CN209512775U - A kind of calibrating installation of laser displacement sensor - Google Patents

A kind of calibrating installation of laser displacement sensor Download PDF

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Publication number
CN209512775U
CN209512775U CN201920435321.2U CN201920435321U CN209512775U CN 209512775 U CN209512775 U CN 209512775U CN 201920435321 U CN201920435321 U CN 201920435321U CN 209512775 U CN209512775 U CN 209512775U
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CN
China
Prior art keywords
guide rail
displacement sensor
laser displacement
turntable
calibrating installation
Prior art date
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Expired - Fee Related
Application number
CN201920435321.2U
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Chinese (zh)
Inventor
郑伟峰
蒋淑恋
郑尚榜
谢汉斌
陈炯宇
Current Assignee (The listed assignees may be inaccurate. Google has not performed a legal analysis and makes no representation or warranty as to the accuracy of the list.)
XIAMEN INSTITUTE OF MEASUREMENT AND TESTING
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XIAMEN INSTITUTE OF MEASUREMENT AND TESTING
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed by XIAMEN INSTITUTE OF MEASUREMENT AND TESTING filed Critical XIAMEN INSTITUTE OF MEASUREMENT AND TESTING
Priority to CN201920435321.2U priority Critical patent/CN209512775U/en
Application granted granted Critical
Publication of CN209512775U publication Critical patent/CN209512775U/en
Expired - Fee Related legal-status Critical Current
Anticipated expiration legal-status Critical

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Abstract

The utility model provides a kind of calibrating installation of laser displacement sensor, including laser calibration component, guide rail, grating scale and bracket;Two induction pieces are successively arranged along axial direction on guide rail;Bracket is located between two induction pieces and along the axially movable setting of guide rail;Laser calibration component includes laser interferometer, spectroscope and the reflective mirror that setting is axially corresponding in turn to along guide rail, and reflective mirror is set on bracket;Grating scale is arranged in parallel with guide rail;Bracket is equipped with turntable, and turntable is rotatably arranged, so that the induction end for the laser displacement sensor to be calibrated being placed on turntable is towards any one induction pieces.The calibrating installation of the laser displacement sensor is easy to operate and applicability is stronger.

