CN101896325A - Flat pressing machine, laminating apparatus and laminating method using flat pressing machine and laminating apparatus - Google Patents

Abstract

Provided is a flat pressing machine, by which a laminated body can be smoothened, irrespective of unevenness of a base material, cost of a strip-like film for transfer is reduced, a laminated resin is adhered to the strip-like film and does not scatter at the time of peeling the laminated body, and furthermore, a rough surface of the strip-like film is not transferred to the laminated body. A laminating apparatus, and a laminating method using the flat pressing machine and the laminating apparatus are also provided. A flat pressing machine (3) presses a laminated body (8), in which a resin layer (8c) is formed on an uneven surface of a base material (8a), by using facing pressing means, and smoothens a surface of the laminated body (8). The flat pressing means is provided with a pair of strip-like films; a transfer means for transferring the both strip-like films in the longitudinal direction of the film, in a state where the laminated body (8) is sandwiched between the both strip-like films; a hermetically sealed space section (34) for pressing the laminated body (8) by the both pressing means in a depressurized state; and a pressure control means for controlling inside the hermetically-sealed space section (34) in the depressurized state.

Description

Plane decompressor and laminater and the laminating method that has used these devices

Technical field

The laminating method that the present invention relates to a kind of plane decompressor that is adopted when making printed circuit base material etc. and laminater and used these devices more particularly relates to a kind of laminating method that makes tellite etc. have the plane decompressor resin bed smoothing, that can be used for lamination process (build-up) method on the concavo-convex base material and laminater and use these devices.

Background technology

In recent years, along with miniaturization, the high performance of electronic equipment, densification, the multiple stratification of various printed circuit base materials are developed, even in the circuit board that does not adopt the lamination process method in the past, have also increased the product that adopts the lamination process method.In the multiple stratification of such printed circuit base material, use thermohardening type resin combination or photosensitive resin composition as electric insulation layer, on preformed internal layer or outer circuit coating or spray above-mentioned thermohardening type resin combination or photosensitive resin composition etc. after make above-mentioned thermohardening type resin combination or photosensitive resin composition drying, the perhaps membranaceous resin bed that lamination is made of above-mentioned thermohardening type resin combination or photosensitive resin composition on preformed internal layer or outer circuit.In addition, usually lamination has Copper Foil, supporting mass film on the single face of this membranaceous resin bed, under the situation of lamination Copper Foil, after the lamination Copper Foil, it is etched partially or whole facet etch, under the situation of laminated bearing body film, can adopt effectively with the supporting mass film peel off, then utilize laser or ultraviolet exposure imaging carry out perforate, then implement copper facing, afterwards adopt photoresist film once more and utilize light forming pattern circuit formation method, be so-called lamination process method.

In the past, the lamination process method mainly adopted in need high density and multilayer wired specific use with base plate for packaging as microprocessor unit (below be called " MPU ").But, recently, show that in personal computer, work station etc., installing with base plate for packaging, graphics accelerator (GraphicsAccelerator) picture such and personal computer relevant video chip is more and more higher with the requirement of the high performance of various base plate for packaging such as base plate for packaging with the chip that MPU brings into play function linkedly.Also more and more higher to making as the requirement as the memory capacity high capacity of the storage card of card-type storage device etc. of data storage medium with flash memory etc.As a result, in order to reach the lamination process method that adopts in base plate for packaging at MPU is adopted in the market demands and beginning of the various base plate for packaging except that above-mentioned MPU, storage card-type storage device.

Under such situation, further improve data-handling capacity for up-to-date MPU expectation.Improve the calculation process performance by the operating frequency that improves MPU.But the electric power that MPU consumed rises with operating frequency with being directly proportional.In addition, usually,, the operating frequency that improves MPU increases for can making the circuit scale of MPU.

Along with the operating frequency that improves MPU, consume electric power and increase.As its countermeasure, such mode has been proposed: a plurality of processor cores of low consumption electric power are carried in MPU by inhibition circuit scale, operating frequency, utilize each processor core will handle dispersion, consume electric power thereby in the handling property that improves MPU, reduce.Sometimes this mode is called the multinuclear mode, the needs of the multinuclear MPU of the double-core MPU of integrated two processor cores, integrated a plurality of nuclears are more and more higher in 1 encapsulation.

Utilize the multinuclear mode, can reduce the consumption electric power of processor core individuality.But under the situation of using the multinuclear mode, the handing-over data also become new needs between processor core-processor core, and the consumption electric power in these data/address bus increases.Therefore, exist the consumption electric power reduction amount of processor core individuality to remain unchanged and with consume electric power and reduce the tendency of the consumption electric power that irrespectively increases MPU.

Increase like that as mentioned above, also need and consume the corresponding sectional area of electric power to the Wiring pattern of the MPU of base plate for packaging chip supply power along with the consumption electric power of MPU.Therefore, thereupon, there be the situation of MPU with the volume increase of the electric insulation resin layer between the Wiring pattern of base plate for packaging that be embedded in the situation of the power supply wiring pattern that the height of the aspect ratio power supply wiring pattern in the past of existence employing pattern is high.

On the other hand, the lamination process method is used for base plate for packaging, the card-type storage device that the chip installation is used, video chip is used except that MPU more and more.In these purposes except that MPU, though the height of copper pattern do not need as the Wiring pattern of MPU to be higher height, have the situation that does not have circuit pattern in the whole wide scope.Under these circumstances, same with the situation of MPU, the volume that is embedded in the electric insulation resin layer between the pattern also can increase.

In above-mentioned lamination process method, flatly the technology of lamination insulating resin layer is very important on the concavo-convex base material having.As this technology, proposed as shown in figure 17, with the MPU base plate for packaging be the membranaceous resin laminated device that main application grows up.

This membranaceous resin laminated device comprises vacuum lamination apparatus 81 and plane decompressor 85; Above-mentioned vacuum lamination apparatus 81 be included in lower surface set up the upper flat plate 82 of flexible strip 82a, upper surface set up flexible strip 83a lower flat plate 83, be formed on the spatial portion 84 between two flexible strip 82a, the 83a up and down when agreeing with in 83 sealings of upper flat plate 82 and lower flat plate, be used to adjust the pressure adjustment component (not shown) of the pressure in this spatial portion 84; Above-mentioned plane decompressor 85 comprises the top die set 87 that is fixed on the pillar 86, can be the bottom die set 88 that guiding piece moves up and down with pillar 86.And, forming from the teeth outwards temporary fixedly on the two sides of irregular substrate 89a has at the membranaceous resin bed 89b (band shape of coiling before the cutting) that is cut into application of resin layer on the supporting mass film of the size more smaller than substrate 89a and the resin bed drying is formed, thereby form interim layered product 89, interim layered product 89 is clamped in up and down conveying with between the film 90 and be transported to vacuum lamination apparatus 81, utilize the two flexible strip 82a up and down of vacuum lamination apparatus 81,83a heats interim layered product 89 under pressure-lowering condition, the pressurization and membranaceous resin bed 89b is laminated on the substrate 89a, the layered product 89 (having concavo-convex cause concavo-convex by substrate 89a on the surface of this layered product 89) that this lamination is formed is transported to plane decompressor 85, the top die set 87 of this plane decompressor 85 is fixed in utilization across heating die holder 91 grades, flexible metal plate 92 on the bottom die set 88 under atmospheric pressure heats the layered product 89 that this lamination forms, pressurize, make the surface smoothingization of layered product 89.In Figure 17, Reference numeral 93 is to carry to emit roller with film, and Reference numeral 94 is to carry to use the film takers-in.

In addition, in above-mentioned laminater, owing under atmospheric pressure utilize plane decompressor 85 to heat, pressurize, therefore, when the film that uses the surface not to be roughened is used film 90 as conveying, when layered product 89 connects airtight with film 90 and flexible metal plate 92 with film 90, conveying with conveying when above-mentioned heating, pressurization, at layered product 89 and between carrying with film 90 and/or conveying is residual between with film 90 and flexible metal plate 92 that bubble arranged, the surface of facing with residual alveolate position at layered product 89 is formed with recess, therefore, can't make the surface smoothingization of layered product 89.Therefore, adopt the surface to utilize coarse processing to form the rough textured film etc. of matsurface, roughening film that the surface forms matsurface, make layered product 89 and carry with between the film 90 and/or carry with the effusion of the bubble between film 90 and the flexible metal plate 92 (for example with reference to patent documentation 1) as carrying with film 90.

Patent documentation 1: TOHKEMY 2004-122553 communique

But, as mentioned above, using the surface to form the roughening film of matsurface as carrying with under the situation of film 90, also under atmospheric pressure utilize plane decompressor 85 to heat, pressurize, therefore, when adopting aspect ratio MPU in the past with the high pattern of the pattern of base plate for packaging with base plate for packaging as nearest MPU, residual in also might inner recess in the surface of substrate 89a concavo-convex, that surrounded by highly higher pattern have a bubble.Like this in that above-mentioned recess is residual when bubble is arranged, up to above-mentioned bubble is needed spended time from carrying till selecting between the surface of the roughening of film 90 and the substrate 89a, perhaps bubble is not overflowed fully and is enclosed in the recess and the space between the conveying usefulness film 90 of substrate 89a.Therefore, though membranaceous resin bed 89b flow in the above-mentioned recess, but need utilize the surface of 85 pairs of layered products 89 of plane decompressor to heat, pressurize for a long time, even heat for a long time, pressurize, the bubble of being enclosed also can become obstruction, might can't make the surface smoothingization of layered product 89.Equally, even in the base plate for packaging that adopts the such chip of lamination process method to install to use with, video chip, card-type storage device, also can be in whole wide scope, at the position that does not have circuit pattern residual have a bubble.And, there is this residual bubble, therefore, need utilize the surface of 85 pairs of layered products 89 of plane decompressor to heat, pressurize for a long time, even heat for a long time, pressurize, the air of being enclosed also can become obstruction, and generation can't make the such problem of the surface smoothingization of layered product 89.In addition, use heating-up temperature need situation greater than the resin bed of 120 ℃ of such high temperature under, make residual bubble before select between carrying with the surface of the roughening of film 90 and substrate 89a, above-mentioned conveying is flattened with the surface of the roughening of film 90.Therefore, the path that bubble is overflowed disappears and bubble is enclosed, and resin can't be flowed to recess, and generation can't make the such problem of the surface smoothingization of resin bed.

