CN101949056A - Directional solidification furnace with heat preservation part at bottom of side wall of crucible - Google Patents
Directional solidification furnace with heat preservation part at bottom of side wall of crucible Download PDFInfo
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- CN101949056A CN101949056A CN 201010291321 CN201010291321A CN101949056A CN 101949056 A CN101949056 A CN 101949056A CN 201010291321 CN201010291321 CN 201010291321 CN 201010291321 A CN201010291321 A CN 201010291321A CN 101949056 A CN101949056 A CN 101949056A
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- directional solidification
- heat preservation
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Abstract
The invention discloses a directional solidification furnace. The directional solidification furnace comprises an upper furnace body, a lower furnace body, a crucible, at least one heater, a crucible retainer, a crucible support, a thermal insulation part, a vent pipe and a heat preservation part, wherein the lower furnace body is matched with the upper furnace body to form a furnace body space; the crucible is arranged in the furnace body space and used for accommodating feedstock; the at least one heater is used for heating the crucible and melting the feedstock accommodated in the crucible; the crucible retainer is used for retaining the crucible and arranged on the crucible support; the thermal insulation part is accommodated in the furnace body space, covers the heater and is used for controlling the directional solidification of the feedstock in the crucible; the vent pipe is connected to an external air source and vertically passes through the thermal insulation part; and the heat preservation part is arranged on the outer side of the bottom of the crucible retainer. The directional solidification furnace improves the crystal quality of polycrystalline ingots, improves production benefit and improves the conversion efficiency of solar cells prepared from the polycrystalline ingots.
Description
Technical field
The present invention relates to the apparatus for directional solidification of single crystal rod for example or polycrystalline ingot, especially relate to a kind of directional solidification processes that utilizes and produce sun power with directional solidification furnace polycrystal silicon ingot, be provided with heat preservation component in the crucible wall bottom.
Background technology
When utilizing directional solidification processes production sun power to use polycrystal silicon ingot, because the cooling raio other parts of quartz crucible bottom are fast, at first begin crystallization, then upwards growth gradually from the bottom.If in the time of making the shape of solid/liquid interfaces keep straight or dimpling, then most silicon crystal grains keep growth straight up easily always, and crystal boundary then almost keeps vertically, obtains like this arranging near ideal crystal grain, crystal ingot is best in quality, and the conversion efficiency of solar cell of preparing is also the highest.Therefore, in the growing polycrystalline silicon ingot process, wish that solid/liquid interfaces is straight or dimpling shape.
Fig. 1 is the directional freeze system architecture synoptic diagram of prior art.As shown in Figure 1, the directional freeze system of prior art comprises: upper furnace body 101 '; With the lower furnace body 102 of described upper furnace body 101 ' match '; Be arranged on the crucible bearing 6 of described lower furnace body 102 ' interior ', be arranged at described crucible bearing 6 ' on crucible retainer 5 ' and the quartz crucible 2 of crucible retainer 5 ' interior setting '; Be arranged on crucible retainer 5 ' lateral side well heater 32 ' and be arranged on the heater top 31 of quartz crucible 2 ' top '; Cover on heater top 31 ' and the heat insulating member 4 in side well heater 32 ' outside '.In the process of feed fusing and melt directional freeze, need to feed rare gas element such as Ar gas with the impurity such as carbonaceous gas that generated in the feed pyroprocess from venting hole 103 ' discharge out of the furnace.
According to existing directional freeze system, decide in the ingot process producing polysilicon, as shown in Figure 1, solid 82 ' with melt 81 ' the edge section (being close to the quartz crucible sidewall sections) at interface can not remain straight or the dimpling shape, but be concavity.And it is, little and in disorder by the crystal grain of the part of contiguous quartz crucible sidewall in the resulting as can be known polycrystalline ingot of dynamic analysis, crystal mass is very poor, minority carrier life time is low and the conversion efficiency of solar cell prepared by this part polycrystalline ingot is low along with the passing of the solid/liquid interfaces shown in the direction of arrow among the figure.
