CN205333035U - Little displacement sensor calibration device based on high accuracy rectilinear translation platform - Google Patents
Little displacement sensor calibration device based on high accuracy rectilinear translation platform Download PDFInfo
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- CN205333035U CN205333035U CN201620055146.0U CN201620055146U CN205333035U CN 205333035 U CN205333035 U CN 205333035U CN 201620055146 U CN201620055146 U CN 201620055146U CN 205333035 U CN205333035 U CN 205333035U
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- displacement sensor
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- leveling support
- fixed block
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Abstract
The utility model discloses a little displacement sensor calibration device based on high accuracy rectilinear translation platform, including leveling support, accurate rectilinear translation platform, dual -frenquency laser Interferometer system, gage block and little displacement sensor fixed block, accurate rectilinear translation platform by the leveling support supports, little displacement sensor fixed block rigid coupling is in on the leveling support it constructs to be equipped with little displacement sensor fixed knot on little displacement sensor fixed block, dual -frenquency laser Interferometer system includes speculum, interferoscope and laser head, the speculum with the gage block is all fixed on the movable parts of accurate rectilinear translation platform, the emergent ray and the light beam of dual -frenquency laser Interferometer system is on a parallel with little displacement sensor's motion axis to the symmetric distribution is in these motion axis both sides. The utility model discloses can mark little displacement sensor to confirm the input -output relation between its displacement volume and the digital output value.
Description
Technical field
This utility model relates to a kind of caliberating device, particularly a kind of calibration device of micro-displacement sensor based on high accuracy rectilinear translation platform。
Background technology
The precision of used instrument is detected by the metrical instrument that demarcation is use standard, to determine instrument or the Input output Relationship of the system of measurement, it is determined that the static characteristic index of instrument or the system of measurement, eliminates systematic error, improves the precision of instrument or system。In actual applications, the digital quantity that the shift value with micro-displacement sensor that host computer receives is corresponding to be converted into the shift value of reality through a kind of corresponding relation determined, general conventional method has function method and interpolation method。Function method is it needs to be determined that input-output function relational expression y=f (x), but generally this functional expression is difficult to determine, if micro-displacement sensor used has good stability and repeatability, the method that now can adopt demarcation, obtain one group of measurement data, according to these measurement data, interpolation method is utilized to obtain the corresponding relation of input-output in gamut。
Summary of the invention
This utility model provides a kind of calibration device of micro-displacement sensor based on high accuracy rectilinear translation platform for solving the technical problem of existence in known technology, this device is adopted can micro-displacement sensor to be demarcated, to determine the Input output Relationship between its displacement and digital output value。
This utility model is that the technical problem solving to exist in known technology is adopted the technical scheme that: a kind of calibration device of micro-displacement sensor based on high accuracy rectilinear translation platform, including leveling support, accurate straight line translation stage, dual-frequency laser interferometer system, gauge block and micro-displacement sensor fixed block；Described accurate straight line translation stage is supported by described leveling support；Described micro-displacement sensor fixed block is fixed on described leveling support, is provided with micro-displacement sensor fixed structure on described micro-displacement sensor fixed block；Described dual-frequency laser interferometer system includes reflecting mirror, interferoscope and laser head, described reflecting mirror and described gauge block are each attached on the movable member of described accurate straight line translation stage, the emergent ray of described dual-frequency laser interferometer system and reflection light ray parallel are in the axis of movement of micro-displacement sensor, and are symmetrically distributed in this axis of movement both sides。
Described leveling support is made up of leveling support A and leveling support B；Being provided with two levelling bolts I on described leveling support A, two described levelling bolts I set up separately at the two ends of described leveling support A；Being provided with a levelling bolt II on described leveling support B, described levelling bolt II is arranged on the central authorities of described leveling support B；Described micro-displacement sensor fixed block is fixed on described leveling support B；Steel ball all it is embedded with in the bottom of described levelling bolt I and described levelling bolt II。
Described micro-displacement sensor fixed structure includes forming the jaw at described micro-displacement sensor fixed block top, described jaw adopts bolt-locking, in described jaw, it is fixed with the sheath being sleeved on outside micro-displacement sensor, the sidewall of described sheath is provided with the opening extended along its bus。
Described gauge block is affixed with the movable member of described accurate straight line translation stage by gauge block fixed block, described gauge block fixed block is fixed on the movable member of described accurate straight line translation stage, the upper surface of described gauge block fixed block is formed with mounting groove, described gauge block is installed in described mounting groove, described gauge block adopts the holding screw being arranged on its side to lock in described mounting groove, being provided with backing plate on the side of described holding screw at described gauge block, described holding screw is pressed on described backing plate。
