CN105403977A - Prism centering adjustment mechanism - Google Patents
Prism centering adjustment mechanism Download PDFInfo
- Publication number
- CN105403977A CN105403977A CN201410429464.4A CN201410429464A CN105403977A CN 105403977 A CN105403977 A CN 105403977A CN 201410429464 A CN201410429464 A CN 201410429464A CN 105403977 A CN105403977 A CN 105403977A
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- prism
- flexible link
- flexible
- adjustment mechanisms
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Abstract
The invention discloses a prism centering adjustment mechanism, and the mechanism comprises a prism support for fixing a prism; a support which is used for fixing the prism and the prism support; a connecting rod which is used for flexibly connecting the prism support and the support; a driving mechanism which is located at one end of the support; and a flexible transmission mechanism which is connected with the driving mechanism and the support, and is used for transmitting a force of the driving mechanism, so as to enable the prism support to drive the prism to rotate around a rotating shaft.
Description
Technical field
The present invention relates to a kind of integrated circuit equipment manufacturing field, particularly relate to a kind of for prism centring adjustment mechanisms.
Background technology
Projection optical system in advanced photo-etching machine exposal equipment needs more and more less ripple difference and distortion, simultaneously in the exposure sources of this projection optical system, can in real time and easily the change of the difference caused by various environment and other factors and distortion is compensated.In order to solve this class problem, the mode that it is adjustable that one or several lens position is set generally is adopted to compensate.In catadioptric lens, prism often uses as the optical element of key, reflection for light path needs prism to carry out the compensation of picture element around central rotation simultaneously, so need to design a kind of prism location, and can be very necessary around prism design central rotary mechanism.
Summary of the invention
In order to overcome the defect existed in prior art, prism centrally being rotated, the invention provides a kind of for prism centring adjustment mechanisms.
In order to realize foregoing invention object, the present invention is open a kind of for prism centring adjustment mechanisms, comprising: the prism bracket fixing this prism; Fix the bracing frame of this prism and prism bracket; Connecting link, for flexibly connecting this prism bracket and this bracing frame; Driving mechanism, this driving mechanism is positioned at one end of this bracing frame; Flexible drive mechanism, this flexible drive mechanism is connected with this driving mechanism and this bracing frame, drives this prism to rotate along a turning axle for the power transmitting this driving mechanism to make this prism bracket.
Further, this connecting link comprises the first noumenon, the second body, and connects the compliant member of the first noumenon and the second body, and this first noumenon, the second body are connected with this prism bracket and bracing frame respectively.
Further, this prism and this prism bracket cementing.
Further, this flexible drive mechanism comprises a driving flexible link, a transmission flexible link, rotates flexible link, this transmission flexible link is fixed on a transmission flexible link holder, and this rotation flexible link is fixed on a rotation flexible link holder.
Further, this driving flexible link one end is connected with this prism bracket by a flexible hinge, and the other end is connected with this transmission flexible link holder by a flexible hinge.
Further, this driving mechanism comprises a driving element and a driving element fixed mount, and this driving element fixed mount is fixed on this driving flexible link.
Further, this transmission flexible link holder and this bracing frame are fixed.
Further, this driving mechanism also comprises a returning spring, and this returning spring one end connects this driving element fixed mount, and the other end connects this bracing frame.
Compared with prior art, the present invention adopts multi-connecting-rod mechanism, the rotation center of mechanism is overlapped with the theoretical rotation center of optical element, eliminate because mechanical rotation center and optical element rotation center do not overlap the systematic error brought, while do not affect the perform region of prism, mechanism of the present invention is simple, can not the systematic error brought of retraction mechanism gap in rotary course, this device adjustment is simultaneously reliable, and processing is simple, easy to assembly.
Accompanying drawing explanation
Can be further understood by following detailed Description Of The Invention and institute's accompanying drawings about the advantages and spirit of the present invention.
Fig. 1 is the exploded view of prism centring adjustment mechanisms involved in the present invention;
Fig. 2 is the front view of prism centring adjustment mechanisms involved in the present invention;
Fig. 3 is the left view of prism centring adjustment mechanisms involved in the present invention;
Fig. 4 is the right view of prism centring adjustment mechanisms involved in the present invention;
Fig. 5 is the vertical view of prism centring adjustment mechanisms involved in the present invention;
Fig. 6 is the upward view of prism centring adjustment mechanisms involved in the present invention;
Fig. 7 is the adjustment principle schematic of prism centring adjustment mechanisms involved in the present invention;
Fig. 8 is the structural representation of the driving flexible link of prism centring adjustment mechanisms involved in the present invention;
Fig. 9 is the structural representation of prism assemblies and prism assemblies bracing frame connecting link;
Figure 10 is the transmission flexible link structural representation of prism centring adjustment mechanisms involved in the present invention;
Figure 11 is the adjustment schematic diagram of prism centring adjustment mechanisms involved in the present invention.
