CN206523422U - Chip intelligent check machine detent mechanism - Google Patents
Chip intelligent check machine detent mechanism Download PDFInfo
- Publication number
- CN206523422U CN206523422U CN201720253630.9U CN201720253630U CN206523422U CN 206523422 U CN206523422 U CN 206523422U CN 201720253630 U CN201720253630 U CN 201720253630U CN 206523422 U CN206523422 U CN 206523422U
- Authority
- CN
- China
- Prior art keywords
- charging tray
- turntable
- briquetting
- projecting part
- detent mechanism
- Prior art date
- Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
- Withdrawn - After Issue
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- Testing Of Individual Semiconductor Devices (AREA)
Abstract
The utility model discloses a kind of chip intelligent check machine detent mechanism, it is related to semiconductor grain detection technique field.Including base and locating platform, two locating dowels for being used to fix charging tray are provided with the turntable, locating dowel is engaged with the breach on charging tray, the locating platform also includes a pair with clamping charging tray, and the briquetting being oppositely arranged, notch is set to be passed through for charging tray on the briquetting, briquetting can be moved up and down under cylinder action, the distance that any point to turntable axle center on the projecting part for supporting charging tray, projecting part are also set up on the turntable is respectively less than distance of any point to turntable axle center on briquetting.Charging tray starts deformation and raised up, so that the material strip on charging tray be tensioned, is not only convenient for detection, is also prevented from the missing inspection of device.
Description
Technical field
The utility model is related to chip intelligent detection technique field, and in particular to a kind of chip intelligent check machine localization machine
Structure.
Background technology
Chip intelligent check machine includes support and master controller, inspection of the support provided with detection semiconductor product surface characteristics
Measurement equipment, places the discharging device of charging tray, collects the blanking device of charging tray after detection automatically, for moving and positioning charging tray automatically
Charging tray mobile device, pick and place between device on material manipulator, the moving step pitch of charging tray mobile device and charging tray to be detected
Spacing it is identical, by discharging device and pick and place material manipulator charging tray is delivered on mobile platform, position on a mobile platform
After fix, hereafter just charging tray can be detected, a large amount of artificial operations can be saved, often detected after a device on charging tray,
Charging tray mobile platform can move a step pitch and next device is detected, realize and carry out pipeline system detection to charging tray.
The vision-based detection of the fine feature of semiconductor surface is generally required by micro- sem observation, and existing detection method is
First the charging tray for being loaded with device is put under the microscope, microscopical focal length is then adjusted, charging tray table is then observed by display
The situation in face.Before microscope detection, charging tray is likely to occur the technologies such as inclination, positive and negative reverse, Plane Rotation, therefore existing fixed
Position mechanism is also provided with Anti-inclining, prevents the function such as reverse.
Then, semiconductor grain is state mostly on flexible material strip, material strip is fixed on charging tray, due to material strip
Flexible nature, the material strip being fixed on charging tray occurs that the semiconductor devices on the phenomenons such as relaxation, therefore detection time, material strip can
The phenomenons such as missing inspection, PLC system be inaccurate to the moving step pitch of material strip can occur.
Utility model content
There is provided a kind of core of accurate positioning for the deficiency of the technical problems to be solved in the utility model solution prior art problem
Piece intelligence check machine detent mechanism.
In order to solve the above-mentioned technical problem, the technical solution adopted in the utility model is：Chip intelligent check machine localization machine
The sliding block and glidepath being engaged are set below structure, including base and locating platform, the base, sliding block is fixed on bottom
On seat, base glidepath can be slided relatively under sliding block effect, be fixedly installed above base solid below slide rail, locating platform
The sliding block being engaged with upper slide rail is set calmly, locating platform can respect thereto slide, the locating platform includes chassis and can be around
It is provided with the turntable of chassis axis rotation, the turntable in two locating dowels for being used to fix charging tray, locating dowel and charging tray
Breach is engaged, and the locating platform also includes a pair and uses setting on clamping charging tray, and the briquetting being oppositely arranged, the briquetting
Notch is passed through for charging tray, and briquetting can be moved up and down under cylinder action, is also set up on the turntable for supporting the prominent of charging tray
Go out any point to turntable axle center on part, projecting part distance be respectively less than on briquetting any point to turntable axle center away from
From.
