CN202066940U - Semiconductor tester and semiconductor testboard thereof - Google Patents
Semiconductor tester and semiconductor testboard thereof Download PDFInfo
- Publication number
- CN202066940U CN202066940U CN 201020663768 CN201020663768U CN202066940U CN 202066940 U CN202066940 U CN 202066940U CN 201020663768 CN201020663768 CN 201020663768 CN 201020663768 U CN201020663768 U CN 201020663768U CN 202066940 U CN202066940 U CN 202066940U
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- guide rail
- drive unit
- semiconductor
- stage apparatus
- platform
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Abstract
The utility model relates to a semiconductor tester and a semiconductor testboard thereof. The utility model provides a semiconductor testboard including a platform appliance, a guide rail appliance used to limit the platform equipment in two horizontal directions which are mutually orthogonal and a drive appliance used to drive the platform appliance move along the guide rail appliance. In this way, the reliability of matching testing pins and to-be-tested articles one by one can be effectively improved. The utility model also provides a semiconductor tester including the above semiconductor testboard. By using the semiconductor tester in the utility model, the problem that upward and downward shift of the testboard causes an interruption of an internal line is avoided, thereby avoiding irreparable damages of testing pins caused by dismounting the testboard.
Description
Technical field
The utility model relates to the semiconductor test field, relates to a kind of semiconductor test platform more specifically, and the utility model also relates to a kind of semi-conductor test instrument that comprises above-mentioned semiconductor test platform.
Background technology
Along with expanding economy, semiconductor product has entered into the every aspect of people's life, and simultaneously, the semiconductor test technology also reaches its maturity.
At present, the tester that is used for semiconductor elements such as test diode, triode on the market comprises cover plate and is arranged at the test bench of this cover plate lower surface, be arranged on this test bench with the some testing needles that reach test purpose by contacting, and the testing needle vertical direction is provided with body to be measured.Test board is arranged at the below of above-mentioned test bench.Some bodies to be measured closely are arranged on the template of ccontaining body to be measured, then this template are placed the upper surface of test board.Before the test, need the artificial template position that is equipped with body to be measured of adjusting, so that the contraposition one by one of body to be measured and testing needle.Then, drive test bench and descend, fully contact with body to be measured until testing needle.
Obviously, before semi-conductor test instrument of the prior art was tested body to be measured, operating personnel need adjust the particular location of template in surface level that is equipped with body to be measured.Yet, the particular location of dependence manual setting template, the precision that staff can be controlled is uncertain, and error ratio is bigger.Testing needle and body to be measured are realized contraposition one by one than difficulty, thereby, often cause body to be measured to be stuck between two testing needles or testing needle is dialled the disorderly problems such as putting position of body to be measured.
In addition, from the above, test board maintains static, and testing needle and contacting of body to be measured are the mobile realizations by the test bench vertical direction.Circuit on the test bench is arranged quite complicated, and moving up and down of test bench causes problems such as line interruption easily.And after this problem occurring, be more loaded down with trivial details, need the dismounting testing needle to finish, and the process of dismounting testing needle have the destructiveness that can not repair to it the maintenance and inspection of test bench.
Therefore, how to improve testing needle and the body to be tested reliability of contraposition one by one, become present technique field personnel important technological problems to be solved.
The utility model content
In view of this, the purpose of this utility model provides a kind of semiconductor test platform, this semiconductor test platform can significantly improve testing needle and the body to be tested reliability of contraposition one by one, and another purpose of the present utility model provides a kind of tester that comprises above-mentioned semiconductor test platform.
The semiconductor test platform that the utility model provides comprises stage apparatus, described stage apparatus is limited to the track-type facilities of two levels and orthogonal direction and drives the drive unit of described stage apparatus along described track-type facilities displacement.
Preferably, described track-type facilities is specially and is horizontally disposed with and orthogonal first guide rail and second guide rail, described first guide rail slidably is arranged at the upper surface of described second guide rail that fixedly installs, and described stage apparatus slidably is arranged at the upper surface of described first guide rail; And described drive unit comprises and drives described stage apparatus along first drive unit of the described first guide rail straight-line displacement and drive second drive unit of described first guide rail along the described second guide rail straight-line displacement.
