JP7245768B2 - LAMINATE SYSTEM AND METHOD OF CONTROLLING THE LAMINATE SYSTEM - Google Patents

Description

The present invention provides a vacuum lamination apparatus for forming an intermediate laminated material by pressurizing a laminated material with a pressurizing body in a decompressed chamber, and a flat plate disposed in a post-process of the vacuum laminating apparatus for pressurizing the intermediate laminated material. The present invention relates to a lamination system provided with a curing press device and a control method for the lamination system.

A vacuum lamination device for forming an intermediate laminated material by pressurizing a laminated molding material with a pressurizing body in a decompressed chamber, and a flattening press device disposed in a post-process of the vacuum lamination device for pressurizing the intermediate laminated material. The lamination system and control method of the lamination system provided are used for lamination molding such as build-up boards, and in recent years there is a demand for even higher thickness accuracy, including the thickness error of each part of laminated molded products. there is As prior arts of this technology, those described in Patent Documents 1 to 3 are known.

Among them, the flattening press of the lamination system described in Patent Document 1 and Patent Document 2 performs pressurization by a single pressurizing mechanism. Although Patent Document 1 uses a single hydraulic cylinder for the flattening press, it describes that an electric mold clamping device may be used. Patent document 1 describes that the control of the clamping means of the flattening press is such that speed control is performed until the initial pressurizing position is reached, and that pressure control is switched to from the position where pressurization is started. ing.

Further, in Patent Document 2, the flattening press is equipped with a lifting mechanism using a single servomotor and a ball screw, but it is described that the lifting mechanism using a hydraulic cylinder, an air cylinder, or the like may be used. . Patent Document 2 describes that the control of the lifting mechanism of the flattening press is performed by moving the lower plate to a position with a predetermined distance by the approach speed control means.

Furthermore, Patent Document 3 describes that a flattening press is provided with a single booster cylinder as a first pressurizing mechanism and four sub-cylinders as a second pressurizing mechanism. Further, Patent Document 3 also describes that an electric mechanism may be used as the pressurizing mechanism in the same manner as Patent Document 1. In the control of the flattening press of Patent Document 3, four sub-cylinders are provided with servo valves, and the positions of the four corners of the movable platen or the pressures of the four sub-cylinders are detected to control the servo valves separately. It is stated that

Furthermore, Patent Document 3 describes that a hydraulic cylinder or the like is provided in the central portion of the flattening press as a first pressurizing mechanism, and a hydraulic cylinder or the like whose top portion is not connected and fixed is provided around the central cylinder. ing.

JP-A-2009-6499 (claim 1), (0030), (0031), (Fig. 1), (Fig. 2) WO2016-199687 (Claim 1), (0025), (0039), (0049), (0050), (Fig. 1), (Fig. 2) JP-A-2005-66967 (Claim 1, (0017), (0018), (0022), (Fig. 1), (Fig. 2)) Japanese Patent Application Laid-Open No. 2004-122553 (Claim 1, (0018), (0066), (Fig. 1), (Fig. 2))

However, since the flattening presses of Patent Documents 1 and 2 use a single pressurizing mechanism, it is difficult to maintain the parallelism of the movable platen with respect to the fixed platen. However, there is a problem that it is not possible to suppress On the other hand, Patent Document 3 uses five cylinders below the movable platen to perform parallel control. Since the pressure is applied to a total of five points at the center and the vicinity of the center, the correction force is weak when there is a plate thickness error in the laminated molded product. Furthermore, in Patent Document 4, as in Patent Document 3, a hydraulic cylinder or the like is provided in the inner part of the tie bar, and presses the center side of the movable platen. It was weak.

Further, the flattening presses used in the lamination systems of Patent Documents 1 to 3 all require a movable platen that moves up and down with respect to the upper fixed platen and a pressure receiving plate that is connected to a tie bar and receives pressure. rice field. Therefore, there is a problem that the structure of the flattening press becomes large-scale. In Patent Document 4, in addition to the movable platen that moves up and down with respect to the upper fixed platen, it is necessary to install a hydraulic cylinder on the base on the floor side, and the member on the floor side needs to have the same strength as the pressure plate. It was intended to be.

Furthermore, Patent Document 2 describes that the movable platen is moved to a position where the position of the movable platen with respect to the stationary platen is at a predetermined gap by means of an approach speed control means, and is then stopped. No description was given, and it was not applicable to the molding of various laminate molded products.

Therefore, the present invention provides a laminate molding system capable of suppressing plate thickness errors in each part of a laminate molded product and forming a laminate molded product with high accuracy in plate thickness accuracy using a flattening press device having a relatively simple structure. With the goal.

