CN114919120A

CN114919120A - Stack forming system and stack forming method

Info

Publication number: CN114919120A
Application number: CN202111467955.4A
Authority: CN
Inventors: 石川善孝; 山本隆幸; 杉崎桂一郎; 菊川雅之; 福本健二
Original assignee: Japan Steel Works Ltd
Current assignee: Japan Steel Works Ltd
Priority date: 2021-02-12
Filing date: 2021-12-03
Publication date: 2022-08-19
Also published as: TW202231494A; JP2022123564A; JP7073551B1; JP7369823B2; TWI790073B; JP2022123888A

Abstract

The invention provides a lamination molding system and a lamination molding method, which can perform lamination molding of lamination molded products well. A laminated forming system (1) is provided with a vacuum laminating device (12) for performing laminated forming in a vacuum chamber (C), at least two continuous first press devices (13) which are provided in the subsequent step of the vacuum laminating device (12) and have position control elements and use a servo motor (315) as a driving source, and a second press device (14) which uses a servo motor (415) as a driving source, in the laminated forming system (1) provided with the vacuum laminating device (12) and the press devices (13, 14).

Description

Stack forming system and stack forming method

Technical Field

The present invention relates to a lamination forming system including a vacuum lamination device and a press device, and a lamination forming method using the vacuum lamination device and the press device.

Background

As a stack forming system including a vacuum stacking apparatus and a press apparatus, there are a structure including one press apparatus and a structure including two press apparatuses in a post-step of the vacuum stacking apparatus. The configuration of patent document 1 is known in which one press device is provided in a post-step of a vacuum lamination device. The flattening press device disposed in the post-process of the vacuum laminating apparatus of patent document 1 is provided with a limit switch and detects the pinching of the intermediate laminated product. Further, patent documents 2 and 3 are known in which two pressing devices are disposed in a post-step of a vacuum laminating device. In particular, patent document 3 describes that at least one of the pair of metal plates of the second flat pressing mechanism 3 is movable forward and backward to the other by the operation of the servo motor. Further, there is described: the rotation number of the servo motor 53 is controlled by a servo amplifier (not shown) based on a command signal from a Programmable Logic Controller (PLC) and the fed back information on the distance between the pressure blocks 46 and 47.

Documents of the prior art

Patent document 1: japanese patent laid-open publication No. 2005-66967

Patent document 2: japanese laid-open patent publication No. 2002-120100

Patent document 3: japanese patent laid-open No. 2020 and 28980

However, in the above-mentioned patent document 3, the following problem may occur due to the manner in which only the second plane pressing mechanism 3 presses the laminated molded article based on the distance information. That is, in the first flat pressing mechanism, since the laminated molded article is pressed only at a predetermined pressure, the laminated molded article fed from the first flat pressing mechanism to the second flat pressing mechanism has a variation in thickness. Therefore, in some laminated molded articles, even if the second flat press is configured to press the final molded article by a desired distance, a pressure equal to or higher than a virtual pressure may be generated as a result of pressing the final molded article so as to have a thickness that is not uniform but to be a desired distance, and a defect such as melting of the laminated (resin) film and flowing out to the side of the laminated molded article may occur.

Further, when a hydraulic cylinder controlled by a general pressure control valve is used in the first flat pressing mechanism, there is a problem that the responsiveness of pressure control is poor in the pressing step. Other objects and novel features will become apparent from the description and drawings.

Disclosure of Invention

In a lamination forming system including a vacuum lamination device and a press device, the vacuum lamination device for performing lamination forming in a vacuum chamber and at least two successive press devices provided in a post-step of the vacuum lamination device are provided with a position control element.

The effects of the present invention are as follows.

According to the above-described embodiment, the laminate molding system can be applied to, for example, a laminate molding system, and can provide a laminate molding system capable of satisfactorily performing laminate molding of a laminate molded product.

Drawings

Fig. 1 is a schematic explanatory view of a laminate molding system according to a first embodiment.

Fig. 2 is a block diagram showing control of the first pressing device and the second pressing device according to the first embodiment.

Fig. 3 is an explanatory diagram illustrating press forming in the first pressing step by the first pressing device of the first embodiment.

Fig. 4 is an explanatory diagram illustrating press forming in the second pressing step by the second pressing device of the first embodiment.

Fig. 5 is a schematic explanatory view of a laminate molding system according to a second embodiment.

Fig. 6 is a schematic explanatory view of a laminate molding system according to a third embodiment.

In the figure: 1. 2, 3-laminated forming system, 12, 22, 32-vacuum laminating device, 13, 23, 33-first pressing device, 14, 24, 34-second pressing device, 17-control device, 212, 312, 412, 2312, 2412-upper disc, 213, 314, 414, 2314, 2414-lower disc, 322, 323, 422, 423, 2322, 2323-pressurizing block, 315, 415, 3411, 3511-servo motor, 317, 417-servo amplifier, 320, 420-load sensor, 321, 421, 2318, 2418-linear scale, a 4-primary laminated forming product, a 5-secondary laminated forming product, a 6-laminated forming product.

Detailed Description

A vacuum laminating apparatus 12, a first press apparatus 13, and a second press apparatus 14 will be described with reference to fig. 1, in which a part of a cross section is shown, in a laminated molding system 1 according to a first embodiment of the present invention. The lamination forming system 1 is provided with two

press devices

13 and 14 of a first press device 13 and a second press device 14 in succession in a post-step of the vacuum lamination device 12. The lamination forming system 1 includes a carrier film feeding device 15 in a step preceding the vacuum lamination device 12, and a carrier film winding device 16 in a step subsequent to the second pressing device 14. The laminating molding system 1 further includes a control device 17. The controller 17 is connected to the vacuum laminating apparatus 12, the first pressing apparatus 13, the second pressing apparatus 14, the carrier film feeding apparatus 15, and the carrier film winding apparatus 16 to control the entire lamination molding system 1.