Preferably, described stage apparatus comprises chassis, hoistable platform, is arranged between described chassis and the described hoistable platform and the upright guide rail of fixedlying connected with described chassis and drive three drive unit of described hoistable platform along described upright guide rail upper and lower displacement; And described chassis is connected with the clutch end of described first drive unit.
Preferably, the lower surface of described first guide rail is provided with first slide block, the upper surface of described second guide rail is provided with and the first suitable chute of described first slide block, and described first guide rail slidably is connected in the upper surface of described second guide rail by suitable described first slide block and described first chute.
Preferably, the lower surface on described chassis is provided with second slide block, the upper surface of described first guide rail is provided with and the second suitable chute of described second slide block, and described chassis slidably is connected in the upper surface of described first guide rail by suitable described second slide block and described second chute.
Preferably, also comprise being parallel to the supplemental support slide rail that described second guide rail is provided with, and described first guide rail slidably is arranged at the upper surface of described supplemental support slide rail.
Preferably, described first drive unit, described second drive unit and described the 3rd drive unit are linear motor.
Preferably, described first drive unit, described second drive unit and described the 3rd drive unit all are specially the drive unit that comprises hydraulic pump and the hydraulic cylinder of oil pressure is provided by described hydraulic pump.
The utility model also provides a kind of semi-conductor test instrument, comprise cover plate, test bench and be fixedly set in the testing needle of the lower surface of described test bench, described test bench is fixedly set in the below of described cover plate, and the below of described test bench is provided with above-mentioned each described semiconductor test platform.
Preferably, described cover plate be provided with judge described testing needle whether with the body to be measured optical detection device of contraposition mutually, described semi-conductor test instrument comprises that also the judgement signal that described optical detection device is provided deals with and form control signal to control the signal processing apparatus of three described linear motors.
Semiconductor test platform provided by the utility model comprises stage apparatus, track-type facilities and drive unit.The template that is equipped with some bodies to be measured places the upper surface of this stage apparatus, and stage apparatus is subjected to the constraint of track-type facilities can only be along level and orthogonal both direction straight-line displacement, and described drive unit provides the driving force of described stage apparatus displacement.So be provided with, stage apparatus is subjected to the constraint of track-type facilities, perpendicular both direction displacement in surface level only, with respect to prior art, it is the degree of freedom that rotating shaft is rotated with vertical straight line that the utility model has limited stage apparatus fully, thereby has effectively limited the rotation of body to be measured at this stage apparatus.On above-mentioned basis, the utility model replaces people's manual manipulation in the prior art with drive unit, thereby has effectively improved the drive displacement precision, can effectively evade the defective that the staff performance accuracy is uncertain, error ratio is bigger.So, can significantly improve testing needle and the body to be tested reliability of contraposition one by one.
The utility model also provides a kind of semi-conductor test instrument, comprise that cover plate, lower surface are provided with the test bench of some testing needles, this test bench is fixedly set in the below of described cover plate, and the lower surface of described test bench is corresponding with above-mentioned any semiconductor test platform.So be provided with, test bench fixedly installs, but with respect to test bench upper and lower displacement in the prior art, its inner circuit has avoided producing because of the upper and lower displacement of test bench the problem of interruption, thereby has effectively avoided because of dismantling the damage that can not repair that test bench brings testing needle.
Description of drawings
Fig. 1 is the structural representation of semiconductor test platform described in the embodiment;
Fig. 2 is the portion of test board A described in an embodiment structure for amplifying synoptic diagram;
Fig. 3 is a semi-conductor test instrument structural representation described in the embodiment.
Embodiment
Core of the present utility model provides a kind of semiconductor test platform, and it can effectively improve testing needle and the body to be measured reliability of contraposition one by one, and the utility model also provides a kind of semi-conductor test instrument that comprises this semiconductor test platform.
