CN106767558A - A kind of decoupled identification method of guide rail basal plane straightness error - Google Patents
A kind of decoupled identification method of guide rail basal plane straightness error Download PDFInfo
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Abstract
The invention discloses a kind of decoupled identification method of guide rail basal plane straightness error, the registration error of straightness error and angular error and the laser displacement sensor measurement when it is slided by using laser interferometer measurement standard gauge block, and the motion of each several part is expressed based on spinor theory, by the data processing method of error decoupling, the final straightness error value for calculating guide rail basal plane, realize measuring the purpose of precise guide rail basal plane straightness error with this, with accurate advantage and certain feasibility, can be used for the detection and analysis of the Digit Control Machine Tool quality of production or the research of machine tool precision analytical.
Description
Technical Field
The invention belongs to the field of numerical control machine tool geometric error research, and particularly relates to a decoupling identification method for guide rail base plane straightness errors.
Background
At present, instruments and tools for measuring geometric errors of a machine tool mainly comprise a laser interferometer, a measuring scale, a level meter, a collimator, a micrometer and the like, wherein the laser interferometer is mainly used for measuring positioning errors, straightness, angle errors, verticality and the like of a moving pair of the numerical control machine tool, but is less applied to measurement of guide rails of assembly, and the measurement consumes time and is higher in cost, and the use requirements can be met by using a traditional measuring tool. The level gauge and the dial indicator can be used for measuring the straightness and the angle in the guide rail assembly, and the assembly is adjusted or the guide rail base surface is scraped by taking the measuring result as a standard. The collimator is suitable for rapidly measuring the straightness error of the guide rail after assembly in a factory, and has high efficiency and convenient use.
In 2001, Japanese scholars Eiji Shamoto and the like use interferometers to measure and build a measurement experiment platform of a hydraulic guide rail pair, and research the influence of the thickness of an oil film and acting force on the straightness of a guide rail in the hydraulic guide rail by using a finite element analysis method. A scholars T.O.Ekinci and the like in Canada in 2007 researches the relation between the angle error and the straightness error on the guide rail slide block, adopts a measuring scale and a laser interferometer to build an experimental platform, and researches the quantitative relation between the relation and the ratio of the distance between the two slide blocks and the profile wavelength of the base surface of the guide rail. Jun Zha et al, great in Xian in 2016, further consider that a static model analyzes the straightness accuracy of the hydraulic guide rail, and verify the measured data by adopting a laser interferometer. In the previous researches, a great deal of researches are carried out by considering the relation among the motion linearity errors of the guide rail sliding block, and the measurement of the linearity errors of the guide rail base surface is not specifically discussed.
Aiming at the straightness measurement of the guide rail base surface, at present, machine tool factories mostly adopt dial gauges and gradienters, the precision is not high, and other unnecessary errors can be introduced. Aiming at the existing problems, in order to research a method for measuring the straightness accuracy of the guide rail base plane with high precision, a reasonable test means is required to be provided under the current conditions, and a decoupling identification method for measuring the straightness accuracy error of the guide rail base plane is provided.
Disclosure of Invention
Aiming at the defects or the improvement requirements of the prior art, the invention provides a method for accurately identifying the straightness error of the guide rail base surface of a machine tool, and aims to calculate the accurate value of the straightness error of the guide rail base surface, so that the technical problem that the straightness error of the guide rail base surface in the field of machine tools is difficult to accurately measure and obtain is solved.
