CN101726279B - Linearly measurement method and device - Google Patents
Linearly measurement method and device Download PDFInfo
- Publication number
- CN101726279B CN101726279B CN2009101794727A CN200910179472A CN101726279B CN 101726279 B CN101726279 B CN 101726279B CN 2009101794727 A CN2009101794727 A CN 2009101794727A CN 200910179472 A CN200910179472 A CN 200910179472A CN 101726279 B CN101726279 B CN 101726279B
- Authority
- CN
- China
- Prior art keywords
- profile
- mentioned
- measuring object
- profiling curve
- object thing
- Prior art date
- Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
- Active
Links
Images
Classifications
-
- G—PHYSICS
- G01—MEASURING; TESTING
- G01B—MEASURING LENGTH, THICKNESS OR SIMILAR LINEAR DIMENSIONS; MEASURING ANGLES; MEASURING AREAS; MEASURING IRREGULARITIES OF SURFACES OR CONTOURS
- G01B5/00—Measuring arrangements characterised by the use of mechanical techniques
- G01B5/28—Measuring arrangements characterised by the use of mechanical techniques for measuring roughness or irregularity of surfaces
- G01B5/285—Measuring arrangements characterised by the use of mechanical techniques for measuring roughness or irregularity of surfaces for controlling eveness
-
- G—PHYSICS
- G01—MEASURING; TESTING
- G01B—MEASURING LENGTH, THICKNESS OR SIMILAR LINEAR DIMENSIONS; MEASURING ANGLES; MEASURING AREAS; MEASURING IRREGULARITIES OF SURFACES OR CONTOURS
- G01B5/00—Measuring arrangements characterised by the use of mechanical techniques
- G01B5/20—Measuring arrangements characterised by the use of mechanical techniques for measuring contours or curvatures
-
- G—PHYSICS
- G01—MEASURING; TESTING
- G01D—MEASURING NOT SPECIALLY ADAPTED FOR A SPECIFIC VARIABLE; ARRANGEMENTS FOR MEASURING TWO OR MORE VARIABLES NOT COVERED IN A SINGLE OTHER SUBCLASS; TARIFF METERING APPARATUS; MEASURING OR TESTING NOT OTHERWISE PROVIDED FOR
- G01D11/00—Component parts of measuring arrangements not specially adapted for a specific variable
- G01D11/30—Supports specially adapted for an instrument; Supports specially adapted for a set of instruments
-
- G—PHYSICS
- G01—MEASURING; TESTING
- G01N—INVESTIGATING OR ANALYSING MATERIALS BY DETERMINING THEIR CHEMICAL OR PHYSICAL PROPERTIES
- G01N19/00—Investigating materials by mechanical methods
- G01N19/08—Detecting presence of flaws or irregularities
Landscapes
- Physics & Mathematics (AREA)
- General Physics & Mathematics (AREA)
- Health & Medical Sciences (AREA)
- Life Sciences & Earth Sciences (AREA)
- Chemical & Material Sciences (AREA)
- Analytical Chemistry (AREA)
- Biochemistry (AREA)
- General Health & Medical Sciences (AREA)
- Immunology (AREA)
- Pathology (AREA)
- Length Measuring Devices With Unspecified Measuring Means (AREA)
Abstract
The invention provides a linearly measurement method capable of calculating the surface profile of an object in no need of high-accuracy performing zero-adjustment of three displacement meters. One (movable object) of three displacement meters and the object to be measured which are arranged along the first direction and fix the relative position moves relative to another oen (fixed object) and at the same time the distances between the three displacement meters and the three points to be measured which are arranged along the measurement object line extending along the first direction on the surface of the measurement object are measured. Based on the measurement results of the three displacement meters, the rail of the reference points with fixed relative position to the movable object, namely a profile of a profile curve, is calculated. The two components of the calculated profile of the profile curve are corrected based on the two components of the profile of the profile curve calculated in advance. The profile of the surface of the object is measured based on the corrected profile of the profile curve.
Description
Technical field
The application advocates the right of priority based on the Japanese patent application of on October 29th, 2008 application 2008-277597 number.The full content of this application is quoted in this instructions through reference.
The present invention relates to utilize three point method to measure linear method and measure linear device.
Background technology
Can measure the surperficial rectilinearity (patent documentation 1) of measuring object thing by three point method.For example; The track that utilizes the reference point of 3 displacement meters to move be profile, the measuring object thing of profiling curve surface profile, and the profile of the pitching composition of 3 displacement meters record and narrate the measurement data of 3 displacement meters; Through should the record formula solving, can confirm surface profile as simultaneous equations.
Patent documentation 1: the open 2003-254747 communique of Jap.P.