Embodiment
Specific embodiments of the invention are described in detail below in conjunction with accompanying drawing.
In catadioptric lens, the reflection that prism is used for light path needs prism to carry out the compensation of picture element around central rotation simultaneously, and topology layout within the scope of the perform region of prism, can not be carried out, the design adopts multi-connecting-rod mechanism, the rotation center of mechanism is overlapped with the theoretical rotation center of prism, eliminate because mechanical rotation center and prism rotation center do not overlap the systematic error brought, while do not affect the perform region of prism.
Fig. 1 is that prism centring adjustment mechanisms ties decomposition view substantially, and Fig. 2 is regulating device front view, Fig. 3 ~ 6 be respectively relative front view left and right, overlook, upward view.
The present embodiment mainly illustrates a kind of for prism position rotating adjusting gear, and this device is used for the location of prism and the adjustment of sense of rotation, adopts compliant mechanism simultaneously, the systematic error that between eliminating machine, joint gap is introduced, the Adjustment precision of height-adjusting system.
As Fig. 1 the present invention forms primarily of prism bracket 2, prism assemblies bracing frame 3, the connecting link 11 rotating flexible link 4, rotation flexible link holder 10, flexible hinge 5, transmission flexible link 6, transmission flexible link holder 12, driving flexible link 7, driving element 8, driving element fixed mount 9, connecting edge mirror support 2 and prism main part bracing frame 3, driving element returning spring 13.
As shown in Figure 9, this connecting link comprises mobile terminal 110, stiff end 111, guide pole 112, fixing screw hole 113, flexible hinge (not shown) composition to the concrete structure of connecting link 11.Connecting link 11 role is for navigate to prism 1, prism bracket 2 on prism assemblies bracing frame 3.Wherein fixing screw hole 113 place of connecting link 11 is maintained static with prism assemblies bracing frame 3(by stiff end 111 respectively with screw) be connected, mobile terminal 110 and prism bracket 2(movement parts) be connected, guide pole 112 two ends are connected with mobile terminal 110, stiff end 111 respectively through described flexible hinge.In a practical work example of the present invention, described guide pole 112 is made up of Part I and Part II, and described Part I is connected with described Part II through described flexible hinge.When prism 1, prism bracket 2 are by rotation, connecting link 11 precisely can keep its attitude (directivity), can not produce stress again.The prism assemblies that prism 1 and prism bracket 2 are formed each side is connected to prism assemblies bracing frame 3 by a connecting link 11, and prism 1 and prism bracket 2 are suspended on prism assemblies bracing frame 3.Drive flexible link 7 one end to be connected and fixed by flexible hinge 5 and prism bracket 2, one end is connected and fixed by flexible hinge 5 and transmission flexible link holder 12.Transmission flexible link holder 12 is screwed on prism assemblies bracing frame 3.Driving element 8 is installed on driving element fixed mount 9, and driving element fixed mount 9 is fixed to by screw and drives on flexible link 7.Driving element returning spring 13 one end is fixed by screws on driving element fixed mount 9, and one end is fixed on prism assemblies bracing frame 3.
Transmission flexible link 6 left end, by a flexible hinge 5, is installed to and drives on flexible link 7.Being fixed on by a flexible hinge 5 in the middle of transmission flexible link 6 drives on flexible link 7, transmission flexible link 6 right-hand member is connected with rotation flexible link 4 by a flexible hinge 5, rotates flexible link 4 and is fixed on prism bracket 2 by a flexible hinge 5.
In the present embodiment installation process, ensure that the Theoretical Design of prism 1 rotates optical axis and overlaps with adjusting mechanism turning axle, the rotation center of adjusting mechanism is by building test board, it is tested, calibrate the rotation center position of adjusting mechanism, corresponding position is recorded under test board coordinate system, simultaneously by interferometer prism centers position, by adjustment, make the center of prism, with the center superposition of adjusting mechanism, be fixed on prism bracket 2 with glue, ensure that adjusting mechanism rotation center and the prism Theoretical Design of this device rotate optical axis coincidence, and keep the relative position of prism and prism bracket constant.
As shown in Figure 7, Fig. 7 is adjustment principle schematic, and O2 is prism Theoretical Design optical axis and adjusting mechanism rotary middle spindle, and O3, O4, a, b 4 is for driving flexible link 7 one end flexible rotating point.
