JP6878365B2 - Laminating equipment and laminating method - Google Patents

Description

The present invention relates to a laminating apparatus capable of precisely laminating a base material and a resin film. Specifically, the present invention relates to a resin film surface to be laminated on a base material (for example, a printed circuit board or a wafer). It relates to a laminating apparatus that can be flattened at a stricter level.

Conventionally, as electronic devices have become smaller and have higher performance, multi-layered high-density printed circuit boards (so-called "build-up boards") have come to be widely used for the electronic circuit boards mounted on them. ing. This build-up substrate is manufactured as a laminated body in which a base material having irregularities due to wiring or the like on the surface and a resin film as an insulating layer are alternately laminated in multiple stages. The device is used.

In the production of the above-mentioned build-up substrate, it is important to flatly laminate the resin film on the base material having irregularities. This is because if there is an uneven portion, unnecessary space is amplified in the multi-stage stacking, and the build-up substrate becomes bulky, which violates the demand for small size of electronic devices. Examples of the laminating device for flatly laminating a resin film on a base material having irregularities include those of Patent Document 1. Since this equipment includes a vacuum press device and a flat press device, the surface of the formed laminate (build-up substrate or the like) can be made smoother.

In recent years, the miniaturization and high performance of electronic devices have been further advanced, and the electronic circuit boards mounted on these have been required to be further miniaturized. Along with this, the smoothness of the surface of the laminated body (build-up substrate, etc.) is required more, and further improvement of the laminating technique by the laminating apparatus is desired.

Japanese Patent No. 4926840

The present invention has been made in view of such circumstances, and an object of the present invention is to provide a laminating apparatus capable of producing a laminated body having a smoothed surface at a higher level.

In order to achieve the above object, the gist of the present invention is the following [1] to [5].
[1] A device for laminating a film on an uneven surface of a base material having irregularities, a vacuum laminating means for forming a temporary laminate A by closely following the film on the substrate under reduced pressure, and the temporary laminate. The first flat surface pressing means for forming the temporary laminated body B whose uneven surface is flattened by pressing A, and the temporary laminated body B are further pressed under different conditions from the first flat surface pressing means to further reduce the uneven surface. A laminating apparatus including a second flat pressing means for forming a flattened laminating body.
[2] The first flat pressing means has a pair of plates facing each other, at least one of the pair of plates is set to be able to advance and retreat with respect to the other, and at least one of the pair of plates is a hot plate. It has a plate-like body and a cushioning material arranged between them.
The second flat pressing means has a pair of plates facing each other, at least one of the pair of plates is set to be able to advance and retreat with respect to the other, and at least one of the pair of plates is a hot plate and a plate-like body. The laminating apparatus according to [1], wherein the laminating device has no cushioning material between them, or has a cushioning material having a smaller cushioning effect than the cushioning material of the first flat pressing means.
[3] The first flat pressing means has a pair of plates facing each other, a hydraulic cylinder or an air cylinder is connected to at least one of the pair of plates, and the operation of the hydraulic cylinder or the air cylinder causes the pair of plates. The laminating apparatus according to [1] or [2], wherein at least one of the plates is movable back and forth with respect to the other.
[4] The second flat pressing means has a pair of plates facing each other, a servomotor is connected to at least one of the pair of plates, and at least one of the pair of plates is operated by the operation of the servomotor. The laminating device according to any one of [1] to [3], which is capable of advancing and retreating.
[5] The second flat pressing means has a pair of plates facing each other, a hydraulic cylinder or an air cylinder is connected to at least one of the pair of plates, and the operation of the hydraulic cylinder or the air cylinder causes the pair of plates. The laminating apparatus according to any one of [1] to [3], wherein at least one of the plates can move forward and backward with respect to the other.

That is, the inventors of the present invention have made repeated efforts to solve the above problems. As a result, according to a laminating device that performs at least two flat presses under different conditions on a temporary laminated body in which a film is closely followed on a base material under reduced pressure, the surface is brought to a level that could not be achieved in the past. We have found that it is possible to flatten and arrived at the present invention.

According to the laminating apparatus of the present invention, when laminating a film on an uneven surface of a base material having unevenness, it is possible to produce a laminated body having a smoothed surface at a higher level.

It is a block diagram explaining the outline of the stacking apparatus which concerns on one Embodiment of this invention. It is explanatory drawing of the vacuum laminating means of the said laminating apparatus. It is explanatory drawing of the 1st flat press means of the laminating apparatus. It is explanatory drawing of the 2nd flat press means of the laminating apparatus. It is explanatory drawing of the temporary laminated body A, the temporary laminated body B, and the laminated body obtained by each means of the said laminating apparatus. It is explanatory drawing of the temporary laminated body A, the temporary laminated body B, and the laminated body obtained by each means of the laminating apparatus which concerns on another Embodiment of this invention. (A) is an explanatory view of a laminate (Example) obtained by the laminate according to the embodiment of the present invention, and (b) and (c) are both the laminate obtained by the conventional apparatus (a). It is explanatory drawing of the comparative example).

Next, a mode for carrying out the present invention will be described in detail. However, the present invention is not limited to this embodiment.