Further, in a ring or circular arc, briquetting is in circular arc, the center of circle of the projecting part to the projecting part
Or the arc core of arc core and briquetting is in same position.
Further, the locating dowel is slidably arranged on turntable to adapt to various sizes of charging tray.
Further, the position for perceiving charging tray edge is also set up on the turntable with the outer peripheral correspondence position of charging tray
Sensor.
From above-mentioned technical proposal it can be seen that the utility model has advantages below：The x-axis and y of locating platform can be realized
The movement and rotation of axle；Under projecting part and briquetting effect, charging tray starts deformation and raised up, so that by the material on charging tray
Band tensioning, is not only convenient for detection, is also prevented from the missing inspection of device；For asymmetrical charging tray, when charging tray is positive and negative reverse, pass
Sensor will be unable to detect being easy to for charging tray, so as to send warning.
Brief description of the drawings
Fig. 1 is the structural representation of charging tray；
Fig. 2 is front view of the present utility model；
Fig. 3 is top view of the present utility model.
Embodiment
Embodiment of the present utility model is elaborated below in conjunction with accompanying drawing.
Charging tray 4 to be detected sets semiconductor device as shown in figure 1, setting above on two breach 1 and material strip 2, material strip 2
Part, and be nonaxisymmetric structure.
As shown in Figure 2,3, chip intelligent check machine detent mechanism of the present utility model, including base 13 and positioning are put down
Platform, the lower section of base 13 sets the sliding block and two glidepaths 15 being engaged, and sliding block is fixed on base, and glidepath 15 can be with
It is fixed on the support of check machine, base 13 glidepath can be slided relatively under sliding block effect, and the top of base 13 is fixedly installed
The sliding block 11 being engaged with upper slide rail 14 is fixedly installed below slide rail 14, locating platform, locating platform can respect thereto slip.On
Slide rail and glidepath are vertically arranged, and two two groups of slide rails are applied in combination, under the effect of motor 12, it is possible to achieve the x of locating platform
The movement of axle and y-axis.
Locating platform include chassis 8 and can around chassis axis rotation turntable 7, chassis sets convex in a ring, below turntable
Edge, flange is stretched into chassis 8, chassis and the concentric setting of turntable.Two locating dowels for being used to fix charging tray are provided with turntable 7
5, locating dowel 5 is slidably set, so as to change the position of itself.Locating dowel 5 primarily serves two functions, is put into charging tray
Afterwards, the breach and locating dowel on charging tray are engaged, so as to realize positioning.When need rotate charging tray when, rotating table, with turn
The locating dowel that platform is rotated drives the rotation of charging tray.Turntable it can be rotated with belt drive, and it is designed as existing design, herein not
Repeating.
Gap position on some charging trays is not fixed, therefore in order to increase use scope of the present utility model, will can be determined
Position post 5 is designed to bascule, i.e., chute is set on turntable, locating dowel is arranged in chute, it is slided on turntable.
Also set up on locating platform sets notch to use on a pair of charging trays with clamping, and the briquetting 9 being oppositely arranged, briquetting
Passed through in charging tray, charging tray is located between two briquettings 9.Briquetting 9 can be moved up and down under the effect of cylinder 10, be also set up on turntable
The distance in any point to the axle center of turntable 7 on the projecting part 6 for supporting charging tray, projecting part 6 is respectively less than briquetting and taken up an official post
Meaning a little arrive turntable axle center distance, i.e., two briquettings 9 the perspective plane of vertical direction be located at projecting part 6 perspective plane it
Outside.In a ring or circular arc, briquetting 9 is in circular arc, the center of circle of the projecting part 6 or arc core and briquetting to projecting part 6
Arc core be in same position.After charging tray position is fixed, the driving briquetting 9 of cylinder 10 declines, and charging tray is pushed into projecting part 6
On, projecting part 6 props up charging tray, and in the case where projecting part 6 and briquetting 9 are acted on, charging tray starts deformation and raised up, so that by charging tray
On material strip tensioning, be not only convenient for detection, be also prevented from the missing inspection of device.
