CN101805922A - Heat shielding and ingot furnace with same - Google Patents
Heat shielding and ingot furnace with same Download PDFInfo
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- CN101805922A CN101805922A CN 201010161556 CN201010161556A CN101805922A CN 101805922 A CN101805922 A CN 101805922A CN 201010161556 CN201010161556 CN 201010161556 CN 201010161556 A CN201010161556 A CN 201010161556A CN 101805922 A CN101805922 A CN 101805922A
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Abstract
The invention discloses a heat shielding, which comprises a carbon-carbon composite material matrix and at least one heat reflection material plate. The heat reflection material plate is positioned below the carbon-carbon composite material matrix and is connected with the carbon-carbon composite material matrix; a material of the heat reflection material plate is selected in a way that: a reflection quantity of heat which is incident on the heat reflection material plate is larger than the reflection quantity of the heat which is incident on the carbon-carbon composite material. In the embodiment of the invention, one or more high heat reflection material plates are added in the heat shielding to reflect the heat radiated on the heat shielding to a silicon flux, so that the problem of heat waste is solved to a certain degree and heat power consumption is reduced. The invention also discloses an ingot furnace with the heat shielding.
Description
Technical field
The present invention relates to technical field of manufacturing semiconductors, particularly a kind of ingot furnace that is used for the heat shielding of monocrystalline or polycrystalline material ingot furnace and adopts this heat shielding.
Background technology
In the production process of polycrystalline silicon used for solar battery sheet, adopt polycrystalline silicon ingot or purifying furnace to make the silicon melt directional freeze, thereby generate silicon ingot.
But, the shortcoming of prior art is, cover the poor surface smoothness of carbon-carbon composite of the opening end of described ingot furnace, therefore cause the silicon melt surface emissivity in the quartz crucible can not usable reflection (heat reflectivity is low), thereby cause a large amount of heat wastes to the heat of heat shielding.Because ingot casting process current consumption is very big, the ingot casting production of a 450Kg approximately needs thousands of degree electricity, even if so economize on electricity and 5% also can produce huge benefit.In silicon single crystal, germanium or other compound semiconductor process of growth, also can run into this problem equally.
Summary of the invention
In view of this, purpose of the present invention is intended to solve at least one of above-mentioned technological deficiency, particularly solves in the semiconductor growing processes such as present silicon single crystal, polysilicon because the problem of the low heat waste that causes of carbon-carbon composite heat reflectivity.
For overcoming the above problems, one aspect of the present invention has proposed a kind of heat shielding, comprising: the carbon-carbon composite matrix; With at least one heat-reflecting material plate, described heat-reflecting material plate is positioned under the described carbon-carbon composite matrix, and interconnect with described carbon-carbon composite matrix, the material of described heat-reflecting material plate is chosen to, to the volume reflection that incides the heat on the described heat-reflecting material plate volume reflection when described heat is incided the carbon-carbon composite matrix.
According to one embodiment of present invention, the central position of described carbon-carbon composite matrix and described heat-reflecting material plate is equipped with the gas entrance hole.
According to one embodiment of present invention, described heat shielding is formed with a plurality of being used for and the mutual localized location division of crucible, and described location division can form locating slot.
According to one embodiment of present invention, described heat-reflecting material plate is formed by graphite, molybdenum or tungsten.
At least one the heat-reflecting material plate that in heat shielding, increases by the embodiment of the invention with hot thermal conductivity and heat reflectivity, thereby the heat that is radiated heat shielding can be reflected back into silicon melt more effectively, solve the problem of heat waste to a certain extent, reduce heat power consumption.In addition, the heat shielding of the embodiment of the invention is matrix with the carbon-carbon composite, can guarantee that entire structure has high strength, and heat-reflecting material laminar surface highly polished can effectively be improved this surperficial heat reflectivity, and can be high temperature resistant.
According to one embodiment of present invention, described heat-reflecting material plate is formed on the described carbon-carbon composite matrix by vapor deposition (for example physical vapor deposition or chemical vapour deposition etc.).
