CN101872529B - 用于晶圆加工设备的晶圆突片告警系统 - Google Patents
用于晶圆加工设备的晶圆突片告警系统 Download PDFInfo
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- CN101872529B CN101872529B CN2009100571295A CN200910057129A CN101872529B CN 101872529 B CN101872529 B CN 101872529B CN 2009100571295 A CN2009100571295 A CN 2009100571295A CN 200910057129 A CN200910057129 A CN 200910057129A CN 101872529 B CN101872529 B CN 101872529B
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CN2009100571295A CN101872529B (zh) | 2009-04-24 | 2009-04-24 | 用于晶圆加工设备的晶圆突片告警系统 |
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CN2009100571295A CN101872529B (zh) | 2009-04-24 | 2009-04-24 | 用于晶圆加工设备的晶圆突片告警系统 |
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CN101872529A CN101872529A (zh) | 2010-10-27 |
CN101872529B true CN101872529B (zh) | 2012-08-01 |
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Families Citing this family (4)
Publication number | Priority date | Publication date | Assignee | Title |
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CN102222603B (zh) * | 2011-03-10 | 2016-01-27 | 上海华虹宏力半导体制造有限公司 | 晶圆检测系统 |
CN108962804B (zh) * | 2017-05-19 | 2021-08-10 | 沈阳芯源微电子设备股份有限公司 | 一种不间断式进片回片装置及控制方法 |
CN112242313B (zh) * | 2019-07-16 | 2021-11-16 | 上海先进半导体制造有限公司 | 刻蚀机防止撞片的检测方法及系统 |
CN110459499B (zh) * | 2019-08-16 | 2021-09-17 | 上海知昊电子科技有限公司 | 一种晶圆位置侦测系统 |
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Owner name: SHANGHAI HUAHONG GRACE SEMICONDUCTOR MANUFACTURING Free format text: FORMER OWNER: HUAHONG NEC ELECTRONICS CO LTD, SHANGHAI Effective date: 20131216 |
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Free format text: CORRECT: ADDRESS; FROM: 201206 PUDONG NEW AREA, SHANGHAI TO: 201203 PUDONG NEW AREA, SHANGHAI |
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TR01 | Transfer of patent right |
Effective date of registration: 20131216 Address after: 201203 Shanghai city Zuchongzhi road Pudong New Area Zhangjiang hi tech Park No. 1399 Patentee after: Shanghai Huahong Grace Semiconductor Manufacturing Corporation Address before: 201206, Shanghai, Pudong New Area, Sichuan Road, No. 1188 Bridge Patentee before: Shanghai Huahong NEC Electronics Co., Ltd. |