The carrier film feeding device 15 will be described first in order from the preceding step. The carrier film feeding device 15, which is a feeding device and a tension device for both the substrate a1 and the laminated film a2, includes a lower wind-up roller 511 and a driven roller 512. The lower carrier film F1 unwound from the unwinding roller 511 is changed in direction to be horizontal at the portion of the driven roller 512. A mounting table 513 on which the substrate a1 as a material to be molded and the laminated film a2 which are conveyed in a superposed manner from a previous step are mounted is provided in a portion where the lower carrier film F1 is horizontal. The carrier film feeding device 15 includes an upper wind-off roller 513 and a driven roller 515, and the carrier film F2 wound off from the wind-off roller 514 is overlapped on the laminated molded article A3 including the substrate a1 and the laminated film a2 at a portion of the driven roller 515. The substrate a1 and the laminate film a2 are conveyed while being sandwiched between the carrier films F1 and F2. Then, lamination molding is performed in the vacuum lamination device 12, the first pressing device 13, and the second pressing device 14 via the carrier films F1 and F2, whereby the laminated film a2 is prevented from being melted and adhering to the device portion. The use of the carrier films F1 and F2 also has an advantage that a certain cushioning effect is exerted when the primary laminated molded article a4 and the secondary laminated molded article a5 are pressurized, particularly in the first pressing device 13 and the second pressing device 14.

Next, the vacuum laminating apparatus 12 disposed in the post-step of the carrier film feeding apparatus 15 will be described. The vacuum laminating apparatus 12 is an apparatus for laminating and molding a primary laminated molded article a4 by pressurizing a laminated molded article A3 composed of a substrate a1 and a laminated film a2 with a pressurizing body such as a diaphragm 211 in a chamber C in a vacuum state. The vacuum lamination apparatus 12 is provided with a lower plate 213 which is movable up and down by a lift mechanism 214 with respect to an upper plate 212 which is fixedly provided, and can form a chamber C inside when the lower plate 213 including an outer frame is moved up and brought into contact with the upper plate 212. The lifting mechanism 214 is constituted by a hydraulic cylinder, but a motor or an air cylinder may be used as the lifting mechanism 214 of the vacuum laminating apparatus 12. When a motor is used in the elevating mechanism 214 of the vacuum laminating apparatus 12 without using a hydraulic mechanism, the entire laminated molding system 1 is motorized by using a driving source of the first pressing apparatus 13 and the second pressing apparatus 14, which will be described later, as a motor, and cleanliness is improved when the laminated molding system 1 is disposed in a clean room. The chamber C is connected to a vacuum pump, not shown, and can be evacuated by sucking the atmosphere in the internal space. Also, in the present invention, the vacuum state refers to a state that has been depressurized to a predetermined value.

A hot plate 215 heated by a heater, not shown, is attached to the lower surface of the center of the upper plate 212, and an elastic sheet 216 such as a heat-resistant rubber film, not shown, is attached to the surface of the hot plate 215. On the other hand, a hot plate 217 heated by a heater, not shown, is also attached to the upper surface of the center of the lower plate 213. A diaphragm 211 made of a heat-resistant rubber film as a pressurizing body is attached to a portion of the lower plate 213 around the hot plate 217 so as to cover the upper surface of the hot plate 217. Then, pressurized air is supplied to the back surface side of the diaphragm 211 by a compressor, not shown, so that the diaphragm 211 expands in the chamber C to press the substrate a1 and the laminate film a2 between the heat plate 217 and the diaphragm. The diaphragm 211 of the vacuum lamination apparatus 12 may be mounted on the upper disc 212 and may be configured to press the laminated molded article A3 including the substrate a1 and the laminated film a2 from the upper disc 212 side. The vacuum laminating apparatus 12 may be configured such that rubber is attached to the flat pressing surfaces of the upper and lower pressing blocks, and either one of the pressing blocks is advanced to the other pressing block to press the laminate molding a 3. In the case of a press device in which rubber plates are bonded to the flat pressing surfaces of the upper and lower pressing blocks, the pressing mechanism may be configured by using a servo motor or the like or by using a hydraulic cylinder. When the press machine is pressurized by the hydraulic cylinder, the control may be performed by performing only the position control, or by performing both the position control and the pressure control. In the case where a motor such as a servo motor is used in the press apparatus, control of both position control and pressure control, or control of only position control may be performed in addition to only pressure control. When the press machine is position-controlled by using a motor such as a servo motor, the position of the press machine can be controlled by using a position sensor provided in addition to a rotary encoder attached to the servo motor. The vacuum laminating apparatus may be a drum laminator which performs lamination molding between upper and lower rollers provided in a vacuum chamber.

Next, the first pressing device 13 disposed in the tandem direction in the post-process of the vacuum lamination device 12 will be described. The first press device 13 is a device which presses again the primary laminate molded article a4 formed of the laminate a1 and the laminate film a2 and having the concave-convex portion formed by pressure molding in the vacuum laminating device 12 and left in the concave-convex state on the laminate film a2 side, to press-mold the secondary laminate molded article a5 which is flatter. First press machine 13 includes a substantially rectangular bottom plate 311 provided below, and four tie rods 313 each provided upright between four corners of a substantially rectangular fixed plate, i.e., upper plate 312, positioned above bottom plate 311. The movable platen 314, which is substantially rectangular, of the first press machine 13 moves up and down between the bottom platen 311 and the upper platen 312. The first press machine 13 is configured to use a motor such as a servo motor 315 as a drive source, and the servo motor 315 as a pressing mechanism is attached to the base plate 311.