According to an aspect of the present invention, the surfaceness of the lower surface of described heat-reflecting material plate is preferably less than 12.5 microns less than 25 microns.
According to an aspect of the present invention, described heat-reflecting material plate is a plurality of, and described heat-reflecting material plate is connected to described carbon-carbon composite matrix by threaded fastener, and described threaded fastener is made by graphite, molybdenum, tungsten or carbon-carbon composite.
According to one embodiment of present invention, described heat shielding further has: be arranged on the gas diversion tube on the upper surface of described carbon-carbon composite matrix, described gas diversion tube is connected with the gas entrance hole of described heat shielding.
According to one embodiment of present invention, described gas diversion tube is formed by graphite, molybdenum, tungsten or carbon-carbon composite.
Further, the present invention proposes a kind of ingot furnace, comprising: upper furnace body; Lower furnace body, described lower furnace body match with described upper furnace body and are vertically removable; Be arranged on the bracing or strutting arrangement in the described lower furnace body, described bracing or strutting arrangement is provided with crucible; At least one well heater, described well heater are used for when described lower furnace body and described upper furnace body closure described crucible being heated; Heat-insulation cage, described heat-insulation cage is arranged in the described upper furnace body, and covers described at least one well heater, and can be removable along vertical direction; With the heat shielding of the opening end that is arranged on described crucible, the center of described heat shielding is provided with the gas entrance hole, and described heat shielding comprises: the carbon-carbon composite matrix; With at least one heat-reflecting material plate, described heat-reflecting material plate is positioned under the described carbon-carbon composite matrix, and interconnect with described carbon-carbon composite matrix, the material of described heat-reflecting material plate is chosen to, to the volume reflection that incides the heat on the described heat-reflecting material plate volume reflection when described heat is incided the carbon-carbon composite matrix.
According to one embodiment of present invention, described heat-reflecting material plate is formed by graphite, molybdenum or tungsten.
According to one embodiment of present invention, described heat-reflecting material plate is formed on the described carbon-carbon composite matrix by vapor deposition (for example physical vapor deposition or chemical vapour deposition).
According to one embodiment of present invention, described heat-reflecting material plate is one or more, described heat-reflecting material plate is connected to described carbon-carbon composite matrix by threaded fastener, and described threaded fastener is made by graphite, molybdenum, tungsten or carbon-carbon composite.
According to one embodiment of present invention, the upper surface of described heat shielding is provided with gas diversion tube, and described gas diversion tube is connected with the gas entrance hole of described heat shielding.
According to one embodiment of present invention, described gas diversion tube is formed by graphite, molybdenum, tungsten or carbon-carbon composite.
According to one embodiment of present invention, the surfaceness of the lower surface of described heat-reflecting material plate is preferably less than 12.5 microns less than 25 microns.
According to one embodiment of present invention, described well heater comprises side well heater and top heater, and described side well heater and top heater cover described crucible and heat with at least a portion to described crucible when described lower furnace body and described upper furnace body closure.
The ingot furnace that the embodiment of the invention proposes can improve heat reflectivity by heat shielding, thereby reduces heat power consumption, reduces production costs, and the ingot furnace of the process evidence embodiment of the invention can save energy more than 5%.And the ingot furnace that proposes of the embodiment of the invention not only can be used for the preparation of polysilicon, also can be used for the preparation of silicon single crystal, germanium or other compound semiconductors.
Additional aspect of the present invention and advantage part in the following description provide, and part will become obviously from the following description, or recognize by practice of the present invention.