For the profile of the pitching composition that is the profile of profiling curve based on separate the track that displacement meter starts through the three point method data measured, produces when 3 displacement meters move, and the profile on the surface of measuring object thing, must adjust the zero point of 3 displacement meters accurately.For example, for the measurement plane degree is the rectilinearity on the surface of a few μ m, must zero point of 3 displacement meters be made as tens nanometers～below several nanometers from the side-play amount of target location.
And the zero point of non-contacting displacement meter such as laser displacement gauge is according to the character of surface of measuring object thing, the state of the grinding trace that is for example caused by grinding stone, roughness, material, reflectivity, transmissivity etc. and change.And the variation at zero point has individual difference.Therefore, be difficult to carry out accurately in advance the adjustment at zero point of displacement meter.
Summary of the invention
The objective of the invention is to, a kind of adjustment at zero point that needn't carry out 3 displacement meters accurately is provided and can calculates the straightness measuring method of the surface profile of measuring object thing.
Other purposes of the present invention are, provide a kind of suitable said method to measure linear straightness measuring apparatus.
According to a viewpoint of the present invention, a kind of straightness measuring method is provided, this method has:
Make 3 displacement meters that are arranged in the 1st direction, fixed relative position relative with the measuring object thing; This displacement is taken into account a side's of this measuring object thing live animal; Move in the 1st direction on one side with respect to the opposing party's fixture, measure the operation of distance from 3 displacement meters to 3 measured points respectively on the surface of measuring object thing along the measuring object line that in 1st direction extend arranging on one side;
The track that calculates with respect to the reference point of the fixed relative position of above-mentioned live animal according to the measurement result of above-mentioned 3 displacement meters is the operation of the profile of profiling curve;
With 2 compositions of the profile that calculates of above-mentioned profiling curve, the operation of proofreading and correct based on 2 compositions of the profile of the profiling curve of measuring in advance; And
Based on the profile of the profiling curve that is corrected, calculate the operation of profile on the surface of above-mentioned measuring object thing.
According to another viewpoint of the present invention, a kind of straightness measuring apparatus is provided, it has:
The worktable of supporting measuring object thing;
Sensor head comprises 3 displacement meters of the distance that measures the measured point that is arranged in the 1st direction respectively on the surface of this measuring object thing;
Guiding mechanism with a side's of the sensor head and above-mentioned worktable live animal, supports along above-mentioned the 1st direction with respect to the opposing party's fixture movably; And
Control device, the track that stores the reference point of relatively fixing with above-mentioned live animal is 2 compositions of profiling curve, based on by above-mentioned 3 displacement meter measurement data measured, obtains along the profile on the above-mentioned surface of the measuring object line that is parallel to above-mentioned the 1st direction;
Above-mentioned control device is carried out:
On one side move above-mentioned live animal,, measure the operation that obtains measurement data along the distance of the lip-deep measured point of above-mentioned measuring object line on one side through each of 3 displacement meters in above-mentioned the 1st direction;
Based on the measurement result of above-mentioned 3 displacement meters, calculating is the operation of the profile of profiling curve with respect to the track of the reference point of the fixed relative position of above-mentioned live animal;
With 2 compositions of the profile that calculates of above-mentioned profiling curve, the operation of proofreading and correct based on 2 compositions of the profile of stored profiling curve; And
Based on the profile of the profiling curve that is corrected, calculate the operation of profile on the surface of above-mentioned measuring object thing.
The invention effect
Through measure 2 compositions of the profile of profiling curve in advance by the method for the influence of the profile change that does not receive the profiling curve,, also can confirm 2 compositions of profiling curve even under the situation of the adjustment at zero point of not carrying out displacement meter.Thus, accurate adjustment at zero point needn't be carried out and the surface profile of measuring object thing can be measured.
Description of drawings
Figure 1A is the stereographic map according to the straightness measuring apparatus of embodiment, and Figure 1B is the schematic drawing of sensor head part.
Fig. 2 is measurement data i (y), j (y), k (y), profiling curve h (y), and the curve map of the definition of pitching composition T (y) of surface profile W (y), the displacement meter of expression measuring object thing.
Fig. 3 A is the process flow diagram of the method for expression 2 compositions measuring in advance the profiling curve, and Fig. 3 B is the schematic drawing of expression by the state of dipmeter survey surface profile.
Fig. 4 is the process flow diagram according to the straightness measuring method of embodiment.
Fig. 5 is the process flow diagram of the genetic algorithm that in the straightness measuring method according to embodiment, adopts.
Fig. 6 is the figure that is used to explain the intersection of being undertaken by genetic algorithm.
Fig. 7 is the figure that is used to explain the sudden change of being undertaken by genetic algorithm.
Fig. 8 is that genetic algorithm is passed through in expression, and evaluation of estimate reduces the chart of the situation of (fitness uprises) along with increasing from generation to generation.