And, because the film of surface roughenings such as use rough textured film is as carrying with film 90, therefore, carry with film 90 if the resin that oozes out from the circumference of membranaceous resin bed 89b when making layered product 89 smoothings is attached to, then this resin that oozes out might be trapped in the surface of above-mentioned roughening.Then, this resin that is absorbed in cools off and solidifies, and becomes very crisp state.Therefore, discharge layered product 89 from laminater, when this layered product 89 peels and carries with film 90 certainly, the resin in the above-mentioned surface that is trapped in roughening becomes tiny fragment and disperses towards periphery, is adsorbed in the surface of layered product 89 easily because of static.In addition, when in the operation of back, utilizing automatic stripping machine to peel the supporting mass film of membranaceous resin bed 89b, the heat cure and being fixed on the layered product 89 of smoothing under the state of the layered product 89 that is attached to smoothing of the above-mentioned resin that disperses with tens micron thickness, then may cause the quality of product to reduce, product is bad.On the other hand, also exist to use plane decompressor 85 and make and have application of liquid resist on the concavo-convex substrate 89a and making the situation of the having an even surface of the layered product (not shown) that liquid resist drying forms, the layered product that will apply this liquid resist and this liquid resist drying is formed with film 90 in the conveying of using surface roughening is transported to plane decompressor 85 and to this layered product heating, when pressurizeing, might with surperficial directly contact of above-mentioned layered product the concavo-convex of roughening film is copied on the above-mentioned layered product surface because of the matsurface of roughening film.

Summary of the invention

The present invention promptly makes in view of this situation, plane decompressor that its purpose is to provide such and laminater and the laminating method that has used these devices, promptly, under the concavo-convex darker situation of the male and fomale(M﹠F) of base material, can make concavo-convex smoothing by this darker concavo-convex layered product that causes, concavo-convex dark but exist under the situation of the recess that does not have Wiring pattern, also can make the not concavo-convex smoothing of this Wiring pattern, and, can use the film cost that is roughened than surfaces such as rough textured films low, the banded film of the conveying usefulness of the smoothing that the surface is not roughened replaces carrying the banded film of usefulness, when realizing reducing the operating cost of banded film, the resin of lamination is attached on the banded film of carrying usefulness and can not disperses when peeling laminated body, and, carry the matsurface of the banded film of usefulness can not copy on the layered product.

In order to achieve the above object, the 1st purport of the present invention is a kind of plane decompressor, this plane decompressor is provided with relative punch components, utilize these two punch components that layered product is carried out punching press and makes above-mentioned layered product surface smoothingization, above-mentioned layered product is to form resin bed to form on the above-mentioned male and fomale(M﹠F) that has concavo-convex base material at least one face on table back of the body two sides, this plane decompressor comprises: a pair of banded film, its with relative shape through between above-mentioned two punch components; Transfer unit, its length direction at the above-mentioned two banded films in state lower edge that above-mentioned layered product are held on clamping between the above-mentioned two banded films is carried above-mentioned two banded films; Confined space forms parts, and it is used to form the confined space portion that utilizes above-mentioned two punch components above-mentioned layered product to be carried out punching press under pressure-lowering condition; Pressure Control Unit, it is used for the internal control of above-mentioned confined space portion is made as the step-down state; The 2nd purport of the present invention is the plane decompressor, a pair of banded film that adopts himself surface not to be roughened in the decompressor of above-mentioned plane; The 3rd purport of the present invention is laminater, this laminater comprises vacuum lamination apparatus and above-mentioned plane decompressor, above-mentioned vacuum lamination apparatus is provided with relative punch components, utilizes these two punch components that the interim layered product that adheres to membranaceous resin material temporarily form on the above-mentioned male and fomale(M﹠F) of the irregular base material of at least one mask on table back of the body two sides is carried out punching press and forms layered product; The 4th purport of the present invention is a kind of laminating method, this laminating method uses above-mentioned plane decompressor, the layered product that laminated resin layer on the above-mentioned male and fomale(M﹠F) of the irregular base material of at least one mask of showing back of the body two sides is formed carries out punching press, thereby makes the concavo-convex smoothing of above-mentioned layered product; The 5th purport of the present invention is a kind of laminating method, this laminating method uses vacuum lamination apparatus that the interim layered product that adheres to membranaceous resin material temporarily form on the above-mentioned male and fomale(M﹠F) of the irregular base material of at least one mask on table back of the body two sides is carried out punching press and forms layered product, re-use above-mentioned plane decompressor the layered product that this forms through punching press is carried out punching press, and make the concavo-convex smoothing of above-mentioned layered product.

In the decompressor of plane of the present invention, use the clamping layered product to carry a pair of banded film of this layered product, under the step-down state, utilize two punch components to carry out punching press.Therefore, in the concavo-convex darker situation of the male and fomale(M﹠F) of base material, concavo-convex dark but exist under the situation of the recess that does not have Wiring pattern, can be when punching press at residual bubble between layered product and the two banded films and/or between the stamping surface of two banded films and two punch components yet, therefore, can make resin bed flow to recess, thereby can make the surface smoothingization of layered product.

And, owing under the step-down state, carry out punching press, therefore, carry the above-mentioned banded film of this layered product as the clamping layered product, needn't remain between layered product and the two banded films when the punching press and/or the bubble between the stamping surface of two banded films and two punch components is selected and used the banded film of the conveying usefulness that the surface has been roughened in order to make.Like this, under the situation about not being roughened on the surface of above-mentioned a pair of banded film, because therefore this band shape film cheapness, can reduce manufacturing cost.And, because the surface of above-mentioned two banded films is not roughened, therefore, needn't worry also in the past that the such resin bed of lamination when layered product is peeled off two banded films of example disperses or when heating, pressurization the matsurface of rough textured film copy on the surface of layered product.On the other hand, in laminater of the present invention and laminating method, use above-mentioned plane decompressor, play above-mentioned good effect.

In addition, in the decompressor of plane of the present invention, above-mentioned relative punch components comprises: utilize at least one the advance and retreat of piston rod be linked in above-mentioned two punch components to make hydraulic cylinder or cylinder or the servomotor of above-mentioned at least one punch components with respect to another punch components advance and retreat; Be provided in a pair of framework between above-mentioned two punch components with relative shape, one end opening portion of a framework is fixed on the punch components airtightly, one end opening portion of another framework is fixed on another punch components airtightly, utilize other end peristome that advancing of above-mentioned at least one punch components make above-mentioned two frameworks butt and form confined space portion mutually airtightly, in this case, by hydraulic cylinder or cylinder or servomotor are moved above-mentioned at least one punch components is advanced, thereby can between above-mentioned two die sets, form confined space portion.

And, in the decompressor of plane of the present invention, be provided with the prevention parts, when utilizing above-mentioned Pressure Control Unit to carry out step-down in to above-mentioned confined space portion, these prevention parts stop advancing with respect to a punch components of above-mentioned another punch components advance and retreat, in this case, when above-mentioned step-down in the above-mentioned confined space portion not by under the state of fully step-down, carry out punching press before the attraction that an above-mentioned punch components can the above-mentioned step-down of reason produce and then to layered product.

In addition, in the decompressor of plane of the present invention, be provided with peeling member, above-mentioned two punch components are relatively moved and under the state separated from each other, the banded film that this peeling member will be pasted in above-mentioned punching course at least one face in the stamping surface of above-mentioned two punch components is peeled off from above-mentioned at least one stamping surface, in this case, after carrying out punching press, can utilize peeling member easily to peel off two banded films from two punch components by above-mentioned two punch components.Thus, the banded film that is pasted on the above-mentioned stamping surface can not become obstruction when batching banded film in order to carry layered product.

In addition, in the decompressor of plane of the present invention, under the situation that formed resin bed is made of membranaceous resin bed on the above-mentioned male and fomale(M﹠F) of the irregular base material of at least one mask in table back of the body two sides, by under pressure-lowering condition, carrying out punching press etc., can form resin bed at overlapping membranaceous resin material on the male and fomale(M﹠F) of above-mentioned base material.

And, in the decompressor of plane of the present invention, under the situation that formed resin bed is made of the liquid resist on the above-mentioned male and fomale(M﹠F) of the irregular base material of at least one mask in table back of the body two sides, by after coating or spraying liquid resist etc., making liquid resist drying, can form resin bed.

In addition, in laminater of the present invention, comprise vacuum lamination apparatus and above-mentioned plane decompressor; Above-mentioned vacuum lamination apparatus is provided with relative punch components, utilize and adhere to the interim layered product that membranaceous resin material forms on the above-mentioned male and fomale(M﹠F) of these two punch components to the irregular base material of at least one mask in table back of the body two sides temporarily and carry out punching press and form layered product, in this case, further improved the smoothing on above-mentioned layered product surface.

In addition, in the present invention, above-mentioned vacuum lamination apparatus has a pair of punch components, this a pair of punch components comprises relative pair of plates, the a pair of flexible strip that sets with relative shape along two opposite faces that face one another of above-mentioned two flat boards, confined space in the confined space portion that is formed between the above-mentioned pair of plates utilizing above-mentioned a pair of flexible strip above-mentioned interim layered product to be carried out punching press under pressure-lowering condition forms parts, can adjust the 1st pressure adjustment component of the pressure of above-mentioned confined space portion, be formed at least one flexible strip in above-mentioned two flexible strips and set space part between the flat board of this at least one flexible strip, can adjust the 2nd pressure adjustment component of the pressure of this space part, at least one vacuum lamination apparatus that forms that will link in above-mentioned two flat boards on the piston rod of hydraulic cylinder or cylinder is called the diaphragm type vacuum lamination apparatus.In addition, above-mentioned vacuum lamination apparatus has a pair of punch components, this a pair of punch components comprises relative pair of plates, the a pair of flexure strip that sets with relative shape along two opposite faces that face one another of above-mentioned two flat boards, confined space in the confined space portion that is formed between the above-mentioned pair of plates utilizing above-mentioned a pair of flexure strip above-mentioned interim layered product to be carried out punching press under pressure-lowering condition forms parts, can adjust the pressure adjustment component of above-mentioned confined space portion pressure, at least one vacuum lamination apparatus that forms that will link on the piston rod of hydraulic cylinder or cylinder in above-mentioned two flat boards is called rubber punching press (rubber press) formula vacuum lamination apparatus.

Description of drawings

Fig. 1 is the structure chart of an embodiment of expression laminater of the present invention.

Fig. 2 is the structure chart of expression plane decompressor.

Fig. 3 is the cutaway view of the layered product of smoothedization.

Fig. 4 is the structure chart of the major part of the above-mentioned plane of expression decompressor.

Fig. 5 is the cutaway view of effect of the movable vacuum frame of expression above-mentioned plane decompressor.

Fig. 6 is the cutaway view of the effect of the above-mentioned movable vacuum frame of expression.

Fig. 7 is the cutaway view of the effect of the above-mentioned movable vacuum frame of expression.

Fig. 8 is the structure chart that the banded film of expression is emitted portion.

Fig. 9 is the structure chart of the banded film reeling end of expression.

Figure 10 is the cutaway view of interim layered product.

Figure 11 is the cutaway view of layered product.

Figure 12 is the structure chart of expression vacuum lamination apparatus.

Figure 13 is the structure chart of the major part of the above-mentioned vacuum lamination apparatus of expression.

Figure 14 is the structure chart of the variation of the above-mentioned plane of expression decompressor.

Figure 15 is the structure chart of the variation of the above-mentioned vacuum lamination apparatus of expression.

Figure 16 is the structure chart of another variation of the above-mentioned vacuum lamination apparatus of expression.

Figure 17 represents the structure chart of example in the past.