Description of drawings
The present invention above-mentioned and/or additional aspect and advantage from obviously and easily understanding becoming the description of embodiment, wherein below in conjunction with accompanying drawing:
Fig. 1 a has shown the cross sectional representation of the heat shielding of one embodiment of the present of invention;
Fig. 1 b shown according to an embodiment of the invention, along the orthographic plan of the direction A of Fig. 1 a;
Fig. 1 c shown in accordance with another embodiment of the present invention, along the orthographic plan of the direction A of Fig. 1 a;
Fig. 1 d has shown the cross sectional representation of the heat shielding of an alternative embodiment of the invention;
Fig. 2 a has shown the installment state synoptic diagram of polycrystalline silicon ingot or purifying furnace according to an embodiment of the invention;
Fig. 2 b has shown the user mode synoptic diagram of polysilicon casting stove according to an embodiment of the invention; And
Fig. 2 c has shown the user mode synoptic diagram of polysilicon casting stove according to another embodiment of the invention.
Embodiment
Describe embodiments of the invention below in detail, the example of described embodiment is shown in the drawings, and wherein identical from start to finish or similar label is represented identical or similar elements or the element with identical or similar functions.Below by the embodiment that is described with reference to the drawings is exemplary, only is used to explain the present invention, and can not be interpreted as limitation of the present invention.
Increase one or more heat-reflecting material plates under the carbon-carbon composite matrix of the present invention in heat shielding, thereby improve heat reflectivity, can reduce heat power consumption widely, thereby reduce production costs.Need to prove that this heat shielding can be used in the various ingot furnaces, in the preparation equipment of for example polycrystalline silicon ingot or purifying furnace, silicon single crystal ingot furnace, even germanium or other compound semiconductors.Describe in detail below with reference to accompanying drawings according to heat shielding of the present invention.
As shown in Figure 1, be the cross sectional representation of the heat shielding 200 of the embodiment of the invention.This heat shielding 200 comprises carbon-carbon composite matrix 210 and is positioned under the carbon-carbon composite matrix 210, and with carbon-carbon composite matrix 210 interconnective at least one heat-reflecting material plate 220.Described heat-reflecting material plate 220 is positioned under the described carbon-carbon composite matrix, and interconnect with described carbon-carbon composite matrix, the material of described heat-reflecting material plate 220 is chosen to, to the volume reflection that incides the heat on the described heat-reflecting material plate 220 volume reflection when inciding described heat on the carbon-carbon composite.According to one embodiment of present invention, that is, this heat-reflecting material plate 220 is not only wanted can anti-high temperature more than 1500 degrees centigrade.According to one embodiment of present invention, described heat-reflecting material plate 220 can also have the smooth finish higher than conventional carbon-carbon composite, according to one embodiment of present invention, the surfaceness (Ra) of this heat-reflecting material plate 220 can be processed into less than 25 microns, so that the surface has high heat reflectivity.According to one embodiment of present invention, the surfaceness of described heat-reflecting material plate 220 (Ra) is processed into less than 12.5 microns, even in follow-up use, also can guarantee the heat reflection performance of this heat-reflecting material plate 220 when its surface deposition has settling thus.The contriver is through discovering that for satisfying these conditions, as one embodiment of the present of invention, described heat-reflecting material plate 220 can be formed by graphite, molybdenum or tungsten.Need to prove; can under carbon-carbon composite matrix 210, directly increase one or more heat-reflecting material plates 220 in embodiments of the present invention; but those skilled in the art should expect; can also increase one or more layers transition layer again between carbon-carbon composite matrix 210 and heat-reflecting material plate 220, these all should be included within protection scope of the present invention.In addition,, in Fig. 1, have tangible interface between carbon-carbon composite matrix 210 and the heat-reflecting material plate 220 (for example graphite cake), but in practice owing to the interaction between two kinds of materials, its interface may not be clear for illustrated clear.
Fig. 1 b shown according to the first embodiment of the present invention, along the vertical view of the direction A of Fig. 1 a.According to one embodiment of present invention, described thermal reflective material layer 220 can comprise one or more heat-reflecting material piece.4 in Fig. 1 b, have been shown, promptly 2201,2202,2203,2204.Need to prove, be for exemplary purposes shown in Fig. 1 b, rather than in order to limit protection scope of the present invention.Can be formed with the location division 23 that interfixes with crucible on the edge of Fig. 1 b.In one embodiment of the invention, described location division 23 forms locating slot.Need to prove that the shape of the described fixed part 23 shown in Fig. 1 b is that those of ordinary skills obviously can adopt the matched shape of other shapes to fix with crucible for exemplary purposes.