In order to achieve the purpose, the invention provides a decoupling identification method for guide rail base plane straightness errors, which comprises the following steps:
(1) building a measuring platform:
installing a laser head of a laser interferometer on one side of a guide rail to be measured, installing a reflecting mirror of the laser interferometer on the top of a standard gauge block and arranging the reflecting mirror towards the laser head, and installing a laser displacement sensor on the standard gauge block and positioned on the rear side of the standard gauge block; horizontally placing the standard gauge block on a guide rail base surface to be measured;
(2) measuring and obtaining initial parameters:
the standard gauge block is made to abut against the surface to be measured of the guide rail, the standard gauge block is moved, and when the standard gauge block moves to a position, the measurement result of the laser interferometer and the measurement result y of the laser displacement sensor at the position are recordedlx(ii) a The measurement result of the laser interferometer comprises a pitch angle deviation in angle deviations when the standard gauge block moveszxDeviation of roll anglexxAnd combined straightness errorysx(ii) a Initial point index y of laser displacement sensorlx0；
(3) And (3) error data processing:
with a starting position P of a measuring point P on the mirror0As a zero point of a global coordinate system, the advancing direction of the standard gauge block is an X axis, the vertical direction is an upward Y axis, and a Z axis is determined by a right-hand rule;
from the combined linearity errors of the mirrors measured by the laser interferometerDifference (D)ysxDeriving the straightness deviation of a certain point on the standard gauge blockyx(ii) a Derived fromyxAnd measured in step (2)zx、xxEstablishing a motion model of the laser displacement sensor to further obtain the straightness deviation of the laser displacement sensorylx；
According to the measurement result y of the laser displacement sensorlxInitial point indication y of laser displacement sensorlx0Deviation from straightness of laser displacement sensorylxAnd calculating to obtain the straightness error of the base surface of the guide railygx。
Further, the specific data processing process in the step (3) is as follows:
the measuring point on the reflecting mirror of the laser interferometer is P, and the initial position is P0，p0Actual position p when moving in the x-directionxaThe expression is as follows:
wherein the initial position p0The expression is as follows:
p0＝[xp0,yp0,zp0,1]T(2)
xp0,yp0,zp0is p0Coordinate values in X, Y, Z three directions;
a transformation matrix translated in the X direction expressed as a quantum;
a transformation matrix for translation along the straightness error Y direction expressed in terms of a vector;
a transformation matrix rotated in the X direction expressed as a rotation;
a transformation matrix for rotation in the Z direction expressed in terms of a rotation;
suppose that:
pxa＝[xxpa,yxpa,zxpa,1]T(3)
wherein x isxpa,yxpa,zxpaIs pxaThe coordinate values in the three directions of X, Y, Z,
then the resultant straightness errorysx：
ysx＝yxpa-yp0(4)
Wherein,
yxpa＝yp0+yx-zp0sinxx+xp0sinzx(6)
thus, according to (4) (6), there are obtained:
ysx＝yx-zp0sinxx+xp0sinzx(7)
thus, there are:
yx＝ysx+zp0sinxx-xp0sinzx(8)
similarly, the laser displacement sensor measures the point Q, its starting position Q0Comprises the following steps:
q0＝[0,yq0,0,1]T(9)
wherein,yq0is q0Coordinate values in the Y direction;
actual position Q when point Q moves in the X directionxaComprises the following steps:
qxa＝[xxqa,yxqa,zxqa,1]T(10)
wherein xxqa,yxqa,zxqaIs qxaCoordinate values in three directions of XYZ are
And, the straightness deviation of the laser displacement sensorylxComprises the following steps:
ylx＝yxqa-yq0(12)
the same principle as that of (7) can be obtained,
ylx＝yx-zq0sinxx+xq0sinzx(13)
and, straightness error of the guide rail base surfaceygxComprises the following steps:
ygx＝ylx-ylx0-ylx(14)
substituting (13) into (14) to obtain
ygx＝ylx-ylx0-yx+zq0sinxx-xq0sinzx(15)
Continuing to substitute (8) into (15) to obtain
ygx＝ylx-ylx0-ysx+(xp0-xq0)sinzx+(zq0-zp0)sinxx(17)
Wherein,ysx、zx、xxmeasured by a laser interferometer to obtain ylx、ylx0Obtained by reading the readings of a laser displacement sensor, xp0、xq0、zq0、zp0All the parameters are known, namely the straightness error of the guide rail base surface can be obtained by calculation according to the formula (17)ygxThe exact numerical value of (c).