Summary of the invention
In view of this, need provide a kind of new directional solidification furnace, described directional solidification furnace can make that the solid/liquid interfaces shape remains dimpling shape in the directional freeze process, improves the crystal mass of polycrystalline ingot, and then improves Production Gain.
The inventor etc. have carried out repeatedly to existing directional solidification furnace, and thereby research has drawn following conclusion, and has finished the present invention on this basis.Promptly, existing directional solidification furnace only is provided with the crucible retainer of graphite material at the quartz crucible sidewall, by upwards promoting heat insulating member so that in the process of melt directional freeze because working gas such as Ar air-flow are taken away a large amount of heats from the crucible retainer of graphite material, caused the cooling of quartz crucible sidewall too fast thus.And because directional freeze mechanism has determined the side well heater only to cover upper part of the sidewall of quartz crucible, its lower part does not have corresponding heater block, so the undercooling of the bottom of crucible wall is especially obvious.Influenced by this, the melt of close crucible wall begins crystallization, and therefore the solid/liquid interfaces of contiguous crucible wall also becomes spill, and crystal grain is to the growth of crucible central cross, and this part crystal boundary is difficult to maintenance vertically, thereby resulting crystal grain is very little, and crystal boundary is also very disorderly.Caused the crystal grain of the part of contiguous quartz crucible sidewall in the polycrystalline ingot that existing directional freeze system obtains little and in disorder thus, crystal mass is very poor, minority carrier life time is low, the conversion efficiency of solar cell of preparing is low.
Directional solidification furnace according to the embodiment of the invention comprises: upper furnace body; Lower furnace body, described lower furnace body match with described upper furnace body to form furnace space; Crucible, described crucible are arranged on and are used to hold feed in the furnace space; At least one well heater, described well heater is contained in the described furnace space, is used for the feed that heating crucible and fusing are contained in crucible; The crucible retainer, described crucible retainer is used to keep described crucible; The crucible bearing, the described crucible retainer that accommodates described crucible is arranged on the described crucible bearing; Heat insulating member, described heat insulating member are contained in the described furnace space and cover described well heater, and described heat insulating member be configured to vertically removable with respect to described crucible, to control the directional freeze of the feed in the described crucible; Ventpipe, described ventpipe are connected to external air source and run through described heat insulating member vertically, to introduce working gas in crucible; And heat preservation component, described heat preservation component is arranged at the outside, bottom of described crucible retainer.
According to such scheme of the present invention, by heat preservation component in the bottom of described crucible retainer arranged outside, solved the supercooled problem of quartz crucible lower sidewall, the solid/liquid interfaces shape remains dimpling shape in the directional freeze process thereby realized making, improved the crystal mass of polycrystalline ingot, and then improved productivity effect, and improved the conversion efficiency of solar cell of preparing by the polycrystalline ingot of being produced.Moreover, this heat preservation component can also reduce the heating power of producing in the polycrystalline ingot process, thereby cuts down the consumption of energy.
In addition, directional solidification furnace according to the above embodiment of the present invention can also have following additional technical feature:
According to one embodiment of present invention, described heat preservation component is made by the cured charcoal felt lagging material.
According to one embodiment of present invention, described well heater comprises and is positioned at the lateral side well heater of described crucible that the top height of wherein said heat preservation component is not higher than the bottom height of described side well heater.
According to one embodiment of present invention, the suitable and cross section longitudinally of the outer wall of described heat preservation component and described crucible retainer is taper or frustum.
Particularly, described taper or frustum can have L shaped kink with suitable with the bottom of described crucible retainer in its bottom.
According to one embodiment of present invention, described heat preservation component longitudinally cross section be L shaped prism-shaped.
Additional aspect of the present invention and advantage part in the following description provide, and part will become obviously from the following description, or recognize by practice of the present invention.
