JP2022123564A - Lamination molding system and lamination molding method - Google Patents

Abstract

To provide a lamination molding system and a lamination molding method that can satisfactorily perform the lamination molding of a lamination-molded product.SOLUTION: A lamination molding system 1 has a vacuum lamination device 12 and press devices 13 and 14. The vacuum lamination device 12 performs lamination molding within a chamber C under vacuum. The press devices 13 and 14 are provided downstream of the vacuum lamination device 12 and consist of at least two consecutive first and second press devices 13 and 14, each of which has a positional control element, the first press device 13 to be driven by a servomotor 315 and the second press device 14 to be driven by a servomotor 415.SELECTED DRAWING: Figure 1

Description

TECHNICAL FIELD The present invention relates to a lamination molding system provided with a vacuum lamination device and a press device, and a lamination molding method using the vacuum lamination device and the press device.

Laminate molding systems equipped with a vacuum lamination device and a press device include those equipped with one press device in the post-process of the vacuum lamination device and those equipped with two press devices. Patent document 1 describes a vacuum lamination apparatus having one press apparatus in the post-process of the vacuum lamination apparatus. The flattening press apparatus provided in the post-process of the vacuum lamination apparatus of Patent Document 1 is provided with a limit switch so as to detect the clamping of the intermediate laminate. Further, as a vacuum lamination apparatus equipped with two press units in the post-process, those described in Patent Documents 2 and 3 are known. In particular, Patent Document 3 describes that at least one of a pair of plates can be advanced and retracted toward the other by the operation of a servomotor in the second flat press means 3 . It also describes that the number of rotations of the servomotor 53 is controlled by a servo amplifier (not shown) based on a command signal from a programmable logic controller (PLC) and distance information between the press blocks 46 and 47 fed back. ing.

JP 2005-66967 A Japanese Patent Application Laid-Open No. 2002-120100 Japanese Patent Application Laid-Open No. 2020-28980

However, in Patent Document 3, only the second flat press means 3 presses the laminated molded product based on the distance information, so the following problems may occur. That is, since the first flat press means only presses the laminated molded product with a predetermined pressure, the laminated molded product sent from the first flat press means to the second flat press means has thickness unevenness. . Therefore, in some laminated molded products, thickness unevenness remains in the final molded product even when the second flat press means is pressed to a desired distance, or the desired distance is forcedly pressed. As a result, a pressure higher than the expected pressure was generated, and defects such as the laminated (resin) film melting and flowing out on the sides of the laminated molded product sometimes occurred.

Further, when a hydraulic cylinder controlled by a general pressure control valve is used as the first plane pressing means, there is a problem that the responsiveness of pressure control is inferior during the pressing process. Other problems and novel features will become apparent from the description of the specification and the accompanying drawings.

A lamination molding system according to one embodiment is a lamination molding system comprising a vacuum lamination device and a press device, wherein the vacuum lamination device performs lamination molding in a vacuum chamber, and at least Two successive pressing devices are each provided with a position control element.

According to the embodiment, it is possible to provide a laminate molding system that is suitable for, for example, a laminate molding system and the like, and that can satisfactorily perform laminate molding of a laminate molded product.

1 is a schematic explanatory diagram of a laminate molding system of a first embodiment; FIG. It is a block diagram showing control of the 1st press device of a 1st embodiment, and a 2nd press device. It is an explanatory view showing pressure molding in the first press step by the first press device of the first embodiment. It is explanatory drawing which shows the pressure molding of the 2nd press process by the 2nd press apparatus of 1st Embodiment. It is a schematic explanatory drawing of the laminate molding system of 2nd Embodiment. FIG. 11 is a schematic explanatory diagram of a laminate molding system of a third embodiment;

A laminate molding system 1 according to a first embodiment of the present invention will be described with reference to FIG. In the lamination molding system 1, two press devices 13 and 14, a first press device 13 and a second press device 14, are continuously provided in a post-process of the vacuum lamination device 12. As shown in FIG. The lamination molding system 1 also includes a carrier film delivery device 15 in a process preceding the vacuum lamination device 12 and a carrier film winding device 16 in a process subsequent to the second press device 14 . The laminate molding system 1 further includes a control device 17 . The control device 17 is connected to the vacuum lamination device 12, the first press device 13, the second press device 14, the carrier film delivery device 15, and the carrier film winding device 16, and controls the entire laminate molding system 1. I do.

First, the carrier film delivery device 15 will be described in order from the previous step. The carrier film delivery device 15, which serves both as a transfer device and a tension device for the substrate A1 and the laminated film A2, is provided with an unwinding roll 511 and a driven roll 512 on the lower side. The direction of the lower carrier film F1 unwound from the unwind roll 511 is changed to a horizontal state at the driven roll 512 portion. A mounting stage section 513 for mounting the substrate A1 and the laminated film A2, which are the materials to be molded and are superimposed and sent from the previous process, is provided in the portion where the lower carrier film F1 is in a horizontal state. The carrier film delivery device 15 is provided with an upper unwinding roll 514 and a driven roll 515. The upper carrier film F2 unwound from the unwinding roll 514 separates the substrate A1 and the laminated film A2 at the driven roll 515 portion. It is superimposed on the laminated molding A3 consisting of The substrate A1 and the laminated film A2 are transported while being sandwiched between the carrier films F1 and F2. Then, lamination molding is performed via the carrier films F1 and F2 in the vacuum lamination device 12, the first press device 13, and the second press device 14, so that the lamination film A2 melts and adheres to the device parts. To prevent. Further, the use of the carrier films F1 and F2 gives a certain cushioning effect when the primary laminate molded product A4 and the secondary laminated molded product A5 are pressed, especially in the first press device 13 and the second press device 14. There is also the advantage of being

