CN101806931A - 光学元件的制造方法及光学元件 - Google Patents

光学元件的制造方法及光学元件 Download PDF

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Publication number
CN101806931A
CN101806931A CN201010004571A CN201010004571A CN101806931A CN 101806931 A CN101806931 A CN 101806931A CN 201010004571 A CN201010004571 A CN 201010004571A CN 201010004571 A CN201010004571 A CN 201010004571A CN 101806931 A CN101806931 A CN 101806931A
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CN
China
Prior art keywords
substrate
optical element
grid
diffraction structure
grid portion
Prior art date
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Pending
Application number
CN201010004571A
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English (en)
Chinese (zh)
Inventor
釰持伸彦
Current Assignee (The listed assignees may be inaccurate. Google has not performed a legal analysis and makes no representation or warranty as to the accuracy of the list.)
Seiko Epson Corp
Original Assignee
Seiko Epson Corp
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed by Seiko Epson Corp filed Critical Seiko Epson Corp
Publication of CN101806931A publication Critical patent/CN101806931A/zh
Pending legal-status Critical Current

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    • B—PERFORMING OPERATIONS; TRANSPORTING
    • B29—WORKING OF PLASTICS; WORKING OF SUBSTANCES IN A PLASTIC STATE IN GENERAL
    • B29D—PRODUCING PARTICULAR ARTICLES FROM PLASTICS OR FROM SUBSTANCES IN A PLASTIC STATE
    • B29D11/00—Producing optical elements, e.g. lenses or prisms
    • B29D11/00634—Production of filters
    • G—PHYSICS
    • G02—OPTICS
    • G02B—OPTICAL ELEMENTS, SYSTEMS OR APPARATUS
    • G02B5/00—Optical elements other than lenses
    • G02B5/18—Diffraction gratings
    • G02B5/1847—Manufacturing methods
    • G02B5/1857—Manufacturing methods using exposure or etching means, e.g. holography, photolithography, exposure to electron or ion beams
    • G—PHYSICS
    • G02—OPTICS
    • G02B—OPTICAL ELEMENTS, SYSTEMS OR APPARATUS
    • G02B5/00—Optical elements other than lenses
    • G02B5/18—Diffraction gratings
    • G02B5/1861—Reflection gratings characterised by their structure, e.g. step profile, contours of substrate or grooves, pitch variations, materials
    • G—PHYSICS
    • G02—OPTICS
    • G02B—OPTICAL ELEMENTS, SYSTEMS OR APPARATUS
    • G02B5/00—Optical elements other than lenses
    • G02B5/30—Polarising elements
    • G02B5/3025—Polarisers, i.e. arrangements capable of producing a definite output polarisation state from an unpolarised input state
    • G02B5/3058—Polarisers, i.e. arrangements capable of producing a definite output polarisation state from an unpolarised input state comprising electrically conductive elements, e.g. wire grids, conductive particles

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  • Physics & Mathematics (AREA)
  • Engineering & Computer Science (AREA)
  • General Physics & Mathematics (AREA)
  • Optics & Photonics (AREA)
  • Manufacturing & Machinery (AREA)
  • Health & Medical Sciences (AREA)
  • Ophthalmology & Optometry (AREA)
  • Mechanical Engineering (AREA)
  • Diffracting Gratings Or Hologram Optical Elements (AREA)
  • Polarising Elements (AREA)
CN201010004571A 2009-01-20 2010-01-19 光学元件的制造方法及光学元件 Pending CN101806931A (zh)

Applications Claiming Priority (2)

Application Number Priority Date Filing Date Title
JP2009009619A JP2010169722A (ja) 2009-01-20 2009-01-20 光学素子の製造方法及び光学素子
JP2009-009619 2009-01-20

Publications (1)

Publication Number Publication Date
CN101806931A true CN101806931A (zh) 2010-08-18

Family

ID=42336772

Family Applications (1)

Application Number Title Priority Date Filing Date
CN201010004571A Pending CN101806931A (zh) 2009-01-20 2010-01-19 光学元件的制造方法及光学元件

Country Status (3)

Country Link
US (1) US8248697B2 (enExample)
JP (1) JP2010169722A (enExample)
CN (1) CN101806931A (enExample)