Description

A kind of calibrating installation of laser displacement sensor
Technical field
The utility model relates to measurement verification and calibration field, in particular to a kind of calibration cartridges of laser displacement sensor It sets.
Background technique
Currently, there is the laser displacement sensor of different brands and type on the market.Because application is different, Measurement accuracy also requires different, and the measurement accuracy of the laser displacement sensor of full accuracy grade can reach micro/nano level.It is existing There is technology to be calibrated using gauging machine as measurement criteria, if the laser displacement sensor of different measurement accuracy class requirements It is measured with the same gauging machine, then there may be the problem wasted one's talent on a petty job or precision is inadequate, applicability is not strong enough, in addition, The problems such as there is also inconvenient, measurement result uncertainty is low, measurement result is repeated low is measured with single gauging machine.
Utility model content
The technical problem to be solved by the utility model is to provide a kind of stronger laser displacements of easy to operate and applicability The calibrating installation of sensor.
In order to solve the above-mentioned technical problem, the technical solution adopted in the utility model are as follows:
A kind of calibrating installation of laser displacement sensor, including laser calibration component, guide rail, grating scale and bracket;
Two induction pieces are successively arranged along axial direction on the guide rail;
The bracket is located between two induction pieces and along the axially movable setting of guide rail;
The laser calibration component includes the laser interferometer that setting is axially corresponding in turn to along guide rail, spectroscope and reflective Mirror, the reflective mirror are set on bracket;
The grating scale is arranged in parallel with guide rail;
The bracket is equipped with turntable, and the turntable is rotatably arranged, so that being placed in the laser to be calibrated on turntable The induction end of displacement sensor is towards any one induction pieces.
Further, the number of the guide rail is two.
Further, two induction pieces are respectively arranged on two ends of guide rail.
Further, the both ends of the grating scale extend respectively to two ends of guide rail along the axial direction of guide rail.
It further, further include linear motor, the linear motor driving arm is mobile.
Further, the induction pieces are reflective sheeting, and the reflective surface of two reflective sheetings is oppositely arranged.
Further, the number of the turntable is two, two turntables along perpendicular to guide rail axially direction according to Secondary setting, the direction of reflective mirror line between two turntables are located at the centre of two turntables.
Further, the number of the turntable is at least two, and at least two turntable is along perpendicular to guide rail axial direction Direction set gradually.
The utility model has the beneficial effects that:
(1) this calibrating installation is suitable for the laser displacement sensor of all kinds of high-precisions and low precision, for a large amount of on the market Low Accuracy Displacement sensor, grating scale can be used and be compared as measurement criteria, so that calibration result is obtained, for city A small amount of high precision laser displacement sensor on face just uses this set of school with high accuracy of laser interferometer, spectroscope and reflective mirror Standard apparatus is calibrated.
(2) rotatably it is arranged for placing the turntable of the laser displacement sensor with calibration, after single direction stroke is calibrated, Turntable is rotated, it, in this way can be from another in backhaul so that induction pieces of the induction end of laser displacement sensor towards the other end Side re-starts calibration, to reduce the number of mobile bracket, operates enhanced convenience.
Detailed description of the invention
Fig. 1 is the structural schematic diagram of the calibrating installation of the laser displacement sensor of the utility model embodiment;
Label declaration:
10, laser calibration component;11, laser interferometer;12, spectroscope;13, reflective mirror;
20, guide rail;
30, bracket;31, turntable;
40, induction pieces;
50, grating scale;
60, laser displacement sensor.
Specific embodiment
For technology contents, the objects and the effects that the utility model is described in detail, below in conjunction with embodiment and match Attached drawing is closed to be explained.
The design of the utility model most critical is: adapting to various precision using the combination of grating scale and laser interferometer Sensor, while reducing the mobile number of bracket by the way that turntable is arranged.
Please refer to Fig. 1, a kind of calibrating installation of laser displacement sensor, including laser calibration component 10, guide rail 20, grating Ruler 50 and bracket 30;
Two induction pieces 40 are successively arranged along axial direction on the guide rail 20;
The bracket 30 is located between two induction pieces 40 and along the axially movable setting of guide rail 20;
The laser calibration component 10 includes along axial laser interferometer 11, the spectroscope 12 for being corresponding in turn to setting of guide rail 20 With reflective mirror 13, the reflective mirror 13 is set on bracket 30;
The grating scale 50 is arranged in parallel with guide rail 20;
The bracket 30 is equipped with turntable 31, the rotatably setting of the turntable 31 so that be placed on turntable 31 to school The induction end of quasi- laser displacement sensor 60 is towards any one induction pieces 40.
As can be seen from the above description, the utility model has the beneficial effects that:
(1) this calibrating installation is suitable for the laser displacement sensor of all kinds of high-precisions and low precision, for a large amount of on the market Low Accuracy Displacement sensor, grating scale can be used and be compared as measurement criteria, so that calibration result is obtained, for city A small amount of high precision laser displacement sensor on face just uses this set of school with high accuracy of laser interferometer, spectroscope and reflective mirror Standard apparatus is calibrated.