The position sensor for perceiving charging tray edge is also set up with the outer peripheral correspondence position of charging tray on turntable, for
Asymmetrical charging tray, when charging tray is positive and negative reverse, sensor will be unable to detect being easy to for charging tray, so as to send warning.
Claims (4)
- It is engaged down 1. being set below chip intelligent check machine detent mechanism, including base and locating platform, the base Sliding block and glidepath, sliding block are fixed on base, and base glidepath can be slided relatively under sliding block effect, solid above base The sliding block being engaged with upper slide rail is fixedly installed in fixed set below upper slide rail, locating platform, locating platform can respect thereto slide, The locating platform include chassis and can around chassis axis rotation turntable, two are provided with the turntable is used to fix charging tray Locating dowel, locating dowel is engaged with the breach on charging tray, it is characterised in that：The locating platform also includes a pair with clamping material Disk, and the briquetting being oppositely arranged, set notch to be passed through for charging tray on the briquetting, briquetting under cylinder action can on move down It is dynamic, distance of any point to turntable axle center on the projecting part for supporting charging tray, projecting part is also set up on the turntable Distance of any point to turntable axle center respectively less than on briquetting.
- 2. chip intelligent check machine detent mechanism according to claim 1, it is characterised in that：The projecting part is in a ring Or circular arc, briquetting is in circular arc, and the arc core of the center of circle of the projecting part or arc core and briquetting is in same position.
- 3. chip intelligent check machine detent mechanism according to claim 2, it is characterised in that：The locating dowel is slidably set Put in turntable to adapt to various sizes of charging tray.
- 4. chip intelligent check machine detent mechanism according to claim 1, it is characterised in that：On the turntable with outside charging tray The correspondence position at edge also sets up the position sensor for perceiving charging tray edge.
Priority Applications (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| CN201720253630.9U CN206523422U (en) | 2017-03-15 | 2017-03-15 | Chip intelligent check machine detent mechanism |
Applications Claiming Priority (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| CN201720253630.9U CN206523422U (en) | 2017-03-15 | 2017-03-15 | Chip intelligent check machine detent mechanism |
Publications (1)
| Publication Number | Publication Date |
|---|---|
| CN206523422U true CN206523422U (en) | 2017-09-26 |
Family
ID=59902763
Family Applications (1)
| Application Number | Title | Priority Date | Filing Date |
|---|---|---|---|
| CN201720253630.9U Withdrawn - After Issue CN206523422U (en) | 2017-03-15 | 2017-03-15 | Chip intelligent check machine detent mechanism |
Country Status (1)
| Country | Link |
|---|---|
| CN (1) | CN206523422U (en) |
Cited By (2)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| CN106933257A (en) * | 2017-03-15 | 2017-07-07 | 无锡百立德自动化有限公司 | Chip intelligent check machine detent mechanism |
| CN110039502A (en) * | 2019-05-30 | 2019-07-23 | 凌龙智能(深圳)科技有限公司 | Detection device and its elevation and subsidence regulating device |
-
2017
- 2017-03-15 CN CN201720253630.9U patent/CN206523422U/en not_active Withdrawn - After Issue
Cited By (3)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| CN106933257A (en) * | 2017-03-15 | 2017-07-07 | 无锡百立德自动化有限公司 | Chip intelligent check machine detent mechanism |
| CN106933257B (en) * | 2017-03-15 | 2023-10-13 | 广西中科阿尔法科技有限公司 | Positioning mechanism of chip intelligent inspection machine |
| CN110039502A (en) * | 2019-05-30 | 2019-07-23 | 凌龙智能(深圳)科技有限公司 | Detection device and its elevation and subsidence regulating device |
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Legal Events
| Date | Code | Title | Description |
|---|---|---|---|
| GR01 | Patent grant | ||
| GR01 | Patent grant | ||
| AV01 | Patent right actively abandoned | ||
| AV01 | Patent right actively abandoned | ||
| AV01 | Patent right actively abandoned |
Granted publication date: 20170926 Effective date of abandoning: 20231013 |
|
| AV01 | Patent right actively abandoned |
Granted publication date: 20170926 Effective date of abandoning: 20231013 |