The servo motor 315 includes a rotary encoder 316, and is connected to a servo amplifier 317, and the servo amplifier 317 is connected to the control device 17. A ball screw 318 is connected to a drive shaft of the servo motor 315, or the drive shaft itself is a ball screw. On the other hand, a ball screw nut 319 of a ball screw mechanism is fixed to the lower surface of the lower plate 314, and the ball screw 318 is inserted through the ball screw nut 319. Further, a load sensor 320 is mounted between the lower plate 314 and the ball screw nut 319. The portion to which the load sensor 320 is attached is not limited as long as it receives the pressing force in the pressing step, and may be a portion to which the servo motor 315 is attached, for example.

According to the above configuration, the first press device 13 moves the lower plate 314 up and down with respect to the upper plate 312 by the operation of the servo motor 315. The ball screw mechanism of the first press machine 13 may be configured such that a belt is attached between a drive shaft attached to the servo motor 315 and a pulley of the ball screw 318, and a driving force is transmitted through the belt. The ball screw mechanism of the first press machine 13 may be configured such that a ball screw nut 319 and a ball screw 318 are rotatably mounted on the base plate 311 and are lifted and lowered. Further, by covering the ball screw 318 with a cover, the grease can be prevented from spreading, which contributes to improvement of cleanliness in the clean room. Further, the first press device 13 may be a device using a force multiplying mechanism such as a link mechanism, a crank mechanism, a wedge mechanism, or the like, or a similar structure. In the above example, the first press device 13 is press-molded by one servo motor 315, but a device that performs press-molding by using two or more servo motors 315 or two or more ball screw mechanisms is not excluded. Further, a linear motor that can be closed-loop controlled may be used in addition to the servo motor. The first press machine 13 may be a machine that moves the upper plate 312 up and down with respect to the lower plate 314 by using any of the above mechanisms.

A linear scale 321 as a position sensor is mounted between the side surface of the upper plate 312 and the side surface of the lower plate 314. The linear scale 321 has a scale 321a attached to one disk, and a slider 321b as a measuring unit attached to the other disk. The position (distance) of the lower disk 314 relative to the upper disk 312 can also be detected by a rotary encoder 316 of a servo motor 315. However, a slight gap exists between the ball screw 318 and the ball screw nut 319, and thermal expansion occurs between the tension rod 313 and the ball screw 318. Therefore, it is often desirable to directly measure the position (distance) of the lower plate 314 relative to the upper plate 312 by the linear scale 321. The resolution of the position sensor such as the linear scale 321 is preferably 0.002mm or less, and more preferably 0.001mm or less, which is a resolution of 0.0001mm, 0.000025mm, or more, which is a minimum resolution unit or more.

The number of the linear scales 321 attached to the first press device 13 may be only one, but a total of 2 linear scales or a total of 4 linear scales may be attached to each of both side surfaces of the upper tray 312 and the lower tray 314 with respect to the traveling direction of the carrier films F1 and F2. In addition, when 4 position sensors in total are attached to both side surfaces, the parallelism of the lower plate 314 with respect to the upper plate 312 can be detected. Alternatively, the position where the position sensor is provided may be a position where the pressurizing blocks 322 and 323 are connected and a position where the bottom plate 311 and the bottom plate 314 are connected. The first press device 13 is generally provided with a safety switch capable of detecting the position of a limit switch, a proximity switch, or the like, not shown, in order to prevent the position of the lower plate 314 from exceeding a descending limit point, an ascending limit point, or the like in mechanical design.

Pressing

blocks

322 and 323 are attached to the respective facing surfaces of the upper plate 312 and the lower plate 314 of the first press machine 13 via unshown heat insulating plates. The pressurizing blocks 322 and 323 are provided with temperature control means such as cartridge heaters. Since the pressing surfaces 327 of the

pressing pieces

322 and 323 have the same structure, the pressing surface 327 of one pressing piece 322 will be described. A cushion material 325 such as rubber, a resin film, and a fiber sheet is attached to the surface of the pressing block 323. The thickness of the cushioning material 325 is, for example, 0.05mm to 3.00 mm. Further, a metal plate 326 made of an elastically deformable material such as stainless steel having a plate thickness of 0.2mm to 3.00mm is attached to the surface of the cushioning material 325 as an example. The surface of the metal plate 326 opposite to the surface in contact with the cushioning material 325 is a pressing surface 327.

The member constituting the pressing surface of the first press device 13 may be a heat-resistant elastic sheet such as a fluororubber sheet. In this case, the hardness (shore a hardness) of the elastomer sheet is not limited thereto, and a hardness of 30 to 80, preferably 40 to 70, can be used as an example. The first press device 13 does not have a chamber that can be in a vacuum state, but may have a chamber that can be in a vacuum state and be configured to perform press molding in a vacuum chamber.

Next, a control block diagram relating to press forming by the first press apparatus 13 will be described with reference to fig. 2. The first press device 13 is a device having a position control element. The control device 17 includes a force command signal output unit 701 and a position command signal output unit 702. The force command signal output unit 701 and the position command signal output unit 702 are connected to a sequence control unit 703 as a higher-level control unit, and various molding conditions and the like are fed from the sequence control unit 703. The sequence control unit 703 is connected to the setting input display unit 704 and the storage unit 705.

The load sensor 320 of the first press machine 13 is connected to the adder 706 of the control device 17. Then, the command signal output from the force command signal output unit 701 and the signal output from the load sensor 320 are compared and added by the adder 706. The linear scale 321 is connected to an adder 707 of the control device 17. The command signal output from the position command signal output unit 702 and the signal output from the linear scale 321 are compared and added by an adder 707. Then, a signal output from at least one of the

adders

706 and 707 is transmitted to the servo amplifier 317 via the force position comparison switching unit 708 and the command signal generating unit 709. Further, a rotary encoder 316 of the servo motor 315 is connected to a servo amplifier 317. Then, the signal output from the command signal generation unit 709 is added to the signal output from the rotary encoder 316. The control block diagram of fig. 2 is a conceptual diagram, and actually, all functions and the like may be provided on the first press device 13 side, and the control block diagram is not limited to the configuration of fig. 2.