In order to make present technique field personnel better understand the utility model scheme, the present invention is described in further detail below in conjunction with the drawings and specific embodiments.
Please refer to Fig. 1, Fig. 1 is the structural representation of semiconductor test platform described in the embodiment.
The semiconductor test platform that is provided in this embodiment has stage apparatus 11, track-type facilities 12 and drive unit (not shown).The effect that it is pointed out that this track-type facilities 12 is that restriction stage apparatus 11 makes it move along orthogonal both direction only in surface level.The platform surface 111 of stage apparatus 11 is used to prop up the template (not shown) that is equipped with some bodies to be measured.Stage apparatus 11 is provided by drive unit in the driving force that track-type facilities 12 produces displacement.
So be provided with, stage apparatus 11 is subjected to the constraint of track-type facilities 12, stage apparatus 11 perpendicular both direction displacement in surface level only, with respect to prior art, it is the degree of freedom that rotating shaft is rotated with vertical straight line that the utility model has limited stage apparatus 11 fully, thereby has effectively limited the rotation of body to be measured at this stage apparatus.On the basis of the above, the utility model replaces people's manual manipulation in the prior art with drive unit, it is to be noted, the technical field of relevant drive unit is ripe relatively, present technique field personnel can make the drive displacement of drive unit reach certain precision according to prior art fully, and this " certain precision " can be more accurate more than the precision that people manual manipulation reaches.So, can significantly improve testing needle and the body to be tested reliability of contraposition one by one.
This embodiment track arrangements 12 can be specially and be horizontally disposed with and orthogonal first guide rail 121 and second guide rail, 122, the first guide rails 121 slidably are arranged at the upper surface of second guide rail 122.The position that it is pointed out that second guide rail 122 is necessary for fixing, so, can guarantee that stage apparatus 11 displacements have certain precision.Connected mode between first guide rail 121 and second guide rail 122 can followingly be provided with, and the lower surface that second guide rail, 122 upper surfaces are provided with first chute, 1221, the first guide rails 121 is provided with the first slide block (not shown).It is to be noted; in order to guarantee the stability of first guide rail 121 in second guide rail, 122 upper surface slide; avoid problems such as rocking appears in first guide rail 121; can realize under the prerequisite that first guide rail 121 can normally slide, can two first chutes 1221 that are parallel to each other be set in second guide rail, 122 upper surfaces.Correspondingly, the quantity with suitable first slide block of first chute 1221 also can be two.Certainly, do not influencing under first guide rail, the 121 normal situations of sliding, the quantity of first chute 1221 and first slide block also can correspondingly increase.
So be provided with, stage apparatus 11 slidably is arranged at the upper surface of first guide rail 121, can implementation platform device 11 in surface level the moving of two orthogonal directions.As shown in the figure, stage apparatus 11 can horizontally slip on first guide rail 121, and simultaneously, stage apparatus 11 can realize that in the slip of second guide rail, 122 upper surfaces it seesaws by first guide rail 121.
It is pointed out that driving first guide rail 121 can be provided by the second drive unit (not shown) in the driving force of second guide rail, 122 upper surface slide.So be provided with, first guide rail 121 can be realized moving of second guide rail, 122 upper surfaces.
The semiconductor test platform that foregoing has been introduced in this embodiment to be provided can horizontal shift to realize the contraposition one by one of body to be measured and testing needle.Then, platform surface 111 parts of stage apparatus 11 need rise to realize contacting of body to be measured and testing needle, can realize test purpose.Following content will describe in detail to stage apparatus 11.
According to above content, stage apparatus 11 can slidably be arranged at the upper surface of first guide rail 121 by the chassis 112 and the implementation platform device 11 that matches of first guide rail 121, and its embodiment can be as described below.
Please refer to Fig. 2, Fig. 2 is the portion of test board A described in an embodiment structure for amplifying synoptic diagram.
