JP2002036272A - Lamination method - Google Patents

Abstract

PROBLEM TO BE SOLVED: To provide a lamination apparatus and method useful for forming a printed circuit board, wherein the film thickness uniformity and surface mirror surface properties of the resin layer laminated on a substrate excellent in followability and having unevenness are well, into a multilayered structure. SOLUTION: A vacuum lamination apparatus 6 having a vacuum chamber, in which an upper plate 1 having a flexible sheet 3 provided thereto and a lower plate 2 having a flexible sheet 4 provided thereto are arranged, is used to clamp a laminate 5 consisting the substrate 5a having unevenness and a film-like resin layer 5b between the upper and lower plates in the chamber under pressure. Thereafter, the obtained laminate 5 is subjected to face-copying processing while heated by a plane press device 9 having upper and lower press blocks.

Description

DETAILED DESCRIPTION OF THE INVENTION

[0001]

BACKGROUND OF THE INVENTION 1. Field of the Invention The present invention relates to a method for laminating a film-like resin layer 5b on a substrate 5a having irregularities in the manufacture of a printed circuit board. The present invention relates to a laminating method which is excellent in uniformity of film thickness after lamination and surface mirror surface property and is useful for a build-up method.

[0002]

2. Description of the Related Art In recent years, with the miniaturization and high performance of electronic devices, printed circuit boards have been increased in density and multilayered. In such a multilayer printed circuit board, a thermosetting resin composition or a photosensitive resin composition is used as an insulating layer, and the thermosetting resin composition or the photosensitive resin composition is formed on a previously formed inner layer circuit. Or a film-like resin layer composed of the thermosetting resin composition or the photosensitive resin composition is laminated. On one side of such a film-like resin layer,
Normally, copper foil and support film (separator film) are laminated. In the case of copper foil, it is half-etched or whole-surface etched, and in the case of support film, it is peeled off and then drilled by laser or ultraviolet rays. Thereafter, a method of forming a circuit by performing copper plating and then performing patterning by light again using a photoresist film, that is, a so-called build-up method has been effectively used.

[0003] On the other hand, although there is no description that it is used in a build-up method, Japanese Patent Application Laid-Open No. H11-129431 discloses a conventional method of attaching a film to a substrate. And put
The continuous film-shaped carrier is pulled and fed, and the stacked body and the stacked body are positioned between hot plates provided to face each other, and the stacked body and the laminated material are heated and pressed. A lamination method is disclosed.

[0004]

However, as described in the above publication, when a laminated body is manufactured by laminating a substrate having irregularities and a film-like resin layer by a laminating method,
Although the film-like resin layer surface of the laminate becomes smooth,
Since it does not follow the unevenness of the substrate, the thickness of the resin composition layer acting as an insulating layer laminated on the substrate (circuit) is not uniform, and in recent years high speed communication on the Internet and high speed processing of personal computers Also, it is inconvenient to use the substrate at a higher frequency.

[0005]

Means for Solving the Problems In view of such circumstances, the present inventors have made intensive studies and as a result, have found that the flexible sheet 3
Using a vacuum laminating apparatus 6 having a vacuum chamber in which an upper plate 1 provided with a flexible sheet 4 and a lower plate 2 provided with a flexible sheet 4 are provided, a substrate 5a having unevenness is formed between upper and lower plates in the chamber. Film-shaped resin layer 5
After pressing the laminated body 5 made of b, the obtained laminated body 5 is flattened while being heated by a flat press device 9 having upper and lower press blocks. It has been found that a laminate having excellent uniformity of the thickness of the resin composition layer laminated thereon can be obtained, and the present invention has been completed. In performing such surface profiling, the play of the connection between the press block and the actuator that operates the press block may be effectively used to perform the surface profiling with the inclination at the time of pressing the plane of the press block. However, it is particularly preferable to connect a swingable support point joint 10 to at least one of the upper and lower press blocks and connect the support point joint 10 by a hydraulic cylinder or an air cylinder 11 to operate the press block. preferable.

[0006] The above-mentioned surface profile processing refers to a work to be pressed, that is, a part of a press surface of a press block from a thick part of a substrate to a part of a press surface of a press block. To the press surface of the press block,
This is a process of pressing with a uniform pressure after pressing a press surface on the entire surface of the substrate. It is not possible to form an insulating resin to a uniform thickness in a shape along the thickness unevenness of the substrate by simple pressing.

[0007]

DETAILED DESCRIPTION OF THE PREFERRED EMBODIMENTS The laminating method of the present invention is characterized in that a specific vacuum laminating apparatus 6 is used to press the laminated body, and then the flattening apparatus 9 heats the laminated body to perform a leveling process. It is assumed that.

Hereinafter, the present invention will be described in detail with reference to FIGS. First, the vacuum laminating apparatus 6 and the flat press apparatus 9 used in the present invention will be described with reference to FIG. In FIG. 1, the vacuum laminating apparatus 6 and the plane press apparatus 9 are provided side by side, but the present invention is not limited to this, and each apparatus may be installed independently.

