ₂ , α ₃ angles, record the readings of the autocollimator 5 and the linear displacement h ₂ and h ₃ measured by the corresponding linear encoder 14, and complete the measurement of the second and third angles; so far, the measurements of the 3 angles have been completed , as a set of one-way measurements;

4) Repeat the above steps to complete multiple sets of measurements;

结合实际角度α₁、α₂、α₃及直线位移h₁、h₂、h₃得如下方程组：5) After the angle measurement is completed, through the relationship between the rotation angle a, the linear displacement h and the length L of the sine mechanism rod:

Combining the actual angle α ₁ , α ₂ , α ₃ and the linear displacement h ₁ , h ₂ , h ₃ to get the following equations:

${\mathrm{<span\; class="notranslate">\; a</span>}}_{\mathrm{<span\; class="notranslate">\; 1</span>}}<span\; class="notranslate">\; =</span>\mathrm{<span\; class="notranslate">\; arcsin</span>}<span\; class="notranslate">\; (</span>\frac{{\mathrm{<span\; class="notranslate">\; h</span>}}_{\mathrm{<span\; class="notranslate">\; 1</span>}}<span\; class="notranslate">\; +</span>{\mathrm{<span\; class="notranslate">\; h</span>}}_{\mathrm{<span\; class="notranslate">\; 0</span>}}}{\mathrm{<span\; class="notranslate">\; L</span>}}<span\; class="notranslate">\; )</span><span\; class="notranslate">\; -</span>{\mathrm{<span\; class="notranslate">\; a</span>}}_{\mathrm{<span\; class="notranslate">\; 0</span>}}<span\; class="notranslate">\; -</span><span\; class="notranslate">\; -</span><span\; class="notranslate">\; -</span><span\; class="notranslate">\; (</span>\mathrm{<span\; class="notranslate">\; 1</span>}<span\; class="notranslate">\; )</span>$

${\mathrm{<span\; class="notranslate">\; a</span>}}_{\mathrm{<span\; class="notranslate">\; 2</span>}}<span\; class="notranslate">\; =</span>\mathrm{<span\; class="notranslate">\; arcsin</span>}<span\; class="notranslate">\; (</span>\frac{{\mathrm{<span\; class="notranslate">\; h</span>}}_{\mathrm{<span\; class="notranslate">\; 2</span>}}<span\; class="notranslate">\; +</span>{\mathrm{<span\; class="notranslate">\; h</span>}}_{\mathrm{<span\; class="notranslate">\; 0</span>}}}{\mathrm{<span\; class="notranslate">\; L</span>}}<span\; class="notranslate">\; )</span><span\; class="notranslate">\; -</span>{\mathrm{<span\; class="notranslate">\; a</span>}}_{\mathrm{<span\; class="notranslate">\; 0</span>}}<span\; class="notranslate">\; -</span><span\; class="notranslate">\; -</span><span\; class="notranslate">\; -</span><span\; class="notranslate">\; (</span>\mathrm{<span\; class="notranslate">\; 2</span>}<span\; class="notranslate">\; )</span>$

${\mathrm{<span\; class="notranslate">\; a</span>}}_{\mathrm{<span\; class="notranslate">\; 3</span>}}<span\; class="notranslate">\; =</span>\mathrm{<span\; class="notranslate">\; arcsin</span>}<span\; class="notranslate">\; (</span>\frac{{\mathrm{<span\; class="notranslate">\; h</span>}}_{\mathrm{<span\; class="notranslate">\; 3</span>}}<span\; class="notranslate">\; +</span>{\mathrm{<span\; class="notranslate">\; h</span>}}_{\mathrm{<span\; class="notranslate">\; 0</span>}}}{\mathrm{<span\; class="notranslate">\; L</span>}}<span\; class="notranslate">\; )</span><span\; class="notranslate">\; -</span>{\mathrm{<span\; class="notranslate">\; a</span>}}_{\mathrm{<span\; class="notranslate">\; 0</span>}}<span\; class="notranslate">\; -</span><span\; class="notranslate">\; -</span><span\; class="notranslate">\; -</span><span\; class="notranslate">\; (</span>\mathrm{<span\; class="notranslate">\; 3</span>}<span\; class="notranslate">\; )</span>$

Among them, h ₀ is the initial deviation displacement, and α ₀ is the initial deviation angle. From the above equations, after data processing, L, h ₀ , α ₀ are obtained to realize the calibration of the sinusoidal mechanism.

When using the device to calibrate the sinusoidal mechanism, the inside of the vacuum mirror box of the present invention is an ultra-vacuum environment.

The invention can realize the real-time calibration of the sinusoidal mechanism in an ultra-high vacuum environment, has the advantages of convenient operation, simple structure, high calibration precision and low cost, and can be widely used in synchrotron radiation beamline projects.