Next, the second press device 14 arranged in series in the subsequent step of the first press device 13 will be described. The second press device 14 is a device for press-molding the secondary laminated molded article a5 laminated and molded in the first press device 13 into a completely flat laminated molded article a6 by pressurizing again. The pressing mechanism and the like of the second press device 14 of the stack forming system 1 according to the first embodiment are substantially the same in configuration as the first press device 13.

The second press machine 14 includes a substantially rectangular bottom plate 411 provided below, and four tie rods 413 provided upright between four corners of a substantially rectangular top plate 412 as a fixed plate positioned above the bottom plate 411. The second press machine 14 can move the lower plate 414, which is a rectangular movable plate, up and down between the bottom plate 411 and the upper plate 412. The second press device 14 has a motor as a drive source, and a servo motor 415 of a pressing mechanism is attached to the base 411. In the first embodiment, the servo motor 415 of the second press device 14 can be of the same type as the servo motor 315 of the first press device 13 in terms of rated output or the like. However, the first press machine 13 may use a large-output servo motor 315, and the second press machine 14 may use a large-output servo motor 415.

The servo motor 415 includes a rotary encoder 416, and is connected to a servo amplifier 417, and the servo amplifier 417 is connected to the control device 17. A ball screw 418 is connected to a drive shaft of the servo motor 415, or the drive shaft itself is a ball screw. On the other hand, a ball screw nut 419 of a ball screw mechanism is fixed to the lower surface of the lower plate 414, and the ball screw 418 is inserted into the ball screw nut 419. Further, a load sensor 420 is mounted between the lower plate 414 and the ball screw nut 419. Therefore, the second pressing device 14 moves the lower plate 414 up and down by the operation of the servo motor 415. The pressing mechanism of the second press device 14 can be changed to various types as in the first press device 13. If the second press device 14 performs only control including the position control element, the load sensor 420 may not be mounted. Further, a linear scale 421 as a position sensor is attached between the side surface of the upper plate 412 and the side surface of the lower plate 414, similarly to the first pressing device 13. The linear scale 421 performs the same as the first punching means 13. However, when it is desired to detect only the plate thickness of the final laminated molded product a6 more accurately, a member having a higher resolution than the linear scale 321 of the first pressing device 13 may be used as the linear scale 421 of the second pressing device 14. When the linear scale 321 is used as the position sensor, an ultrasonic sensor or the like may be selected instead of the magnetic, optical, electrostatic, or other types.

Pressing

blocks

422 and 423 are attached to the respective opposed surfaces of the upper plate 412 and the lower plate 414 of the second press machine 14. The pressurizing blocks 422 and 423 are provided with temperature control means such as a cartridge heater. Since the pressing surfaces 427 of the pressurizing blocks 422 and 423 have the same structure, the pressing surface 427 of one pressurizing block 423 will be described. A cushion material 425 such as rubber, a resin film, and a fiber plate is attached to the surface of the pressing block 423. The thickness of the cushioning material 425 is, for example, 0.02mm to 2.00 mm.

The cushioning effect of the cushioning material 425 of the second punching device 14 is the same as, and preferably smaller than, the cushioning effect of the cushioning material 325 of the first punching device 13. Therefore, when the cushioning material 425 is made of the same material, it is preferable that the cushioning material 425 of the second press device 14 has the same thickness or is made thinner in many cases. When the thickness of the cushioning material 325 of the first press device 13 is the same as that of the cushioning material of the second press device 14, it is preferable that the cushioning material 425 of the second press device 14 is made of the same material or has high hardness. A metal plate 426 made of an elastically deformable material such as stainless steel having a plate thickness of 0.2mm to 3.00mm is attached to the surface of the cushioning material 325. The surface of the metal plate 426 opposite to the surface in contact with the cushioning material 425 is a pressing surface 427. The control block diagram of the second press device 14 is substantially the same as that of the first press device 13, and the above description is incorporated.

Next, the carrier film winding device 16 provided in the subsequent step of the second press device 14 will be described. The carrier film winding device 16 is a device that serves as both a carrier film feeding device and a carrier film tension device for the carrier films F1 and F2. The carrier film winding device 16 includes a lower unwinding roll 611 and a driven roll 612, and winds the carrier film F1 around the winding roll 611. The carrier film winding device 16 includes an upper winding roll 613 and a driven roll 614, and the upper carrier film F2 is peeled off from the laminated molded article a6 at the portion of the driven roll 614, and the upper carrier film F2 is wound around the upper winding roll 613. Further, a takeout table portion 615 for a laminated molded article a6 is provided at a portion where only the carrier film F1 is conveyed in a horizontal state. As a conveying device for the carrier films F1, F2, a transfer device (so-called pinch type conveying device) that grips both sides of the carrier films F1, F2 and stretches the carrier films to a subsequent step may be provided.

Next, a description will be given of a lamination molding method using the laminate a1 and the laminate film a2 of the lamination molding system 1 of the first embodiment. In the lamination forming system 1 for continuous forming, lamination forming can be performed simultaneously and in a batch manner by sequential control of the control device 17 in the diaphragm type vacuum lamination device 12, the first press device 13, and the second press device 14. Here, the description is made in terms of the order of forming the laminated molded product A3 of the substrate a1 and the laminated film a2, which are laminated pieces of one lot.