In the vacuum laminating apparatus 6, an upper plate 1 provided with a flexible sheet 3 and a lower plate 2 provided with a flexible sheet 4 are arranged in a vacuum chamber 6.
The flexible sheet 4 exists directly on the lower plate 2, and the flexible sheet 3 has a gap 12 formed between the upper plate 1 and the flexible sheet 3 at four edges thereof by holding down the sealing metal fittings 17. (Hereinafter, it may be simply referred to as the gap 12)
Is attached to the upper plate 1 so as to form the upper surface.
The upper plate 1 has an opening 14 that passes through the plate 1 (hereinafter, may be simply referred to as an opening 14).
Are arranged, and the pressure in the gap 12 is adjusted by the opening 14. When a gas or a liquid is introduced into the gap 12 through the opening 14, the flexible sheet 3 has a structure that expands like a balloon. The lower plate 2 includes the plate 2
An opening 15 that passes through the inside (hereinafter, may be simply referred to as an opening 15) is provided, and the opening 15 allows the flexible sheet 3, 4 to be positioned between the upper plate 1 and the lower plate 2 during sealing engagement. The pressure of the space 13 (hereinafter, may be simply referred to as the space 13) formed in the space is adjusted. In addition, a seal 16 is disposed on an end of the lower plate 2 to efficiently perform evacuation.

An upper press block 7 and a lower press block 8 are arranged in the flat press device 9, and the upper press block 7 is fixed to a column 34. The lower press block 8 can be moved up and down by attaching a guide 35 to the column 34.

The lower press block 8 is a press block operated by a swingable support point joint 10. The support point joint 10 is connected to a hydraulic cylinder or an air cylinder 11, and operates the press block by operating the hydraulic cylinder or the air cylinder 11 to perform a leveling process.

The lower press block 8 includes a press plate 30,
Heating layer 31 having a heater whose temperature can be controlled
(Hereinafter sometimes simply referred to as a heating layer 31) and a base layer 32.

When the laminated body 5 is to be surface-machined, a seal portion 22 is provided on at least one of a surface of the flat press device 9 in contact with the laminated body of the upper press block and a surface of the lower press block 8 in contact with the laminated body. When the blocks are sealed, a sealed space 19 (hereinafter sometimes simply referred to as a sealed space 19) is formed between the upper and lower press blocks. The upper press block is provided with an opening 20 passing through the press block, and the lower press block 8 is provided with an opening 21 passing through the press block. Air is sucked from the opening by a vacuum pump to form a closed space. 19
Is in a reduced pressure state.

In the present invention, it is preferable to use a transporting film 23 in order to transport the laminate 5 and remove seepage from the resin film-like resin layer 5b. For adjustment, an unwind roll 24 is located near the entrance to the vacuum chamber and a take-up roll 27 and nip roll 28 are located near the exit. Guide rolls 25 are arranged at various places along the passage line of the transport film 23 for guiding the tension of the transport film 23 and holding it in the air.

Next, the laminating method of the present invention is applied to the transfer film 2.
3 will be described in detail with reference to FIGS. Prior to the lamination method of the present invention, it is preferable that the substrate 5a having irregularities (hereinafter, may be simply referred to as the substrate 5a) and the film-like resin layer 5b are temporarily tentatively formed as a laminate 5 by an automatic sheet cut laminator or the like. . The structure of the laminated body 5 is such that the substrate 5a / the film-shaped resin layer 5
b, film resin layer 5b / substrate 5a / film resin layer 5b, etc.

First, the pressing operation by the vacuum laminating apparatus 6 will be described. The above-mentioned laminate is transported to the pressing position of the vacuum laminating apparatus 6 by the transport film 23. Thereafter, the lower plate 2 is lifted up to make a sealing engagement with the upper plate 1. The movement of the lower plate 2 is controlled by a hydraulic cylinder 17.

After the sealing agreement, the space 12 and the space 13
Is brought into a reduced pressure state. Specifically, suction is performed through the opening 12 of the upper plate 1 and the opening 13 of the lower plate 2, and the pressure in the gap 12 and the space 13 is reduced to 200 Pa or less, preferably 100 Pa or less. At 200 Pa or less, microvoids remain between the substrate 5a having irregularities and the film-like resin layer 5b, and the surface of the film-like resin layer 5b after lamination tends to have poor smoothness. Space part 1
When the pressure of 3 is reduced, the temperature of the space 13 is 40 ° C. to 1 ° C.
85 ° C is preferred, and more preferably 70 to 135 ° C.

Next, the pressing operation is started. First, the flexible sheet 3 is expanded downward by the pressure difference between the space 13 and the gap 12, and the substrate 5a having the unevenness and the film-like resin layer 5b are formed.
Paste. Specifically, the adjustment of the pressure difference may be performed by returning the pressure of the gap 12 to almost normal pressure and weakening the degree of decompression of the space 13 to 300 to 600 Pa. Good. The flexible sheet 3 expands downward due to the pressure difference, so that the substrate 5a and the film-like resin layer 5b come into light contact with each other.

Subsequently, the pressure in the gap 12 is increased. Specifically, the pressure of the gap 12 is set to 1.0 × 10 ^{5 to} 20 × 1.
0 ⁵ Pa, and the pressure in the space 13 is again increased to 200 P
a, the upper flexible sheet 3
Swells greatly downward, and the substrate 5a and the film-like resin layer 5
b is strongly pressed.