Claims (5)

1. one kind is used for sine mechanism calibration device under the ultra-high vacuum environment, it is characterized in that, comprise high precision photoelectric autocollimator (5), autocollimator support (18), polyhedron angle prism (6), prism holder (7), sine mechanism, vacuum mirrored cabinet (19) and support platform (17), high precision photoelectric autocollimator (5) is contained on the autocollimator support (18), its lightening hole is aimed at the view window (20) on the vacuum mirrored cabinet (19), vacuum mirrored cabinet (19) is placed on the support platform (17), sine mechanism is contained in vacuum mirrored cabinet (19) the inside, polyhedron angle prism (6) is fixed on an end of the sine bar (8) of sine mechanism by prism holder (7), vertical high precision photoelectric autocollimator (5) axis of first prism facets (1) of polyhedron angle prism, high precision photoelectric autocollimator (5) is placed on the outside of vacuum mirrored cabinet (19), between second prism facets (2) and first prism facets (1) of said polyhedron angle prism (6), between prism surface (3) and second prism facets (2), all differ angle twice between the 4th prism facets (4) and the prism surface (3).

2. according to claim 1ly be used for sine mechanism calibration device under the ultra-high vacuum environment, it is characterized in that, said sine mechanism comprises sine bar (8), sine mechanism push rod (12), turntable (15), support (16) and accurate slide unit assembly (13), support (16) is fixed on the support platform (17), turntable (15) is installed in the rotating shaft of support (16), sine bar (8) is contained on the turntable (15), support platform (17) has the through hole corresponding to sine mechanism push rod (12) on the position of sine bar (8) other end, sine mechanism push rod (12) passes through hole and links to each other with the other end of sine bar (8).

3. according to claim 1ly be used for sine mechanism calibration device under the ultra-high vacuum environment, it is characterized in that, the end that said sine bar (8) links to each other with sine mechanism push rod (12) is equipped with first clothes-hook (9), the end that sine mechanism push rod (12) links to each other with sine bar (8) is equipped with second clothes-hook (11), first clothes-hook (9) links to each other by extension spring (10) with second clothes-hook (11), sine mechanism push rod (12) vertical support frame (16) shaft centerline.

4. according to claim 1ly be used for sine mechanism calibration device under the ultra-high vacuum environment, it is characterized in that, said sine mechanism also comprises accurate slide unit assembly (13), accurate slide unit assembly (13) is positioned at below the support platform (17), link to each other with the other end of sine mechanism push rod (12), linear encoder (14) is housed in the accurate slide unit assembly (13).

5. the described application process that is used for sine mechanism calibration device under the ultra-high vacuum environment of claim 1 is characterized in that concrete steps are as follows:

1) regulate turntable (15), directional light vertical irradiation polyhedron angle prism (6) first prism facets (1) that photoelectric auto-collimator is sent, promptly high precision photoelectric autocollimator (5) reading is " 0 ";

2) driving mechanism by accurate slide unit assembly (13), promoting sine bar (8) rotates, drive polyhedron angle prism (6) rotation, when directional light vertical irradiation during in angle prism second prism facets (2), sine bar (8) turns over angle and is the angle [alpha] that polyhedron angle prism (6) is demarcated ₁, write down the straight-line displacement h that high precision photoelectric autocollimator (5) reading and corresponding linear scrambler (14) are measured simultaneously ₁, finish the measurement of the 1st angle;

3) be rotated further sine bar (8), vertical irradiation is when the prism surface (3) of polyhedron angle prism (6), the 4th prism facets (4) respectively for the directional light that sends when high precision photoelectric autocollimator (5), and sine bar (8) turns over α ₂, α ₃Angle, the record autocollimator reading separately and the straight-line displacement h of corresponding linear scrambler (14) measurement ₂, h ₃, finish the measurement of the 2nd, the 3rd angle; So far, the measurement of completed 3 angles is as one group of unidirectional measurement;

4) repeat above-mentioned steps, finish many groups and measure;

5) after measurement of angle is finished, by the relational expression between rotational angle a and straight-line displacement h and the long L of sine mechanism bar:

In conjunction with actual angle α ₁, α ₂, α ₃And straight-line displacement h ₁, h ₂, h ₃Get following system of equations:

$a_1=\arcsin \left(\frac{h_1+h_0}{L}\right)-a_0---\left(1\right)$

$a_2=\arcsin \left(\frac{h_2+h_0}{L}\right)-a_0---\left(2\right)$

$a_3=\arcsin \left(\frac{h_3+h_0}{L}\right)-a_0---\left(3\right)$

Wherein, h ₀For initially departing from displacement, α ₀Be initial deviation angle; By above system of equations,, promptly try to achieve L, h through data processing ₀, α ₀, realize the demarcation of sine mechanism.

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