(2) rotatably it is arranged for placing the turntable of the laser displacement sensor with calibration, after single direction stroke is calibrated, Turntable is rotated, it, in this way can be from another in backhaul so that induction pieces of the induction end of laser displacement sensor towards the other end Side re-starts calibration, to reduce the number of mobile bracket, operates enhanced convenience.
Further, the number of the guide rail 20 is two.
Seen from the above description, using double guide rail structures, it is ensured that hang down between laser displacement sensor 60 and induction pieces 40 Straight degree requires, and effectively reduces the uncertainty of measurement result.
Further, two induction pieces 40 are respectively arranged on two ends of guide rail 20.
Further, the both ends of the grating scale 50 extend respectively to two ends of guide rail 20 along the axial direction of guide rail 20.
Seen from the above description, the space of entire guide rail 20 is adequately utilized, measurement range is bigger.
It further, further include linear motor, the linear motor driving arm 30 is mobile.
Further, the induction pieces 40 are reflective sheeting, and the reflective surface of two reflective sheetings is oppositely arranged.
Further, the number of the turntable 31 is two, and two turntables 31 are along perpendicular to 20 axial direction of guide rail Direction is set gradually, and the direction of the reflective mirror 13 line between two turntables 31 is located at the centre of two turntables 31.
Seen from the above description, laser interferometer 11 also is located between two turntables 31, it is possible to reduce Abbe error.
Further, the number of the turntable 31 is at least two, and at least two turntable 31 is along perpendicular to guide rail 20 axially directions are set gradually.
It seen from the above description, can the multiple laser displacement sensor 60 of primary calibration.
Please refer to Fig. 1, the embodiments of the present invention one are as follows:
A kind of calibrating installation of laser displacement sensor, including laser calibration component 10, guide rail 20, grating scale 50 and bracket 30;
The guide rail 20 is double guide rail structures, and the guide rail 20 is respectively equipped with reflective sheeting along its two axial end, two The reflective surface of a reflective sheeting is oppositely arranged;
The grating scale 50 is arranged in parallel with guide rail 20 and the both ends of grating scale 50 extend respectively to two of guide rail 20 Grating scale 50 can be bonded on the outer wall for being set to guide rail 20 in order to which structure is more compact, also facilitate later observation by end;
The bracket 30 is set on guide rail 20 and along the axially movable setting of guide rail 20, and the bracket 30 is located at two instead Between machine-glazed paper, set on the bracket 30 there are two turntable 31, two turntables 31 along perpendicular to 20 axially direction of guide rail according to Secondary setting, the rotatably setting of turntable 31, so that the sense for the laser displacement sensor 60 to be calibrated being placed on turntable 31 The reflective sheeting towards any side should be held, laser displacement sensor 60 can feed back itself when the reflective sheeting towards side is mobile This distance is compared, so that it may obtain the lower calibration of precision by the moving distance detected with the numerical value on grating scale 50 As a result;
For the calibration structure for needing accuracy class high, need using the laser calibration component 10, the laser calibration Component 10 includes the laser interferometer 11 axially set gradually along guide rail 20, spectroscope 12 and reflective mirror 13, laser interferometer 11 It is fixedly installed with spectroscope 12, reflective mirror 13 is then set between two turntables 31, laser interferometer 11, spectroscope 12 and reflective mirror 13 are located along the same line (dotted line in Fig. 1 is index path), and such laser interferometer 11 can measure reflective mirror 13 with branch The mobile moving distance of frame 30, the result that this result is detected with laser displacement sensor 60 compare, so that it may obtain high-precision Spend calibration result.
The turntable 31 also can be set into it is multiple, such as four or five, as long as the setting of reflective mirror 13 at this time is being propped up Frame 30.When there is multiple turntables 31, every side of guide rail 20 also can be set multiple to be arranged in a one-to-one correspondence with turntable 31 Reflective sheeting.
In the present embodiment, bracket 30 is driven using linear motor, can also be with manual actuation.
In conclusion the utility model provides a kind of school of the stronger laser displacement sensor of easy to operate and applicability Standard apparatus.The calibrating installation of the laser displacement sensor is suitable for the laser displacement sensor of all kinds of high-precisions and low precision, For a large amount of low Accuracy Displacement sensor on the market, grating scale can be used and be compared as measurement criteria, to obtain Calibration result, for a small amount of high precision laser displacement sensor on the market, just using laser interferometer, spectroscope and reflective mirror this A set of calibrating installation with high accuracy is calibrated;Turntable for placing the laser displacement sensor with calibration is rotatably arranged, After single direction stroke is calibrated, turntable is rotated, so that induction pieces of the induction end of laser displacement sensor towards the other end, in this way Calibration can be re-started from the other side in backhaul, to reduce the number of mobile bracket, operates enhanced convenience;Using Double guide rail structures, it is ensured that verticality requirement between laser displacement sensor and induction pieces effectively reduces measurement result It is uncertain;Laser interferometer is located between two turntables, so as to reduce Abbe error.
The above description is only the embodiments of the present invention, and therefore it does not limit the scope of the patent of the utility model, all Equivalents made based on the specification and figures of the utility model are applied directly or indirectly in relevant technology neck Domain is also included in the patent protection scope of the utility model.