FIG. 1 shows a laminating apparatus according to one embodiment of the present invention. This laminating device is a device for laminating a film 106 for laminating on a base material 104 for a build-up substrate provided with irregularities due to wiring or the like, and feeds the transport films 5, 5'from one side. The transport means 4, 4'for sequentially transporting the work 100 by winding the work 100 on the other side is provided. Then, the vacuum laminating means 1 and the first flat pressing means are directed from the upstream (vacuum laminating means 1) to the downstream (second flat pressing means 3) in the flow direction of the arrows of the transport films 5, 5'. 2 and the second flat pressing means 3 are arranged in this order.
In the vacuum laminating means 1, the surface of the base material 104 is formed on an uneven surface by arranging the copper pattern 105, and the work 100 on which the film 106 is placed on the uneven surface is made uneven on the base material 104 under reduced pressure. A temporary laminate (A) 101 in which the film 106 is closely followed along the line is formed. Further, the first flat pressing means 2 presses the temporary laminated body (A) 101 formed by the vacuum laminating means 1 to form the temporary laminated body (B) 102 whose uneven surface is flattened. Further, the second flat surface pressing means 3 presses the temporary laminated body (B) 102 under conditions different from those of the first flat surface pressing means 2 to form the laminated body 103 whose uneven surface is further flattened. ..
The work 100, the temporary laminated body (A) 101, the temporary laminated body (B) 102, and the laminated body 103 are sandwiched between the transport films 5 and 5'by the transport means 4 and 4'and are transported. It is supposed to be done. Then, the transport means 4 has a carry-in conveyor 7 for carrying the work 100 into the process. Further, the transport means 4'has fans 6 and 6'for cooling the laminated body 103 flattened by the second flat press means 3. Then, in the transport means 4', the completed laminate 103 is taken out from the transport line between the transport films 5 and 5'to be wound up.
Hereinafter, each means 1 to 3 will be described in detail.

[Vacuum Laminating Means 1]
The vacuum laminating means 1 is a work 100 on which the film 106 is placed on the uneven surface of the base material 104 which is carried in by the carry-in conveyor 7 and carried by the transport films 5 and 5', and the upper plate 11 and the lower portion. A temporary laminate (A) 101 is formed by positioning the film 106 with the plate 12 and heating and pressurizing the film 106 in the space 26 under reduced pressure so that the film 106 closely follows the unevenness of the base material 104. Is. As shown in FIG. 2, the vacuum laminating means 1 includes a plurality of columns 9 (only two are shown in FIG. 2) erected on the press table 8, and bolts, nuts, etc. on each of these columns 9. It is provided with an upper plate 11 fixed by the fixing device 10 of the above, and a lower plate 12 and the like attached to each of the columns 9 so as to be movable up and down. The lower plate 12 is connected to the hydraulic cylinder 14 via a joint 13, and is moved up and down by the operation of the hydraulic cylinder 14 (as the piston rod 14a rises and falls). In this embodiment, the hydraulic cylinder 14 is connected to the lower plate 12, but another elevating mechanism such as an air cylinder may be used instead of the hydraulic cylinder 14. However, it is preferable to use the hydraulic cylinder 14 in that a high pressure can be obtained while being compact.

A flat plate-shaped upper heat insulating material 15, an upper heating plate 16, an upper cushioning material, and an upper elastic press plate 17 are fixed to the upper plate 11 in this order from the top, and a flat plate-shaped lower side is fixed to the lower plate 12. The heat insulating material 19, the lower heat plate 20, the lower cushioning material, and the lower elastic press plate 21 are fixed in this order from the bottom. The upper cushioning material and the lower cushioning material are not shown.

Both the upper and lower heating plates 16 and 20 are provided with temperature-controllable heating appliances for heating the elastic press plates 17 and 21 in an appropriate arrangement. In this embodiment, as the heating appliance, a plurality of sheathed heaters are respectively arranged inside the upper and lower heating plates 16 and 20. In this embodiment, the sheathed heaters are arranged inside the heating plates 16 and 20, but another heat source may be used instead of the sheathed heaters.

Further, the vacuum stacking means 1 includes a movable vacuum frame 23. The movable vacuum frame 23 includes a substantially quadrangular frame-shaped upper fixed frame portion 24 airtightly fixed to the lower surface of the upper plate 11, and a movable frame 25 airtightly fixed to the upper surface of the lower plate 12. There is. A vacuum pulling nozzle (not shown) is connected to the upper fixed frame portion 24, and when the upper and lower plates 11 and 12 are sealed, the vacuum pulling nozzle is used to connect the upper fixed frame portion 24 and the movable frame. The inside of the sealed space 26 (see FIG. 1) formed between the 25 can be evacuated to adjust the pressure of the space 26 (that is, the pressure is reduced to a predetermined pressure). The vacuum drawing nozzle may be connected to the upper plate 11 instead of the upper fixed frame portion 24, and if it is provided at a plurality of locations, the pressure of the space portion 26 can be efficiently adjusted.