The laminated material a1 mounted on the mounting table section 513 of the carrier film feeding device 15 is a circuit board for a structure having an uneven section composed of a convex section of a copper foil section bonded to the surface of the substrate and a concave section without a copper foil section. The thickness (height relative to the substrate portion) of the copper foil is not limited thereto, but is about several μm to several tens μm, and is substantially 0.1mm or less. A laminate film a2 was stacked on each of the upper and lower sides of the circuit board a1 to form a structure-molding laminate molding A3. Further, although one of the laminated products A3 is shown in fig. 1, a plurality of laminated products A3 may be simultaneously placed on the placement table 513 and laminated.

The laminated molded article a3 placed on the placement stage 513 is moved together with the upper and lower carrier films F1 and F2 by the rotational driving of the winding

rollers

611 and 613, and is conveyed into the chamber C of the vacuum laminating apparatus 12 in the open state and positioned. Next, the vacuum lamination apparatus 12 closes the chamber C and reduces the pressure by a vacuum pump (not shown) to form the chamber C in a vacuum state (reduced pressure state). Then, pressurized air is sent to the back surface side of the diaphragm 211 to expand the diaphragm 211 into the chamber C, and the laminate molding A3 including the substrate a1 and the laminate film a2 is pressed between the diaphragm 211 and the elastic sheet 216 of the hot plate 215 attached to the upper plate 212 side. The pressurizing force (pressure per unit area applied to the laminate molded product A3) generated by the separator 211 at this time is, for example, 0.3MPa to 1.5MPa, and the substrate a1 and the laminate film a2 are connected so that the laminate film a2 is embedded in the concave portion of the substrate a1, thereby laminate-molding the primary laminate molded product a 4. However, the surface of the laminated film a2 of the primary laminated molded article a4 laminated and molded by the vacuum laminating apparatus 12 is still in a state where irregularities are left in conformity with the shape of the irregularities of the substrate a 1. In this case, the laminated film used has a high inorganic material content (for example, SiO) ₂ 35 to 75 wt% of the laminated film) is more likely to leave irregularities due to low fluidity of the molten resin.

When a primary laminate molded article a4, which is composed of a laminate a1 having an uneven portion and a laminate film a2, and is formed by laminating and bonding the two, is laminated and molded in the vacuum laminating apparatus 12, the chamber C is opened. The primary laminated molding a4 is conveyed to between the upper tray 312 and the lower tray 314 of the first press machine 13 in the subsequent step by the conveyance of the next carrier films F1 and F2 by the carrier film winding device 16, and is stopped at a predetermined pressing position.

Next, the servo motor 315 of the first press device 13 operates, and the lower plate 314 and the pressurizing block 323 ascend to start the first press process. In the first press step, press control including a position control element is performed. First, the lower tray 314 and the pressurizing block 323 are moved and controlled at a high speed by the servo motor 315 before the pressing surface 327 abuts on the lower carrier film F1 at a speed switching position P1 or before the upper carrier film F2 abuts on the pressing surface 327 on the upper tray 412 side at a speed just before. However, when the position is reached, the detection is performed by the rotary encoder 16, the linear scale 321, the limit switch, the proximity switch, or the like, the servo motor 315 is controlled to move at a low speed, and thus, when the primary laminated molded article a4 is sandwiched between the pressing surfaces 427, it is possible to reduce the occurrence of sudden overload. The state in which the primary laminated molded article a4 is sandwiched between the pressing surfaces 427, 427 can be grasped by detecting the torque of the servo motor 315 or estimated by reaching a predetermined position P2.

When the primary laminated molded product a4 is sandwiched between the pressing surfaces 427, the process proceeds to the first pressing process PR1 in the first pressing process. In the first pressurization step PR1, the value of the load sensor 320 is detected, and feedback control by force control is performed. The value of the force command signal output from the force command signal output unit 701 is compared with the value of the force signal detected by the load sensor 320 and added. Since the first pressurizing process PR1 is only force control, the force/position comparison switching unit 708 passes through without any change, and the command signal generation unit 709 sends the command value as a speed control command to the servo amplifier 317.

The servo amplifier 317 generates the number of revolutions and the current value of the servo motor 315 and transmits the generated values to the servo motor 315. As described above, the control of the servo motor 315 is performed by force control, but the force can be expressed in terms of a pressure per unit area (surface pressure) applied to the primary laminated molded article a 4. In the lamination method of the present embodiment, the surface pressure is preferably 0.3MPa to 1.5MPa, for example, and is particularly preferably lower than that of the vacuum lamination device 12 in many cases. In the first pressing step PR1, the lower plate 314 and the pressing block 323 further move up to a predetermined position P3 (the same distance as the pressing surfaces 327 and 327) and are detected by the linear scale 321, or, when a predetermined time has elapsed, the process proceeds to the second machining step PR2 in the first pressing step. Alternatively, the process proceeds to the second pressing step PR2 using at least one of the detection values of the linear scale 321 and the rotary encoder 316.

In the second pressurization step PR2, pressurization control is performed to optimize the position control element. The value of the linear scale 321 is detected and feedback control of position control (or velocity control) is performed on the target position P4. The value of the command signal is output from the position command signal output unit 702, compared with the value of the position signal detected by the linear scale 321, and added. The value of the load sensor 320 is also always detected and is sent to the force position comparison switching unit 708 by the adder 706. A two-level threshold value is provided as an example of the detection value of the load sensor 320, and when the detection value of the load sensor 320 exceeds the first threshold value, subtraction is performed on the command value for position control. When the detected value of the load sensor 320 exceeds the last threshold value, the output of the position signal command value is stopped temporarily or before the second pressing process PR2 is completed, or the command value of the position control command signal is set to the command value subtracted from the previous command value.