Fig. 1 c shown according to a second embodiment of the present invention, along the vertical view of the direction A of Fig. 1 a.As shown in Fig. 1 c, be fixed with a plurality of heat-reflecting material plates 2300 with threaded fastener 2400 (for example screw) on the described carbon-carbon composite matrix 210.Described heat-reflecting material plate 2300 can be formed by graphite, molybdenum or tungsten.Described threaded fastener 2400 can be made by graphite, molybdenum, tungsten or carbon-carbon composite.
Fig. 1 d has shown the cross sectional representation of the heat shielding 200 ' of another embodiment of the present invention.In this embodiment, the structure of described heat shielding, material are identical substantially with structure, material among Fig. 1 a, difference is that described heat shielding 200 ' also comprises gas diversion tube 240 ', it is arranged on the upper surface of carbon-carbon composite matrix, and described gas diversion tube 240 ' is connected with the gas entrance hole of described heat shielding 200 '.For identical technical characterictic is that succinct purpose is not describing in detail herein.With reference to Fig. 1 d described gas diversion tube 240 ' is described below.
The gas entrance hole top of described heat shielding 200 ' is provided with gas diversion tube 240 ', the Ar gas that this gas diversion tube 240 ' is used for discharging from the Ar source of the gas will as often as possible import between the silicon melt in heat shielding 200 ' and the quartz crucible 1 (will describe in detail below), thereby can be in the gas velocity above the increase melt under the situation that does not increase gas flow, volatile matter in the melt is taken away as far as possible, keep the bright and clean of heat shielding 200 ' lower surface simultaneously, and then keep heat shielding 200 ' lower surface to have high heat reflectivity.Reduce the usage quantity of Ar gas thus, reduced cost.
The material of described gas diversion tube 240 ' can be graphite, C-C composite, molybdenum or tungsten, and shape can be the right cylinder (also can be other shapes, as the taper type of inversion and hollow) of hollow.This gas diversion tube 240 ' can with heat shielding 200 ' the integrally formed or independent formation.Preferably, described gas diversion tube 7 can be individually formed with heat shielding 2, and can steady brace be set on every side at the gas entrance hole 230 ' of heat shielding 200 ', with convenient described gas diversion tube 240 ' is positioned.
Heat shielding according to an embodiment of the invention is matrix with the carbon-carbon composite, can guarantee that entire structure has high strength, and is the highly polished of surface with graphite, molybdenum or tungsten, can effectively improve this surperficial heat reflectivity.
As mentioned above, this heat shielding can be used in the various ingot furnaces, in the preparation equipment of for example polycrystalline silicon ingot or purifying furnace, silicon single crystal ingot furnace, even germanium or other compound semiconductors.Describe in detail below with reference to accompanying drawings according to heat shielding of the present invention.Describe with reference to Fig. 2 below heat shielding according to the present invention is applied to polycrystalline silicon ingot or purifying furnace.For being different from above-mentioned explanation to heat shielding, in following, described heat shielding is marked as 2.