Next, the vacuum lamination device 12 arranged after the carrier film delivery device 15 will be described. The vacuum lamination apparatus 12 pressurizes the laminated molded product A3 composed of the substrate A1 and the laminated film A2 with a pressurizing body such as the diaphragm 211 in the chamber C in a vacuum state to laminate and mold the primary laminated molded product A4. be. In the vacuum laminating apparatus 12, a lower board 213 is provided so as to be able to move up and down with respect to a fixed upper board 212 by means of an elevating mechanism 214, and the lower board 213 including the outer frame rises and comes into contact with the upper board 212. In fact, a chamber C can be formed inside. The elevating mechanism 214 is composed of a hydraulic cylinder, but an electric motor or an air cylinder may be used for the elevating mechanism 214 of the vacuum lamination device 12 . When an electric motor is used for the elevating mechanism 214 of the vacuum laminating device 12 and a hydraulic mechanism is not used, the drive source of the first press device 13 and the second press device 14 to be described later is an electric motor. The entire laminate molding system 1 can be electrified, and the degree of cleanliness when the laminate molding system 1 is arranged in a clean room is improved. The chamber C is connected to a vacuum pump (not shown) so that the atmosphere in the internal space can be sucked to form the chamber C in a vacuum state. In the present invention, the term "vacuum state" refers to a state in which the pressure is reduced to a predetermined value.

A hot plate 215 heated by a heater (not shown) is attached to the lower surface of the center of the upper plate 212, and an elastic sheet 216 such as a heat-resistant rubber film (not shown) is attached to the surface of the hot plate 215. On the other hand, a hot plate 217 heated by a heater (not shown) is also attached to the central upper surface of the lower plate 213 . A diaphragm 211 made of a heat-resistant rubber film, which is a pressurizing body, is attached to the portion of the lower plate 213 surrounding the hot plate 217 so as to cover the upper surface of the hot plate 217 . A compressor (not shown) sends pressurized air to the back side of the diaphragm 211 to expand the diaphragm 211 in the chamber C and press the substrate A 1 and the laminated film A 2 together with the hot plate 217 . The diaphragm 211 of the vacuum lamination apparatus 12 may be attached to the upper platen 212 and press the laminate A3 composed of the substrate A1 and the laminated film A2 from the upper platen 212 side. In the vacuum lamination device 12, rubber is attached to the flat pressure surfaces of the upper and lower pressure blocks, respectively, and one of the pressure blocks advances toward the other pressure block to press the laminate A3. It may be something to do. Further, the vacuum lamination apparatus may be a roll type laminator that performs lamination molding between rolls respectively provided above and below in a chamber in a vacuum state.

Next, the first press device 13 arranged in series in the post-process of the vacuum lamination device 12 will be described. The first press device 13 is a primary laminated molded product in which the unevenness remains on the laminated film A2 side, which is composed of the laminated material A1 and the laminated film A2, which are pressure-molded by the vacuum laminating device 12 and provided with uneven portions. A4 is further pressurized to form a flatter secondary laminate A5. The first press device 13 is erected between the vicinity of four corners of a substantially rectangular base plate 311 provided below and an upper plate 312 which is a substantially rectangular fixed plate located above the base plate 311 . It has four tie bars 313 . In the first press device 13 , a lower platen 314 which is a substantially rectangular movable platen can move up and down between a base plate 311 and an upper platen 312 . The first press device 13 is driven by an electric motor such as a servomotor 315 , and a servomotor 315 as a pressurizing means is attached to the base board 311 .

The servo motor 315 has a rotary encoder 316 and is connected to a servo amplifier 317 , and the servo amplifier 317 is connected to the control device 17 . A ball screw 318 is connected to the drive shaft of the servomotor 315, or the drive shaft itself is a ball screw. On the other hand, a ball screw nut 319 of a ball screw mechanism is fixed to the lower surface of the lower plate 314 , and the ball screw 318 is inserted through the ball screw nut 319 . Furthermore, a load cell 320 is attached between the bottom plate 314 and the ball screw nut 319 . The portion to which the load cell 320 is attached is not limited as long as it can receive the pressurizing force of the pressing process, and as an example, it may be the portion to which the servomotor 315 is attached.

With the above structure, the first press device 13 is configured such that the lower platen 314 is moved up and down with respect to the upper platen 312 by the operation of the servomotor 315 . In the ball screw mechanism of the first press device 13, a belt may be stretched between the drive shaft of the servomotor 315 and a pulley attached to the ball screw 318 to transmit the driving force via the belt. Furthermore, the ball screw mechanism of the first press device 13 may be such that a ball screw nut 319 is rotatably attached to the base board 311 and the ball screw 318 moves up and down. Also, by covering the ball screw 318 with a cover, it is possible to prevent grease from diffusing, which contributes to improving the cleanliness of the clean room. Furthermore, the first press device 13 may use a booster mechanism such as a toggle mechanism, a crank mechanism, a wedge mechanism, or similar mechanisms. In the above example, the first press device 13 press-forms by one servo motor 315, but press-forms by using two or more servo motors 315 or two or more ball screw mechanisms. do not exclude anything. Furthermore, a closed-loop controllable linear motor may be used instead of the servomotor. Further, the first press device 13 may be one in which the upper platen 312 is moved up and down with respect to the lower platen 314 using any one of the mechanisms described above.