As shown in Figure 8, Fig. 8 drives flexible link 7 concrete structure schematic diagram.In Fig. 7, e point is connected the point of rotation in one end in addition for driving flexible link 7 with connecting link 11, c, O1, d point is transmission flexible link 6 flexible rotating point, O1 is for driving flexible link 7 and transmission flexible link 6 rotary middle point, and f is that transmission flexible link 6 is connected the point of rotation with connecting link 11.
During adjustment as shown in figure 11, driving element provides power, drives and drives flexible link to rotate an angle ɑ around O1, and namely the parallelogram of O3, O4, a, b composition rotates an angle ɑ around O1.Drive e point descending, thus be rotated down angle ɑ at adjusting mechanism left end drive lip mirror support 2.Simultaneously when driving element provides power, drive c point descending, driving flexible link 7 is rotated around O1 point, drive d, f point up, thus rotate up angle ɑ at adjusting mechanism right-hand member drive lip mirror support 2.Can find out in the figure 7, adjusting mechanism completes clockwise adjustment around O2 point, when needs carry out counter clockwise direction rotate time, driving element counter motion, driving element returning spring 13 provides reverse power, make the counter motion of adjusting mechanism drive lip mirror support 2, being rotated counterclockwise of adjusting mechanism can be completed.Due in the present embodiment, flexible link 7, connecting link 11, transmission flexible link 6 is driven all to adopt rods structure, in mechanism, all points of rotation all adopt flexible hinge 5 to connect simultaneously, ensure whole system not due to inter-agency gap and the systematic error caused that rubs, improve the Adjustment precision of system, improve the stability of system fading margin simultaneously.
Just preferred embodiment of the present invention described in this instructions, above embodiment is only in order to illustrate technical scheme of the present invention but not limitation of the present invention.All those skilled in the art, all should be within the scope of the present invention under this invention's idea by the available technical scheme of logical analysis, reasoning, or a limited experiment.
Claims (8)
1. for a prism centring adjustment mechanisms, it is characterized in that, comprising:
The prism bracket of fixing described prism;
The bracing frame of fixing described prism and prism bracket;
Connecting link, for flexibly connecting described prism bracket and support frame as described above;
Driving mechanism, described driving mechanism is positioned at one end of support frame as described above;
Flexible drive mechanism, described flexible drive mechanism is connected with described driving mechanism and support frame as described above, drives described prism to rotate along a turning axle for the power transmitting described driving mechanism to make described prism bracket.
2. as claimed in claim 1 for prism centring adjustment mechanisms, it is characterized in that, described connecting link comprises the first noumenon, the second body, and connects the compliant member of the first noumenon and the second body, and described the first noumenon, the second body are connected with described prism bracket and bracing frame respectively.
3. as claimed in claim 1 for prism centring adjustment mechanisms, it is characterized in that, described prism and described prism bracket cementing.
4. as claimed in claim 1 for prism centring adjustment mechanisms, it is characterized in that, described flexible drive mechanism comprises a driving flexible link, a transmission flexible link, rotates flexible link, described transmission flexible link is fixed on a transmission flexible link holder, and described rotation flexible link is fixed on a rotation flexible link holder.
5. as claimed in claim 4 for prism centring adjustment mechanisms, it is characterized in that, described driving flexible link one end is connected with described prism bracket by a flexible hinge, and the other end is connected with described transmission flexible link holder by a flexible hinge.
6. as claimed in claim 4 for prism centring adjustment mechanisms, it is characterized in that, described driving mechanism comprises a driving element and a driving element fixed mount, and described driving element fixed mount is fixed on described driving flexible link.
7. as claimed in claim 4 for prism centring adjustment mechanisms, it is characterized in that, described transmission flexible link holder and support frame as described above are fixed.
8. as claimed in claim 6 for prism centring adjustment mechanisms, it is characterized in that, described driving mechanism also comprises a returning spring, and described returning spring one end connects described driving element fixed mount, and the other end connects support frame as described above.