A lamination system according to claim 1 of the present invention comprises a vacuum lamination device for pressurizing a lamination molding material with a pressurizing body in a decompressed chamber to form an intermediate lamination material, and a post-process of the vacuum lamination device. In a laminating system comprising a flattening press device that presses the intermediate laminated material, the flattening press device is provided with a pressurizing mechanism in each tie bar portion, and the position of the pressurizing mechanism can be individually controlled. characterized by

According to claim 2 of the present invention, there is provided a lamination system according to claim 1, wherein the flattening press consists of two plates, an upper plate and a lower plate, and is controlled by a servo valve at the tie bars of the upper plate or the lower plate. A pressurizing mechanism using a hydraulic cylinder is provided.

A laminating system according to claim 3 of the present invention is the lamination system according to claim 1, wherein the flattening press consists of two plates, an upper plate and a lower plate, and a servo motor is used for the tie bars of the upper plate or the lower plate. and a pressurizing mechanism.

A control method for a lamination system according to claim 4 of the present invention comprises a vacuum lamination apparatus for forming an intermediate lamination material by pressurizing a lamination molding material with a pressurizing body in a decompressed chamber, and a post-process of the vacuum lamination apparatus. In the lamination system provided with a flattening press device that presses the intermediate laminated material, the flattening press device is provided with a pressurizing mechanism in each tie bar portion, and the pressurizing mechanism is individually position-controlled characterized by

According to claim 5 of the present invention, there is provided a method for controlling a stacking system according to claim 4, characterized in that the flattening less device has a function of being position-controlled in a plurality of steps until reaching the target position. .

According to claim 6 of the present invention, there is provided a control method for a lamination system according to claim 4 or 5, characterized in that the flattening press device has a correction control function corresponding to thermal expansion.

The lamination system of the present invention includes a vacuum lamination apparatus for forming an intermediate laminate material by pressurizing a laminate molding material with a pressurizing body in a decompressed chamber, and a post-process of the vacuum lamination apparatus for forming the intermediate laminate material. In a lamination system provided with a flattening press device for applying pressure, the flattening press device has a pressurizing mechanism in each of the tie bar portions, and the pressurizing mechanism can be individually position-controlled, so that the structure is relatively simple. By using the flattening press device, it is possible to suppress the plate thickness error of each part of the laminated molded product and mold the laminated molded product with high accuracy of plate thickness accuracy.

It is a schematic diagram of the lamination system of this embodiment. FIG. 4 is a plan view of the flattening press of the lamination system of the present embodiment; FIG. 4 is a control block diagram showing the hardware configuration of the flattening press of the lamination system of the present embodiment; 3 is a control block diagram showing functions of a flattening press of the lamination system of the present embodiment; FIG. It is a figure which shows pressure control of the flattening press of the lamination system of this embodiment. FIG. 5 is a diagram showing correction control of the target position of the movable platen corresponding to thermal expansion of the flattening press of the lamination system of the present embodiment; FIG. 10 is a diagram showing plate thickness error correction control when there is a plate thickness error in the intermediate laminated material of the flattening press of the laminating system of another embodiment.

A lamination system 11 according to an embodiment of the present invention will be described with reference to FIG. The lamination system 11 uses carrier films F1 and F2 to convey the laminated molded material A1, the intermediate laminated material A2, and the laminated molded product A3. The lamination system 11 includes a laminated molded product placing section 12 and a diaphragm pressure type vacuum lamination device 13 (hereinafter simply referred to as the vacuum lamination device 13) in order from the pre-process on the right side in FIG. 1 to the post-process on the left side in FIG. abbreviated), a flattening press device 14, and a laminated molded article unloading section 15 are provided. Further, the lamination system 11 is provided with a touch panel type setting device 16 also serving as a display function, and a control device 17 for controlling the lamination system 11 such as the vacuum lamination device 13 and the flattening press device 14 .

The laminated product placement section 12 includes a film feeding section of a film conveying device 18, and the lower carrier film F1 is horizontally unwound from an unwinding roll 18a via a driven roll. It serves as a mounting stage for mounting the laminated molding material A1 sent from a previous process by a loading device (not shown) on the portion of the lower carrier film F1 in a horizontal state. The upper carrier film F2 is also unwound from the unwinding roll 18b and superimposed on the laminate A1 via a driven roll.

The vacuum lamination device 13, which is disposed in the post-process of the laminated molded article placing section 12, pressurizes the laminated molded material A1 with a pressurizing body such as a diaphragm 19 in a decompression chamber to form an intermediate laminated material A2. The vacuum laminating apparatus 13 has a lower board 21 that can move up and down with respect to a fixed upper board 20. When the lower board 21 is raised, a chamber C (open in FIG. 1) can be formed inside. It's becoming Chamber C is connected to a vacuum pump (not shown). A hot plate 22 is attached to the lower surface of the upper board 20, and an elastic body such as a heat-resistant rubber film (not shown) is attached to the surface of the hot plate 22. As shown in FIG. On the other hand, a hot plate 23 is also attached to the upper surface of the lower board 21 . A diaphragm 19 made of a heat-resistant rubber film, which is a pressurizing member, is attached to the lower plate 21 around the hot plate 23 so as to cover the upper surface of the hot plate 23 . Then, a compressor (not shown) sends pressurized air to the back side of the diaphragm 19 to bulge the diaphragm 19 and pressurize the laminate material A1 between itself and the hot plate 22 . The diaphragm of the vacuum lamination device may be attached to the upper plate. The pressurizing body of the vacuum lamination apparatus is not the above-mentioned diaphragm, but a pressurizing plate having an elastic body such as a rubber film attached in a decompressible chamber of the press device to pressurize the laminate A1. The laminate material A1 may be pressed between the attached roll bodies or between the roll body and a pressure plate.