[First flat pressing means]
In the first flat pressing means 2 (returning to FIG. 1), the temporary laminated body (A) 101 conveyed from the vacuum laminating means 1 by the conveying films 5, 5'is pressed on both the upper and lower press blocks 27, 28 (returning to FIG. 1). (See FIG. 3), the surface of the temporary laminate (A) 101 is smoothed by heating and pressurizing with both the upper and lower press blocks 27 and 28. In this embodiment, as shown in FIG. 3, a plurality of columns 30 (only two are shown in FIG. 3) erected on the press table 29, and bolts, nuts, etc. are attached to each of these columns 30. The upper press block 27 fixed by the fixing device 31 and the lower press block 28 and the like attached to each of the columns 30 so as to be movable up and down are provided. The lower press block 28 is connected to the hydraulic cylinder 33 via a joint 32, and is moved up and down by the operation of the hydraulic cylinder 33 (as the piston rod 33a rises and falls). In this embodiment, the hydraulic cylinder 33 is connected to the lower press block 28, but another elevating mechanism such as an air cylinder may be used instead of the hydraulic cylinder 33. However, it is preferable to use the hydraulic cylinder 33 in that a high pressure can be obtained while being compact.

Of the upper and lower press blocks 27 and 28, the upper press block 27 has a flat upper heat insulating material 35, an upper heating plate 36, a flat upper cushioning material 37, and an upper flexible metal plate (plate) on the upper base layer 34. The shape) 38 is fixed in this order from the top, and the lower press block 28 has a flat plate-shaped lower heat insulating material 40, a lower heat plate 41, and a flat plate-shaped lower side on the lower base layer 39. The cushioning material 42 and the lower flexible metal plate (plate-like body) 43 are fixed in this order from the bottom.

The upper heat insulating material 35 is fixed to the lower surface of the upper base layer 34 by fixing means (not shown) such as bolts and nuts. The upper heating plate 36 is fixed by the upper base layer 34, and the upper flexible metal plate (plate-like body) 38 is fixed to the upper heating plate 36 via the upper cushioning material 37 by fixing means (not shown) such as bolts and collars. It is fixed. Further, the lower heat insulating material 40 is fixed to the upper surface of the lower base layer 39 by fixing means (not shown) such as bolts and nuts. The lower heat plate 41 is fixed to the lower base layer 39 by co-tightening, and the lower flexible metal plate (plate-like body) 43 is fixed to the lower heat plate 41 via the lower cushioning material 42 such as bolts and collars. It is fixed by means (not shown). In the figure, 36a and 41a are sheath-shaped heaters arranged in parallel inside both the upper and lower heating plates 36 and 41. In this embodiment, the sheathed heaters 36a and 41a are arranged inside the heating plates 36 and 41, but other heat sources may be used instead of the sheathed heaters 36a and 41a.

As the cushioning materials 37 and 42, those having a surface shore A hardness (durometer hardness) of 60 degrees or more are preferable, and those having a surface A hardness (durometer hardness) of 60 degrees to 75 degrees are more preferable. This is because when the surface shore A hardness is within the above range, the film thickness of the film 106 after pressing becomes more uniform. In the present invention, the shore A hardness is measured using a type A durometer in accordance with JIS K6253. The shore A hardness may be measured for each test piece by preparing a test piece made of rubber, synthetic resin, or the like constituting the cushioning material.

The thickness of the cushioning materials 37 and 42 is usually 0.2 to 20 mm, preferably 0.2 to 10 mm, and more preferably 0.5 to 3 mm. When the thicknesses of the cushioning materials 37 and 42 are within the above range, the cushioning effect can be sufficiently exerted, and the temporary laminated body (A) 101 can be pressed in a state of being followed by the unevenness on the surface. Therefore, the uneven steps on the surface of the temporary laminated body (A) 101 can be made smooth as a whole. The cushioning materials 37 and 42 may have different thicknesses or the same thickness.

As the material of the cushioning materials 37 and 42, paper, rubber, synthetic resin, fiber and the like can be usually used. Of these, rubber is preferable, and fluorine-based rubber is particularly preferable. Examples of the fluorine-based rubber include vinylidene fluoride-based rubber, fluorosilicone-containing rubber, tetrafluoroethylene-based rubber, fluorovinyl ether-based rubber, fluorine-containing phosphonitrile-based rubber, fluorine-containing acrylate-based rubber, and fluorine-containing nitrosomethane-based rubber. Examples include rubber, fluorine-containing polyester rubber, and fluorine-containing triazine rubber. The cushioning materials 37 and 42 may contain a heat-resistant resin, a glass fiber sheet, a metal foil sheet, or the like inside, or, for example, rubber and fibers of different materials are combined. It may be a thing. Further, the cushioning materials 37 and 42 may be made of different materials or may be the same.

The thickness of the flexible metal plate (plate-shaped body) 38, 43 is usually 0.1 to 10 mm, preferably 1 to 2 mm. When the thickness of the flexible metal plates (plate-shaped bodies) 38 and 43 is within the above range, the flexibility can be exhibited while ensuring the mechanical strength, and the cushioning materials 37 and 42 are the temporary laminated body (A) 101. It is possible to sufficiently follow the deformation of the cushioning materials 37 and 42 when following the above.

As the material of the flexible metal plates (plate-shaped bodies) 38 and 43, stainless steel, iron, aluminum, aluminum alloy and the like are usually used, and among them, stainless steel is preferably used because of its excellent rust resistance. Further, when the surfaces of the flexible metal plates (plate-shaped bodies) 38 and 43 are mirror-polished by buffing or the like, the surface of the obtained temporary laminate (B) 102 can be made more mirror-polished, which is preferable.