Further, in the step (1), a reflecting mirror of the laser interferometer is fixed on the gauge block through a magnetic suction seat and a connecting rod, and the angle of the reflecting mirror can be finely adjusted; the laser displacement sensor and the mounting clamp thereof are fixed together through screws, and then the mounting clamp is fixed on the gauge block through a strong magnet.
Furthermore, a laser head of the laser interferometer is fixed on the micro-motion platform and then is arranged on one side of the guide rail, and the micro-motion platform is used for adjusting the displacement of the laser head in X, Y, Z three directions so as to adjust the light path collimation of the laser interferometer.
Generally, compared with the prior art, the above technical solution contemplated by the present invention has the following beneficial effects: the invention provides a method for identifying the straightness error of the base surface of a precision guide rail of a machine tool, which is used for measuring the straightness error and the angle error when a standard gauge block slides and the registration error measured by a laser displacement sensor by using a laser interferometer, expressing the motion of each part based on a rotation theory and finally calculating the straightness error value of the base surface of the guide rail by a data processing method of error decoupling, thereby realizing the purpose of measuring the straightness error of the base surface of the precision guide rail.
Drawings
FIG. 1 is a flowchart of an embodiment of the decoupling identification method for the straightness error of the guide rail base surface of the precision machine tool based on laser measurement;
FIG. 2 is a schematic view of the installation of a measuring platform for measuring the straightness error of the guide rail base plane of a precision machine tool based on laser;
FIG. 3a is a graph of Y-direction linearity error results of laser interferometer measurements;
FIG. 3b is a graph showing the Z-direction angle error results of laser interferometer measurements;
FIG. 3c is a graph of the X-direction angle error results of the laser interferometer measurements;
FIG. 3d is a graph of the results of the readings of the laser displacement sensor;
FIG. 4a is a graph of the result of the identified Y-direction straightness error of the guide rail base plane;
fig. 4b is a graph of the result of zeroing the identified Y-direction linearity error end points of the guide rail base plane.
Reference numerals:
1-standard gauge block, 2-interferometer reflector, 3-connecting rod, 4-magnetic base, 5-laser displacement sensor, 6-mounting fixture and 7-strong magnet.
Detailed Description
In order to make the objects, technical solutions and advantages of the present invention more apparent, the present invention is described in further detail below with reference to the accompanying drawings and embodiments. It should be understood that the specific embodiments described herein are merely illustrative of the invention and are not intended to limit the invention. In addition, the technical features involved in the embodiments of the present invention described below may be combined with each other as long as they do not conflict with each other.
What is described below is a specific embodiment of the present invention, which is a decoupling identification method for a straightness error of a guide rail base plane of a precision machine tool based on laser measurement, and the method specifically includes:
(1) construction of measuring platform
The measuring platform mainly comprises two parts, namely a base part and a measuring assembly, wherein as shown in fig. 2, the base part comprises a guide rail and a standard gauge block 1, the standard gauge block 1 is flatly placed on a guide rail base surface to be measured, and the vertical straightness error of the guide rail base surface is reflected by the gauge block; the measuring assembly comprises a laser interferometer and a laser displacement sensor 5 assembly, a reflecting mirror 2 of the laser interferometer is fixed on the gauge block through a magnetic seat 4 and a connecting rod 3, and straightness, angle error and the like when the gauge block moves on the guide rail surface are measured through the laser interferometer. A laser head of a laser interferometer is arranged on one side of a guide rail to be measured through a micro-motion platform, a reflecting mirror 2 of the laser interferometer is arranged on the top of a standard gauge block 1 and is arranged towards the laser head, and a laser displacement sensor 5 is arranged on the standard gauge block 1 and is positioned on the front side of the standard gauge block 1; the laser displacement sensor 5 and the mounting clamp 6 thereof are fixed together through screws, then the clamp 6 is adsorbed on the strong magnet 7, and the magnet 7 is fixed on the gauge block through magnetic force. Therefore, when the gauge block moves on the base surface of the guide rail, corresponding moving error items can be reflected through the laser interferometer and the laser displacement sensor 5 at the same time, and finally, the straightness error of the precise guide rail can be identified.