After the pressing, the openings 14 and 15 are released, the space 13 and the gap 12 are returned to the atmospheric pressure, and the lower plate 2 is moved downward away from the upper plate 1.
The stacking is completed by discharging from the pressing position. Laminated body 5 after pressing
Is discharged from the vacuum laminating apparatus 6.

While the method using the vacuum laminating apparatus 6 in which the lower plate 2 moves up and down and the flexible sheet 3 expands has been described, the upper plate 1 moves up and down and the flexible sheet 4 It is needless to say that those which expand are also within the scope of the present invention.

The flexible sheets 3 and 4 used in the vacuum laminating apparatus 6 are preferably heat-resistant and expandable.
For example, silicone rubber, fluorine rubber and the like can be mentioned. A film having a thickness of 1 to 10 mm is usually used. In addition, what put filler, fiber, foil, and a board inside the flexible sheets 3 and 4 can also be used.

Next, a description will be given of surface profiling by the flat press device 9. The laminate is placed on the lower breath block 8, and the lower press block 8 is moved up by the hydraulic cylinder 11 along the guide 35 to be brought into contact with the laminate 5. Thereafter, the lower press block 8 is operated.

With regard to such an operating method, it is preferable to install a swingable support point joint 10 on the press block, connect the support point joint 10 to a hydraulic cylinder or an air cylinder 11, and operate the press block. Hereinafter, this method will be described in detail.

Such a swingable support point joint 10
Although the connection between the press block and the breath block is not particularly limited, it is preferable that the center point of gravity in the plane of the press block and the center of gravity of one or a plurality of swingable support point joints 10 be aligned. The swingable support point joint 10 is preferably installed on the lower surface of the lower press block 8, and the distance between the lower press block 8 and the swingable support point joint 10 is preferably about 200 to 600 mm.

A support point joint 10 capable of swinging
There is also no particular limitation on the type of the roller, as long as the angle can be freely set and the head can be swung.Specifically, various shaft couplings, a freely swingable crank, a cylinder joint, and the like are used. A universal joint and a shaft joint using a ball bearing are preferable because they can be easily installed.

As such a shaft joint, it is preferable to use a joint which can freely swing and conduct shaft rotation without shaft rotation. For example, flexible shaft joints such as Iguchi flexible joints and luffer drink joints, angle joints, universal joints such as universal joints, hook joints and cardan joints, Clement joints, joints using ball bearings, ball joints (ball socket joints) Floating joints (floating connectors) can be used, and other joints that can freely swing and conduct shaft rotation can also be used without shaft rotation.

Such a swingable support point joint 10
The method of connection to the hydraulic cylinder or the air cylinder 11 is not particularly limited. For example, by attaching one swingable support point joint 10 to a press block and connecting it to one hydraulic cylinder or the air cylinder 11 Also, as shown in FIG. 2, a plurality of (mainly two) support point joints 10 capable of swinging are attached to the press block,
It may be connected to one hydraulic cylinder or one air cylinder 11 via a connection arm and one swingable connection joint 33. The swingable connection joint 33 is not particularly limited, but may be the same as the swingable support point joint 10 described above.

Also, contrary to FIG.
A plurality of hydraulic cylinders or air cylinders 11 are attached via a connecting arm (shape opposite to that of FIG. 2) and a plurality of oscillating connection joints 33. May be connected.

As described above, there are various connection methods, but it is preferable that the number of the hydraulic cylinders or the air cylinders 11 installed at the support point joint 10 capable of swinging is the same, and one is connected to each.

Such a swingable support point joint 10
Although the number of installations is not particularly limited, it is usually 1 to 9, and when the plan view of the press block is a rectangle or a square, four are placed at the four corners of the shape, and the four corners and the center of the shape are Are preferably arranged.

In operating the press block,
When the press block is large and heavy, it is connected to a hydraulic cylinder or an air cylinder 11 to adjust the press pressure, and has a hemispherical, cylindrical or conical tip. The auxiliary stay shaft 37 may be appropriately arranged.

In particular, in the case where there is only one swingable support point joint 10 connected to the press block, the lower press block 8 is leveled with an auxiliary stay shaft 37 having a hemispherical or cylindrical cylindrical tip. Sometimes it is useful to press the lower press block 8 (FIG. 3). For example, one swingable support point joint 10 is arranged at the center of the press block, and a hydraulic cylinder or an air cylinder 11 is arranged around the joint. A method of arranging the auxiliary stay shaft 37 connected to the second shaft is also useful.

As a method of operating the press block, it is preferable to control the operation of the hydraulic cylinder or the air cylinder 11 for operating the swingable support point joint 10, and in particular, the hydraulic pressure and flow rate of the hydraulic cylinder,
It is preferable to operate by varying the air pressure and the flow rate of the air cylinder by an oil supply source or an air supply source. Industrially, such a supply source is usually a hydraulic pump for a hydraulic cylinder, a compressed air pump for an air cylinder, and usually uses a hydraulic cylinder when the pressure is high and uses an air cylinder when the pressure is low. It is customary to use it.

Connection of a hydraulic pump to a hydraulic cylinder,
The method of connecting the compressed air pump to the air cylinder is not particularly limited. One pump may be used for one cylinder, and the pressure and flow rate of each may be controlled. When there are two or more, the timing of supply of oil or air to the hydraulic cylinder or air cylinder is shifted, and the film thickness uniformity tends to decrease. Therefore, the oil supply source (hydraulic pump) to the hydraulic cylinder must be one. Alternatively, it is possible to use an air cylinder as one air supply source (compressed air pump) and supply it to each cylinder through a pipe branched from such a supply source. Preferred in terms of surface.