Fig. 9 A is the chart of the optimum solution of the profiling curve h (y) that obtained by genetic algorithm of expression and pitching composition T (y); Fig. 9 B is the chart of measurement data of 3 displacement meters of expression, and Fig. 9 C is the chart of the surface profile of expression when being suitable for the optimum solution of obtaining through genetic algorithm.
Among the figure: 10-movable table, 11-worktable guiding mechanism, 15-bistrique, 16-grinding stone, 18-guide rail, 19-control device, 20-measuring object thing, 30-sensor head, 31i, 31j, 31k-displacement meter, 35-inclinator.
Embodiment
Figure 1A representes the simple stereographic map according to the straightness measuring apparatus of embodiment.Movable table 10 is supported to and can moves in a direction through worktable guiding mechanism 11.Definition xyz rectangular coordinate system is made as the moving direction of movable table 10 the x axle, vertical lower is made as the z axle.
On movable table 10, keep measuring object thing (by the grinding thing) 20.Grinding stone 16 is contacted with under the state on surface of measuring object thing 20, on one side grindstone 16, on one side through moving movable table 10 in the x direction, thus but the surface of grinding measuring object thing 20.
Moving of control device 19 control movable tables 10 and bistrique 15.
Shown in Figure 1B, sensor head 30 is installed in the lower end of bistrique 15.On sensor head 30,3 displacement meter 31i, 31j, 31k are installed.At displacement meter 31i, 31j, the last laser displacement gauge that for example uses of 31k.Displacement meter 31i, 31j, 31k can measure the distance of the lip-deep measured point from displacement meter to measuring object thing 20 respectively.3 displacement meter 31i, 31j, 31k are arranged in the y direction.And the measured point of 3 displacement meter 31i, 31j, 31k also is arranged in the y direction.Therefore, can measure along the surface height that is parallel to the measuring object line of y direction.Measure on one side through on one side moving bistrique 15, can measure along the profile on the surface of the measuring object line on the surface of measuring object thing 20 in the y direction.Measurement data is input to control device 19 from displacement meter 31i, 31j, 31k.
With reference to Fig. 2 coordinate system and various function are described.In Fig. 2, the top is made as the positive dirction of z axle.Therefore, the upper and lower relation of sensor head 30 and measuring object thing 20 is opposite with the upper and lower relation shown in Figure 1B. Displacement meter 31i, 31j, 31k press this order with uniformly-spaced P configuration towards the negative direction of y axle.The mid point of the line segment at zero point of the displacement meter 31i that connects two ends, 31k is defined as reference point.The height (zero-error) at the zero point of displacement meter 31j that will be from the reference point to central authorities is made as δ.
With the surface of measuring object thing 20, be made as W (y) along the profile of measuring object line.The track (profiling curve) of reference point that will be when y direction movable sensor head 30 is made as h (y).Ideally, profiling curve h (y) is a straight line, but in fact from desirable straight line distortion.
The straight line at zero point of the displacement meter 31i that connects two ends, 31k is made as θ (y) from the angle that the y axle tilts.Ideally, tiltangle (y)=0, but in fact producing pitching along with moving of sensor head 30, tiltangle (y) changes with the degree of tilt of profiling curve h (y) independently thus.The zero point of displacement meter 31i and the height of reference point poor, and the difference of the height of the zero point of displacement meter 31k and reference point can be expressed as T (y) * P.Here, be approximately pitching composition T (y)=sin (θ (y)).If the measured value of displacement meter 31i, 31j, 31k is made as i (y), j (y), k (y) respectively, then following formula is set up.
[mathematical expression 1]
W(y+P)＝h(y)+i(y)+T(y)×P...(1)
W(y)＝h(y)+j(y)+δ...(2)
W(y-P)＝h(y)+k(y)-T(y)×P...(3)
Because tiltangle (y) is very little, therefore, cos (θ (y)) is approximately 1.
The shape of measuring object thing 20 for example is that length on one side is the square of 2m, and the interval P of displacement meter for example is 100mm.
If from formula (1), (2), (3) cancellation T (y) and h (y), then can obtain with following formula.
[mathematical expression 3]
W(y+P)-2W(y)+W(y-P)+2δ＝i(y)-2j(y)+k(y)...(4)
Here, suppose with following 3 formulas (5) presentation surface profile W (y).
[mathematical expression 4]
W(y)＝ay
3+by
2+cy+d...(5)
If formula (5) is updated to formula (4), then obtain with following formula (6).