As shown in FIGS. 1 to 3, a flattening press device 14 disposed in the post-process of the vacuum lamination device 13 presses the intermediate laminated material A2 to form a flatter laminated product A3. It is something to do. The cross section of the flattening press 14 in FIG. 1 is taken along line BB in FIG. The flattening press device 14 does not have a pressure receiving plate and consists of two plates, an upper plate 24 and a lower plate 25 . Legs 26 are provided at the four corners of an upper board 24, which is a fixed board, and the legs 26 are placed on the floor surface. Tie bars 27 are inserted near the four corners of the upper plate 24, and hydraulic cylinders 28, which are pressure mechanisms, are attached to the upper portions of the tie bars 27, respectively. In this embodiment, the tie bar portion refers to a state in which the axis of the tie bar 27 and the central axis of the hydraulic cylinder 28 are aligned. The hydraulic cylinder 28 is of a double-acting type having a pressure-side oil chamber 28b and an opening-side oil chamber 28c with a piston 28a interposed therebetween. A tie bar 27 is fixed to the piston 28 a of the hydraulic cylinder 28 . The hydraulic cylinder 28 is controlled by a servo valve 29, and a pressure sensor 30 used for pressurization control is attached to a pipe line connected to the pressurization side oil chamber 28b. A pressure sensor 31 used for pressurization control is also attached to a pipe line connected to the opening-side oil chamber 28c of the hydraulic cylinder 28. As shown in FIG. The servo valve 29 is also provided with a pump 33 that is rotated by a motor such as a servo motor 32 whose rotational speed is controllable, and the pump 33 is connected to a tank 34 . A servo amplifier 35 is connected to the servo motor 32 . It should be noted that these hydraulic circuits 50 are described only for the parts necessary for explaining the present invention, and are actually constructed including other valves and the like.

A detecting portion 37 a of a position sensor 37 such as a magnetostrictive linear sensor is connected by a connection rod 38 to a rod 36 fixed to the upper surface of the piston 28 a of the hydraulic cylinder 28 . A scale 37b of the position sensor 37 is attached to the upper surface of the upper board 24. As shown in FIG. The position sensor 37 is desirably mounted with heat insulating material in consideration of temperature rise. The position sensor 37 can detect the position of the piston 28a of the hydraulic cylinder 28 (including the positions of the lower board 25 and the lower pressure plate 40, which are movable boards, which will be described later). As shown in the plan view of FIG. 2, four hydraulic cylinders 28 are provided in the flattening press device 14 corresponding to the positions of the tie bars 27 . The hydraulic cylinders 28 may be incorporated in the board, or may be provided at tie bars of the bottom board. Further, the lower platen 25, which is a movable platen, may be moved up and down by another mold opening/closing mechanism, and only the pressurizing function may be performed by a hydraulic cylinder including a single-acting cylinder. Furthermore, the position sensors may be provided at four locations on the side surfaces of the upper board 24 and the lower board 25 in order to directly measure the distance between the upper board 24 and the lower board 25. In order to directly measure the distance of the pressure plate 40, four points may be provided on the sides of the upper pressure plate 39 and the lower pressure plate 40, respectively. Further, the type of position sensor is not limited to the scale type as described above, and the position (distance) between each point of the upper plate 24 and the lower plate 25 or the upper pressure plate 39 and the lower pressure plate 40 can be accurately measured. If there is, for example, an ultrasonic sensor, a laser distance sensor, or the like may be used.

An upper pressure plate 39 having a flat pressure surface 39a is attached to the lower surface of the upper plate 24 . The pressure surface 39a of the upper pressure plate 39 and the like is disclosed in FIG. 2 of Patent Document 1 and will not be described again. A cushioning material having a relatively high elastic force is arranged on one side, and a thin metal plate (mirror plate) with a smooth surface such as stainless steel is arranged on one side of the cushioning material. Therefore, the pressure surface 39a of the upper pressure plate 39, which contacts the intermediate laminated material A2, is a flat surface (mirror surface) of the thin metal plate. The upper pressure plate 39 is provided with a heater or a heat medium flow path (not shown), and the temperature can be controlled by energizing the heater or allowing the medium to flow through the medium flow path. A temperature sensor (not shown) is also attached to the upper pressure plate 39 . A heat insulating plate is provided between the upper plate 24 and the upper pressure plate 39 or inside the upper plate 24 or the upper pressure plate 39 to suppress the thermal expansion of the upper plate 24 due to the heat of the upper pressure plate 39, and The influence of heat on the cylinder 28 and the position sensor 37 can be suppressed. It should be noted that the upper plate 24 may also be provided with a medium flow path for circulating cooling water or the like to control the temperature of the plate. The upper plate 24 preferably has a thick plate thickness in order to suppress bending of the plate when pressurized. As an example, the plate shown in FIG. The ratio of the thickness T is preferably 10% or more, more preferably 20% or more and 40% or less.

