CN101840051A - 光学器件、光扫描仪以及图像形成装置 - Google Patents
光学器件、光扫描仪以及图像形成装置 Download PDFInfo
- Publication number
- CN101840051A CN101840051A CN201010134483A CN201010134483A CN101840051A CN 101840051 A CN101840051 A CN 101840051A CN 201010134483 A CN201010134483 A CN 201010134483A CN 201010134483 A CN201010134483 A CN 201010134483A CN 101840051 A CN101840051 A CN 101840051A
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- CN
- China
- Prior art keywords
- installation portion
- light
- optical device
- mentioned
- reflecting components
- Prior art date
- Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
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- 230000003287 optical effect Effects 0.000 title claims abstract description 105
- 238000009434 installation Methods 0.000 claims abstract description 150
- 230000008093 supporting effect Effects 0.000 claims description 44
- 230000015572 biosynthetic process Effects 0.000 description 19
- 230000008878 coupling Effects 0.000 description 10
- 238000010168 coupling process Methods 0.000 description 10
- 238000005859 coupling reaction Methods 0.000 description 10
- XUIMIQQOPSSXEZ-UHFFFAOYSA-N Silicon Chemical compound [Si] XUIMIQQOPSSXEZ-UHFFFAOYSA-N 0.000 description 9
- 229910052710 silicon Inorganic materials 0.000 description 9
- 239000010703 silicon Substances 0.000 description 9
- 239000000758 substrate Substances 0.000 description 9
- 239000007767 bonding agent Substances 0.000 description 6
- 238000005530 etching Methods 0.000 description 5
- 238000004519 manufacturing process Methods 0.000 description 5
- 229910001285 shape-memory alloy Inorganic materials 0.000 description 5
- 230000005484 gravity Effects 0.000 description 4
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- 230000010355 oscillation Effects 0.000 description 4
- 238000000034 method Methods 0.000 description 3
- 238000010586 diagram Methods 0.000 description 2
- 238000003384 imaging method Methods 0.000 description 2
- 230000004446 light reflex Effects 0.000 description 2
- 241001062009 Indigofera Species 0.000 description 1
- 230000009471 action Effects 0.000 description 1
- 230000033228 biological regulation Effects 0.000 description 1
- 230000008859 change Effects 0.000 description 1
- 230000000694 effects Effects 0.000 description 1
- 238000005516 engineering process Methods 0.000 description 1
- 230000005764 inhibitory process Effects 0.000 description 1
- 239000000463 material Substances 0.000 description 1
- 230000007246 mechanism Effects 0.000 description 1
- 238000007747 plating Methods 0.000 description 1
- 238000005507 spraying Methods 0.000 description 1
- 230000008719 thickening Effects 0.000 description 1
- 238000007738 vacuum evaporation Methods 0.000 description 1
Images
Classifications
-
- G—PHYSICS
- G02—OPTICS
- G02B—OPTICAL ELEMENTS, SYSTEMS OR APPARATUS
- G02B26/00—Optical devices or arrangements for the control of light using movable or deformable optical elements
- G02B26/08—Optical devices or arrangements for the control of light using movable or deformable optical elements for controlling the direction of light
- G02B26/0816—Optical devices or arrangements for the control of light using movable or deformable optical elements for controlling the direction of light by means of one or more reflecting elements
- G02B26/0833—Optical devices or arrangements for the control of light using movable or deformable optical elements for controlling the direction of light by means of one or more reflecting elements the reflecting element being a micromechanical device, e.g. a MEMS mirror, DMD