In the second pressurizing step PR2, a speed control command value is also sent to the servo amplifier 317, and the current value is mainly controlled. Speed control using rotary encoder 316 is performed between servo amplifier 417 and servo motor 415. Thus, in the second pressing step, the position of the lower plate 314 can be accurately controlled based on the value detected by the linear scale 321. When the position of the lower plate 314 becomes the target position P4, the servo motor 415 is controlled to maintain the current position (including servo lock and servo off), and the secondary laminated molded article a5 having the correct plate thickness T1 is press-molded. However, when a large positional deviation occurs during the position control and a pressure abnormality occurs in the pressurized primary laminated molded article a4, the command value for the position is changed to the retreating side based on the force detection and the pressurization is stopped, so that it is possible to prevent the occurrence of defective products such as a decrease in thickness due to overpressure and a lateral outflow of molten resin. In the second pressing step PR2, even when the position cannot be finally reached with respect to the target position (commanded position) (pressing is impossible), the second pressing step PR2 may be performed within an allowable plate thickness range.

In the second pressing step PR2, if the control is performed using the position control element, the control may be performed so as to give priority to the force. For example, in the force control in which the value of the load sensor 320 is detected in the same manner as in the first press step, feedback control of position control may be added at a constant rate. Or the velocity control elements may be added as feed-forward control signals. The command value of the force signal output from the force command signal output unit 701 may be changed in accordance with the position detected by the linear scale 321.

The pressing steps in the first pressing step are not limited to the above, and may be a plurality of pressing steps. In addition, press molding using a position control element in each step is also a method in which a part or all of the speed control elements are used as the position control element in a broad sense. The position control element including the speed control may be an element for controlling the servo motor 315 by controlling any one of a current value, a voltage value, and a torque value. As a device corresponding to claim 2 of the present invention, the first press device 13 using the servo motor 315 as a drive source may be a device that performs only force control in all pressing steps. Even in such a case, the force control by the first press apparatus 13 using the servo motor 315 can perform the pressure control of the primary laminated molded product with high accuracy, as compared with the pressure control by the press apparatus using the hydraulic cylinder controlled by the conventional general pressure control valve, and the thickness unevenness is reduced.

The temperature of the pressurizing blocks 322 and 323 of the first pressing device 13 at this time is not limited to the above temperature because the material of the substrate a1 and the laminate film a2 is different, and is preferably controlled to 80 to 200 ℃, and more preferably 90 to 150 ℃.

When the predetermined time has elapsed and the second pressing process PR2 of the first press device 13 is completed, the secondary laminated molded article a5 is laminated and molded, the lower plate 314 is lowered. Since the surface of the secondary laminated molded article a5 formed at this time is press-molded by the press blocks 322 and 323 having the metal plate 326 having elasticity via the cushion material 325 on the press surface 327 of the first press device 13, the unevenness remaining on the surface of the primary laminated molded article a4 can be processed more smoothly. Then, the secondary laminated molded article a5 is conveyed to between the upper tray 412 and the lower tray 414 of the second press device 14 in the subsequent step of the first press device 13 by the conveyance of the carrier films F1 and F2 by the next take-up drum 511 and the driven drum 512 by the carrier film take-up device 16, and the conveyance of the carrier films F1 and F2 by the take-up drum 414 and the driven drum 515, and the winding of the carrier films F1 and F2 by the take-up

drums

611 and 613, and is stopped at a predetermined pressing position.

Next, the servo motor 415 of the second press apparatus 14 operates, and the lower plate 414 and the pressurizing block 423 are raised at a high speed, switched to a low speed at the speed switching position P11, and then the secondary laminated molded article a5 is sandwiched between the pressurizing surfaces 427 and 427 at the contact point P12, in the same manner as the control of the first press apparatus 13. The second press device 14 can also perform press forming including the position control element. In the first machining process PR11 of the second press machine 14, control similar to the second machining process PR2 of the first press machine 13 can be performed. That is, although the position control for detecting the position of the linear scale 421 or the like and operating the servo motor 415 can be performed, the position command control signal (current value or the like) is limited when the value of the load sensor 320 is detected and exceeds a threshold value. When it is detected that the lower plate 414 or the press block 423 reaches the predetermined switching position P13 or that a predetermined time has elapsed, the first pressing step PR11 is terminated, and the process proceeds to the second pressing step PR 12.

In the second pressing step PR12 of the second pressing step, only the position control (or speed control) for detecting the position of the linear scale 421 or the like and operating the servo motor 415 is performed. However, since the difference between the plate thickness of the secondary laminated molded article a5 press-molded by the second press device 14 and the plate thickness of the laminated molded article a6 as the final product is extremely small, there is no case where the positional deviation is excessively large even if only the positional control is performed, and a command signal such as the servo motor 315 is driven with an unexpectedly large force is transmitted. Further, since the distance from the switching position P13 from the first pressing step PR11 to the second pressing step PR12 to the final pressing end target position P14 becomes extremely small, there is hardly any case where the positional deviation is excessively large even if only the position control is performed, and a command signal such as driving the servo motor 315 with an unexpectedly large force is transmitted. Therefore, the laminated molded article a6 as a final product can realize extremely precise thickness accuracy, and can prevent the molten resin from flowing out to the side of the laminated molded article a 6. However, the second press process PR12 may be limited by a torque limit of the servo motor 415. Then, when the position of the lower plate 314 reaches the final pressing end target position P14, the servo motor 415 is controlled to maintain the current position (including servo lock and servo off), and the laminated molded article a6 having the correct plate thickness T2 is press-molded. When the first press device reaches the final pressing end target position and the pressing is ended, the position information of the lower disc detected by the position sensor such as the linear scale 421 is stored in the storage unit of the control device 17. In the above embodiment, the position sensor is attached between the upper plate and the lower plate, and therefore the distance between the upper plate and the lower plate can be measured and stored, but in the case where a position sensor such as a linear scale is attached between the upper pressurizing block and the lower pressurizing block, the distance between the pressurizing blocks is measured and stored. Further, the distance between the fixing member such as the base side and the lower plate which is lifted and lowered can be detected by the position sensor. The distance between the upper tray and the lower tray, the distance between the upper pressurizing block and the lower pressurizing block, and the distance between the fixing member such as the base side and the lower tray correspond to the plate thickness of the secondary laminated product a 5.