In this way, the lower press block is applied by these cylinders in order from the place where the thickness of the substrate is thicker to the place where the thickness of the substrate is thinner, and is sandwiched between the upper and lower press blocks. A uniform resin thickness can be obtained along the thickness unevenness of the substrate.

Controlling the speed and applied pressure of these cylinders further enhances the effect of operation. For such control, a differential circuit or the like is used for a hydraulic cylinder, and a speed controller or booster is used for an air cylinder.

Usually, in the initial stage of the patterning process, it is preferable that the substrate is pressed at a low speed and a low pressure, and is pressed and held at a high pressure after the entire surface of the press surface hits the substrate surface. If necessary, the speed of these cylinders and the applied hydraulic pressure and air pressure may be controlled by a differential circuit, a speed controller or a booster. Further, a compliance module, a parallel clamp module, an anti-vibration rubber, and the like may be appropriately disposed on the base of the hydraulic cylinder or the air cylinder for stabilizing the pressure treatment.

As described above, as a method of performing the surface shaping, a method of controlling using a swingable support point joint and, in particular, using a hydraulic cylinder or an air cylinder has been described. A method in which a swingable support point joint is connected and controlled using a servomotor and a ball screw may be used, and it goes without saying that the method is within the scope of the present invention.

The method of heating the flat press device 9 is not particularly limited, but it is preferable to incorporate a temperature-controllable heater inside the press block. The heater may be an electric heater, a hot water pipe, a hot water pipe, a steam pipe, or a pipe or a liquid pool using an industrial heat medium such as Thermo-S, but is not particularly limited. Industrially, an electric heater, particularly a sheath (sheath) heater or a sheet heater is used because of its easy control. In addition, it is preferable to embed a temperature measurement sensor in the press block body for temperature control.

Surface profile processing conditions by the plane press 9
Is a pressure of 1.0 × 10^Five~ 5.0 × 10⁶Pa
Is preferable, and particularly preferably 2.0 × 10⁶~ 3.1 ×
10 ⁶Pa. Temperature can be 30-200 ° C
Preferably, it is particularly preferably 100 to 150 ° C. Or
The time of the treatment is not particularly limited, but is 20 to 200.
Seconds are industrially preferred.

The structure of the upper and lower press blocks is not particularly limited as long as it can be heated and is not distorted by the pressure treatment, but it is usually 350 to 950 mm in length and width and 15 in thickness.
0 to 350 mm is economical.

The surface on which the laminate of press blocks is pressed (hereinafter sometimes referred to as a pressed surface) is not particularly limited. For example, it is possible to apply a smooth hard heat-resistant plastic plate or a hard ceramic plate, but it is preferable to use a metal surface and the metal surface is treated to prevent rust or stainless steel. Preferably, the hardness is preferably HRC (Rockwell hardness) 50 degrees or more, and the roughness is preferably polished to 5 μm or less.

Further, it is preferable that a pre-squel (a pressure-sensitive paper manufactured by Fuji Photo Film Co., Ltd.) be sandwiched between the upper and lower press surfaces and pressed to uniformly apply pressure-sensitive coloring. Further, the press surface may be further subjected to a surface hardening process such as hard chrome plating, or may be subjected to a stain prevention process in which Teflon (registered trademark) resin is baked.

The structure of such a press block may be an integral body having a built-in heating device, or may be divided into several components. Usually, industrially, a press plate 30 having a press surface is used. , A heating layer 31 and a base layer 32. The press plate 30 is arranged so that it can be replaced when the press surface is scratched. The press plate 30 is usually made of iron or stainless steel having a thickness of 5 to 35 mm, and has a hard surface and is distorted or bent at the time of press. Those that do not are preferred.

The heating layer 31 having a heater whose temperature can be controlled is usually made of an aluminum-based metal or an iron-based metal and has a thickness of 35 to 80 mm, and several sheath (sheath-shaped) heaters are arranged inside. Is preferred. The base layer 32 is a reinforcing structural material, usually made of an iron-based metal, so as not to be distorted when pressurized.
In some cases, a support point joint 10 capable of swinging is installed on the back surface which is 50 mm and is opposite to the press surface.

Between the press plate 30 and the heating layer 31, if necessary, a sheet-like cushioning material or a liner shim adjusting layer can be appropriately disposed in order to increase the film thickness uniformity. Industrially, such a sheet-shaped cushion material is a rubber rubber sheet of fluoro rubber or silicon rubber,
Polyester films, various types of paper, and metal foils such as copper foils are used. In addition, although it does not care about shapes, such as a solid solid material, a foaming material, and a hollow balloon-like material, a thickness of 0.015 to 3 mm is preferable.

The liner shim adjusting layer is formed between the press plate 30 and the heating layer 31 in a bad place when a uniform state is poor when a pre-squel (pressure-sensitive paper manufactured by Fuji Photo Film Co., Ltd.) is sandwiched between the upper and lower breath surfaces and pressed. And a metal foil such as a polyester film, various types of paper, and copper foil. A thickness of 0.003 to 0.05 mm is preferable.