Description of reference numerals

3, plane decompressor; 8a, base material; 8c, resin bed; 9, layered product; 34, confined space portion.

The specific embodiment

Then, describe embodiments of the present invention with reference to the accompanying drawings in detail.But the present invention is not limited to this embodiment.

Fig. 1 represents an embodiment of laminater of the present invention.In the present embodiment, above-mentioned laminater comprises that banded film (transport membrane) emits portion 1, rubber punching type vacuum lamination apparatus 2, plane decompressor 3 and banded film (transport membrane) reeling end 4, and they set towards the downstream with the upstream (banded film is emitted portion 1) of this order from the flow direction (with reference to the arrow of Fig. 1) of substrate 8a (with reference to Fig. 3, Figure 10 and Figure 11) (banded film reeling end 4).

At first, plane decompressor 3 (with reference to Fig. 2) as the characteristic of above-mentioned laminater is described.This plane decompressor 3 is used under the step-down state the two banded films (transport membrane) 5,6 up and down that utilize conveying usefulness described later being heated pressurization from the layered product 8 (with reference to Figure 11) that vacuum lamination apparatus 2 transports, and makes the concavo-convex smoothing (with reference to Fig. 3) on the table back of the body two sides of this layered product 8.In Fig. 3, Reference numeral 8d is the resin bed by the layered product 9 after the 3 heating pressurizations of above-mentioned plane decompressor, surperficial smoothedization.

As shown in Figure 2, above-mentioned plane decompressor 3 comprises: upright many (only illustrating two among Fig. 2) pillar 11a that are located on the punching press platform 11; Utilize fixed part 11b such as bolt, nut to be fixed in last die set (punch components) 12 on above-mentioned each pillar 11a; Can be installed on following die set (punch components) 13 on above-mentioned each pillar 11a etc. up or down.This time die set 13 is linked to hydraulic cylinder or cylinder 15 by shaft coupling 14, perhaps shaft coupling 14 is connected with gear-box (gearhead) with not shown servomotor, and this time die set 13 can utilize the action (along with the advance and retreat of piston rod 15a, promptly rise (advancing) and descend (retreating)) of this hydraulic cylinder or cylinder 15 or servomotor and move up and down.

About above-mentioned two die sets 12,13 up and down, in this embodiment, upside insulation 17, upside heat dish 18, flat upside bolster 19 and the upside flexible metal plate 20 of fixed flat planar shape constitute last die set 12 by beginning in order from upside on upper base layer 16, and downside insulation 22, downside heat dish 23, flat downside bolster 24 and the downside flexible metal plate 25 of fixed flat planar shape constitute following die set 13 by beginning in order from downside on lower substrate layer 21.

As shown in Figure 4, above-mentioned plane decompressor 3 also comprises the movable vacuum frame (confined space formation parts) 30 that is used to form confined space portion 34.(in this Fig. 5, two flexible metal plates 20,25 were not shown about two insulations 17,22, up and down two heat dishes 18,23, up and down two bolsters 19,24, banded film 5,6 reached up and down as Fig. 5.Fig. 6 and Fig. 7 are also identical) shown in, this movable vacuum frame 30 comprises the upside fixed frame portion (a frame portion) 31 of the roughly quadrilateral frame shape of the lower surface that is fixed in upper base layer 16 airtightly, is fixed in the movable frame 32 of the upper surface of lower substrate layer 21 airtightly.In upside fixed frame portion 31, in being located in the through hole 31a of its all sidewall, be fixed with and vacuumize with nozzle 33, this vacuumizes with nozzle 33 and is linked to the Pressure Control Unit (all not shown) that comprises vavuum pump etc.So, when 16,21 sealings of two basalises agree with up and down, make the vavuum pump work of Pressure Control Unit, utilization vacuumizes will be formed in the confined space portion 34 (with reference to Fig. 7) between upside fixed frame portion 31 and the movable frame 32 with nozzle 33 and is evacuated, can adjust the pressure (that is, forming the vacuum state of authorized pressure) of this confined space portion 34.Above-mentioned confined space portion 34 be in usually pressure be 500Pa following, be preferably following, the following vacuum state of 300Pa more preferably of 400Pa.When above-mentioned hypertonia, can air residually arranged between layered product 8 and the banded film 5,6 or between banded film 5,6 and the flexible metal plate 20,25, the remained on surface of the layered product 9 (with reference to Fig. 3) after smoothing has concavo-convex, has the bad tendency of product.

Above-mentioned movable frame 32 comprises downside fixed frame portion (another frame portion) 35, the movable frame portion 36 of the roughly quadrilateral frame shape of the upper surface that is fixed on lower substrate layer 21 airtightly and the spring 37 that supports this movable frame portion 36 in the mode that boosts this movable frame portion 36 upward.The complete cycle on the top of above-mentioned downside fixed frame portion 35 is outstanding laterally, the chimeric containment member 38 that is fixed with ring-type in the groove 35a of the outer peripheral face complete cycle that is formed at this outstanding formation portion.The shape of containment member 38 is preferably lippacking.

Above-mentioned movable frame portion 36 can easy on and off be coated at the outstanding formation portion of downside fixed frame portion 35 slidably, and is supported on downside fixed frame portion 35 by spring 37 under this state.That is, the top of spring 37 is inserted among a plurality of (only illustrating two among Fig. 5～Fig. 7) recess 36a of the lower surface that is formed at above-mentioned movable frame portion 36, above-mentioned each spring 37 is positioned on the lower end protuberance 35b of downside fixed frame portion 35.Thus, above-mentioned movable frame portion 36 can be supported on downside fixed frame portion 35 movably by spring 37 easy on and off.In addition, the inner peripheral surface of above-mentioned movable frame portion 36 airtightly and can be connected to the containment member 38 of downside fixed frame portion 35 with being free to slide.

In addition, the upper surface complete cycle in above-mentioned movable frame portion 36 is formed with groove 36b, the chimeric roughly containment member 39 of quadrangular ring-shaped that is fixed with in this groove 36b.Sealing member 39 plays when up and down 16,21 sealings of two basalises agree with and will remain the effect of airtight shape in the above-mentioned confined space portion 34.In addition, the shape of above-mentioned containment member 38,39 is preferably lippacking.In Fig. 5～Fig. 7, Reference numeral 40a, 40b are containment members.

This movable vacuum frame 30 utilizes the action of hydraulic cylinder or cylinder 15 (with reference to Fig. 2) or servomotor that lower substrate layer 21 is risen, thereby the lower surface that can make upside fixed frame portion 31 closely contacts with the upper surface of movable frame portion 36 and makes its inner space (confined space portion 34) become seal cavity (that is, can making up and down, 12,13 sealings of two die sets agree with).And, lower substrate layer 21 is risen, lower substrate layer 21 is risen be connected to the upper surface of the lower end protuberance 35b of downside fixed frame portion 35 up to the lower surface that makes movable frame portion 36, thus can be between relative punch components punching press layered product 9 (with reference to Fig. 4 and 7).The pressurized conditions of this moment is set in the scope of 0.1～2MPa, is preferably 0.4～1.5MPa.

In addition, upside insulation 17 utilizes fixed parts (not shown) such as bolt, nut to be fixed in the lower surface of upper base layer 16.Upside heat dish 18 utilizes fixed parts (not shown) such as bolt, nut to be fixed in upside insulation 17, and upside flexible metal plate 20 utilizes fixed parts (not shown) such as bolt, packing ring to be fixed in upside heat dish 18 across upside bolster 19.In addition, downside insulation 22 utilizes fixed parts (not shown) such as bolt, nut to be fixed in the upper surface of lower substrate layer 21.Downside heat dish 23 utilizes fixed parts (not shown) such as bolt, nut to be fixed in downside insulation 22, and downside flexible metal plate 25 utilizes fixed parts (not shown) such as bolt, packing ring to be fixed in downside heat dish 23 across downside bolster 24.In addition, utilizing fixed parts such as bolt, nut with top (bottom) basalis 16 (21) and upside (downside) heat dish 18 (23) directly fixedly the time, the heat of upside (downside) heat dish 18 (23) is easy to conduct to top (bottom) basalis 16 (21) by bolt, nut etc., and is unsatisfactory.In the drawings, Reference numeral 18a, 23a are configured in the shell-like heater of the inside of two heat dishes 18,23 up and down side by side.The above-mentioned temperature of two heat dishes 18,23 is up and down set and preferably made the temperature of upside heat dish 18 and downside heat dish 23 is 30～200 ℃, more preferably 70～140 ℃.Cross when low at said temperature, existence can't make the tendency of the surface smoothingization of layered product 8.On the other hand, when said temperature is too high, exist the resin bed 8c of layered product 8 to produce the tendency of thermal decomposition, heat cure.

Next, illustrate that above-mentioned banded film emits portion 1.Above-mentioned banded film is emitted portion 1 (with reference to Fig. 8) and being comprised: the banded film of upside of the banded film 5 of upside that is used to reel emits roller (tension force to banded film 5 application of forces of upside is paid parts) 41, the banded film 6 of downside and be provided in the banded film of upside and emit the banded film of downside of roller 41 downsides and emit roller (tension force to banded film 6 application of forces of downside is paid parts) 42, be provided in two banded films up and down and emit and move into conveyer belt 43 between the roller 41,42 is used to reel.And, emit the banded film 5 of upside that roller 41 emits at relative two flat boards 50 up and down from the banded film of upside by vacuum lamination apparatus 2,51 and relative two die sets 12 up and down of plane decompressor 3, after between 13 (with reference to Fig. 1), by between the upside niproll 44a (intermittent delivery parts) of banded film reeling end 4 (with reference to Fig. 9) and by being twisted on the upside takers-in 44, emit the banded film 6 of downside that roller 42 emits similarly at relative two flat boards 50 up and down by vacuum lamination apparatus 2 from the banded film of downside, 51 and relative two die sets 12 up and down of plane decompressor 3, after between 13, by between the downside niproll 45a (intermittent delivery parts) and twisted on the downside takers-in 45 of banded film reeling end 4.In Fig. 8, Reference numeral 43a is used for the interim layered product 7 of butt and interim layered product stop part that interim layered product 7 is stopped, can utilize cylinder 43b to carry out lifting.