[mathematical expression 5]
6aP
2y+2bP
2+2δ＝i(y)-2j(y)+k(y)...(6)
The right of formula (6) all is a measurement data, and the interval P of displacement meter is known.Thereby the unknown number a on the left side can calculate from 1 composition of the variable y on the right.But even obtain 0 composition of the y on the right, the zero-error δ on the left side also is unknown, so can not confirm unknown number b.That is, 3 composition a of surface profile W (y) can be confirmed, but composition b can not be confirmed 2 times.In addition, also can likewise confirm the composition more than 4 times of surface profile W (y) with 3 compositions.
In an embodiment, in order to remedy 2 compositions confirming surface profile W (y), 2 compositions of profiling curve h (y) have been measured in advance.2 compositions of profiling curve h (y) are equivalent to the amount of deflection of guide rail 18, so think when each the measurement, there is not big change.Thereby, measured 2 compositions of profiling curve h (y) in advance, then when measuring the surface profile of measuring object thing, need not remeasure 2 compositions of profiling curve h (y) each.In addition, think that the composition more than 3 times of profiling curve h (y) when each surface measurements profile (sensor head 30 each moving time) changes unpredictablely.Therefore, even measured the composition more than 3 times of profiling curve h (y) in advance, also can not assign to proofread and correct the measurement result of actual measuring object thing based on the one-tenth of measuring in advance more than 3 times.
Fig. 3 A is as the process flow diagram of the method for 2 compositions of an example expression prior measurement profiling curve h (y).Shown in Fig. 3 B, in step S1, measuring object thing 20 is positioned on the movable table 10.Be parallel to the movable inclined appearance 35 of arbitrary line of y direction and measure along measuring object thing 20 lip-deep along the distribution of the inclination on the surface of this straight line.Distribution calculation surface profile W (y) according to this inclination.The measurement of being undertaken by inclinator does not receive the influence of the distortion of guide rail 18.
In step S2, measure the surface profile of the edge straight line identical through utilizing displacement meter 31j, thereby obtain measurement data j (y) with the straight line of measuring tilt distribution by inclinator 35.
In step S3, calculate 2 compositions of profiling curve h (y).Below, these computing method are described.Surface profile by displacement meter 31j instrumentation is identical with the surface profile W (y) that obtains according to the instrumentation that is undertaken by inclinator.Therefore, at the surface profile W (y) that obtains according to the instrumentation that is undertaken by inclinator with between by displacement meter 31j measurement data measured j (y), the relation of formula (2) is set up.Because zero-error δ is constant, so can be according to 2 compositions of 2 compositions calculating profiling curve h (y) of 2 compositions of surface profile W (y) and measurement data j (y).2 compositions that calculate are stored in control device 19.
The profile of profiling curve h (y) generally when the y direction moves bistrique 15, change at every turn, is not limited to become identical profile at every turn.But, think that 2 compositions of profiling curve h (y) are low order composition and repeatability height of confirming the general shape of profiling curve.That is, think when each the measurement, not have big change.
Fig. 4 representes the process flow diagram according to the straightness measuring method of embodiment.At first, measuring object thing 20 is loaded into movable table 10.This measuring object thing 20 not need with utilize the measuring object thing 20 of dipmeter survey surface profile identical in the operation shown in Fig. 3 A.
In step SA1, move bistrique 15 and sensor head 30 in the y direction, and meanwhile by displacement meter 31i, 31j, 31k measure measuring object thing 20 the surface measured point apart from i (y), j (y), k (y).Measured data are input to control device 19.
In step SA2, measurement data i (y), j (y), k (y) are suitable for low-pass filter and remove noise contribution.For low-pass filter is worked, measurement data i (y), j (y), k (y) obtain with the scale very narrow with respect to the interval P of displacement meter.For example, with wide measurement data i (y), j (y), the k (y) of obtaining of the scale of 0.05mm.
In step SA3, sample and generate the step data being suitable for measurement data i (y), j (y), k (y) after the low-pass filter.The cycle of sampling for example be half of interval P of displacement meter, i.e. 50mm.
In step SA4,, utilize genetic algorithm to derive profiling curve h (y) and pitching composition T (y) based on step data i (y), j (y), k (y).
Fig. 5 representes the detailed process flow diagram of the step SA4 of suitable genetic algorithm.In this genetic algorithm, the group of profiling curve h (y) and pitching composition T (y) is made as 1 individuals.
In step SB1, generate the groups of individuals of an initial generation.For example, number of individuals is 200.Is 0 as an example with the profiling curve h (y) and the pitching composition T (y) of 1 individuals.The profiling curve h (y) of other 199 individuals and pitching composition T (y) confirm according to random number.In addition, profiling curve h (y) and pitching composition T (y) that also can all are individual in original state be set at 0.
In step SB2, estimate each individuality by evaluation function, calculate each individual fitness.Set evaluation function according to surface profile W (y).3 displacement meter 31i, 31j, 31k measure along the profile of the same measuring object line on the surface of same measuring object thing 20, so 3 surface profile W that the formula of utilization (1)～formula (3) is calculated respectively
1(y), W
2(y), W
3(y) should be consistent.