It is possible to arrange a sheet-like heat insulating material between the heating layer 31 and the base layer 32 if necessary. The sheet-like heat insulating material plays a role of reducing heat conduction in the press block, and usually uses a ceramic foam sheet or a gypsum board, and preferably has a thickness of 0.3 to 25 mm.

When the lower press block 8 is at the bottom, the guide 35 slides in parallel with the support 34 without backlash in order to further improve the effect of the present invention in the flattening process. It is preferable that the guide 35 has a structure in which the guide 35 forms a play with the column 34 immediately before the lower press block 8 presses. In practice, the guide 35 is extended in the sliding direction by widening the sliding groove in the column 34. 1 at right angles
More preferably, it can be moved by about mm.

In order to further enhance such an effect, it is preferable that a connection joint 33 capable of swinging be installed on the lower surface of the hydraulic cylinder or the air cylinder 11 and connected to a floor or an apparatus frame.

When the laminate 5 is subjected to plane processing, the laminate 5 may be subjected to such processing under atmospheric pressure as shown in FIG. 4, but is preferably performed under reduced pressure as shown in FIG. When the laminate is planarized by the flat press device 9, at least one surface of the flat press device 9 in contact with the upper press block laminate and the lower press block 8 in contact with the laminate is sealed. It is preferable to provide a portion 22 so that a sealed space is formed when the upper press block 7 and the lower press block 8 are sealed, and the space is preferably reduced in pressure. In particular, when the transport film 23 is used, a flat surface is formed. Prevention of wrinkling of transfer film 23 during surface profiling of press device 9, transfer film 23
The air pool generated at the time of pressing between the upper and lower press blocks can be prevented, and secondary microvoids and dents on the resin surface of the film-like resin layer 5b can be prevented.

Further, if necessary, the flat pressing device 9 includes:
B) By embedding the ultrasonic vibration device in the press block,
B) Applying a release spray or an antistatic spray to the surface of the press block where the laminate is pressed, or c) calculating the position of the press surface around the laminate on the press surface of the press block. Install liners and spacers that have a thickness and form shape, and d) process the upper and lower press surfaces like male (convex) female (concave) molds, e)
Attaching stoppers to the operating press block, f) pasting glassine paper, Kent paper, rubber rubber sheet, plastic plate, stainless steel plate, etc. as cushioning material on the press surface, and g) height position measuring sensors at the four corners of the press surface To control the feeding of the film 23 for precise control of the transport system in order to stop the laminated body 5 at a fixed position on the press surface, and to prevent vibration. For flat press 9
A) a blower is provided on the press surface to open the upper and lower press blocks immediately after the surface is machined;
Even if a spreading device such as an expander roll or a cross guider for removing wrinkles of the transporting film 23 is installed before the 3 enters the plane pressing device 9, a load cell may be embedded in a press block or the like to measure a pressing force. Good.

The flattening process may be performed while heating the flat pressing device 9 within 12 hours after the pressing process of the vacuum laminating device 6. However, it is preferable because the surface can be processed without being cooled down and the film thickness uniformity can be further improved. Particularly preferred is a laminating method in which the vacuum laminating apparatus 6 and the flat pressing apparatus 9 are integrated as shown in FIG. The body 5 is sandwiched between the transfer films 23 and sent to the flat pressing device 9, and the laminate 5 is surrounded by the resin extruded by pressing in the vacuum laminating device 6 and the transfer film 23, and the body 5 is vacuumed. It is more preferable because it is transported.

[0055] Thus, the flat body pressing device 9 and the laminated body 5
Is discharged, but is preferably cooled to about room temperature. When the transporting film 23 is used, it is sandwiched between the transporting film 23 in order to prevent a press mark (press mark) from remaining. Preferably, it is cooled while being cooled.

A cooling device 38 may be provided after the flat press device 9. Such a cooling device 38 is industrially sufficient with a cooler, a cool air fan using cold air using adiabatic expansion of air, a cool air air knife, a cooling roll through which cold water passes, or the like (FIG. 6). In addition, after peeling off the laminate and the transporting film after the flattening process by the flat pressing device 9, a peeling device 29 such as a peeling roll may be appropriately provided (FIGS. 4 and 6). If necessary, the laminate 5 may be subjected to cooling press working, aging treatment at room temperature, 160-210 ° C.
Heat curing in 0 to 200 minutes, curing by ultraviolet rays, exposure, hot pressing, punching, peeling of the support film by a peeler, laser processing, electroless plating, or the like may be performed.

Further, before carrying into the vacuum laminating apparatus 6, the surface of the substrate or the surface of the transfer film may be cleaned by a cleaner device such as a slightly adhesive roll or an ultrasonic cleaner. In addition, the transport film 2
A static elimination bar or the like may be installed in the film line 3.

Substrate 5a with unevenness used in the present invention
Although it is not particularly limited, a printed circuit board provided with a pattern of copper or the like is preferable, and a multi-layer board used in a pill-up method may be used. The thickness of the substrate is not particularly limited, but is preferably about 0.1 to 10 mm. The size in the vertical and horizontal directions is not particularly limited, either.
Those having a thickness of about 0 mm are preferable.