The lower part of the tie bar 27 inserted into the upper board 24 is inserted near the four corners of the lower board 25, which is a movable board, and is formed with screws. They are fixed by bolts 41a and 41b from the upper surface side and the lower surface side of the lower board 25, respectively. It is desirable that the thickness of the lower board 25 is thick as well as the upper board 24 in order to prevent bending when pressurized. A lower pressure plate 40 is attached to the upper surface of the lower board 25 in the same manner as the upper board 24 . The structure of the lower pressure plate 40 is basically the same as that of the upper pressure plate 39, and the pressure surface 40a that presses the intermediate laminated material A2 is a planar thin metal plate (mirror plate) with a cushioning material interposed therebetween. 40 temperature control is also possible. The form of the pressure surfaces of the upper and lower pressure plates 39 and 40 is not limited, and may be one without a cushioning material or thin metal plate.

With the above structure, the flattening press device 14 is provided with a lower pressure plate 40 attached to the lower plate 25 which can move up and down with respect to an upper pressure plate 39 attached to the upper plate 24 which is fixedly provided. Between the pressure plate 39 and the lower pressure plate 40, the intermediate laminated material A2 can be pressed. It should be noted that the lower board, which is a fixed board, may be provided with legs so that the upper board can move up and down with respect to the lower board. In the flattening press apparatus 14 in this embodiment, the molding area is not covered with a chamber and is not depressurized, but press molding may be performed with the molding area in a decompressed state. Furthermore, the flattening press device 14 in the lamination system 11 is not limited to one unit, and a plurality of flattening press units 14 may be provided. When a plurality of flattening press devices 14 are provided, at least one flattening press device 14 should have the control function of the present invention, which will be described later.

A laminated molded article unloading section 15 provided in a post-process of the flattening press device 14 includes a film winding section of a film conveying device 18, and the lower carrier film F1 is wound on a winding roll 18c via a driven roll. be taken. The part where the lower carrier film F1 is horizontal before the driven roll where the lower carrier film F1 is folded back (pre-process side) serves as a take-out stage for taking out the laminated molded product A3 by a carry-out device (not shown). The upper carrier film F2 is taken up by the take-up roll 18d via a driven roll before the take-out stage (pre-process side).

Next, a control block diagram showing the hardware configuration of the flattening press device 14 of the lamination system 11 of this embodiment will be described with reference to FIG. A control device 17 connected to the setting device 16 includes a control device 43 for the flattening press device 14, a control device 44 for the vacuum laminating device 13, a control device 45 for the film conveying device 18, and a loading device and an unloading device for the lamination system 11. It includes a control device 46 and a PLC 47 that controls them in an integrated manner, and the PLC 47 serves as the control device for the entire stacking system 11 . The control device 17 can also be connected to an external storage device 48 .

The control device 43 of the flattening press device 14 alone will be described in more detail. The control device 43 controls the servo amplifier 35 for controlling the servo motor 32 for rotating the pump 33 of the hydraulic circuit 50 of the flattening press device 14 via the input/output I/F 49, the servo valve 29, and the hydraulic pressure of the hydraulic cylinder 28. It is also connected to pressure sensors 30, 31, etc. for detection. The input input I/F 49 is also connected to external devices such as the position sensor 37 of the flattening press device 14 and a temperature controller (not shown) of the flattening press device 14 .

The input/output I/F 49 of the flattening press device 14 is also connected through a bus line 51 to a computing section 52 such as a CPU and a storage section 55 such as a ROM 53 and a RAM 54 . The calculation unit 52 includes a position control unit 56 for controlling the position of the lower platen 25 during pressure molding by the flattening press device 14 shown in FIG. A portion 57 is also included. Note that the control block diagram showing the hardware configuration in FIG. 3 is an example and is not limited to this.

Next, a method of controlling the lamination system 11 of the present invention, particularly a method of controlling the flattening press device 14 will be described. In the forming process of the laminated forming materials A1 and A2 that are sequentially sent in the laminating system 11 during continuous forming, the forming processes of the vacuum laminating device 13 and the flattening press device 14 are simultaneously performed by batch processing. Description will be made along the molding order of the two laminate molded products A3. In the present embodiment, the laminated molded material A1 placed on the laminated molded article placing portion 12 is for a build-up board in which a resin film containing a thermosetting resin is superimposed on a circuit board having fine unevenness. . In FIG. 1, one laminate A1 is shown, but a plurality of laminates A1 may be laminate-molded at the same time.