Priority Applications (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| CN201410429464.4A CN105403977B (en) | 2014-08-28 | 2014-08-28 | One kind being used for prism centring adjustment mechanisms |
Applications Claiming Priority (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| CN201410429464.4A CN105403977B (en) | 2014-08-28 | 2014-08-28 | One kind being used for prism centring adjustment mechanisms |
Publications (2)
| Publication Number | Publication Date |
|---|---|
| CN105403977A true CN105403977A (en) | 2016-03-16 |
| CN105403977B CN105403977B (en) | 2018-12-14 |
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Family Applications (1)
| Application Number | Title | Priority Date | Filing Date |
|---|---|---|---|
| CN201410429464.4A Active CN105403977B (en) | 2014-08-28 | 2014-08-28 | One kind being used for prism centring adjustment mechanisms |
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Cited By (4)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| CN106646815A (en) * | 2016-12-22 | 2017-05-10 | 中山市光大光学仪器有限公司 | Gluing device used for prism |
| WO2017114405A1 (en) * | 2015-12-30 | 2017-07-06 | 上海微电子装备（集团）股份有限公司 | Prism rotation adjustment mechanism, stepper exposure system, and stepper |
| CN111796391A (en) * | 2020-06-02 | 2020-10-20 | 中国科学院西安光学精密机械研究所 | Right-angle prism clamping and fixing device, right-angle prism module and debugging method thereof |
| CN114660760A (en) * | 2022-03-15 | 2022-06-24 | 武汉精立电子技术有限公司 | Self-centering positioning component for cubic prism, attaching mechanism and attaching system |
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| US4722592A (en) * | 1986-12-29 | 1988-02-02 | The United States Of America As Represented By The Secretary Of The Army | Motorized-axis-angular fine adjustment prism mount |
| US6064505A (en) * | 1998-11-16 | 2000-05-16 | Eastman Kodak Company | Method and apparatus for movably supporting a reflecting member of a focusing apparatus |
| CN101907452A (en) * | 2010-07-12 | 2010-12-08 | 中国科学院长春光学精密机械与物理研究所 | Sine mechanism calibration device and method used under ultrahigh vacuum environment |
| CN201955532U (en) * | 2011-03-18 | 2011-08-31 | 杨凯 | Adjustable optical prism |
| CN103149686A (en) * | 2013-03-07 | 2013-06-12 | 同济大学 | Synchronous belt drive rotary prism device |
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2014
- 2014-08-28 CN CN201410429464.4A patent/CN105403977B/en active Active
Patent Citations (5)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| US4722592A (en) * | 1986-12-29 | 1988-02-02 | The United States Of America As Represented By The Secretary Of The Army | Motorized-axis-angular fine adjustment prism mount |
| US6064505A (en) * | 1998-11-16 | 2000-05-16 | Eastman Kodak Company | Method and apparatus for movably supporting a reflecting member of a focusing apparatus |
| CN101907452A (en) * | 2010-07-12 | 2010-12-08 | 中国科学院长春光学精密机械与物理研究所 | Sine mechanism calibration device and method used under ultrahigh vacuum environment |
| CN201955532U (en) * | 2011-03-18 | 2011-08-31 | 杨凯 | Adjustable optical prism |
| CN103149686A (en) * | 2013-03-07 | 2013-06-12 | 同济大学 | Synchronous belt drive rotary prism device |
Cited By (7)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| WO2017114405A1 (en) * | 2015-12-30 | 2017-07-06 | 上海微电子装备（集团）股份有限公司 | Prism rotation adjustment mechanism, stepper exposure system, and stepper |
| US11106005B2 (en) | 2015-12-30 | 2021-08-31 | Shanghai Micro Electronics Equipment (Group) Co., Ltd. | Prism rotation adjustment mechanism, stepper exposure system, and stepper |
| CN106646815A (en) * | 2016-12-22 | 2017-05-10 | 中山市光大光学仪器有限公司 | Gluing device used for prism |
| CN111796391A (en) * | 2020-06-02 | 2020-10-20 | 中国科学院西安光学精密机械研究所 | Right-angle prism clamping and fixing device, right-angle prism module and debugging method thereof |
| CN111796391B (en) * | 2020-06-02 | 2021-07-27 | 中国科学院西安光学精密机械研究所 | Right-angle prism clamping and fixing device, right-angle prism module and debugging method thereof |
| CN114660760A (en) * | 2022-03-15 | 2022-06-24 | 武汉精立电子技术有限公司 | Self-centering positioning component for cubic prism, attaching mechanism and attaching system |
| CN114660760B (en) * | 2022-03-15 | 2024-04-05 | 武汉精立电子技术有限公司 | Self-centering positioning member, attaching mechanism and attaching system for cube prism |
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| Publication number | Publication date |
|---|---|
| CN105403977B (en) | 2018-12-14 |
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Address after: 201203 Shanghai Zhangjiang High Tech Park of Pudong New Area Zhang Road No. 1525 Applicant after: Shanghai microelectronics equipment (Group) Limited by Share Ltd Address before: 201203 Shanghai Zhangjiang High Tech Park of Pudong New Area Zhang Road No. 1525 Applicant before: Shanghai Micro Electronics Equipment Co., Ltd. |
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