Description of other component installation: the laser head of the laser interferometer is placed on the micro-motion platform and then is arranged on one side of the guide rail, and 3 displacements in the vertical direction can be adjusted through the micro-motion platform so as to adjust the light path collimation of the laser interferometer. And temperature and humidity sensors 5 are installed to compensate for the effects of ambient temperature, humidity and material temperature on the measurement results. The laser displacement sensor 5 can adjust the installation position and angle to be within the most suitable measurement range.
(2) Acquiring guide rail base surface measurement data:
after the measuring platform is built, the laser interferometer and the laser displacement sensor 5 are preheated through power supply, the measuring light path of the laser interferometer is adjusted, the fact that the readings of the laser displacement sensor 5 are normally displayed is confirmed, the length of the standard gauge block 1 is used as a step length, measuring parameters of the laser interferometer are set according to the stroke, the readings of the laser interferometer at the starting point return to zero, the value of the displacement sensor 5 at the starting point is recorded, the step length of the gauge block length is moved every time, and the position to which the gauge block moves every time is marked on the guide rail according to the step length. And starting to move the gauge block, triggering the laser interferometer controller after moving to the specified position, automatically acquiring data by the controller, recording the reading of the displacement sensor 5 at the moment, and repeating the steps for a plurality of times until the stroke end point measurement is finished. When the gauge block is moved, the gauge block is tightly attached to the side surface of the guide rail, and the magnetic suction seat and the strong magnet 7 are not required to be touched. Thus, the required data is collected.
It should be noted that the laser interferometer adopted by the measuring platform can measure the geometric error of the 6-term moving pair once, so that the required data can be acquired after moving one whole course. If a conventional laser interferometer such as Renysha XL80 is used, it is necessary to mount different lens sets several times and repeat the measurement several times to obtain all the required error terms. Since the present invention uses no such interferometer, it will not be further described.
(3) And (3) processing data:
the guide rail base surface is generally subjected to precision adjustment in a scraping and leveling mode, the precision is high, but the influence of various error factors is blended into common measurement data, and the loss of the measurement precision can be brought by neglecting the influence of the factors. The error introduced by the measuring mode of the measuring platform mainly comprises the straightness accuracy deviation of the standard gauge block 1 during movementyxAnd pitch angle deviation among angle deviationszxDeviation of roll anglexxThese three errors introduce large measurement errors. Therefore, the angle deviation can be obtained by adding the laser interferometer measurementzx、xxAnd the combined straightness errorysxMotion of any rigid body in space can be converted into movement of a point on the rigid body and rotation around the point, depending on the nature of the spatial motion of the rigid body. Accordingly, the movement of the gauge block and the displacement sensor 5 is accurately expressed according to the rotation theory in the robot kinematics, the measurement starting point is used as the zero point of the global coordinate system, the coordinate axis direction is defined as shown in fig. 2, and the displacement of the gauge block movement is x. Firstly, the comprehensive straightness error of a reflecting mirror 2 of a laser interferometer fixedly connected on a gauge block is expressedysxDeriving the straightness deviation of a point on the winding gauge blockyxRoot of another generationFrom derived straightness deviationyxAnd the measured amount of angular deviationzx、xxEstablishing a motion model of the sensor 5 to further obtain the linearity deviation of the sensor 5ylxFinally, the reading result y is measured by the sensor 5lxStarting point index y of sensor 5lx0Deviation from straightness of the sensor 5ylxAnd calculating to obtain the straightness error of the guide rail base plane at the measuring position of the sensor 5ygx。
The specific data processing process is as follows:
as shown in the figure, the y-direction straightness is measured, the solved straightness is also the y-direction straightness, and the coordinate system direction is shown in the figure.
The measuring point on the reflecting mirror of the laser interferometer is P, and the initial position is P0，
Wherein,
initial position p0Comprises the following steps:
p0＝[xp0,yp0,zp0,1]T(2)
wherein x isp0,yp0,zp0Is p0Coordinate values in X, Y, Z three directions;
pxais an initial position p0The actual position when moving in the X direction;
a transformation matrix translated in the X direction expressed as a quantum;
a transformation matrix for translation along the straightness error Y direction expressed in terms of a vector;
a transformation matrix rotated in the X direction expressed as a rotation;
a transformation matrix for rotation in the Z direction expressed in terms of the amount of rotation.