Description of drawings
Above-mentioned and/or additional aspect of the present invention and advantage are from obviously and easily understanding becoming the description of embodiment below in conjunction with accompanying drawing, wherein:
Fig. 1 has shown the crystal growth synoptic diagram of directional solidification furnace in the directional freeze process of prior art;
Fig. 2 has shown the structural representation of directional solidification furnace before charging finishes post-heating of an example of the embodiment of the invention;
Fig. 3 shows directional solidification furnace shown in Figure 2 crystal growth synoptic diagram in the directional freeze process;
Fig. 4 has shown the structural representation of directional solidification furnace before charging finishes post-heating of another example of the embodiment of the invention.
Embodiment
Describe embodiments of the invention below in detail, the example of described embodiment is shown in the drawings, and wherein identical from start to finish or similar label is represented identical or similar elements or the element with identical or similar functions.Below by the embodiment that is described with reference to the drawings is exemplary, only is used to explain the present invention, and can not be interpreted as limitation of the present invention.
The system or the equipment of polycrystalline material the present invention relates to grow.Below in conjunction with Fig. 2～Fig. 4 to being that example is described according to directional solidification furnace of the present invention to make the polycrystalline polycrystalline furnace.Wherein, Fig. 2 has shown the structural representation of directional solidification furnace before charging finishes post-heating of an example of the embodiment of the invention; Fig. 3 shows directional solidification furnace shown in Figure 2 crystal growth synoptic diagram in the directional freeze process; Fig. 4 has shown the structural representation of directional solidification furnace before charging finishes post-heating of another example of the embodiment of the invention.
In one embodiment of the invention, as shown in Figure 2, described directional solidification furnace 100 comprises: upper furnace body 101; Lower furnace body 102, described lower furnace body 102 match with described upper furnace body 101 to form furnace space; Crucible 2, described crucible 2 are arranged on and are used to hold feed 8 in the furnace space; At least one well heater 3, described well heater is contained in the described furnace space, is used for the feed that heating crucible and fusing are contained in crucible; Crucible retainer 5, described crucible retainer 5 is used to keep described crucible 2; Crucible bearing 6, the described crucible retainer 5 that accommodates described crucible 2 are arranged on the described crucible bearing 6; Heat insulating member 4, described heat insulating member 4 are contained in the described furnace space and cover described well heater 3, and described heat insulating member 4 be configured to vertically removable with respect to described crucible 2, to control the directional freeze of the feed in the described crucible 2; Ventpipe 105, described ventpipe 105 are connected to external air source and run through described heat insulating member 4 vertically, to introduce working gas in crucible; And heat preservation component 9, described heat preservation component 9 is arranged at the outside, bottom of described crucible retainer 5.Need to introduce working gas in the process of feed fusing and melt directional freeze, promptly rare gas element or Ar gas etc. discharge out of the furnace from venting hole 103 with the impurity such as carbonaceous gas that will be generated in the feed pyroprocess.
Wherein, well heater 3 comprises heater top 31 and side well heater 32, and heat insulating member 4 is made of top insulation part 41 and side insulation part 42.Need to prove that the top heater 31 that is positioned within the described heat insulating member 4 is optionally, when implementing the solution of the present invention, also can omit this top heater 31.
Below in conjunction with Fig. 3 the directional solidification furnace that utilizes such scheme of the present invention being carried out the directional solidification growth polycrystalline ingot is described.
In addition, in an example of directional solidification furnace of the present invention, heat preservation component 9 is made by the cured charcoal felt lagging material.Can when guaranteeing resistance to elevated temperatures, play insulation effect well thus.
In an example of directional solidification furnace of the present invention, well heater comprises the heater top 31 that is positioned at the lateral side well heater 32 of described crucible and is positioned at the crucible top, and wherein the top height of heat preservation component 9 is not higher than the bottom height of described side well heater 32.Solve the undercooling problem of crucible bottom end side wall part melt when guaranteeing high heating efficiency, less energy-consumption thus, thereby guarantee that solidifying in the process of growth solid/liquid interfaces at crystal orientation passes with the dimpling shape.