A linear scale 321 as a position sensor is attached between the side surface of the upper board 312 and the side surface of the lower board 314 . The linear scale 321 has a scale 321a attached to one of the discs, and a slider 321b, which is a measuring section, attached to the other disc. The position (distance) of the lower platen 314 with respect to the upper platen 312 can also be detected by the rotary encoder 316 of the servomotor 315 . However, a slight backlash exists between the ball screw 318 and the ball screw nut 319, and the tie bar 313 and the ball screw 318 undergo thermal expansion. Therefore, it is often desirable to directly measure the position (distance) of the lower platen 314 with respect to the upper platen 312 using the linear scale 321 . The resolution of the position sensor such as the linear scale 321 is preferably 0.002 mm or less as an example, and furthermore, the minimum resolution such as 0.0001 mm or 0.000025 mm, which is 0.001 mm or less and is practically used. is more desirable.

Although only one linear scale 321 may be attached to the first press device 13, a total of two linear scales 321, one on each side of the upper platen 312 and the lower platen 314 with respect to the traveling direction of the carrier films F1 and F2, or A total of 4 units may be attached with 2 units each. When a total of four position sensors are attached to both side surfaces, the parallelism of the lower platen 314 with respect to the upper platen 312 can be detected. Alternatively, the position sensor may be provided at a position where the pressing blocks 322 and 323 are connected, or at a position where the base plate 311 and the lower plate 314 are connected. Furthermore, the first press device 13 can detect the position of a limit switch or proximity switch (not shown) for the purpose of preventing the position of the lower platen 314 from exceeding the lower limit point or upper limit point in mechanical design. It is common to have a safety switch.

Pressure blocks 322 and 323 are attached to the opposing surfaces of the upper platen 312 and the lower platen 314 of the first press device 13 via heat insulating plates (not shown), respectively. The pressure blocks 322 and 323 are provided with temperature control means such as cartridge heaters. Since the pressure surfaces 327 of the pressure blocks 322 and 323 have the same structure, the pressure surface 327 of one of the pressure blocks 322 will be described. A cushioning material 325 such as rubber, resin film, or fiber sheet is attached to the surface of the pressure block 323 . The thickness of the cushioning material 325 is, for example, 0.05 mm to 3.00 mm. A metal plate 326 made of elastically deformable material such as stainless steel having a plate thickness of 0.2 mm to 3.00 mm is attached to the surface of the buffer material 325, for example. The surface of the metal plate 326 opposite to the surface in contact with the cushioning material 325 serves as a pressure surface 327 .

The member forming the pressure surface of the first press device 13 may be a heat-resistant elastic sheet such as a fluororubber sheet. In this case, the hardness (Shore A hardness) of the elastic sheet is, but not limited to, 30 to 80, more preferably 40 to 70, as an example. Although the first press device 13 does not have a chamber capable of being evacuated, it may be equipped with a chamber capable of being evacuated, and pressure molding may be performed in the vacuum chamber.

Next, a control block diagram relating to pressure molding of the first press device 13 will be described with reference to FIG. The first press device 13 has position control elements. The control device 17 has a force command signal output section 701 and a position command signal output section 702 . The force command signal output unit 701 and the position command signal output unit 702 are connected to a sequence control unit 703 which is a higher level control unit, and the sequence control unit 703 sends various molding conditions and the like. The sequence control unit 703 is also connected to the setting input/display unit 704 and the storage unit 705 .

Also, the load cell 320 of the first press device 13 is connected to the adder 706 of the control device 17 . The command signal sent from force command signal output section 701 and the signal sent from load cell 320 are compared and added in adder 706 . Furthermore, the linear scale 321 is connected to the adder 707 of the controller 17 . An adder 707 compares and adds the command signal sent from the position command signal output unit 702 and the signal sent from the linear scale 321 . Furthermore, the signal sent from at least one of the adders 706 and 707 is sent to the servo amplifier 317 via the force/position comparison switching section 708 and command signal generating section 709 . Also, the rotary encoder 316 of the servo motor 315 is connected to the servo amplifier 317 . The signal sent from the command signal generator 709 and the signal sent from the rotary encoder 316 are added. Note that the control block diagram of FIG. 2 is conceptual, and the first press device 13 may be provided with all the functions in practice, and the control block diagram is not limited to that of FIG.

Next, a description will be given of the second press device 14, which is arranged continuously in the serial direction after the first press device 13. As shown in FIG. The second press device 14 further presses the secondary laminated product A5 laminated by the first press device 13 to form a completely flat laminated product A6. The structure of the pressurizing means and the like of the second press device 14 of the laminate molding system 1 of the first embodiment is substantially the same as that of the first press device 13 .