The temperature of the press blocks 422 and 423 of the second press device 14 at the time of the secondary press molding is not limited to this, since it differs depending on the material of the substrate a1 and the laminate film a2, and is preferably controlled to 80 to 200 ℃, more preferably 90 to 150 ℃. It may be preferable that the temperature of the pressurizing blocks 322 and 323 of the first pressing device 13 be the same or the temperature of the pressurizing blocks 422 and 423 of the second pressing device 14 be low.

When a predetermined time has elapsed after the second press device 14 reaches the final pressing end target position P14, the lower plate 314 descends. The sheet thickness T2 of the laminated molded article a6 molded at this time was accurately set to a thickness by the second press molding by position control. Further, only when the secondary laminate molded product a5 has irregularities on the surface thereof, it can be processed more smoothly. Then, the carrier film winding device 16 conveys the next carrier films F1 and F2, and the final laminated molded article a6 is conveyed to the take-out table 615 of the subsequent step of the second press device 14 and conveyed to the next step by a device not shown.

The first pressing step and the second pressing step by the second pressing device 14 may include at least a position control element, such as the second pressing step PR2 of the first pressing device 13, and may be a step of performing only position control (or speed control) from the beginning or a step of detecting a force and using the detected force for control. In addition, the position control of the second press device 14 may be performed by determining a final press end target position of the second press device based on a distance between an upper plate and a lower plate of the press device at the time of press end by the first press device, a distance between press blocks, or the like (plate thickness of the intermediate laminated product a 5). By controlling the position of the second press device based on the plate thickness of the intermediate laminated product a5 in this manner, it is possible to directly determine which thickness the plate thickness of the laminated product a6 as the final product is thinner from the plate thickness of the secondary laminated product a5 whose press forming is finished by the first press device, and it is possible to prevent insufficient pressing and excessive pressing by the second press device.

The laminated molding system 1 according to the first embodiment is superior to a laminated molding system provided in a post-step of a vacuum laminating apparatus and including a single press apparatus having force control (or pressure control) and position control elements in the following respects. That is, the press forming of the position control element is performed by the first press device 13 and the second press device 14 which are connected to each other, and thereby the desired plate thickness can be processed in two stages. Therefore, compared with a laminated molding system in which the laminated molding is molded to a desired plate thickness by one press, the press molding can be performed without performing any wasteful processing, and therefore, the outflow of the molten resin to the side of the laminated molded article can be prevented. In addition, although the time required for the press forming by the press device in the lamination forming of the substrates is often longer than the time required for the lamination forming by the vacuum lamination device 1, the time required for the press forming by the press device can be divided into the

respective press devices

13 and 14 by connecting two press devices. Therefore, the cycle time for the batch-to-batch lamination molding can be shortened.

The second press device 14 corresponds to claim 2 of the present invention, and may perform only force control of the servo motor 415 in all pressing steps. Even in this case, the force control by the second press device 14 using the servo motor 415 can perform the pressure control with high accuracy with respect to the secondary laminated molded article a5, and the thickness unevenness is reduced, compared to the pressure control by the conventional press device using a hydraulic cylinder controlled by a general pressure control valve.

Next, the laminate molding system 2 according to the second embodiment will be described mainly focusing on a different point with reference to fig. 5. The laminated molding system 2 according to the second embodiment is common to a press device provided in a step subsequent to the vacuum laminating device 22 and having at least two steps with a position control element, a method of conveying a laminated molded article, and the like. The bottom plate 2311, the upper plate 2312, the tension rod 2313, and the lower plate 2314 of the first pressing device 23 and the second pressing device 24 are also common to the structure of the pressure blocks 2322 and 2323. The first and second

pressing devices

13 and 14 of the first embodiment and the first and second pressing devices 23 and 24 of the second embodiment are different in a pressing mechanism.

In the first press device 23, a pressure cylinder 2315 operated by hydraulic pressure is provided as a pressure mechanism in the base plate 2311, and a slider 2316 of the pressure cylinder 2315 is fixed to the back surface of the lower plate 2314. The pressure cylinder 2315 is connected to a hydraulic device 2317 including a valve capable of closed-loop control, such as a servo valve, not shown. In addition, the pressurizing cylinder 2315 may detect the pressure of the hydraulic oil by a pressure sensor. The hydraulic device 2317 including the pressure sensor is connected to the control device 17. Further, a linear scale 2318 similar to that of fig. 1 is attached between the upper plate 2312 and the lower plate 2314 of the first punching device 23. The linear scale 2318 is connected to the control device 17, and can detect the distance between the upper disc 2312 and the lower disc 2314.

Further, the second press device 24 has the same configuration as the first press device 23, and a pressure cylinder 2415 operated by hydraulic pressure is provided as a pressure mechanism in the base plate 2411, and a slider 2416 of the pressure cylinder 2415 is fixed to the back surface of the lower plate 2414. The pressure cylinder 2415 is connected to a hydraulic device 2417 including a valve that can be closed-loop controlled, such as a servo valve not shown. In addition, the pressurizing cylinder 2415 may detect the operating pressure by a pressure sensor. The hydraulic device 2417 including the pressure sensor is connected to the control device 17. Further, a linear scale 2418 similar to that of the first pressing device 23 is attached between the upper plate 2412 and the lower plate 2414 of the second pressing device 24. The linear scale 2418 is connected to the controller 17, and can detect the distance between the upper plate 2412 and the lower plate 2414.