Shown in Fig. 2 a and 2b, polycrystalline silicon ingot or purifying furnace installment state synoptic diagram and user mode synoptic diagram have been shown respectively.In Fig. 2 a, be provided with upper furnace body 101 and lower furnace body 102 in the polycrystalline silicon ingot or purifying furnace 100, be provided with the quartz crucible 1 that is positioned at anchor 41,42 and 43 at lower furnace body 102, the HIGH-PURITY SILICON material can be put into the quartz crucible 1 of polycrystalline silicon ingot or purifying furnace 100.Described anchor 41,42 and 43 can be formed by graphite cake.The supporting seat top edge of anchor 41 bottoms be provided with breach so that for example the transportation means of fork truck carry.As shown in Fig. 2 a, 2b, in upper furnace body 101, be provided with heat-insulation cage 4, and a plurality of high temperature heater (HTH)s, described high temperature heater (HTH) can comprise top heater 31 and sidewall well heater 32, after upper furnace body 101 and lower furnace body 102 closures, described top heater 31 and sidewall well heater 32 cover above the reaching all around of described quartz crucible 1.This ingot furnace also comprises the heat shielding 2 that is arranged between quartz crucible 1 and the top heater 31, and the center of this heat shielding 2 has gas entrance hole 21, can be provided with a plurality of fixed part (not shown) that interfix with anchor 41,42 and 43 around the heat shielding 2.Heat shielding 2 can stop volatile matter directly to deposit on the top heater 31 and other lagging materials of quartz crucible 1 top, gas entrance hole 21 by heat shielding 2 centers can also import to the rare gas element of for example argon gas (Ar) the silicon melt surface in the crucible 1, and a plurality of air outlet openings outflows that are provided with around the top by quartz crucible 1, thereby can take away various volatile matters by described rare gas element.
According to one embodiment of present invention, shown in Fig. 2 c, the gas entrance hole top of described heat shielding 2 is provided with gas diversion tube 7, the Ar gas that this gas diversion tube 7 is used for discharging from the Ar source of the gas as often as possible imports between the silicon melt in heat shielding 2 and the quartz crucible 1, thereby can be in the gas velocity above the increase melt under the situation that does not increase gas flow, volatile matter in the melt is taken away as far as possible, keep the bright and clean of heat shielding lower surface simultaneously, and then keep the heat shielding lower surface to have high heat reflectivity.Reduce the usage quantity of Ar gas thus, reduced cost.
The material of described gas diversion tube 7 can be graphite, C-C composite, molybdenum or tungsten, and shape can be the right cylinder (also can be other shapes, as the taper type of inversion and hollow) of hollow, and its height can be decided according to concrete Ar gas port position.This gas diversion tube 7 can or be individually formed with heat shielding 2 one.Preferably, described gas diversion tube 7 can be individually formed with heat shielding 2, directly this gas diversion tube 7 is placed on the heat shielding 2 when shove charge and gets final product, can be provided with the steady brace (not shown) this moment around the gas entrance hole of heat shielding 2, with convenient described gas diversion tube 7 is positioned.
When using ingot furnace, shown in Fig. 2 b, with upper furnace body 101 and lower furnace body 102 when closed, make top heater 31 and sidewall well heater 32 be loaded into quartz crucible 1 around, and heat-insulation cage 4 entangles quartz crucible 1 and prevents the heat outflow.By vacuum port 103 space after the closure is aspirated to after the vacuum, under the heating of quartz crucible 1 top heater 31 and sidewall well heater 32, silicon in the fused quartz crucible 1, then the thermal field in the heat-insulation cage 4 is controlled, begin upwards directional freeze from the bottom of quartz crucible 1, the bottom of quartz crucible 1 has been formed with the polysilicon 51 that solidifies shown in Fig. 2 b.
Because the temperature at quartz crucible 1 top very high (can reach 1500 degree), and quartz crucible 1 is very big usually, the for example at present length and the wide 880mm * 880mm that reaches of the square crucible of charge amount 450Kg commonly used, therefore not only require the heat shielding 2 can be high temperature resistant, and require heat shielding 2 to have very high intensity, and the heat that requires heat shielding 2 can not too hinder top heater 31 is delivered in the silicon melt of quartz crucible 1.
Certainly, in other embodiments of the invention, if heat shielding 200 is used in the ingot furnace, also need heat shielding 200 is made some changes or increased some assemblies to adapt to the ingot furnace of different structure form, for example for polycrystalline silicon ingot or purifying furnace commonly used at present, just also need offer the gas entrance hole, make that for example the rare gas element of argon gas (Ar) can blow to the silicon melt surface in the central position of carbon-carbon composite matrix 210 and heat-reflecting material plate 220.In addition, for ingot furnace in crucible fix, also may be provided with a plurality of fixed parts (as shown in Fig. 1 b, 1c) of interfixing with crucible of being used in heat shielding 200.More than the assembly of these changes or increase only be schematic; ingot furnace for different structure; those skilled in the art can make different modifications to the heat shielding that the present invention proposes; if but these modifications only are in order to make heat shielding adapt to the structure of ingot furnace, so just should to be included within protection scope of the present invention.