Landscapes
- Physics & Mathematics (AREA)
- General Physics & Mathematics (AREA)
- Optics & Photonics (AREA)
- Mechanical Optical Scanning Systems (AREA)
- Mechanical Light Control Or Optical Switches (AREA)
- Micromachines (AREA)
- Facsimile Heads (AREA)
Applications Claiming Priority (2)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| JP2009065726A JP5402124B2 (ja) | 2009-03-18 | 2009-03-18 | 光学デバイス、光スキャナー及び画像形成装置 |
| JP2009-065726 | 2009-03-18 |
Publications (1)
| Publication Number | Publication Date |
|---|---|
| CN101840051A true CN101840051A (zh) | 2010-09-22 |
Family
ID=42737354
Family Applications (1)
| Application Number | Title | Priority Date | Filing Date |
|---|---|---|---|
| CN201010134483A Pending CN101840051A (zh) | 2009-03-18 | 2010-03-16 | 光学器件、光扫描仪以及图像形成装置 |
Country Status (3)
| Country | Link |
|---|---|
| US (1) | US8610987B2 (https=) |
| JP (1) | JP5402124B2 (https=) |
| CN (1) | CN101840051A (https=) |
Cited By (4)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| CN104749771A (zh) * | 2013-12-26 | 2015-07-01 | 精工爱普生株式会社 | 光扫描仪、图像显示装置以及头戴式显示器 |
| CN109932804A (zh) * | 2019-03-04 | 2019-06-25 | 杭州电子科技大学 | 一种小口径轻型反射镜的柔性记忆合金支撑装置 |
| CN112558289A (zh) * | 2019-09-25 | 2021-03-26 | 日本电产株式会社 | 光学元件以及光扫描装置 |
| CN112649936A (zh) * | 2019-09-25 | 2021-04-13 | 日本电产株式会社 | 光学元件以及光扫描装置 |
Families Citing this family (11)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| CN103299520B (zh) * | 2011-01-07 | 2015-11-25 | 佳能电子株式会社 | 振动元件和光扫描装置以及使用该光扫描装置的图像形成装置和图像投影装置 |
| WO2013046612A1 (ja) | 2011-09-30 | 2013-04-04 | パナソニック株式会社 | 光学反射素子 |
| JP5942576B2 (ja) | 2012-05-11 | 2016-06-29 | セイコーエプソン株式会社 | 光学デバイス、光スキャナーおよび画像表示装置 |
| JP6111532B2 (ja) | 2012-05-11 | 2017-04-12 | セイコーエプソン株式会社 | 光学デバイス、光スキャナーおよび画像表示装置 |
| JP5949345B2 (ja) * | 2012-09-04 | 2016-07-06 | セイコーエプソン株式会社 | アクチュエーター、光スキャナー、画像表示装置およびヘッドマウントディスプレイ |
| JP6094105B2 (ja) | 2012-09-13 | 2017-03-15 | セイコーエプソン株式会社 | アクチュエーター、光スキャナー、画像表示装置、ヘッドマウントディスプレイ |
| JP2014123020A (ja) * | 2012-12-21 | 2014-07-03 | Seiko Epson Corp | アクチュエーター、光スキャナー、画像表示装置、ヘッドマウントディスプレイ |
| JP6075062B2 (ja) * | 2012-12-27 | 2017-02-08 | セイコーエプソン株式会社 | アクチュエーター、光スキャナーおよび画像形成装置 |
| JP2014126725A (ja) * | 2012-12-27 | 2014-07-07 | Funai Electric Co Ltd | 走査ミラー装置 |
| JP5935761B2 (ja) * | 2013-06-12 | 2016-06-15 | セイコーエプソン株式会社 | 光学デバイス、光スキャナーおよび画像表示装置 |
| US10209510B2 (en) * | 2017-03-09 | 2019-02-19 | Microvision, Inc. | Compact modular scanners for scanning laser devices |
Citations (6)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| US20020034024A1 (en) * | 2000-09-20 | 2002-03-21 | Orcutt John W. | Stacked micromirror structures |
| CN1821831A (zh) * | 2005-02-16 | 2006-08-23 | 精工爱普生株式会社 | 光扫描装置和图像显示装置 |
| JP2007272139A (ja) * | 2006-03-31 | 2007-10-18 | Citizen Miyota Co Ltd | プレーナー型アクチュエータ |
| WO2009057801A1 (en) * | 2007-10-30 | 2009-05-07 | Canon Kabushiki Kaisha | Method of manufacturing oscillator device, and optical deflector and optical instrument with oscillator device based on it |
| JP2009175513A (ja) * | 2008-01-25 | 2009-08-06 | Panasonic Corp | 振動ミラーおよびレーザスキャニングユニット |
| JP2009175511A (ja) * | 2008-01-25 | 2009-08-06 | Panasonic Corp | 振動ミラーの製造方法 |
Family Cites Families (14)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| JPH09304721A (ja) | 1996-05-14 | 1997-11-28 | Brother Ind Ltd | 光走査装置 |
| US5982521A (en) * | 1995-11-15 | 1999-11-09 | Brother Kogyo Kabushiki Kaisha | Optical scanner |
| JPH09329758A (ja) * | 1996-06-11 | 1997-12-22 | Brother Ind Ltd | 光走査装置及びその製造方法 |