The second press device 14 is erected between the vicinity of four corners of a substantially rectangular base plate 411 provided below and an upper plate 412 which is a substantially rectangular fixed plate located above the base plate 411 . 4 tie bars 413 are provided. In the second press device 14 , a lower board 414 which is a substantially rectangular movable board can move up and down between a base board 411 and an upper board 412 . The second press device 14 is driven by an electric motor, and a servomotor 415 as pressure means is attached to the base board 411 . In the first embodiment, the servomotor 415 of the second press device 14 has the same specifications as the servomotor 315 of the first press device 13, such as rated output. However, the first press device 13 may use the higher power servomotor 315, and conversely, the second press device 14 may use the higher power servomotor 415. FIG.

The servo motor 415 has a rotary encoder 416 and is connected to a servo amplifier 417 , and the servo amplifier 417 is connected to the control device 17 . A ball screw 418 is connected to the drive shaft of the servomotor 415, or the drive shaft itself is a ball screw. On the other hand, a ball screw nut 419 of a ball screw mechanism is fixed to the lower surface of the lower plate 414 , and the ball screw 418 is inserted through the ball screw nut 419 . Furthermore, a load cell 420 is attached between the bottom plate 414 and the ball screw nut 419 . Therefore, in the second press device 14, the bottom board 414 is moved up and down by the operation of the servomotor 415. As shown in FIG. The pressurizing mechanism of the second press device 14 can also be modified in various manners like the first press device 13 described above. If the second press device 14 only performs controls including position control elements, the load cell 420 may not be installed. A linear scale 421 as a position sensor is attached between the side surface of the upper platen 412 and the side surface of the lower platen 414 as in the case of the first press device 13 . The performance of the linear scale 421 is the same as that of the first press device 13 . However, if it is desired to more accurately detect only the plate thickness of the final laminate A6, the linear scale 421 of the second press device 14 should have a higher resolution than the linear scale 321 of the first press device 13. You may When the linear scale 321 is used, the position sensor may be magnetostrictive, optical, capacitive, or the like, and may be an ultrasonic sensor or the like.

Pressure blocks 422 and 423 are attached to the opposed surfaces of the upper platen 412 and the lower platen 414 of the second press device 14, respectively. The pressure blocks 422 and 423 are provided with temperature control means such as cartridge heaters. Since the pressure surfaces 427 of the pressure blocks 422 and 423 have the same structure, the pressure surface 427 of one of the pressure blocks 4323 will be described. A cushioning material 425 such as rubber, resin film, or fiber sheet is attached to the surface of the pressure block 423 . The thickness of the cushioning material 425 is, for example, 0.02 mm to 2.00 mm.

It is desirable that the cushioning action of the cushioning material 425 of the second press device 14 is equal to or smaller than the cushioning action of the cushioning material 325 of the first press device 13 . Therefore, when the cushioning material 425 is made of the same material, it is often desirable that the thickness of the cushioning material 425 of the second press device 14 is the same or thinner. Alternatively, if the cushioning material 325 of the first pressing device 13 and the cushioning material of the second pressing device 14 have the same thickness, the cushioning material 425 of the second pressing device 14 can be of the same material or have a high hardness. often desirable. A metal plate 426 having a thickness of 0.2 mm to 3.00 mm and made of elastically deformable stainless steel or the like is attached to the surface of the cushioning material 325, for example. The surface of the metal plate 426 opposite to the surface in contact with the cushioning material 425 serves as a pressure surface 427 . Since the control block diagram of the second press device 14 is substantially the same as the control block diagram of the first press device 13, the above explanation is used.

Next, the carrier film winding device 16 provided after the second pressing device 14 will be described. The carrier film winding device 16 serves both as a transfer device and a tension device for the carrier films F1 and F2. The carrier film winding device 16 includes a lower winding roll 611 and a driven roll 612, and the winding roll 611 winds the lower carrier film F1. The carrier film take-up device 16 includes an upper take-up roll 613 and a driven roll 614. The driven roll 614 separates the upper carrier film F2 from the laminated product A6. It is wound up on the winding roll 613 on the upper side. A take-out stage portion 615 for the laminated molded product A6 is provided at a portion where only the lower carrier film F1 is fed in a horizontal state. As a transfer device for the carrier films F1 and F2, a transfer device (so-called chuck device) that grips both sides of the carrier films F1 and F2 and pulls them toward the subsequent process may be provided.

Next, a laminate molding method for the laminated material A1 and the laminate film A2 using the laminate molding system 1 of the first embodiment will be described. In the lamination molding system 1 during continuous molding, lamination molding is simultaneously performed in batch processing in the diaphragm type vacuum lamination device 12, the first press device 13, and the second press device 14 by the sequence control of the control device 17. . However, here, description will be made along the molding order of the laminated molding A3 of the substrate A1 and the laminated film A2, which are the materials to be laminated for one batch.

The material to be laminated A1 placed on the placing stage portion 513 of the carrier film delivery device 15 has a build-up having an uneven portion consisting of a convex portion of the copper foil portion adhered to the substrate surface and a concave portion of the portion without the copper foil. It is a circuit board for The thickness of the copper foil (height with respect to the substrate portion) is not limited to this, but is about several micrometers to several tens of micrometers, and is 0.1 mm or less in most cases. Laminated films A2 are laminated on the upper and lower sides of the circuit board A1, respectively, to form a laminated molding A3 for build-up molding. Although one laminated molded article A3 is shown in FIG. 1, a plurality of laminated molded articles A3 may be simultaneously mounted on the mounting stage portion 513 and laminated.