In one embodiment of the invention, can on the carbon-carbon composite matrix, form described heat-reflecting material plate by the mode of physics or chemical vapor deposition.According to one embodiment of present invention, the heat-reflecting material plate can also be fixed on the mode (as shown in Fig. 1 c) of carbon-carbon composite matrix by the mode of mechanical fixation, promptly the threaded fastener by correspondence is fixed on one or more heat-reflecting material plates on the carbon-carbon composite matrix, wherein, described threaded fastener can be made by graphite, molybdenum, tungsten or carbon-carbon composite.
Adopt heat shielding as shown in Figure 2 in the ingot furnace that the present invention proposes, this heat shielding comprises the carbon-carbon composite matrix and is positioned at least one heat-reflecting material plate under the carbon-carbon composite matrix.Described heat-reflecting material plate is positioned under the described carbon-carbon composite matrix, and interconnect with described carbon-carbon composite matrix, the material of described heat-reflecting material plate is chosen to, to the volume reflection that incides the heat on the described heat-reflecting material plate volume reflection when inciding described heat on the carbon-carbon composite.Shown in Fig. 2 a and 2b, be respectively the ingot furnace installment state of the embodiment of the invention and the synoptic diagram of user mode, this ingot furnace 100 comprises: upper furnace body 101; Lower furnace body 102, described lower furnace body 102 match with upper furnace body 101 and are vertically removable.Be provided with supporting seat 6 in lower furnace body 102, supporting seat 6 upper supports have anchor 41,42 and 43, and anchor 41,42 and 43 internal fixing have crucible 1, and the top of crucible 1 is provided with heat shielding 20.Described anchor 41,42 and 43 can be made by graphite.In an embodiment of the present invention, the center of heat shielding 20 is provided with gas entrance hole 21, and be provided with a plurality of fixed parts of interfixing with anchor 41,42 and 43 of being used for around the heat shielding 20, heat shielding 20 comprises carbon-carbon composite matrix 22, with be positioned under the carbon-carbon composite matrix 22, and with carbon-carbon composite matrix 22 interconnective one or more heat-reflecting material plates 23.Be provided with heat-insulation cage 4 in the upper furnace body 101 of this ingot furnace 100, and top heater 31 and side well heater 32 in the heat-insulation cage 4.Shown in Fig. 3 b, after upper furnace body 101 moves down and closes up with lower furnace body 102, space after will merging by vacuum port 103 is inhaled and is vacuum, this moment top heater 31 and side well heater 32 be carried in crucible 1 around, and heat-insulation cage 4 is with crucible 1, and top heater 31 and side well heater 32 cover, and prevents scattering and disappearing of heat.Under the heating of crucible 1 top heater 31 and sidewall well heater 32, the silicon in fusion crucible 1 top, the bottom from crucible 1 begins directional freeze then.
The ingot furnace that the embodiment of the invention proposes can improve heat reflectivity by heat shielding, thereby reduces heat power consumption, and then reduces production costs, and the ingot furnace of the process evidence embodiment of the invention can save energy more than 5%.And the ingot furnace 100 that proposes of the embodiment of the invention not only can be used for the preparation of polysilicon, also can be used for the preparation of silicon single crystal, germanium or other compound semiconductors.
Although illustrated and described embodiments of the invention, for the ordinary skill in the art, be appreciated that without departing from the principles and spirit of the present invention and can carry out multiple variation, modification, replacement and modification that scope of the present invention is by claims and be equal to and limit to these embodiment.