The film-like resin layer 5b is preferably composed of a resin composition and a support film (separator film) or copper foil. Such a resin composition is preferably a resin composition having an insulating property, a tackiness, an adhesive property, and a hot melt property, or a resin composition softening at a glass transition temperature or higher.

Examples of such a resin composition include a thermosetting resin composition mainly composed of an epoxy resin, and a photosensitive resin composition composed of a resin, an ethylenically unsaturated compound, and a photopolymerization initiator.

Examples of the support film (separator film) include a polyethylene terephthalate film, a polyethylene film, a polypropylene film, a polyvinyl alcohol film, a saponified ethylene vinyl acetate copolymer film and the like. The copper foil is not particularly limited, but is preferably one that can be dissolved by etching.

Commercial products for the build-up method of the film-like resin layer 5b (including those having a structure to which a protective film is attached) include BF series manufactured by Hitachi Chemical Co., Ltd.
L series, AS series, MCF series, MULTIPOSIT-9500 series manufactured by Shipley, Propicoat series manufactured by Nippon Paint Co., Probelec series manufactured by Ciba Specialty, Valux series manufactured by DuPont, PVI series manufactured by Taiyo Ink, HBI series, BUR series manufactured by Asahi Denka, ABF series manufactured by Ajinomoto, SB-R series manufactured by Tokyo Ohka, MR series manufactured by Mitsui Kinzoku, R series manufactured by Matsushita Electric Works, APL manufactured by Sumitomo Bakelite series,
Examples include a CAD series manufactured by Nikkan Corporation, a PCC series manufactured by Asahi Kasei Corporation, a CBR series, a CCL series, and a GMP series manufactured by Mitsubishi Gas Chemical Company. As resin layers for other uses, resin layers for photoresist films,
A resin layer for a solder resist mask film and a resin layer for a conform mask film are exemplified.

The surface or back surface of the film-like resin layer 5b is not particularly limited. However, it is preferable that the surface of the film-like resin layer 5b is matted so that air can escape well during lamination and microvoids are reduced. The mat treatment is not particularly limited, but preferably has an Rz of about 3 to 40 μm.

Here, in FIG. 1, when processing is performed by the vacuum laminating apparatus 6 and the flat press apparatus 9,
3 is used, the film may be used only when processed by the vacuum laminating apparatus 6, or the film may be used only when processed by the flat pressing apparatus 9. The transfer film 23 may be separately installed in the flat press device 9 and the flat press device 9 (FIG. 7).

The transport film 23 is not particularly limited, but may be a polyethylene terephthalate film, a polyethylene film, a polypropylene film, a nylon film, a polyimide film, a polystyrene film,
It is preferably one of fluorinated olefin films. The film thickness is preferably from 10 to 100 μm, more preferably from 20 to 50 μm. As the transporting film 23, a film having an accurate coating thickness is preferable, and a polyethylene terephthalate film is preferable. For example, a Lumirror film manufactured by Toray Industries, Inc. is used. In addition, these surfaces may be appropriately subjected to a mat treatment, a release treatment, an antistatic treatment, a corona treatment, etc. The mat treatment is useful for preventing air stagnation in a press, and the release treatment. It is useful for removing exuded resin, and antistatic treatment is useful for preventing dust adhesion troubles and film rebound troubles.

The surface of the transporting film 23 is not particularly limited, either.
For example, it is desirable to set the surface haze value (measured using an integrating sphere light transmittance measuring device) to about 5 to 40, since air can escape during lamination and microvoids are small.

The transporting film 23 can be reused by removing exuded and contaminated portions after use.
In addition, a process for removing exuded contaminated parts is provided, and it can be supplied continuously and reused in a rotary manner.

The conveyor 26 is used to carry the laminate 5 into and out of the vacuum chamber. The conveyor 26 may be a group of rotating rolls or an endless belt. The size of the conveyor 26 is 0.3 to 3 in length.
m, preferably 0.5 to 1.5 m, and the transport speed is usually 1 to 25 m / min. Furthermore,
After the conveyor 26 at the outlet, a splash prevention device is installed, a stocker for storing the pressed laminate 5 and a pressurizing device for improving the surface smoothness of the laminate 5 are arranged. Is also good.

In the conventional laminating method, as shown in FIG. 9, since the thickness of the resin composition layer laminated on the substrate is not constant (x ≠ Y), the insulation between the substrates differs when the substrates are laminated. However, in the present invention, the thickness of the resin composition layer laminated on the substrate is constant (x = Y) as shown in FIG.
This is a very effective device and method when laminating a polarizing plate with an adhesive or a retardation plate with an adhesive, or when laminating a dicing tape or a film with a hot-melt resin such as an IC card to various electronic substrates.

[0070]

The present invention will be specifically described below with reference to examples. Example 1 A vacuum laminating apparatus 6 and a plane pressing apparatus 9 as shown in FIG. 1 were used. First, a thermosetting resin composition (a glass transition temperature of 80 ° C.) made of an epoxy resin and a film-shaped resin layer 5b made of a polyethylene terephthalate film are applied to a substrate 5a.
And was temporarily fixed by an auto-cut laminator so that the resin surface (Rz: 3.5 μm) of the film-shaped resin layer 5b was in contact with the uneven surface of the substrate 5a.