The laminate A3 placed on the placement stage 513 is moved together with the upper and lower carrier films F1 and F2 as the winding rolls 611 and 613 are driven to rotate, and enters the chamber C of the open vacuum lamination apparatus 12. sent and positioned. Next, in the vacuum lamination apparatus 12, the chamber C is closed and the pressure is reduced by a vacuum pump (not shown) to form the chamber C in a vacuum state (depressurized state). Then, pressurized air was sent to the back side of the diaphragm 211 to bulge the diaphragm 211 into the chamber C, and the laminate A3 composed of the substrate A1 and the laminated film A2 was attached to the hot plate 215 on the upper board 212 side. Pressurized with elastic sheet 216 . At this time, the pressure applied by the diaphragm 211 (the pressure per area applied to the laminate A3) is, for example, 0.3 MPa to 1.5 MPa. The laminate film A2 is adhered, and the primary laminate molded product A4 is laminate molded. However, the surface of the laminated film A2 of the primary laminated molded product A4 laminated and molded by the vacuum lamination device 12 is still in a state of having irregularities following the shape of the irregularities of the substrate A1. In this case, when the laminated film used has a high inorganic material content (for example, a laminated film containing 35 to 75% by weight of SiO ₂ ), the liquidity of the molten resin is low, so that irregularities are more likely to remain.

In the vacuum lamination device 12, the chamber C is opened when the primary lamination molded product A4 consisting of the laminated material A1 and the lamination film A2, both of which are adhered together, is lamination-molded. Then, the primary laminated molded product A4 is conveyed between the upper platen 312 and the lower platen 314 of the first press device 13 in the post-process by feeding the next carrier films F1 and F2 by the carrier film winding device 16, It is stopped at a predetermined pressurized position.

Next, the servomotor 315 of the first press device 13 is actuated to lift the lower platen 314 and pressure block 323 to start the first press process. In the first pressing step, pressure control including position control elements is performed. First, the lower platen 314 and the pressure block 323 are at the speed switching position P1 just before the pressure surface 327 contacts the lower carrier film F1, or the position just before the upper carrier film F2 contacts the pressure surface 327 on the side of the upper plate 412. Up to this point, the movement is controlled at high speed by the servomotor 315 . However, when it is detected by the rotary encoder 316, the linear scale 321, the limit switch, the proximity switch, or the like that the position is reached, the servo motor 315 controls the movement at a low speed, and the primary laminate A4 is moved to the pressure surface 427. , 427, the sudden excessive load is reduced. The fact that the primary laminated molded product A4 is sandwiched between the pressure surfaces 427, 427 may be grasped by detecting the torque of the servomotor 315, or may be presumed by reaching a preset position P2. .

When the primary laminated molded product A4 is sandwiched between the pressing surfaces 427, 427, the first pressing step PR1 of the first pressing steps is performed. In the first pressurization step PR1, the value of the load cell 320 is detected and feedback control is performed by force control. A force command signal value is sent from the force command signal output unit 701 and is compared with the force signal value detected by the load cell 320 for addition. Since the first pressurizing process PR1 is only force control, it passes through the force/position comparison switching unit 708 as it is, and is transmitted to the servo amplifier 317 by the command signal generation unit 709 as a speed control command value.

The servo amplifier 317 generates the rotation speed and current value of the servo motor 315 and sends them to the servo motor 315 . As described above, the servomotor 315 is controlled by force control, and the force can be expressed in terms of pressure per area (surface pressure) applied to the primary laminate A4. In the laminate molding method of the present embodiment, the surface pressure is preferably 0.3 MPa to 1.5 MPa, as an example, and in particular, it is often desirable that the surface pressure is lower than that of the vacuum lamination device 12 . Then, in the first pressurizing process PR1, the linear scale 321 detects that the lower platen 314 and the pressurizing block 323 have further risen to a preset position P3 (same as the distance between the pressurizing surfaces 327, 327). Alternatively, after a predetermined time has elapsed, the process proceeds to the second pressing process PR2 of the first pressing process. Alternatively, the detection value of at least one of the linear scale 321 and the rotary encoder 316 shifts to the second pressurizing step PR2.

In the second pressurization step PR2, pressurization control is performed with priority given to the position control element. The value of the linear scale 321 is detected and feedback control of position control (or speed control) is performed toward the target position P4. The value of the command signal is sent from the position command signal output unit 702 and is compared with the value of the position signal detected by the linear scale 321 and added. The value of load cell 320 is also constantly detected and sent to force/position comparison switching section 708 via adder 706 . Two levels of thresholds are provided for the detected value of the load cell 320, and when the detected value of the load cell 320 exceeds the first threshold, the position control command value is subtracted. When the detected value of the load cell 320 exceeds the last threshold value, the command value of the command signal for position control is set to a command value obtained by subtracting the previous command value, or the output of the command value of the position signal is temporarily or It stops until the second press step PR2 is completed.