Therefore, at first obtain W
1(y) and W
2(y) difference W
1(y)-W
2(y), reach W
2(y) and W
3(y) difference W
2(y)-W
3(y).0 composition during with polynomial repressentation surface profile W (y) is equivalent to the interval of measuring object thing 20 and sensor head 30, and 1 composition is equivalent to the posture of measuring object thing 20.That is, 0 composition of surface profile W (y) and 1 composition are not directly connected to the surface profile of measuring object thing 20.Therefore, from difference W
1(y)-W
2(y) and W
2(y)-W
3(y) remove 0 composition and 1 composition.
The difference W of 0 composition and 1 composition is removed in calculating
1(y)-W
2(y) and difference W
2(y)-W
3(y) each variance.These 2 variance sums are made as evaluation function.The value that is evaluation function is more little, and fitness is high more.According to all individualities of fitness ordering.
In step SB3, be selected to the individuality of intersection object.As an example, the high individuality of fitness selects individual probability to be set at high more.Select probability based on this, select 10 couple who constitutes by 2 individuals.
In step SB4, at least one side of the individual right profiling curve h (y) that selects or pitching composition T (y) is intersected, generate new individuality.
The method of intersection is described with reference to Fig. 6.Be illustrated in to be selected as in the individuality of a current generation and intersect 2 individuals Ua and the profiling curve h (y) of Ub and the profile T (y) of pitching composition of object.The corresponding part of profiling curve h (y) of the part of the profiling curve h (y) of replacing (intersection) individual Ua and individual Ub generates new individual Uc and Ud.The profile T (y) of new individual Uc and the pitching composition of Ud former state respectively inherits the profile T (y) of the pitching composition of original individual Ua and Ub.Like this, from newly-generated 2 individuals of 2 individuals.In step SB3, select 10 pairs of individualities, so in step SB4 newly-generated 10 pairs, i.e. 20 individuals.
In addition, both can intersect the profile T (y) of pitching composition, also can intersect profiling curve h (y) and pitching composition profile T (y) both.
If step SB4 finishes, then in step SB5, be selected to the individuality of the object of sudden change.As an example, except high 10 individuals of fitness, select 80 from remaining 190 individuals.
In step SB6, make to produce sudden change on the individuality of selection, generate new individuality.
With reference to Fig. 7 the method for sudden change is described.Fig. 7 is illustrated in the 1 individuals Ue that selects among the step SB5.Go up overlapping any width and Gaussian curve highly at the profiling curve h (y) of individual Ue, generate new individual Uf.In addition, both can go up overlapping Gaussian curve at the profile T (y) of the pitching composition of individual Ue, also can be at both last overlapping Gaussian curves of the profile T of profiling curve h (y) and pitching composition (y).Owing in step SB5, selected 80 individuals, thus in step SB6 newly-generated 80 individuals.
In step SB7, eliminate the low individuality of fitness.Particularly, in 200 individuals of a current generation, replace 100 low individuals of fitness with 100 newly-generated individualities.Thus, confirm 200 individuals of a new generation.
In step SB8, estimate 200 individuals of a new generation and obtain fitness.In addition, 100 individuals of the previous generation that do not eliminate at step SB7 have been calculated fitness, so there is no need to recomputate fitness.200 individuals according to fitness ordering a new generation.
In step SB9, judge whether generation number reaches desired value, when the miss the mark value, returns step SB3.When reaching desired value, in step SB10, with the profile T (y) of the profiling curve h (y) of the individuality that fitness is the highest in the individuality of up-to-date generation and pitching composition as optimum solution.
Fig. 8 representes the displacement of evaluation of estimate.Transverse axis is represented generation number, and the longitudinal axis is illustrated in the value (evaluation of estimate) of the evaluation function of the individuality that fitness is the highest in the individuality of a current generation.Can know along with evolving evaluation of estimate decline (fitness rising) from generation to generation.In 2000 generations, the value of evaluation function drops to about 0.4 μ m
2Can know that standard deviation becomes 0.63 μ m, obtains sufficient precision.And, 500 from generation to generation about, evaluation of estimate converges to 90% degree, thereafter, according to the situation that the exploration of optimum solution is slowly evolved, thinks that the setting of each parameter of genetic algorithm is also suitable.
Fig. 9 A representes the profiling curve h (y) of the individuality that fitness is the highest and the profile T (y) of pitching composition.The longitudinal axis is represented the value of h (y) and T (y), and the unit of h (y) is [μ m], and the unit of T (y) is [10 μ rad].Transverse axis is with the position of the expression y of unit [mm] direction.In addition, 0 composition of the profile T (y) of profiling curve h (y) and pitching composition and 1 composition and surface profile are irrelevant, so remove 0 composition and 1 composition and represent at Fig. 8 A.