As above-mentioned up and down two banded films 5,6, the film that also can adopt the surface roughening of rough textured film etc. to form, but the preferred not film of roughening of table back of the body two sides that adopts.Its reason is and since this table back of the body two sides not the banded film 5,6 of roughening in manufacture process, do not need roughening, comparatively cheap, therefore,, can realize reducing operating cost this band shape film of employing 5,6 o'clock.Its reason also is, as described later, any resin that oozes out in membranaceous resin material 8b, resin bed 8c, 8d can not be trapped in the surface of above-mentioned two banded films 5,6 up and down, the result, from plane decompressor 3 discharge layered products 9 time, even peel off banded film 5,6 from layered product 9, also can suppress the above-mentioned resin that is absorbed in becomes tiny fragment and disperses.This also is the characteristic of above-mentioned laminater.These up and down two banded films 5,6 table back of the body two sides, the index of transparency of roughening is not set at and satisfies glossiness and (measure according to JIS K7105-1981.Down with) more than 150%, mist degree (darkness) (measures according to JIS K7105-1981.Down with) below 15%, the parallel rays transmissivity (measures according to JIS K7105-1981.Down together) in the scope of any more than 70% in these above-mentioned 3 indexs.In addition, as two banded films 5,6 about this, the surperficial not PETG of roughening (PET) film, polyethylene film, polypropylene screen, nylon membrane, polyimide film, polystyrene film be can list, olefine film, polycarbonate membrane fluoridized, thickness is preferably 10～100 μ m, more preferably 20～50 μ m.Specifically, can use " EMBLET (エ Application Block レ Star ト) S-38, the EMBLETS-50 " of You Nijia corporate system, " Diafoil (ダ イ ヤ ホ イ Le) S100, the DiafoilT100 " of Mitsubishi Chemical's polyester film corporate system.

In addition, for prevent described laterly to be heated membranaceous resin material 8b after the pressurization, among resin bed 8c, the 8d any oozed out and is attached to purpose on vacuum lamination apparatus 2 and the plane decompressor 3 to the above-mentioned outside of two banded films 5,6 up and down, the width of above-mentioned up and down two banded films 5,6 is set to than the width of interim layered product 7, layered product 8 and the layered product 9 wide 5～40mm of going out usually, preferred widely goes out about 10～30mm.The above-mentioned membranaceous resin material 8b that oozes out, among resin bed 8c, the 8d any (below be called the resin 8b that oozes out～when 8d) being attached to vacuum lamination apparatus 2 and plane decompressor 3, the membranaceous resin material 8b that adheres to, resin bed 8c, 8d (below be called the resin 8b that adheres to～8d) can be attached to follow-up two banded films 5,6 up and down once more.The thin thickness of the membranaceous resin material 8d at the position that the resin 8b～8d that oozes out is accompanying the amount ground of thickness of resin 8b～8d of adhering to form, product is bad.In addition, pay with emitting the reverse torque of direction by all the time two banded films up and down being emitted roller 41,42, even two banded films 5,6 are up and down applied the weight of interim layered product 7, layered product 8 and layered product 8, also can pay the tension force that can keep the approximate horizontal degree to two banded films 5,6 up and down.This tension force is set at 0.5～150kN usually, preferably sets in the scope of 20～80kN, and above-mentioned two banded films 5,6 up and down can be advanced having been paid under the state of this tension force.In addition, the transporting velocity of two banded films 5,6 is set at 1～20m/ minute usually, preferably sets in 5～15m/ minute scope up and down, is held roller 44a, 45a and drives.

Moving into conveyer belt 43 plays the interim layered product 7 of reception and this interim layered product 7 is supplied to the effect between the two banded films 5,6 up and down.Interim layered product 7 is by having concavo-convex base material 8a (being designated hereinafter simply as base material 8a) and overlapping membranaceous resin material 8b (become resin bed 8c after the vacuum lamination, become resin bed 8d the punching press of above-mentioned plane after) formation (with reference to Fig. 3, Figure 10 and Figure 11) on the male and fomale(M﹠F) of this base material 8a with the state that covers this base material 8a.As above-mentioned base material 8a, for example can adopt the printed circuit board (PCB) of pattern of having applied copper, scolding tin etc. etc., in addition, the multilager base plate that also can adopt lamination process method etc. to be adopted.The thickness of base material 8a, the not special restriction of size in length and breadth, but thickness is generally 0.1～10mm, is preferably in the scope of 0.1～5mm, and size is generally 150～800mm in length and breadth, is preferably in the scope of 250～650mm.As above-mentioned membranaceous resin material 8b, for example can adopt the material that has adherence, cementability, hot melt, under the temperature more than the vitrification point, to be the resin combination of main component with regard to softening resin, the material that has electrical insulating property is particularly useful.As this resin combination, the photosensitive resin composition that mainly can adopt the heat-curing resin constituent that applies epoxy resin on support membranes such as PET film, be made of epoxy resin, is made of ethene unsaturated compound and Photoepolymerizationinitiater initiater also makes their dryings material that form, that be commonly referred to as dry film.In this embodiment, the two sides has concavo-convex base material 8a to above-mentioned interim layered product 7 and a pair of up and down membranaceous resin material 8b constitutes by carrying on the back at table, up and down a pair of membranaceous resin material 8b is temporarily fixed on the male and fomale(M﹠F) on table back of the body two sides of this base material 8a by utilizing auto slice laminater etc. to be cut into the given size slightly littler than base material 8a in advance, but only have under the concavo-convex situation on the face in the table of base material 8a back of the body two sides, also membranaceous resin material 8b only can be temporarily fixed on and have on the concavo-convex face.

And the present invention also provides the laminater that comprises rubber punching type vacuum lamination apparatus 2, diaphragm type vacuum lamination apparatus 10 equal vacuum laminaters and plane decompressor 3.In addition, in this embodiment, adopt rubber punching type vacuum lamination apparatus 2 as vacuum lamination apparatus.

Below, (in this embodiment, adopting a pair of flexure strip (elasticity pressed sheet) 54, the 57 up and down described later) vacuum lamination apparatus 2 that is arranged on as the rubber punching type in the preceding operation of the plane decompressor 3 of feature of the present invention is described.This vacuum lamination apparatus 2 heats pressurization to the interim layered product 7 that two banded films 5,6 about utilizing transport under vacuum state, make the layered product 8 (with reference to Figure 11) that laminated resin layer 8c forms on base material 8a, as shown in figure 12, this vacuum lamination apparatus 2 comprises: upright many (only illustrating two among Fig. 4) pillar 47a that are located on the punching press platform 47; Utilize fixed part 47b such as bolt, nut to be fixed in upper flat plate 50 on above-mentioned each pillar 47a; Can be installed on lower flat plate 51 on above-mentioned each pillar 47a etc. up or down.This lower flat plate 51 is linked to hydraulic cylinder or cylinder 49 by shaft coupling 48, utilizes the action (along with the advance and retreat of piston rod 49a) of this hydraulic cylinder or cylinder 49 and moves up and down.

On upper flat plate 50, be fixed with flat upside insulation 52 in order from upside, upside heat dish 53, when vacuum lamination, to the upside elasticity pressed sheet 54 that the membranaceous resin material 8b of upside pressurizes, on lower flat plate 51, be fixed with flat downside insulation 55 in order from downside with the surperficial butt of the membranaceous resin material 8b of upside (with reference to Figure 10) of interim layered product 7, downside heat dish 56, the downside elasticity pressed sheet 57 that when vacuum lamination, the membranaceous resin material 8b of downside is pressurizeed with the surperficial butt of the membranaceous resin material 8b of downside (with reference to Figure 10) of interim layered product 7.In addition,, can adopt elastomeric material, the various resin materials of rubber-like such as hear resistance silicon rubber, hear resistance fluorubber, be fit to adopt in inside etc. to be provided with fibrolaminar material as the constituent material of two elasticity pressed sheets 54,57 up and down.By this fibrage is set, can improve the durability of two elasticity pressed sheets 54,57 up and down, even pressurization repeatedly at high temperature, also can suppress the extensional deformation of two elasticity pressed sheets 54,57 up and down, performance makes membranaceous resin material 8b, the resin bed 8c effect good with respect to tracing ability, the adaptation of base material 8a.In addition, in Figure 12, two elasticity pressed sheets 54,57 are directly fixed on the heat dish 53,56 up and down, but be not limited thereto, though it is not shown, but by vulcanize bonding etc. general up and down two elasticity pressed sheets 54,57 be fixed on the metallic plate such as corrosion resistant plate and utilize as required fixed part such as bolt up and down two elasticity pressed sheets 54,57 when tabular bolster is fixed on the heat dish 53,56, can replace with down two elasticity pressed sheets 54,57 easily.

Upside insulation 52 utilizes fixed parts (not shown) such as bolt, nut to be fixed on the lower surface of upper flat plate 50.Upside heat dish 53 utilizes fixed parts (not shown) such as bolt, nut to be fixed on the upside insulation 52, and upside elasticity pressed sheet 54 directly is adhesively fixed first-class in the lower surface of upside heat dish 53.In addition, downside insulation 55 utilizes fixed parts (not shown) such as bolt, nut to be fixed on the upper surface of lower flat plate 51.Downside heat dish 56 utilizes fixed parts (not shown) such as bolt, nut to be fixed on the downside insulation 55, and downside elasticity pressed sheet 57 directly is adhesively fixed on the upper surface of downside heat dish 56.In addition, utilizing fixed parts such as bolt, nut that top (bottom) dull and stereotyped 50 (51) and upside (downside) heat are coiled 53 (56) directly fixedly the time, the heat of upside (downside) heat dish 53 (56) is easy to conduct to top (bottom) flat board 50 (51) by bolt, nut etc., and is unsatisfactory.

Suitably dispose the heater block that can control temperature that is used to heat two elasticity pressed sheets 54,57 in the inside of two heat dishes 53,56 up and down.In this embodiment, same with above-mentioned up and down two heat dishes 18,23, as above-mentioned heater block, dispose many shell- like heater 53a, 56a side by side in the inside of two heat dishes 53,56 up and down.

As shown in figure 13, vacuum lamination apparatus 2 also comprises movable vacuum frame (confined space formation parts) 30, and this movable vacuum frame 30 is structures same with the movable vacuum frame 30 of above-mentioned plane decompressor 3, omits its explanation.In addition, in Figure 13, Reference numeral 59 is confined space portions, is equivalent to the confined space portion 34 of plane decompressor 3.

Then, describe being arranged on as the banded film reeling end 4 in the back operation of the plane decompressor 3 of feature of the present invention.As shown in Figure 9, this band shape film reeling end 4 comprises: be used to batch the banded film 5 of upside upside takers-in 44, the downside takers-in 45 that is used to batch the banded film 6 of downside and be provided in upside takers-in 44 downsides, be provided in the discharge conveyer belt (not shown) between two takers-ins 44,45 up and down.In addition, also can not set this discharge conveyer belt.In addition, in banded film reeling end 4, cooling fan 46 cooling-parts such as grade also preferably are set, utilize layered product 9 coolings after this cooling-part will be shown smoothedization of back of the body two sides, make softening of layered product 9 surfaces resin bed 8d sclerosis and be difficult to make layered product 9 areal deformations, and the resin 8b～8d and the banded film 5,6 that also can be easy to ooze out are peeled off.In Fig. 9, Reference numeral 44a be the pressurization of lamination operation, heating process finish and the step-down of confined space portion 34 and 59 remove and after reverting to atmospheric pressure, two flat boards 50,51 up and down of vacuum lamination apparatus 2 and 12,13 fens ETAD expected time of arrival and departure of two die sets up and down of plane decompressor 3 drive the upside niproll (intermittent delivery parts) that upside takers-in 44 batches with having a rest, Reference numeral 45a drives the downside niproll (intermittent delivery parts) that downside takers-in 45 batches synchronously and off and on above-mentioned upside takers-in 44.In addition, from it seems with the rectangular direction of throughput direction, the length of two banded films 5,6 up and down of being batched is off and on batched the such amount of approximate distance between the center of the center of vacuum lamination apparatus 2 and plane decompressor 3 usually.