Cited By (3)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
CN107942571A (zh) * 2017-09-22 2018-04-20 友达光电股份有限公司 线栅偏光器以及使用此线栅偏光器的显示面板
CN110398799A (zh) * 2018-04-25 2019-11-01 迪睿合株式会社 偏振片和偏振片的制备方法
CN115280192A (zh) * 2020-03-13 2022-11-01 应用材料公司 以激光烧蚀形成深度可变结构

Families Citing this family (12)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
US8873144B2 (en) * 2011-05-17 2014-10-28 Moxtek, Inc. Wire grid polarizer with multiple functionality sections
US8913320B2 (en) * 2011-05-17 2014-12-16 Moxtek, Inc. Wire grid polarizer with bordered sections
US8922890B2 (en) * 2012-03-21 2014-12-30 Moxtek, Inc. Polarizer edge rib modification
JP6341857B2 (ja) * 2012-06-21 2018-06-13 マクセル株式会社 光学素子および光学装置
KR101942363B1 (ko) * 2012-07-26 2019-04-12 삼성디스플레이 주식회사 편광 소자, 이의 제조 방법, 이를 포함하는 표시 패널 및 이를 포함하는 표시 장치
KR20140060058A (ko) * 2012-11-09 2014-05-19 삼성디스플레이 주식회사 편광판, 편광판의 제조방법 및 이를 포함하는 표시장치
US9348076B2 (en) 2013-10-24 2016-05-24 Moxtek, Inc. Polarizer with variable inter-wire distance
WO2015120335A1 (en) 2014-02-06 2015-08-13 Insight Equity A.P.X., L.P. (Dba Vision-Ease Lens) Wire grid polarizer and method of manufacture
US10704763B2 (en) 2016-01-08 2020-07-07 Dai Nippon Printing Co., Ltd. Diffractive optical element and light irradiation apparatus
JP2017129887A (ja) * 2017-05-01 2017-07-27 デクセリアルズ株式会社 偏光素子、偏光素子の製造方法
CN107316949B (zh) * 2017-07-11 2020-07-31 京东方科技集团股份有限公司 显示面板及其制造方法、显示装置
JP2019095817A (ja) * 2019-03-25 2019-06-20 デクセリアルズ株式会社 偏光素子、偏光素子の製造方法

Family Cites Families (9)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JP2006003447A (ja) * 2004-06-15 2006-01-05 Sony Corp 偏光分離素子及びその製造方法
JP4551738B2 (ja) 2004-11-02 2010-09-29 キヤノン株式会社 現像ローラ、プロセスカートリッジ及び画像形成装置
JP4457854B2 (ja) * 2004-11-02 2010-04-28 ソニー株式会社 偏光子、液晶パネルおよび投射型表示装置
US7570424B2 (en) * 2004-12-06 2009-08-04 Moxtek, Inc. Multilayer wire-grid polarizer
US7800823B2 (en) * 2004-12-06 2010-09-21 Moxtek, Inc. Polarization device to polarize and further control light
JP4449841B2 (ja) * 2005-07-05 2010-04-14 セイコーエプソン株式会社 ワイヤーグリッド偏光子の製造方法、液晶装置、プロジェクタ
US7755718B2 (en) * 2007-08-10 2010-07-13 Seiko Epson Corporation Optical element, liquid crystal device, and display
JP4535121B2 (ja) * 2007-11-28 2010-09-01 セイコーエプソン株式会社 光学素子及びその製造方法、液晶装置、電子機器
US8248696B2 (en) * 2009-06-25 2012-08-21 Moxtek, Inc. Nano fractal diffuser

Cited By (5)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
CN107942571A (zh) * 2017-09-22 2018-04-20 友达光电股份有限公司 线栅偏光器以及使用此线栅偏光器的显示面板
CN110398799A (zh) * 2018-04-25 2019-11-01 迪睿合株式会社 偏振片和偏振片的制备方法
CN110398799B (zh) * 2018-04-25 2023-08-22 迪睿合株式会社 偏振片和偏振片的制备方法
CN115280192A (zh) * 2020-03-13 2022-11-01 应用材料公司 以激光烧蚀形成深度可变结构
CN115280192B (zh) * 2020-03-13 2024-06-07 应用材料公司 以激光烧蚀形成深度可变结构

Also Published As

Publication number Publication date
JP2010169722A (ja) 2010-08-05
US8248697B2 (en) 2012-08-21
US20100182692A1 (en) 2010-07-22

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Application publication date: 20100818