Suppose that
pxa＝[xxpa,yxpa,zxpa,1]T(3)
Wherein x isxpa,yxpa,zxpaIs pxaThe coordinate values in the three directions of X, Y, Z,
then the resultant straightness errorysxComprises the following steps:
ysx＝yxpa-yp0(4)
wherein,
yxpa＝yp0cosxxcoszx+yxcosxxcoszx-zp0coszxsinxx+xp0sinzx(5)
the minimum error term in the test can be simplified, namely the method can obtain
yxpa＝yp0+yx-zp0sinxx+xp0sinzx(6)
Thus, it can be calculated from (4) and (6)
ysx＝yx-zp0sinxx+xp0sinzx(7)
Thereby having
yx＝ysx+zp0sinxx-xp0sinzx(8)
Likewise, the point on the measuring head of the displacement sensor is Q, the starting position Q of which0Is composed of
q0＝[0,yq0,0,1]T(9)
Wherein, yq0Is q0Coordinate values in the Y direction;
the actual position of point Q when moving in the x-direction is:
qxa＝[xxqa,yxqa,zxqa,1]T(10)
wherein xxqa,yxqa,zxqaIs qxaCoordinate values in three directions of XYZ are
And is provided with
ylx＝yxqa-yq0(12)
The same principle as that of (7) can be obtained,
ylx＝yx-zq0sinxx+xq0sinzx(13)
straightness error of guide rail base plane
ygx＝ylx-ylx0-ylx(14)
Substituting (13) into (14) to obtain
ygx＝ylx-ylx0-yx+zq0sinxx-xq0sinzx(15)
Continuing to substitute (8) into (15) to obtain
ygx＝ylx-ylx0-ysx-zp0sinxx+xp0sinzx+zq0sinxx-xq0sinzx(16)
Is simplified into
ygx＝ylx-ylx0-ysx+(xp0-xq0)sinzx+(zq0-zp0)sinxx(17)
Accordingly, the corresponding straightness error is obtained through the measurement of the interferometerysxAnd pitch angle deviationzxDeviation of roll anglexxAnd the displacement sensor reading ylx、ylx0Plus a fixed known parameter xp0、xq0、zq0、zp0Namely, the straightness error of the base plane of the machine tool guide rail can be obtained by calculationygxThe exact numerical value of (c).
The above steps are shown in fig. 1.
As an application example, the measurement is carried out by the method as above, and the result curve of the obtained data is shown in FIG. 3. The results obtained using the above data processing method are plotted in fig. 4.
According to the research results of the predecessors, the straightness of the guide rail base surface always presents a certain sine-like waveform and has a certain wavelength. From the result curve of fig. 4, the above-mentioned research results are met, and the feasibility of the method of the present invention is demonstrated, but the present invention is not limited to this example.
The method can identify the straightness error of the guide rail base plane of the precision machine tool, and is suitable for the research of the detection and analysis of the production quality of the numerical control machine tool or the precision analysis of the machine tool.
It will be understood by those skilled in the art that the foregoing is only a preferred embodiment of the present invention, and is not intended to limit the invention, and that any modification, equivalent replacement, or improvement made within the spirit and principle of the present invention should be included in the scope of the present invention.