In the present invention, use above-mentioned laminater to make layered product 9 as follows.That is, at first, the interim layered product 7 that the temporary fixed membranaceous resin material 8b of male and fomale(M﹠F) that utilizes automatics, manual workings such as auto slice laminater, auto slice mash welder to be produced on base material 8a in advance forms.Then, interim layered product 7 is transported to moves on the conveyer belt 43, move into conveyer belt 43 from this and supply to up and down between the two banded films 5,6.The interim layered product 7 that this supply comes is moved into vacuum lamination apparatus 2 by two banded film 5,6 clampings up and down.

In this vacuum lamination apparatus 2, carry out the vacuum lamination operation as follows.At first, utilizing up and down, two banded films 5,6 are transported to above-mentioned interim layered product 7 in the vacuum lamination apparatus 2 and are located the position (compacted position) (with reference to Fig. 1) of stipulating.The adjustment of above-mentioned position location can be transferred to up and down and adjusts the opportunity between the two banded films 5,6 from moving into conveyer belt 43 by control above-mentioned interim layered product 7 opportunity with the lifting of interim layered product stop part 43a.Then, make 49 actions of hydraulic cylinder or cylinder and lower flat plate 51 risen, the lower surface that makes the upside fixed frame portion 31 of upper flat plate 50 closely contact with the upper surface of the movable frame portion 36 of lower flat plate 51 and will about two flat boards 50,51 seal and agree with (with reference to Fig. 6).

After sealing is agreed with, make confined space portion 59 become the step-down state.Specifically, utilization vacuumizes with nozzle 33 (with reference to Fig. 6) and by vavuum pump (not shown) confined space portion 59 is carried out step-down.Above-mentioned confined space portion 59 be in usually pressure be 200Pa following, be preferably following, the vacuum state of 50Pa more preferably of 100Pa.When above-mentioned hypertonia, residual between base material 8a and membranaceous resin material 8b have a micropore, when in subsequent handling, making the resin bed 8c heat cure behind the lamination, residual have the surface at the position of micropore to have following tendency: run out of, produce its vestige and be absorbed in etc. and become unsmooth because of expand surface that the air of the superficial expansion that makes resin bed 8c or expansion breaks through resin bed 8c of residual air, product is bad.

Then, make hydraulic cylinder or cylinder 49 actions again, lower flat plate 51 is risen, by the interim layered product 7 of two elasticity pressed sheets, 54,57 crampings up and down it is heated, pressurizes (with reference to Figure 13, not shown two banded films 5,6 up and down among this Figure 13), carry on the back the bonding membranaceous resin material 8b in two sides and make layered product 8 at the table of base material 8a.Specifically, the plus-pressure that adjusting self-hydraulic cylinder or cylinder 49 under the state of confined space portion 59 step-downs are applied that is adjusted at of above-mentioned pressure gets final product, push the two membranaceous resin material 8b up and down of interim layered product 7 by two elasticity pressed sheets 54,57 up and down, base material 8a and membranaceous resin material 8b are compressed.Layered product 7 is become layered product 8 by vacuum lamination like this, temporarily.Though resin bed 8c closely follows the concavo-convex of this base material 8a, base material 8a concavo-convex is reflected on the surface of this layered product 8 and makes air spots sliding.

When above-mentioned heating, pressurization, the temperature of upside heat dish 53 and downside heat dish 56 is preferably 30～185 ℃, more preferably 70～140 ℃ usually.Cross when low at said temperature, can't be in base material 8a potting resin layer 8c, have the tendency of the relatively poor and residual micropore of tracing ability.On the other hand, when said temperature was too high, membranaceous resin material 8b produced thermal decomposition, heat cure, existed the tracing ability that is caused by decomposition gas to reduce and the tendency of generation micropore.This temperature-controlled process is not special to be limited, and shell- like heater 53a, 56a about utilization is built in the two heat dishes 53,56 wait and adjust.

In above-mentioned heating, pressure process, pressurized conditions is set in the scope of 0.1～2MPa usually, is preferably 0.4～1.5MPa.

After above-mentioned heating, pressurization operation finish, utilize to vacuumize to make it revert to normal pressure with the vacuum state of the above-mentioned confined space of nozzle 33 releases portion 59, make hydraulic cylinder or cylinder 49 actions and lower flat plate 51 is descended.Afterwards, layered product 8 is moved into the plane decompressor 3 of subsequent processing under the state of two banded film 5,6 clampings about the quilt.

In this plane decompressor 3, carry out the plane stamping procedure as follows.At first, be transported to above-mentioned layered product 8 in the plane decompressor 3 by two banded films 5,6 up and down and be positioned at the position (stamping position) (with reference to Fig. 1) of regulation.Then, make the action of hydraulic cylinder or cylinder 15 or not shown servomotor and lower substrate layer 21 risen, the lower surface that makes the upside fixed frame portion 31 of upper base layer 16 closely contact with the upper surface of the movable frame portion 36 of lower substrate layer 21 and will about two basalises 16,21 seal and agree with (with reference to Fig. 6).

After sealing is agreed with, similarly utilize to vacuumize with the vacuum lamination operation of above-mentioned vacuum lamination apparatus 2 to make confined space portion 34 become the step-down state by vavuum pump (not shown) with nozzle 33 (with reference to Fig. 6).Above-mentioned confined space portion 34 be in common pressure be 500Pa following, be preferably following, the vacuum state of 300Pa more preferably of 400Pa.When above-mentioned hypertonia, there is following tendency: at resin bed 8c and residual between two banded films 5,6 and the up and down two flexible metal plates 20,25 between the two banded films 5,6 and/or up and down up and down bubble arranged, the resin bed 8c of this part can be absorbed in when punching press, and product is bad.

Then, make hydraulic cylinder or cylinder 15 or not shown servomotor action again, lower substrate layer 21 is risen, by two flexible metal plates, 20,25 cramping layered products 8 up and down it is heated, pressurizes (with reference to Fig. 4, not shown two banded films 5,6 up and down among this Fig. 4), make the surface smoothing of the resin bed 8c of layered product 8.Specifically, the plus-pressure that adjusting self-hydraulic cylinder or cylinder 15 or not shown servomotor under the state of confined space portion 34 step-downs are applied that is adjusted at of above-mentioned pressure gets final product, push the two resin bed 8c up and down of layered product 8 with two flexible metal plates 20,25 up and down, make two resin bed 8c level and smooth.Like this, surperficial smoothedization of layered product 8.

When above-mentioned heating, pressurization, the temperature of upside heat dish 18 and downside heat dish 23 is preferably 30～185 ℃, more preferably 70～140 ℃ usually.Cross when low at said temperature, exist to be difficult to the tendency that makes resin bed 8c level and smooth, on the other hand, when said temperature is too high, have following tendency: resin bed 8c produces thermal decomposition, heat cure and the flowability of resin bed 8c is reduced, and is difficult to make surface smoothing.This temperature-controlled process is not special to be limited, but can utilize not shown thermocouple to detect temperature of heat plate, is waited and is controlled by shell- like heater 18a, 23a in the two heat dishes 18,23 about being built in.

Then, after heating, the pressurization operation of plane decompressor 3 finish, utilization vacuumizes with the vacuum state of the above-mentioned confined space of nozzle 33 releases portion 34 and makes it revert to normal pressure, makes hydraulic cylinder or cylinder 15 or not shown servomotor action then, and lower substrate layer 21 is descended.Afterwards, utilize up and down two banded films 5,6 to discharge the layered product 9 of surface smoothing, in banded film reeling end 4,, layered product 9 is peeled off from two banded films 5,6 up and down, be discharged from conveyer belt and discharge by after air cooling fan 46 coolings from plane decompressor 3.

In the stamping procedure of above-mentioned plane, heating-up temperature is set to 30～200 ℃ usually, is preferably 70～140 ℃, and pressurized conditions is set to 0.1～2MPa usually, is preferably 0.4～1.5MPa.In addition, in the heating of above-mentioned vacuum lamination apparatus 2, the operation of pressurizeing, usually be depressured to 200Pa following, be preferably 100Pa following, more preferably below the 50Pa, in the stamping procedure of above-mentioned plane, be depressured to usually 500Pa following, be preferably 400Pa following, more preferably below the 300Pa.In addition, step-down degree in vacuum lamination apparatus 2 is below the 200Pa, step-down degree in the stamping procedure of plane is under the following condition of 500Pa, both are to amass (promptly, step-down degree (Pa) in step-down degree (Pa) * plane stamping procedure in the vacuum lamination apparatus 2) is generally below 100000 (the step-down degree (Pa) in step-down degree (the Pa) * plane stamping procedure in the vacuum lamination apparatus 2), be preferably below 50000 (the step-down degree (Pa) in step-down degree (the Pa) * plane stamping procedure in the vacuum lamination apparatus 2), more preferably 20000 (the step-down degree (Pa) in step-down degree (the Pa) * plane stamping procedure in the vacuum lamination apparatus 2).

As mentioned above, in this embodiment, under the step-down state, utilize plane decompressor 3 to carry out punching press.Therefore, in the concavo-convex darker situation of the male and fomale(M﹠F) of base material 8a, concavo-convex dark but exist under the situation of the recess that does not have Wiring pattern, can be at resin bed 8c and residual bubble between two banded films 5,6 and the up and down two flexible metal plates 20,25 between the two banded films 5,6 and/or up and down up and down yet, can not be mingled with above-mentioned bubble and the resin bed 8c of layered product 8 and two banded films 5,6 and up and down two banded films 5,6 are up and down closely contacted with two flexible metal plates 20,25 up and down, thereby can make the surface smoothingization of resin bed 8c.In addition, by use himself surface not a pair of banded film of roughening as two banded films 5,6 up and down, the banded film cheapness of these band shape film 5,6 specific surface roughenings, therefore, cheap for manufacturing cost.And,, be in the state that is easy to peel because therefore the surface of two banded films 5,6 roughening not up and down, when heating, pressurization, can not be absorbed in even the resin 8b～8d that oozes out is attached to the surface of banded film 5,6 yet.Therefore, peeled off banded film at 5,6 o'clock since the layered product 9 that laminater is discharged, the above-mentioned resin 8b～8d that oozes out becomes piece and is peeled off from banded film 5,6, can not become tiny fragment and disperses.

In addition, in the above-described embodiment, when making above-mentioned confined space portion 34 or 59 for step-down, if lower flat plate 51 is utilized this step-down (promptly, utilize the attraction of vavuum pump) overcome the weight of the elastic force of spring 37 and following die set 13 or lower flat plate 51 and rise, then might be by up and down two elasticity pressed sheets 54,57 or interim layered product 7 of up and down two flexible metal plates 20,25 crampings or layered product 8, in above-mentioned confined space portion 34 or 59, become the step-down state of regulation.Therefore, packaged unit or locking servomotors such as cut-off valve that the pipe arrangement to hydraulic cylinder or cylinder 15,49 supply oil or air is sealed are set preferably, when above-mentioned step-down, stop advancing of piston rod 15a, 49a.

