CN101865972A

CN101865972A - Detector

Info

Publication number: CN101865972A
Application number: CN 200910134960
Authority: CN
Inventors: 杨天德
Original assignee: MJC Probe Inc
Current assignee: MJC Probe Inc
Priority date: 2009-04-15
Filing date: 2009-04-15
Publication date: 2010-10-20
Anticipated expiration: 2029-04-15
Also published as: CN101865972B

Abstract

The invention discloses a detector, which mainly comprises a base, a wedge-shaped block arranged on the base, a limiting mechanism arranged on one side of the base, a bearing table having a bearing support which is arranged on the limiting mechanism, a slide track set arranged between the bearing support and the wedge-shaped block and a driver, wherein the limiting mechanism is arranged for limiting the vertical displacement of the bearing support, and the driver is arranged for driving the horizontal displacement of the wedge-shaped block and driving the vertical displacement of the bearing support via the slide track set. Due to the designs of the bearing support and the wedge-shaped block and the collocation of the slide track set, the loading capacity of the bearing table is increased, deformation is avoided, and the adjustment on the parallelism of the bearing table is facilitated.

Description

Sniffer

Technical field

The present invention relates to a kind of sniffer, refer to a kind of sniffer that is used for semiconductor and light emitting diode especially.

Background technology

Semiconductor and light-emitting diodes pipe manufacturer mainly can be divided into integrated circuit (IC) design (1C Design), silicon wafer process (Wafer Fabrication), wafer sort (Wafer Probe) and wafer encapsulation main processing procedures such as (Packaging), and wafer must be through repeatedly test, and for example tests such as circuit turn-on state, aging, high temperature can be guaranteed its quality.Wherein, sniffer promptly is in order to survey wafer.

See also the structural representation of a kind of existing sniffer shown in Figure 1, described sniffer 10 has a bracing frame 11, be provided with a probe 12 at support frame as described above 11 tops, be provided with a plurality of probes 121 in described probe 12 bottoms, be provided with a plummer 13 in the described probe of wafer device 10, put wafer 15 again on described plummer 13, described plummer 13 can be made X, Y, three of Z move, adjusting wafer 15 positions, and drive described wafer 15 and rise and contact with probe 121.

Under the ideal state, when plummer 13 drives wafer 15 risings, described a plurality of probe 121 should contact simultaneously with the contact mat (not shown) on the corresponding wafer 15, so that wafer 15 is tested, for adjusting the depth of parallelism of 121 of described plummer 13 and probes, general dealer is arranged at described plummer 13 on a plurality of lead screws 131, with foundry goods plummer 13 and lead screw 131 bags are made as one again, in order steadily to support described plummer 13, four lead screws 131 must be set at least, therefore bulky, take up space, and the adjustment mode complexity of described lead screw 131, difficult and consuming time, in addition, described lead screw 131 is usually by motor and belt drives, and there is flexible problem in belt, when belt bears high loading, then can influence the accuracy of actual adjustment height.Moreover, if the support strength deficiency of lead screw 131 itself will cause lead screw 131 distortion, influence the flatness of plummer 13.Last then be that the fiduciary level of lead screw 131 is not good, cause the precise decreasing of plummer 13 flatnesses easily.

With regard to patent, No. the 91133971st, known tw Taiwan application for a patent for invention " in semiconductor robotization wafer sort, guaranteeing the consistance apparatus and method that probe is parallel to wafer; the probe measurement system; reach the manufacturing of probe ", this case discloses a kind of technological means of utilizing the optics target detecting probe and the wafer depth of parallelism, yet the cost of described method and system is high.

Summary of the invention

Because the disappearance of prior art, the present invention proposes a kind of sniffer, can improve the plummer loading capacity, avoids distortion, and helps adjusting the plummer depth of parallelism.

For achieving the above object, the present invention proposes a kind of sniffer, it mainly is by a base, one wedge type piece, one position limiting structure, one plummer, one slide rail set and a drive unit constitute, described wedge type piece is arranged on the described base, described position limiting structure is arranged at a side of described base, described plummer has a carrying bearing, described carrying bearing is arranged on the described position limiting structure, described position limiting structure is in order to limit the perpendicular displacement of described carrying bearing, described slide rail set is arranged between described carrying bearing and the described wedge type piece, described drive unit is in order to driving the horizontal shift of described wedge type piece, and drives the perpendicular displacement of described carrying bearing by described slide rail set.