When the laminated molding material A1 is sent to the vacuum lamination device 13 by feeding the upper and lower carrier films F1 and F2, the lower platen 21 is lifted to form a chamber C sealed from the outside. Next, the conduit between the vacuum pump (not shown) and the chamber C is opened, and the pressure inside the chamber C is reduced (not an absolute vacuum, but a vacuum). Next, in the decompressed and heated chamber C, the diaphragm 19, which is a pressurizing body, is expanded by the pressurized air from the compressor, and the intermediate laminated material A2 is pushed between the hot plate 22 of the upper panel 20 and the intermediate laminated material A2 over a predetermined time. Laminate molding is performed to obtain. During lamination molding, pressure is applied by the diaphragm 19, which is an elastic body, under reduced pressure, so that the resin film can follow the irregularities of the circuit board and can be bonded together. However, when the intermediate laminate A2 is formed by the vacuum lamination device 13, the surface of the intermediate laminate A2 on the resin film side is not yet completely smooth and has unevenness.

When the intermediate laminated material A2 is obtained by lamination molding in the vacuum lamination device 13, the chamber C is opened, and the next carrier films F1 and F2 are fed by the film conveying device 18, and the upper board 24 and the lower platen of the flattening press device 14 are conveyed. It is transported between the plates 25 and stopped at a predetermined pressure position on the lower pressure plate 40 . When it is confirmed that the flattening press device 14 has stopped at the pressing position, the position command value generator 58 of the position controller 56 of the controller 43 of the flattening press device 14 moves toward the first target position P1 in FIG. A command to move the bottom plate 25 is sent to the servo valve 29 . When the rotation speed of the servomotor 32 of the pump 33 is reduced except when the flattening press device 14 is in operation, a command to increase the rotation speed of the servomotor 32 is also sent to the servo amplifier 35 of the servomotor 32. . Hydraulic oil is sent to the pressure-side oil chamber 28b of the hydraulic cylinder 28, and the bottom plate 25 starts to rise.

At this time, movement control of the lower board 25 is performed by position control, and as shown in FIG. be. In this embodiment, as shown in FIG. 5, position control is performed in relation to the lapse of molding time, so the movement of the lower board 25 includes an element of speed control. Accordingly, position control in the present invention is a concept that also includes speed control.

In the example of FIG. 5, the lower platen 25 is moved up at a relatively high speed to the first target position P1 where the distance between the upper pressure plate 39 and the lower pressure plate 40 (movable platen target position) is 0.2 mm. After temporarily stopping at the first target position P1, the position is held during the first step (S1). In the next second step (S2), the lower board 25 and the lower pressure plate 40 are moved upward at a low speed, and the upper surface of the intermediate laminated material A2 on the lower pressure plate 40 is moved upward at a position indicated by TP in FIG. 39 is brought into contact with a pressure surface 39a on the lower surface thereof. Further, the lower pressure plate 40 and the like continue to rise under slope-like position control in which the target positions are successively changed, and when the lower pressure plate 40 and the like reach the second target position P2, the upward movement of the lower pressure plate 40 and the like is stopped. In this embodiment, the second target position is 0.1 mm, which is the desired plate thickness of the laminated molded product A3, and is the target position for attaining final plate thickness accuracy during pressurization control. Further, in the next third step (S3), the servo valve 29 is controlled so that the bottom board 25 is held at the current position. When a predetermined pressurizing time elapses, the lower pressurizing plate 40 and the like start to descend toward the third target position P3, and when the third target position P4 is reached, the position is held during the fourth step (S4). Thereafter, the lower pressure plate 40 and the like are moved to the final mold opening completion position. A laminate molded product A3 having a thickness of 0.1 mm and a high thickness accuracy can be molded by the pressure control of these multiple steps.

Note that the flattening press apparatus of this embodiment only needs to have a function of performing position control in a plurality of steps until reaching the target position during pressurization control. In the example of FIG. 5, there are two steps until the second target position P2 is reached, but the final target position that defines the plate thickness may be reached by more steps. In each step, the position may be held at the same position for a certain period of time as in S1, or the position may be controlled by slope control in which the target position is sequentially changed as in S2. It is freely selectable.

Next, control of each hydraulic cylinder 28 during pressurization control will be described with reference to a control block diagram showing functions in FIG. First, a position command signal is sent from the position command value generator 58 of the position controller 56 to the servo valve 29 of each hydraulic cylinder 28 . Hydraulic oil is then supplied from the pump 33 to the hydraulic cylinder 28 via the servo valve 29, and the bottom plate 25 starts to rise. As the lower plate 25 rises, the rod 36 of the hydraulic cylinder 28 also rises by the same amount. Therefore, the position of the lower board 25 is detected by the position sensor 37 that detects the position of the rod 36. As shown in FIG. The detection signal of the position sensor 37 is sent to the adder 59 of the position control section 56, and the position command signal sent from the position command value generation section 58 is corrected. This is a closed loop when each hydraulic cylinder 28 is controlled.