Similarly to the laminate molding system 1 of the first embodiment, the primary laminate molded article a4 laminated and molded in the vacuum laminating device 22 is conveyed to the first press device 23 to be laminated and molded into the secondary laminate molded article a5, and is conveyed to the second press device 24 to be laminated and molded into the laminate molded article a 6. The stack forming method in the first press device 23 and the second press device 24 in the stack forming system 2 according to the second embodiment is the same as that in the stack forming system 1 according to the first embodiment in most parts, and therefore, the description of the first embodiment is referred to. If the description is made regarding the difference, the first embodiment differs in that the force control is performed on the servo motor 315 by detecting the value of the load sensor 320 or the like, and the pressure control of the pressurizing cylinder 2415 is performed by detecting the value of the pressure sensor in the second embodiment. That is, when a servo valve is used, closed-loop control of pressure using a value of a pressure sensor or closed-loop control using a position (or velocity) of the linear scale 2418 can be performed by the servo valve.

In the present invention, as a method for mixing the laminated molding system 1 according to the first embodiment and the laminated molding system 2 according to the second embodiment, a press device having a position control element may be used as the first press device using a pressure cylinder such as a hydraulic pressure, and a press device having a position control element may be used as the second press device using a motor such as a servo motor. In contrast, the first press device may be a press device using a motor such as a servo motor, and the second press device may be a press device using a cylinder for pressurizing a fluid such as hydraulic pressure.

Next, a description will be given mainly of a different point with reference to fig. 6 with respect to the laminate molding system 3 of the third embodiment. The third embodiment is an embodiment including a press apparatus of the last step, and a press apparatus that performs press control including at least a position control element in each of the press apparatuses that are continuous with the press apparatus of the last step and that are continuous with the press apparatus of the last step. Specifically, the first press apparatus 33 disposed in a subsequent step immediately after the vacuum laminating apparatus 32 includes a press apparatus that performs only pressure control using a pressure cylinder 3311 of hydraulic pressure or the like. The first press device 33 may be configured to attach rubber to a flat pressing surface of the processing block. The second press device 34 and the third press device 35 are provided with press devices having position control elements using motors such as the

servo motors

3411 and 3511. Therefore, in the "continuous pressing step in the post-step of the vacuum lamination apparatus" of the present invention, each pressing step by the pressing apparatus may be continuous as the pressing step in the nth step and the pressing step in the (N + 1) th step. Therefore, the press device in the step subsequent to the vacuum lamination device 32 may not perform the pressing control including at least the position control element. The "continuous pressing step" may include a step other than the pressing step between the pressing step and the pressing step.

The pressing surface of the third pressing device 35 includes the same cushioning material and elastic metal plate as those of the first pressing device 33 and the second pressing device 34. The third press device 35 may make the thickness of the cushioning material thinner than the cushioning material of the second press device 34, make the hardness of the cushioning material higher than the second press device 34, and reduce the cushioning effect as compared with the second press device 34. The third press device 35 may be attached to a metal pressing plate or the metal plate without providing a cushioning material, and the metal thin plate may be a pressing surface. The third pressing device 35 may perform cooling pressing for cooling the stacked molded product in particular, and the temperature of the pressing platen of the third pressing device 35 may be controlled to be lower than the temperature of the pressing platen of the second pressing device 34.

Further, even in the case where the third pressing device 35 is a cooling press, and only a slight pressing surface is required to be in contact with the laminated molded article a6, the position control element may not be required in the third pressing device 35. At this time, control is performed using at least the position control element for the first pressing step by the first pressing device 33 immediately after the vacuum laminating device 32 and the second pressing step by the second pressing device 34 arranged continuously with the first pressing device 33.

The present invention is not limited to the first and second embodiments described above, and a modification made by a person skilled in the art based on the gist of the present invention and a combination of the contents described in the first to third embodiments may be applied. The laminated molded article laminated and molded in the laminated molding systems 1, 2, and 3 may be a semiconductor wafer or other plate-like body except for the circuit board, but is not limited thereto. The surface of the laminate such as the laminate film may be one surface or both surfaces of the substrate or the wafer. But also LED substrates and the like. According to the present invention, even when the height of the chip (convex portion) of the substrate is 0.1mm or more and the thickness of the laminated resin film is 0.15mm or more, good lamination molding can be performed in many cases.

Claims

1. A stack forming system including a vacuum stacking device and a pressing device, the stack forming system comprising:

a vacuum laminating apparatus for performing lamination molding in a vacuum chamber; and

at least two continuous pressing devices which are arranged in the post-process of the vacuum laminating device and are provided with position control elements.

2. A stack forming system including a vacuum stacking device and a pressing device, the stack forming system comprising:

and at least two continuous pressing devices which are arranged in the post-process of the vacuum laminating device and take the servo motor as a driving source.

3. A stack forming method using a vacuum stacking apparatus and a press apparatus, the stack forming method being characterized in that,

the laminated molded article is further subjected to pressure control including at least a position control element in a continuous pressing step subsequent to the vacuum laminating apparatus, and the laminated molded article is laminated and molded by the vacuum laminating apparatus which performs lamination molding in a vacuum chamber.

4. A stack forming method using a vacuum stack device and a press device, the stack forming method being characterized in that,

comprises a vacuum laminating device for laminating and forming in a vacuum chamber and at least two continuous punching devices which are arranged in the post-step of the vacuum laminating device and take a servo motor as a driving source,

the press devices each perform press control including at least a position control element.

5. The laminate forming method as claimed in claim 4,

the vacuum laminating apparatus is provided with a first press device and a second press device using a servo motor as a driving source in a subsequent step,

when the pressing by the first pressing device is completed, the plate thickness of the intermediate laminated product is detected by the first pressing device, and the pressing completion target position of the second pressing device is determined based on the plate thickness.