Beneficial effect of the present invention is: because the design of carrying bearing and wedge type piece and collocation slide rail set can improve the plummer loading capacity really, avoid distortion, and help adjusting the plummer depth of parallelism.

Description of drawings

Fig. 1 is the structural representation of existing sniffer.

Fig. 2 is the three-dimensional structure diagram of the embodiment of the invention.

Fig. 3 is the front view of Fig. 2.

Fig. 4 is the right side view of Fig. 2.

Description of reference numerals: 10-sniffer; The 11-bracing frame; The 12-probe; The 121-probe; The 13-plummer; The 131-lead screw; The 15-wafer; The 20-sniffer; The 21-base; The 22-wedge; The 23-position limiting structure; The 24-plummer; The 241-load bearing seat; 242-carries bearing; The 25-slide rail set; 25a-first guide rail; 25b-second guide rail; The 26-slide rail set; 26a-first guide rail; 26b-second guide rail; The 27-drive unit; 281-first inclined-plane; 282-second inclined-plane; A, B, C-direction.

Embodiment

Describe the present invention for reaching employed technological means of purpose and effect hereinafter with reference to accompanying drawing, and following graphic cited embodiment only is an aid illustration, understands, but that the technological means of this case is not limited to is cited graphic in order to your auditor.

See also Fig. 2 to sniffer 20 example structure shown in Figure 4, proposed by the invention, it comprises a base 21, a wedge 22, a position limiting structure 23, a plummer 24 and a slide rail set 25.

Wedge 22 is set on base 21, carries out horizontal shift at base 21 for wedge 22.Position limiting structure 23 is arranged on a side of base 21, and is fixed on the base 21.Plummer 24 comprises a load bearing seat 241 and a carrying bearing 242 two parts, and load bearing seat 241 is fixedly set in the top of carrying bearing 242, and a side of carrying bearing 242 is arranged on the position limiting structure 23.Slide rail set 25 then is arranged between wedge 22 and the carrying bearing 242.

One slide rail set 26 is set on base 21, be arranged on the base 21 for wedge 22, slide rail set 26 is to be made of the first guide rail 26a and the second guide rail 26b that can cooperatively interact and slide relatively, wherein the first guide rail 26a is arranged on the base 21, the second guide rail 26b is arranged at wedge type piece 22 bottoms, by the setting of slide rail set 26, can make wedge 22 carry out horizontal shift, the displacement of promptly parallel base 21 directions.None fixed limit system of quantity that is provided with of slide rail set 26, but with good to being called, for example present embodiment is provided with two groups of slide rail set 26, and two groups of slide rail set 26 are symmetricly set in the both sides (as shown in Figure 4) of position limiting structure 23.The kind of slide rail set 26 or kenel are also unrestricted, can adopt load capacity, precision and the high ball slide rail (RollerLinear Slide) of stability, or a turtledove shape rail and turtledove shape groove collocation formation.

Because a side of carrying bearing 242 is arranged on the position limiting structure 23, promptly position limiting structure 23 is located at carrying bearing 242 outsides, can limit the unlikely generation horizontal shift of perpendicular displacement of carrying bearing 242, so plummer 24 can only carry out perpendicular displacement.The kind of position limiting structure 23 or kenel is set there is no certain limitation, position limiting structure 23 can be a fixed block, or can between

position limiting structure

23 and 242 corresponding of bearings of carrying, the slide rail that can cooperatively interact be set, and the moving direction of slide rail is perpendicular to the load bearing seat 241 of plummer 24, for example can adopt load capacity, precision and the high ball slide rail of stability, or a turtledove shape rail and turtledove shape groove collocation formation.

Position limiting structure 23 can be along with wedge 22 and plummer 24 move, and by the setting of position limiting structure 23, can not limit carrying bearing 242 and can't produce horizontal shift, that is plummer 24 can only be done vertically to height control, that is described direction C shown in Figure 3; What must emphasize is that the height adjustment range of plummer 24 is minimum, is unlikely to produce the situation that causes position limiting structure 23 distortion because carrying bearing 242 horizontal shifts distance is excessive.

The load bearing seat 241 of plummer 24 is to survey object in order to the carrying desire, when plummer 24 is applied to probe of wafer, wafer is positioned on the load bearing seat 241, and carrying bearing 242 carries out the displacement of vertical direction, contacts with the probe (not shown) with the setting of sniffer 20 tops and carries out probe of wafer.The present invention is applicable to various high loadings and the strict sniffer plummer of levelness, is not limited to the probe of wafer device.