Fig. 9 B representes by displacement meter 31i, 31j, 31k measurement data measured i (y), j (y), k (y).Transverse axis is with the position of the expression y of unit [mm] direction, and the longitudinal axis is with the value of unit [μ m] expression measurement data.In addition, remove 0 composition and 1 composition.
Fig. 9 C representes that the optimum solution with the profile T (y) of profiling curve h (y) and pitching composition is updated to formula (1)～(3) and the surface profile W that obtains
1(y), W
2(y), W
3(y).Can know that 3 surface profiles that calculate according to optimum solution are with ratio is less mutually in 3 measurement data shown in Fig. 9 B.
Like this,, the simultaneous equations that comprises 3 unknown functions needn't be directly solved, profile T (y), and the optimum solution of surface profile W (y) of profiling curve h (y), pitching composition can be obtained through utilizing genetic algorithm.
In above-mentioned genetic algorithm, the candidate solution by the profile T (y) of profiling curve h (y) and pitching composition defines genetic algorithm defines evaluation function according to surface profile W (y).In addition, also can be by 2 outline definition candidate solutions among the profile T (y) of profiling curve h (y), pitching composition, the surface profile W (y), also can be by remaining 1 outline definition evaluation function.
In the step SA5 of Fig. 4, carry out the correction of 2 compositions of profiling curve h (y).Shown in (6), can not confirm 2 compositions of profiling curve h (y) from simultaneous equations (1)～(3).2 compositions of the optimum solution of the profiling curve h (y) that therefore, is obtained by genetic algorithm are nonsensical.Thereby, remove the profiling curve h (y) that 2 compositions are obtained the composition that only comprises more than 3 times from the optimum solution of the profiling curve h (y) that obtains through genetic algorithm.Only comprising on the profiling curve h (y) of this composition more than 3 times, making 2 compositions of the profiling curve h (y) that calculates at the step S2 of Fig. 3 A overlapping.Thus, obtain the profiling curve h (y) that comprises significant 2 compositions.
In step SA6, through will step SA5 proofread and correct 2 compositions profiling curve h (y), and the measurement data j (y) of displacement meter 31j be updated to formula (2), thereby obtain the composition more than 2 times of surface profile W (y).In addition, because zero-error δ is a constant, so, even zero-error δ is unknown, also can confirm the composition more than 2 times of surface profile W (y).
Move movable table 10 in the x direction, through repeating operation, thereby can measure whole surface profile of measuring object thing 20 from the step SA1 of Fig. 4 to SA6.Even move movable table 10, think that 2 compositions of profiling curve h (y) do not change yet in the x direction.Therefore, at every turn when the x direction moves movable table 10, do not need to carry out again the measurement of being undertaken by the inclinator shown in Fig. 3 A.And, even change measuring object thing 20, do not need to carry out again the measurement of being undertaken by inclinator yet.
Need a lot of time and time by the dipmeter survey surface profile, be difficult to robotization.In the method according to embodiment, the surface profile of measuring object thing 20 can be easily measured in the measurement of the displacement meter through utilizing easy robotization.
In the above-described embodiments,, zero-error δ also can confirm 2 compositions of surface profile W (y) when remaining.Therefore, there is no need to carry out accurate adjustment at zero point.
In the above-described embodiments, relative measurement object 20 has moved displacement meter 31i, 31j, 31k, but but also relative displacement meter 31i, 31j, 31k traverse measurement object 20 on the contrary.For example, in Figure 1A, arranging displacement meter 31i, 31j, 31k in the x direction, at x direction traverse measurement object 20 on one side measure on one side, thereby can measure along the surface profile of the measuring object line that is parallel to the x direction on the surface of measuring object thing 20.Is the center half-twist with the sensor head shown in Figure 1B 30 with the turning axle that is parallel to the z axle, thereby can make displacement meter 31i, 31j, 31k be arranged in the x direction.Also can this rotating mechanism be set at sensor head 30.
Be parallel to through overlapping edge the y direction a plurality of measuring object lines surface profile and along being parallel to the surface profile of a plurality of measuring object lines of x direction, can obtain the 2 dimension surface profile information on the surface of measuring object thing 20.
According to above embodiment the present invention has been described, but has the invention is not restricted to these.For example can carry out various changes, improvement, combination etc. is conspicuous to those of ordinary skills.