Also in the second pressurizing process PR2, a speed control command value is sent to the servo amplifier 317, and the current value is mainly controlled. Speed control using a rotary encoder 316 is performed between the servo amplifier 417 and the servo motor 415 . As a result, in the second pressing process, the position of the lower platen 314 is accurately controlled based on the values detected by the linear scale 321 . When the position of the lower board 314 reaches the target position P4, the servomotor 415 is controlled to maintain the current position (including servo lock and servo OFF), and the secondary laminate A5 having an accurate plate thickness T1 is pressed. molded. However, if a large position deviation occurs during position control and a pressure abnormality occurs in the primary laminated molded product A4 to be pressurized, the force detection changes the command value of the position to the backward side or stops pressurization. Therefore, it is possible to prevent the occurrence of defective products such as reduction in thickness due to excessive pressing and outflow of molten resin to the side. In the second pressurizing process PR2, even if the target position (command position) cannot be finally reached (when the target position cannot be pushed), as long as the plate thickness is within the allowable range. You can say good.

In the second pressurizing step PR2, force-prioritized control may be performed as long as it is control using a position control element. As an example, feedback control of position control may be added at a constant rate to force control in which the value of the load cell 320 is detected as in the first pressing step. Alternatively, the speed control element may be added as a feedforward control signal. Furthermore, the command value of the force signal transmitted from the force command signal output section 701 may be changed in accordance with the position detected by the linear scale 321 .

It should be noted that each pressurizing step in the first pressing step is not limited to the above, and may include a greater number of pressurizing steps. In addition, pressure molding using position control elements in each step includes, in a broad sense, position control elements even if speed control elements are used partially or wholly. The position control element including speed control may control the servomotor 315 by controlling any one of current value control, voltage value control, and torque value. Further, as a device corresponding to claim 2 of the present invention, the first press device 13 having the servomotor 315 as a drive source may perform only force control in all pressurizing processes. Even in that case, the force control by the first press device 13 using the servomotor 315 is more effective than the pressure control of the press device using a hydraulic cylinder controlled by a conventional general pressure control valve. It is possible to perform highly accurate pressurization control on the molded product, and thickness unevenness is also reduced.

Also, the temperature of the pressure blocks 322 and 323 of the first press device 13 at this time varies depending on the materials of the substrate A1 and the laminated film A2, and is not limited to this, but is preferably 80° C. to 200° C. is temperature controlled from 90°C to 150°C.

When the second pressurizing step PR2 of the first press device 13 is completed after a predetermined time has passed and the secondary laminated product A5 is laminated, the lower board 314 is lowered. The surface of the secondary laminated product A5 formed at this time is pressed by pressure blocks 322 and 323 having an elastic metal plate 326 via a cushioning material 325 on the pressure surface 327 of the first press device 13. Since the product is pressure-molded, the irregularities remaining on the surface of the primary laminated product A4 are processed to be even more flat. Then, the next unwinding roll 511 and driven roll 512 and the unwinding roll 414 and driven roll 515 by the carrier film winding device 16 feed the carrier films F1 and F2, and the carrier films F1 and F2 of the winding rolls 611 and 613 are fed. By winding, the secondary laminated molded product A5 is conveyed between the upper platen 412 and the lower platen 414 of the second press device 14 in the post-process of the first press device 13, and stopped at a predetermined pressure position. be.

Next, the servomotor 415 of the second press device 14 is operated, and the lower platen 414 and the pressure block 423 are raised at high speed in the same manner as the control of the first press device 13, and switched to low speed at the speed switching position P11. Then, the secondary laminate A5 is held between the pressure surfaces 427, 427 at the contact point P12. The second pressing device 14 also performs pressure forming, including position control elements. In the first pressing process PR11 of the second pressing device 14, control similar to that of the second pressing process PR2 of the first pressing device 13 is performed. That is, position control is performed to detect the position of the linear scale 421 or the like and operate the servomotor 415. When the value of the load cell 320 is detected and exceeds a threshold value, the position command control signal (current value, etc.) is changed. restrictions are added. When it is detected that the lower board 414 or the pressurizing block 423 has reached the predetermined switching position P13, or the elapse of a predetermined time is detected, the first pressurizing step PR11 ends, and the second pressurizing step PR11 ends. It shifts to pressurization process PR12.

In the second pressing step PR12 of the second pressing step, only position control (or speed control) is performed by detecting the position of the linear scale 421 and the like and operating the servomotor 415 . However, since the difference between the thickness of the secondary laminate A5 pressure-molded by the second press device 14 and the thickness of the laminate A6, which is the final product, is extremely small, position control alone is sufficient. A command signal is not sent that causes the position deviation to become too great and drives the servo motor 315 with an unexpected excessive force. In addition, since the distance from the switching position P13 from the first pressurizing process PR11 to the second pressurizing process PR12 to the final pressurization completion target position P14 is extremely small, even if only the position control is performed, the position deviation becomes so large that the servo motor 315 is driven with unexpectedly excessive force. Therefore, the laminate molded article A6, which is the final product, can achieve extremely precise thickness accuracy, and the outflow of the molten resin to the side of the laminated molded article A6 can be prevented. However, the second press process PR12 may also be provided with a limit such as a torque limit of the servomotor 415. FIG. Then, when the position of the lower board 314 reaches the final pressurization completion target position P14, the servo motor 415 is controlled to maintain the current position (including servo lock and servo OFF), and an accurate lamination of the plate thickness T2 is performed. Molded product A6 is pressure molded.