Claims (4)
1. A decoupling identification method for guide rail base plane straightness errors is characterized by comprising the following steps:
(1) building a measuring platform:
installing a laser head of a laser interferometer on one side of a guide rail to be measured, installing a reflecting mirror of the laser interferometer on the top of the standard gauge block and arranging the reflecting mirror towards the laser head, and installing a laser displacement sensor on the standard gauge block and positioned on the front side of the standard gauge block; horizontally placing the standard gauge block on a guide rail base surface to be measured;
(2) measuring and obtaining initial parameters:
the standard gauge block is made to abut against the surface to be measured of the guide rail, the standard gauge block is moved, and when the standard gauge block moves to a position, the measurement result of the laser interferometer and the measurement result y of the laser displacement sensor at the position are recordedlx(ii) a The measurement result of the laser interferometer comprises a pitch angle deviation in angle deviations when the standard gauge block moveszxDeviation of roll anglexxAnd combined straightness errorysx(ii) a Initial point index y of laser displacement sensorlx0；
(3) And (3) error data processing:
with a starting position P of a measuring point P on the mirror0As a zero point of a global coordinate system, the advancing direction of the standard gauge block is an X axis, the vertical direction is an upward Y axis, and a Z axis is determined by a right-hand rule;
according to the comprehensive straightness error of the reflecting mirror measured by the laser interferometerysxDeriving the straightness deviation of a certain point on the standard gauge blockyx(ii) a Derived fromyxAnd measured in step (2)zx、xxEstablishing a motion model of the laser displacement sensor to further obtain the straightness deviation of the laser displacement sensorylx；
According to the measurement result y of the laser displacement sensorlxInitial point indication y of laser displacement sensorlx0Deviation from straightness of laser displacement sensorylxAnd calculating to obtain the straightness error of the base surface of the guide railygx。
2. The decoupling identification method for the straightness error of the guide rail base surface according to claim 1, wherein the specific data processing process in the step (3) is as follows:
the measuring point on the reflecting mirror of the laser interferometer is P, and the initial position is P0，p0Actual position p when moving in the x-directionxaThe expression is as follows:
wherein the initial position p0The expression is as follows:
p0＝[xp0,yp0,zp0,1]T(2)
xp0,yp0,zp0is p0Coordinate values in X, Y, Z three directions;
a transformation matrix translated in the X direction expressed as a quantum;
a transformation matrix for translation along the straightness error Y direction expressed in terms of a vector;
a transformation matrix rotated in the X direction expressed as a rotation;
a transformation matrix for rotation in the Z direction expressed in terms of a rotation;
suppose that:
pxa＝[xxpa,yxpa,zxpa,1]T(3)
wherein x isxpa,yxpa,zxpaIs pxaThe coordinate values in the three directions of X, Y, Z,
then the resultant straightness errorysx：
ysx＝yxpa-yp0(4)
Wherein,
yxpa＝yp0+yx-zp0sinxx+xp0sinzx(6)
thus, according to (4) (6), there are obtained:
ysx＝yx-zp0sinxx+xp0sinzx(7)
thus, there are:
yx＝ysx+zp0sinxx-xp0sinzx(8)
similarly, the laser displacement sensor measures the point Q, its starting position Q0Comprises the following steps:
q0＝[0,yq0,0,1]T(9)
wherein, yq0Is q0Coordinate values in the Y direction;
actual position Q when point Q moves in the X directionxaComprises the following steps:
qxa＝[xxqa,yxqa,zxqa,1]T(10)
wherein xxqa,yxqa,zxqaIs qxaAt X, Y, Z, there are coordinate values
And, the straightness deviation of the laser displacement sensorylxComprises the following steps:
ylx＝yxqa-yq0(12)
the same principle as that of (7) can be obtained,
ylx＝yx-zq0sinxx+xq0sinzx(13)
and, straightness error of the guide rail base surfaceygxComprises the following steps:
ygx＝ylx-ylx0-ylx(14)
substituting (13) into (14) to obtain
ygx＝ylx-ylx0-yx+zq0sinxx-xq0sinzx(15)
Continuing to substitute (8) into (15) to obtain
ygx＝ylx-ylx0-ysx+(xp0-xq0)sinzx+(zq0-zp0)sinxx(17)
Wherein,ysx、zx、xxmeasured by a laser interferometer to obtain ylx、ylx0Obtained by reading the readings of a laser displacement sensor, xp0、xq0、zq0、zp0All the parameters are known, namely the straightness error of the guide rail base surface can be obtained by calculation according to the formula (17)ygxThe exact numerical value of (c).