[Second flat pressing means]
In the second flat pressing means 3 (returning to FIG. 1), the temporary laminated body (B) 102 conveyed from the first flat pressing means 2 by the conveying films 5, 5'is pressed on both the upper and lower press blocks 46, It is positioned between 47 (see FIG. 4) and heated and pressed by both the upper and lower press blocks 46 and 47 to further smooth the surface of the temporary laminate (B) 102. In this embodiment, as shown in FIG. 4, the basic configuration is the same as that of the first flat pressing means 2 (see FIG. 3), and the plurality of columns 45 (s) erected on the press table 44 (see FIG. 3). (Fig. 4 shows only two of the four corners), the upper press block 46 fixed to each of these columns 45 with fixing tools such as bolts and nuts, and the above-mentioned columns 45 that can be moved up and down. It is provided with a press block 47 on the lower side.

Heat plates 48 and 49 with a built-in heater are attached to the inside (press side) of the upper and lower press blocks 46 and 47 via a heat insulating material, and a metal plate (plate shape) is further inside (press side). Body) 50, 51 are arranged. Then, the temporary laminate (B) 102 formed via the first flat press means 2 is pressed between the metal plates (plate-like bodies) 50 and 51 to form the temporary laminate (B). The thickness of 102 can be made uniform, and the laminated body 103 can be formed on a flat surface having a mirror surface.

No cushioning material is arranged inside (press side) of the heating plates 48 and 49 of the press blocks 46 and 47. Therefore, the flatness of the inside (press side) of the heating plates 48 and 49 can be more reliably transmitted to the laminated body (B) 102, and the laminated body 103 whose surface is formed on a flat surface having a more mirror surface is formed. Obtainable. However, depending on the type of the base material 104, the film 106, and the like, a cushioning material may be provided between the hot plates 48 and 49 and the metal plates (plate-shaped bodies) 50 and 51. In that case, a cushioning material having a small cushioning effect may be provided. It is preferably a material. The magnitude of the cushioning effect is usually determined by the material and thickness of the cushioning material, but in the present invention, the followability is used as one of the indexes of the cushioning effect. That is, a cushioning material having high followability can be considered to have a large cushioning effect.

When a cushioning material is provided in the second flat pressing means 3, the surface shore A hardness of the cushioning material is preferably 60 degrees or more, more preferably 65 to 75 degrees. This is because when the surface shore A hardness of the cushioning material is within the above range, the film thickness of the film (laminate) after pressing becomes more uniform.

When the cushioning material is provided, its thickness is usually 0.2 to 20 mm, preferably 0.2 to 3 mm, and more preferably 0.2 to 1 mm. When the cushioning material has a smaller cushioning effect than the cushioning materials 37 and 42 of the first flat pressing means 2, the flatness of the inside (press side) of the heating plates 48 and 49 is more reliably transmitted. It is possible to obtain a laminated body 103 having a flatter surface. As the material of the cushioning material, the same material as that of the first flat pressing means 2 can be used, but a synthetic resin and a material combined with the synthetic resin are preferable.

The thickness of the metal plates (plate-like bodies) 50, 51 attached to the inside (press side) of the press blocks 46, 47 is usually 0.1 to 10 mm, preferably 0.5 to 7 mm, and more preferably 0.5 to 7 mm. It is 1 to 5 mm, more preferably 2 to 5 mm. When the thicknesses of the metal plates 50 and 51 are within the above range, the mechanical strength is excellent, so that the thickness of the temporary laminated body (B) 102 can be made more uniform, and the laminated body having a flatter surface. It can be 103. Further, it is more preferable to mirror-polish the surfaces of the metal plates (plate-shaped bodies) 50 and 51 by buffing or the like because the surface of the laminated body 103 can be made a uniform mirror surface.

As the material of the metal plates (plate-shaped bodies) 50 and 51, stainless steel, iron, aluminum, aluminum alloy and the like are usually used, and stainless steel is preferable from the viewpoint of excellent rust resistance. Further, the metal plates (plate-like bodies) 50 and 51 may or may not have flexibility. However, when a cushioning material is used, it is preferable that the cushioning material has little flexibility so that the cushioning effect is not excessively exhibited.

In the space below the press block 47, an elevating mechanism including a ball screw 52 including a screw shaft 52a and a nut (ball nut) 52b and a servomotor 53 connected to the screw shaft 52a is formed. The rotation speed of the servomotor 53 is controlled by a servo amplifier (not shown) based on the command signal from the programmable logic controller (PLC) and the feedback distance information between the press blocks 46 and 47. That is, the lower press block 47 is connected to the nut 52b of the ball screw 52 via a joint (not shown) or the like. Therefore, with the above configuration, the press block 47 can be controlled to move up and down by controlling the rotational operation of the servomotor 53 connected to the screw shaft 52a.

Further, in the space below the press block 47, a linear scale 54 for measuring the distance between the press block 47 and the press table 44 is arranged. The linear scale 54 has a scale 54a fixed to the press table 44 and an encoder head 54b attached to the press block 47 and sliding up and down in synchronization with the press block 47 to rotate the servomotor 53. The distance (gap) between the lower press block 47 that moves up and down with the operation and the upper press block 46 is indirectly measured. In the present invention, the servomotor means a motor provided with a servo mechanism, and its use is not limited.