The values of the position sensors 37 attached to the four hydraulic cylinders 28 are also sent to the comparison calculation section 60 of the position control section 56, respectively. Based on the value of the position sensor 37, an operation is performed to determine to which position each hydraulic cylinder 28 should be further advanced, stopped, or retreated. sent to 58. Then, the position command value generator 58 generates a command signal for the next position command for the hydraulic cylinder. These closed-loop controls are generally called 4-axis parallel control, etc., and compared to the method of pressing the center of the lower platen 25 (movable platen) by a single pressure mechanism, This control method is effective for increasing the parallelism of the plate 25 (movable plate).

There are various parallel control methods, such as a master-slave method in which the position of one hydraulic cylinder 28 is always used as a reference (target) for position control, and the positions of other hydraulic cylinders 28 are followed. There is also a master-slave system different from the above, in which the position of the hydraulic cylinder 28, which is always in the most advanced position, is used as a reference (target) for position control, and the other hydraulic cylinders follow the position. Alternatively, the average position of the positions of the four hydraulic cylinders 28 is calculated, and each hydraulic cylinder 28 is moved forward or backward using the average position as a reference (target) during position control, or the hydraulic cylinder 28 at the most forward position is stopped. It is also possible to move the other hydraulic cylinder forward by moving the other hydraulic cylinder forward. Alternatively, in the above, the target position is advanced by adding a feedforward element that takes into consideration the pressure during pressurization obtained from the pressure sensor 30 and the pressure sensor 31 (the differential pressure between the two pressure sensors 30 and 31) to the average position. The control method of parallel control is not limited. In the case where the hydraulic cylinders are single-acting cylinders, each hydraulic cylinder may be controlled using one pressure sensor.

In the above control, the pressures of the pressure-side oil chamber 28 a and the opening-side oil chamber 28 c of the hydraulic cylinder 28 are detected by the pressure sensors 30 and 31 , respectively, and sent to the pump control section 61 of the pressure control section 57 . Then, a differential pressure is calculated by subtracting the value of the pressure sensor 31 from the value of the pressure sensor 30 . The rotation speed of the servomotor 32 of the pump 33 is controlled by the pump control unit 61 via the servo amplifier 35 according to the command value using the differential pressure. Furthermore, in principle, the present invention performs pressure control directly related to the molding of the laminated molded product A3 of the flattening press device 14 only by position control, but the pressure of the hydraulic cylinder 28 is detected to correct the position control. It's okay. Specifically, the detected values of the pressure sensors 30 and 31 are sent to the target position correction section 62 of the pressure control section 57 . Then, a correction signal is sent from the target position corrector 57, and the command signal for the servo valve 29 is corrected in the adder 63, or the rotation speed of the servo motor 32 of the pump 33 is controlled.

Depending on the type of the intermediate laminated material A2, even if the position control is mainly performed for the purpose of preventing the molten resin from flowing out from the side of the intermediate laminated material A2 during pressure control, There are also things that want to keep the pressure within the range of the threshold value. In such a case, when the pressure of one of the hydraulic cylinders 28 is higher than the pressure of the other hydraulic cylinders 28 or the set pressure, the command signal of the servo valve 29 is corrected by the above control. For example, the pressure of the hydraulic cylinder 28 can be lowered. Alternatively, it is possible to increase the pressure of the hydraulic cylinder 28 whose pressure is insufficient. During these pressure controls, the detected values of the pressure sensors 30 and 31 of each hydraulic cylinder 28 may be used alone for control, or an average value of four axes may be used for control. Furthermore, after reaching the target position P2, it is also desirable to decrease the rotation speed of the pump 33 and adjust the opening of the servo valve 29 to decrease the pressure to the set pressure. However, if the laminate molded product A3 has a property of thermal expansion and it is desired to maintain a predetermined thickness accuracy, the pressure of the hydraulic cylinder 28 must be controlled to a set pressure that suppresses the amount of thermal expansion.

Next, a correction control function corresponding to thermal expansion of the flattening press device 14 will be described with reference to FIG. In the flattening press device 14, the temperature of the upper pressure plate 39 and the lower pressure plate 40 is increased from the room temperature state before molding during lamination molding. Therefore, the upper pressure plate 39 and the lower pressure plate 40 of the flattening press device 14 are thermally expanded by the temperature rise. The temperature rise of the pressure plate 39 and the lower pressure plate 40 is also transferred to other parts of the flattening press device 14, and the other parts such as the upper platen 24, the lower platen 25, the tie bar 27 are also heated. It expands thermally by the heat. The thermal expansion occurs with a time lag after the temperature of the upper pressure plate 39 and the lower pressure plate 40 is increased and molding can be started. Also, the set temperatures of the pressure plate 39 and the lower pressure plate 40 may be changed due to a change in the type of laminated molded product A3 during the day's molding work. In those cases, the thermal expansion of other parts of the planarizing press device 14 also occurs with a delay.