The upper surface that the lower surface on chassis 112 can be provided with second slide block, 1121, the first guide rails 121 is provided with second chute 1211 suitable with this second slide block 1121.So, chassis 112 slidably is arranged at the upper surface of first guide rail 121 by second slide block 1121 and second chute 1211.Certainly; in order to increase the stability that stage apparatus 11 matches with first guide rail 121, second chute 1211 can be set to two chutes that are parallel to each other, certainly; also can only need to guarantee that stage apparatus 11 can normal the slip get final product at the upper surface of first guide rail 121 for a plurality of.
It is pointed out that stage apparatus 11 as shown in the figure can horizontally slip at the upper surface of first guide rail 121, first guide rail 121 can slide before and after the upper surface of second guide rail 122.For the friction force between the upper surface of the lower surface that reduces first guide rail 121 and second guide rail 122 can specifically be set to two guide rails the tabular structure of strip, to reduce the friction area between the two as far as possible.Yet, when stage apparatus 11 vertical directions be projected in the avris of second guide rail 122 time, the easy out of trim of test board and run-off the straight.
For addressing the above problem, can be parallel to second guide rail, 122 directions the upper surface that one supplemental support slide rail, 123, the first guide rails 121 slidably are supported in this supplemental support slide rail 123 is set.So be provided with, the stage apparatus 11 and first guide rail 121 can effectively be avoided the generation of tilt phenomenon.
It is to be noted, 112 relative first guide rails, 121 slips in chassis in this embodiment, hoistable platform 113 relative chassis 112 upper and lower displacements and first guide rail, 121 relative second guide rails 122 slide, its driving force is provided by corresponding first drive unit, the 3rd drive unit and second drive unit with it respectively, and these three kinds of drive units all can be the linear motor (not shown).The semiconductor test platform that it is pointed out that in this embodiment is provided can be controlled first guide rail 121, chassis 112 and hoistable platform 112 respectively to realize body (not shown) to be measured and the contraposition one by one of testing needle and contacting between the two by above-mentioned linear motor.Because in the prior art, the control accuracy of linear motor is more ripe, present technique field personnel can pass through existing techniques in realizing fully, so this embodiment repeats no more.
Certainly, above-mentioned three kinds of drive units also can be other drive unit, and the displacement that only needs accurately to control above-mentioned first guide rail 121, chassis 112 and hoistable platform 113 gets final product.Such as, above-mentioned three kinds of drive units also can be specially the hydraulic cylinder device (not shown) that hydraulic oil is provided by the hydraulic pump (not shown), drive the purpose that above-mentioned first guide rail 121, chassis 112 and hoistable platform 112 also can conveniently be realized its precise displacement by hydraulic cylinder device.
This embodiment also provides a kind of semi-conductor test instrument that comprises above-mentioned any semiconductor test platform.
Please refer to Fig. 3, Fig. 3 is a semi-conductor test instrument structural representation described in the embodiment.
This semi-conductor test instrument also comprises cover plate 13, test bench 14 and is arranged at the testing needle 141 of this test bench lower surface.The upper surface that it is pointed out that stage apparatus 11 is corresponding with the lower surface of test bench 14, and the stationkeeping of test bench 14.
So be provided with, test bench 14 fixedly installs, and body to be measured is realized with contacting by stage apparatus 11 displacements of testing needle 141.But with respect to test bench upper and lower displacement in the prior art, its inner circuit has avoided producing because of the upper and lower displacement of test bench 14 problem of interruption, thereby has effectively avoided because of dismantling the damage that can not repair that test bench 14 brings testing needle 141.
Semi-conductor test instrument provided in the present embodiment, also comprise optical detection device 15, this optical detection device 15 can be discerned the particular location of the body to be measured that places stage apparatus 11 upper surfaces, and can send the judgement signal, this optical detection device 15 can be communicated by letter is connected in the signal processing apparatus (not shown), this signal processing apparatus can be reacted according to the judgement signal that optical detection device 15 provides, and formation control signal, above-mentioned three linear motors can be communicated by letter is connected in this signal processing apparatus, thereby, realize that control to linear motor is to realize the contraposition one by one of body to be measured and testing needle 141.