Claims (18)
1. a heat shielding is characterized in that, comprising:
The carbon-carbon composite matrix; With
At least one heat-reflecting material plate, described heat-reflecting material plate is positioned under the described carbon-carbon composite matrix, and interconnect with described carbon-carbon composite matrix, the material of described heat-reflecting material plate is chosen to, to the volume reflection that incides the heat on the described heat-reflecting material plate volume reflection when inciding described heat on the carbon-carbon composite.
2. heat shielding as claimed in claim 1 is characterized in that, the central position of described carbon-carbon composite matrix and described heat-reflecting material plate is equipped with the gas entrance hole.
3. heat shielding as claimed in claim 1 is characterized in that, described heat shielding is formed with a plurality of being used for and the mutual localized location division of crucible.
4. as each described heat shielding of claim 1-3, it is characterized in that wherein, described heat-reflecting material plate is formed by graphite, molybdenum or tungsten.
5. heat shielding as claimed in claim 4 is characterized in that, wherein, described heat-reflecting material plate is formed on the described carbon-carbon composite matrix by vapor deposition.
6. heat shielding as claimed in claim 1 is characterized in that the surfaceness of the lower surface of described heat-reflecting material plate is less than 25 microns.
7. heat shielding as claimed in claim 4, it is characterized in that, described heat-reflecting material plate is a plurality of, and described heat-reflecting material plate is connected to described carbon-carbon composite matrix by threaded fastener, and described threaded fastener is made by graphite, molybdenum, tungsten or carbon-carbon composite.
8. heat shielding as claimed in claim 1 is characterized in that, the thermal conductivity of described heat-reflecting material plate is not less than the thermal conductivity of carbon-carbon composite.
9. heat shielding as claimed in claim 1 is characterized in that, described heat shielding further has: be arranged on the gas diversion tube on the upper surface of described carbon-carbon composite matrix, described gas diversion tube is connected with the gas entrance hole of described heat shielding.
10. heat shielding as claimed in claim 9 is characterized in that described gas diversion tube is formed by graphite, molybdenum, tungsten or carbon-carbon composite.
11. an ingot furnace comprises:
Upper furnace body;
Lower furnace body, described lower furnace body match with described upper furnace body and are vertically removable;
Be arranged on the bracing or strutting arrangement in the described lower furnace body, described bracing or strutting arrangement is provided with crucible;
At least one well heater, described well heater are used for when described lower furnace body and described upper furnace body closure described crucible being heated;
Heat-insulation cage, described heat-insulation cage is arranged in the described upper furnace body, and covers described at least one well heater, and can be removable along vertical direction; With
Be arranged on the heat shielding of the opening end of described crucible, the center of described heat shielding is provided with the gas entrance hole, and described heat shielding comprises:
The carbon-carbon composite matrix; With
At least one heat-reflecting material plate, described heat-reflecting material plate is positioned under the described carbon-carbon composite matrix, and interconnect with described carbon-carbon composite matrix, the material of described heat-reflecting material plate is chosen to, to the volume reflection that incides the heat on the described heat-reflecting material plate volume reflection when inciding described heat on the carbon-carbon composite.
12. ingot furnace as claimed in claim 11 is characterized in that, described heat-reflecting material plate is formed by graphite, molybdenum or tungsten.
13. ingot furnace as claimed in claim 12 is characterized in that, described heat-reflecting material plate is formed on the described carbon-carbon composite matrix by vapor deposition.
14. ingot furnace as claimed in claim 12, it is characterized in that, described heat-reflecting material plate is a plurality of, and described heat-reflecting material plate is connected to described carbon-carbon composite matrix by threaded fastener, and described threaded fastener is made by graphite, molybdenum, tungsten or carbon-carbon composite.
15. ingot furnace as claimed in claim 11 is characterized in that, the upper surface of described heat shielding is provided with gas diversion tube, and described gas diversion tube is connected with the gas entrance hole of described heat shielding.
16. ingot furnace as claimed in claim 15 is characterized in that, described gas diversion tube is formed by graphite, molybdenum, tungsten or carbon-carbon composite.