3. The decoupling identification method for the straightness error of the base surface of the guide rail as claimed in claim 1 or 2, wherein in the step (1), the reflecting mirror of the laser interferometer is fixed on the gauge block through a magnetic suction seat and a connecting rod, and the angle of the reflecting mirror can be finely adjusted; the laser displacement sensor and the mounting clamp thereof are fixed together through screws, and then the mounting clamp is fixed on the gauge block through a strong magnet.
4. The decoupling identification method for the straightness error of the guide rail base surface according to claim 1 or 2, wherein: a laser head of the laser interferometer is fixed on the micro-motion platform and then is arranged on one side of the guide rail, and the micro-motion platform is used for adjusting the displacement of the laser head in X, Y, Z three directions so as to adjust the light path collimation of the laser interferometer.
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Cited By (15)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| CN107102618A (en) * | 2017-07-04 | 2017-08-29 | 广东创能精密机械有限公司 | The method that the Digit Control Machine Tool and its error compensation of error compensation can be carried out |
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| CN114690707A (en) * | 2021-12-01 | 2022-07-01 | 南京工业大学 | Numerical control forming gear grinding machine linear axis geometric comprehensive error identification method based on improved BP neural network |
| CN116086360A (en) * | 2023-04-11 | 2023-05-09 | 季华实验室 | Straightness error separation device and straightness error separation method for large-stroke OLED (organic light emitting diode) ink-jet printer |
| CN117685877A (en) * | 2023-10-30 | 2024-03-12 | 常州市大成真空技术有限公司 | Error influence factor analysis method of measuring device and measuring device |
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Citations (7)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| JPH07104812A (en) * | 1993-10-04 | 1995-04-21 | Fanuc Ltd | Position correcting system |
| WO1997008595A1 (en) * | 1995-08-29 | 1997-03-06 | Hesse Gmbh | Device for compensating guide tolerance in multi-axis positioners |
| CN101315276A (en) * | 2008-06-20 | 2008-12-03 | 潘旭华 | Emendation method for straightness error of numerical control machine slide rail |
| CN103278110A (en) * | 2013-05-28 | 2013-09-04 | 北京理工大学 | Compensation method for coupling error of guide rail |
| CN104748702A (en) * | 2015-03-26 | 2015-07-01 | 北京工业大学 | Rapid measuring and error compensation method for linearity error of linear guide rail |
| CN105841638A (en) * | 2016-05-13 | 2016-08-10 | 深圳市中图仪器科技有限公司 | Optical system applied to laser interferometer measuring guide rail linearity |
| CN106323202A (en) * | 2016-09-28 | 2017-01-11 | 西安交通大学 | Linear feed system's guide rail linearity measuring apparatus and method |
-
2017
- 2017-03-27 CN CN201710187911.3A patent/CN106767558B/en active Active
Patent Citations (7)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| JPH07104812A (en) * | 1993-10-04 | 1995-04-21 | Fanuc Ltd | Position correcting system |
| WO1997008595A1 (en) * | 1995-08-29 | 1997-03-06 | Hesse Gmbh | Device for compensating guide tolerance in multi-axis positioners |
| CN101315276A (en) * | 2008-06-20 | 2008-12-03 | 潘旭华 | Emendation method for straightness error of numerical control machine slide rail |
| CN103278110A (en) * | 2013-05-28 | 2013-09-04 | 北京理工大学 | Compensation method for coupling error of guide rail |
| CN104748702A (en) * | 2015-03-26 | 2015-07-01 | 北京工业大学 | Rapid measuring and error compensation method for linearity error of linear guide rail |
| CN105841638A (en) * | 2016-05-13 | 2016-08-10 | 深圳市中图仪器科技有限公司 | Optical system applied to laser interferometer measuring guide rail linearity |