In addition, in the above-described embodiment, can be provided in the exit of banded film reeling end 4 heating at plane decompressor 3, after the pressurized treatments with layered product 9 and stripping off device (with reference to Fig. 9, peeling member), for example anti-bouncing devices (not shown) such as stripper roll 44b, 45b peeled off of two banded films 5,6 up and down.In addition, in order to prevent static, can be at the film line of two banded films 5,6 up and down, be provided with and remove torch etc. and remove electric parts everywhere.In addition, also can after banded film reeling end 4, suitably be provided for accumulator of storing layered product 9 etc.

In addition, in the above-described embodiment, adopt the chuck conveying device as the intermittent delivery parts, can emit between portion 1 and the vacuum lamination apparatus 2 at banded film, at least one place between vacuum lamination apparatus 2 and the plane decompressor 3, between plane decompressor 3 and the banded film reeling end 4 disposes this chuck conveying device.As above-mentioned chuck conveying device, exist for example to comprise that being equipped on a pair of up and down on the two banded films 5,6 up and down with relative shape controls member, utilizes up and down two to control that member is controlled two banded films 5,6 up and down and the device carried of two banded films 5,6 up and down.

In addition, in the above-described embodiment, also can adopt male and fomale(M﹠F) at above-mentioned base material 8a (on table back of the body two sides be under the situation of male and fomale(M﹠F) be table back of the body two sides the two, one of table back of the body two sides under the situation of male and fomale(M﹠F) only be male and fomale(M﹠F) or table back of the body two sides the two) go up the application of liquid resist and make object that liquid resist (not shown) drying forms as layered product 8.In this case, can utilize and move into that conveyer belt 43 is moved into above-mentioned layered product 8 and it is supplied to up and down between the two banded films 5,6, utilize up and down two banded films 5,6 that this layered product 8 is directly moved in the plane decompressor 3, in plane decompressor 3, heat, pressurized treatments and make the concavo-convex smoothing of layered product 8.Like this, under the situation that adopts the liquid resist, also can omit the vacuum lamination apparatus 2 of above-mentioned laminater, but under the bigger situation of the thickness of above-mentioned layered product 8, if use vacuum lamination apparatus 2 to heat, pressurize with layered product 8 preheatings, then can utilize plane decompressor 3 to make layered product 8 smoothings, also can easily utilize plane decompressor 3 to carry out smoothing with more uniform temperature.

In addition, in this embodiment, also can not utilize two takers-ins 14,15 up and down of banded film reeling end 4 to batch two banded films 5,6 up and down and the tight state of contact of resin bed that keeps two banded films 5,6 up and down and constitute by the liquid resist.For example, also can than above-mentioned plane decompressor 3 by a side of banded film take-up direction or this plane decompressor 3 from being provided on one's body (promptly in the front and back of layered product 9, at two banded films 5 up and down, 6 length direction and the position that separates predetermined distance from layered product 9) along two banded films 5 up and down, 6 width (with the direction of length direction quadrature) cuts off through the two banded films 5 up and down behind the stamping procedure of above-mentioned plane, 6 cut-out parts (not shown), be adjacent to dispose accumulator (not shown) with these cut-out parts, at cut-out thing (the two banded films 5 up and down of cut-out that will cut off by above-mentioned cut-out parts, the 6 tables back ofs the body two sides that are laminated to layered product 9 form) be accommodated on the frame of accumulator after, it is handed off to subsequent processings such as exposure process.

In addition, can utilize above-mentioned cut-out parts to cut off from after the two banded films 5,6 it being stood on the frame (not shown) up and down that plane decompressor 3 is taken out of, also can unfavorable usefulness above-mentioned cut-out parts cut off and fold, also exposure machine can be disposed in the production line and handle continuously.In addition, in this embodiment,, can suitably adopt the chuck conveying device as the intermittent delivery parts.

Figure 14 represents the variation of the plane decompressor 3 that adopts in the above-mentioned embodiment.In this example, it is different from the embodiment described above that confined space forms parts.Promptly, in this example, movable vacuum frame 30 is not set in above-mentioned plane decompressor 3, but be fixed with the roughly upside fixed frame portion 61 of quadrilateral frame shape airtightly at the lower surface of upper base layer 16, on lower substrate layer 21, be fixed with the roughly downside fixed frame portion 62 of quadrilateral frame shape airtightly.In addition, in this example, in upside fixed frame portion 61, fixedly do not vacuumize with nozzle 33, but on lower substrate layer 21, vacuumize with through hole 63, vacuumize with through hole 63 the air vacuum pumping in the confined space portion 34 by this along 62 settings of downside fixed frame portion.

In addition, in this example, be provided with and support the hydraulic cylinder or the cylinder 64 of lower substrate layer 21 and can the supporting of free lifting ground be fixed in hydraulic cylinder or the cylinder 66 that downside heat is coiled the support plate 65 on 23 in free lifting ground across downside insulation 22, utilize hydraulic cylinder or cylinder 64 that lower substrate layer 21 is moved up and down, utilize hydraulic cylinder or cylinder 66 that support plate 65 is moved up and down.In the drawings, Reference numeral 67 is the annular seal members that are fixed in the upper surface of above-mentioned downside fixed frame portion 62, will remain the effect of airtight shape in the confined space portion 34 when this annular seal member plays vacuum lamination.In addition the plane decompressor 3 that adopts in part and the above-mentioned embodiment is identical, to the identical identical Reference numeral of part mark.Under the situation of the plane decompressor 3 that adopts this example, also can play effect, the effect same with the laminater of above-mentioned embodiment.In addition, also this upside fixed frame portion 61, downside fixed frame portion 62 etc. can be applied to vacuum lamination apparatus 2.

Figure 15 represents the variation of the vacuum lamination apparatus (rubber punching type vacuum lamination apparatus 2) that adopts in the above-mentioned embodiment.In this example, adopt diaphragm type vacuum lamination apparatus 10 as vacuum lamination apparatus.This vacuum lamination apparatus 10 comprises: upright many (only illustrating two among Figure 15) pillar 47a that are located on the punching press platform 47; Be erected at many (only illustrating 1 among Figure 15) horizontal bars 70 of the upper end of above-mentioned each pillar 47a; Utilize fixed parts (not shown) such as bolt, nut to be fixed in upper flat plate 71 on above-mentioned each horizontal bar 70; The lower flat plate 72 that can move up and down etc.

Lower surface in above-mentioned upper flat plate 71 is equipped with upside flexible strip (barrier film) 73, and its peripheral part instrument 74a that is pressed is fixing airtightly.And the interior all side parts at this press tool 74a are formed with space part 75 between upper flat plate 71 and upside flexible strip 73.In Figure 15, Reference numeral 74b is the screw that is used for upside flexible strip 73 and press tool 74a are fixed in the lower surface of upper flat plate 71.

In addition, on the lower surface of above-mentioned upper flat plate 71, and the part that is formed at space part 75 conductings between upper flat plate 71 and the upside flexible strip 73 offer a plurality of (only illustrating two among Figure 15) and go up side open groove 76, from by vavuum pump, atmosphere is communicated with pipe arrangement, pressure-air import pipe arrangement equal pressure adjustment component (not shown) via above-mentioned on each side open groove 76 make the state that becomes step-down in the space part 75, in space part 75, import atmosphere, compressed air, thus upside flexible strip 73 from and the tight state of contact of lower surface of upper flat plate 71 as balloon, heave and interim layered product 7 be pressed between upside flexible strip 73 (barrier film) and the downside flexible strip 77 described later.The pressure of this space part 75 can suitably be adjusted by step-down, importing, derivation atmosphere and the compressed air of the 2nd pressure adjustment component.

On the other hand, above-mentioned lower flat plate 72 is fixedly linked on the piston rod 49a of hydraulic cylinder or cylinder 49, utilizes the action (along with the advance and retreat of piston rod 49a) of this hydraulic cylinder or cylinder 49 to move up and down.

In addition, be equipped with downside flexible strip 77 on the upper surface of above-mentioned lower flat plate 72, this downside flexible strip 77 is relative with this upside flexible strip 73 with the slightly bigger area of the part that expands than the interior perimembranous open upper side flexible strip 73 from above-mentioned press tool 74a.About this, be built-in with heater blocks such as rubber heater in two flat boards 71,72.

Upper surface in above-mentioned lower flat plate 72 offers a plurality of (only illustrating two among Figure 15) open lower side groove 78, agree with and when forming vacuum chamber in two flat boards, 71,72 sealings up and down, can utilize vavuum pump grade in an imperial examination 1 pressure adjustment component (not shown) will be formed at the air step-down of the spatial portion 79 between two flexible strips 73,77 up and down and make spatial portion 79 become vacuum state by above-mentioned each open lower side groove 78.In addition, the pressure of this spatial portion 79 can utilize above-mentioned step-down parts suitably to adjust.In Figure 15, Reference numeral 72a is the containment member that is fixed on the peripheral part upper surface of lower flat plate 72, and the sealing member plays the bubble-tight effect that improves spatial portion 79 when above-mentioned vacuum state.In addition, the configuration position of containment member 72a is not limited to the peripheral part upper surface of lower flat plate 72, also can be the peripheral part lower surface of press tool 74a.In this example, constitute confined space by up and down two flat boards 71,72, containment member 72a, hydraulic cylinder or cylinder 49 etc. and form parts.

As above-mentioned two flexible strips 73,77 up and down, can suitably use the material of its material as hear resistance Viton, silicon rubber.In addition, when the surface (upper surface of the lower surface of upside flexible strip 73 and downside flexible strip 77) of two flexible strips 73,77 is roughened being implemented embossing processing, the processing of pears surface etc. about above-mentioned, can improve the above-mentioned release property on two flexible strips, 73,77 surfaces up and down, preferable.

In addition, above-mentioned two flexible strips 73,77 up and down have the fibrage (not shown) that constitutes by with chemical fibres such as polyester, polyamide, the fiberglass braided material that forms for the cloth shape, can utilize this fibrage to improve the above-mentioned durability of two flexible strips 73,77 up and down, even at high temperature pressurize lamination repeatedly, also can suppress the above-mentioned extensional deformation of two flexible strips 73,77 up and down, membranaceous resin material 8b is good with respect to the tracing ability of base material 8a, connecting airtight property.

In this diaphragm type vacuum lamination apparatus 10, carry out the vacuum lamination operation as follows.At first, it is interior and be positioned at the position (compacted position) of regulation to utilize two banded films 5,6 up and down will above-mentioned interim layered product 7 to be transported to vacuum lamination apparatus 10.Then, make 49 actions of hydraulic cylinder or cylinder and lower flat plate 72 risen, the lower surface that makes the press tool 74a of upper flat plate 71 closely contact with the containment member 72a of the upper surface of lower flat plate 72 and will about two flat boards 71,72 seal and agree with.