As the linear scale 54, for example, any type of linear scale (linear encoder) such as a magnetic type having a magnetic head or an optical type having a light emitting / receiving element may be used. Further, instead of the linear scale 54, another type of rangefinder that can directly or indirectly measure the gap between the press blocks 46 and 47 in contact or non-contact may be used.

The linear scale 54 can also be arranged so that the gap between the lower press block 47 and the upper press block 46 can be directly measured. However, if the linear scale 54 is arranged between the press blocks 46 and 47, it may be affected by heat from the heat plates 48 and 49, and it becomes difficult to measure the accurate gap without considering the heat. There is a risk. Therefore, the linear scale 54 is arranged at a position away from the heating plates 48 and 49, for example, below the press block 47 as in this example, and measures the distance between the press block 47 and the press table 44. It is preferable to indirectly measure the gap between the lower press block 47 and the upper press block 46.

The second flat press means 3 includes a servo amplifier (not shown) that controls the rotational operation of the servomotor 53 based on the feedback of the command signal from the PLC and the distance information between the press blocks 46 and 47. There is. Further, the gaps between the press blocks 46 and 47 are not based only on the command signal (pressing gap control program) incorporated in the PLC, but also by the pressing gap control means set in consideration of the distance signal obtained from the linear scale 54. It is controlled. That is, the rotational operation of the servomotor 53 operated by the command signal from the PLC is controlled by feeding back the distance information between the press blocks 46 and 47 sent from the linear scale 54. In this example, the servomotor 53 is rotated by a command signal from the PLC to raise the press block 47, and the gap between the press blocks 46 and 47 (distance information between the press blocks 46 and 47 sent from the linear scale) is increased. When the value reaches a preset value, the information that the set value has been reached is fed back to the command signal incorporated in the PLC, and the rotation of the servomotor 53 is slowed down or stopped. Thereby, the stop position of the press block 47 can be set more accurately, and the gap between the press blocks 46 and 47 can be set more accurately.

[Transportation means]
The transport means 4, 4'(returning to FIG. 1) include upper and lower transport film feeding machines 55, 55'located at the starting point of the process, a carry-in conveyor 7 for carrying the work 100 into the process, and the process. It is provided with a transport film winder 56, 56'arranged at the end point of the above, a plurality of guide rollers and the like for supporting the transport films 5, 5'for transporting the work 100 and the like at various places in the process.

Then, the sheet-fed work 100 supplied from the carry-in conveyor 7 to the process at predetermined intervals is predetermined between the upper and lower transport films 5 and 5'delivered from the respective transport film feeding machines 55 and 55'. The upper and lower plates of the vacuum laminating means 1 are intermittently (intermittently) sandwiched at intervals of 1 and guided by each of the above guide rollers in a state of being synchronized with the flow (running) of these transport films 5 and 5'. Between 11 and 12, between the upper press block 27 and the lower press block 28 of the first flat press means 2, and between the upper press block 46 and the lower press block 47 of the second flat press means 3. It passes between the fans 6 and 6'for cooling the obtained laminated body 103. After the laminate 103 is cooled, the upper and lower transport films 5, 5'are released from the mold, and the laminate 103 is taken out from the transport line.

The upper and lower transport films 5, 5'from which the laminate 103 has been taken out are wound by the transport film winders 56, 56', respectively. The wound transport films 5, 5'are usually discarded, but may be reused if necessary.

According to this configuration, a vacuum laminating means 1, a hydraulic cylinder 33, a first flat pressing means 2 having a thick cushioning material (large cushioning effect) 37, 42, thin plate-shaped bodies 38, 43, and a servomotor 53, Since the second flat pressing means 3 having the thick plate-shaped bodies 50 and 51 and having no cushioning material is provided, first, as shown in FIG. 5, the prepared work 100 is first subjected to the vacuum laminating means. By passing through No. 1, a temporary laminated body (A) 101 in which the film 106 closely follows the unevenness (copper pattern 105) of the base material 104 can be obtained. In the temporary laminate (A) 101, the unevenness (copper pattern 105) of the base material 104 appears as it is on the surface. Next, in order to pass the temporary laminated body (A) 101 through the first flat surface pressing means 2, the temporary laminated body (A) 101 is pressed along the unevenness of the surface, and the unevenness of the surface is gently flat. The modified temporary laminated body (B) 102 can be obtained. Further, since the temporary laminated body (B) 102 is passed through the second flat surface pressing means 3, the flat surface of the metal plate 50 is made flat with respect to the temporary laminated body (B) 102 having a gentle surface unevenness. It can be pressed while being maintained, the unevenness of the surface disappears, the surface is flattened and mirrored at an unprecedented level, and the laminated body 103 having a small amount of protrusion of the film 106 can be obtained. Note that FIG. 5 schematically shows the process and means, and the description of parts not necessary for explanation is omitted.

Next, other embodiments of the present invention will be described. This is a laminating device shown in FIG. 1 provided with a second flat pressing means 57 in place of the second flat pressing means 3, and other configurations are the same as those of the laminating device shown in FIG. is there.