Claims (8)

1. a kind of calibrating installation of laser displacement sensor, which is characterized in that including laser calibration component, guide rail, grating scale and Bracket;
Two induction pieces are successively arranged along axial direction on the guide rail;
The bracket is located between two induction pieces and along the axially movable setting of guide rail;
The laser calibration component includes laser interferometer, spectroscope and the reflective mirror that setting is axially corresponding in turn to along guide rail, institute Reflective mirror is stated on bracket;
The grating scale is arranged in parallel with guide rail;
The bracket is equipped with turntable, and the turntable is rotatably arranged, so that being placed in the laser displacement to be calibrated on turntable The induction end of sensor is towards any one induction pieces.
2. the calibrating installation of laser displacement sensor according to claim 1, which is characterized in that the number of the guide rail is Two.
3. the calibrating installation of laser displacement sensor according to claim 1, which is characterized in that two induction pieces It is respectively arranged on two ends of guide rail.
4. the calibrating installation of laser displacement sensor according to claim 3, which is characterized in that the both ends of the grating scale Two ends of guide rail are extended respectively to along the axial direction of guide rail.
5. the calibrating installation of laser displacement sensor according to claim 1, which is characterized in that it further include linear motor, The linear motor driving arm is mobile.
6. the calibrating installation of laser displacement sensor according to claim 1, which is characterized in that the induction pieces are reflective The reflective surface of paper, two reflective sheetings is oppositely arranged.
7. the calibrating installation of laser displacement sensor according to claim 1, which is characterized in that the number of the turntable is Two, along setting gradually perpendicular to guide rail axially direction, the reflective mirror connects two turntables between two turntables The direction of line is located at the centre of two turntables.
8. the calibrating installation of laser displacement sensor according to claim 1, which is characterized in that the number of the turntable is At least two, at least two turntable edge is set gradually perpendicular to guide rail axially direction.
CN201920435321.2U 2019-04-02 2019-04-02 A kind of calibrating installation of laser displacement sensor Expired - Fee Related CN209512775U (en)

Priority Applications (1)

Application Number Priority Date Filing Date Title
CN201920435321.2U CN209512775U (en) 2019-04-02 2019-04-02 A kind of calibrating installation of laser displacement sensor

Applications Claiming Priority (1)

Application Number Priority Date Filing Date Title
CN201920435321.2U CN209512775U (en) 2019-04-02 2019-04-02 A kind of calibrating installation of laser displacement sensor

Publications (1)

Publication Number Publication Date
CN209512775U true CN209512775U (en) 2019-10-18

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Family Applications (1)

Application Number Title Priority Date Filing Date
CN201920435321.2U Expired - Fee Related CN209512775U (en) 2019-04-02 2019-04-02 A kind of calibrating installation of laser displacement sensor

Country Status (1)

Country Link
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Cited By (1)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
CN113418454A (en) * 2021-08-25 2021-09-21 常州伊贝基位移科技有限公司 Closed-loop precision calibration and detection device of photoelectric displacement sensor

Cited By (1)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
CN113418454A (en) * 2021-08-25 2021-09-21 常州伊贝基位移科技有限公司 Closed-loop precision calibration and detection device of photoelectric displacement sensor

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Granted publication date: 20191018