After sealing is agreed with, make space part 75 and spatial portion 79 become the step-down state.Specifically, utilize the 2nd pressure adjustment component to make step-down in the space part 75, utilize the 1st pressure adjustment component to make step-down in the spatial portion 79 by open lower side groove 78 by last side open groove 76.The pressure of above-mentioned spatial portion 79 preferably 20 seconds with the interior vacuum state that is in below the 200Pa, more preferably 20 seconds with the interior vacuum state that is in below the 100Pa, particularly preferably in 20 seconds with the interior vacuum state that is in below the 50Pa.When the pressure with interior spatial portion 79 can't reach in the above-mentioned scope in 20 seconds when beginning to vacuumize certainly, have between concavo-convex base material 8a and the membranaceous resin material 8b and can micropore residually arranged, existing resin bed 8c behind the lamination closely to contact and the situation of following base material 8a with base material 8a.

In addition, also can be in advance with space part 75 step-down be vacuum state, move into interim layered product 7 on the downside flexible strip 77 and after forming vacuum chamber, be vacuum state below the 200Pa with step-downs in the spatial portion 79.

In addition, when vacuumizing, the temperature of two flexible strips 73,77 is preferably 30～185 ℃ usually up and down, more preferably 70～140 ℃.Cross when low at said temperature, existence can't be in base material 8a potting resin layer 8c, the such tendency of relatively poor, the residual micropore of tracing ability.In addition, when said temperature is too high, exist resin bed 8c to produce thermal decomposition, heat cure, the tracing ability that caused by decomposition gas reduces and produce the tendency of micropore.This temperature-controlled process is not special to be limited, and can utilize about being built in the rubber heater in two flexible strips 73,77 to wait and adjust.

Then, utilize the space part 75 and the pressure official post upside flexible strip 73 of spatial portion 79 to heave and the bonding lamination suppression process of the interim layered product that will constitute by base material 8a and membranaceous resin material 8b 7 downwards.Specifically, making the pressure of space part 75 revert to normal pressure under the state with step-downs in the spatial portion 79 of being adjusted at of above-mentioned pressure differential gets final product, utilize this pressure official post upside flexible strip 73 to heave, push above-mentioned interim layered product 7 from the top and base material 8a and membranaceous resin material 8b are compressed to spatial portion 79 sides.

Then, improve the lamination supercharging operation of the pressure of space part 75.In this operation, importing compressed air improves the pressure in the space part 75 in space part 75, and upside flexible strip 73 is heaved more consumingly, and base material 8a and membranaceous resin material 8b are compressed forcefully.Then, utilize above-mentioned lamination suppression process that base material 8a is closely contacted with membranaceous resin material 8b, utilize lamination supercharging operation to make the adaptation of base material 8a and resin bed 8c more reliable.

After lamination supercharging operation finished, the pressurized state of the vacuum state of side open groove 76 and open lower side groove 78 Free up Memory portions 79 and space part 75 in utilizations and make them revert to normal pressure made below lower flat plate 72 moves to.Interim layered product 7 is become layered product 8 by vacuum lamination.Though resin bed 8c closely follows the concavo-convex of base material 8a, base material 8a concavo-convex is reflected in the surface of this layered product 8 and makes the air spots of this layered product 8 sliding.Afterwards, layered product 8 is moved in the plane decompressor 3 of subsequent processing by two band shape film 5,6 clampings up and down.

In above-mentioned heating pressure process, pressurized conditions is set in the scope of 0.1～1MPa usually, is preferably in the scope of 0.2～0.5MPa.

Figure 16 represents another variation of diaphragm type vacuum lamination apparatus 10.In this example,, be fixed with upside flexible strip 73 by bonding grade at the lower surface of upper flat plate 71.In addition, at the upper surface of lower flat plate 72, utilize press tool 74a to be fixed with downside flexible strip 77 (barrier film) airtightly, the interior all side parts at this press tool 74a are formed with space part 75 between lower flat plate 72 and downside flexible strip 77.And by importing atmosphere, compressed air in this space part 75, downside flexible strip 77 is heaved and interim layered product 7 is pressed on up and down between two flexible strips 73,77 to upper flat plate 71 sides as balloon.

In Figure 16, Reference numeral 76a goes up side open groove, can when utilizing the 1st pressure adjustment component to make air step-down in the spatial portion 79, use, Reference numeral 78a is the open lower side groove, can utilize the 2nd pressure adjustment component to make air step-down in the space part 75 or importing, use when deriving atmosphere, compressed air.In addition part is identical with diaphragm type vacuum lamination apparatus 10 shown in Figure 15, to the identical identical Reference numeral of part mark.Above-mentioned confined space form parts also with diaphragm type vacuum lamination apparatus 10 shown in Figure 15 similarly by two flat boards 71,72, containment member 72a, hydraulic cylinder or cylinder 49 etc. constitute up and down.In addition, under the situation of the diaphragm type vacuum lamination apparatus 10 that adopts this example, also can play effect, the effect same with diaphragm type vacuum lamination apparatus shown in Figure 15 10.

In addition, in Fig. 1, for and be provided with the continuous laminating device of vacuum lamination apparatus 2 and plane decompressor 3, but be not limited to this, also can use vacuum lamination apparatus 2 and plane decompressor 3 independently.In addition, in this embodiment, use two banded films 5,6 conveying interim layered product 7, layered product 8 and layered products 9 up and down, the part that two banded films 5,6 covering membranaceous resin material 8b, resin bed 8c, resin bed 8d ooze out from supporting mass film end about utilizing, but in order to control to adjust this tension force and transporting velocity of two banded films 5,6 up and down, dispose banded film moving into of the interim layered product 7 of vacuum lamination apparatus 2 near the mouth and emit portion 1, the layered product 9 of plane decompressor 3 take out of mouth near dispose banded film reeling end 4.

In addition, in above-mentioned vacuum lamination apparatus 2 and plane decompressor 3, also can use upper flat plate 50, go up that die set 12 can move up and down and lower flat plate 51, the structure that is fixed of die set 13 down, but from by upper flat plate 50, the aspect that goes up the foreign matter dust that the elevating mechanism of die set 12 produces considers the structure of preferred Fig. 1.

In addition, in Fig. 1, be illustrated in and all use the situation of two banded films 5,6 up and down when utilizing vacuum lamination apparatus 2 and plane decompressor 3 to handle, but also can only when utilizing plane decompressor 3 to handle, use these two banded films 5,6 up and down.In addition, also can in vacuum lamination apparatus 2 and plane decompressor 3, be respectively arranged with two banded films 5,6 up and down.

In addition, also can state laminater in the use and carry out disposing cleaning devices such as little adhesive roller, vacuum cleaner before the laminating method of the present invention, come the surface of cleaned base material 8a, the surface of two banded films 5,6 up and down thus.

In addition, before the vacuum lamination apparatus 2, dispose after the plane decompressor 3 and move into conveyer belt 43, discharge conveyer belt (not shown), utilization move into conveyer belt 43 up and down two banded films 5,6 supply with interim layered product 7, but also can substitute these two conveyer belts and adopt rotation roller group, endless belt.In addition, the raw material of two conveyer belts is to be difficult to stained, as can not produce dust material get final product.In addition, the size of above-mentioned two conveyer belts in the scope of 0.3～3m, be preferably interior the getting final product of scope of 0.5～1.5m, and its transporting velocity is usually in 1～25m/ minute scope, preferably in 5～15m/ minute scope usually.

Resin bed 8d from layered product 9 surfaces that plane decompressor 3 is discharged soften by heating, and easy deformation when contacting and have impression becomes defective products sometimes.In order to prevent this point, preferably with layered product 9 after plane decompressor 3 is discharged immediately cooling curing be the room temperature degree, as this cooling means, which kind of method can, for example can utilize natural heat dissipation and cool off, also and then cooling device can be set after plane decompressor 3.This cooling device also can adopt the adiabatic expansion of refrigerator, applications exploiting air and feeds chill roll that cold water is arranged, cooling and plane stamping machine etc. in the cooling fan of the cold air that obtains, cold wind squeegee, pipe except industrial common cooling fan.

When this cools off, more preferably under by the state of two banded film 5,6 clampings up and down, cool off layered product 9, preferably under the state of two banded film 5,6 clampings about layered product 9 quilts that transport from plane decompressor 3, it is cooled off, after cooling, be discharged to the discharge conveyer belt of rear side.

The present invention for other purposes except that printed circuit board (PCB), for example on the LCD substrate the bonding polarizer that has a bonding agent, during with bonding cutting belt (dicing tape) in the winding (TABTape) during bonding various base material, on various electric substrates etc., the film that is attached with thermoplastic resin, for example IC-card, solar cell etc., all are effective apparatus and method when having the polarizer of bonding agent, at applying electronics automatically.

Embodiment

Below, enumerate embodiment and be described more specifically the present invention, but the present invention is only otherwise exceed its purport, just is not limited to following examples.

Embodiment 1～8 and comparative example 1～8

Under the condition shown in the following table 1,2, make layered product.That is, in embodiment 1～8 and comparative example 1～8, the pattern on the base material 8a is on two faces of base material 8a, the parallel lines of L (line)/S (space)=50/50 μ m and L (line)/S (space)=50/50000 μ m (=5cm) parallel lines quadrature.In addition, the height (the concavo-convex degree of depth of the male and fomale(M﹠F) of base material 8a) of preparation pattern is respectively these three kinds of 35 μ m, 50 μ m, 70 μ m.

Embodiment 9～16 and comparative example 9～16

Under the condition shown in the following table 3,4, make layered product.That is, in embodiment 9～16 and comparative example 9～16, the pattern of preparing respectively on the base material 8a is these four kinds of structures of following (1)～(4).In addition, make the height of pattern be 35 μ m.

(1) on two faces of base material 8a, the parallel lines quadrature of the parallel lines of L/S=50/50 μ m and L/S=50/50000 μ m.

(2) on two faces of base material 8a, the parallel lines quadrature of the parallel lines of L/S=50/500 μ m and L/S=50/50000 μ m.

(3) on two faces of base material 8a, the parallel lines quadrature of the parallel lines of L/S=50/3000 μ m and L/S=50/50000 μ m.

(4) on two faces of base material 8a, the parallel lines quadrature of the parallel lines of L/S=50/30000 μ m and L/S=50/50000 μ m.

In addition, embodiment 1～4 and 9～12 and comparative example 1,3,5,7 and 9,11,13,15 in, as banded film 5,6, use transparent film (You Nijia corporate system, model EMBLET S-38, thickness 38 μ m, glossiness 185%, mist degree 3.6%, parallel rays transmissivity 86%), embodiment 5～8 and 13～16 and comparative example 2,4,6,8 and 10,12,14,16 in, as banded film 5,6, use rough textured film (You Nijia corporate system, model EMBLET PTH38, thickness 38 μ m, glossiness 38%, mist degree 31.0%, parallel rays transmissivity 58%).