The second flat pressing means 57 has the same basic configuration as the first flat pressing means 2 shown in FIG. 3 (up and down of the press block by a hydraulic cylinder), but has a cushioning material and a flexible metal plate (plate shape). The thickness of the body) is different from that of the cushioning materials 37 and 42 and the flexible metal plates 38 and 43 of the first flat pressing means 2 shown in FIG.
That is, as shown in FIG. 6, in the second flat pressing means 57, the upper cushioning material 37'and the lower cushioning material 42'have a smaller cushioning effect than that of the first flat pressing means 2. The preferred materials are different. Further, the upper flexible metal plate (plate-shaped body) 38'and the lower flexible metal plate (plate-shaped body) 43'are superior in mechanical strength to those of the first flat pressing means 2. Since the other configurations are the same as those of the first flat pressing means 2 shown in FIG. 3, the description thereof will be omitted. Note that FIG. 6 schematically shows the process and means, and the description of parts not necessary for explanation is omitted.

As the material of the cushioning material 37'and the lower cushioning material 42', the same materials as those of the first flat pressing means 2 can be used, but among them, those combined with synthetic resin and synthetic resin. Is preferably used.

The thickness of the cushioning material 37'and the lower cushioning material 42'is usually 0.2 to 20 mm, preferably 0.2 to 3 mm, and more preferably 0.2 to 1 mm. When the thicknesses of the cushioning materials 37'and 42'are within the above range, the cushioning effect is not excessively exerted. Therefore, the metal plate (plate-shaped body) 50'and the metal with respect to the surface of the temporary laminate (B) 102. The flatness of the plate (plate-shaped body) 51'can be transmitted more reliably, and the laminated body 103 formed on a flat surface having a more mirror-like surface can be obtained. The cushioning materials 37'and 42'may be different in material and thickness from each other, or may be the same.

The thickness of the upper flexible metal plate (plate-shaped body) 38'and the lower flexible metal plate (plate-shaped body) 43'is usually 0.1 to 10 mm, preferably 1 to 5 mm, and more preferably 2 to 2. It is 3 mm. When the thickness of the flexible metal plates 38'and 43'is within the above range, the mechanical strength is excellent, so that the thickness of the temporary laminate (B) 102 can be made more uniform, and the surface is formed to be a flatter surface. It can be a laminated body 103. Further, if the surfaces of the flexible metal plates (plate-shaped bodies) 38'and 43' are mirror-polished by buffing or the like, the surface of the laminated body 103 can be made a uniform mirror surface, which is more preferable.

According to this configuration, the vacuum laminating means 1, the hydraulic cylinder 33, the first flat pressing means 2 having the cushioning materials 37 and 42 having a large cushioning effect, and the thin plate-shaped bodies 38 and 43, the hydraulic cylinder 33, and the cushioning effect Since it is provided with a second flat pressing means 57 having a small cushioning material 37', 42'and a thick plate-shaped body 38', 43', as shown in FIG. 6, first, a vacuum is applied to the prepared work 100. By passing through the laminating means 1, it is possible to obtain a temporary laminated body (A) 101 in which the film 106 closely follows the unevenness (copper pattern 105) of the base material 104. In the temporary laminate (A) 101, the unevenness (copper pattern 105) of the base material 104 appears as it is on the surface. Next, in order to pass the temporary laminated body (A) 101 through the first flat surface pressing means 2, the temporary laminated body (A) 101 is pressed along the unevenness of the surface, and the unevenness of the surface is smoothed. A flattened temporary laminate (B) 102 can be obtained. Further, since the temporary laminated body (B) 102 is passed through the second flat pressing means 57, the upper flexible metal plate (plate-shaped body) 38'is opposed to the temporary laminated body (B) 102 having a gentle surface unevenness. ， The flat surface of the lower flexible metal plate (plate-like body) 43'can be pressed while maintaining flatness, the unevenness of the surface is eliminated, and the surface is flattened and mirrored to an unprecedented level. The laminated body 103 can be obtained. However, the laminating device of FIG. 1 (having the second flat pressing means 3) controls the distance between the metal plate (plate-shaped body) 50 and the metal plate (plate-shaped body) 51 to a predetermined distance. Therefore, the amount of protrusion of the film 106 at the time of pressing by the second flat pressing means can be reduced.

In the embodiment of the present invention described above, the temperature and pressure at the time of pressing by the first flat pressing means 2 and the second flat pressing means 3 (or 57) are set to the materials of the base material 104 and the film 106. It can be appropriately selected accordingly. Among them, the pressing condition of the first flat pressing means 2 is higher than the pressing condition of the second flat pressing means 3 (or 57) in that the laminated body 103 is excellent in finish (flatness, mirror surface property). Moreover, it is preferable that the pressure is low. Further, it is preferable that the pressing time of the second flat pressing means 3 (or 57) is longer than the pressing time of the first flat pressing means 2.

Hereinafter, the present invention will be specifically described with reference to examples, but the present invention is not limited to these examples as long as the gist of the present invention is not exceeded.