So be provided with, when body to be measured and testing needle 141 contrapositions are inaccurate, optical detection device 15 sends judges that signal is to signal processing apparatus, signal processing apparatus forms three linear motors of control signal control and continues action, accurate until body to be measured and testing needle 141 contrapositions, optical detection device 15 sends judges signal to signal processing apparatus, and signal processing apparatus sends three linear motors of control signal control and stops action.So, can the replacement manually-operated be set by robotization fully, not only save manpower but also better realized bearing accuracy.Specifically how to implement as for optical detection device 15 and signal processing apparatus, prior art is ripe relatively, and those skilled in the art fully can be according to the existing techniques in realizing above-mentioned functions, so this paper repeats no more.
More than a kind of semi-conductor test instrument provided by the utility model and semiconductor test platform thereof are described in detail, used specific case herein principle of the present utility model and embodiment are set forth, the explanation of above embodiment just is used for helping to understand method of the present utility model and core concept thereof.Should be understood that; for those skilled in the art; under the prerequisite that does not break away from the utility model principle, can also carry out some improvement and modification to the utility model, these improvement and modification also fall in the protection domain of the utility model claim.
Claims (10)
1. a semiconductor test platform is characterized in that, comprises stage apparatus, described stage apparatus is limited to the track-type facilities of two levels and orthogonal sense of displacement and drives the drive unit of described stage apparatus along described track-type facilities displacement.
2. semiconductor test platform as claimed in claim 1, it is characterized in that, described track-type facilities is specially and is horizontally disposed with and orthogonal first guide rail and second guide rail, described first guide rail slidably is arranged at the upper surface of described second guide rail that fixedly installs, and described stage apparatus slidably is arranged at the upper surface of described first guide rail; And described drive unit comprises and drives described stage apparatus along first drive unit of the described first guide rail straight-line displacement and drive second drive unit of described first guide rail along the described second guide rail straight-line displacement.
3. semiconductor test platform as claimed in claim 2, it is characterized in that described stage apparatus comprises chassis, hoistable platform, be arranged between described chassis and the described hoistable platform and the upright guide rail of fixedlying connected with described chassis and drive three drive unit of described hoistable platform along described upright guide rail upper and lower displacement; And described chassis is connected with the clutch end of described first drive unit.
4. semiconductor test platform as claimed in claim 3, it is characterized in that, the lower surface of described first guide rail is provided with first slide block, the upper surface of described second guide rail is provided with and the first suitable chute of described first slide block, and described first guide rail slidably is connected in the upper surface of described second guide rail by suitable described first slide block and described first chute.
5. semiconductor test platform as claimed in claim 4, it is characterized in that, the lower surface on described chassis is provided with second slide block, the upper surface of described first guide rail is provided with and the second suitable chute of described second slide block, and described chassis slidably is connected in the upper surface of described first guide rail by suitable described second slide block and described second chute.
6. semiconductor test platform as claimed in claim 5 is characterized in that, also comprise being parallel to the supplemental support slide rail that described second guide rail is provided with, and described first guide rail slidably is arranged at the upper surface of described supplemental support slide rail.
7. semiconductor test platform as claimed in claim 6 is characterized in that, described first drive unit, described second drive unit and described the 3rd drive unit are linear motor.
8. semiconductor test platform as claimed in claim 6 is characterized in that, described first drive unit, described second drive unit and described the 3rd drive unit all are specially the drive unit that comprises hydraulic pump and the hydraulic cylinder of oil pressure is provided by described hydraulic pump.
9. semi-conductor test instrument, comprise cover plate, test bench and be fixedly set in the testing needle of the lower surface of described test bench, it is characterized in that, described test bench is fixedly set in the below of described cover plate, and the below of described test bench is provided with each described semiconductor test platform as claim 1-7.
10. semi-conductor test instrument as claimed in claim 9, it is characterized in that, described cover plate be provided with judge described testing needle whether with the body to be measured optical detection device of contraposition mutually, described semi-conductor test instrument comprises that also the judgement signal that described optical detection device is provided deals with and form control signal to control the signal processing apparatus of three described linear motors.