Embodiment 1,2,5,6 and 9,10,13,14 and comparative example 1～4 and 9～12 in, as laminater, vacuum lamination apparatus 2 is removed in use in laminater shown in Figure 1 structure (promptly, banded film 5,6 freely through structure in plane decompressor 3), embodiment 3,7 and 11,15 and comparative example 5,6 and 13,14 in, use the structure that the vacuum lamination apparatus in the laminater shown in Figure 12 is replaced with diaphragm type vacuum lamination apparatus 10 shown in Figure 15.And, embodiment 4,8 and 12,16 and comparative example 7,8 and 15,16 in, as laminater, use laminater shown in Figure 1 (vacuum lamination apparatus is a rubber punching type vacuum lamination apparatus 2 shown in Figure 2).

Embodiment 1,5 and 9,13 and comparative example 1,2 and 9,10 in, in order on two faces of base material 8a, to form resin bed 8d, use membranaceous resin material 8b (Ajinomoto Fine-Techno Co., Inc. corporate system lamination distributing board is with interlayer dielectic halogen-free type ABF-GX13, the thick 70 μ m of resin) (resin bed 8d is covered by PET film (support membrane)).

Embodiment 2,6 and 10,14 and comparative example 3,4 and 11,12 in, as resin bed 8d, use liquid resist (sun printing ink manufacturing company system, photoresist formulation two component alkali-developable etching resisting ink PSR4000), with its surface and drying that is coated on base material 8a, form the resin bed 8d of thickness 70 μ m.In this case, only application of liquid resist and make its drying does not have PET film coverlays such as (support membranes) on resin bed 8d.

Embodiment 3,4,7,8 and 12,16 and comparative example 5～8 and 15,16 in, in order to form resin bed 8d, membranaceous resin material 8b (Ajinomoto Fine-Techno Co. is adhered in use temporarily on two faces of base material 8a, Inc. corporate system lamination distributing board is with interlayer dielectic halogen-free type ABF-GX13, the thick 70 μ m of resin) structure (resin bed 8d is covered by PET film (support membrane)) that forms.The membranaceous resin material 8b that temporarily adheres to utilizes vacuum lamination apparatus to form resin bed 8d.

In comparative example, it is different with embodiment not carry out the step-down this point in the stamping procedure of plane.

Utilize following main points to estimate surperficial specularity for the layered product 9 that uses above-mentioned each laminater to make.In addition, the punching press condition of the vacuum lamination apparatus of embodiment 1～8 and comparative example 1～8 is 100 ℃ of heating-up temperatures, 20 seconds heat time heating times, and plus-pressure 1.0MPa, the punching press condition of plane decompressor is 100 ℃ of heating-up temperatures, 30 seconds heat time heating times, plus-pressure 1.0MPa.The punching press condition of the vacuum lamination apparatus of embodiment 9～16 and comparative example 9～16 is 110 ℃ of heating-up temperatures, 40 seconds heat time heating times, and plus-pressure 1.0MPa, the punching press condition of plane decompressor is 120 ℃ of heating-up temperatures, 40 seconds heat time heating times, plus-pressure 1.0MPa.

The surface specularity

The visualization fluorescent lamp shine the lip-deep reverberation of resin bed 8d of layered product 9 with 45 ℃ the angle of tilting, estimate as follows.

Zero ... mirror status.

△ ... near the state of minute surface.

* ... not mirror status.

In following table 1～4, represent embodiment 1～8 and 9～16 and the evaluation result of comparative example 1～8 and 9～16 simultaneously.

Table 1

Table 2

Table 3

Table 4

Embodiment 17～20 and comparative example 17～20

Under the condition shown in the following table 5, make layered product.That is, embodiment 17～20 makes layered product 9 under the condition identical with embodiment 1～4.Comparative example 17～20 does not carry out the step-down carried out at the plane pressing part in embodiment 5～8, in addition make layered product 9 under identical condition.

Then, utilize defective and resin bed the adhering to banded film of following main points for the layered product 9 evaluating resin layer circumference of the foregoing description 17～20 and comparative example 17～20.

The defective of resin bed circumference

Visualization is laminated to the circumference of resin bed 8d base material 8a, smoothing, and whether the circumference of evaluating resin layer 8d is damaged as follows.

Zero ... around resin bed 8d, have the damaged of resin.

* ... around resin bed 8d, there be not the damaged of resin.

Resin bed adheres to banded film

Whether each resin bed 8b～8d of visualization attached to the surface of the banded film 5,6 that contacts with the base material 8a of smoothing, estimates as follows.

Zero ... each resin bed 8b～8d is not attached to the surface of banded film 5,6.

* ... each resin bed 8b～8d is attached to the surface of banded film 5,6.

The evaluation result of in following table 5, representing embodiment 17～20 and comparative example 17～20 simultaneously.

Table 5

According to above-mentioned table 1～table 5, to the adhering to of banded film, it is better than comparative example to judge embodiment about the defective of surperficial specularity, resin bed circumference and resin bed.

Industrial applicibility

Plane of the present invention decompressor and laminater and the laminating method that used these devices are effective when making resin bed smoothing printed circuit board (PCB), on the irregular base material of tool. In addition, together during lamination etc., all are effective apparatus and method during for other purposes except printed circuit board (PCB), such as bonding polarizer with bonding agent on the LCD substrate, with the polarizer of bonding agent, in automatic attaching electronics bonding cutting belt etc. during with the upper bonding various base material of winding (TABTape), on various electric substrates, when being attached with the film (such as IC-card, solar cell etc.) of thermoplastic resin, with solar cell and encapsulant.

Claims (12)

1. plane decompressor, this plane decompressor is provided with relative punch components, utilize these two punch components that layered product is carried out punching press and makes above-mentioned layered product surface smoothingization, above-mentioned layered product is to have at least one face in table back of the body two sides to form resin bed on the above-mentioned male and fomale(M﹠F) of concavo-convex base material and form, it is characterized in that

This plane decompressor comprises:

A pair of banded film, its with relative shape through between above-mentioned two punch components;

Transfer unit, it carries above-mentioned two banded films at the length direction that above-mentioned layered product is held on the state lower edge two banded films between the above-mentioned two banded films;

Confined space forms parts, and it is used to form the confined space portion that utilizes above-mentioned two punch components above-mentioned layered product to be carried out punching press under pressure-lowering condition;

Pressure Control Unit, it is used for the internal control of above-mentioned confined space portion is made as the step-down state.

2. plane according to claim 1 decompressor, wherein,

The surface of above-mentioned a pair of banded film is not roughened.

3. plane according to claim 1 and 2 decompressor, wherein,

Above-mentioned relative punch components comprises: hydraulic cylinder or cylinder or servomotor that at least one punch components in above-mentioned two punch components is advanced and retreat with respect to another punch components; Be provided in a pair of framework between above-mentioned two punch components with relative shape, one end opening portion of a framework is fixed on the punch components airtightly, one end opening portion of another framework is fixed on another punch components airtightly, utilizes other end peristome that advancing of above-mentioned at least one punch components make above-mentioned two frameworks butt and form confined space portion mutually airtightly.

4. according to each described plane decompressor in the claim 1～3, wherein,

This plane decompressor is provided with the prevention parts, and these prevention parts are used for stoping advancing with respect to a punch components of above-mentioned another punch components advance and retreat when utilizing above-mentioned Pressure Control Unit to carry out step-down in to above-mentioned confined space portion.

5. according to each described plane decompressor in the claim 1～4, wherein,

This plane decompressor is provided with peeling member, above-mentioned two punch components are relatively moved and under the state separated from each other, the banded film that this peeling member will be pasted in above-mentioned punching course at least one stamping surfaces of stamping surface of above-mentioned two punch components is peeled off from above-mentioned at least one stamping surface.

6. according to each described plane decompressor in the claim 1～5, wherein,

Formed resin bed is made of membranaceous resin bed on the above-mentioned male and fomale(M﹠F) of the irregular base material of at least one mask of showing back of the body two sides.

7. according to each described plane decompressor in the claim 1～5, wherein,

Formed resin bed is made of the liquid resist on the above-mentioned male and fomale(M﹠F) of the irregular base material of at least one mask of showing back of the body two sides.

8. a laminater is characterized in that,

This laminater comprises each described plane decompressor in vacuum lamination apparatus and the claim 1～7; Above-mentioned vacuum lamination apparatus is provided with relative punch components, utilizes these two punch components that the interim layered product that adheres to membranaceous resin material temporarily form on the above-mentioned male and fomale(M﹠F) that has concavo-convex base material at least one face on table back of the body two sides is carried out punching press and forms layered product.

9. laminater according to claim 8, wherein,

Above-mentioned vacuum lamination apparatus comprises a pair of punch components, this a pair of punch components comprises relative pair of plates, the a pair of flexible strip that sets with relative shape along two opposite faces that face one another of above-mentioned two flat boards, confined space in the confined space portion that is formed between the above-mentioned pair of plates utilizing above-mentioned a pair of flexible strip above-mentioned interim layered product to be carried out punching press under pressure-lowering condition forms parts, can adjust the 1st pressure adjustment component of the pressure of above-mentioned confined space portion, be formed at least one flexible strip in above-mentioned two flexible strips and be equipped with space part between the flat board of this at least one flexible strip, can adjust the 2nd pressure adjustment component of the pressure of this space part, the dull and stereotyped piston rod with hydraulic cylinder or cylinder of at least one in above-mentioned two flat boards is connected.

10. laminater according to claim 8, wherein,

Above-mentioned vacuum lamination apparatus comprises a pair of punch components, this a pair of punch components comprises relative pair of plates, the a pair of flexure strip that sets with relative shape along two opposite faces that face one another of above-mentioned two flat boards, confined space in the confined space portion that is formed between the above-mentioned pair of plates utilizing above-mentioned a pair of flexure strip above-mentioned interim layered product to be carried out punching press under pressure-lowering condition forms parts, can adjust the pressure adjustment component of the pressure of above-mentioned confined space portion, above-mentioned vacuum lamination apparatus comprises at least one flat board of making in above-mentioned two flat boards hydraulic cylinder or cylinder or servomotor with respect to another dull and stereotyped advance and retreat.

11. a laminating method is characterized in that,

Use each described plane decompressor in the claim 1～7, the layered product that laminated resin layer on the above-mentioned male and fomale(M﹠F) of the irregular base material of at least one mask of showing back of the body two sides is formed carries out punching press, makes the concavo-convex smoothing of above-mentioned layered product.

12. a laminating method is characterized in that,

Use each described vacuum lamination apparatus in the claim 8～10 that the interim layered product that adheres to membranaceous resin material temporarily form on the above-mentioned male and fomale(M﹠F) of the irregular base material of at least one mask on table back of the body two sides is carried out punching press and forms layered product, re-use that each described plane decompressor carries out punching press to the above-mentioned layered product that forms through punching press in the claim 1～7, make the concavo-convex smoothing of above-mentioned layered product.

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