[Example 1]
The laminating apparatus shown in FIG. 1 was used. The epoxy resin-based film 106 is formed of a base material 104 having irregularities (copper pattern 105) on its surface (thickness of convex portion 18 μm, copper pattern residual copper ratio of α portion 80%, copper pattern residual copper ratio of β portion 30%, A work 100 placed on the copper pattern residual copper ratio of the γ portion (0%) was produced.
The space portion 26 is adjusted to 110 ° C. in advance by the upper heating plate 16 and the lower heating plate 20 of the vacuum laminating means 1, the pressure of the space portion 26 30 seconds after the start of suction is set to 100 Pa or less, and the upper elastic press plate having a thickness of 2 mm. 17. The work 100 was pressed with a lower elastic press plate 21 at a pressure of 1 MPa for 20 seconds to prepare a temporary laminate (A) 101.
In the first flat pressing means 2, a stainless steel plate (SUS630H, 2 mm) is used as the upper flexible metal plate (plate-shaped body) 38 and the lower flexible metal plate (plate-shaped body) 43, and the upper cushioning material 37, As the lower cushioning material 42, a fluorovinylidene rubber having a thickness of 2.5 mm was used. Then, the upper heating plate 36 and the lower heating plate 41 are adjusted to 120 ° C., the lower press block 28 is raised by the hydraulic cylinder 33, and the upper flexible metal plate (plate-shaped body) 38 and the lower flexible metal plate (plate-shaped) are raised. The temporary laminate (A) 101 was heat-pressed with the body) 43 at a pressure of 0.8 MPa for 30 seconds to prepare the temporary laminate (B) 102.
In the second flat pressing means 3, the heating plates 48 and 49 are adjusted to 100 ° C., the lower press block 47 is raised by the servomotor 53, and the metal plate (plate-shaped body) 50 having a thickness of 2 mm and the thickness of 2 mm are formed. The distance between the metal plates (plate-like bodies) 51 is set to be 20 μm less than the thickness of the temporary laminate (B) 102, and the temporary laminate (B) 102 is pressed for 60 seconds to prepare the laminate 103. did.

[Example 2]
In the laminating device shown in FIG. 1, a laminating device using a second flat pressing means 57 (see FIG. 6) is used instead of the second flat pressing means 3, except for the second flat pressing means 57. , A laminated body 103 was produced in the same manner as in Example 1.
The second flat pressing means 57 is a stainless steel plate (SUS630H) having a flatness of the pressed surface within 3 μm as an upper flexible metal plate (plate-shaped body) 38'and a lower flexible metal plate (plate-shaped body) 43'. , 3 mm) was used, and as the upper cushioning material 37'and the lower cushioning material 42', a fluorovinylidene rubber having a thickness of 0.5 mm was used. Then, the upper heating plate 36 and the lower heating plate 41 are adjusted to 100 ° C., the lower press block 28 is raised by the hydraulic cylinder 33, the upper flexible metal plate (plate-like body) 38', and the lower flexible metal plate (plate). The temporary laminated body (B) 102 was heat-pressed with a physical body) 43'at a pressure of 0.8 MPa for 60 seconds to prepare a laminated body 103.

[Comparative Example 1]
In the laminating device shown in FIG. 1, a laminating device not provided with the second flat pressing means 3 was used, and the laminated body 103 was produced in the same manner as in Example 1. That is, Comparative Example 1 corresponds to a conventional example manufactured from a laminating device provided with a vacuum laminating means and one flat pressing means (up and down of a press block by a hydraulic cylinder).

[Comparative Example 2]
In the laminating apparatus shown in FIG. 1, a laminating apparatus not provided with the first flat pressing means 2 was used, and the laminated body 103 was produced in the same manner as in Example 1 except for the first flat pressing means 2. That is, Comparative Example 2 corresponds to a conventional example manufactured from a laminating device provided with a vacuum laminating means and one flat pressing means (up and down of a press block by a servomotor).

As shown below, the thickness “variation” and the surface “mirror surface” of the laminates 103 obtained in Examples 1 and 2 and Comparative Examples 1 and 2 were evaluated.

[Variation]
The thickness of the laminate 103 (one in each of the three regions classified by α, β, and γ shown in FIGS. 7A to 7C) was measured, and the difference between the maximum thickness and the minimum thickness was measured. Was calculated, and the value was applied to the following indicators for evaluation. The evaluation is also shown in Table 1 below.
◎ (Very good): 2 μm or less 〇 (Good): Over 2 μm and 6 μm or less × (Bad): Over 6 μm

[Mirror surface]
The surface of the laminated body 103 is visually observed and evaluated by applying it to the following indexes, and the evaluation is also shown in Table 1 below.
〇 (Good): There is no dent.
× (bad): There is a dent.

As shown in Table 1, the one of Example 1 was produced because the metal plate (plate-like body) 50 and the metal plate (plate-like body) had no followability and the temporary laminated body (B) 102 was excellently flattened. There is no variation in the thickness of the laminated body 103, and the mirror surface of the laminated body 103 is excellent (see FIG. 7A).
That is, in the case of the first embodiment, since the first flat pressing means 2 has a followability, the mirror surface of the laminated body 103 is ensured, and the laminated body is provided by the second flat pressing means 3 having a low followability. The variation in the thickness of 103 is suppressed.
Further, the one of the first embodiment includes a second flat pressing means 3 (up and down of the press block by a servomotor), and a metal plate (plate-shaped body) 50 and a metal plate (plate-shaped body) 51 at the time of pressing. Since the distance to and from can be set accurately, excessive pressurization can be suppressed at the time of pressing, and the flexible film 106 can be formed between the upper press block 46 and the lower press block 47. It was possible to prevent exudation.