In an example of directional solidification furnace of the present invention, as shown in Figure 3, heat preservation component 9 cross section longitudinally is a taper.Certainly, when heat preservation component 9 cross section longitudinally be that the top can reach effect same when having the frustum of certain width.Described heat preservation component can be fixed in the bottom outer wall of described crucible retainer by fastening piece.From installing and the consideration of convenient in carrying aspect, described taper or frustum can also have the L shaped kink suitable with crucible retainer 5 in the bottom, directly to be inserted in the bottom of described crucible retainer.
In an example of directional solidification furnace of the present invention, as shown in Figure 4, the longitudinal cross-section of heat preservation component 9 can also be the prism-shaped of " L " shape.Heat preservation component 9 processing with this shape are more convenient.
The directional solidification furnace that the present invention proposes not only can be used for the preparation of polysilicon and silicon single crystal, also can be used for the preparation of directional solidification method growing single-crystal and polycrystalline germanium or other compound semiconductor crystals and crystalline oxide material.
Need to prove that any mentioning " embodiment ", " embodiment ", " illustrative examples " etc. mean concrete member, structure or the characteristics described in conjunction with this embodiment and be contained among at least one embodiment of the present invention.Not necessarily refer to identical embodiment in this schematic statement everywhere of this specification sheets.And when describing concrete member, structure or characteristics in conjunction with any embodiment, what advocated is, realizes that in conjunction with other embodiment such member, structure or characteristics all drop within those skilled in the art's the scope.
Although the specific embodiment of the present invention is described in detail with reference to a plurality of illustrative examples of the present invention, but it must be understood that, those skilled in the art can design multiple other improvement and embodiment, and these improve and embodiment will drop within the spirit and scope.Particularly, within the scope of aforementioned open, accompanying drawing and claim, can make rational modification and improvement aspect the layout of component and/or subordinate composite configuration, and can not break away from spirit of the present invention.Except the modification and the improvement of component and/or layout aspect, its scope is limited by claims and equivalent thereof.
Claims (6)
1. a directional solidification furnace is characterized in that, comprising:
Upper furnace body;
Lower furnace body, described lower furnace body match with described upper furnace body to form furnace space;
Crucible, described crucible are arranged on and are used to hold feed in the furnace space;
At least one well heater, described well heater is contained in the described furnace space, is used for the feed that heating crucible and fusing are contained in crucible;
The crucible retainer, described crucible retainer is used to keep described crucible;
The crucible bearing, the described crucible retainer that accommodates described crucible is arranged on the described crucible bearing;
Heat insulating member, described heat insulating member are contained in the described furnace space and cover described well heater, and described heat insulating member be configured to vertically removable with respect to described crucible, to control the directional freeze of the feed in the described crucible;
Ventpipe, described ventpipe are connected to external air source and run through described heat insulating member vertically, to introduce working gas in crucible; And
Heat preservation component, described heat preservation component are arranged at the outside, bottom of described crucible retainer.
2. directional solidification furnace according to claim 1 is characterized in that described heat preservation component is made by the cured charcoal felt lagging material.
3. directional solidification furnace according to claim 1 is characterized in that, described well heater comprises and be positioned at the lateral side well heater of described crucible that the top height of wherein said heat preservation component is not higher than the bottom height of described side well heater.
4. directional solidification furnace according to claim 3 is characterized in that, the suitable and cross section longitudinally of the outer wall of described heat preservation component and described crucible retainer is taper or frustum.
5. directional solidification furnace according to claim 4 is characterized in that, described taper or frustum have L shaped kink with suitable with the bottom of described crucible retainer in the bottom.
6. directional solidification furnace according to claim 3 is characterized in that, described heat preservation component cross section longitudinally is L shaped prism-shaped.