In the flattening press device 14 of the present embodiment, as shown in FIG. 6, the target position P2 during position control during the molding of the laminated molded product A3 depends on the number of molding cycles or the elapsed time of continuous molding from the start of molding. Correction is made. In the flattening press device 14, thermal expansion of the upper platen 24, the upper pressure plate 39, the lower platen 25, and the lower pressure plate 40 causes the upper pressure plate 39 and the lower pressure plate 39 to be pressed even if the detected value of the position sensor 37 is the same. The distance between the pressure plates 40 becomes narrower. Therefore, control is performed to correct the values of the target position P2 and the like used in pressurization control to be larger by the amount of thermal expansion as indicated by line A in FIG. At this time, the detected value of the temperature of at least one of the upper pressure plate 39 and the lower pressure plate 40 may also be taken into the calculation at the time of correction. Further, the correction of the target position P2 due to thermal expansion may at least partially use the pressure detected by the pressure sensors 30 and 31 of the hydraulic cylinder 28 during molding.

Furthermore, regarding the correction control function corresponding to the thermal expansion of the flattening press device 14, a temperature sensor is attached to at least one of the upper platen 24 and the lower platen 25, and the temperature of the platen is directly measured to correct the target position P2. may be used. Furthermore, by providing at least one position sensor between the upper pressure plate 39 and the lower pressure plate 40 and directly measuring the distance between the upper pressure plate 39 and the lower pressure plate 40, the upper plate 24 and the lower plate 25 can be detected. The distance between the upper pressure plate 39 and the lower pressure plate 40 can be measured without being affected by thermal expansion.

Next, referring to FIG. 7, thickness error correction control when there is a thickness error (bias) in the intermediate laminated material A2 of the flattening press of the lamination system of another embodiment will be described. In the example of FIG. 7, the intermediate laminated material A2 having a thickness error is made of a material that does not easily deform under pressure even when the upper pressure plate 39 and the lower pressure plate 40 are kept parallel to each other and the intermediate laminated material A2 is pressed. or when the plate thickness error is larger than a certain value, or when there is a possibility that the molten resin material or the like may flow out sideways from the thick portion of the intermediate laminated material A2.

First, when any part of the upper surface of the intermediate laminated material A2 comes into contact with the pressure surface 39a of the upper pressure plate 39 due to the lifting of the lower board 25 by the operation of the hydraulic cylinder 28, which part first comes into contact is determined. It can be confirmed by the fact that the value of the pressure sensor 30 of the part has increased. Then, the pressure of the hydraulic cylinder 28 is controlled so as to maintain the position of the portion where contact is first confirmed. Then, the abutted portions are sequentially confirmed, and when all the portions of the intermediate laminated material A2 are abutted against the upper pressure plate 39 as shown in FIG. 7(a), the values of the four position sensors 37 are detected. Then, a thickness error is detected as to which part of the intermediate laminated material A2 is thicker and which part is thinner. If the thickness error between the thickest part and the thinnest part is equal to or greater than a certain value, it is determined that the intermediate laminated material A2 requires thickness error correction control.

Next, when plate thickness error correction control is started, the servo valve 29 of the hydraulic cylinder 28 corresponding to the portion judged to be the thickest is pressure-controlled to increase to the highest target pressure in the whole, and partial pressure is applied. apply pressure. On the other hand, the servo valve 29 of the hydraulic cylinder 28 corresponding to the portion determined to be thin is controlled by the servo valve 29 in accordance with the difference in thickness, and the pressure is reduced to zero or a value close to zero to increase the thickness of the intermediate laminated material A2. Avoid pressurizing the portion where the thickness is almost thin. Alternatively, although it is drawn deformed in FIG. 7B, the servo valve 29 of the hydraulic cylinder 28 corresponding to the portion determined to be the thickest is controlled to move the lower pressure plate 40 to the uppermost pressure plate. It is raised (advanced) to an intermediate target position close to 39. On the other hand, the hydraulic cylinder 28 corresponding to the portion determined to be thin is raised to an intermediate target position below the portion determined to be the thickest.

As a result, in the first half of the pressurization control, only the thickest portion of the intermediate laminated material A2 is pressurized, or the thickest portion is pressurized more intensively than the other portions. Then, the thickness error of the intermediate laminated material A2 is eliminated in the initial stage, and the flow of the molten resin from the side of the intermediate laminated material A2 to the outside is also suppressed. However, in this control as well, when the plate thickness error of the intermediate laminated material A2 falls within a preset range, it is preferable to control the positions of the respective hydraulic cylinders 28 toward the same final target position. A laminate molded product A3 having a uniform thickness is molded as shown in (c).

In the pressure molding of the laminate molded product A3 of the present invention, including the example of FIG. 7, there is a pressure mechanism by a hydraulic cylinder or an electric motor in the tie bar portion, and the back surface of the intermediate laminated material A2 is not directly pressed. , Compared to the type that directly presses the back surface, it is possible to correct the plate thickness error with a smaller force based on the principle of leverage. Further, since the plate thickness correction amount of the intermediate laminated material A2 is smaller than the amount of movement of the lower board 25 of each part, more accurate plate thickness control can be easily performed. In this regard, in the examples of Patent Documents 3 and 4, the correction amount of the hydraulic cylinder that presses the back surface of the intermediate laminated material is directly the correction amount of the plate thickness of the intermediate laminated material, so it is difficult to perform accurate correction.