In the second embodiment as well, the variation in the thickness of the laminated body 103 produced in the same manner as in the first embodiment is suppressed, and the surface of the laminate 103 is excellent in mirror surface property (see FIG. 7A). However, the one of the second embodiment is provided with the second flat pressing means 57 (the press block is raised and lowered by the hydraulic cylinder), and the cushioning materials 37'and 42' are thin, so that excessive application during pressing is provided. A sufficient cushioning effect against pressure could not be exhibited, and the softened film 106 exuded slightly between the upper and lower press blocks.

In Comparative Example 1, since the cushioning materials 37 and 42 of the first flat pressing means 2 have a sufficient thickness, the temporary laminated body (A) 101 can be bent following the unevenness of the temporary laminated body (A) 101. The unevenness of (A) 101 could be smoothed, and the mirror surface of the laminated body 103 was excellent. However, as shown by the broken line in FIG. 7B, the uneven step based on the difference in the residual copper ratio of the copper pattern 105 could not be cut off, and the thickness of the laminated body 103 varied.

In Comparative Example 2, the pressure was immediately applied by the second flat surface pressing means 3 after passing through the vacuum laminating means 1. Although the variation in thickness is suppressed, this product cannot be pressed while following the unevenness of the temporary laminated body (A) 101, and therefore, as shown by the portion surrounded by the broken line in FIG. 7 (c), the unevenness step. An unpressurized portion was generated at a portion where the amount was large, and the mirror surface property of the laminated body 103 was inferior.

1 Vacuum laminating means 2 First flat pressing means 3 Second flat pressing means 101 Temporary laminated body (A)
102 Temporary laminate (B)
103 Laminated body 104 Base material 106 Film

Claims (5)

A device for laminating a film on an uneven surface of a base material having irregularities, the vacuum laminating means for forming the temporary laminate A by closely following the film to the substrate under reduced pressure, and pressing the temporary laminate A. The first flat surface pressing means for forming the temporary laminated body B whose uneven surface is gently flattened and the temporary laminated body B are pressed under different conditions from the first flat surface pressing means to further flatten the uneven surface. It is provided with a second flat pressing means for forming the formed laminated body, and is provided with a second flat pressing means.
The first flat pressing means has a pair of plates facing each other, at least one of the pair of plates is set to be able to advance and retreat with respect to the other, and at least one of the pair of plates is a hot plate and a plate-like body. And a cushioning material arranged between them, and the pair of plates heats and presses the temporary laminate A.
The second flat pressing means has a pair of plates facing each other, at least one of the pair of plates is set to be able to advance and retreat with respect to the other, and at least one of the pair of plates is a hot plate and a plate-like body. have, between them, or does not have a buffer material, have a small cushioning material having cushioning effect than the cushioning material of the first plane pressing means, the pair of plates, the distance of each other temporary laminate while smaller than the thickness of B are adapted to heat and press the temporary laminate B laminated device according to claim Rukoto. The first flat pressing means has a pair of plates facing each other, a hydraulic cylinder or an air cylinder is connected to at least one of the pair of plates, and at least one of the pair of plates is operated by the operation of the hydraulic cylinder or the air cylinder. The laminating device according to claim 1, wherein one is capable of advancing and retreating with respect to the other. The second flat pressing means has a pair of plates facing each other, a servomotor is connected to at least one of the pair of plates, and the operation of the servomotor causes at least one of the pair of plates to move forward and backward with respect to the other. The laminating apparatus according to claim 1 or 2, which is possible. The second flat pressing means has a pair of plates facing each other, a hydraulic cylinder or an air cylinder is connected to at least one of the pair of plates, and at least one of the pair of plates is operated by the operation of the hydraulic cylinder or the air cylinder. The laminating apparatus according to claim 1 or 2, wherein one is capable of advancing and retreating with respect to the other. A method of laminating a film on an uneven surface of a base material having irregularities, which is a vacuum lamination step of forming a temporary laminate A by closely following the film on the substrate under reduced pressure, and pressing the temporary laminate A. The first flat surface pressing step of forming the temporary laminated body B whose uneven surface is gently flattened, and the second step of pressing the temporary laminated body B to form a laminated body whose uneven surface is further flattened. With a flat press process,
The first flat pressing step has a pair of opposing plates and a heating plate attached to at least one of the pair of plates, and at least one of the pair of plates is set to be able to advance and retreat with respect to the other. was performed using a first planar pressing means, Ri Contact the pair of plates so as to heat and press the provisional laminated body a,
The second flat pressing step has a pair of opposing plates and a heating plate attached to at least one of the pair of plates, and at least one of the pair of plates is set to be able to advance and retreat with respect to the other. This is performed by using the second flat pressing means, and the pair of plates heat and press the temporary laminate B in a state where the distance between the plates is smaller than the thickness of the temporary laminate B. you is,
Lamination characterized in that the pressing of the second flat pressing means in the second flat pressing step has a small buffering effect with respect to the pressing of the first flat pressing means in the first flat pressing step. Method.

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