This utility model has the advantage that and has the benefit effect that the accurate straight line translation stage of employing is as motion driver part, its displacement is measured by dual-frequency laser interferometer system, micro-displacement sensor to be calibrated is fixed on micro-displacement sensor fixed block, and make the position relationship of micro-displacement sensor to be calibrated and dual-frequency laser interferometer system meet abbe ' s principle, it is possible to ensure accuracy and the reliability of calibration result。
Accompanying drawing explanation
Fig. 1 is structural representation of the present utility model；
Fig. 2 is front view of the present utility model；
Fig. 3 is top view of the present utility model；
Fig. 4 is the structural representation of levelling bolt I of the present utility model and levelling bolt II。
In figure: 1-precision straight line translation stage, 21-leveling support A, 211-levelling bolt I, 22-leveling support B, 221-levelling bolt II, 3-micro-displacement sensor fixed block, 31-bolt, 32-sheath, 4-micro-displacement sensor, 5-gauge block, 6-gauge block fixed block, 7-holding screw, 8-backing plate, 91-reflecting mirror, 92-interferoscope, 93-laser head, 10-steel ball。
Detailed description of the invention
For summary of the invention of the present utility model, feature and effect can be further appreciated that, hereby enumerate following example, and it be as follows to coordinate accompanying drawing to describe in detail:
Referring to Fig. 1～Fig. 4, a kind of calibration device of micro-displacement sensor based on high accuracy rectilinear translation platform, including leveling support, accurate straight line translation stage 1, dual-frequency laser interferometer system, gauge block 5 and micro-displacement sensor fixed block 3。
Described accurate straight line translation stage 1 is supported by described leveling support。
Described micro-displacement sensor fixed block 3 is fixed on described leveling support, is provided with micro-displacement sensor fixed structure on described micro-displacement sensor fixed block 3。
Described dual-frequency laser interferometer system includes reflecting mirror 91, interferoscope 92 and laser head 93, described reflecting mirror 91 and described gauge block 5 are each attached on the movable member of described accurate straight line translation stage 1, the emergent ray of described dual-frequency laser interferometer system and reflection light ray parallel are in the axis of movement of micro-displacement sensor 4, and are symmetrically distributed in this axis of movement both sides。
In the present embodiment, described leveling support is made up of leveling support A21 and leveling support B22；Being provided with two levelling bolts I 211 on described leveling support A21, two described levelling bolts I 211 set up separately at the two ends of described leveling support A21；Being provided with a levelling bolt II 221 on described leveling support B22, described levelling bolt II 221 is arranged on the central authorities of described leveling support B22；Described micro-displacement sensor fixed block 3 is fixed on described leveling support B22；All it is embedded with steel ball 10 in the bottom of described levelling bolt I 211 and described levelling bolt II 221, utilizes three steel balls can realize 3 leveling。
Described micro-displacement sensor fixed structure includes forming the jaw at described micro-displacement sensor fixed block 3 top, described jaw adopts bolt 31 to lock, in described jaw, it is fixed with the sheath 32 being sleeved on outside micro-displacement sensor 4, the sidewall of described sheath 32 is provided with the opening extended along its bus。
Described gauge block 5 is affixed with the movable member of described accurate straight line translation stage 1 by gauge block fixed block 6, described gauge block fixed block 6 is fixed on the movable member of described accurate straight line translation stage 1, the upper surface of described gauge block fixed block 6 is formed with mounting groove, described gauge block 5 is installed in described mounting groove, described gauge block 5 adopts the holding screw 7 being arranged on its side to lock in described mounting groove, being provided with backing plate 8 on the side of described holding screw 7 at described gauge block 5, described holding screw 7 is pressed on described backing plate 8。
Operation principle of the present utility model:
Accurate straight line translation stage 1 drives gauge block 5 to move, making micro-displacement sensor 4 produce displacement, displacement is indicated by dual-frequency laser interferometer system, records the indicating value of system and the digital output value of corresponding position micro-displacement sensor 4, to determine the Input output Relationship of micro-displacement sensor 4, complete to demarcate。
The start bit of micro-displacement sensor 4 and most final position are spatially symmetrical about its electrical zero, and between start bit and most final position, the input of micro-displacement sensor 4 and output have good linear relationship。Timing signal, first at the position reset dual-frequency laser interferometer system of electrical zero, making its reading is 0, then, control accurate straight line translation stage 1 so that it is motion same distance, i.e. uniform sampling site in the range ability of micro-displacement sensor 4 every time, recording digital output value corresponding to each position and dual-frequency laser interferometer system indicating value, calibration result takes the meansigma methods of repetitive measurement。
Although preferred embodiment of the present utility model being described above in conjunction with accompanying drawing; but this utility model is not limited to above-mentioned detailed description of the invention; above-mentioned detailed description of the invention is merely schematic; it is not restrictive; those of ordinary skill in the art is under enlightenment of the present utility model; without departing under this utility model objective and scope of the claimed protection situation, it is also possible to making a lot of form, these belong within protection domain of the present utility model。