| CN106323202A (en) * | 2016-09-28 | 2017-01-11 | 西安交通大学 | Linear feed system's guide rail linearity measuring apparatus and method |
Non-Patent Citations (2)
| Title |
|---|
| T.O.EKINCI,J.R.R.MAYER: "Relationships between straightness and angular kinematic errors in machines", 《INTERNATIONAL JOURNAL OF MACHINE TOOLS & MANUFACTURE》 * |
| 胡长德等: "基于激光干涉的长导轨直线度误差测量", 《光学仪器》 * |
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| CN107102618A (en) * | 2017-07-04 | 2017-08-29 | 广东创能精密机械有限公司 | The method that the Digit Control Machine Tool and its error compensation of error compensation can be carried out |
| CN108153234B (en) * | 2018-01-30 | 2023-08-04 | 中国工程物理研究院机械制造工艺研究所 | Full-freedom degree precision detection device for linear motion running state of machine tool |
| CN108153234A (en) * | 2018-01-30 | 2018-06-12 | 中国工程物理研究院机械制造工艺研究所 | The full degree of freedom accuracy detecting device of lathe linear motion run mode |
| CN108388199A (en) * | 2018-02-05 | 2018-08-10 | 上海交通大学 | Six-axis linkage electric spark machine tool kinematic optimization control method based on spinor |
| CN108844497A (en) * | 2018-06-07 | 2018-11-20 | 东北大学 | A kind of numerical control machine slide rail mounting surface linearity testing apparatus and method |
| CN109269422A (en) * | 2018-11-16 | 2019-01-25 | 厦门大学 | A kind of experimental method and device of the check and correction of dot laser displacement sensor error |
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| CN110482351A (en) * | 2019-08-05 | 2019-11-22 | 南京理工大学 | One kind is with straightness of elevator guide rail detection system and method |
| CN110440721A (en) * | 2019-08-19 | 2019-11-12 | 天津商业大学 | A kind of three-dimensional mobile platform movement angle error rapid measurement device and method |
| CN110794765A (en) * | 2019-11-20 | 2020-02-14 | 重庆大学 | Machine tool geometric error coupling decoupling measurement method |
| CN110794765B (en) * | 2019-11-20 | 2021-02-26 | 重庆大学 | Machine tool geometric error coupling decoupling measurement method |
| CN112536644B (en) * | 2020-11-11 | 2022-04-12 | 湖北文理学院 | Method for establishing motion error model of machine tool machining test piece |
| CN112536644A (en) * | 2020-11-11 | 2021-03-23 | 湖北文理学院 | Method for establishing motion error model of machine tool machining test piece |
| CN113798864A (en) * | 2021-10-19 | 2021-12-17 | 南京工艺装备制造有限公司 | Installation method of guide rail without side base surface |
| CN114690707B (en) * | 2021-12-01 | 2023-08-18 | 南京工业大学 | Numerical control forming gear grinding machine linear shaft geometric comprehensive error identification method based on improved BP neural network |
| CN114690707A (en) * | 2021-12-01 | 2022-07-01 | 南京工业大学 | Numerical control forming gear grinding machine linear axis geometric comprehensive error identification method based on improved BP neural network |
| CN114473537A (en) * | 2022-01-17 | 2022-05-13 | 天津大学 | Method for designing scraping curve of guide rail mounting base surface of machine tool |
| CN114473537B (en) * | 2022-01-17 | 2023-11-21 | 天津大学 | Design method for scraping curve of guide rail mounting base surface of machine tool |
| CN116086360A (en) * | 2023-04-11 | 2023-05-09 | 季华实验室 | Straightness error separation device and straightness error separation method for large-stroke OLED (organic light emitting diode) ink-jet printer |
| CN117685877A (en) * | 2023-10-30 | 2024-03-12 | 常州市大成真空技术有限公司 | Error influence factor analysis method of measuring device and measuring device |
| CN118067042A (en) * | 2024-04-18 | 2024-05-24 | 中机生产力促进中心有限公司 | Method, device, calculation and storage medium for identifying installation deflection angle of line laser measuring instrument |
| CN118067042B (en) * | 2024-04-18 | 2024-06-28 | 中机生产力促进中心有限公司 | Method, device, calculation and storage medium for identifying installation deflection angle of line laser measuring instrument |
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