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| CN 201010291321 CN101949056B (en) | 2010-09-25 | 2010-09-25 | Directional solidification furnace with heat preservation part at bottom of side wall of crucible |
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| CN 201010291321 CN101949056B (en) | 2010-09-25 | 2010-09-25 | Directional solidification furnace with heat preservation part at bottom of side wall of crucible |
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Cited By (8)
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| CN102242391A (en) * | 2011-06-15 | 2011-11-16 | 安阳市凤凰光伏科技有限公司 | Heater improvement apparatus in ingot furnace producing quasi-single crystal silicon with casting method |
| CN102286774A (en) * | 2011-06-15 | 2011-12-21 | 安阳市凤凰光伏科技有限公司 | Casting method for producing similar single crystal silicon ingot thermal field gradient improving devices |
| CN102644104A (en) * | 2011-06-15 | 2012-08-22 | 安阳市凤凰光伏科技有限公司 | Gradient improving device of thermal field for producing pseudo single crystal silicon ingot by casting method |
| CN102732947A (en) * | 2012-06-20 | 2012-10-17 | 常州天合光能有限公司 | Ingot thermal field for growing pure quasi-monocrystalline |
| CN102787349A (en) * | 2012-08-29 | 2012-11-21 | 天威新能源控股有限公司 | Ingot casting crucible and ingot casting device |
| CN102808214A (en) * | 2012-08-30 | 2012-12-05 | 天威新能源控股有限公司 | Combined-type protection plate for ingot casting crucible |
| CN102877117A (en) * | 2012-09-19 | 2013-01-16 | 杭州慧翔电液技术开发有限公司 | Ingot furnace thermal field structure based on multi-heater and operation method |
| CN102925958A (en) * | 2012-08-16 | 2013-02-13 | 江西旭阳雷迪高科技股份有限公司 | Method for improving poly-crystal quality by using re-melting technology |
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| Publication number | Priority date | Publication date | Assignee | Title |
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| CN102242391B (en) * | 2011-06-15 | 2013-09-25 | 安阳市凤凰光伏科技有限公司 | Heater improvement apparatus in ingot furnace producing quasi-single crystal silicon with casting method |
| CN102286774A (en) * | 2011-06-15 | 2011-12-21 | 安阳市凤凰光伏科技有限公司 | Casting method for producing similar single crystal silicon ingot thermal field gradient improving devices |
| CN102644104A (en) * | 2011-06-15 | 2012-08-22 | 安阳市凤凰光伏科技有限公司 | Gradient improving device of thermal field for producing pseudo single crystal silicon ingot by casting method |
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| CN102732947A (en) * | 2012-06-20 | 2012-10-17 | 常州天合光能有限公司 | Ingot thermal field for growing pure quasi-monocrystalline |
| CN102732947B (en) * | 2012-06-20 | 2014-11-26 | 常州天合光能有限公司 | Ingot thermal field for growing pure quasi-monocrystalline |
| CN102925958A (en) * | 2012-08-16 | 2013-02-13 | 江西旭阳雷迪高科技股份有限公司 | Method for improving poly-crystal quality by using re-melting technology |
| CN102787349A (en) * | 2012-08-29 | 2012-11-21 | 天威新能源控股有限公司 | Ingot casting crucible and ingot casting device |
| CN102787349B (en) * | 2012-08-29 | 2015-02-11 | 天威新能源控股有限公司 | Ingot casting crucible and ingot casting device |
| CN102808214A (en) * | 2012-08-30 | 2012-12-05 | 天威新能源控股有限公司 | Combined-type protection plate for ingot casting crucible |
| CN102808214B (en) * | 2012-08-30 | 2015-06-10 | 天威新能源控股有限公司 | Combined-type protection plate for ingot casting crucible |
| CN102877117A (en) * | 2012-09-19 | 2013-01-16 | 杭州慧翔电液技术开发有限公司 | Ingot furnace thermal field structure based on multi-heater and operation method |
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