The space was adjusted to 120 ° C. by a heater incorporated in the lower plate 2 in advance. After transporting the laminate 5 to the pressing position with the transport film 23 made of a polyethylene terephthalate film, the lower plate 2
, And after a sealing engagement with the upper plate 1, the pressure-reducing operation was started. Air is suctioned from the openings 14 and 15 by a vacuum pump, and the pressure in the gap 12 and the space 13 is reduced to 60 Pa, and the pressure is reduced for 50 seconds.
Is open to the atmosphere, the gap 12 is at atmospheric pressure, and the space 1
3 was set to 400 Pa, and the laminate 5 was lightly pressed with the flexible sheet 3 and the flexible sheet 4 made of silicone rubber having a thickness of 3 mm. 10 seconds later, the space was again set to 60 Pa
Compressed air is further injected through the opening 14 to make the gap 12 6 × 10 ⁵ Pa, the flexible sheet 3 is greatly expanded, and the laminate 5 is strongly pressed at 120 ° C. for 300 seconds. did. Next, the opening 13 was returned to the atmospheric pressure, the lower plate 2 was moved downward, and the pressed laminate 5 was discharged.

Subsequently, the laminate was transported to the flat press 9 by the transport film 23. The upper and lower press blocks in which the sheet-shaped heater layer 30 was previously adjusted to 140 ° C. were sealed by moving the lower press block 8 to the upper part. The openings 20 and 21 are sucked by a vacuum pump to reduce the pressure in the sealed space 19 to 1.0 × 10 ⁴ Pa. Then, the lower press block (HRC = 60 degrees, the roughness of the pressed surface 3 μm) 8 and 4 places The universal joint 10 is connected, and the four universal joints 10 are operated by one hydraulic cylinder 11 while the temperature is 140 ° C. and the pressure is 5.5 × 1.
0 ⁵ was surface profiling machining while heating for 80 seconds at Pa. The supply of hydraulic pressure to the four hydraulic cylinders 11 was made from one supply source 36. The following properties of the obtained laminate 5 were evaluated according to the following procedures.

(Followability) The surface of the laminate was observed, and a microscope was used to determine whether or not the film-like resin layer 5b was laminated along the irregularities of the substrate 5a having irregularities with a microscope of 250 times.・ ・ ・: The film-shaped resin layer 5b follows the unevenness and there is no microvoid. X: The film-shaped resin layer 5b does not follow the irregularities or has microvoids.

(Thickness uniformity) The thickness of the resin layer laminated on the convex surface of the following substrate was measured by observing the vertical cross section of the laminate with a cross section method using an electron microscope, and measuring the thickness of each layer. Was evaluated as follows. ◎: less than 0.5 μm ○: 0.5 to less than 1 μm Δ: less than 1 to 2 μm ×: more than 2 μm

(Surface Specularity) Reflected light of a fluorescent lamp hitting the substrate at an angle of 45 degrees with respect to the film-like resin surface of the laminate was visually observed and evaluated as follows.・ ・ ・: Near mirror surface. × ・ ・ ・ Not mirror

Example 2 In Example 1, the flat press 9 without the equipment for reducing the pressure was replaced with the one shown in FIG.

Example 3 Example 1 was carried out in the same manner as in Example 1 except that the universal connector 10 was replaced with a floating connector 10.

Comparative Example 1 In Example 1, there was no universal joint 10 and the hydraulic cylinder 11
However, the procedure was carried out in the same manner as in Example 1 except that it was directly connected to the lower press block 8.

Comparative Example 2 Example 1 was carried out in the same manner as in Example 1 except that the temperature for performing the leveling treatment by the flat press was set to 15 ° C. Table 1 shows the evaluation results of Examples 1 to 3 and Comparative Examples 1 and 2.

[0080]

[0081]

The present invention uses a vacuum laminating apparatus 6 having a vacuum chamber in which an upper plate 1 provided with a flexible sheet 3 and a lower plate 2 provided with a flexible sheet 4 are installed. After pressing the laminated body 5 composed of the substrate 5a having irregularities and the film-like resin layer 5b between the upper and lower plates in the chamber, the obtained laminated body 5 is heated by the flat press 9 having the upper and lower press blocks. Since the surface is processed, the film-like resin layer 5b has good followability, and the resin layer after lamination has excellent film thickness uniformity and excellent surface mirror finish. It is.

[Brief description of the drawings]

FIG. 1 is a main sectional view of a laminating apparatus used in a laminating method of the present invention.

FIG. 2 shows a type of a flat press 9 used in the laminating method of the present invention.

FIG. 3 is a type of a flat press 9 used in the laminating method of the present invention.

FIG. 4 is a main cross-sectional view of a laminating apparatus used in the laminating method of the present invention.

FIG. 5 is a type of press block of a flat press device 9 used in the laminating method of the present invention.

FIG. 6 is a schematic layout view of each device used in the laminating method of the present invention.

FIG. 7 is a schematic layout view of each device used in the laminating method of the present invention.

FIG. 8 is a schematic view of a laminate provided for the lamination method of the present invention.

FIG. 9 is a schematic view of a laminated body laminated by the laminating method of Comparative Example 1.

FIG. 10 is a schematic view of a laminated body laminated by the laminating method of the present invention.