Claims (4)
1. the calibration device of micro-displacement sensor based on high accuracy rectilinear translation platform, it is characterised in that include leveling support, accurate straight line translation stage, dual-frequency laser interferometer system, gauge block and micro-displacement sensor fixed block；
Described accurate straight line translation stage is supported by described leveling support；
Described micro-displacement sensor fixed block is fixed on described leveling support, is provided with micro-displacement sensor fixed structure on described micro-displacement sensor fixed block；
Described dual-frequency laser interferometer system includes reflecting mirror, interferoscope and laser head, described reflecting mirror and described gauge block are each attached on the movable member of described accurate straight line translation stage, the emergent ray of described dual-frequency laser interferometer system and reflection light ray parallel are in the axis of movement of micro-displacement sensor, and are symmetrically distributed in this axis of movement both sides。
2. the calibration device of micro-displacement sensor based on high accuracy rectilinear translation platform according to claim 1, it is characterised in that described leveling support is made up of leveling support A and leveling support B；
Being provided with two levelling bolts I on described leveling support A, two described levelling bolts I set up separately at the two ends of described leveling support A；
Being provided with a levelling bolt II on described leveling support B, described levelling bolt II is arranged on the central authorities of described leveling support B；Described micro-displacement sensor fixed block is fixed on described leveling support B；
Steel ball all it is embedded with in the bottom of described levelling bolt I and described levelling bolt II。
3. the calibration device of micro-displacement sensor based on high accuracy rectilinear translation platform according to claim 1, it is characterized in that, described micro-displacement sensor fixed structure includes forming the jaw at described micro-displacement sensor fixed block top, described jaw adopts bolt-locking, in described jaw, it is fixed with the sheath being sleeved on outside micro-displacement sensor, the sidewall of described sheath is provided with the opening extended along its bus。
4. the calibration device of micro-displacement sensor based on high accuracy rectilinear translation platform according to claim 1, it is characterized in that, described gauge block is affixed with the movable member of described accurate straight line translation stage by gauge block fixed block, described gauge block fixed block is fixed on the movable member of described accurate straight line translation stage, the upper surface of described gauge block fixed block is formed with mounting groove, described gauge block is installed in described mounting groove, described gauge block adopts the holding screw being arranged on its side to lock in described mounting groove, on the side of described holding screw, it is provided with backing plate at described gauge block, described holding screw is pressed on described backing plate。
Priority Applications (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| CN201620055146.0U CN205333035U (en) | 2016-01-20 | 2016-01-20 | Little displacement sensor calibration device based on high accuracy rectilinear translation platform |
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| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| CN201620055146.0U CN205333035U (en) | 2016-01-20 | 2016-01-20 | Little displacement sensor calibration device based on high accuracy rectilinear translation platform |
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| CN205333035U true CN205333035U (en) | 2016-06-22 |
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| Application Number | Title | Priority Date | Filing Date |
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| CN201620055146.0U Expired - Fee Related CN205333035U (en) | 2016-01-20 | 2016-01-20 | Little displacement sensor calibration device based on high accuracy rectilinear translation platform |
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Cited By (3)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| CN105606052A (en) * | 2016-01-20 | 2016-05-25 | 天津大学 | Micro displacement sensor calibration apparatus based on high-precision rectilinear translation bench |
| CN107024190A (en) * | 2017-05-31 | 2017-08-08 | 北京航空航天大学 | A kind of non-contact displacement transducer calibration facility being used under hot environment |
| CN112729087A (en) * | 2020-12-16 | 2021-04-30 | 中国科学院苏州生物医学工程技术研究所 | Differential eddy current micro-displacement sensor calibration device, method, computer equipment and storage medium |
-
2016
- 2016-01-20 CN CN201620055146.0U patent/CN205333035U/en not_active Expired - Fee Related
Cited By (5)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| CN105606052A (en) * | 2016-01-20 | 2016-05-25 | 天津大学 | Micro displacement sensor calibration apparatus based on high-precision rectilinear translation bench |
| CN105606052B (en) * | 2016-01-20 | 2018-10-26 | 天津大学 | Calibration device of micro-displacement sensor based on high-precision rectilinear translation platform |
| CN107024190A (en) * | 2017-05-31 | 2017-08-08 | 北京航空航天大学 | A kind of non-contact displacement transducer calibration facility being used under hot environment |
| CN112729087A (en) * | 2020-12-16 | 2021-04-30 | 中国科学院苏州生物医学工程技术研究所 | Differential eddy current micro-displacement sensor calibration device, method, computer equipment and storage medium |
| CN112729087B (en) * | 2020-12-16 | 2022-03-22 | 中国科学院苏州生物医学工程技术研究所 | Differential eddy current micro-displacement sensor calibration device, method, computer equipment and storage medium |
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Granted publication date: 20160622 Termination date: 20200120 |
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| CF01 | Termination of patent right due to non-payment of annual fee |