The temperature of the pressure blocks 422 and 423 of the second press device 14 at the time of this secondary pressure molding is different depending on the materials of the substrate A1 and the laminated film A2, so it is not limited to this, but it is 80° C. to 80° C. The temperature is controlled at 200°C, more preferably 90°C to 150°C. However, it is desirable that the temperature of the pressure blocks 322, 323 of the first press device 13 is the same as that of the pressure blocks 322, 323 of the second press device 13, or that the temperature of the pressure blocks 422, 423 of the second press device 14 is lower.

In the second press device 14, the lower board 314 is lowered when a predetermined time has passed after reaching the final pressurization completion target position P14. The plate thickness T2 of the laminated molded product A6 molded at this time has an accurate thickness because the second pressure molding is performed by position control. If the surface of the secondary laminated molded product A5 has slight unevenness, it can be processed to be even more flat.
Then, by feeding the next carrier films F1 and F2 by the carrier film winding device 16, the final laminated molded product A6 is conveyed to the take-out stage section 615 of the post-process of the second press device 14, and is transferred to the next process by a device (not shown). sent to.

Note that the first pressing step and the second pressing step by the second pressing device 14 may include at least a position control element like the second pressing step PR2 of the first pressing device 13. Only the position control (or speed control) may be performed from the position control, or the force may be detected and used for control.

In addition, the lamination molding system 1 of the first embodiment is compared with a lamination molding system in which one press device having force control (or pressure control) and position control elements is provided in the post-process of the vacuum lamination device. superior in terms of That is, by press-molding the position control elements respectively with the first press device 13 and the second press device 14 that are continuous, it is possible to process the plate to a desired thickness in two steps. Therefore, compared to a laminate molding system that molds to a desired plate thickness with a single press device, pressure molding can be performed without applying excessive pressure, so the laminate molded product can be melted to the side. Outflow of resin can be prevented. In lamination molding of substrates, it is often the case that the time required for pressure molding by the press device is longer than the time required for lamination molding by the vacuum lamination device 1. It is possible to divide the time required for pressure molding by the respective press devices 13 and 14 . Therefore, the cycle time of lamination molding per batch can be shortened.

It should be noted that the second press device 14 may also control only the force of the servomotor 415 in all pressurizing processes, as a device corresponding to claim 2 of the present invention. Even in that case, the force control by the second press device 14 using the servomotor 415 is more effective than the pressure control of the press device using a hydraulic cylinder controlled by a conventional general pressure control valve. It becomes possible to perform pressurization control with high accuracy on the molded product A5, and thickness unevenness is also reduced.

Next, the laminate molding system 2 of the second embodiment will be described with reference to FIG. 5, focusing on differences. The lamination molding system 2 of the second embodiment is provided with a press device in which at least two processes having position control elements are provided in the post-process of the vacuum lamination device 22 and have continuous processes, and the method of conveying the laminated molded product. common. Also, the configurations of the base board 2311, the upper board 2312, the tie bar 2313, and the lower board 2314 of the first press device 23 and the second press device 24, and the structures of the pressure blocks 2322 and 2323 are common. The difference between the first press device 13 and the second press device 14 of the first embodiment and the first press device 23 and the second press device 24 of the second embodiment lies in the pressure means. .

In the first press device 23 , the base plate 2311 is provided with a pressurizing cylinder 2315 which is pressurizing means and is operated by hydraulic pressure. The pressurizing cylinder 2315 is connected to a hydraulic device 2317 including a closed-loop controllable valve such as a servo valve (not shown). Also, the pressurizing cylinder 2315 can detect the pressure of the working oil by a pressure sensor. A hydraulic device 2317 including the pressure sensor is connected to the control device 17 . A linear scale 2318 similar to that shown in FIG. The linear scale 2318 is connected to the control device 17 so that the distance between the upper board 2312 and the lower board 2314 can be detected.

The structure of the second press device 24 is the same as that of the first press device 23, and the base plate 2411 is provided with a pressurizing cylinder 2415 which is pressurizing means and is operated by hydraulic pressure. 2416 is fixed to the back surface of the bottom plate 2414 . The pressurizing cylinder 2415 is connected to a hydraulic device 2417 including a closed-loop controllable valve such as a servo valve (not shown). Also, the pressurizing cylinder 2415 can detect the operating pressure by a pressure sensor. A hydraulic device 2417 including the pressure sensor is connected to the control device 17 . A linear scale 2418 similar to that of the first press device 23 is attached between the upper platen 2412 and the lower platen 2414 of the second press device 24 . The linear scale 2418 is connected to the control device 17 so that the distance between the upper board 2412 and the lower board 2414 can be detected.

The primary laminated molded product A4 laminated and molded by the vacuum laminating device 22 is sent to the first press device 23 and laminated and molded into the secondary laminated molded product A5 in the same manner as in the laminated molding system 1 of the first embodiment. , is sent to the second press device 24 and laminate-molded into a laminate-molded product A6. The laminate molding method in the first press device 23 and the second press device 24 in the laminate molding system 2 of the second embodiment is mostly the same as the laminate molding method of the laminate molding system 1 of the first embodiment. Therefore, the description of the first embodiment is used. As for the difference, in the first embodiment, the force of the servo motor 315 is controlled by detecting the value of the load cell 320, but in the second embodiment, the value of the pressure sensor is detected and applied. The difference is that the pressure of pressure cylinder 2415 is controlled. That is, when a servo valve is used, closed loop control of pressure using the value of the pressure sensor and closed loop control of position (or speed) using the linear scale 2418 are performed by the servo valve.