Carrying bearing 242 presents wedge type wide at the top and narrow at the bottom, wedge type piece 22 presents up-narrow and down-wide wedge type, carrying bearing 242 has one first inclined-plane 281, wedge type piece 22 has one second inclined-plane 282, first inclined-plane 281 roughly is connected to second inclined-plane 282, promptly first inclined-plane 281 be with second inclined-plane 282 mutually against.Wedge type piece 22 connects a drive unit 27, and by the setting of slide rail set 26, drive unit 27 can drive wedge type piece 22 and move back and forth, and drive unit 26 can adopt motor, lead screw or devices such as belt, chain, but is not limited thereto.

Slide rail set 25 is to be made of the first guide rail 25a and the second guide rail 25b that can cooperatively interact and slide relatively, slide rail set 25 is arranged between carrying bearing 242 and the wedge type piece 22, wherein the first guide rail 25a is arranged at carrying bearing 242 bottoms, the second guide rail 25b is arranged at wedge type piece 22 tops, setting by slide rail set 25, can make carrying bearing 242 carry out relative motion, and described direction of motion is the gradient (that is direction B as shown in Figure 3) that is roughly parallel to first inclined-plane 281 or second inclined-plane 282 with wedge type piece 22; None fixed limit system of quantity that is provided with of slide rail set 25, but with good to being called, for example present embodiment is provided with two groups of slide rail set 25, and two groups of slide rail set 25 are symmetricly set in the both sides (as shown in Figure 4) of position limiting structure 23.As shown in Figure 3, when drive unit 26 drives wedge type pieces 22 when direction A moves, can drive carrying bearing 242 synchronously moves along direction B, direction B has a gradient, therefore can make and carry bearing 242 generation level simultaneously and perpendicular displacement in moving process, because setting between

position limiting structure

23 and 242 corresponding of the bearings of carrying, making carrying bearing 242 drive load bearing seat 241 in moving process moves along direction C, the kind of slide rail set 25 or kenel are also unrestricted, can adopt load capacity, precision and the high ball slide rail of stability, or a turtledove shape rail and turtledove shape groove collocation formation.

Secondly, in sum, sniffer provided by the invention because the design of carrying bearing and wedge type piece and collocation slide rail set can improve the plummer loading capacity really, is avoided distortion, and is helped adjusting the plummer depth of parallelism.

More than explanation is just illustrative for the purpose of the present invention, and nonrestrictive, those of ordinary skills understand; under the situation of the spirit and scope that do not break away from following claims and limited, can make many modifications, change; or equivalence, but all will fall within the scope of protection of the present invention.

Claims

1. sniffer is characterized in that it comprises:

One base;

One wedge type piece is arranged on the described base;

One position limiting structure is arranged at a side of described base;

One plummer has a carrying bearing, and described carrying bearing is arranged on the described position limiting structure, and described position limiting structure is in order to limit the perpendicular displacement of described carrying bearing;

One slide rail set is arranged between described carrying bearing and the described wedge type piece;

One drive unit in order to driving the horizontal shift of described wedge type piece, and drives the perpendicular displacement of described carrying bearing by described slide rail set.

2. sniffer as claimed in claim 1 is characterized in that, described carrying bearing is the wedge type bearing.

3. sniffer as claimed in claim 1 is characterized in that, described slide rail set is a ball slide rail.

4. sniffer as claimed in claim 1 is characterized in that, described slide rail set is that a turtledove shape rail and turtledove shape groove collocation form.

5. sniffer as claimed in claim 1 is characterized in that, described wedge type piece has one first inclined-plane, and described carrying bearing has one second inclined-plane, described first inclined-plane and described second inclined-plane mutually against.

6. sniffer as claimed in claim 1 is characterized in that, described base has one second slide rail set, and described wedge type piece is arranged on described second slide rail set.

7. sniffer as claimed in claim 6 is characterized in that, described second slide rail set is a ball slide rail.

8. sniffer as claimed in claim 6 is characterized in that, described second slide rail set is that a turtledove shape rail and turtledove shape groove collocation form.

9. sniffer as claimed in claim 1 is characterized in that, described position limiting structure is located at the described carrying bearing outside.

10. sniffer as claimed in claim 2 is characterized in that, described wedge type bearing presents wedge type wide at the top and narrow at the bottom, and described wedge type piece presents up-narrow and down-wide wedge type.

11. sniffer as claimed in claim 1 is characterized in that, described position limiting structure is a slide rail.