Claims (2)
1. straightness measuring method has:
Make 3 displacement meters that are arranged in the 1st direction, fixed relative position relative with the measuring object thing; This displacement is taken into account a side's of this measuring object thing live animal; Move in the 1st direction on one side with respect to the opposing party's fixture, measure the operation of distance from 3 displacement meters to 3 measured points respectively on the surface of measuring object thing along the measuring object line that in 1st direction extend arranging on one side;
The track that calculates with respect to the reference point of the fixed relative position of above-mentioned live animal based on the measurement result of above-mentioned 3 displacement meters is the operation of the profile of profiling curve;
With 2 compositions of the profile that calculates of above-mentioned profiling curve, the operation of proofreading and correct based on 2 compositions of the profile of the profiling curve of measuring in advance; And
Based on the profile of the profiling curve that is corrected, calculate the operation of profile on the surface of above-mentioned measuring object thing.
2. straightness measuring apparatus has:
The worktable of supporting measuring object thing;
Sensor head comprises 3 displacement meters of the distance that measures the measured point that is arranged in the 1st direction on the surface of measuring object thing respectively;
Guiding mechanism with a side's of the sensor head and above-mentioned worktable live animal, supports along above-mentioned the 1st direction with respect to the opposing party's fixture movably; And
Control device, the track that stores the reference point of relatively fixing with above-mentioned live animal is 2 compositions of profiling curve, based on by above-mentioned 3 displacement meter measurement data measured, obtains along the profile on the above-mentioned surface of the measuring object line that is parallel to above-mentioned the 1st direction;
Above-mentioned control device is carried out:
On one side move above-mentioned live animal,, measure the operation that obtains measurement data along the distance of the lip-deep measured point of above-mentioned measuring object line on one side through each of 3 displacement meters in above-mentioned the 1st direction;
Based on the measurement result of above-mentioned 3 displacement meters, calculating is the operation of the profile of profiling curve with respect to the track of the reference point of the fixed relative position of above-mentioned live animal;
With 2 compositions of the profile that calculates of above-mentioned profiling curve, the operation of proofreading and correct based on 2 compositions of the profile of stored profiling curve; And
Calculate the operation of profile on the surface of above-mentioned measuring object thing based on the profile of the profiling curve that is corrected.
Applications Claiming Priority (2)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| JP2008277597A JP5100613B2 (en) | 2008-10-29 | 2008-10-29 | Straightness measuring method and straightness measuring device |
| JP277597/2008 | 2008-10-29 |
Publications (2)
| Publication Number | Publication Date |
|---|---|
| CN101726279A CN101726279A (en) | 2010-06-09 |
| CN101726279B true CN101726279B (en) | 2012-02-01 |
Family
ID=42274724
Family Applications (1)
| Application Number | Title | Priority Date | Filing Date |
|---|---|---|---|
| CN2009101794727A Active CN101726279B (en) | 2008-10-29 | 2009-10-20 | Linearly measurement method and device |
Country Status (4)
| Country | Link |
|---|---|
| JP (1) | JP5100613B2 (en) |
| KR (1) | KR101169575B1 (en) |
| CN (1) | CN101726279B (en) |
| TW (1) | TWI417512B (en) |
Families Citing this family (7)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| CN103267461B (en) * | 2013-06-09 | 2015-08-12 | 南京晨光集团有限责任公司 | For the method for measurement space object repetitive positioning accuracy |
| KR101542996B1 (en) | 2014-03-25 | 2015-08-07 | 현대자동차 주식회사 | Straightness Management System and Control Method Thereof for Mounting Pin |
| JP6401618B2 (en) * | 2015-01-13 | 2018-10-10 | 株式会社ナガセインテグレックス | Measuring method and measuring device |
| JP6352833B2 (en) * | 2015-02-26 | 2018-07-04 | 住友重機械工業株式会社 | Shape measuring device, processing device, and shape measuring method |
| JP6392395B1 (en) * | 2017-03-26 | 2018-09-19 | 株式会社アドテックエンジニアリング | Flatness measurement method and pin height adjustment method |
| JP7296279B2 (en) * | 2019-08-30 | 2023-06-22 | 住友重機械工業株式会社 | Shape measuring device and detector calibration method |
| JP7296334B2 (en) * | 2020-03-26 | 2023-06-22 | 住友重機械工業株式会社 | Straightness measurement system, displacement sensor calibration method, and straightness measurement method |
Citations (1)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| CN101171432A (en) * | 2005-05-04 | 2008-04-30 | 谢夫勒两合公司 | Linear guide unit with length measuring system |