| US6173895B1 (en) * | 1999-04-05 | 2001-01-16 | Geo Labs, Inc. | Articulated scan elements with elastomeric hinges, and methods for manufacture of same |
| JP4724936B2 (ja) * | 2000-04-28 | 2011-07-13 | 株式会社デンソー | 光スキャナ及び2次元スキャンシステム |
| US6956684B2 (en) * | 2002-11-08 | 2005-10-18 | Texas Instruments Incorporated | Multilayered oscillating device with spine support |
| JP2005326466A (ja) * | 2004-05-12 | 2005-11-24 | Canon Inc | 光走査装置、画像形成装置 |
| US7457023B2 (en) * | 2005-03-02 | 2008-11-25 | Texas Instruments Incorporated | Manufacturing a mirror plate or other operational structure having superior flatness by laser milling for use with torsional hinged devices |
| JP2008040353A (ja) * | 2006-08-09 | 2008-02-21 | Seiko Epson Corp | 光学デバイス、光スキャナおよび画像形成装置 |
| JP4983281B2 (ja) | 2007-02-06 | 2012-07-25 | セイコーエプソン株式会社 | アクチュエータ、光スキャナ、および画像形成装置 |
| JP4277921B2 (ja) * | 2007-06-05 | 2009-06-10 | セイコーエプソン株式会社 | アクチュエータ、光スキャナおよび画像形成装置 |
| JP5084385B2 (ja) * | 2007-07-20 | 2012-11-28 | キヤノン株式会社 | ねじりバネ、光偏向器及びそれを用いた画像形成装置 |
| JP2009134243A (ja) * | 2007-10-30 | 2009-06-18 | Canon Inc | 揺動体装置の製造方法、該製造方法により製造された揺動体装置によって構成される光偏向器及び光学機器 |
| US8059324B2 (en) * | 2009-09-23 | 2011-11-15 | Metrologic Instruments, Inc. | Scan element for use in scanning light and method of making the same |
-
2009
- 2009-03-18 JP JP2009065726A patent/JP5402124B2/ja not_active Expired - Fee Related
-
2010
- 2010-01-28 US US12/695,333 patent/US8610987B2/en not_active Expired - Fee Related
- 2010-03-16 CN CN201010134483A patent/CN101840051A/zh active Pending
Patent Citations (6)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| US20020034024A1 (en) * | 2000-09-20 | 2002-03-21 | Orcutt John W. | Stacked micromirror structures |
| CN1821831A (zh) * | 2005-02-16 | 2006-08-23 | 精工爱普生株式会社 | 光扫描装置和图像显示装置 |
| JP2007272139A (ja) * | 2006-03-31 | 2007-10-18 | Citizen Miyota Co Ltd | プレーナー型アクチュエータ |
| WO2009057801A1 (en) * | 2007-10-30 | 2009-05-07 | Canon Kabushiki Kaisha | Method of manufacturing oscillator device, and optical deflector and optical instrument with oscillator device based on it |
| JP2009175513A (ja) * | 2008-01-25 | 2009-08-06 | Panasonic Corp | 振動ミラーおよびレーザスキャニングユニット |
| JP2009175511A (ja) * | 2008-01-25 | 2009-08-06 | Panasonic Corp | 振動ミラーの製造方法 |
Cited By (6)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| CN104749771A (zh) * | 2013-12-26 | 2015-07-01 | 精工爱普生株式会社 | 光扫描仪、图像显示装置以及头戴式显示器 |
| CN104749771B (zh) * | 2013-12-26 | 2018-08-28 | 精工爱普生株式会社 | 光扫描仪、图像显示装置以及头戴式显示器 |
| CN109932804A (zh) * | 2019-03-04 | 2019-06-25 | 杭州电子科技大学 | 一种小口径轻型反射镜的柔性记忆合金支撑装置 |
| CN109932804B (zh) * | 2019-03-04 | 2021-06-01 | 杭州电子科技大学 | 一种小口径轻型反射镜的柔性记忆合金支撑装置 |
| CN112558289A (zh) * | 2019-09-25 | 2021-03-26 | 日本电产株式会社 | 光学元件以及光扫描装置 |
| CN112649936A (zh) * | 2019-09-25 | 2021-04-13 | 日本电产株式会社 | 光学元件以及光扫描装置 |
Also Published As
| Publication number | Publication date |
|---|---|
| US20100238533A1 (en) | 2010-09-23 |
| JP2010217648A (ja) | 2010-09-30 |
| US8610987B2 (en) | 2013-12-17 |
| JP5402124B2 (ja) | 2014-01-29 |
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Legal Events
| Date | Code | Title | Description |
|---|---|---|---|
| C06 | Publication | ||
| PB01 | Publication | ||
| C10 | Entry into substantive examination | ||
| SE01 | Entry into force of request for substantive examination | ||
| C02 | Deemed withdrawal of patent application after publication (patent law 2001) | ||
| WD01 | Invention patent application deemed withdrawn after publication |
Application publication date: 20100922 |