[Explanation of symbols]

DESCRIPTION OF SYMBOLS 1 ... Upper plate 2 ... Lower plate 3 ... Flexible sheet attached to upper plate 4 ... Flexible sheet attached to lower plate 5 ... Laminated body 5a ... Substrate 5b ... film-like resin layer 6 ... vacuum laminating apparatus 7 ... upper press block 8 ... lower press block 9 ... plane press apparatus 10 ... swingable support point joint 10 11 ...・ Hydraulic cylinder or air cylinder 12 ・ ・ ・ Gap between upper plate and flexible sheet 13 ・ ・ ・ Space formed between flexible sheets 3 and 4 14 ・ ・ ・ Opening passing through upper plate Part 15: Opening passing through the lower plate 16: Seal 17: Stopper 18: Hydraulic cylinder or air cylinder 19: Density formed between upper and lower press blocks Space 20: Opening passing through upper press block 21: Opening passing through lower press block 8 22: Sealing 23: Film for conveyance 24: Roll-out roll 25: Guide roll 26: Conveyor 27: Take-up roll 28: Nip roll 29: Peeling device 30: Press plate 31: Heating layer having a heater whose temperature can be controlled 32: Base layer 33 ... swingable connection John int 34 ... pillar 35 ... guide 36 ... oil supply source or air supply source 37 ... auxiliary stay shaft 38 ... cooling device

──────────────────────────────────────────────────続 き Continued on the front page (51) Int.Cl. ⁷ Identification symbol FI Theme coat ゛ (Reference) B29C 43/58 B29C 43/58 H05K 3/46 H05K 3/46 G // B29K 101: 10 B29K 101: 10 B29L 31:34 B29L 31:34 F-term (reference) 4F202 AC03 AG01 AG03 AG27 AH36 AK05 AM32 AR02 AR06 AR20 CA09 CB01 CB26 CK43 CL02 CL12 CL17 CN01 CN18 CN21 CN27 CP02 CP07 CQ01 CQ06 4F204 AC03 AG01 AR03 AR05AR FA13 FA16 FB01 FB24 FF01 FF50 FG02 FG05 FH06 FH10 FJ29 FN08 FN11 FN12 FQ02 FQ12 FQ15 FQ17 FQ23 FQ38 FQ40 FW26 5E346 EE01 EE14 GG28 HH11

Claims (12)

[Claims] 1. A vacuum laminating apparatus 6 having a vacuum chamber in which an upper plate 1 provided with a flexible sheet 3 and a lower plate 2 provided with a flexible sheet 4 is provided. After pressing the laminated body 5 composed of the substrate 5a having the unevenness and the film-like resin layer 5b between the plates, the obtained laminated body 5 is placed on the upper and lower sides by using a flat pressing device 9 having upper and lower press blocks. A laminating method characterized in that a surface is machined while being heated between press blocks. 2. A swingable support point joint 10 is attached to at least one of the upper and lower press blocks, and the support point joint 10 is connected to a hydraulic cylinder or an air cylinder 11 to operate the press block. The lamination method according to claim 1, wherein: 3. The laminating method according to claim 1, wherein the swingable support point joint is a shaft joint. 4. The laminating method according to claim 1, wherein the number of the pivotable support point joints 10 and the number of hydraulic cylinders or air cylinders 11 are the same. 5. The laminating method according to claim 1, wherein one oil supply source to the hydraulic cylinder or one air supply source to the air cylinder is provided. 6. The press block having a heater capable of controlling the temperature inside the press block.
5. The lamination method according to any one of 5. 7. The laminating method according to claim 1, wherein the press block comprises a press plate 30, a heating layer 31 having a heater whose temperature can be controlled, and a base layer 32. 8. The pressure and temperature applied to the laminate during the leveling process by the flat pressing device 9 are 1.0 × 10 ^{5 to} 5.1 ×.
The lamination method according to any one of claims 1 to 7, wherein the temperature is 10 ⁶ Pa and 30 to 200 ° C. 9. The laminating method according to claim 1, wherein a transport film for sandwiching the laminated body is disposed below the flexible sheet and above the flexible sheet. . 10. When the stacked body 5 is pressed by the vacuum stacking apparatus 6, the stacked body 5 is placed between the upper plate 1 and the lower plate 2, and the upper plate 1 and the lower plate 2 are sealed. Then, after the space 13 formed between the upper and lower plates and the gap 12 formed between the upper plate 1 and the flexible sheet 3 are reduced in pressure to 200 Pa or less, the reduced pressure in the gap 12 is released. The pressure is further set to 1.0 × 10 ^{5 to} 2.0 × 10 ⁶ Pa to expand the flexible sheet 3 and press the laminate 5. The lamination method according to any one of the above. 11. When the laminate 5 is leveled by the flat press device 9, at least one of a surface of the flat press device 4 contacting the laminate of the upper press block and a lower press block 8 contacting the laminate. A closed space is provided between the upper press block and the lower press block 8 when the upper press block and the lower press block 8 are sealed.
The laminating method according to claim 1, wherein the pressure is reduced to 10 ⁴ Pa or less. 12. The method according to claim 1, wherein the film-like resin layer is an insulating material, and the flattening is performed by the flat press within at least 15 minutes after the pressing by the vacuum laminating apparatus. 12. The lamination method according to any one of 11).