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CN 201020663768 CN202066940U (en) | 2010-12-16 | 2010-12-16 | Semiconductor tester and semiconductor testboard thereof |
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CN 201020663768 CN202066940U (en) | 2010-12-16 | 2010-12-16 | Semiconductor tester and semiconductor testboard thereof |
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CN202066940U true CN202066940U (en) | 2011-12-07 |
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Cited By (8)
Publication number | Priority date | Publication date | Assignee | Title |
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CN102562744A (en) * | 2011-12-24 | 2012-07-11 | 湖州巨人机电有限公司 | Board splicing device |
CN102636206A (en) * | 2012-03-29 | 2012-08-15 | 北京印刷学院 | Auxiliary testing device |
CN103412233A (en) * | 2013-07-24 | 2013-11-27 | 昆山迈致治具科技有限公司 | Flexible printed circuit board home button conduction tester |
CN103575324A (en) * | 2012-08-07 | 2014-02-12 | 纬创资通股份有限公司 | Detection device |
CN104076168B (en) * | 2013-03-25 | 2016-09-14 | 江苏格朗瑞科技有限公司 | A kind of Hi-pot test module |
CN107422170A (en) * | 2017-08-22 | 2017-12-01 | 机科发展科技股份有限公司 | Compressor drum counter electromotive force detection device |
CN108414797A (en) * | 2016-11-02 | 2018-08-17 | 王飞 | A kind of power distribution cabinet copper bar bus line quality testing auxiliary device |
CN110988656A (en) * | 2019-12-22 | 2020-04-10 | 苏州浪潮智能科技有限公司 | Server board card FCT tool and automatic lifting sliding table device thereof |
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2010
- 2010-12-16 CN CN 201020663768 patent/CN202066940U/en not_active Expired - Fee Related
Cited By (12)
Publication number | Priority date | Publication date | Assignee | Title |
---|---|---|---|---|
CN102562744A (en) * | 2011-12-24 | 2012-07-11 | 湖州巨人机电有限公司 | Board splicing device |
CN102562744B (en) * | 2011-12-24 | 2014-01-08 | 浙江巨人控股有限公司 | Board splicing device |
CN102636206A (en) * | 2012-03-29 | 2012-08-15 | 北京印刷学院 | Auxiliary testing device |
CN103575324A (en) * | 2012-08-07 | 2014-02-12 | 纬创资通股份有限公司 | Detection device |
CN104076168B (en) * | 2013-03-25 | 2016-09-14 | 江苏格朗瑞科技有限公司 | A kind of Hi-pot test module |
CN103412233A (en) * | 2013-07-24 | 2013-11-27 | 昆山迈致治具科技有限公司 | Flexible printed circuit board home button conduction tester |
CN103412233B (en) * | 2013-07-24 | 2015-09-23 | 昆山迈致治具科技有限公司 | A kind of soft board home is good for continuity test instrument |
CN108414797A (en) * | 2016-11-02 | 2018-08-17 | 王飞 | A kind of power distribution cabinet copper bar bus line quality testing auxiliary device |
CN108414797B (en) * | 2016-11-02 | 2020-05-12 | 江苏凯欣电气设备有限公司 | Switch board copper bar generating line quality testing auxiliary device |
CN107422170A (en) * | 2017-08-22 | 2017-12-01 | 机科发展科技股份有限公司 | Compressor drum counter electromotive force detection device |
CN110988656A (en) * | 2019-12-22 | 2020-04-10 | 苏州浪潮智能科技有限公司 | Server board card FCT tool and automatic lifting sliding table device thereof |
CN110988656B (en) * | 2019-12-22 | 2022-12-02 | 苏州浪潮智能科技有限公司 | Server board card FCT tool and automatic lifting sliding table device thereof |
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CF01 | Termination of patent right due to non-payment of annual fee |
Granted publication date: 20111207 Termination date: 20131216 |