In the present invention, the lamination molding system 1 of the first embodiment and the lamination molding system 2 of the second embodiment are mixed, and the first press device uses a pressurizing cylinder such as a hydraulic pressure and a position control element. As a press device having a position control element, the second press device may be a press device that uses an electric motor such as a servomotor and has a position control element. Further, on the contrary, the first press device may be a press device using an electric motor such as a servomotor, and the second press device may be a press device using a pressure cylinder using fluid such as hydraulic pressure.

Next, the laminate molding system 3 of the third embodiment will be described with reference to FIG. 6, focusing on differences. In the third embodiment, the press device for the final process and the press device continuing to the previous process of the press device for the last process are provided with a press device that performs pressure control including at least a position control element, respectively. be. Specifically, the first press device 33 provided in the post-process immediately after the vacuum lamination device 32 is provided with a press device that performs only pressure control using a pressure cylinder 3311 such as hydraulic pressure. The first press device 33 may be a pressurizing block having a flat pressurizing surface with rubber attached thereto. The second press device 34 and the third press device 35 use electric motors such as servo motors 3411 and 3511 and have position control elements. Therefore, the ``continuous pressing process after the vacuum laminating apparatus'' of the present invention means that the pressing processes by the two pressing apparatuses are continuous as the Nth pressing process and the N+1th pressing process. Therefore, the pressing device in the process immediately following the vacuum lamination device 32 may not perform pressure control including at least the position control element. Further, the “continuous press process” may include a process other than the press process between the press processes.

The pressing surface of the third press device 35 is provided with the same cushioning material and elastic metal plate as those of the first press device 33 and the second press device 34 . The third press device 35 has a cushioning material thinner than the cushioning material of the second pressing device 34 or has a higher hardness than the cushioning material of the second pressing device 34. The damping effect may be less than that of device 34 . Further, the third press device 35 may be a pressurizing plate made of metal or a thin metal plate attached to the metal plate and serving as a pressurizing surface without providing a cushioning material. The third press device 35 is a cooling press that particularly cools the laminated molded product, and the temperature of the pressure platen of the third press device 35 is set lower than the temperature of the pressure platen of the second press device 34. can be controlled to

In the case where the third press device 35 is a cooling press and only faces contact with the laminate A6 with a slight pressure, the third press device 35 may not need a position control element. . In that case, a first pressing step performed by a first pressing device 33 immediately after the vacuum lamination device 32 and a second pressing step performed by a second pressing device 34 arranged continuously with the first pressing device 33 are performed. Only the pressing process is controlled using at least the position control element.

Although the present invention is not enumerated one by one, it is not limited to the above-described first and second embodiments, and modifications made by those skilled in the art based on the spirit of the present invention and the first embodiment. Needless to say, the combination of each description of the embodiment to the third embodiment is also applied. The laminate-molded product laminate-molded by the laminate-molding systems 1, 2, and 3 may be a semiconductor wafer or another plate-like body in addition to the circuit board, and is not limited. Also, the surface on which the laminated material such as a film is laminated may be either one side or both sides of the substrate or wafer. Furthermore, an LED substrate or the like may be used. According to the present invention, even when the height of the chip (projection) of the substrate is 0.1 mm or more and the thickness of the resin film to be laminated is 0.15 mm or more, there are many cases where good lamination molding can be performed.

1, 2, 3 lamination molding system 12, 22, 32 vacuum lamination device 13, 23, 33 first press device 14, 24, 34 second press device 17 control device 212, 312, 412, 2412, 2412 upper board 213, 314, 414, 2314, 2414 Bottom board
322, 323, 422, 423, 2322, 2323 Pressure blocks 315, 415, 3411, 3511 Servo motors 317, 417 Servo amplifiers 320, 420 Load cells 321, 421, 2318, 2418 Linear scale A4 Primary laminate A5 Secondary Laminated molded product A6 Laminated molded product

Claims (4)

In a lamination molding system equipped with a vacuum lamination device and a press device,
a vacuum lamination device that performs lamination molding in a chamber in a vacuum state;
and at least two sequential press devices downstream of said vacuum laminator and having position control elements. In a lamination molding system equipped with a vacuum lamination device and a press device,
a vacuum lamination device that performs lamination molding in a chamber in a vacuum state;
A lamination molding system comprising at least two continuous press devices provided in a post-process of the vacuum lamination device and driven by servomotors. In the lamination molding method using a vacuum lamination device and a press device,
A laminate molded product laminated and molded by a vacuum lamination device that performs lamination molding in a chamber in a vacuum state is further subjected to pressure control including at least a position control element in a continuous pressing step in the post-process of the vacuum lamination device. Laminate molding method. In the lamination molding method using a vacuum lamination device and a press device,
A vacuum lamination device for performing lamination molding in a chamber in a vacuum state, and at least two continuous press devices provided in a post-process of the vacuum lamination device and driven by a servomotor are provided,
A method of lamination molding, wherein the press apparatus performs pressure control including at least a position control element.

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