17. ingot furnace as claimed in claim 11 is characterized in that, the surfaceness of the lower surface of described heat-reflecting material plate is less than 25 microns.
18. ingot furnace as claimed in claim 11, it is characterized in that, described well heater comprises side well heater and top heater, and described side well heater and top heater cover described crucible and heat with at least a portion to described crucible when described lower furnace body and described upper furnace body closure.
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| CN 201010161556 CN101805922A (en) | 2010-04-27 | 2010-04-27 | Heat shielding and ingot furnace with same |
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| CN101914805A (en) * | 2010-09-07 | 2010-12-15 | 王楚雯 | Directional solidification furnace with improved crucible cover part |
| CN101949056A (en) * | 2010-09-25 | 2011-01-19 | 王敬 | Directional solidification furnace with heat preservation part at bottom of side wall of crucible |
| CN101967675A (en) * | 2010-11-01 | 2011-02-09 | 王楚雯 | Device for manufacturing single crystal ingots |
| CN103597917A (en) * | 2011-02-15 | 2014-02-19 | 布罗斯汽车零件维尔茨堡两合公司 | Temperature control element and method for attaching an electronic component to the temperature control element |
| CN104088009A (en) * | 2014-07-04 | 2014-10-08 | 江苏阳帆机电设备制造有限公司 | Downwards uncovering type crystal growth furnace |
| CN104711679A (en) * | 2013-12-12 | 2015-06-17 | 航天睿特碳材料有限公司 | Single crystal furnace carbon/carbon composite material heat screen and preparation method thereof |
| US20150175098A1 (en) * | 2012-09-10 | 2015-06-25 | Yazaki Corporation | Wire harness |
| CN108239785A (en) * | 2016-12-23 | 2018-07-03 | 有研半导体材料有限公司 | To the processing method of bridging during a kind of vertical pulling method production monocrystalline silicon |
| CN111763985A (en) * | 2020-07-01 | 2020-10-13 | 中国科学院上海微系统与信息技术研究所 | Heat shield structure for single crystal production furnace and single crystal production furnace |
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| CN101914805A (en) * | 2010-09-07 | 2010-12-15 | 王楚雯 | Directional solidification furnace with improved crucible cover part |
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| CN101949056B (en) * | 2010-09-25 | 2013-01-30 | 王敬 | Directional solidification furnace with heat preservation part at bottom of side wall of crucible |
| CN101967675B (en) * | 2010-11-01 | 2014-05-07 | 王楚雯 | Device for manufacturing single crystal ingots |
| CN101967675A (en) * | 2010-11-01 | 2011-02-09 | 王楚雯 | Device for manufacturing single crystal ingots |
| CN103597917A (en) * | 2011-02-15 | 2014-02-19 | 布罗斯汽车零件维尔茨堡两合公司 | Temperature control element and method for attaching an electronic component to the temperature control element |
| US20150175098A1 (en) * | 2012-09-10 | 2015-06-25 | Yazaki Corporation | Wire harness |
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| CN104711679A (en) * | 2013-12-12 | 2015-06-17 | 航天睿特碳材料有限公司 | Single crystal furnace carbon/carbon composite material heat screen and preparation method thereof |
| CN104088009A (en) * | 2014-07-04 | 2014-10-08 | 江苏阳帆机电设备制造有限公司 | Downwards uncovering type crystal growth furnace |
| CN108239785A (en) * | 2016-12-23 | 2018-07-03 | 有研半导体材料有限公司 | To the processing method of bridging during a kind of vertical pulling method production monocrystalline silicon |
| CN111763985A (en) * | 2020-07-01 | 2020-10-13 | 中国科学院上海微系统与信息技术研究所 | Heat shield structure for single crystal production furnace and single crystal production furnace |
| CN111763985B (en) * | 2020-07-01 | 2021-10-19 | 中国科学院上海微系统与信息技术研究所 | Heat shield structure for single crystal production furnace and single crystal production furnace |
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Application publication date: 20100818 |