Family Cites Families (9)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| JPS61139712A (en) * | 1984-12-13 | 1986-06-27 | Mitsubishi Heavy Ind Ltd | Measurement of out of straightness |
| JPS6447905A (en) * | 1987-08-19 | 1989-02-22 | Mitsubishi Heavy Ind Ltd | Method for measuring straightness |
| JPH01107105A (en) * | 1987-10-20 | 1989-04-25 | Mitsubishi Heavy Ind Ltd | Method for measuring straightness shape |
| JPH07103751A (en) * | 1993-10-07 | 1995-04-18 | Kawasaki Steel Corp | Method for measuring roll profile |
| JP2960013B2 (en) * | 1996-07-29 | 1999-10-06 | 慧 清野 | Moving object detecting scale and moving object detecting apparatus using the same |
| US5816895A (en) * | 1997-01-17 | 1998-10-06 | Tokyo Seimitsu Co., Ltd. | Surface grinding method and apparatus |
| JP2002228411A (en) | 2001-02-05 | 2002-08-14 | Hitachi Kokusai Electric Inc | Two-dimensional measuring apparatus |
| JP2005024567A (en) | 2004-09-07 | 2005-01-27 | Hitachi Kokusai Electric Inc | Location finding apparatus |
| JP2008216122A (en) | 2007-03-06 | 2008-09-18 | Mitsutoyo Corp | Surface property measuring device |
-
2008
- 2008-10-29 JP JP2008277597A patent/JP5100613B2/en active Active
-
2009
- 2009-10-20 CN CN2009101794727A patent/CN101726279B/en active Active
- 2009-10-21 KR KR1020090100033A patent/KR101169575B1/en active IP Right Grant
- 2009-10-26 TW TW098136156A patent/TWI417512B/en active
Patent Citations (1)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| CN101171432A (en) * | 2005-05-04 | 2008-04-30 | 谢夫勒两合公司 | Linear guide unit with length measuring system |
Non-Patent Citations (3)
| Title |
|---|
| JP特开2003－232625A 2003.08.22 |
| JP特开2003-254747A 2003.09.10 |
| JP特开平11-142137A 1999.05.28 |
Also Published As
| Publication number | Publication date |
|---|---|
| JP2010107263A (en) | 2010-05-13 |
| TW201017096A (en) | 2010-05-01 |
| TWI417512B (en) | 2013-12-01 |
| KR101169575B1 (en) | 2012-07-31 |
| KR20100047801A (en) | 2010-05-10 |
| CN101726279A (en) | 2010-06-09 |
| JP5100613B2 (en) | 2012-12-19 |
Similar Documents
| Publication | Publication Date | Title |
|---|---|---|
| CN101726279B (en) | Linearly measurement method and device | |
| CN101726278B (en) | Straightness measuring method and straightness measuring apparatus | |
| US4587622A (en) | Method and apparatus for determining and correcting guidance errors | |
| Castro et al. | Dynamic calibration of the positioning accuracy of machine tools and coordinate measuring machines using a laser interferometer | |
| US20050283989A1 (en) | Method of inspecting workpieces on a measuring machine | |
| CN106441168B (en) | The measurement method of linear rolling guide slider type face precision | |
| US6594532B2 (en) | Movement control by a metrological instrument | |
| CN106323202A (en) | Linear feed system's guide rail linearity measuring apparatus and method | |
| CN106767558A (en) | A kind of decoupled identification method of guide rail basal plane straightness error | |
| JP2006509194A (en) | Workpiece inspection method | |
| JP2002059340A (en) | Positional error evaluating method of moving device, and moving accuracy improving method based on result of evaluation | |
| CN108413946B (en) | Method for measuring position parameters of vehicle-mounted total station | |
| CN111854587B (en) | Guide rail five-degree-of-freedom motion error online measurement device and method | |
| CN112504146B (en) | Method for detecting rolling path pitch diameter of rolling linear guide rail pair | |
| CN105444676B (en) | Suitable for the multi-faceted positioning device of online scanning survey probe | |
| CN105091778B (en) | Obform guide rail one side characteristic detection method and device based on line-structured laser | |
| CN111060056B (en) | Reconstruction device and reconstruction method for accurately reconstructing parallel contour | |
| JP5290038B2 (en) | Measuring apparatus and measuring method | |
| CN209878544U (en) | Surface tension coefficient measuring device | |
| CN103063172A (en) | Device capable of continuously measuring structure component partial geometric initial imperfection and method | |
| CN101545773A (en) | Measuring method for high-precision machine tool track | |
| CN106382909B (en) | A method of promoting fixed bridge plate span level meter measuring straightness error precision | |
| CN110296718A (en) | A kind of bar code formula levelling staff detection system and detection method | |
| CN110017803A (en) | A kind of REVO gauge head B axle error of zero scaling method | |
| CN203037233U (en) | Device for continuously measuring local geometric initial imperfections of structural member |
Legal Events
| Date | Code | Title | Description |
|---|---|---|---|
| C06 | Publication | ||
| PB01 | Publication | ||
| C10 | Entry into substantive examination | ||
| SE01 | Entry into force of request for substantive examination | ||
| C14 | Grant of patent or utility model | ||
| GR01 | Patent grant |