Including the example of FIG. 7, the improvement of the plate thickness accuracy of the laminated molded product A3 by parallel control is not only for eliminating the plate thickness error of one laminated molded product A3, but also for the plate thickness between a plurality of laminated molded products. Needless to say, it is also used for equalizing the thickness accuracy. Further, even when the plurality of intermediate laminated materials A2 are misaligned and the arrangement density of one of the intermediate laminated materials A2 is high, the pressurizing force of each hydraulic cylinder is controlled to adjust the plate thickness of the plurality of laminated molded products. You can even make it equal.

Furthermore, the flattening press apparatus of the present invention comprises two plates, an upper plate and a lower plate, and a pressing mechanism using a servomotor is provided at the tie bar portion of either the upper plate or the lower plate. An electric flattening press device may be used. Although not shown, in the electric flattening press device, each tie bar is formed of a ball screw, and a ball screw nut through which the ball screw is inserted is attached to a bottom plate. The drive shaft of a servomotor attached to the upper surface of the upper platen and the ball screw are connected directly or via a belt or speed reducer. Therefore, in the electric flattening press apparatus, the pressurizing mechanism provided in the tie bar portion is used when the shaft center of the tie bar ball screw and the drive shaft of the servomotor are aligned, and when the shaft center of the tie bar ball screw is aligned. Refers to a state in which the drive shaft of the servomotor is in parallel in the vicinity.

An electric flattening press device is not equipped with a pressure sensor, and it is desirable that a force sensor such as a load cell be attached to a ball screw nut mounting portion or a ball screw bearing mounting portion. The pressurization control using the electric flattening press device is the same as the example of the hydraulic cylinder described above in that parallel control is performed. However, the position control to the target position P2 is performed by detecting the value of the rotary encoder of the servomotor, and the position control is corrected according to the value of the force sensor as necessary.

Regarding the electric flattening press machine, a position sensor such as a linear scale is provided between the upper and lower plates or between the upper pressure plate and the lower pressure plate separately from the rotary encoder of the servomotor. Parallel control may be performed by a value. In the above case, it is possible to reduce the backlash problem associated with the ball screw and ball screw nut and the effect of thermal expansion of each part, leading to improvement in measurement accuracy and control accuracy.

Although the present invention is not enumerated one by one, it is not limited to the above-described embodiment, but is modified by a person skilled in the art based on the spirit of the present invention, or is a combination of each description of the present embodiment. It goes without saying that this also applies to The laminate molded product to be laminate-molded by the lamination system 11 may be a semiconductor wafer or another plate-like body other than a circuit board, and is not limited.

11 Lamination system 13 Vacuum lamination device 14 Flattening press device 17, 43, 44, 45, 46 Control device 24 Upper platen 25 Lower platen 27 Tie bar 28 Hydraulic cylinder 29 Servo valve 39 Upper pressure plate 40 Lower pressure plate 47 Position sensor 56 Position control unit 57 pressure control unit

Claims (6)

A vacuum lamination device for forming an intermediate laminated material by pressurizing a laminated molding material with a pressurizing body in a decompressed chamber, and a flattening press device disposed in a post-process of the vacuum lamination device for pressurizing the intermediate laminated material. In a layered system with
The flattening press device includes a pressure mechanism for each of the tie bars,
a position sensor corresponding to each of the tie bars, which is used to measure the thickness of the intermediate laminate at a plurality of locations;
A comparison calculation unit that compares the plate thickness at the plurality of locations ,
A stacking system, wherein the pressure mechanisms are individually position-controllable. The flattening press consists of two plates, an upper plate and a lower plate.
2. The stacking system according to claim 1, wherein a pressurizing mechanism using a hydraulic cylinder controlled by a servo valve is provided in the tie bars of the upper board or the lower board. The flattening press consists of two plates, an upper plate and a lower plate.
2. The stacking system according to claim 1, wherein a pressing mechanism using a servomotor is provided in the tie bars of the upper board or the lower board. A vacuum lamination device for forming an intermediate laminated material by pressurizing a laminated molding material with a pressurizing body in a decompressed chamber, and a flattening press device disposed in a post-process of the vacuum lamination device for pressurizing the intermediate laminated material. In a layered system with
The flattening press device includes a pressure mechanism for each of the tie bars,
a position sensor corresponding to each of the tie bars, which is used to measure the thickness of the intermediate laminate at a plurality of locations;
A comparison calculation unit that compares the plate thickness at the plurality of locations ,
A control method for a stacking system, wherein the pressure mechanisms are individually position-controlled. 5. The method of controlling a lamination system according to claim 4, wherein the flattening press device has a function of being position-controlled in a plurality of steps until reaching the target position. 6. The method of controlling a lamination system according to claim 4, wherein the flattening press device has a correction control function corresponding to thermal expansion.

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